JP5121778B2 - Priming processing method and priming processing apparatus - Google Patents

Description

  The present invention relates to a priming processing method and a priming processing apparatus for forming a liquid film of a processing liquid as a preparation for coating processing in the vicinity of a discharge port of a slit nozzle used for spinless coating processing.

  In a photolithography process in a manufacturing process of a flat panel display (FPD) such as an LCD, a long slit nozzle having a slit-like discharge port is scanned to apply a resist solution onto a substrate to be processed such as a glass substrate. The spinless method is often used.

  In such a spinless method, in order to prevent unevenness of coating thickness of the resist coating film and coating unevenness, the resist solution discharged onto the substrate during coating scanning rotates to the back side of the slit nozzle in the scanning direction. It is desirable that the meniscus formed in this way be aligned in a horizontal line in the longitudinal direction of the nozzle. To this end, the coating gap between the slit nozzle outlet and the substrate is closed with an appropriate amount of resist solution immediately before the start of coating scanning. Is a necessary condition. In order to satisfy this requirement, a priming process for forming a liquid film of a resist solution from the discharge port of the slit nozzle to the lower end of the back surface is performed as a preparation for coating scanning.

  In a typical priming method, a cylindrical priming roller having a length equal to or longer than that of the slit nozzle is horizontally installed near the coating processing unit, and is opposed to the top of the priming roller through a minute gap. The resist nozzle is discharged by bringing the slit nozzle close to the position, and immediately after that, the priming roller is rotated in a predetermined direction. Then, the resist solution discharged near the top of the priming roller is wound around the outer peripheral surface of the priming roller so as to wrap around the lower part of the back surface of the slit nozzle, and is divided into a slit nozzle side and a priming roller side. The liquid film is cut off. In the slit nozzle, the resist solution remains from the nozzle discharge port to the lower end of the back surface.

  For example, as disclosed in Patent Document 1, a conventional general priming processing apparatus includes not only a rotation mechanism that rotationally drives a priming roller but also a squeegee (or scraper), a cleaning nozzle, and a drying nozzle for cleaning the priming roller. When the priming process is completed once, as a subsequent process, the priming roller is continuously rotated by a rotating mechanism, the resist solution is scraped off from the outer peripheral surface of the priming roller with a squeegee, and the cleaning liquid and the drying gas are discharged from the cleaning nozzle and the drying nozzle. Are sprayed on the outer peripheral surface of the priming roller.

  This type of squeegee is composed of a long plate having a length equal to or longer than that of the priming roller, and the edge of one side extending in the longitudinal direction is inclined at an angle opposite to the rotation direction of the priming roller. It arrange | positions so that it may always contact with the outer peripheral surface of this, and the contact pressure is adjusted with the tightening amount of the screw member which attaches a squeegee.

  However, the region on the priming roller used for receiving and winding the resist solution discharged from the slit nozzle in one priming process varies depending on the size of the slit nozzle and the priming roller, but the entire circumference of the priming roller ( 360 degrees) is not required, and it is usually less than half a circle (180 degrees), and may be less than 1/4 (90 degrees) or less than 1/5 (72 degrees). However, the conventional general priming processing apparatus sprays the cleaning liquid on the entire outer peripheral surface (all circumferences) of the priming roller by continuously rotating the priming roller as described above every time the priming process is executed. There was a problem of using a large amount of (usually thinner).

  In addition, the squeegee used to scrape off the resist solution wound up on the outer peripheral surface of the priming roller is easy to scatter the scraped resist around and to adhere to the squeegee itself, and to accumulate after cleaning. During the drying process, resist particles are transferred to the clean outer peripheral surface of the priming roller, it is difficult to optimally adjust or maintain the contact pressure with the priming roller, and wear and tear deteriorates quickly, resulting in a long service life. Is short.

  In order to solve this problem, the present applicant, in Patent Document 2, for one priming process, the discharge port of the slit nozzle and the upper end of the priming roller face each other with a predetermined gap therebetween, and the slit nozzle A more constant amount of processing liquid or coating liquid (for example, resist liquid) is discharged and the priming roller is rotated by a predetermined rotation angle, and a partial surface area equal to or less than a half circumference of the priming roller is used for the priming process. A priming method is disclosed in which the outer peripheral surface of the priming roller is collectively cleaned over the entire circumference after a predetermined number of priming processes have been completed.

  In this priming method, the outer peripheral surface of the priming roller is divided into a plurality of circumferential directions, and the divided areas (partial surface areas) are sequentially assigned to a predetermined number of continuous priming processes, and then the priming roller is used. The outer peripheral surface of is collectively cleaned over the entire circumference. In this batch cleaning process, the cleaning mechanism and the drying unit are operated while the priming roller is continuously rotated by the rotating mechanism, and the outer peripheral surface of the priming roller is cleaned all around. In addition, a squeegee for scraping off the coating liquid wound around the surface of the priming roller is unnecessary, and it is possible to save the cleaning liquid consumed in the cleaning process after the priming process and to prevent generation of particles during the cleaning or drying process. You can also

JP 2004-167476 A JP2007-237046

  The present invention is an improved version of the priming treatment method disclosed by the present applicant in the above-mentioned Patent Document 2, and from a unique point of view, further reduces the cleaning liquid used in the priming treatment, and further reduces the drying treatment time. It is an object of the present invention to provide a priming processing method and a priming processing device that shorten and shorten the life of a cleaning processing tool and / or a drying processing tool.

In order to achieve the above object, the priming processing method according to the first aspect of the present invention forms a liquid film of the coating liquid as a preparation for the coating process in the vicinity of the discharge port of the slit nozzle used in the spinless coating process. A priming processing method for a single priming process, the discharge port of the slit nozzle being parallel to the top of a horizontally disposed cylindrical or columnar priming roller with a predetermined gap therebetween A first amount of coating liquid discharged from the slit nozzle, and then the priming roller is rotated to wind up a part of the discharged coating liquid on the outer peripheral surface of the priming roller. And winding the coating liquid on the outer peripheral surface of the priming roller at a predetermined contact cleaning position while rotating the priming roller. A second step of performing rough cleaning by bringing a cleaning pad made of a porous resin into contact with the region, and a cleaning liquid on the outer peripheral surface of the priming roller subjected to the rough cleaning while rotating the priming roller A third step of supplying and finishing cleaning, and a fourth step of drying the outer peripheral surface of the priming roller that has been subjected to the finishing cleaning while rotating the priming roller, In the third and fourth steps, the cleaning pad is moved away from the priming roller, and in the second step, the region of the outer peripheral surface of the priming roller where the coating liquid is wound is at the contact cleaning position. The priming roller is stopped immediately before reaching the priming roller after the cleaning pad is brought into contact with the outer peripheral surface of the priming roller. The rotation of the roller is resumed, and the liquid film of the coating liquid on the region is scraped off by the cleaning pad, and the cleaning pad is separated from the priming roller immediately after the remaining liquid film comes out of the contact cleaning position. Continue or resume roller rotation.

