WO2012023338A1 - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
- Publication number
- WO2012023338A1 WO2012023338A1 PCT/JP2011/063893 JP2011063893W WO2012023338A1 WO 2012023338 A1 WO2012023338 A1 WO 2012023338A1 JP 2011063893 W JP2011063893 W JP 2011063893W WO 2012023338 A1 WO2012023338 A1 WO 2012023338A1
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- WO
- WIPO (PCT)
- Prior art keywords
- rail
- traveling
- route
- article transport
- transport vehicle
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61J—SHIFTING OR SHUNTING OF RAIL VEHICLES
- B61J1/00—Turntables; Traversers; Transporting rail vehicles on other rail vehicles or dollies
- B61J1/02—Turntables; Integral stops
- B61J1/06—Turntables; Integral stops for railways with suspended vehicles, e.g. aerial rope railways
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Definitions
- the present invention includes an article transport vehicle that includes traveling wheels and that can travel by being supplied with driving power from a power supply line disposed along the traveling path, and a first path and a second path as the traveling path. And at the intersection where the first route and the second route cross each other, the first transfer state in which the article transport vehicle passes through the first route and the article transport vehicle through the second route.
- the present invention relates to an article transport facility provided with switching means that can be switched to a second switching state.
- a power supply line is supported by a travel rail that forms a travel route
- the article transport vehicle includes a power receiving unit that is supplied with drive power without contact from the power supply line. It has been.
- the article transport vehicle receives the driving power from the power supply line in a contactless manner at the power receiving unit, and operates the driving device or the like using the received driving power so as to travel along the travel route.
- a plurality of routes are provided as travel routes.
- a first route and a second route are provided as travel routes, and the first route and the second route intersect.
- Some are equipped with intersections.
- the first switching state and the second route that allow the article transport vehicle to pass through the first route so that the article transport vehicle can pass through the intersection on both the first route and the second route.
- a switching means that can be switched to a second switching state in which the article transport vehicle is allowed to pass (see, for example, Patent Document 2).
- a traveling wheel provided in the article transport vehicle is provided at each of the entrance portion continuing to the intersecting portion and the exit portion continuing from the intersecting portion in each of the first route and the second route.
- a travel rail for guiding and supporting the vehicle is provided.
- a first position that is continuous with the traveling rails provided at the entrance and exit portions in the first route and a second position that is continuous with the traveling rails provided at the entrance and exit portions in the second route.
- a traveling rotating rail is provided that is rotatable around the vertical axis. The switching means switches to the first switching state by switching the traveling rotating rail to the first position, and switches to the second switching state by switching the traveling rotating rail to the second position.
- JP 2005-1830 A Japanese Utility Model Publication No. 3-32602
- the position of the traveling rotation rail is switched between the first position and the second position, thereby passing the article transport vehicle on the first route.
- the first switching state to be switched and the second switching state to allow the article transport vehicle to pass through the second route are switched. This allows the article transport vehicle to travel on both the first route and the second route at the intersection, but in order for the article transport vehicle to travel on the first route and the second route at the intersection, It is necessary to feed driving power from the electric wire to the power receiving unit provided in the article transport vehicle.
- the travel rotation rail rotates around the vertical axis, whereby the position of the travel rotation rail is switched between the first position and the second position.
- the power supply line In order not to interfere with the rotation of the traveling rotation rail between the two, the power supply line must be supported by the traveling rotation rail. Therefore, the configuration for supporting the feeder line becomes complicated, and the configuration becomes complicated.
- the present invention has been made paying attention to such a point, and the object thereof is to appropriately supply driving power from the power supply line to the article transport vehicle while simplifying the configuration.
- the object of the present invention is to provide an article transport facility in which the article transport vehicle can appropriately pass through the intersection regardless of whether the route is the first route or the second route.
- an article conveying vehicle that includes traveling wheels and is driven by electric power for driving from a power supply line disposed along the traveling path, and A first switching state in which a first route and a second route are provided as the travel route, and the article transport vehicle is allowed to pass through the first route at an intersection where the first route and the second route intersect.
- an article transport facility provided with a switching means that can be switched to a second switching state in which the article transport vehicle passes through the second path.
- a first traveling rail that guides and supports the traveling wheels is provided at each of an entrance portion that is continuous with the intersecting portion and an exit portion that is continuous from the intersecting portion in the first route, and the intersecting portion is disposed on the second route.
- a second traveling rail that guides and supports the traveling wheel is provided in each of an inlet portion that is continuous with the outlet portion and an outlet portion that is continuous from the intersecting portion, and a first portion that is continuous with the first traveling rail is provided in the intersecting portion.
- a position change rail that is freely changeable between a position and a second position that is continuous with the second travel rail is provided, and the switching means switches to the first switching state by switching the position change rail to the first position.
- the position change rail is configured to be switched to the second switching state by switching the position change rail to the second position, and the power supply line is positioned at the first traveling rail and the first position.
- the article transport vehicle is supported by the second traveling rail so as to supply driving power to the article transport vehicle.
- the switching means switches the position change rail to the first position and switches to the first switch state
- the first traveling rail and the position change rail are in a continuous state.
- the article transport vehicle travels on the first travel rail and the position change rail located at the first position with the travel wheels guided and supported across the first travel rail and the position change rail, and the first route. You can pass through the intersection.
- the power supply line is supported by the first traveling rail so as to supply power for driving to the first traveling rail and the article transporting vehicle traveling on the position change rail positioned at the first position
- the driving power can be supplied from the power supply line, and the driving power can be used to appropriately travel the first traveling rail and the position change rail positioned at the first position.
- the switching means switches the position change rail to the second position and switches to the second switch state
- the second traveling rail and the position change rail are continuous as in the case of switching to the first switch state.
- the article transport vehicle can travel on the second travel rail and the position change rail located at the second position, and can pass through the intersection on the second route.
- the power supply line is supported by the second traveling rail so as to supply power for driving to the second traveling rail and the article transporting vehicle traveling on the position change rail positioned at the second position.
- the feeder line is configured to transport the article transport vehicle that travels on the first travel rail and the position change rail positioned at the first position, and the article transport vehicle that travels on the second travel rail and the position change rail positioned at the second position.
- Power for driving is supplied to the vehicle, but the power supply line is supported by the first travel rail and the second travel rail, not the position change rail whose position is changed.
- the power supply line can be supported only by fixing the power supply line to the first travel rail and the second travel rail, and the support configuration for supporting the power supply line can be simplified.
- the power supply line when the power supply line is wired to an appropriate position, for example, the position of the power supply line is adjusted to an appropriate position with respect to the power receiving unit of the article transport vehicle traveling on the first route or the second route, It is only necessary to fix the power supply line to the second traveling rail, and the power supply line can be easily wired at an appropriate position with respect to the power receiving unit or the like of the article transport vehicle. Since the power supply lines are fixed to the first travel rail and the second travel rail, it is possible to prevent the power supply lines from deviating from an appropriate position with respect to the power receiving unit or the like of the article transport vehicle. Therefore, it is possible to appropriately supply driving power to the article transport vehicle.
- the feeder line extends in the position change rail beyond the end of the position change rail positioned at the first position from the first traveling rail side in a plan view. It is supported by the first traveling rail in a state extended to the first traveling rail, and power for driving can be supplied to the article transport vehicle traveling on the position change rail located at the first position, and the second traveling rail side
- the position change rail which is supported by the second traveling rail and extends in the position change rail beyond the end of the position change rail located at the second position from the first position. It is preferable that power for driving can be supplied to the article transport vehicle traveling on the vehicle.
