JP5197829B2 - Priming processing method and priming processing apparatus - Google Patents

Description

  The present invention relates to a priming processing method and a priming processing apparatus for forming a liquid film of a processing liquid as a preparation for coating processing in the vicinity of a discharge port of a slit nozzle used for spinless coating processing.

  In a photolithography process in the manufacturing process of flat panel displays (FPD) such as LCDs, a long slit nozzle having slit-like discharge ports is scanned to apply a resist solution onto a substrate to be processed (for example, a glass substrate). The spinless method is often used.

  In such a spinless method, in order to prevent non-uniformity of the resist dry film thickness and coating unevenness, the resist solution discharged onto the substrate during coating scanning rotates to the back side of the slit nozzle in the scanning direction. It is desirable that the meniscus formed in this way be aligned in a horizontal line in the longitudinal direction of the nozzle. To this end, the coating gap between the slit nozzle outlet and the substrate is closed with an appropriate amount of resist solution immediately before the start of coating scanning. Is a necessary condition. In order to satisfy this requirement, a priming process for forming a liquid film of a resist solution from the discharge port of the slit nozzle to the lower end of the back surface is performed as a preparation for coating scanning.

  In a typical priming method, a cylindrical priming roller having a length equal to or longer than that of the slit nozzle is horizontally installed near the coating processing unit, and is opposed to the top of the priming roller through a minute gap. The resist nozzle is discharged by bringing the slit nozzle close to the position, and immediately after that, the priming roller is rotated in a predetermined direction. Then, the resist solution discharged near the top of the priming roller is wound around the outer peripheral surface of the priming roller so as to wrap around the lower part of the back surface of the slit nozzle, and is divided into a slit nozzle side and a priming roller side. The liquid film is cut off. A liquid film of the resist solution remains on the slit nozzle from the nozzle discharge port to the lower end of the back surface.

  A conventional general priming processing apparatus is provided with not only a rotating mechanism that rotates the priming roller but also a scraper, a cleaning nozzle, and a drying nozzle for cleaning the priming roller. As a process, the priming roller is continuously rotated by a rotating mechanism, the resist solution is scraped off from the outer peripheral surface of the priming roller by a scraper, and the cleaning liquid and the drying gas are sprayed from the cleaning nozzle and the drying nozzle to the outer peripheral surface of the priming roller, respectively. Yes.

  However, the region on the priming roller used for receiving and winding the resist solution discharged from the slit nozzle in one priming process varies depending on the size of the slit nozzle and the priming roller, but the entire circumference of the priming roller ( 360 degrees) is not required, and it is usually less than half a circle (180 degrees), and may be less than 1/4 (90 degrees) or less than 1/5 (72 degrees). However, the conventional general priming processing apparatus sprays the cleaning liquid on the entire outer peripheral surface (all circumferences) of the priming roller by continuously rotating the priming roller as described above every time the priming process is executed. There was a problem of using a large amount of (usually thinner).

  In order to solve this problem, the present applicant, in Patent Document 1, for one priming process, the discharge port of the slit nozzle and the upper end of the priming roller face each other with a predetermined gap therebetween, and the slit nozzle A more constant amount of processing liquid or coating liquid (for example, resist liquid) is discharged and the priming roller is rotated by a predetermined rotation angle, and a partial surface area equal to or less than a half circumference of the priming roller is used for the priming process. A priming method is disclosed in which the outer peripheral surface of the priming roller is collectively cleaned over the entire circumference after a predetermined number of priming processes have been completed.

  In this priming method, the outer peripheral surface of the priming roller is divided into a plurality of circumferential directions, and the divided areas (partial surface areas) are sequentially assigned to a predetermined number of continuous priming processes, and then the priming roller is used. The outer peripheral surface of is collectively cleaned over the entire circumference. In this batch cleaning process, the cleaning mechanism and the drying unit are operated while the priming roller is continuously rotated by the rotating mechanism, and the outer peripheral surface of the priming roller is cleaned all around. In addition, there is no need for a scraper to scrape off the liquid film of the coating liquid wound on the surface of the priming roller, and it is possible to save the cleaning liquid consumed in the cleaning process after the priming process and to generate particles during the cleaning process. Can also be prevented.

JP2007-237046

  The present invention is an improved version of the priming treatment method disclosed by the present applicant in the above-mentioned Patent Document 1 and, from a unique point of view, further improves the cleaning liquid used in the priming treatment while considering the yield or reliability of the priming treatment. To achieve savings.

  That is, the present invention provides a priming processing method and a priming processing apparatus that can further reduce the amount of cleaning liquid used while ensuring the reliability of the priming processing.

The priming processing method according to the first aspect of the present invention is a coating process in which a coating liquid is applied on a substrate to be processed using a long slit nozzle, and is applied as a preparation for the coating process in the vicinity of the discharge port of the slit nozzle. A priming processing method for forming a liquid film of liquid, wherein the slit nozzle for coating processing or non-coating is provided with a predetermined gap from the top of a horizontally disposed cylindrical or columnar priming roller Another slit nozzle for processing is made to face in parallel, the coating liquid is ejected to the slit nozzle, and the priming roller is rotated so that a part of the ejected coating liquid on the outer peripheral surface of the priming roller Alternatively, the first step of winding up the whole and the coating liquid film wound up on the outer peripheral surface of the priming roller is dried. For the second step of forming a dry film of one layer and a single priming process, the dry film of the first layer is positioned on the top of the priming roller, and a predetermined amount with respect to the top of the priming roller. The discharge port of the slit nozzle for coating treatment is opposed in parallel across a gap, and after a predetermined amount of coating liquid is discharged to the slit nozzle, the priming roller is rotated, and the dry film of the first layer A third step of winding up a part of the discharged coating liquid, and a fourth step of collectively removing the liquid film or dry film adhering to the outer peripheral surface of the priming roller by cleaning. .

A priming processing apparatus according to a first aspect of the present invention is a processing for preparing a coating process in the vicinity of a discharge port of the slit nozzle in a coating process in which a coating liquid is applied onto a substrate to be processed using a long slit nozzle. A priming processing apparatus for forming a liquid film of liquid, a cylindrical or columnar priming roller disposed horizontally at a predetermined position, and a rotation mechanism for rotating the priming roller around its central axis, Each of the cleaning mechanism for spraying cleaning liquid to clean the outer peripheral surface of the priming roller, the exhaust mechanism for forcibly exhausting the periphery of the priming roller, the rotation mechanism, the cleaning mechanism, and the exhaust mechanism A control unit for controlling the application process, and a slit for the coating treatment with a predetermined gap from the top of the priming roller. The nozzles or other slit nozzles for non-coating treatment are made to face each other in parallel, the coating liquid is ejected to the slit nozzles, and the priming roller is rotated by the rotating mechanism, so that the ejection is performed on the outer peripheral surface of the priming roller A part or the whole of the applied coating liquid is wound up, and the rotation of the priming roller is continued even after the coating liquid is wound up by the rotating mechanism while the exhaust mechanism is stopped. The coating film wound on the substrate is dried to form a first layer dry film, and the first layer dry film is positioned on the top of the priming roller for one priming process. The slit nozzle discharge port is opposed in parallel with a predetermined gap to the top of the priming roller, and the slit nozzle A predetermined amount of the coating liquid is discharged, and then the priming roller is rotated by the rotation mechanism to wind a part of the discharged coating liquid on the dry film of the first layer, and the desired number of times After the priming process is completed, the cleaning mechanism and the exhaust mechanism are operated while rotating the priming roller by the rotating mechanism, and the liquid film or the dry film adhering on the outer peripheral surface of the priming roller is collectively cleaned. Remove.

  In the priming processing method or processing apparatus according to the first aspect, another priming process subsequent to the dry film of the first layer formed on the outer peripheral surface of the priming roller as a result of one priming process. In this way, the liquid film of the second layer is wound up on the dry film of the first layer. Here, the length (circumferential size) of the second-layer liquid film wound on the first-layer dry film is the length of the first-layer liquid film wound on the outer peripheral surface of the priming roller. It will be much shorter than the (circumferential direction size). Accordingly, the number of times of liquid film winding of the second layer (number of times of priming processing) can be made larger than the number of times of liquid film winding of the first layer (number of times of priming processing) within one circumference of the priming roller. The liquid films (or dry films) of the first layer and the second layer are simultaneously removed by collective cleaning. As a result, the number of priming processes that can be continuously performed without inserting the cleaning process on the priming roller can be greatly increased, and the amount of cleaning liquid used in the batch cleaning can be further greatly reduced.

  As a preferred embodiment, in the first step, the priming processing method according to the first aspect includes, in the first step, a slit for coating processing with a predetermined gap from the top of the priming roller for one priming processing. The nozzle outlets are made to face each other in parallel, and after a predetermined amount of coating liquid is discharged to the slit nozzle, the priming roller is rotated to wind a part of the coating liquid on the outer peripheral surface of the priming roller.