In the above-described priming method in the first aspect, as a post-treatment immediately after priming (first step), Oite the first rough cleaning step (second step), at the contact cleaning position of the porous resin The cleaning pad is pressed against the outer peripheral surface of the rotating priming roller, and the liquid film of the coating liquid adhering thereto is washed out uniformly and efficiently by the friction of elastic surface contact with the cleaning pad. Then, immediately after the rough cleaning process, in the final cleaning process (third process), the thin liquid film remaining on the priming roller is cleaned off with the cleaning liquid. According to such a two-step (rough cleaning / finish cleaning) cleaning method, not only the burden of the final cleaning process is remarkably reduced by the rough cleaning process, but also the cleaning liquid used in the rough cleaning process is reused. Therefore, the total amount of cleaning liquid used can be greatly reduced as compared with the prior art.

In addition, in the first, third, and fourth steps, the cleaning pad is moved away from the priming roller, and in the second step, the region where the coating liquid on the outer peripheral surface of the priming roller is wound is at the contact cleaning position. Immediately before reaching the priming roller, the cleaning pad is brought into contact with the outer peripheral surface of the priming roller, the rotation of the priming roller is restarted, and the liquid film of the coating liquid on the region is scraped off by the cleaning pad, and the remaining liquid film Since the cleaning pad is moved away from the priming roller immediately after the contact cleaning position is removed, the rotation of the priming roller is continued or restarted , so that the clean area of the outer peripheral surface of the priming roller that is not used for the priming process is It avoids the situation of receiving dirt due to contact, and reduces the wear deterioration of the cleaning pad. Comb, it is possible to increase the life of.

A priming processing method according to a second aspect of the present invention is a priming processing method for forming a liquid film of a coating solution as a preparation for coating processing in the vicinity of a discharge port of a slit nozzle used for spinless coating processing, For one priming process, the slit nozzle discharge port is made to face the top of a horizontally arranged cylindrical or columnar priming roller with a predetermined gap in parallel, and fixed to the slit nozzle. A first step of rotating the priming roller after discharging an amount of the coating liquid and winding a part of the discharged coating liquid on the outer peripheral surface of the priming roller; and rotating the priming roller However, a cleaning pad made of a porous resin is brought into contact with the area where the coating liquid is wound on the outer peripheral surface of the priming roller. A second step of performing rough cleaning, a third step of supplying a cleaning liquid to the outer peripheral surface of the priming roller subjected to the rough cleaning while rotating the priming roller, and performing a final cleaning, and the priming A fourth step of drying the outer peripheral surface of the priming roller that has been subjected to the finish cleaning while rotating the roller, and for discharging the coating liquid sucked by the cleaning pad to the outside. Crush.

In the priming method according to the second aspect, as a post-treatment immediately after the priming process (first process), a priming roller that rotates a porous resin cleaning pad in the first rough cleaning process (second process) The liquid film of the coating solution adhering to the outer peripheral surface of the film is washed off uniformly and efficiently by rubbing the elastic surface contact with the cleaning pad. Then, immediately after the rough cleaning process, in the final cleaning process (third process), the thin liquid film remaining on the priming roller is cleaned off with the cleaning liquid. According to such a two-step (rough cleaning / finish cleaning) cleaning method, not only the burden of the final cleaning process is remarkably reduced by the rough cleaning process, but also the cleaning liquid used in the rough cleaning process is reused. Therefore, the total amount of cleaning liquid used can be greatly reduced as compared with the prior art. And the effect of the contact washing | cleaning by a washing | cleaning pad can be heightened by crushing a washing | cleaning pad and discharging the coating liquid which the washing | cleaning pad sucked out.

  Further, by crushing the cleaning pad made of the porous resin, the coating liquid sucked up to that time can be discharged outside. According to a preferred aspect, the cleaning pad is crushed by pressing the cleaning pad against the outer peripheral surface of the priming roller with a greater pressing force immediately after the cleaning pad has finished rough cleaning and before leaving the priming roller. Is called. Thus, by discharging the coating liquid from the cleaning pad, the cleaning pad can be cleaned and the cleaning ability of the cleaning pad can be maintained stably.

  In the finish cleaning step (third step), the cleaning liquid is preferably mixed with gas toward the outer peripheral surface of the priming roller and sprayed with a high-pressure two-fluid jet. In this case, the two-fluid jet flow is limited to a predetermined area of the outer peripheral surface of the priming roller that is used for winding the coating liquid, and the two-fluid jet stream is sprayed so that a new cleaning liquid for finishing cleaning can be obtained. Consumption can be saved.

  In a preferred aspect, the fourth step includes a fifth step of wiping off the cleaning liquid adhering to the outer peripheral surface of the priming roller, and a sixth step of volatilizing the cleaning liquid remaining on the outer peripheral surface of the priming roller. including. According to such a two-stage (wiping / volatilization) drying method, the burden of the volatilization process (sixth process) is greatly reduced by the intervening droplet removal process (fifth process), and total drying is performed. Processing time can be shortened.

  As the droplet removing step (fifth step), a method of bringing a plate-like wiping pad made of a non-porous material into contact with the outer peripheral surface of the priming roller can be suitably employed. More preferably, one end of the wiping pad may be brought into contact with the outer peripheral surface of the priming roller at an oblique angle following the rotation direction of the priming roller.

  In a preferred embodiment, immediately after the droplets are wiped off, the wiping pad is moved away from the priming roller. This not only avoids the situation where droplets reach the dry area on the outer peripheral surface of the priming roller through the wiping pad (which increases the burden of drying blow or increases the processing time), but also makes the wiping pad dirty and worn out. The life can be extended by reducing

  The volatilization step (sixth step) is a method of injecting dry gas into a gap formed around the priming roller over a certain interval in the circumferential direction so as to blow through in a direction opposite to the rotation direction of the priming roller. It can take suitably. According to this volatilization method, the remaining liquid film on the priming roller can be scattered or volatilized uniformly and efficiently, and the drying processing time can be further shortened.

A priming processing apparatus of the present invention is a priming processing apparatus for forming a liquid film of a coating liquid as a preparation for coating processing in the vicinity of a discharge port of a slit nozzle used for spinless coating processing, and is horizontally placed at a predetermined position. A cylindrical or columnar priming roller arranged, a rotating mechanism for rotating the priming roller around its central axis, and a cleaning pad made of porous resin for performing rough cleaning on the outer peripheral surface of the priming roller A rough cleaning processing unit that switches a position of the cleaning pad between a contact cleaning position that contacts the outer peripheral surface of the priming roller and a retracted position that is away from the outer peripheral surface of the priming roller, and an outer peripheral surface of the priming roller A finishing cleaning processing section for supplying a cleaning liquid to the substrate and performing a final cleaning, and an outer periphery of the priming roller Priming for one time, including a drying processing unit for forcibly drying the water, and a control unit for controlling each operation of the rotating mechanism, the rough cleaning processing unit, the finishing cleaning processing unit, and the drying processing unit For processing, the discharge port of the slit nozzle is opposed in parallel to the top of a horizontally disposed cylindrical or columnar priming roller with a predetermined gap therebetween, and a certain amount of coating liquid is applied to the slit nozzle. The priming roller is rotated by the rotating mechanism, and a part of the discharged coating liquid is wound on the outer peripheral surface of the priming roller, and the coating liquid on the outer peripheral surface of the priming roller is discharged. Immediately before the wound area reaches the contact cleaning position, the priming roller is stopped through the rotation mechanism, The position of the cleaning pad is switched from the retracted position to the contact cleaning position, and then the rotation of the priming roller is resumed by the rotation mechanism, and the liquid film of the coating liquid on the region is removed by the rough cleaning processing unit. Immediately after the remaining liquid film comes out of the contact cleaning position, the cleaning pad is returned to the retracted position by the rough cleaning processing unit, and the rotation mechanism continues or restarts the rotation of the priming roller, While rotating the priming roller by a rotating mechanism, the cleaning liquid is supplied to the outer peripheral surface of the priming roller after rough cleaning by the finishing cleaning processing unit to perform final cleaning, and the rotating mechanism rotates the priming roller. While rotating, the outer peripheral surface of the priming roller after finishing cleaning is dried. Dry by treatment section.