- the feeder line is supported by the first traveling rail in a state of being extended from the first traveling rail side into the position change rail positioned at the first position in plan view. While the power supply line can be supported by the first traveling rail, a portion of the power supply line that extends in the position change rail positioned at the first position is changed to the position at the first position. It can be made to exist in an appropriate position where power can be supplied to the power receiving unit of the article transport vehicle traveling on the rail, and power for driving is supplied to the article transport vehicle traveling on the position change rail located at the first position. be able to.
- the feeder line is supported by the second traveling rail in a state of being extended from the second traveling rail side into the position change rail positioned at the second position in plan view, while the power supply line can be supported, the part of the power supply line that extends in the position change rail that is located at the second position is transported on the position change rail that is located at the second position. It can be made to exist in an appropriate position where electric power can be supplied to the power receiving unit of the vehicle, and driving power can be supplied to the article transport vehicle traveling on the position change rail located at the second position. Accordingly, the article transport vehicle that travels on the position change rails located at both the first position and the second position while supporting the power supply line by the first travel rail and the second travel rail. On the other hand, it is possible to appropriately supply the driving power.
- the article transporting vehicle is provided with a pair of left and right traveling wheels spaced apart in the lateral width direction of the article transporting vehicle, the first traveling rail, the second It is preferable that a pair of left and right traveling rails and the position change rail are provided so as to guide and support each of the pair of left and right traveling wheels.
- the article transport vehicle can travel while guiding and supporting each of the pair of left and right traveling wheels by the first traveling rail, the second traveling rail, and the position change rail. Therefore, when the article transport vehicle passes through the intersection on the first route and also passes through the intersection on the second route, both the left and right traveling wheels are appropriately guided and supported, and are stable. It is possible to run.
- the feeder line is supported by each of the pair of left and right first traveling rails and the pair of left and right second traveling rails, and the width of the article transporting vehicle. It is preferable that a pair of left and right are provided at intervals in the direction.
- a pair of left and right power supply lines are provided, and driving power can be supplied to the article transport vehicle by the pair of left and right power supply lines. Rather than feeding power for driving with an electric wire, it becomes easier to accurately feed driving power with a desired amount of power to the article transport vehicle. Then, by using the pair of left and right first traveling rails and the pair of left and right second traveling rails that are guided and supported by the pair of left and right traveling wheels, the pair of left and right feeding lines are spaced apart in the lateral width direction of the article transport vehicle. In addition, wiring can be performed easily and appropriately.
- the pair of left and right first traveling rails and the pair of left and right second traveling rails are such that the first traveling rail and the second traveling rail that are adjacent to each other are orthogonal to each other.
- the power supply line extends from the first travel rail side to the position change rail side located at the first position, and then is bent from the position change rail side located at the second position.
- the first traveling rail and the second traveling rail which are configured to include four bent portions extending toward the second traveling rail, are orthogonal to the first traveling rail and the second traveling rail, respectively. It is preferable that a power supply line support body that is bent over a right angle and supports each bent portion of the power supply line is provided.
- each of the four bent portions extends from the first traveling rail side to the position changing rail side positioned at the first position, and then is bent and positioned at the second position. It is wired to extend from the side to the second traveling rail side. Accordingly, the article transport vehicle that travels on the first travel rail and the position change rail positioned at the first position at a portion extending from the first travel rail side to the position change rail side at the first position in the bent portion.
- the position change rail positioned at the second position and the second position can be fed to the second travel rail side from the position change rail side positioned at the second position at the bent portion. Power for driving can be supplied to the article transport vehicle traveling on the two traveling rails.
- a part of the feeder line for supplying the driving power to the article transport vehicle passing through the intersection on the first route and the intersection on the second route by one bent portion can also be used as a part of a power supply line for supplying driving power to the article transporting vehicle passing therethrough.
- Each of the first traveling rail and the second traveling rail that are orthogonal to each other is provided with a feeder support that is bent at a right angle as a whole, and each bent portion is supported by the feeder support. can do. Thereby, in order to support one bending site
- the four bent portions can be wired in a balanced manner in a state in which the first traveling rail and the second traveling rail that are orthogonal to each other are wired one by one, and by the bent portions wired in a balanced manner, Whether it is an article transport vehicle that passes through the intersection on the first route or an article transport vehicle that passes through the intersection on the second route, the drive power should be appropriately supplied to both in a balanced manner. Can do.
- the article transport vehicle includes a pair of front and rear traveling wheels spaced apart in the front-rear direction of the article transport vehicle, and the position change rail includes the article transport rail. It is preferable that the length of the vehicle in the traveling direction is shorter than the distance between the pair of front and rear traveling wheels.
- the length of the position change rail in the traveling direction of the article transport vehicle is configured to be shorter than the distance between the pair of front and rear traveling wheels.
- the position change rail does not guide and support both of the pair of front and rear traveling wheels at the same time, but only one of the pair of front and rear traveling wheels is guided and supported by the position change rail and the other is the first. It can be guided and supported by the traveling rail or the second traveling rail. Therefore, the position change rail does not require strong strength as compared with the first travel rail and the second travel rail, and can achieve weight reduction and simplification of the configuration. Therefore, a simple configuration can be adopted as a support configuration for changing the position change rail between the first position and the second position.
- FIG. 6 is a sectional view taken along line VIII-VIII in FIG. 5.
- FIG. 6 is a sectional view taken along line IX-IX in FIG. 5.
- the article transporting facility includes a traveling rail 2 installed on the ceiling side through a plurality of article processing units 1 to form a traveling path S.
- a plurality of ceiling-conveying-type article conveyance vehicles 3 that are movable in the direction are provided.
- a container containing a transported object such as a semiconductor substrate or a reticle is used as an article 4, and the article transport vehicle 3 puts the article 4 between a plurality of article processing units 1. It is comprised so that it may convey.
- the traveling rail 2 is installed in a fixed state on the ceiling by a traveling rail bracket 5.
- the article transport vehicle 3 includes a grip portion 6 that grips the article 4 in a suspended state so as to be lifted and lowered.
- the gripping unit 6 winds or unwinds the wire 7 so that the gripping unit 6 moves close to the article transporting vehicle 3 and the article transfer installed below the article transporting vehicle 3. It is provided so that it can be moved up and down at a lowered position where the article is transferred to and from the station 8.
- a belt can be used.
- FIG. 2 shows a case where the gripping portion 6 is lowered from the raised position to the lowered position and a case where the gripper 6 is raised from the lowered position to the raised position.
- the station 8 is configured by a mounting table for mounting and supporting the article 4.
- the station 8 receives the article 4 to be processed by the article processing unit 1 from the article transport vehicle 3 or passes the article 4 to which the predetermined processing has been performed by the article processing unit 1 to the article transport vehicle 3. It is arranged corresponding to each of the plurality of article processing units 1.
- the article transport vehicle 3 moves along the traveling rail 2 with the gripping portion 6 positioned at the raised position, and stops at a stop position corresponding to the transfer target station 8 among the plurality of stations 8. By moving the grip 6 up and down between the raised position and the lowered position, the article 4 is exchanged (that is, delivered) to and from the station 8.