  Preferably, the dry film of the first layer is formed in a semi-dry state by natural drying. For this reason, after winding a part of the coating liquid on the outer peripheral surface of the priming roller, the priming roller continues to rotate as it is, and the coating liquid film is naturally dried while the exhaust mechanism is stopped. preferable. By such a natural drying method, each dry film can be subjected to batch cleaning in a semi-dry state, and the dry film can be easily washed off, and the amount of cleaning liquid used can be reduced.

  In another preferred embodiment, the priming method according to the first aspect includes a fifth method for measuring the thickness distribution characteristic of the dry film of the first layer between the second step and the third step. Based on the measurement result of the process and the film thickness distribution characteristic, when the film thickness uniformity of the dry film of the first layer exceeds a certain standard, a determination result is given that the execution of the third process is permitted. And a sixth step for outputting a determination result indicating that the execution of the third step should be stopped when the thickness uniformity of the dry film of the layer does not exceed the reference. The priming apparatus according to the second aspect has a film thickness measuring unit for measuring the film thickness of the dry film on the priming roller, and the film thickness of the first dry film is measured by the film thickness measuring unit. Measure the distribution characteristics, and based on the measurement results of the film thickness distribution characteristics, when the film thickness uniformity of the first layer dry film exceeds a certain standard, execute a priming process on the first layer dry film, When the film thickness uniformity of the dry film of the first layer does not exceed the standard, the priming process on the dry film of the first layer is stopped.

  In this way, the priming process is provided with the function of inspecting the film quality state (film thickness uniformity) of the dry film of the first layer that is to be the base for receiving the coating liquid discharged from the slit nozzle in the subsequent priming process. Yield and reliability can be improved.

  Moreover, in another suitable one aspect | mode, the coating liquid winding size of the circumference direction in a 3rd process is less than 1/2 of the coating liquid winding size of the circumference direction in a 1st process. As described above, the length (circumferential size) of the second-layer liquid film wound on the first-layer dry film is the same as that of the first-layer liquid film wound on the outer peripheral surface of the priming roller. This is much shorter (usually 1/2 or less) than the length (size in the circumferential direction).

  In this case, in a preferred embodiment, the liquid film of the coating liquid wound on the first layer dry film in the third step is dried to form the second layer first dry film. Thereafter, another priming process is performed on the first layer dry film using a region different from the second layer first dry film, and a coating liquid (second layer first layer) is formed in the region. 2 liquid film) is wound up. Thereafter, in the collective cleaning, the dry film of the first layer, the first dry film of the second layer, and the second liquid film (or the second dry film) are simultaneously washed off.

  In another preferred embodiment, the liquid film of the coating liquid wound on the first layer dry film in the third step is dried to form a second layer dry film. Thereafter, another priming process is performed using the dried film of the second layer, and the coating liquid (third layer of liquid film) is wound up in the region. After that, in the batch cleaning, the first layer dry film, the second layer dry film, and the third layer liquid film (dry film) first dry film are washed out simultaneously.

  Further, in the collective cleaning (fourth step), preferably, the cleaning liquid is sprayed only on a region where the liquid film or the dry film is attached on the outer peripheral surface of the priming roller while rotating the priming roller. As a result, the amount of cleaning liquid used in the batch cleaning can be further reduced. Prior to batch cleaning, the range and film thickness of each liquid film or dry film adhering to the outer peripheral surface of the priming roller are measured, and the amount of cleaning liquid used in the batch cleaning is determined based on the measurement result. It is also preferable, and this can further promote the reduction of the amount of cleaning liquid used in the batch cleaning.

Priming method according to the second aspect of the present invention, in preparation of the coating in the vicinity of the discharge port of the slits nozzle in the coating process of applying the coating solution on a substrate to be processed by using a slit nozzle long type A priming processing method for forming a liquid film of a coating liquid, wherein a predetermined gap is separated from the top of a horizontally disposed cylindrical or columnar priming roller for one priming process. The discharge port of the slit nozzle is made to face in parallel, and a predetermined amount of coating liquid is discharged to the slit nozzle, and then the priming roller is rotated so that the discharged coating liquid is applied onto the outer peripheral surface of the priming roller. A first step of winding a part; and drying the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller in the first step to For the second step of forming the first dry film of the layer and another priming process, the first dry film of the first layer is removed and a predetermined gap is separated from the top of the priming roller. The discharge port of the slit nozzle is made to face in parallel, and a predetermined amount of coating liquid is discharged to the slit nozzle, and then the priming roller is rotated, so that the outer periphery of the priming roller is different from the first dry film. A third step of winding a part of the discharged coating liquid on the surface, and a liquid film of the coating liquid wound on the outer peripheral surface of the priming roller in the third step is dried to For the fourth step of forming a second dry film of one layer and another one-time priming process, the first or second dry film of the first layer is positioned on the top of the priming roller, Priming The discharge port of the slit nozzle is opposed in parallel with a predetermined gap with respect to the top of the roller, the priming roller is rotated after discharging a predetermined amount of coating liquid to the slit nozzle, and the first nozzle is rotated. A fifth step of winding a part of the discharged coating liquid on the first or second dry film of the layer, and washing the liquid film or dry film adhering to the outer peripheral surface of the priming roller And a sixth step of batch removal.

Further, the priming processing apparatus according to the second aspect of the present invention provides a preparation for the coating process in the vicinity of the discharge port of the slit nozzle in the coating process in which the coating liquid is applied onto the substrate to be processed using a long slit nozzle. As a priming processing apparatus for forming a liquid film of processing liquid as a cylindrical or columnar priming roller disposed horizontally at a predetermined position, and a rotating mechanism for rotating the priming roller about its central axis A cleaning mechanism for spraying cleaning liquid to clean the outer peripheral surface of the priming roller, an exhaust mechanism for forcibly exhausting the periphery of the priming roller, the rotating mechanism, the cleaning mechanism, and the exhaust mechanism. A control unit for controlling each operation, and for a single priming process, the top of the priming roller is provided. The discharge port of the slit nozzle is faced in parallel with a gap therebetween, and after a predetermined amount of coating liquid is discharged to the slit nozzle, the priming roller is rotated by the rotating mechanism, and the outer surface of the priming roller is rotated. A part of the discharged coating liquid is wound up, and the rotation of the priming roller is continued even after winding of the coating liquid by the rotating mechanism while the exhaust mechanism is stopped, and the outer periphery of the priming roller The liquid film of the coating liquid wound on the surface is dried to form the first dry film of the first layer, and the first dry film is removed and the top of the priming roller is removed for another priming process. The discharge port of the slit nozzle is opposed in parallel with a predetermined gap therebetween, and a predetermined amount of coating liquid is discharged to the slit nozzle before the rotation. The priming roller is rotated according to the structure, a part of the discharged coating liquid is wound on the outer peripheral surface of the priming roller in a region different from the first dry film, and the exhaust mechanism is stopped while the exhaust mechanism is stopped. Rotating the priming roller after winding the coating liquid by a rotating mechanism to dry the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller to form a second dry film of the first layer, In order to perform another priming process, the first or second dry film of the first layer is positioned on the top of the priming roller, with a predetermined gap from the top of the priming roller. The discharge port of the slit nozzle is made to face in parallel, a predetermined amount of coating liquid is discharged to the slit nozzle, and then the priming roller is rotated by the rotating mechanism. A part of the discharged coating liquid is wound on the first or second dry film of the first layer, and the priming roller is rotated by the rotating mechanism after the priming process is completed a desired number of times. The cleaning mechanism and the exhaust mechanism are operated, and the liquid film or dry film adhering to the outer peripheral surface of the priming roller is collectively removed by cleaning.

  In the priming processing method or processing apparatus according to the second aspect, the priming process is performed a plurality of times without inserting cleaning on the outer peripheral surface of the priming roller, and a drying process is performed as a post-process each time. First and second dry films of the first layer are formed on the outer peripheral surface of the roller. Then, another subsequent priming process is performed also on the first or second dry film of the first layer, whereby the liquid film of the second layer is superimposed on the first or second dry film of the first layer. Is wound up. Here, the length (circumferential size) of the second layer liquid film wound on the first dry film is the length (circumferential size) of the liquid film wound on the outer peripheral surface of the priming roller. ) Is much shorter than Accordingly, the number of times of liquid film winding of the second layer (number of times of priming processing) can be made larger than the number of times of liquid film winding of the first layer (number of times of priming processing) within one circumference of the priming roller. The liquid films (or dry films) of the first layer and the second layer are simultaneously removed by batch cleaning.

  In the priming processing method or priming processing apparatus according to the second aspect, similarly to the priming processing method or priming processing apparatus according to the second aspect, the priming process that can be continuously performed without inserting the cleaning process on the priming roller. The number of cleaning operations can be greatly increased, and the amount of cleaning liquid used in batch cleaning can be further greatly reduced.