The priming processing apparatus of the present invention can implement the priming processing method of the present invention with the above-described configuration, and thereby can achieve the same effects as the priming processing method of the present invention .

  In a preferred aspect of the present invention, in the rough cleaning processing section, the first position of the cleaning pad is set in the vicinity of about 90 ° away from the top of the priming roller along the rotational direction.

  Preferably, the rough cleaning processing section preferably has a pressure mechanism for pressing the cleaning pad against the outer peripheral surface of the priming roller with a desired pressure, and further, directly on the cleaning pad or through the outer peripheral surface of the priming roller. A cleaning liquid replenishing unit for replenishing the cleaning liquid.

  As a preferred aspect, the cleaning pad has a length covering from one end to the other end of the priming roller in the horizontal direction and a rectangular cross-sectional shape, and is in surface contact with the outer peripheral surface of the priming roller at the first position. The finishing cleaning section has a two-fluid jet nozzle that mixes the cleaning liquid with gas and sprays it with a jet flow toward the outer peripheral surface of the priming roller.

  In the priming apparatus of the present invention, preferably, an exhaust mechanism is provided for removing mist generated around the priming roller by forced exhaust.

  According to the priming processing method or the priming processing apparatus of the present invention, it is possible to realize further saving of the cleaning liquid used in the priming process, the shortening of the drying processing time, the cleaning processing tool and It is possible to extend the life of the drying processing tool.

It is a figure which shows the structure of the priming processing apparatus in one Embodiment of this invention. It is a figure which shows typically each step | level when the priming process for 1 time is performed in an Example . It is a partial expanded sectional view which shows the operation | movement which discharges the coating liquid which the washing | cleaning pad sucked out in the rough washing process part. It is a partial expanded sectional view which shows the structure and effect | action of a drying process part. In a 2nd system , it is a figure which shows typically each step | level when the 1st time and 2nd priming process and a subsequent process are performed. In a 2nd system , it is a figure which shows typically each step | level when a 4th (final) priming process and a subsequent process are performed. It is sectional drawing which shows one modification of the structure which collect | recovers the cleaning liquid used in the finishing cleaning process part, and reuses in a rough cleaning process part.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

[Configuration of Priming Processing Device]
FIG. 1 shows a configuration of a priming processing apparatus according to an embodiment of the present invention. This priming processing apparatus is incorporated in a resist coating apparatus (not shown) that performs spinless resist coating processing in, for example, a photolithography process for an LCD manufacturing process, and places or floats a substrate to be processed for resist coating processing. It arrange | positions near the application | coating stage (not shown) to convey.

  In the illustrated priming apparatus, a housing 10 is formed of a long casing having a slit-like opening 12 on the upper surface, and the top of the priming roller 14 accommodated therein is exposed upward via the opening 12. As shown, the bearing (not shown) is horizontally and rotatably supported.

  The priming roller 14 is a cylindrical or columnar roller made of stainless steel, for example, and has a certain outer diameter and a length that covers the entire length of a slit nozzle 98 described later. The housing 10 may also be made of stainless steel, for example.

  Although not shown, the roller rotation mechanism 16 for rotating the priming roller 14 includes a motor, a rotation control unit, an encoder, and the like. The motor is preferably a servo motor, and its rotational drive shaft is connected to the rotational shaft of the priming roller 14 via a transmission mechanism such as a pulley or a transmission belt. The rotation control unit can arbitrarily control not only the basic operation of the motor (rotation, stop, speed control, etc.) but also the rotation amount and rotation angle position of the motor through the encoder.

  In the housing 10, it is on the way from the top (top) to the bottom (bottom) of the priming roller 14 along the positive rotation direction (counterclockwise in the drawing), preferably at a position near a rotation angle of 90 °. The cleaning pad 20 of the rough cleaning processing unit 18 is disposed.

  The cleaning pad 20 is made of a porous resin (preferably a fluororesin excellent in chemical resistance), and has a length that covers from one end to the other end of the priming roller 14 in the horizontal direction and a rectangular cross-sectional shape. At least the surface facing the priming roller 14 is held by a box-shaped pad holding portion 22 having an opening. Although not shown, the cleaning pad moving mechanism 24 includes a motor, a rotation control unit, an encoder, and the like, and moves the cleaning pad 20 in the radial direction of the priming roller 14 via the rack and pinion 26 and the pad holding unit 22. The cleaning pad 20 is positioned between a first position (contact cleaning position) that contacts the outer peripheral surface of the priming roller 14 with a desired pressure and a second position (retracted position) that is separated from the outer peripheral surface of the priming roller 14. Can be switched between.

  A cleaning liquid supply nozzle 28 is disposed in the vicinity of, for example, directly above the cleaning pad 20. The cleaning liquid replenishing nozzle 28 is a long slit nozzle having a length equivalent to that of the cleaning pad 20, and its discharge port is located at the front portion (contact portion) of the cleaning pad 20 at the first position (contact cleaning position). ) It is arranged toward 20a or toward the outer peripheral surface of the priming roller 14 located slightly upstream in the circumferential direction. When the rough cleaning process is performed, the cleaning liquid (for example, thinner liquid) pumped from the cleaning liquid tank 32 by the liquid feeding pump 30 is sent to the cleaning liquid supply nozzle 28 via the pipe 34, and the cleaning liquid supply nozzle 28 supplies the cleaning liquid. The contact cleaning by the cleaning pad 20 is assisted by discharging. In the middle of the pipe 34, a filter 36 and an open / close valve 37 are provided for removing impurities such as dust from the cleaning liquid.

  In the housing 10, a finishing cleaning processing unit 38 and a drying processing unit 40 are provided on the opposite side of the rough cleaning processing unit 16 with the priming roller 14 as the center.

  In the finish cleaning processing section 38, the cleaning nozzle 42 is disposed in the section of the rotation angle of 180 ° to 270 ° along the positive rotation direction from the top (top) of the priming roller 14. The cleaning nozzle 42 is preferably composed of a long two-fluid jet nozzle, is arranged in parallel with the length covering the entire length of the priming roller 14, and is connected to a cleaning liquid / gas supply unit 46 via a pipe 44. ing. An opening / closing valve 45 is provided in the middle of the pipe 44.

  The drying processing unit 40 is provided with a droplet removing unit 48 and a drying blow unit 50 in the positive rotation direction from the top (uppermost part) of the priming roller 14, preferably in a section with a rotation angle of 270 ° to 360 °. ing.

  The droplet removing unit 48 contacts the wiping pad 52 for wiping the droplet from the outer peripheral surface of the priming roller 14, the pad support unit 54 that rotatably supports the wiping pad 52, and the outer peripheral surface of the priming roller 14. A wiping pad moving mechanism 56 that switches the position of the wiping pad 52 between a first position (droplet removal position) to be performed and a second position (retracted position) spaced from the outer peripheral surface of the priming roller 14. Yes.