- the article transport vehicle 3 includes a travel drive unit 9 that travels on the travel rail 2, and an article support unit 10 that is supported by the travel drive unit 9 so as to be positioned below the travel rail 2. Yes.
- a pair of left and right traveling rails 2 are provided at intervals in the width direction of the article transport vehicle 3, and the traveling drive unit 9 is rotationally driven by a drive motor 11 to be paired with left and right.
- a traveling wheel 12 that rolls on the horizontally extending upper surface of each of the traveling rails 2 and a rotatable traveling guide wheel 13 that contacts the side surfaces of the pair of left and right traveling rails 2 that extend in the opposite vertical direction are provided. .
- the traveling wheel 12 is driven to rotate around the axis along the lateral width direction of the article transport vehicle 3 by the drive motor 11, and the traveling guide wheel 13 that is rotatable around the vertical axis is contacted by the pair of left and right traveling rails 2.
- the article transport vehicle 3 is guided by the travel rail 2 and travels.
- a pair of left and right traveling wheels 12 are disposed at both ends in the width direction of the article transport vehicle 3, and the pair of left and right traveling wheels 12 are arranged in the front-rear direction of the article transport vehicle 3.
- Two are provided at intervals, and a total of four traveling wheels 12 are provided.
- Two travel guide wheels 13 are provided at both ends in the width direction of the article transport vehicle 3, and two of the two travel guide wheels 13 are spaced apart from each other in the front-rear direction of the article transport vehicle 3. A total of eight travel guide wheels 13 are provided.
- the article support unit 10 is provided with a rotating drum 15 that is wound around the wire 7 and rotated by a lifting motor 14, and a gripping unit 6 that is suspended and supported by the wire 7. It has been.
- the gripping unit 6 includes a gripping tool 17 that can be switched by a gripping motor 16 between a gripping posture for gripping the article 4 and a gripping release posture for releasing the gripping. Then, the rotary drum 15 is rotationally driven by the lifting motor 14 so that the gripping part 6 and the article 4 gripped by the gripping part 6 are moved up and down, and the gripping motor 17 is operated to switch the gripping tool 17. 4 is configured to release the grip on the article 4.
- a power receiving coil 18 is disposed at the center in the front-rear direction and the lateral width direction of the article transport vehicle 3, and the power receiving coil 18 receives power for driving from the power supply line 19. It is configured.
- the power receiving coil 18 has a cross-sectional shape in the direction along the front-rear direction of the article transporting vehicle 3, an upper portion that extends horizontally, a lower portion that extends downward and extends horizontally with respect to the upper portion, and these upper portions. It is formed in a shape having a portion extending in the up-down direction connecting each central portion of the lower portion.
- a pair of left and right power supply lines 19 are provided in a state supported by the traveling rails 2, and a pair of left and right power supply lines 19 are spaced apart from each other in the lateral width direction of the article transport vehicle 3. It is wired so as to be located between them. Then, a magnetic field is generated by supplying an alternating current to the power supply line 19, and driving power is generated in the power receiving coil 18 by this magnetic field, so that the driving power is supplied to the article transport vehicle 3 in a non-contact state. It is configured as follows. By supplying driving power from the power supply line 19 to the power receiving coil 18, the article transport vehicle 3 travels the traveling drive unit 9 and raises and lowers the gripping unit 6 with the driving power.
- a power supply line is provided in a power supply possible region of the power receiving coil 18 (a region sandwiched vertically between the upper part and the lower part in the power receiving coil 18). It is supported by the traveling rail 2 in a state in which the installation position of the power supply line 19 is adjusted so that 19 is positioned.
- the travel route S on which the article transport vehicle 3 travels is formed by the travel rail 2, but as shown in FIG. A connecting route that connects the route 21, the main route 20, and the sub route 21 to allow the branch travel from the main route 20 to the sub route 21 and the combined travel from the sub route 21 to the main route 20. And are provided.
- the main path 20 is configured as an annular path having a pair of straight line portions arranged opposite to each other and a pair of curved line portions connecting the terminal ends and the start end portions of the pair of straight line portions.
- a plurality of (for example, three in FIG. 1) sub-routes 21 are provided outside the main route 20 in a state of being aligned in the traveling direction of the article transport vehicle 3 along the main route 20. Are disposed on both sides of one side and the other side.
- the sub route 21 is located at a position where the sub route 21 disposed on one side of the main route 20 and the sub route 21 disposed on the other side of the main route 20 face each other across the main route 20. It is arranged.
- each of the sub-routes 21 a straight line portion extending in a direction away from the main route 20 and a straight line portion extending in a direction approaching the main route 20 in a state of passing through the plurality of stations 8 are arranged at positions facing each other.
- Each of the sub-paths 21 is formed in an annular shape including a pair of straight line portions and a pair of curved portions that connect the end portion and the start end portion of each of the pair of straight line portions.
- a target stop position for transferring the article 4 between each of the plurality of stations 8 and the article transport vehicle 3 is set in the middle of the sub-path 21, and the article transport vehicle 3 The article 4 is transferred to and from the station 8 by raising and lowering the grip 6 while stopped at the position.
- a connection path that connects the main path 20 and the sub-path 21 is provided for each of the plurality of sub-paths 21, and the connection path is branched from the straight portion of the main path 20 and separated from the main path 20.
- the branch path is connected to the straight portion of the sub-path 21 extending in the direction, and the merge path is joined to the main path 20 from the end of the straight portion of the sub-path 21 extending in the direction approaching the main path 20. .
- route 20 the branch location of a branch path is an upstream of the traveling direction of the article conveyance vehicle 3 rather than the junction location of a merge path.
- the article transport vehicle 3 When the article transport vehicle 3 travels from the main route 20 to the sub route 21, it continues to travel along the sub route 21 while maintaining the traveling direction of the main route 20. Further, when the article transport vehicle 3 travels from the sub route 21 to the main route 20, the article transport vehicle 3 continues to travel along the main route 20 in the traveling direction of the sub route 21.
- the article transporting vehicle 3 does not travel along the main path 20 between the sub-path 21 disposed on one side of the main path 20 and the sub-path 21 disposed on the other side.
- An inter-sub-path connection path 22 that connects the sub-path 21 disposed on one side of the main path 20 and the sub-path 21 disposed on the other side is provided separately from the connection path so that the vehicle can travel. .
- the inter-sub-path connection path 22 has one end connected to the sub-path 21 disposed on one side with respect to the main path 20, and the other end disposed on the other side with respect to the main path 20. It is connected to the path 21, and its middle part crosses the main path 20.
- the inter-sub-path connection path 22 is configured by a linear path that connects the sub-paths 21 disposed at positions facing each other across the main path 20.
- Two inter-sub-path connection paths 22 that connect the same sub-paths 21 are provided. Thereby, one of the two inter-sub-route connection paths 22 is changed from the sub-path 21 on one side (for example, the left side in FIG. 1) to the sub-path 21 on the other side (for example, the right side in FIG. 1).
- This is a route for causing the article transport vehicle 3 to travel.
- Each of the two inter-sub-path connecting paths 22 that connect the same sub-paths 21 is connected to the terminal portion of the straight line portion whose starting end side extends in the direction approaching the main path 20 in the sub-path 21 on one side, The end side is connected to the start end of a straight line portion extending in the direction away from the main path 20 in the sub-path 21 on the other side.