  A priming processing apparatus according to a third aspect of the present invention is a priming processing apparatus for forming a liquid film of a processing liquid as a preparation for coating processing in the vicinity of a discharge port of a slit nozzle used for spinless coating processing, For one priming process, the discharge port of the slit nozzle is opposed in parallel with a predetermined gap with respect to the top of the priming roller, and a predetermined amount of the coating liquid is discharged to the slit nozzle. A priming treatment section for rotating a priming roller to wind a part of the coating liquid on the outer peripheral surface of the priming roller; and a liquid film of the coating liquid wound on the outer peripheral surface of the priming roller or a dried film thereof Based on the film thickness measurement part for measuring the film thickness distribution characteristic of the film and the measurement result of the film thickness distribution characteristic obtained from the film thickness measurement part And a nozzle discharge function determination unit determines the quality of the discharge function of the slit nozzle.

  According to the above configuration, it is possible to determine the quality of the discharge function of the slit nozzle from the film thickness distribution characteristics of the liquid film of the coating liquid wound on the priming roller after the priming process or the dry film thereof. Processing yield and reliability can be improved.

  According to the priming processing method or the priming processing apparatus of the present invention, the amount of the cleaning liquid used can be further reduced while ensuring the reliability of the priming processing by the configuration and operation as described above.

It is a figure which shows the structure of the priming processing apparatus in one Embodiment of this invention. It is a figure which shows typically each step | level when the 1st priming process is performed in a 1st system. It is a figure which shows the rotational speed of the priming roller in the priming process operation | movement of FIG. 2 with the waveform on a time-axis. It is a figure which shows typically each step | level when the 2nd priming process is performed. It is a figure which shows typically each step | level when the last (4th) priming process and the batch cleaning process immediately after are performed within one rotation of a priming roller. It is a figure which shows the rotational speed of the priming roller in the priming process operation | movement of FIG. 2, and a package cleaning process with the waveform on a time-axis. It is a figure for demonstrating the effect | action of the priming processing apparatus in a washing | cleaning process. It is a perspective view which shows the rough procedure of the priming processing method in a 1st system. It is a figure which shows the structure and effect | action of the principal part for measuring the film thickness distribution maintenance characteristic of the resist dry film | membrane of the 1st layer in an Example. It is a figure which shows typically each step when the first priming process is performed on the resist dry film | membrane of the 1st layer in an Example. It is a figure which shows typically each step | level when the last priming process and the batch cleaning process immediately after are performed on the resist dry film | membrane of a 1st layer in an Example. It is a perspective view which shows the procedure of the priming processing method in an Example. It is a figure which shows typically each step when the priming process in one modification is performed. It is a figure which shows the method of forming a base film (1st layer resist film) on a priming roller in another modification, and implementing a priming process on it.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

[Configuration of Priming Processing Device]
FIG. 1 shows a configuration of a priming processing apparatus according to an embodiment of the present invention. This priming processing apparatus is incorporated in a resist coating apparatus (not shown) that performs spinless resist coating processing in, for example, a photolithography process for an LCD manufacturing process, and places or floats a substrate to be processed for resist coating processing. It arrange | positions near the application | coating stage (not shown) to convey.

  In the illustrated priming apparatus, the housing 10 is formed of a long casing having a slit-like opening 12 on the upper surface, and the top of the priming roller 14 to be accommodated is exposed upward via the opening 12. Are supported horizontally and rotatably by a bearing (not shown).

  The priming roller 14 is a cylindrical or columnar roller made of stainless steel, for example, and has a certain outer diameter (for example, 100 to 150 mm) and a length that covers the entire length of a slit nozzle 72 described later. The housing 10 may also be made of stainless steel, for example.

  In the housing 10, a rotational angle position of 90 ° to 180 ° is preferably provided on the way from the top (top) to the bottom (bottom) of the priming roller 14 along the positive rotation direction (clockwise in FIG. 1). The cleaning nozzle 18 of the cleaning mechanism 16 is provided in the section. The cleaning nozzle 18 is preferably composed of a long two-fluid jet nozzle 18 and is disposed in parallel with the length covering the entire length of the priming roller 14, and is connected to the cleaning liquid supply unit 24 and the gas via pipes 20 and 22. It is connected to the supply unit 26. On-off valves 28 and 30 are provided in the middle of the pipes 24 and 26, respectively.

  When cleaning the priming roller 14, the on-off valves 28 and 30 are opened, and the two-fluid jet nozzle 18 is supplied with cleaning liquid (for example, thinner) and gas (for example, air or nitrogen gas) from the cleaning liquid supply unit 24 and the gas supply unit 26, respectively. Is received at a desired flow rate, and the cleaning liquid and gas are mixed in the nozzle and sprayed onto the outer peripheral surface of the priming roller 16 by a jet flow from a slit or a porous discharge port. The cleaning control unit 25 controls the cleaning liquid supply unit 24, the gas supply unit 26, and the on-off valves 28 and 30, and individually and arbitrarily controls the flow rates of the cleaning liquid and gas under instructions from the main control unit 70 described later. It can be done.

  The section between the opening 12 and the cleaning mechanism 16 is a mist shield 32 that is close to the inner wall of the housing 10 with a slight gap that does not contact the outer peripheral surface of the priming roller 14. The mist generated around the two-fluid jet nozzle 18 when cleaning the priming roller 14 does not go out to the opening 12 side through the gap of the mist shielding portion 32, but is blocked there.

  In the housing 10, a mist drawing part 34, a suction port 36 and a forced drying part 38 are provided on the opposite side of the mist shielding part 32 and the cleaning mechanism 16 around the priming roller 14.

  The mist pull-in portion 34 is preferably provided in a section having a rotation angle position of 180 ° to 270 ° along the rotation direction from the top of the priming roller 14. The mist pull-in portion 34 in the illustrated configuration example has a mist pull-in gap 40 formed between the inner wall of the housing 10 and the outer peripheral surface of the priming roller 14 in the section.

  The forced drying unit 38 is preferably provided in a section having a rotation angle position of 270 ° to 360 ° along the rotation direction from the top of the priming roller 14. The forced drying unit 38 in the illustrated configuration example has a liquid draining gap 42 formed between the inner wall of the housing 10 and the outer peripheral surface of the priming roller 14 in the section.

  The suction port 36 communicates with a vacuum device 48 having, for example, a vacuum pump or an intake fan (not shown) and a mist trap or a filter through a vacuum passage 44 and a vacuum pipe 46. An exhaust damper 52 that is controlled to open and close by the exhaust valve control unit 50 is provided near the end of the vacuum passage 44. When the vacuum device 48 is turned on and the exhaust damper 52 is opened, the mist drawing section 34 and the forced drying section 38 are operated, and the mist drawing gap 40 and the liquid draining gap 42 are connected to the intake port 36 from the outside. An air flow for drawing mist and an air flow for draining flow respectively. When the exhaust damper 52 is closed, even if the vacuum device 48 is turned on, the vacuum does not reach the intake port 36, and the mist drawing part 34 and the forced drying part 38 are turned off.

  In this priming processing apparatus, the exhaust mechanism 45 for forcibly exhausting the surroundings of the priming roller 14 includes the mist drawing part 34, the suction port 36, the forced drying part 38, the vacuum device 48, and the exhaust valve control part as described above. 50 and an exhaust damper 52 are provided.

  A drain port 54 is formed in the bottom of the housing 10 at a position directly below the priming roller 14. The drain port 54 communicates with a drain tank 58 via a drain pipe 56.

  In this priming processing apparatus, a rotation mechanism 65 for rotating the priming roller 14 includes a motor 60, a rotation control unit 62, and an encoder 64. The motor 60 is preferably a servo motor, and its rotational drive shaft is connected to the rotational shaft of the priming roller 14 via a transmission mechanism (not shown) such as a pulley or a transmission belt. The rotation control unit 62 can arbitrarily control not only the basic operation (rotation, stop, speed control, etc.) of the motor 60 but also the rotation amount and rotation angle position of the motor 60 through the encoder 64.

  This priming processing apparatus is provided with a film thickness measuring unit 67 for measuring the film thickness of the resist film on the priming roller 14. The film thickness measurement unit 67 includes a film thickness sensor 66 and a film thickness calculation unit 68.

  The film thickness sensor 66 is installed or disposed in the vicinity of the opening 12 so as not to interfere with the slit nozzle 72, and is a resist film or a liquid film attached to the outer peripheral surface of the priming roller 14 directly opposite from the position. The film thickness is measured by a non-contact method, that is, an optical method. As another configuration example, the film thickness sensor 66 is movably supported by, for example, a support arm, and the film thickness sensor 66 is positioned on the opening 12 when the slit nozzle 72 moves away from the opening 12 of the housing 10. You may combine them.