  The wiping pad 52 is a long plate made of a non-porous material such as synthetic rubber, has a length equivalent to that of the priming roller 14, and is longitudinal in the first position (wiping position). The edge of one side extending in the direction of contact with the outer peripheral surface of the priming roller 14 with a desired pressure at an oblique angle following the rotation direction of the priming roller 14 (the angle formed with the tangent is preferably 45 ° or less, most preferably about 30 °). It is supposed to be.

  The drying blow unit 50 includes a gap 58 formed around the priming roller 14 in a certain section set downstream of the droplet removing unit 48 along the positive rotation direction, and the rotation direction of the priming roller 14. And a gas nozzle 60 for injecting dry gas, for example, dry air, so as to blow through the gap 58 sharply in the direction opposite to the above. The gas nozzle 60 is a slit nozzle having a length equivalent to that of the priming roller 14, and is incorporated in the upper wall portion of the housing 10 near the downstream end portion of the gap 58. The gas nozzle 60 is connected to a dry gas supply unit 64 via a pipe 62. An opening / closing valve 65 is provided in the middle of the pipe 62.

  A suction port 66 is provided behind the finish cleaning processing unit 38 and the drying processing unit 40 when viewed from the priming roller 14. The suction port 66 communicates with a vacuum device 72 via a vacuum passage 68 and a mist trap 70. The vacuum device 72 is constituted by, for example, a vacuum pump or an intake fan. The mist trap 70 traps the mist sent from the suction port 66 through the vacuum passage 68. The liquid (cleaning liquid) collected by the mist trap 70 is sent to the cleaning liquid tank 32 via the pipe 74.

  A drain port 76 is formed at the bottom of the housing 10 at a position directly below the priming roller 14. The drain port 76 communicates with the drain tank 80 through a drain pipe 78. The cleaning liquid collected in the drain tank 80 is transferred to the cleaning liquid tank 32 at any time or periodically by a pump 82. Preferably, an apparatus for separating the resist sent together with the cleaning liquid may be provided in or around the drain tank 80.

  In the cleaning liquid tank 32, not only the used cleaning liquid collected in the mist trap 70 and the drain tank 80 as described above, but also an open / close valve 81 is opened as needed to open an unused new cleaning liquid from the new cleaning liquid supply source 84. (Thinner) is also replenished. The liquid in the drain tank 80 and the cleaning liquid tank 32 is sent to a waste liquid tank (not shown) via the waste liquid pipes 90 and 92 when the respective opening / closing valves 86 and 88 on the drain port side are opened. .

  A cleaning liquid reuse system 94 for reusing the used cleaning liquid recovered by the rough cleaning processing unit 18 is constructed by the cleaning liquid tank 32, the mist trap 70, the drain tank 80, and the pumps and pipes around the tank. Yes.

  The main control unit 96 includes a microcomputer that operates according to predetermined software. The roller rotation mechanism 16, the rough cleaning processing unit 18, the finishing cleaning processing unit 38, the drying processing unit 40, the vacuum processing device 72, The operations of the cleaning liquid reuse system 94 and the on-off valves (37, 45, 65, etc.) are controlled in an integrated manner.

  The main control unit 96 controls and controls the entire sequence in the priming processing apparatus, and at least for the priming process, all of the slit nozzles 98 for resist coating processing provided in the resist coating apparatus. It is designed to control the operation.

  That is, in the resist coating apparatus, the slit nozzle 98 is supported by the nozzle moving mechanism 100 and is transported to an arbitrary position within a preset space and positioned at an arbitrary place. A resist solution is supplied to the slit nozzle 98 from the resist supply unit 102 through the resist supply pipe 104. The resist supply pipe 104 is provided with an opening / closing valve 106. With respect to the priming process, the main control unit 96 controls the movement and positioning of the slit nozzle 98 and the resist solution discharge operation through the nozzle moving mechanism 100, the resist supply unit 102, and the on-off valve 106.

[ Example of priming method]

Next, with reference to FIGS. 2 to 4, an embodiment (first method) of a priming processing method that can be performed by this priming processing apparatus will be described.

  In the resist coating apparatus in which the priming processing apparatus is incorporated, each time a coating process for one substrate is completed on the coating stage, a single priming process is performed by the priming processing apparatus as a preparation for the next coating process. Done.

  FIG. 2 shows each stage when one priming process is performed in this embodiment.

  Immediately before the priming process is performed, the outer peripheral surface of the priming roller 14 is in a clean state over the entire periphery. In this state, first, as shown in FIG. 1, the nozzle moving mechanism 100 is arranged so that the discharge port of the slit nozzle 98 faces the top of the priming roller 14 in parallel with a predetermined gap (for example, several hundred μm). Through which the slit nozzle 98 is positioned.

Next, as shown in S ₁ (discharge) in FIG. 2, a predetermined amount of resist solution R is discharged to the slit nozzle 98 through the resist supply unit 102 while the priming roller 14 is stationary.

  This resist solution discharge operation is performed within a predetermined time. The resist solution R discharged from the discharge port of the slit nozzle 98 spreads around the top of the priming roller 14 and then spreads in the circumferential direction.

Next, the roller rotating mechanism 16 causes the priming roller 14 to start rotating at a predetermined timing, so that the resist solution R wraps around the back lower portion 98a of the slit nozzle 98 as shown in S ₂ (winding) in FIG. Thus, the resist solution R is wound on the outer peripheral surface of the priming roller 14. Here, the rotation speed when winding up the resist solution R is preferably a relatively low speed that does not cut off the liquid film of the resist solution R immediately.

Next, the rotational speed of the priming roller 14 is increased at a stroke at a predetermined timing. As a result, as shown in S ₃ (separation) in FIG. 2, the liquid film of the resist solution R is separated and separated into the slit nozzle 98 side and the priming roller 14 side. At this time, if the slit nozzle 98 is raised, the resist liquid film can be separated more smoothly and reliably at a predetermined portion. In this way, the liquid film RF of the resist solution remains on the slit nozzle 98 from the nozzle discharge port to the back lower end portion 98a. On the other hand, on the outer peripheral surface of the priming roller 14, the resist film RM wound up as described above remains. The winding direction size of the resist liquid film RM can be set to, for example, 70 ° to 75 ° in terms of the rotation angle.

  In this embodiment, immediately after the resist liquid film RM is cut off, the priming roller 14 is temporarily stopped, and the cleaning pad 20 of the rough cleaning processing unit 18 is moved from the previous retracted position (second position) to the contact cleaning position (first position). 1 position) and contact the outer peripheral surface of the priming roller 14 with a desired pressure. At substantially the same time, the cleaning liquid may be discharged from the cleaning liquid replenishing nozzle 28 toward the contact cleaning position. It is desirable that the resist liquid film RM is stopped at a position immediately before reaching the contact cleaning position (a position slightly upstream in the roller circumferential direction).