- the inter-sub-route connection path 22 is provided so as to cross in a state orthogonal to each of the pair of straight portions of the main route 20, and the connection point between the sub-path connection route 22 and the straight portion of the main route 20 is It is an intersection K.
- an equipment management computer for managing the operation of the plurality of moving bodies 3 is provided over the entire travel route S.
- the article transport vehicle 3 includes an equipment management computer.
- a cart side control unit for controlling the operation of the article transport vehicle 3 is provided based on the operation command information from.
- the control unit such as a computer in this specification and the operation management unit described below belong to the prior art and have a CPU, a memory, a communication unit, etc., and execute the functions described in this specification. The algorithm for doing this is stored in the memory.
- the article transport vehicle 3 includes a stop plate detection sensor that is installed on the side of the travel rail 2 and that detects a stop plate that indicates a target stop position corresponding to each station 8.
- Various sensors such as an absolute position plate detection sensor that detects an absolute position plate that indicates a position (distance) from the reference point of the travel route S installed on the side, etc., and a travel distance sensor that detects the travel distance of the article transport vehicle 3, etc. Is provided.
- the cart side control unit determines that the current position of the article transport vehicle 3 is the travel route S based on the detection information of the absolute position plate detection sensor and the detection information of the travel distance sensor after the detection of the absolute position detection plate detection sensor. It is known which position is above, and the current position information and trolley identification information such as a trolley number that can identify which of the plurality of warehousing vehicles 3 is by wireless communication etc. It is sent to the equipment management computer.
- the equipment management computer manages the operation of the plurality of article transport vehicles 3 while managing the current position of each of the plurality of article transport vehicles 3 from the current position information and the cart identification information from each cart side control unit. ing.
- the equipment management computer selects one article transport vehicle 3 to be transported from among the plurality of article transport vehicles 3, and the source and transport from the plurality of stations 8 for the selected article transport vehicle 3.
- a transport command for transporting the article 4 from the transport source station 8 to the transport destination station 8 in a state where the previous station 8 is designated is commanded as operation command information.
- the equipment management computer travels the article transport vehicle 3 from the transport source to the transport destination, for example, the shortest path with the shortest travel distance is selected from a plurality of paths, and the goods are selected on the selected shortest path. It is comprised so that the operation command information for making the conveyance vehicle 3 drive may be instruct
- the cart side controller of the article transport vehicle 3 controls the travel of the article transport vehicle 3 to travel to the designated transport source station 8 based on the detection information of the various sensors.
- the article 4 is received from the transfer source station 8 by controlling the lifting and lowering operation of the gripping unit 6 and the switching operation of the gripping unit 6.
- the cart side control unit controls the travel of the article transport vehicle 3 to travel to the designated transport source station 8 based on the detection information of the various sensors, and passes the article 4 to the transport destination station 8. .
- intersection K for example, a portion surrounded by a dotted line in the figure
- a straight line portion of the main route 20 and the inter-sub-route connection route 22 intersect perpendicularly, or a certain route and another route.
- a plurality of merging portions and the like to be merged are provided, and there is a possibility that the article transport vehicles 3 collide with each other at the intersection K or the merging portion. Therefore, as described above, the operation of the article transport vehicle 3 on the travel route S is basically managed by the facility management computer. However, at the intersection K, the junction, etc.
- An operation management unit that manages the operation of the article transport vehicle 3 so as to run the article transport vehicle 3 while preventing a collision is provided separately from the equipment management computer.
- the cart side control unit of the article transport vehicle 3 inquires of the operation management unit whether or not to allow the entry before entering the intersection K or the junction, and the entry is permitted.
- the traveling of the article transport vehicle 3 is controlled so as to enter the intersection K or the junction only when the On the other hand, if there is an inquiry as to whether or not entry is permitted from the trolley side control unit, the operation management unit causes the trolley side to permit entry of only one of the article transport vehicles 3 at the intersection K or the junction. Command operation command information to the control unit.
- the connecting portion between the straight portion of the main route 20 and the inter-sub-route connection route 22 is an intersection K
- this intersection K is the main route 20 (corresponding to the first route) and the sub route.
- the inter-connection path 22 (corresponding to the second path) is configured to intersect perpendicularly.
- the article transport facility according to the present invention appropriately feeds driving power from the power supply line 19 to the article transport vehicle 3 while simplifying the configuration of the equipment having such an intersection K.
- the article transport vehicle 3 is configured to appropriately travel on both the main route 20 and the inter-sub-route connection route 22 at the intersection K.
- FIG. 4 is a perspective view showing the overall outline of the intersection K
- FIG. 5 is a plan view showing the overall outline of the intersection K
- 6 is a plan view showing a state when the article transport vehicle 3 is passed through the main route 20
- FIG. 7 is a view when the article transport vehicle 3 is passed through the inter-sub-route connection route 22. It is the top view which showed the state.
- 8 is a sectional view taken along line VIII-VIII in FIG. 5
- FIG. 9 is a sectional view taken along line IX-IX in FIG.
- the main path entrance portion 23 that continues to the intersection K in the main route 20, the main path exit portion 24 that continues from the intersection K, and the inter-sub-route connection path 22 intersect.
- Each of the sub-route inlet portion 25 continuing to the portion K and the sub-route outlet portion 26 continuing from the intersection K is provided with a traveling rail 2 that guides and supports the traveling wheels 12 provided in the article transport vehicle 3.
- the main route 20 is shown as a route along the vertical direction in the figure, and the traveling direction of the article transport vehicle 3 on the main route 20 is a direction from the lower side to the upper side.
- the inter-sub-route connection path 22 is shown as a path along the left-right direction in the drawing, and the traveling direction of the article transport vehicle 3 on the inter-sub-path connection path 22 is the direction from the right side to the left side. It is said.
- the main route inlet portion 23 and the sub route inlet portion 25 correspond to the inlet portion
- the main route outlet portion 24 and the sub route outlet portion 26 correspond to the outlet portion.
- the main traveling rail 2a (corresponding to the first traveling rail) is provided in the main route inlet portion 23 and the main route outlet portion 24, and the sub route inlet portion 39 and the sub route What was provided in the exit part 40 is made into the sub traveling rail 2b (equivalent to a 2nd traveling rail).
- the main path entrance portion 23 and the main path exit portion 24 are provided with the main travel rail 2a, and the sub path entrance portion 25 and the sub path exit portion 26 are provided with the sub travel rail 2b.
- a position change rail 27 that is continuous with the main traveling rail 2a or the auxiliary traveling rail 2b is provided at the intersection K.
- the position change rail 27 is rotatably provided around a vertical axis at a first position (see FIG. 6) continuous with the main travel rail 2a and a second position (see FIG. 7) continuous with the sub travel rail 2b. ing.
- the position change rail 27 guides and supports the traveling wheel 12 on the horizontally extending upper surface and the traveling guide wheel 13 on the side surface extending in the vertical direction, as shown in FIG. It is configured to guide.
- each of the main travel rail 2a, the sub travel rail 2b, and the position change rail 27 is provided to guide and support the traveling wheels 12 provided in the article transport vehicle 3.
- the traveling wheels 12 are provided as a pair on the left and right sides with an interval in the lateral width direction of the article transport vehicle 3, each of the pair of left and right traveling wheels 12 is guided and supported.
- each of the main traveling rail 2a, the auxiliary traveling rail 2b, and the position change rail 27 is also provided in a pair of left and right.