  The film thickness calculation unit 68 inputs the output signal of the film thickness sensor 66 and calculates the film thickness measurement value of the resist liquid film on the priming roller 14. Preferably, a plurality of film thickness sensors 66 are arranged in a row at regular intervals in the axial direction of the priming roller 14, and the film thickness distribution characteristics of the resist liquid film can be measured not only in the circumferential direction of the priming roller 14 but also in the axial direction. It is like that. The film thickness measurement value or the film thickness distribution characteristic measurement value obtained by the film thickness measurement unit 67 is sent to the main control unit 70.

  The main control unit 70 includes a microcomputer that operates according to predetermined software, and controls the operations of the cleaning mechanism 16, the exhaust mechanism 45, the rotation mechanism 65, and the film thickness measurement unit 67 in the priming processing apparatus. In the illustrated configuration example, the main control unit 70 directly controls the operations of the vacuum device 48, the film thickness sensor 66, and the film thickness calculation unit 68, and the cleaning control unit 25, the exhaust valve control unit 50, and the rotation control unit 62. The operations of the two-fluid jet nozzle 18, the exhaust damper 52 and the motor 60 are controlled. Further, the main control unit 70 can grasp or control the rotation amount and rotation angle position of the priming roller 14 through the rotation control unit 62 of the rotation mechanism 65.

  The main control unit 70 controls the entire sequence in the priming processing apparatus, and at least for the priming process, all of the slit nozzles 72 for resist coating processing provided in the resist coating apparatus. It is designed to control the operation.

  That is, in the resist coating apparatus, the slit nozzle 72 is supported by the nozzle moving mechanism 74 and is transported to an arbitrary position in a preset space and positioned at an arbitrary position. A resist solution is supplied to the slit nozzle 72 from the resist supply unit 76 via a resist supply pipe 78. Here, an opening / closing valve 80 is provided in the resist supply pipe 78. Regarding the priming process, the main control unit 70 controls the movement and positioning of the slit nozzle 72 and the resist solution discharge operation through the nozzle moving mechanism 74, the resist supply unit 76, and the on-off valve 80.

[First method of priming processing method]
Next, a first method of the priming processing method that can be performed by this priming processing apparatus will be described with reference to FIGS.

  In the resist coating apparatus in which the priming processing apparatus is incorporated, every time the coating process for one substrate is completed on the coating stage, one priming is performed by the priming processing apparatus as preparation for the next coating process. Processing is performed.

  FIG. 2 shows each stage when the first (first) priming process is performed after the outer peripheral surface of the priming roller 14 is reset to a clean state over the entire circumference. FIG. 3 shows the rotational speed of the priming roller 14 in the priming processing operation of FIG. 2 as a waveform on the time axis.

  In the first priming process, first, as shown in FIG. 1, the discharge port of the slit nozzle 72 is opposed to the top of the priming roller 14 in parallel with a predetermined gap (for example, several tens to several hundreds μm). In addition, the slit nozzle 72 is positioned through the nozzle moving mechanism 74. In this scene, the exhaust mechanism 45 as well as the cleaning mechanism 16 is stopped.

  Next, as shown in I (discharge) in FIG. 2, a predetermined amount of resist solution R is discharged to the slit nozzle 72 through the resist supply unit 76 while the priming roller 14 is kept stationary.

This resist solution discharging operation is performed within a certain time (t ₀ to t _{1 in} FIG. 3). The resist liquid R discharged from the discharge port of the slit nozzle 72 spreads around the top of the priming roller 14 and then spreads in the circumferential direction.

Next, the rotation mechanism 65 causes the priming roller 14 to start rotating at a predetermined timing (time point t _{1 in} FIG. 3), and the resist solution R is applied to the back surface of the slit nozzle 72 as shown in II (winding) in FIG. The resist solution R is wound around the outer peripheral surface of the priming roller 14 so as to wrap around the lower portion 72a. Here, the rotational speed V _a when winding the resist solution R is a relatively low speed is preferred that order not to cut off urgently a liquid film of the resist solution R, selected several tens mm / sec, for example peripheral speed It is.

Next, the rotational speed of the priming roller 14 is rapidly increased at a predetermined timing (time point t _{2 in} FIG. 3). As a result, as shown in III (separation) in FIG. 2, the liquid film of the resist solution R is separated and separated into the slit nozzle 72 side and the priming roller 14 side. At this time, if the slit nozzle 72 is raised, the resist liquid film can be separated more smoothly and reliably at a predetermined site. Thus, the resist film liquid film RF remains on the slit nozzle 72 from the nozzle outlet to the lower back end portion 72a. On the other hand, the resist film RM ₁ wound up as described above remains on the outer peripheral surface of the priming roller 14. The winding direction winding size of the resist liquid film RM ₁ can be set to, for example, a size of 70 ° to 75 ° in the rotation angle range.

In this method, even after the resist liquid film RM ₁ is cut off, the rotation of the priming roller 14 is continued as shown in IV (natural drying) in FIG. At this time, as indicated by a solid line V in FIG. 3, the rotation speed of the priming roller 14 is a speed V _b (for example, a peripheral speed of several hundred mm / second) immediately after the resist liquid film is cut off (time point t _{3 in} FIG. ₃ ). ) May be maintained as they are, or may be switched to a different speed (for example, several tens of millimeters / second as a peripheral speed) as indicated by a virtual line (dashed line) V ′. Note that the exhaust mechanism 45 is stopped during the natural drying (IV).

In this method, two important effects are achieved by the operation of continuing the rotation of the priming roller 14 as it is even after the resist liquid film RM ₁ wound on the priming roller 14 is cut off.

The first effect is that liquid dripping of the resist liquid film RM ₁ wound on the priming roller 14 can be prevented. That is, during the winding (II) and separation (III) operations, the resist liquid film RM ₁ on the priming roller 14 moves in the circumferential direction from the top to the bottom of the priming roller 14.

If the rotation of the priming roller 14 is stopped here, a downward force in the circumferential direction is continuously applied to the resist liquid film RM _{1 due} to gravity, and the resist liquid film RM ₁ is formed on the outer peripheral surface of the priming roller 14. It hangs down (spreads). In the spinless coating method using a slit nozzle, a low viscosity resist solution of 20 cp or less is usually used, so that the resist solution film is liable to drip on the priming roller.

However, in this system, by continuing the rotation of the priming roller 14 without stopping, the action of gravity acting on the resist liquid film RM ₁ (force to induce dripping) is substantially canceled, and the priming roller 14 it can be kept stopped in a predetermined area (divided area) in the surface tension without increasing the resist solution film RM ₁ was wound into a liquid dripping.

As a second effect, by continuing the rotation of the priming roller 14 while the exhaust mechanism 45 is stopped, the resist film RM ₁ wound on the priming roller 14 can be naturally dried efficiently in a short time. it can.

That is, when the evacuation mechanism 45 is turned on and the priming roller 14 is rotated, the resist liquid film RM ₁ on the priming roller 14 is subjected to a large stress due to the back wind in the gap 42 of the forced drying unit 38, and the film thickness uniformity. It is easy to lower. In particular, if there is variation in the axial direction in the counterwind pressure applied to the resist liquid film RM ₁ in the gap 42 of the forced drying section 38, streaky irregularities extending in the circumferential direction are likely to be attached to the surface of the resist liquid film RM ₁ . If stop pumping mechanism 45, the resist solution film RM ₁ on the outer circumferential surface during rotation of the priming roller 14 does not receive the pressure of the headwind, even when passing through the gap 42, left at rest in the atmosphere Subject to natural drying as if it had been.

Thus, the resist liquid film RM ₁ on the priming roller 14 is in a semi-dry or fresh-dried state in which the inside of the film remains liquid and the surface layer portion of the film is dried and solidified by natural drying. In such a semi-dry state, even if the rotation of the priming roller 14 is stopped, no dripping of the resist liquid film RM ₁ occurs.

In this embodiment, the resist liquid film RM _i (i = 1, 2, 3,...) That has been in a semi-dry state after the natural drying process is distinguished from the complete liquid film before the natural drying process. Hereinafter, it is referred to as a resist dry film [RM _i ].

The natural drying (IV) of the resist liquid film RM ₁ by the rotation of the priming roller 14 as described above is performed over a certain period of time (t ₃ to t _{4 in} FIG. 3). During this time, the slit nozzle 72 is sent to the coating stage by the nozzle moving mechanism 74, where it is subjected to resist coating processing for one substrate. When the resist coating process is completed, the slit nozzle 72 returns to the priming apparatus again, and its discharge port is parallel to the top of the priming roller 14 with a predetermined gap as shown in FIG. Positioned to face each other.

FIG. 4 shows each stage when the second priming process is performed. In the second priming process, as shown in I (ejection) in FIG. 4, the first resist dry film [RM ₁ ] wound around the priming roller 14 in the previous (first) priming process is removed. Then, with the top of the priming roller 14 facing the discharge port of the slit nozzle 72, a certain amount of resist solution R is discharged to the slit nozzle 72.

  Next, as shown in FIG. 4, the steps of winding up the resist solution R (II), separating (III), and natural drying (IV) are sequentially performed at the same operation and timing as in the first priming process.