Next, the rotation of the priming roller 14 is restarted, and the resist liquid film RM wound on the outer peripheral surface of the priming roller 14 is sent to the contact cleaning position as shown in S ₄ (rough cleaning) in FIG. The cleaning pad 20 rubs off the resist liquid film RM passing through the contact cleaning position by surface contact with appropriate pressure. A part of the resist liquid film RM scraped off falls from the outer peripheral surface of the priming roller 14 and is sent to the drain port 76 side, and the other part is sucked into the cleaning pad (porous resin) 20. However, some of the resist liquid films RM remain on the outer peripheral surface of the priming roller 14 without being scraped off (RM ′). The remaining liquid film RM ′ is rotated in the circumferential direction as the priming roller 14 rotates. It moves toward the downstream side.

  In this way, the liquid solution of the coating liquid is applied on the priming roller by receiving the rough cleaning process as described above until the liquid film of the resist liquid wound around the top of the priming roller in the priming process makes a half rotation. It is possible to prevent the film from spreading undesirably.

  In this embodiment, as shown in FIG. 3, the priming roller 14 is temporarily stopped immediately after the remaining liquid film RM ′ comes out of the contact cleaning position, and the cleaning pad moving mechanism 24 moves the cleaning pad 20 in the rough cleaning processing unit 18. Further, it is driven forward and pressed against the outer peripheral surface of the priming roller with a greater pressing force to crush the cleaning pad 20 and discharge the resist solution R sucked up to that time by the cleaning pad 20. At this time, the cleaning liquid may be supplied to the cleaning pad 20 from the cleaning liquid replenishing nozzle 28.

  Thereafter, the cleaning pad moving mechanism 24 moves the cleaning pad 20 backward to release the pressing force, and further separates the cleaning pad 20 from the priming roller 14 and returns it to the retracted position (second position). At substantially the same time, the roller rotation mechanism 16 resumes the rotation of the priming roller 14.

  When the remaining liquid film RM ′ reaches the finishing cleaning processing unit 38 by the rotation of the priming roller 14, the two-fluid jet nozzle 42 is operated to apply compressed gas (air or nitrogen) to an unused new cleaning liquid (thinner). The mixed two-fluid jet is sprayed on the remaining liquid film RM ′. The main control unit 96 manages the area where the remaining liquid film RM ′ is adhered on the outer peripheral surface of the priming roller 14 (that is, the area devoted to winding up the resist liquid film RM in the current priming process). The current position of the area (position in the circumferential direction) can also be grasped through the roller rotation mechanism 16. Therefore, the two-fluid jet flow is jetted to the two-fluid jet nozzle 42 only while the region where the residual liquid film RM ′ is attached passes through a predetermined section near the finish cleaning processing unit 38, and after the passage of the two fluids The jet flow can be stopped. The vacuum device 72 is turned on substantially simultaneously with the finish cleaning processing unit 38.

  However, in the case where the cleaning pad 20 is cleaned (spouting liquid) immediately after the rough cleaning process in the rough cleaning processing unit 18 as described above, the region (remaining area) of the priming roller 14 used for the pad cleaning is used. Since the area following the liquid film RM ′ is somewhat contaminated, it is preferable that the dirty area is also cleaned by the finish cleaning processing unit 38 with a two-fluid jet. Further, cleaning of the cleaning pad 20 (spouting of the liquid) may be performed periodically instead of every time the priming process is performed.

Thus, 2 by the strong impact of such two-fluid jet ejected from the fluid jet nozzle 42, as shown in S ₅ (finish cleaning) 2, the residual liquid film attached on the outer peripheral surface of the priming roller 14 RM ′ is easily and thoroughly washed away, most of which is mixed with the cleaning liquid and flows down to the drain port 76, and the rest turns into mist and scatters in the vicinity. The scattered mist is drawn toward the intake port 66 and is discharged from there to the vacuum passage 68. In addition, a member (not shown) for passing mist may be provided in a member existing between the finish cleaning processing unit 38 and the air inlet 66, that is, the wiping pad 52, the pad support unit 54, the blanket 55, and the like.

Immediately after the finishing cleaning unit 38 starts the finishing cleaning operation as described above, the drying processing unit 40 also starts the drying processing operation. That is, as shown in S ₆ (droplet removal / drying blow) in FIG. 2, the droplet removal unit 48 rotates the wiping pad 52 to change the droplet removal position from the previous retracted position (second position). Switch to (first position). Further, the dry blow unit 50 causes the gas nozzle 60 to inject dry air.

  Thereby, most of the cleaning liquid adhering to the outer peripheral surface of the priming roller 14 by the finish cleaning is wiped off by the wiping pad 52 of the droplet removing unit 48 that first passes in the drying processing unit 40. As shown in FIG. 4, some of the cleaning liquid droplets qa fall down to the drain port 76 side along the lower surfaces of the wiping pad 52 and the pad support 54, and the rest are sucked together with the mist. It is drawn into the mouth 66.

  As shown in FIG. 4, the thin liquid film on the priming roller 14 that could not be removed by wiping the wiping pad 52 passes through the gap 58 in the dry blow section 50 immediately after passing through the wiping pad 52. The air is scattered or volatilized uniformly and efficiently by the blow of dry air from the gas nozzle 60 which blows out sharply in the opposite direction, and is drawn into the suction port 66 as mist ma.

  Even if the dry blow unit 50 does not blow dry air, as long as the vacuum device 72 is turned on, the liquid film on the priming roller 14 receives back wind in the gap 58 and promotes volatilization. However, if there is a slight variation in the gap size of the gap 58 in the longitudinal direction parallel to the priming roller 14, the liquid film volatility is strongly distributed. There is a problem that it is prolonged.

  In this embodiment, even if there is a variation in the gap size of the gap 58, the effect of the variation in the gap size can be compensated by blowing dry air by the drying blow unit 50, and the volatilization rate in the gap 58 can be made uniform. It is possible, and as a result, shortening of the drying process time can be promoted.

  In the droplet removing unit 48, immediately after the area on the outer peripheral surface of the priming roller 14 that has undergone the finishing cleaning process passes, the wiping pad 52 is separated from the priming roller 14 and returned to the retracted position (second position). Keep it.

On the other hand, as shown in S ₇ (dry blow) in FIG. 2, the dry blow unit 50 continues to inject the dry air as it is, and stops the dry air injection after a predetermined time (for example, about 10 seconds). Further, the vacuum device 72 is turned off immediately after the drying blow unit 50 is turned off or after a predetermined time has elapsed.

  The series of operations described above is performed as post-processing immediately after the priming process, while the priming roller 14 is rotated once, during the rough cleaning by the rough cleaning processing unit 18, the final cleaning by the final cleaning processing unit 38, and the drying processing unit 40. This is the shortest cycle in which each of the droplet removal processes by the droplet removal unit 48 is performed once, and normally the outer peripheral surface of the priming roller 14 can be thoroughly cleaned. However, the cleaning cycle of one rotation of the priming roller can be repeated a plurality of times.

  As described above, in this embodiment, as a post-processing immediately after the priming process, the rough cleaning processing unit 18 first presses the porous resin cleaning pad 20 against the outer peripheral surface of the rotating priming roller 14 and adheres thereto. The resist film RM is washed off uniformly and efficiently by rubbing the elastic surface contact with the cleaning pad 20. Then, immediately after the rough cleaning process, the finishing cleaning processing unit 38 easily and thoroughly cleans the thin remaining liquid film RM ′ remaining on the priming roller 14 by the two-fluid jet finishing cleaning.