- the main path entrance portion 23 and the main path exit portion 24 are provided with a pair of left and right main traveling rails 2a spaced apart in the lateral width direction of the article transport vehicle 3.
- the sub-route outlet portion 26 is provided with a pair of left and right sub-travel rails 2b spaced apart from each other in the lateral width direction of the article transport vehicle 3.
- the position change rails 27 are also provided as a pair of left and right, and when the position change rails 27 are located at the first position, as shown in FIG. 6, each of the pair of left and right position change rails 27 is a pair of left and right main traveling rails 2a. When the position change rail 27 is located at the second position, as shown in FIG. 7, each of the pair of left and right position change rails 27 is continuous with the pair of left and right sub-travel rails 2b. Yes.
- the position change rail 27 is formed in an arc shape in a plan view, and the main travel rail 2a and the sub travel rail 2b are formed in a straight shape in a plan view.
- the rotation of the position change rail 27 around the vertical axis is allowed, while the main traveling rail 2a and the position changing rail 27 In order to make the gap between them as small as possible, an arcuate cutout corresponding to the shape of the position change rail 27 is formed.
- the intersection K is provided with a rail support 29 that is suspended from the ceiling by a plurality of suspending tools 28, and the main traveling rail 2a and the auxiliary traveling rail 2b. Is fixed to the rail support 29.
- the rail support 29 includes a plate-like upper portion 29a to which the hanging tool 28 is attached, four columnar lower extending portions 29b extending downward from each of the four corners of the upper portion 29a, and the four lower portions thereof. It is comprised from the horizontal extension site
- the horizontal extending portion 29c is fixed to the lower end of the lower extending portion 29b by a plurality of bolts or other conventional fixtures.
- the main traveling rail 2a and the sub traveling rail 2b are disposed so as to extend from the outside to the inside of the rail support 29 through the space between the lower extending portions 29b, and a pair of left and right main traveling rails.
- the rail 2a and the pair of left and right auxiliary traveling rails 2b are provided so as to be orthogonal to each other.
- the rail support 29 supports the rotary support 30 so as to be rotatable around the vertical axis P, and a pair of left and right position change rails 27 are fixed to the rotary support 30.
- the rotary support 30 includes two upper extending portions 30a extending upward from each of the pair of left and right position change rails 27, and a connecting portion 30b connecting the upper ends of the two upper extending portions 30a. It is configured.
- the center part of the connection part 30b has penetrated the upper part 29a of the rail support body 29 to the up-down direction, and the rotation support body 30 makes the center part of the connection part 30b the rotation axis P,
- the rotation axis P It is provided to be rotatable with respect to the rail support 29 around.
- a stopper 33 for example, a resin stopper
- An electric or hydraulic cylinder 31 that functions as an actuator and a link mechanism 32 that links the expansion / contraction operation of the cylinder 31 and the rotation of the rotation support 30 are provided on the upper portion 29 a of the rail support 29. . That is, in FIG. 6, the cylinder 31 is contracted to rotate the rotation support 30 around the rotation axis P by the link mechanism 32, so that the position change rail 27 is positioned at the first position continuous to the main travel rail 2 a. I am letting. In FIG. 7, the cylinder 31 is extended to rotate the rotation support 30 around the rotation axis P by the link mechanism 32, so that the position change rail 27 is positioned at the second position continuous to the auxiliary travel rail 2 b. I am letting.
- the position change rail 27 is switched to the first position by the cylinder 31, the link mechanism 32, the rotation support body 30, and the like, and the article transport vehicle 3 is passed through the main path 20. It is configured to be switchable between a first switching state and a second switching state in which the position change rail 27 is switched to the second position and the article transport vehicle 3 is allowed to pass through the inter-sub-route connection path 22.
- the switching means is comprised from the cylinder 31, the link mechanism 32, the rotation support body 30, etc. FIG.
- the switching means switches the intersection K to the first switching state when passing the article transport vehicle 3 through the main route 20, and moves the article transport vehicle 3 through the inter-sub-route connection route 22 through the intersection K.
- the switching means another mechanism belonging to the prior art for rotating the rotary support 30 around the rotation axis P can be used.
- a configuration in which gear teeth are provided on the outer side of the vertical axis forming the shaft center P and an electric motor connected to a gear engaged with the gear teeth can be used.
- the position change rail 27 guides and supports the traveling wheels 12 of the article transport vehicle 3. At this time, the load received by the position change rail 27 is reduced. ing. That is, as shown in FIG. 5, the length D1 of the position change rail 27 in the traveling direction of the article transport vehicle 3 is configured to be shorter than the distance D2 between the pair of front and rear traveling wheels 12. Accordingly, the position change rail 27 does not support and support both the pair of front and rear traveling wheels 12 at the same time, but guides and supports only one of the pair of front and rear traveling wheels 12 by the position change rail 27 and the other.
- the article transport vehicle 3 passes through the intersection K while being guided and supported by the traveling rail 2. Therefore, the position change rail 27 is not required to have a strong strength as compared with the traveling rail 2, and can be reduced in weight and simplified in configuration. Therefore, a simple configuration can be adopted as a support configuration for rotating the position change rail 27 around the vertical axis.
- the driving power is supplied from the pair of power supply lines 19 supported by the pair of travel rails 2 to the power receiving coil 18 of the article transporting vehicle 3 in a non-contact state. Is configured to do.
- the cart side controller of the article transport vehicle 3 operates along the travel route S by operating the drive motor 11 using the driving power received by the power receiving coil 18.
- the article transport vehicle 3 travels along the travel route S by receiving the power for driving from the power supply line 19, but also for driving from the power supply line 19 at the intersection K.
- the article transport vehicle 3 is allowed to pass through the main route 20, or the article transport vehicle 3 is allowed to pass through the inter-sub-route connection route 22.
- the power supply line 19 at the intersection K is extended from the main traveling rail 2 a side to the position change rail 27 side positioned at the first position. In this state, it is supported by the main traveling rail 2a and is configured to be able to supply driving power to the article transport vehicle 3 traveling on the position change rail 27 located at the first position. Therefore, the power for driving is supplied to the article transport vehicle 3 passing through the intersection K in the main route 20 by the power supply line 19 wired in this way.
- the power supply line 19 at the intersection K is supported by the auxiliary traveling rail 2b in a state of being extended from the auxiliary traveling rail 2b side to the position change rail 27 side positioned at the second position, and is positioned at the second position.
- the drive power can be fed to the article transport vehicle 3 traveling on the position change rail 27. Therefore, the power supply for driving is supplied to the article transport vehicle 3 passing through the intersection K in the inter-sub-route connection path 22 by the power supply line 19 wired in this way.
- the power supply line 19 is not supported by the position change rail 27 that is rotatable around the rotation axis P, but is supported by the main traveling rail 2a and the sub traveling rail 2b fixed to the rail support 29. Therefore, it is only necessary to adopt a simple support configuration such as fixing the power supply line 19 to the main travel rail 2a and the sub travel rail 2b, and the configuration for supporting the power supply line 19 can be simplified.
- the power supply line 19 is supported by the main traveling rail 2a and the sub-travel rail 2b. As shown in FIGS. Since there are four bent portions, that is, a first bent portion 19a, a second bent portion 19b, a third bent portion 19c, and a fourth bent portion 19d, the configuration of this bent portion will be described.