Also in this case, in the same manner as in the first priming process, the winding (II) and separation (III) steps are performed on the outer circumferential surface of the priming roller 14 with a predetermined circumferential direction size (rotation angle range of 70 ° to 75 °), the resist liquid R is wound up to form a resist liquid film RM ₂ . Then, the rotation of the priming roller 14 as it shifts from continuing to disconnect (III) to the operation of the air drying (IV), to dry naturally resist solution film RM ₂ at a predetermined area without causing dripping. Thus, on the outer peripheral surface of the priming roller 14, this time (second time), in a region different from the first resist dry film [RM ₁ ], usually in a divided region set next to the downstream side in the rotation direction. A second resist dry film [RM ₂ ] is formed in a predetermined circumferential direction size (70 ° to 75 °) as a residue accompanying the priming process.

Although not shown, the third priming process is performed in the same procedure and operation as the first and second priming processes described above. As a result, it is set in a region different from the first and second resist dry films [RM ₁ ] and [RM ₂ ], usually next to the downstream side of the second resist dry film [RM ₂ ] in the rotation direction. A third resist dry film [RM ₃ ] is formed in a predetermined circumferential direction size (70 ° to 75 °) as a residue associated with the third priming process in the divided region.

Note that when the third priming process is completed, the third resist dry film [RM ₃ ] is in a semi-dry state by natural drying as described above, but the first and second resist dry films [RM _1]. ] And [RM ₂ ] are still semi-dry. That is, the first and second resist dry films [RM ₁ ] and [RM ₂ ] have not been subjected to any forced drying or heat treatment on the priming roller 14, so that the natural drying time is still several times longer. It remains semi-dry.

  In the first method, the priming roller 14 is cleaned all at once (immediately after the priming process is performed a predetermined number of times, for example, four times after the outer peripheral surface of the priming roller 14 is reset to a clean state over the entire circumference. Cleaning of the entire surface).

  FIG. 5 shows each stage when the last (fourth) priming process and the immediately following batch cleaning process are performed within one rotation of the priming roller 14. FIG. 6 shows the rotation speed of the priming roller 14 in the waveform on the time axis in the priming processing operation and the collective cleaning processing operation of FIG.

In the last (fourth) priming process, as shown in FIG. 5, the steps of discharging (I), winding (II), and separating (III) of the resist solution R are the same as the first to third priming processes. The resist liquid film RM ₄ is wound on the outer peripheral surface of the priming roller 14 in the divided region adjacent to the downstream side of the third resist dry film [RM ₃ ] in the rotational direction.

  However, after the separation (III), the process of natural drying (IV) is skipped and the process proceeds to the cleaning (V) process while the rotation of the priming roller 14 is continued. In this cleaning (V) step, the cleaning mechanism 16 and the exhaust mechanism 45 are operated.

Before starting the cleaning (V) process, the main control unit 70 passes through the rotating mechanism 65 and the film thickness measuring unit 67 to dry the resist dry films [RM ₁ ] and [RM] attached on the priming roller 14. ₂ ], [RM ₃ ] and the range (area) and film thickness of the resist liquid film RM ₄ are measured, and the amount of the cleaning liquid used in the cleaning (V) step is determined by calculation based on the measurement result. For example, the total resist amount (range × film thickness) of all resist films (liquid film or dry film) adhering to the priming roller 14 is used as a reference value, and the amount of cleaning liquid used is set to the reference value (total resist amount). It may be determined to be equal.

Regarding the resist film measurement, since the same priming process is usually repeated on the priming roller 14, the resist films [RM ₁ ], [RM ₂ ], [RM ₃ ], RM ₄ adhering to each divided region are used. The range and the film thickness are considered to be the same, and only one of them, for example, the range (area) of [RM ₁ ] and the film thickness may be measured.

As a preferred embodiment in the cleaning (V) process, the main control unit 70 is configured such that the two-fluid jet nozzle 18 has resist films [RM ₁ ], [RM ₂ ], [RM] in the entire outer peripheral surface of the priming roller 14. ₃ ], the rotation mechanism 65 and the cleaning mechanism 16 are interlocked and controlled so that the two-fluid jet flow of cleaning liquid and air is sprayed only on the region where the RM ₄ is attached. Here, the flow rate or amount of use of the cleaning liquid is determined based on the resist film measurement as described above.

Thus, due to the strong impact force of the two-fluid jet flow ejected from the two-fluid jet nozzle 18, the resist liquid film RM ₄ just deposited on the outer peripheral surface of the priming roller 14 is of course a semi-dried resist dry film [RM ₁ ], [RM ₂ ], and [RM ₃ ] are easily washed off, and most of them are mixed with the cleaning liquid and fall to the drain port 54 immediately below, and the rest is changed to mist ma and scattered in the vicinity. Of the mist ma generated around the two-fluid jet nozzle 18 during the collective cleaning, the mist that has risen upward is blocked by the mist shielding portion 32 and hardly comes out to the opening 12 side of the housing 10.

  On the other hand, in the exhaust mechanism 45, the exhaust damper 52 is opened, and the vacuum from the vacuum device 48 is supplied to the mist drawing unit 34 and the forced drying unit 38 via the vacuum pipe 46, the vacuum passage 44 and the suction port 36.

  As shown in FIG. 7, the mist pull-in portion 34 sucks the mist ma generated around the two-fluid jet nozzle 18 from the lower end of the gap 40, and the mist ma is put into the outer peripheral surface of the priming roller 14 in the gap 40. The mist ma that flows in the rotational direction along the upper side of the gap 40 and is discharged from the upper end of the gap 40 to the suction port 36 is sent to the vacuum device 48. The forced drying unit 38 sucks air into the gap 42 from the upper atmospheric space through the opening 12, and flows the air in the gap 42 along the outer periphery of the priming roller 14 in the direction opposite to the rotation direction. The liquid remaining on the outer peripheral surface of the priming roller 14 is scraped off by air pressure to form droplets, and the mist mb that has exited from the lower end of the gap 42 to the suction port 36 is sent to the vacuum device 48. In this way, the vacuum is used to drain the liquid by applying an air flow in the direction opposite to the rotation direction to the outer peripheral surface of the priming roller 14, and the mist mb generated by the liquid draining is recovered as it is by the vacuum. It is highly efficient and can prevent mist from scattering.

When a predetermined time has elapsed since the start of the cleaning (V) process as described above (time t _{5 in} FIG. 6), the cleaning mechanism 16 is turned off to stop the two-fluid jet cleaning. After that, while the priming roller 14 is continuously rotated, only the operation of the exhaust mechanism 45 (the mist drawing unit 34 and the forced drying unit 38) is continued, and the outer peripheral surface of the priming roller 14 is forced to dry with vacuum force over the entire circumference. Switch to the drying (VI) process. Then, after the elapse of a predetermined time, the exhaust damper 52 is closed and the exhaust mechanism 45 is turned off to stop the drying process, thereby completing all the steps of the collective cleaning process.

From the standpoint of aligning tact, the total processing time (t ₃ to t 6 in FIG. 6) including the cleaning (V) and forced drying (VI) in the batch cleaning processing is the processing time of natural drying (IV) (see FIG. ₆ ). 3 t ₃ ~t ₄₎ the same length (e.g. preferably set to 60 seconds). In this case, the processing time for cleaning (V) (t ₃ to t _{5 in} FIG. 6) is set to 20 seconds, for example, and the processing time for forced drying (VI) (t ₅ to t 6 in FIG. ₆ ) is set to 40 seconds, for example. May be set.

As described above, according to the first method, the outer peripheral surface of the priming roller 14 is divided into a plurality (for example, four) in the circumferential direction, and each divided area is continuously performed a predetermined number of times (four times). use assigned to, last the priming except the priming process (fourth), depending as it operates to continue the rotation of the priming roller 14 even after winding a liquid film RM _i of the resist solution, the resist solution film RM by preventing _i of drool with a resist solution film RM _i can hold the split (assigned) area, the resist solution film RM _i in a short time efficiently naturally dried to resist dry film of semidry state [RM _i ].

In this manner, since the resist liquid film RM _i can be prevented from dripping on the priming roller 14, there is no possibility of contaminating the adjacent unused divided region, and the subsequent priming process is affected by the previous priming process. However, the reproducibility and reliability of the priming process can be improved.

Further, each resist liquid film RM _i adhering to the priming roller 14 is washed as a semi-dried resist dry film [RM _i ] by natural drying or in a completely liquid state, so that it can be easily washed off. The burden on the cleaning mechanism 16 can be reduced and the amount of cleaning liquid used can be reduced.

Further, in the collective cleaning, an appropriate amount of cleaning liquid is sprayed only on the area where the resist films [RM ₁ ], [RM ₂ ], [RM ₃ ], and RM ₄ are adhered on the outer peripheral surface of the priming roller 14. Can be further reduced.