  According to such a two-step (rough cleaning / finish cleaning) cleaning processing system, the rough cleaning processing unit 18 not only greatly reduces the burden on the finishing cleaning processing unit 38 but also the rough cleaning processing unit 18. Since the cleaning liquid to be used only needs to be reused, the total amount of cleaning liquid used can be greatly reduced as compared with the conventional case.

  Further, in the rough cleaning processing unit 18, the cleaning pad 20 is made of a porous resin, and the resist solution sucked out during the surface contact rubbing can be quickly discharged outside by crushing as shown in FIG. It is not necessary to accumulate resist stains, and the performance of the rough cleaning treatment can be stably maintained.

  Further, the cleaning pad 20 contacts the outer peripheral surface of the priming roller 14 at the first position (contact cleaning position) only when the rough cleaning process is performed, and in principle, the cleaning pad 20 moves away from the priming roller 14 at other times. As a result, a situation in which the clean area of the outer peripheral surface of the priming roller 14 that has not been used for the priming process receives resist stains due to contact with the cleaning pad 20 (thereby the burden or processing time of the final cleaning and drying processes) Increase in the life of the cleaning pad 20, and the life of the cleaning pad 20 can be reduced.

  Further, in this embodiment, in order to remove and dry the cleaning liquid adhering to the outer peripheral surface of the priming roller 14 by the cleaning process, the droplet removing unit 48 of the drying processing unit 40 is non-porous on the outer peripheral surface of the priming roller 14. After contacting the quality wiping pad 52 and wiping the droplets, the drying blow unit 50 of the drying processing unit 40 injects the dry air to the gas nozzle 60 in the direction opposite to the roller rotation direction, and in the gap 58 and at the outlet thereof. A sharp blow of dry air in the reverse direction is applied to the outer peripheral surface of the priming roller 14 in the vicinity.

  According to such a two-stage (wiping / air blow) drying method, the load of the drying blow unit 50 is not only greatly reduced by the action of the droplet removing unit 48, but also the drying process of the drying blow unit 50 itself. Since the efficiency is high, the total drying time can be greatly reduced as compared with the conventional case.

  Further, the wiping pad 52 of the droplet removing unit 48 contacts the outer peripheral surface of the priming roller 14 at the first position (droplet removing position) only when wiping off the liquid after finishing cleaning, and in principle at other times. Retracts away from the priming roller 14. This not only avoids a situation where droplets are undesirably applied to the dry area on the outer peripheral surface of the priming roller 14 through the wiping pad 52 (thereby increasing the burden of drying blow or processing time), but also the wiping pad. Thus, it is possible to reduce the number of stains 20 and deterioration of wear, thereby extending the service life.

[ Second method of priming method ]

Even in the second method , in the resist coating apparatus in which the priming processing apparatus is incorporated, the priming processing apparatus prepares for the next coating process every time the coating process for one substrate is completed on the coating stage. One priming process is performed.

FIG. 5 shows each stage when the first and second priming processes are performed after the outer peripheral surface of the priming roller 14 is reset to a clean state over the entire circumference in the second method .

  In the first priming process, first, as shown in FIG. 1, the nozzle moving mechanism is arranged so that the discharge port of the slit nozzle 98 faces the top of the priming roller 14 in parallel with a predetermined gap (for example, several hundred μm). The slit nozzle 98 is positioned through 100.

Next, as shown in S <b> _1-1 (discharge) in FIG. 5, a predetermined amount of resist solution R is discharged to the slit nozzle 98 through the resist supply unit 102 while the priming roller 14 remains stationary.

  This resist solution discharge operation is performed within a predetermined time. The resist solution R discharged from the discharge port of the slit nozzle 98 spreads around the top of the priming roller 14 and then spreads in the circumferential direction.

Next, the roller rotating mechanism 16 causes the priming roller 14 to start rotating at a predetermined timing, and the resist solution R wraps around the back lower portion 98a of the slit nozzle 98 as shown in _S1-2 (winding) in FIG. The resist solution R is wound around the outer peripheral surface of the priming roller 14. Here, the rotation speed when winding up the resist solution R is preferably a relatively low speed that does not cut off the liquid film of the resist solution R immediately.

Next, the rotational speed of the priming roller 14 is increased at a stroke at a predetermined timing. As a result, as shown in S _1-3 (separation) in FIG. 2, the liquid film of the resist solution R is separated and divided into the slit nozzle 98 side and the priming roller 14 side. At this time, if the slit nozzle 98 is raised, the resist liquid film can be separated more smoothly and reliably at a predetermined portion. In this way, the liquid film RF of the resist solution remains on the slit nozzle 98 from the nozzle discharge port to the back lower end portion 98a. On the other hand, the resist film RM ₁ wound up as described above remains on the outer peripheral surface of the priming roller 14. The winding direction winding size of the resist liquid film RM ₁ can be set to, for example, a size of 70 ° to 75 ° in the rotation angle range.

In this method , even after the resist liquid film RM ₁ is cut off, the rotation of the priming roller 14 is continued as shown in S _1-4 (natural drying) in FIG. At this time, the rotation speed of the priming roller 14 may be maintained as it is immediately after the resist liquid film is cut off, or may be switched to a different speed. The vacuum device 72 is kept off during the natural drying (S _1-4 ). Further, the coarse cleaning unit 18, the finishing cleaning unit 38, drying unit 40 (liquid droplet removal unit 48, drying the blow unit 50) also all turned off during the entire process S _1-1 to S _1-4 until then deep.

In the second system , two remarkable effects are achieved by the operation of continuing the rotation of the priming roller 14 as it is even after the resist liquid film RM ₁ wound on the priming roller 14 is cut off. The

The first effect is that liquid dripping of the resist liquid film RM ₁ wound on the priming roller 14 can be prevented. That is, during the winding (S _1-22 ) and separation (S _1-3 ) operations, the resist liquid film RM ₁ on the priming roller 14 moves in the circumferential direction from the top to the bottom of the priming roller 14. .

If the rotation of the priming roller 14 is stopped here, a downward force in the circumferential direction is continuously applied to the resist liquid film RM _{1 due} to gravity, and the resist liquid film RM ₁ is formed on the outer peripheral surface of the priming roller 14. It hangs down (spreads). In the spinless coating method using a slit nozzle, a low viscosity resist solution of 20 cp or less is usually used, so that the resist solution film is liable to drip on the priming roller.

However, in the second method , the rotation of the priming roller 14 is continued without stopping, thereby substantially canceling the action of gravity acting on the resist liquid film RM ₁ (the force that induces dripping). The resist liquid film RM ₁ wound on the roller 14 can be stopped in a predetermined region (divided region) by surface tension without spreading by liquid dripping.

As a second effect, the resist film RM ₁ wound on the priming roller 14 is naturally dried efficiently in a short time by continuing the rotation of the priming roller 14 with the exhaust mechanism, that is, the vacuum device 72 turned off. Can be made.

That is, when the priming roller 14 is rotated with the vacuum device 72 turned on, the resist liquid film RM ₁ on the priming roller 14 is subjected to a large stress due to the back wind in the gap 58 even when the gas nozzle 60 of the drying blow unit 50 is stopped. In response, the film thickness uniformity tends to be lowered. In particular, when the back wind pressure applied to the resist liquid film RM ₁ varies in the axial direction due to the gap size variation of the gap 58, streaky irregularities extending in the circumferential direction are attached to the surface of the resist liquid film RM _1. Cheap. If the vacuum device 72 is stopped, the resist liquid film RM ₁ on the outer peripheral surface of the priming roller 14 during rotation of the priming roller 14 is not subjected to the pressure of the back wind even when passing through the gap 58, and is left standing in the atmosphere. Subject to natural drying as if it had been.