- the pair of left and right main traveling rails 2a and the pair of left and right subsidiary traveling rails 2b are disposed so that the main traveling rail 2a and the subsidiary traveling rail 2b adjacent to each other are orthogonal to each other.
- the main traveling rail 2a and the sub traveling rail 2b that are orthogonal to each other are disposed at a right angle that extends over the main traveling rail 2a and the sub traveling rail 2b and supports the bent portions 19a to 19d of the power supply line 19.
- a power line support 34 having a shape (that is, a shape bent at a right angle as a whole) is provided.
- Four feeder lines 34a to 34d are provided as feeder lines 34, and the first to fourth feeder lines 34a to 34d are bent portions 19a to 19d.
- a cover 35 (FIG. 9) is provided at a bent portion of each of the first to fourth feeder support 34a to 34d so as to cover the bent portions 19a to 19d of the feeder 19.
- the feeder support 34 is formed in a plate shape extending from the main traveling rail 2a and the auxiliary traveling rail 2b to the inner side in the lateral width direction of the article transporting vehicle 3, and the leading end in the extending direction.
- the bent portions 19a to 19d of the feeder line 19 are placed and supported on the part.
- the first feeder support 34a is arranged across the main traveling rail 2a of the main path inlet portion 23 and the sub traveling rail 2b of the sub path inlet portion 25 which are orthogonal to each other.
- the second feeder support 34b is disposed across the main traveling rail 2a of the main path inlet portion 23 and the sub traveling rail 2b of the sub path outlet portion 26 which are orthogonal to each other.
- the first feeder support 34a supports the first bent portion 19a
- the second feeder support 34b supports the second bent portion 19b.
- the third power line support 34c is disposed across the main traveling rail 2a of the orthogonal main path outlet portion 24 and the sub traveling rail 2b of the sub path inlet portion 25, and is a fourth power line support.
- the third feeder support 34c supports the third bent portion 19c
- the fourth feeder support 34d supports the fourth bent portion 19d.
- the feed line 19 extends in the position change rail 27 beyond the end in the running direction of the position change rail 27 located at the first position from the main running rail 2a side in a plan view.
- the secondary travel rail 2b is supported by the primary travel rail 2a and extends into the position change rail 27 beyond the end of the position change rail 27 located at the second position from the secondary travel rail 2b side. It is supported.
- Each of the four bent portions 19a to 19d extends from the main traveling rail 2a side to the position change rail 27 side located at the first position, and is then bent and located at the position change rail 27 side located at the second position. Is wired in a bent shape extending from the side to the auxiliary traveling rail 2b side. By disposing in this way, each of the bent portions 19a to 19d is positioned at the main traveling rail 2a and the first position at a portion extending from the main traveling rail 2a side to the position changing rail 27 side located at the first position.
- the power for driving can be supplied to the article transport vehicle 3 traveling on the position change rail 27 and the auxiliary travel rail 2b from the position change rail 27 side located at the second position in each of the bent portions 19a to 19d.
- driving power can be supplied to the position change rail 27 located at the second position and the article transport vehicle 3 traveling on the auxiliary traveling rail 2b.
- a part of the power supply line 19 for supplying driving power to the article transport vehicle 3 passing through the intersection K in the main route 20 and the sub route by one bent portion 19a to 19d can also be used as a part of the power supply line 19 for supplying driving power to the article transport vehicle 3 passing through the intersection K in the inter-connection path 22.
- the four bent portions 19a to 19d are wired so as to be symmetrical in both directions of the traveling direction of the article transport vehicle 3 on the main route 20 and the traveling direction of the article transport vehicle 3 on the inter-sub-route connection path 22.
- the four bent portions 19a to 19d can be wired in a well-balanced manner, and even the article transport vehicle 3 that passes through the intersection K on the main route 20 can cross the intersection K on the inter-sub-route connection route 22. Even if the article transporting vehicle 3 passes through the vehicle, the driving power can be appropriately supplied to both of them in a balanced manner.
- the operation when the article transport vehicle 3 passes the intersection K will be described.
- the switching means is switched to the first switching state.
- the position change rail 27 is positioned at the first position.
- the article transport vehicle 3 travels on the main travel rail 2 a of the main path entrance portion 23, and then transfers from the main travel rail 2 a to the position change rail 27 located at the first position, and then from the position change rail 27. Transfer to the main travel rail 2a of the route exit 24.
- the first bent portion 19 a and the second bent portion are provided in a power supply possible region of the power receiving coil 18 (a region sandwiched vertically between the upper portion and the lower portion in the power receiving coil 18).
- 19b is positioned, so that it is possible to appropriately supply the driving power from the first bent portion 19a and the second bent portion 19b to the power receiving coil 18.
- the article transport vehicle 3 is transferred from the main traveling rail 2a to the position change rail 27 located at the first position, but the position change rail 27 where the first folding portion 19a and the second bending portion 19b are located at the first position. Accordingly, the driving power can be appropriately supplied from the first bent portion 19a and the second bent portion 19b to the article transport vehicle 3 in succession.
- the bent portion to be fed is the first bent portion 19a and the first bent portion 19a.
- the second bent portion 19b the third bent portion 19c and the fourth bent portion 19d
- power is supplied to the article transport vehicle 3 from the third bent portion 19c and the fourth bent portion 19d.
- the position change rail 27 located at the first position is traveling or its The power for driving can be appropriately supplied to the article transport vehicle 3 on the way from the position change rail 27 to the main traveling rail 2a of the main route outlet portion 24. Thereafter, when the article transport vehicle 3 travels on the main travel rail 2a of the main path outlet portion 24, the driving power is continuously supplied to the article transport vehicle 3 from the third bent portion 19c and the fourth bent portion 19d. Can be done appropriately.
- the four bent portions 19a to 19d are wired so as to be symmetrical in both directions of the traveling direction of the article transport vehicle 3 on the main route 20 and the traveling direction of the article transport vehicle 3 on the inter-sub-path connecting route 22.
- the description will be omitted.
- the switching means switches to the second switching state and positions the position change rail 27 at the second position. Then, after the article transport vehicle 3 travels on the secondary travel rail 2b of the secondary path entrance portion 25, the article transport vehicle 3 transfers from the secondary travel rail 2b to the position change rail 27 located at the second position. Transfer to the auxiliary traveling rail 2b of the route exit portion 26. Therefore, for supplying the driving power to the article transporting vehicle 3, first, the driving power is supplied from the first folding portion 19a and the third folding portion 19c to the article transporting vehicle 3, and then the first bending portion 19a.
- each of the four bent portions 19a to 19d is extended to the position change rail 27 side located at the second position, so that the driving power is appropriately supplied to the article transport vehicle 3. Can do.
- the feeder line 19 is arranged at the center of the intersection K in the traveling direction of the article transport vehicle 3.
- the bent parts 19a to 19d are arranged close to the traveling direction of the article transport vehicle 3 so that the length of the part is as short as possible.
- the power receiving coil 18 of the article transport vehicle 3 supplies sufficient driving power enough to pass through the intersection K when traveling on the main route 20 or traveling on the inter-sub-route connection route 22.
- intersection K where the main route 20 and the inter-sub-route connection route 22 intersect is illustrated, but for each of the intersections where a certain route and another route intersect, It is possible to adapt the article conveyance facility according to the present invention.