  In the illustrated example, the outer peripheral surface of the priming roller 14 is divided into four, and the resist liquid winding size in the circumferential direction in one priming process is set to 70 ° to 75 °. However, any number of divisions and take-up sizes are possible. For example, the take-up size in the circumferential direction per turn may be 70 ° or less, and the outer peripheral surface of the priming roller 14 may be divided into 5 and used continuously 5 times. Is possible. Further, the order used for the priming process among a plurality of divided regions set over the entire circumference of the priming roller 14 is arbitrary (in no particular order), and does not have to match the arrangement order.

  FIG. 8 is a perspective view showing a rough procedure of the priming processing method according to the first method described above.

[Example of priming method]
Next, an embodiment of a priming processing method that can be performed by this priming processing apparatus will be described with reference to FIGS.

In this embodiment, the number of priming processes that can be continuously performed without inserting the cleaning process on the priming roller 14 can be dramatically increased. In this embodiment, using the outer peripheral surface of the priming roller 14, the step of separating the resist film RM ₄ wound up on the priming roller 14 in the last (fourth) priming process in one cycle (FIG. 5). Up to III (separation)), the same process as in the first method is performed.

In this embodiment, this is not the batch cleaning (V), and the process proceeds to the natural drying (IV) process as in the first to third priming processes. As a result, the fourth priming process is performed on the outer peripheral surface of the priming roller 14 in the divided region set between the third resist dry film [RM ₃ ] and the first resist dry film [RM ₁ ]. As an accompanying residue, a fourth resist dry film [RM ₄ ] is formed in a predetermined circumferential direction size (70 ° to 75 °).

Next, as shown in FIG. 9, the main control unit 70 transmits all the resist dry films [RM ₁ ], [RM ₂ ], [RM ₂ ], which are adhered on the priming roller 14 through the rotation mechanism 65 and the film thickness measurement unit 67. The film thickness distribution characteristics of [RM ₃ ] and [RM ₄ ] are measured. The film thickness measurement before cleaning (V) as described above is for determining the amount of cleaning liquid used, so it does not require very high accuracy, but the film thickness distribution characteristics in this situation are the reliability of the priming process. It is desirable to measure with as high accuracy as possible because it is directly related to (reproducibility).

That is, in this embodiment, the first resist dry film [RM ₁ ], [RM ₂ ], [RM ₃ ], [RM ₄ ] formed on the outer peripheral surface of the priming roller 14 is used in the subsequent priming process. 2 is used as a base for receiving the resist solution R discharged from the slit nozzle 72. The film thickness uniformity (flatness) of the base film not only affects the uniformity (flatness) of the resist liquid film wound on the undercoat film but also the resist liquid film RF remaining on the discharge port side of the slit nozzle 72. Of the resist film, which in turn affects the film thickness uniformity of the resist film coated on the substrate in the resist coating process.

In this regard, the natural drying (IV) process does not apply stress due to forced drying to the resist liquid film RMi on the priming roller 14, so that the resist dry film [RMi having excellent film thickness uniformity (flatness) is usually used. ] Can be obtained. However, if there is disturbance such as undesired pressure or vibration from the surroundings, or there is an abnormality in the discharge function of the slit nozzle 72, the film thickness uniformity (flatness) of the resist dry film [RMi] is not good. There is also a possibility. In this embodiment, in order to ensure the accuracy and reproducibility of the priming process, the rotation mechanism 65 and the film thickness measuring unit 67 are operated as described above, and all the resist dry films [RM ₁ ], [RM ₂ ] are operated. ], [RM ₃ ], [RM ₄ ] are inspected for film thickness uniformity.

More specifically, the main controller 70 uses the resist dry film [RM _i ] for another subsequent priming process when the film thickness uniformity exceeds a predetermined standard based on the measurement result of the film thickness distribution characteristic. Judge as possible good product. However, when the film thickness uniformity does not exceed the standard, the resist dry film [RM _i ] is determined as a defective product that cannot be used for the subsequent priming process. In the following description, it is assumed that the resist dry film [RM ₁ ], [RM ₂ ], [RM ₃ ], and [RM ₄ ] of the first layer are all approved for use (non-defective products).

FIG. 10 shows each stage when a subsequent priming process, for example, is performed on the first resist dry film [RM ₁ ] already formed on the outer peripheral surface of the priming roller 14 in this embodiment. .

In the fifth priming process, first, the first resist dry film [RM ₁ ] of the first layer is positioned on the top of the priming roller 14, and the discharge port of the slit nozzle 72 is separated from the top of the priming roller 14 by a predetermined gap. The slit nozzle 72 is positioned through the nozzle moving mechanism 74 so as to face each other in parallel (for example, several tens to several hundreds of μm).

  Next, as shown in I (discharge) in FIG. 10, a predetermined amount of resist solution R is discharged to the slit nozzle 72 through the resist supply unit 76 while the priming roller 14 is stationary.

This resist solution discharging operation is performed within a certain time (t ₀ to t _{1 in} FIG. 3). The resist solution R discharged from the discharge port of the slit nozzle 72 is deposited on the top of the priming roller 14, that is, the first resist dry film [RM ₁ ] of the first layer, and then spreads around in the circulation direction.

Next, the rotation mechanism 65 starts rotation of the priming roller 14 at a predetermined timing, and as shown in II (winding) in FIG. The resist solution R is wound up on the first resist dry film [RM ₁ ].

Here, since the resist solution R discharged from the slit nozzle 72 is likely to adhere to the first resist dry film [RM ₁ ] made of the same material, the winding time (when winding on the outer peripheral surface of the priming roller 14 ( In FIG. 3, t ₁ to t ₂ ) are shortened by one step. Thus, the resist liquid film rm ₁ remaining on the first resist dry film [RM ₁ ] side in the separation (III) step has a larger film thickness than that obtained when the separation (III) is performed on the outer peripheral surface of the priming roller 14. It has a short length (around direction winding size). Note that the resist liquid film RF remaining on the slit nozzle 72 side is substantially the same as when the cutting (III) is performed on the outer peripheral surface of the priming roller 14.

As an example, when the winding direction winding size of the first layer resist dry film [RM ₁ ] is 40 mm, it is wound on the first layer resist dry film [RM ₁ ] by the priming process this time (fifth time). The winding-up size of the liquid film rm ₁ of the second layer resist solution R taken can be 10 mm or less. In addition, since the film thickness of the resist liquid film wound around the priming roller 14 in the priming process is usually several μm or less, the gap interval between the slit nozzle 72 and the priming roller 14 ( Do not have a substantial effect on tens to hundreds of μm).

After the separation (III) step, as in the case of the priming process for the first layer, the rotation of the priming roller 14 is continued as it is to move to the natural drying (IV) step, and the priming is performed after a predetermined time has elapsed. The rotation of the roller 14 is stopped. As a result, in the priming roller 14, the second layer of the first resist dry film [rm ₁ ] is predetermined on the first layer of the first resist dry film [RM ₁ ] as a residue accompanying the fifth priming process. In the circumferential direction size (for example, about 18 °).

The subsequent sixth and seventh priming processes are performed on the second resist dry film [RM ₂ ] and the third resist dry film [RM ₃ ] by the same procedure as the fifth priming process described above. Each done.

As a result, in the priming roller 14, the second layer of the second resist dry film [rm ₂ ] is left on the first layer of the second resist dry film [RM ₂ ] as a residue associated with the sixth priming process. It is formed with the same size in the circumferential direction (about 18 °) as above. Further, on the third resist dry film [RM ₃ ] of the first layer, the second resist dry film [rm ₃ ] of the second layer as a residue accompanying the seventh priming process is substantially the same in the circumferential direction. It is formed with a size (about 18 °).

In this embodiment, as shown in FIG. 11, priming is performed immediately after winding the second resist liquid film rm ₄ on the first fourth resist dry film [RM ₄ ] in the eighth priming process. The roller 14 is collectively cleaned (cleaning of the entire outer peripheral surface).

That is, as shown in FIG. 11, even in the eighth priming process, the steps of discharging (I), winding (II), and separating (III) of the resist solution R are the same as in the fifth to seventh priming processes. The resist liquid film rm ₄ is wound on the fourth resist dry film [RM ₄ ] of the first layer.

  However, after the separation (III), the process of natural drying (IV) is skipped and the process proceeds to the cleaning (V) process while the rotation of the priming roller 14 is continued. In this cleaning (V) step, the cleaning mechanism 16 and the exhaust mechanism 45 are operated.

Also in this scene, before starting the cleaning (V) process, the main control unit 70 passes through the rotating mechanism 65 and the film thickness measuring unit 67, and the first layer resist dry film adhering to the priming roller 14 [ Range (area) of RM ₁ ], [RM ₂ ], [RM ₃ ], [RM ₄ ], second resist dry film [rm ₁ ], [rm ₂ ], [rm ₃ ] and resist liquid film rm ₄ ) And the film thickness are measured, and the amount of the cleaning liquid used in the cleaning (V) step is determined by calculation based on the measurement result. For example, the total resist amount (range × film thickness) of all resist films (liquid film or dry film) adhering onto the priming roller 14 is used as a reference value, and for example, the amount of cleaning liquid used is the reference value (total resist amount). A value equal to may be determined.