Thus, the resist liquid film RM ₁ on the priming roller 14 is in a semi-dry or fresh-dried state in which the inside of the film remains liquid and the surface layer portion of the film is dried and solidified by natural drying. In such a semi-dry state, even if the rotation of the priming roller 14 is stopped, no dripping of the resist liquid film RM ₁ occurs.

In this second method , the resist liquid film RM _i (i = 1, 2, 3,...) That has been in a semi-dry state after the natural drying process is distinguished from the complete liquid film before the natural drying process. Therefore, it is referred to as a resist dry film [RM _i ].

The natural drying (S _1-4 ) of the resist liquid film RM ₁ by the rotation of the priming roller 14 as described above is performed over a certain period of time. During this time, the slit nozzle 98 is sent to the coating stage by the nozzle moving mechanism 100, where it is subjected to resist coating processing for one substrate. When the resist coating process is completed, the slit nozzle 98 returns to the priming apparatus again, and its discharge port is parallel to the top of the priming roller 14 with a predetermined gap as shown in FIG. It positions so that it may oppose.

In the second priming process, as shown in S _2-1 (discharge) in FIG. 5, the first resist dry film [RM ₁ ] wound around the priming roller 14 in the previous (first) priming process. In a state where the top of the priming roller 14 is opposed to the discharge port of the slit nozzle 98, a certain amount of resist solution R is discharged to the slit nozzle 98.

Next, the steps of winding up the resist solution R ( _S2-2 ), separating ( _S2-3 ), and natural drying ( _S2-4 ) are sequentially performed at the same operation and timing as in the first priming process. .

Also in this case, as in the first priming process, a predetermined circumferential direction size (rotation) is formed on the outer peripheral surface of the priming roller 14 by the winding (S _2-2 ) and separation (S _2-3 ) steps. The resist solution R is wound up at an angle range of 70 ° to 75 ° to form a resist solution film RM ₂ . Then, the rotation of the priming roller 14 is continued as it is, and the operation moves from the separation (S _2-3 ) to the natural drying (S _2-4 ), and the resist liquid film RM ₂ within a predetermined region without causing dripping. Let dry naturally. Thus, on the outer peripheral surface of the priming roller 14, this time (second time), in a region different from the first resist dry film [RM ₁ ], usually in a divided region set next to the downstream side in the rotation direction. A second resist dry film [RM ₂ ] is formed in a predetermined circumferential direction size (70 ° to 75 °) as a residue accompanying the priming process.

Although not shown, the third priming process is performed in the same procedure and operation as the first and second priming processes described above. As a result, it is set in a region different from the first and second resist dry films [RM ₁ ] and [RM ₂ ], usually next to the downstream side of the second resist dry film [RM ₂ ] in the rotation direction. A third resist dry film [RM ₃ ] is formed in a predetermined circumferential direction size (70 ° to 75 °) as a residue associated with the third priming process in the divided region.

Note that when the third priming process is completed, the third resist dry film [RM ₃ ] is in a semi-dry state by natural drying as described above, but the first and second resist dry films [RM _1]. ] And [RM ₂ ] are still semi-dry. That is, the first and second resist dry films [RM ₁ ] and [RM ₂ ] have not been subjected to any forced drying or heat treatment on the priming roller 14, so that the natural drying time is still several times longer. It remains semi-dry.

In this second method , immediately after the priming process is performed a predetermined number of times, for example, four times after the outer peripheral surface of the priming roller 14 has been reset to a clean state over the entire circumference, Cleaning of the entire surface).

  FIG. 6 shows each stage when the last (fourth) priming process and the immediately after batch cleaning / drying process are performed within one rotation of the priming roller 14.

In the final (fourth) priming process, as shown in FIG. 6, each step of discharging (S _4-1 ), winding (S _4-2 ) and separating (S _4-3 ) of resist solution R is 1 This is the same as the first to third priming processes, and the resist liquid film RM ₄ is formed on the outer peripheral surface of the priming roller 14 in the divided region adjacent to the downstream side of the third resist dry film [RM ₃ ] in the rotation direction. Is wound up.

However, immediately after the separation (S _4-3 ), the natural drying step is skipped and the process proceeds to the rough cleaning (S _4-5 ) step. In this rough cleaning (S _4-5 ) step, the position of the cleaning pad 20 is switched from the previous retracted position (second position) as in the first embodiment described above.

Then, the priming roller 14 is rotated while the cleaning pad 20 is held at the contact cleaning position (first position). The resist dry films [RM ₁ ], [RM ₂ ], [RM ₃ ] and the resist liquid film RM ₄ adhering to the priming roller 14 during one rotation are RM ₄ → [RM ₃ ] → [RM ₂ ] → [RM ₁ ] in this order and sent to the contact cleaning position (first position). The cleaning pad 20 rubs the resist liquid film RM and the resist dry films [RM ₃ ], [RM ₂ ], [RM ₁ ] that pass through the contact cleaning position by elastic surface contact under moderate pressure.

Here, not only the resist liquid film RM ₄ just deposited on the outer peripheral surface of the priming roller 14 but also the semi-dried resist dry films [RM ₃ ], [RM ₂ ], [RM ₁ ] are easily scraped off. Part of the resist liquid film RM ₄ or the resist dry film [RM ₃ ], [RM ₂ ], [RM ₁ ] scraped off falls from the outer peripheral surface of the priming roller 14 and is sent to the drain port 76 side. A part is sucked into the cleaning pad (porous resin) 20.

Also, some of the resist liquid film RM ₄ or the resist dry films [RM ₃ ], [RM ₂ ], and [RM ₁ ] remain on the outer peripheral surface of the priming roller 14 (RM ′) without being scraped off. is there. The remaining liquid films RM ₄ ′, RM ₃ ′, RM ₂ ′, RM ₁ ′ move toward the downstream side in the circumferential direction as the priming roller 14 rotates. In the rough cleaning processing unit 18, the cleaning pad 20 may be returned to the retracted position after the rough cleaning of the last resist dry film [RM ₁ ] is completed.

When each remaining liquid film RM _i ′ reaches the finishing cleaning processing unit 38 by the rotation of the priming roller 14, as shown in S _4-6 (rough cleaning / finish cleaning) of FIG. A two-fluid jet is sprayed onto the remaining liquid film RM ′. Under the control of the main control unit 96, it is possible to spray the two-fluid jet flow only on the outer peripheral surface of the priming roller 14 to the area where each residual liquid film RM ′ is attached. The two-fluid jet flow may be continued without interruption from the time when the remaining liquid film RM ₄ ′ is approached until the last remaining liquid film RM ₁ ′ passes. Note that the vacuum device 72 is turned on substantially simultaneously with the start of the injection of the two-fluid jet flow in the finish cleaning processing unit 38.

  Thus, the residual liquid film RM ′ adhering to the outer peripheral surface of the priming roller 14 is easily and thoroughly washed away by the strong impact force of the two-fluid jet flow ejected from the two-fluid jet nozzle 42, and many of them Is mixed with the cleaning liquid and flows down to the drain port 76, and the rest turns into mist and scatters in the vicinity. The scattered mist is drawn toward the intake port 66 and is discharged from there to the vacuum passage 68.

