JP6361994B2 - 有機電子装置用基板の製造方法 - Google Patents
有機電子装置用基板の製造方法 Download PDFInfo
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- JP6361994B2 JP6361994B2 JP2016531565A JP2016531565A JP6361994B2 JP 6361994 B2 JP6361994 B2 JP 6361994B2 JP 2016531565 A JP2016531565 A JP 2016531565A JP 2016531565 A JP2016531565 A JP 2016531565A JP 6361994 B2 JP6361994 B2 JP 6361994B2
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- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 229910001631 strontium chloride Inorganic materials 0.000 description 1
- AHBGXTDRMVNFER-UHFFFAOYSA-L strontium dichloride Chemical compound [Cl-].[Cl-].[Sr+2] AHBGXTDRMVNFER-UHFFFAOYSA-L 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- YRGLXIVYESZPLQ-UHFFFAOYSA-I tantalum pentafluoride Chemical compound F[Ta](F)(F)(F)F YRGLXIVYESZPLQ-UHFFFAOYSA-I 0.000 description 1
- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M thiocyanate group Chemical group [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 description 1
- IBBLKSWSCDAPIF-UHFFFAOYSA-N thiopyran Chemical compound S1C=CC=C=C1 IBBLKSWSCDAPIF-UHFFFAOYSA-N 0.000 description 1
- NZFNXWQNBYZDAQ-UHFFFAOYSA-N thioridazine hydrochloride Chemical compound Cl.C12=CC(SC)=CC=C2SC2=CC=CC=C2N1CCC1CCCCN1C NZFNXWQNBYZDAQ-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- HDUMBHAAKGUHAR-UHFFFAOYSA-J titanium(4+);disulfate Chemical compound [Ti+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O HDUMBHAAKGUHAR-UHFFFAOYSA-J 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- ISNYUQWBWALXEY-OMIQOYQYSA-N tsg6xhx09r Chemical compound O([C@@H](C)C=1[C@@]23CN(C)CCO[C@]3(C3=CC[C@H]4[C@]5(C)CC[C@@](C4)(O)O[C@@]53[C@H](O)C2)CC=1)C(=O)C=1C(C)=CNC=1C ISNYUQWBWALXEY-OMIQOYQYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 150000003681 vanadium Chemical class 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000003981 vehicle Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Description
10:基材層、基板または基材層の前駆体
20:有機電子素子
30:モールド
41、42:基材層
反応器内でBPDA(3,3',4,4'−Biphenyltetracarboxylic dianhydride)及びPDA(p−phenylene diamine)を縮合反応させてポリアミド酸溶液(フィルム形成用組成物、屈折率:約1.625)を合成した。その後、前記合成されたポリアミド酸溶液を、図3に示したように、表面に凹凸パターンが形成されたモールド30上にイミド化反応後に約10μm程度の厚さの層が形成されるようにコーティングした。その後、オーブンで約2℃/minの速度で加熱した後、80℃で15分、150℃で30分、220℃で30分及び350℃で1時間の間維持してイミド化反応させて第1ポリイミド層を形成した。その後、上述の方式と同一な方式で形成された第2ポリイミド層を互いの凹凸パターンが対向するようにラミネートして基板(A)を製造した。前記基板(A)に対して、Haze Meter HM−150を使用してASTM D1003に準してヘイズを評価した結果、約5%であり、光透過率は、約85%であった。