  The steps of cleaning (V) and forced drying (VI) in the batch cleaning processing of this embodiment are basically the steps of cleaning (V) and forced drying (VI) in the batch cleaning processing of the first method described above. And the same process.

According to this embodiment, not only all the effects of the first method described above are included, but also on the first resist dry film [RM ₁ ], [RM ₂ ], [RM ₃ ], [RM ₄ ]. However, since the subsequent priming process is repeated and then the priming roller 14 is collectively cleaned, the effect of reducing the amount of cleaning liquid used can be doubled.

  FIG. 12 is a perspective view showing a rough procedure of the priming processing method according to the embodiment described above.

[Modifications or other embodiments]
Also in the embodiment described above, the number and the winding order of the plurality of resist dry films [RM _i ] of the first layer wound around the outer peripheral surface of the priming roller 14 can be arbitrarily selected. Figure 13 as shown in, can be arbitrarily selected even number and the winding order of the second layer resist liquid film rm _i of being wound on the resist dry film of the first layer [RM _i].

In the above embodiments, primed with different regions after performing resist dry film [RM _i] on in priming of the two layers of the first layer, and the resist dry film of the first layer [RM _i] It is also possible to perform a priming process for another first layer on the outer peripheral surface of the roller 14.

  In the above-described embodiment, as described above, in the one-time priming process, the first layer is larger than the winding-up size in the circumferential direction of the first resist liquid film RM formed on the outer peripheral surface of the priming roller 14. The winding size in the circumferential direction of the second resist liquid film rm formed on the dried resist film is remarkably shortened (a fraction of a fraction). Therefore, for example, as shown in FIG. 14, first, on the outer peripheral surface of the priming roller 14, a first-layer resist liquid film RM is preferably formed over substantially the entire circumference in order to form a base film. A dry resist film [RM] is obtained by natural drying similar to the above. On the first resist dry film [RM], that is, the base film, a considerable number of priming processes (for example, 10 times or more) can be performed by dividing the divided region into short parts in the circumferential direction.

  In the process for forming the base film (first layer resist film) on the outer peripheral surface of the priming roller 14, the priming roller 14 may be rotated in a direction opposite to the normal direction. Instead of the slit nozzle 72, for example, another slit nozzle dedicated to the priming apparatus may be used.

  In the priming roller 14, it is also possible to carry out the subsequent priming process on the second layer resist dry film rm formed as described above to wind up the third layer resist liquid film. Furthermore, it is also possible to perform the priming process many times with four or more layers.

  In the collective cleaning process, the amount of cleaning liquid used is increased, but it is also possible to spray the cleaning liquid around the entire outer peripheral surface of the priming roller 14.

  The configuration or function of each unit in the priming processing apparatus is not limited to that of the above-described embodiment. For example, a cleaning tool other than the two-fluid jet nozzle, such as a scraper, can be used or used in the cleaning mechanism 16, and various configurations of each part of the exhaust mechanism 45, particularly the forced drying unit 38, can be modified.

  In the priming processing apparatus of the above-described embodiment, the slit is formed using the configuration and function (FIG. 9) for measuring the film thickness distribution characteristic of the resist liquid film (or dry film) remaining on the priming roller as a result of the priming process. The resist discharge function on the nozzle 72 side (particularly, the uniformity of the discharge flow in the slit longitudinal direction) can be inspected to improve the yield or reliability of the resist coating process.

  As the coating solution in the present invention, in addition to the resist solution, for example, a coating solution such as an interlayer insulating material, a dielectric material, and a wiring material can be used. The substrate to be processed in the present invention is not limited to an LCD substrate, and other flat panel display substrates, semiconductor wafers, CD substrates, photomasks, printed substrates and the like are also possible.

DESCRIPTION OF SYMBOLS 10 Priming processing apparatus 12 Opening part 14 Priming roller 16 Cleaning mechanism 18 Two-fluid jet nozzle 36 Vacuum port 38 Forced drying part 45 Exhaust mechanism 60 Motor 62 Rotation control part 65 Rotation mechanism 70 Main control part 72 Slit nozzle 74 Nozzle movement mechanism

Claims (23)