- the curved branch path connected from the main path 20 and connected to the sub-path 21 at the intersection where the main path 20 and the inter-sub-path connection path 22 intersect with each other and the sub-path 21 to the main path 20.
- a curved joining path that joins the two is not limited to the intersection provided with such a curved branch path or a curved junction path, but at an intersection where two traveling paths that do not have a curved traveling path intersect at right angles.
- Article conveying equipment can be adapted.
- a loop-shaped traveling route S that intersects perpendicularly with the sub-route 21 is provided, and the sub-route 21 and the loop-shaped traveling route S (the traveling route indicated by the one-dot chain line in the figure) ) Is configured as an intersection where two traveling routes that do not have a curved traveling route intersect at right angles, and the article conveying facility according to the present invention is applied to the intersection K.
- the sub-route 21 and the loop-shaped traveling route S the traveling route indicated by the one-dot chain line in the figure
- intersection K the intersection where the main route 20 and the inter-sub-route connection route 22 intersect at right angles is exemplified, but such two routes intersect at right angles.
- the present invention can be implemented not only at the intersection where the two paths intersect, but also at an intersection where the two paths intersect obliquely (that is, at an angle smaller than 90 degrees).
- the intersection may be an intersection where two routes merge into one route, or an intersection where one route branches to two routes.
- the exit portion of the first route and the exit portion of the second route become a common exit portion
- the entrance portion of the first route and the entrance portion of the second route become a common entrance portion.
- the traveling wheel 12, the traveling rail 2, the position change rail 27, and the power supply line 19 are provided with a pair of left and right.
- the traveling wheel 12, the traveling rail 2, and the position changing rail are provided. It is also possible to carry out with 27 each including a pair of left and right and only one power supply line 19, and what number of traveling wheels 12, traveling rails 2, position change rails 27, and power supply lines 19 should be used. Can be changed as appropriate.
- the article transport facility according to the present invention can be used for, for example, a semiconductor substrate processing facility.
- First travel rail main travel rail
- Second traveling rail sub traveling rail
- Carriage Car Traveling Wheel 19 Power Supply Lines 19a to 19d Bent Part
- First Route (Main Route) 22
- Second route (inter-sub-route connection route) 23
- Entrance portion of the first route 24
- Exit part of the first route (exit part for the main route)
- Entrance part of the second route (sub-route entrance part)
- 26 Exit part of second route (exit part for sub route)
- Position change rail 30
- Switching means Rotating support
- Switching means cylinder
- switching means (link mechanism) 34 Feeder Support K Intersection S Traveling Route
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Abstract
Description
しかしながら、この場合には、走行回転レールが上下軸心周りで回転することで、走行回転レールの位置が第1位置と第2位置とに切り換えられるので、その第1位置と第2位置との間での走行回転レールの回転の邪魔にならないように、走行回転レールに給電線を支持させなければならない。したがって、給電線を支持させるための構成が複雑になり、構成の複雑化を招くことになる。
前記第1経路において前記交差部に連続する入口部分及び前記交差部から連続する出口部分の夫々には、前記走行輪を案内支持する第1走行レールが備えられ、前記第2経路において前記交差部に連続する入口部分及び前記交差部から連続する出口部分の夫々には、前記走行輪を案内支持する第2走行レールが備えられ、前記交差部には、前記第1走行レールに連続する第1位置と前記第2走行レールに連続する第2位置とに位置変更自在な位置変更レールが備えられ、前記切換手段は、前記位置変更レールを第1位置に切り換えることにより前記第1切換状態に切り換え自在で、且つ、前記位置変更レールを第2位置に切り換えることにより前記第2切換状態に切換るよう構成され、前記給電線は、前記第1走行レール及び第1位置に位置する前記位置変更レールを走行する前記物品搬送車に駆動用電力を給電するように前記第1走行レールに支持され、且つ、前記第2走行レール及び第2位置に位置する前記位置変更レールを走行する前記物品搬送車に駆動用電力を給電するように前記第2走行レールに支持されている。
また、切換手段が位置変更レールを第2位置に切り換えて第2切換状態に切り換えた場合も、第1切換状態に切り換えた場合と同様に、第2走行レールと位置変更レールとが連続する状態となり、物品搬送車が、第2走行レールと第2位置に位置する位置変更レールとを走行し、第2経路にて交差部を通過することができる。このとき、給電線は、第2走行レール及び第2位置に位置する位置変更レールを走行する物品搬送車に駆動用電力を給電するように第2走行レールに支持されているので、物品搬送車は、給電線から駆動用電力の給電を受けることができ、その駆動用電力を用いて第2走行レール及び第2位置に位置する位置変更レールを適切に走行することができる。
この物品搬送設備は、図1に示すように、複数の物品処理部1を経由する状態で走行レール2が天井側に設置されて走行経路Sが形成されており、走行経路Sに沿って一方向に移動自在な天井搬送式の物品搬送車3が複数設けられている。この物品搬送設備では、図2に示すように、半導体基板やレチクル(reticle)等の搬送物を収納した容器を物品4として、物品搬送車3が複数の物品処理部1の間で物品4を搬送するように構成されている。走行レール2は、走行レール用ブラケット5により天井部に固定状態で設置されている。