BPDA(3,3',4,4'−Biphenyltetracarboxylic dianhydride)及びTFMB(2,2'−Bis(trifluoromethyl)benzidine)を縮合反応させて製造された第1ポリアミド酸溶液(屈折率:約1.56)及び、FDA(2,2'−Bis−(3,4−Dicarboxyphenyl)hexafluoropropane dianhydride)及びTFMB(2,2'−Bis(trifluoromethyl)benzidine)を縮合反応して製造された第2ポリアミド酸溶液(屈折率:約1.541)を、固形分重量基準で5:95の割合(第1ポリアミド酸:第2ポリアミド酸)で混合して製造したフィルム形成用組成物を使用したこと以外は、製造例1と同一にポリイミド基板(B)を製造した。合成された基板(B)に対して、Haze Meter HM−150を使用してASTM D1003に準してヘイズを評価した結果、約5.12%であり、光透過率は、約86.4%であった。
BPDA(3,3',4,4'−Biphenyltetracarboxylic dianhydride)及びTFMB(2,2'−Bis(trifluoromethyl)benzidine)を縮合反応させて製造された第1ポリアミド酸溶液(屈折率:約1.56)及び、FDA(2,2'−Bis−(3,4−Dicarboxyphenyl)hexafluoropropane dianhydride)及びTFMB(2,2'−Bis(trifluoromethyl)benzidine)を縮合反応して製造された第2ポリアミド酸溶液(屈折率:約1.541)を、固形分重量基準で10:90の割合(第1ポリアミド酸:第2ポリアミド酸)で混合して製造したフィルム形成用組成物を使用したこと以外は、製造例1と同一にポリイミド基板(C)を製造した。合成された基板(C)に対して、Haze Meter HM−150を使用してASTM D1003に準してヘイズを評価した結果、約16.44%であり、光透過率は、約83.5%であった。
BPDA(3,3',4,4'−Biphenyltetracarboxylic dianhydride)及びPDA(p−phenylene diamine)を縮合反応させて製造された第1ポリアミド酸溶液(屈折率:約1.625)及び、 BPDA(3,3',4,4'−Biphenyltetracarboxylic dianhydride)及びTFMB(2,2'−Bis(trifluoromethyl)benzidine)を縮合反応させて製造された第2ポリアミド酸溶液(屈折率:約1.56)を、固形分重量基準で10:90の割合(第1ポリアミド酸:第2ポリアミド酸)で混合し、追加で散乱性がない範囲の粒径を有する高屈折フィラー(rutile TiO2、屈折率:約2.8)を配合して製造されたフィルム形成用組成物を使用したこと以外は、製造例1と同一にポリイミド基板(D)を製造した。合成された基板(D)に対して、Haze Meter HM−150を使用してASTM D1003に準してヘイズを評価した結果、約9%であり、光透過率は、約81%であり、屈折率は、約1.8程度であった。
製造例1で製造されたポリイミド基板(A)上に有機電子素子を形成して、図2に示した形態の装置を製造した。基板(A)上に公知の素材を使用して正孔注入性透明電極層、正孔輸送層、発光波長が約380〜500nmの範囲内にある第1発光ユニット、n型有機半導体層、p型有機半導体層、発光波長が約500〜700nmの範囲内にある第2発光ユニット、正孔ブロック層、電子輸送層、電子注入層及び電子注入性反射電極層を順次形成して素子領域を形成し、前記素子領域を適切な封止素材で封止して有機電子装置を製造した。製造された有機電子装置に対して公知の方式で量子効率を測定した結果、約35.4%程度であった。
製造例2で製造された基板(B)上に有機電子素子を形成した。まず、前記ポリイミド基板(B)上にバリア層を形成した。バリア層は、ALD(Atomic Layer Deposition)方式で、単独蒸着時の屈折率が約1.6〜1.8程度の範囲内であるAl2O3の層と、単独蒸着時の屈折率が約2.0〜2.4程度の範囲内であるTiO2の層と、を交賛で蒸着して、最終的に屈折率が約1.8程度になるように形成した。Al2O3の層は、公知のALD方式によって、約200℃の温度で、前駆体としてトリメチルアルミニウムの層と水(H2O)層を交賛で吸着させて形成し、TiO2の層も公知されたALD方式によって、約200℃の温度で、前駆体としてTiCl4の層と水(H2O)層を交賛で吸着させて形成した。形成時に、各Al2O3の層及びTiO2の層の厚さは、各々約2nm〜5nmの範囲内になるようにして、最終的に約40nm程度の厚さのバリア層を形成した。その後、バリア層上に公知の素材を使用して正孔注入性透明電極層、正孔輸送層、発光波長が、約380〜500nmの範囲内にある第1発光ユニット、n型有機半導体層、p型有機半導体層、発光波長が約500〜700nmの範囲内にある第2発光ユニット、正孔ブロック層、電子輸送層、電子注入層及び電子注入性反射電極層を順次形成して素子領域を形成し、前記素子領域を適切な封止素材で封止して有機電子装置を製造した。製造された有機電子装置に対して公知の方式で量子効率を測定した結果、約41.6%程度であった。