In a priming treatment method for forming a liquid film of a coating liquid as a preparation for the coating process in the vicinity of a discharge port of the slit nozzle in a coating process in which a coating liquid is applied onto a substrate to be processed using a long slit nozzle. There,
The slit nozzle for coating treatment or another slit nozzle for non-coating treatment is opposed in parallel with a predetermined gap to the top of a cylindrical or columnar priming roller arranged horizontally, and the slit nozzle Discharging the coating liquid and rotating the priming roller to wind up part or all of the discharged coating liquid on the outer peripheral surface of the priming roller;
A second step of drying the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller to form a dry film of the first layer;
For the priming process for one time, the dry film of the first layer is positioned on the top of the priming roller, and the discharge nozzle of the coating processing slit nozzle discharges a predetermined gap with respect to the top of the priming roller. With the outlets facing each other in parallel, a predetermined amount of the coating liquid is ejected to the slit nozzle, and then the priming roller is rotated to wind a part of the ejected coating liquid on the dry film of the first layer. A third step to take;
A priming treatment method comprising: a fourth step of collectively removing a liquid film or a dry film adhering to the outer peripheral surface of the priming roller by cleaning.   In the first step, for one priming process, a discharge gap of the slit nozzle for coating process is opposed in parallel with a predetermined gap to the top of the priming roller, The priming processing method according to claim 1, wherein after discharging a certain amount of coating liquid, the priming roller is rotated to wind a part of the discharged coating liquid on the outer peripheral surface of the priming roller.   The priming processing method according to claim 1, wherein the second step continues the rotation of the priming roller started in the first step as it is, and naturally dries the liquid film of the coating solution. . Between the second step and the third step,
A fifth step of measuring a film thickness distribution characteristic of the dry film of the first layer;
Based on the measurement result of the film thickness distribution characteristic, when the film thickness uniformity of the dry film of the first layer exceeds a certain standard, a determination result is given that the execution of the third step is permitted, A sixth step of producing a determination result indicating that the execution of the third step should be stopped when the thickness uniformity of the dry film of one layer does not exceed the reference. The priming processing method according to claim 1.   5. The coating liquid winding size in the circumferential direction in the third step is less than ½ of the coating liquid winding size in the circumferential direction in the first step. 6. Priming method. Between the third step and the fourth step,
A seventh step of drying the liquid film of the coating liquid wound on the dry film of the first layer in the third step to form a first dry film of the second layer;
For yet another priming process, the first dry film of the second layer is removed and the dry film of the first layer is positioned on the top of the priming roller, so that the top of the priming roller is The discharge ports of the slit nozzles face each other with a predetermined gap in parallel, and after a predetermined amount of coating liquid is discharged to the slit nozzles, the priming roller is rotated, and the first dry film of the second layer The priming processing method according to claim 5, further comprising: an eighth step of winding a part of the discharged coating liquid on the dry film of the first layer in a different region. Between the third step and the fourth step,
A seventh step of drying the liquid film of the coating liquid wound on the dry film of the first layer in the third step to form a dry film of the second layer;
In order to perform another priming process, the second layer of the dry film is positioned on the top of the priming roller, and a discharge gap of the slit nozzle is provided with a predetermined gap from the top of the priming roller. And a part of the discharged coating liquid is wound on the dried film of the second layer by rotating the priming roller after discharging a predetermined amount of the coating liquid to the slit nozzle. The priming method according to any one of claims 1 to 5, further comprising an eighth step.   The said 4th process sprays a washing | cleaning liquid only to the area | region to which the liquid film or the dry film has adhered among the outer peripheral surfaces of the said priming roller, rotating the said priming roller. The priming processing method according to item.   Prior to the fourth step, the range and film thickness of each liquid film or dry film adhering to the outer peripheral surface of the priming roller are measured, and the cleaning liquid in the fourth step is measured based on the measurement result. The priming method according to any one of claims 6 to 8, further comprising a ninth step of determining a usage amount.   An exhaust mechanism for forcibly exhausting the periphery of the priming roller is provided, and the exhaust mechanism is stopped in the first, second, and third steps and operated in the fourth step. The priming method according to any one of 1 to 9. Priming method for forming a liquid film of the coating liquid in preparation of the coating in the vicinity of the discharge port of the slits nozzle in the coating process of applying the coating solution on a substrate to be processed by using a slit nozzle long type Because
For one priming process, the slit nozzle discharge port is made to face the top of a horizontally arranged cylindrical or columnar priming roller with a predetermined gap in parallel, and fixed to the slit nozzle. A first step of rotating a part of the discharged coating liquid on an outer peripheral surface of the priming roller by rotating the priming roller after discharging an amount of the coating liquid;
A second step of drying the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller in the first step to form a first dry film of the first layer;
For another priming process, the first dry film of the first layer is removed, and a discharge gap of the slit nozzle is opposed in parallel with a predetermined gap from the top of the priming roller, After a predetermined amount of the coating liquid is discharged to the slit nozzle, the priming roller is rotated, and a part of the discharged coating liquid is applied onto the outer peripheral surface of the priming roller in a region different from the first dry film. A third step of winding;
A fourth step of drying the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller in the third step to form a second dry film of the first layer;
In order to perform another priming process, the first or second dry film of the first layer is positioned on the top of the priming roller, with a predetermined gap from the top of the priming roller. The discharge ports of the slit nozzles face each other in parallel, and after a predetermined amount of coating liquid is discharged to the slit nozzles, the priming roller is rotated to discharge the discharge onto the first or second dry film of the first layer. A fifth step of winding a part of the applied coating solution;
A priming treatment method comprising: a sixth step of collectively removing a liquid film or a dry film adhering to the outer peripheral surface of the priming roller by cleaning.   The priming processing method according to claim 11, wherein in the second step, the rotation of the priming roller started in the first step is continued as it is and the liquid film of the coating liquid is naturally dried. Between the second step and the third step,
A seventh step of measuring a film thickness distribution characteristic of the dry film of the first layer;
Based on the measurement result of the film thickness distribution characteristic, when the film thickness uniformity of the dry film of the first layer exceeds a certain standard, a determination result is given that the execution of the third step is permitted, And an eighth step of issuing a determination result indicating that the execution of the third step should be stopped when the film thickness uniformity of one layer of dry film does not exceed the reference. The priming processing method described in 1.   14. The coating liquid winding size in the circumferential direction in the fifth step is less than ½ of the coating liquid winding size in the circumferential direction in the first and third steps. The priming processing method described in 1. Between the fifth step and the sixth step,
A ninth step of drying the liquid film of the coating liquid wound on the dry film of the first layer in the fifth step to form a first dry film of the second layer;
For another one-time priming process, the first dry film of the second layer is removed and the first or second dry film of the first layer is positioned on the top of the priming roller, and the priming roller The slit nozzle discharge port is made to face the top of the slit nozzle in parallel with a predetermined gap, and after a predetermined amount of coating liquid is discharged to the slit nozzle, the priming roller is rotated, The priming according to claim 14, further comprising: a tenth step of winding a part of the discharged coating liquid on the first or second dry film of the first layer in a region different from the first dry film. Processing method. Between the fifth step and the sixth step,
A ninth step of drying the liquid film of the coating liquid wound on the dry film of the first layer in the fifth step to form a dry film of the second layer;
For another one-time priming process, the dry film of the second layer is positioned on the top of the priming roller, and the discharge port of the slit nozzle is separated from the top of the priming roller by a predetermined gap. First, a predetermined amount of coating liquid is ejected to the slit nozzle, and then the priming roller is rotated to wind up a part of the ejected coating liquid on the dried film of the second layer. The priming treatment method according to claim 11, comprising 10 steps.   The sixth step according to any one of claims 11 to 16, wherein in the sixth step, the cleaning liquid is sprayed only on a region of the outer peripheral surface of the priming roller to which a liquid film or a dry film is attached while rotating the priming roller. The priming processing method according to item.   Prior to the sixth step, the area and film thickness of each liquid film or dry film adhering to the outer peripheral surface of the priming roller are measured, and the cleaning liquid in the sixth step is measured based on the measurement result. The priming method according to any one of claims 11 to 17, further comprising an eleventh step of determining a usage amount.   19. An exhaust mechanism for forcibly exhausting the periphery of the priming roller is provided, and the exhaust mechanism is stopped in the first to fifth steps and operated in the sixth step. The priming method according to any one of the above. A priming processing apparatus for forming a liquid film of a processing liquid as a preparation for the coating process in the vicinity of a discharge port of the slit nozzle in a coating process in which a coating liquid is applied onto a substrate to be processed using a long slit nozzle. There,
A cylindrical or columnar priming roller disposed horizontally at a predetermined position;
A rotation mechanism for rotating the priming roller about its central axis;
A cleaning mechanism for spraying a cleaning liquid to clean the outer peripheral surface of the priming roller;
An exhaust mechanism for forcibly exhausting the periphery of the priming roller;
A control unit that controls each operation of the rotation mechanism, the cleaning mechanism, and the exhaust mechanism;
The coating nozzle or another slit nozzle for non-coating treatment is opposed in parallel with a predetermined gap with respect to the top of the priming roller, the coating liquid is discharged to the slit nozzle, and the rotating mechanism By rotating the priming roller to wind up part or all of the discharged coating liquid on the outer peripheral surface of the priming roller,
While the exhaust mechanism is stopped, the rotation of the priming roller is continued even after the coating liquid is wound by the rotating mechanism, and the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller is dried. To make the first layer dry film,
For the priming process for one time, the dry film of the first layer is positioned on the top of the priming roller, and the discharge port of the slit nozzle is parallel to the top of the priming roller with a predetermined gap. The priming roller is rotated by the rotating mechanism after a predetermined amount of the coating liquid is discharged to the slit nozzle, and a part of the discharged coating liquid is wound on the dry film of the first layer. take,
After the desired number of priming processes have been completed, the cleaning mechanism and the exhaust mechanism are operated while rotating the priming roller by the rotating mechanism, and the liquid film or the dry film adhered to the outer peripheral surface of the priming roller Remove all at once by washing,
Priming processing device. Having a film thickness measuring unit for measuring the film thickness of the dry film on the priming roller;
Measure the thickness distribution characteristics of the dry film of the first layer by the film thickness measurement unit,
Based on the measurement result of the film thickness distribution characteristic, when the film thickness uniformity of the dry film of the first layer exceeds a certain standard, a priming process is performed on the dry film of the first layer, When the thickness uniformity of the dry film of the layer does not exceed the standard, the priming process on the dry film of the first layer is stopped.
The priming apparatus according to claim 20. A priming processing apparatus for forming a liquid film of a processing liquid as a preparation for the coating process in the vicinity of a discharge port of the slit nozzle in a coating process in which a coating liquid is applied onto a substrate to be processed using a long slit nozzle. There,
A cylindrical or columnar priming roller disposed horizontally at a predetermined position;
A rotation mechanism for rotating the priming roller about its central axis;
A cleaning mechanism for spraying a cleaning liquid to clean the outer peripheral surface of the priming roller;
An exhaust mechanism for forcibly exhausting the periphery of the priming roller;
A control unit that controls each operation of the rotation mechanism, the cleaning mechanism, and the exhaust mechanism;
For one priming process, the discharge port of the slit nozzle is opposed in parallel with a predetermined gap with respect to the top of the priming roller, and a predetermined amount of the coating liquid is discharged to the slit nozzle. The priming roller is rotated by a rotating mechanism, and a part of the discharged coating liquid is wound on the outer peripheral surface of the priming roller,
While the exhaust mechanism is stopped, the rotation of the priming roller is continued even after the coating liquid is wound by the rotating mechanism, and the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller is dried. A first dry film of the first layer,
For another priming process, the first dry film is removed and the slit nozzle discharge port is parallelly opposed to the top of the priming roller with a predetermined gap therebetween. After the amount of the coating liquid is discharged, the priming roller is rotated by the rotating mechanism, and a part of the discharged coating liquid is wound on the outer peripheral surface of the priming roller in a region different from the first dry film. take,
While the exhaust mechanism is stopped, the priming roller is rotated even after the coating liquid is wound by the rotating mechanism, and the liquid film of the coating liquid wound on the outer peripheral surface of the priming roller is dried. A second layer of dry film,
In order to perform another priming process, the first or second dry film of the first layer is positioned on the top of the priming roller, with a predetermined gap from the top of the priming roller. The discharge ports of the slit nozzles face each other in parallel, and after a predetermined amount of coating liquid is discharged to the slit nozzles, the priming roller is rotated by the rotating mechanism, and the first layer or the second dry film of the first layer is rotated. A part of the discharged coating liquid is wound on the top,
After the desired number of priming processes have been completed, the cleaning mechanism and the exhaust mechanism are operated while rotating the priming roller by the rotating mechanism, and the liquid film or the dry film adhered to the outer peripheral surface of the priming roller Remove all at once by washing,
Priming processing device. Having a film thickness measuring unit for measuring the film thickness of the dry film on the priming roller;
The film thickness measurement unit measures the film thickness distribution characteristic of the first or second dry film of the first layer,
Based on the measurement result of the film thickness distribution characteristic, when the film thickness uniformity of the first or second dry film of the first layer exceeds a certain standard, a priming process is performed on the dry film, When the film thickness uniformity of one dry film does not exceed the standard, the priming process on the dry film is stopped.
The priming processing apparatus according to claim 22.

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