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DE69433361D1 - Herstellungsmethode von selbstmontierenden Mikrostrukturen - Google Patents

Herstellungsmethode von selbstmontierenden Mikrostrukturen

Info

Publication number
DE69433361D1
DE69433361D1 DE69433361T DE69433361T DE69433361D1 DE 69433361 D1 DE69433361 D1 DE 69433361D1 DE 69433361 T DE69433361 T DE 69433361T DE 69433361 T DE69433361 T DE 69433361T DE 69433361 D1 DE69433361 D1 DE 69433361D1
Authority
DE
Germany
Prior art keywords
self
manufacturing
assembling microstructures
microstructures
assembling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69433361T
Other languages
English (en)
Other versions
DE69433361T2 (de
Inventor
S Smith
J Yeh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Application granted granted Critical
Publication of DE69433361D1 publication Critical patent/DE69433361D1/de
Publication of DE69433361T2 publication Critical patent/DE69433361T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
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    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Optics & Photonics (AREA)
  • Led Devices (AREA)
  • Weting (AREA)
  • Die Bonding (AREA)
  • Drying Of Semiconductors (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Led Device Packages (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
DE69433361T 1993-12-17 1994-12-07 Herstellungsmethode von selbstmontierenden Mikrostrukturen Expired - Lifetime DE69433361T2 (de)

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US169298 1993-12-17
US08/169,298 US5545291A (en) 1993-12-17 1993-12-17 Method for fabricating self-assembling microstructures
PCT/US1994/014152 WO1995017005A1 (en) 1993-12-17 1994-12-07 Method for fabricating self-assembling microstructures

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EP (3) EP0734586B1 (de)
JP (3) JP3535166B2 (de)
CN (3) CN100466250C (de)
AU (1) AU681928B2 (de)
CA (1) CA2177276C (de)
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EP1372194A1 (de) 2003-12-17
JP3828567B2 (ja) 2006-10-04
CN1103118C (zh) 2003-03-12
CA2177276C (en) 2008-04-01
EP0734586A1 (de) 1996-10-02
EP0734586B1 (de) 2003-11-26
EP1463116A3 (de) 2007-12-05
CN1492483A (zh) 2004-04-28
JP2006074062A (ja) 2006-03-16
JP3884426B2 (ja) 2007-02-21
DE69433361T2 (de) 2004-09-16
CA2177276A1 (en) 1995-06-22
US5783856A (en) 1998-07-21
JPH09506742A (ja) 1997-06-30
CN1137329A (zh) 1996-12-04
CN1263098C (zh) 2006-07-05
AU681928B2 (en) 1997-09-11
EP1463116A2 (de) 2004-09-29
AU1304695A (en) 1995-07-03
EP0734586A4 (de) 1998-10-14
CN100466250C (zh) 2009-03-04
JP2004165680A (ja) 2004-06-10
WO1995017005A1 (en) 1995-06-22
US5545291A (en) 1996-08-13
CN1893062A (zh) 2007-01-10
JP3535166B2 (ja) 2004-06-07

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