製造例3で製造された基板(C)を適用したこと以外は、実施例1と同一に有機電子素子を形成した。製造された有機電子素子に対して公知の方式で量子効率を測定した結果、約41.6%程度であった。
製造例4で製造された基板(D)を適用したこと以外は、実施例1と同一に有機電子素子を形成した。製造された有機電子素子に対して公知の方式で量子効率を測定した結果、約42%程度であった。
製造例1で使用したことと同一なフィルム形成用組成物を約20μm程度の厚さでコーティングして製造された凹凸パターンが形成されないポリイミド基板を使用したこと以外は、実施例1と同一に有機電子素子を形成した。製造された有機電子素子に対して公知の方式で量子効率を測定した結果、約31.9%程度であった。
20:有機電子素子
30:モールド
41、42:基材層
Claims (13)
- 高分子基材層または前記基材層の前駆体の層の少なくとも一面に凹凸パターンを形成することによって基板を製造する段階と、
前記基材層または前記前駆体の層の前記凹凸パターンが形成されている面に第2基材層を形成することによって空間を形成する段階と、
空間を有する基板上に、第1電極層、有機物層及び第2電極層を形成する段階とを含み、
前記基材層は、ガラス転移温度が200℃以上であり、550nm波長の光に対する屈折率が1.4以上であり、
高分子基材層またはその前駆体の層は、テトラカルボン酸二無水物及びジアミン化合物の縮合単位またはそのイミド化単位を含むことを特徴とする有機電子装置の製造方法。 - 凹凸パターンを形成する段階は、表面に凹凸が形成されているモールド上に高分子基材層またはその前駆体の層を前記モールドの凹凸形状に接するように形成する段階を含むことを特徴とする請求項1に記載の有機電子装置の製造方法。
- 凹凸パターンが形成されている基材層の前記凹凸パターンに対向する第2基材層の面には凹凸パターンが形成されていることを特徴とする請求項1に記載の有機電子装置の製造方法。
- 前記基材層のヘイズが3%〜90%の範囲内にあることを特徴とする請求項1に記載の有機電子装置の製造方法。
- 凹凸パターンの凹部に基材層とは屈折率が相違する物質を充填する段階をさらに実行することを特徴とする請求項1に記載の有機電子装置の製造方法。
- 基材層と屈折率が相違する物質は、SiON、TiO2、SiO2、Al2O3、Ta2O3、Ti3O3、TiO、ZrO2、Nb2O3、CeO2、ZnSまたはエポキシ樹脂であることを特徴とする請求項5に記載の有機電子装置の製造方法。
- 高分子基材層またはその前駆体の層は、第1テトラカルボン酸二無水物及び第1ジアミン化合物の縮合単位またはそのイミド化単位である第1単位と、第2テトラカルボン酸二無水物及び第2ジアミン化合物の縮合単位またはそのイミド化単位である第2単位と、を含む共重合体を含むことを特徴とする請求項1に記載の有機電子装置の製造方法。
- 高分子基材層またはその前駆体の層は、第1テトラカルボン酸二無水物及び第1ジアミン化合物の縮合単位またはそのイミド化単位である第1単位を含む第1重合体と、第2 テトラカルボン酸二無水物及び第2ジアミン化合物の縮合単位またはそのイミド化単位である第2単位を含む第2重合体と、を含むことを特徴とする請求項1に記載の有機電子装置の製造方法。
- 第1単位の屈折率と第2単位の屈折率の差の絶対値が0.01以上であることを特徴とする請求項7または請求項8に記載の有機電子装置の製造方法。
- 第1単位に含まれる極性官能基のモル数と第2単位に含まれる極性官能基のモル数の差の絶対値が2以上であることを特徴とする請求項7または請求項8に記載の有機電子装置の製造方法。
- 基板及び基板上に形成されている素子領域を含み、
素子領域が、基板上に形成されている第1電極層、第1電極層上に形成されている有機物層、及び有機物層上に形成されている第2電極層を含み、
基板が、
少なくとも一面に凹凸パターンが形成されている高分子基材層と、
前記高分子基材層の凹凸パターンが形成されている面に形成されている第2高分子基材層と、を含み、
前記凹凸パターンにより基板内部に空間が形成されており、
前記基材層は、ガラス転移温度が200℃以上であり、550nm波長の光に対する屈折率が1.4以上であり、
高分子基材層は、テトラカルボン酸二無水物及びジアミン化合物の縮合単位またはそのイミド化単位を含むことを特徴とする有機電子装置。 - 請求項11に記載の有機電子装置を含むことを特徴とするディスプレイ用光源。
- 請求項11に記載の有機電子装置を含むことを特徴とする照明機器。
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