ちなみに、図2では、把持部6が上昇位置から下降位置に下降する場合と、把持部6を下降位置から上昇位置に上昇させる場合とを示している。
物品搬送車3は、把持部6を上昇位置に位置させた状態で走行レール2に沿って移動し、複数のステーション8のうち、移載対象のステーション8に対応する停止位置に停止した状態で上昇位置と下降位置との間で把持部6を昇降させることにより、ステーション8との間で物品4の授受(すなわち受け渡し)を行うように構成されている。
図3に示すように、走行レール2は、物品搬送車3の横幅方向に間隔を隔てて左右一対設けられており、走行駆動部9には、駆動モータ11にて回転駆動されて左右一対の走行レール2夫々の水平に延びる上面を転動する走行輪12と、左右一対の走行レール2夫々の対向する上下方向に延びる側面に接当する回転自在な走行案内輪13とが設けられている。そして、走行輪12が駆動モータ11にて物品搬送車3の横幅方向に沿う軸心周りで回転駆動し、上下軸心周りで回転自在な走行案内輪13が左右一対の走行レール2にて当接案内されることにより、物品搬送車3が走行レール2に案内されて走行するように構成されている。
上述の如く、主経路20の直線部分と副経路間連結経路22との接続箇所が交差部Kとなっており、この交差部Kは、主経路20(第1経路に相当する)と副経路間連結経路22(第2経路に相当する)が直交して交差するように構成されている。そして、本発明に係る物品搬送設備は、このような交差部Kを備えた設備において、構成の簡素化を図りながら、給電線19から物品搬送車3への駆動用電力の給電を適切に行うことで、物品搬送車3が交差部Kにおける主経路20及び副経路間連結経路22の双方での走行を適切に行えるように構成されている。
ここで、図4は、交差部Kの全体概略を示す斜視図であり、図5は、交差部Kの全体概略を示す平面図である。そして、図6は、主経路20にて物品搬送車3を通過させるときの状態を示した平面図であり、図7は、副経路間連結経路22にて物品搬送車3を通過させるときの状態を示した平面図である。また、図8は、図5におけるVIII-VIII断面図であり、図9は、図5におけるIX-IX断面図である。
これにより、給電線19は、回転軸心P周りで回転自在な位置変更レール27に支持させるのではなく、レール支持体29に固定された主走行レール2a及び副走行レール2bに支持されているので、給電線19を主走行レール2a及び副走行レール2bに固定させる等の簡易な支持構成を採用するだけでよく、給電線19を支持するための構成の簡素化を図ることができる。
まず、主経路20にて物品搬送車3を通過させるときについて説明すると、図6に示すように、主経路20にて物品搬送車3を通過させるときには、切換手段が第1切換状態に切り換えて位置変更レール27を第1位置に位置させる。そして、物品搬送車3は、主経路用入口部分23の主走行レール2aを走行したのち、主走行レール2aから第1位置に位置する位置変更レール27に乗り移り、その後、位置変更レール27から主経路用出口部分24の主走行レール2aに乗り移る。
その後、物品搬送車3が主走行レール2aから第1位置に位置する位置変更レール27に乗り移るのであるが、第1折り曲げ部位19a及び第2折り曲げ部位19bが第1位置に位置する位置変更レール27側に延設されているので、引き続いて第1折り曲げ部位19a及び第2折り曲げ部位19bから物品搬送車3へ駆動用電力の給電を適切に行うことができる。
その後、物品搬送車3が主経路用出口部分24の主走行レール2aに乗り移って走行するときには、引き続いて第3折り曲げ部位19c及び第4折り曲げ部位19dから物品搬送車3へ駆動用電力の給電を適切に行うことができる。
(1)上記実施形態では、主経路20と副経路間連結経路22とが交差する交差部Kについて例示しているが、ある経路と別の経路とが交差する交差部の夫々に対して、本発明に係る物品搬送設備を適応することが可能である。
上記実施形態では、主経路20と副経路間連結経路22とが交差する交差部に、主経路20から分岐して副経路21に接続された曲線状の分岐経路と副経路21から主経路20に合流する曲線状の合流経路とが備えられている。このような曲線状の分岐経路や曲線状の合流経路が備えられた交差部に限らず、曲線状の走行経路を有しない2つの走行経路が直交して交差する交差部において、本発明に係る物品搬送設備を適応することができる。例えば、図1の一点鎖線で示すように、副経路21と直交して交差するループ状の走行経路Sを設け、副経路21とループ状の走行経路S(図中一点鎖線にて示す走行経路)とが交差する交差部を、曲線状の走行経路を有しない2つの走行経路が直交して交差する交差部として構成し、この交差部Kにおいて、本発明に係る物品搬送設備を適応することができる。
2b 第2走行レール(副走行レール)
3 物品搬送車
12 走行輪
19 給電線
19a~19d 折り曲げ部位
20 第1経路(主経路)
22 第2経路(副経路間連結経路)
23 第1経路の入口部分(主経路用入口部分)
24 第1経路の出口部分(主経路用出口部分)
25 第2経路の入口部分(副経路用入口部分)
26 第2経路の出口部分(副経路用出口部分)
27 位置変更レール
30 切換手段(回転支持体)
31 切換手段(シリンダ)
32 切換手段(リンク機構)
34 給電線用支持体
K 交差部
S 走行経路
Claims (6)
- 走行輪を備え、走行経路に沿って配設された給電線から駆動用電力が給電されて走行自在な物品搬送車と、前記走行経路として第1経路と第2経路とが備えられ、前記第1経路と前記第2経路とが交差する交差部には、前記第1経路にて物品搬送車を通過させる第1切換状態と前記第2経路にて前記物品搬送車を通過させる第2切換状態とに切換自在な切換手段が備えられた物品搬送設備であって、
前記第1経路において前記交差部に連続する入口部分及び前記交差部から連続する出口部分の夫々には、前記走行輪を案内支持する第1走行レールが備えられ、前記第2経路において前記交差部に連続する入口部分及び前記交差部から連続する出口部分の夫々には、前記走行輪を案内支持する第2走行レールが備えられ、前記交差部には、前記第1走行レールに連続する第1位置と前記第2走行レールに連続する第2位置とに位置変更自在な位置変更レールが備えられ、前記切換手段は、前記位置変更レールを第1位置に切り換えることにより前記第1切換状態に切り換え、且つ、前記位置変更レールを第2位置に切り換えることにより前記第2切換状態に切換るよう構成され、前記給電線は、前記第1走行レール及び第1位置に位置する前記位置変更レールを走行する前記物品搬送車に駆動用電力を給電するように前記第1走行レールに支持され、且つ、前記第2走行レール及び第2位置に位置する前記位置変更レールを走行する前記物品搬送車に駆動用電力を給電するように前記第2走行レールに支持されている物品搬送設備。 - 前記給電線は、平面視において、前記第1走行レール側から第1位置に位置される前記位置変更レールの端部を超えて前記位置変更レール内に延設される状態で前記第1走行レールに支持されて、第1位置に位置する前記位置変更レールを走行する物品搬送車に駆動用電力を給電自在で、且つ、前記第2走行レール側から第2位置に位置される前記位置変更レールの端部を超えて前記位置変更レール内に延設される状態で前記第2走行レールに支持されて、第2位置に位置する前記位置変更レールを走行する物品搬送車に駆動用電力を給電自在に構成されている請求項1に記載の物品搬送設備。
- 前記物品搬送車には、前記走行輪が前記物品搬送車の横幅方向に間隔を隔てて左右一対備えられ、前記第1走行レール、前記第2走行レール及び前記位置変更レールは、左右一対の前記走行輪の夫々を案内支持するように左右一対備えられている請求項1に記載の物品搬送設備。
- 前記給電線は、左右一対の前記第1走行レール及び左右一対の前記第2走行レールの夫々に支持される状態で、前記物品搬送車の横幅方向に間隔を隔てて左右一対備えられている請求項3に記載の物品搬送設備。
- 左右一対の前記第1走行レールと左右一対の前記第2走行レールとは、互いに隣接する前記第1走行レールと前記第2走行レールとが直交するように配設され、前記給電線は、前記第1走行レール側から第1位置に位置する前記位置変更レール側に延びた後、折曲されて第2位置に位置する前記位置変更レール側から前記第2走行レール側に延びる折曲部位を4つ備えて構成され、直交する前記第1走行レールと前記第2走行レールとの夫々には、前記第1走行レールと前記第2走行レールとに亘って配設されて前記給電線の各折り曲げ部位を支持する全体的に直角に折れ曲がった給電線用支持体が備えられている請求項4に記載の物品搬送設備。
- 前記物品搬送車には、前記走行輪が前記物品搬送車の前後方向に間隔を隔てて前後一対備えられ、前記位置変更レールは、前記物品搬送車の走行方向での長さが、前後一対の前記走行輪の間隔よりも短くなるように構成されている請求項1に記載の物品搬送設備。
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Also Published As
Publication number | Publication date |
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CN103052573B (zh) | 2014-12-17 |
TW201210921A (en) | 2012-03-16 |
US8826825B2 (en) | 2014-09-09 |
KR101820815B1 (ko) | 2018-01-22 |
MY156906A (en) | 2016-04-15 |
US20130213755A1 (en) | 2013-08-22 |
JP2012040961A (ja) | 2012-03-01 |
KR20130139229A (ko) | 2013-12-20 |
JP5440870B2 (ja) | 2014-03-12 |
TWI496727B (zh) | 2015-08-21 |
SG187850A1 (en) | 2013-03-28 |
CN103052573A (zh) | 2013-04-17 |
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