Immediately after the finishing cleaning unit 38 starts the finishing cleaning operation as described above, the drying processing unit 40 also starts the drying processing operation. As shown in S _4-7 (Finish cleaning / droplet removal / dry blow) in FIG. 6, the liquid droplets of the cleaning liquid adhering to the outer peripheral surface of the priming roller 14 by the final cleaning are immediately dried in the drying processing unit 40. Most of the water is wiped off with the wiping pad 52 of the droplet removing section 48, and immediately after passing through the wiping pad 52, it is volatilized uniformly and efficiently by blow of dry air that sharply blows through the gap 58 in the opposite direction. And discharged from the suction port 66.

  In the droplet removing unit 48, the wiping pad 52 is kept in contact with the outer peripheral surface of the priming roller 14 at the droplet removing position (first position) for at least one rotation from the time when the first remaining liquid is applied. It is desirable to keep it.

Also in the second method , as shown in the above-described embodiment , after the droplet removing unit 48 retracts the wiping pad 52, as shown in _S4-8 (dry blow) of FIG. The part 50 may continue to inject the dry air for a while and stop the injection of the dry air after a predetermined time has elapsed. Further, the vacuum device 72 is turned off immediately after the drying blow unit 50 is turned off or after a predetermined time has elapsed.

As described above, according to the second method , the outer peripheral surface of the priming roller 14 is divided into a plurality (for example, four) in the circumferential direction, and each divided area is continuously performed a predetermined number of times (four times). assigned using, in each of the priming process, except the priming of the last (fourth), depending as it operates to continue the rotation of the priming roller 14 even after winding a liquid film RM _i of the resist solution, the resist solution film RM by preventing _i of drool with a resist solution film RM _i can hold the split (assigned) area, the resist solution film RM _i in a short time efficiently naturally dried to resist dry film of semidry state [RM _i ].

In this manner, since the resist liquid film RM _i can be prevented from dripping on the priming roller 14, there is no possibility of contaminating the adjacent unused divided region, and the subsequent priming process is affected by the previous priming process. However, the reproducibility and reliability of the priming process can be improved.

Further, each resist liquid film RM _i adhering to the priming roller 14 is washed as a semi-dried resist dry film [RM _i ] by natural drying or in a completely liquid state, so that it can be easily washed off. The burden on the cleaning mechanism (rough cleaning processing unit 18 and finish cleaning processing unit 38) can be reduced, and the amount of cleaning liquid used can be reduced.

  Furthermore, since the resist drying film or liquid film formed on the outer peripheral surface of the priming roller 14 by a plurality of priming processes at a desired interval is removed at once by the collective cleaning process and the collective drying process, Compared with the first embodiment described above, the amount of cleaning liquid used can be further reduced.

  In the illustrated example, the outer peripheral surface of the priming roller 14 is divided into four, and the resist liquid winding size in the circumferential direction in one priming process is set to 70 ° to 75 °. However, any number of divisions and take-up sizes are possible. For example, the take-up size in the circumferential direction per turn may be 70 ° or less, and the outer peripheral surface of the priming roller 14 may be divided into 5 and used continuously 5 times. Is possible. Further, the order used for the priming process among a plurality of divided regions set over the entire circumference of the priming roller 14 is arbitrary (in no particular order), and does not have to match the arrangement order.

[Other embodiments]
In addition to the method of collecting the reuse cleaning liquid used in the rough cleaning processing unit 16 by the drain tank 80 or the mist trap 70, a method as shown in FIG. 7 is also possible. That is, instead of flowing the cleaning liquid (thinner) used for the final cleaning (new liquid cleaning) by the final cleaning processing unit 38 to the drain, the cleaning liquid is collected and collected in the tray 110 installed below the cleaning nozzle 42, and is roughly cleaned from the tray 110. The data can be transferred to the processing unit 16. In this case, by installing the cleaning pad 20 and the pad holding unit 22 of the rough cleaning processing unit 18 at a position lower than the tray 110, the reuse cleaning liquid is automatically transferred using gravity without using a pump. be able to.

  The configuration or function of other processing units in the priming processing apparatus is not limited to that of the above-described embodiment. For example, the configuration or function of the pad holding unit 22, the pad moving mechanism 24, and the motion converting mechanism 26 in the rough cleaning processing unit 18 can be variously modified. A cleaning tool other than the two-fluid jet nozzle can be used in the finish drying processing unit 38.

  As the coating solution in the present invention, in addition to the resist solution, for example, a coating solution such as an interlayer insulating material, a dielectric material, and a wiring material can be used. The substrate to be processed in the present invention is not limited to an LCD substrate, and other flat panel display substrates, semiconductor wafers, CD substrates, photomasks, printed substrates and the like are also possible.

DESCRIPTION OF SYMBOLS 10 Priming processing apparatus 12 Opening part 14 Priming roller 16 Roller rotation mechanism 18 Rough cleaning processing part 20 Cleaning pad 28 Cleaning liquid replenishment nozzle 38 Finish cleaning processing part 40 Drying processing part 42 Two-fluid jet nozzle 52 Wiping pad 58 Crevice 60 Gas nozzle 72 Vacuum device 98 Main control unit 100 Nozzle moving mechanism 102 Resist supply unit

Claims (20)

A priming method for forming a liquid film of a coating solution as a preparation for coating processing near the discharge port of a slit nozzle used for spinless coating processing,
For one priming process, the slit nozzle discharge port is made to face the top of a horizontally arranged cylindrical or columnar priming roller with a predetermined gap in parallel, and fixed to the slit nozzle. A first step of rotating a part of the discharged coating liquid on an outer peripheral surface of the priming roller by rotating the priming roller after discharging an amount of the coating liquid;
While rotating the priming roller, a second cleaning is performed by bringing a cleaning pad made of a porous resin into contact with a region where the coating liquid is wound on the outer peripheral surface of the priming roller at a predetermined contact cleaning position. Process,
A third step of supplying a cleaning liquid to the outer peripheral surface of the priming roller that has been subjected to the rough cleaning while performing the final cleaning while rotating the priming roller;
A fourth step of drying the outer peripheral surface of the priming roller that has been subjected to the finish cleaning while rotating the priming roller;
In the first, third and fourth steps, the cleaning pad is moved away from the priming roller,
In the second step, the priming roller is stopped immediately before the region where the coating liquid is wound on the outer peripheral surface of the priming roller reaches the contact cleaning position, and the cleaning pad is placed on the outer peripheral surface of the priming roller. After the contact, the rotation of the priming roller is resumed to scrape off the liquid film of the coating liquid on the region by the cleaning pad, and the cleaning pad is removed from the contact cleaning position immediately after the remaining liquid film comes out of the contact cleaning position. Continue or resume rotation of the priming roller away from the roller,
Priming processing method.   The contact cleaning position is provided in the middle of a region where the coating liquid is wound up on the outer peripheral surface of the priming roller from the top position to the bottom position of the priming roller by the rotation of the priming roller. The priming processing method as described.   3. The priming processing method according to claim 1, wherein, in the second step, the cleaning pad is pressed against an outer peripheral surface of the priming roller in a state where a cleaning liquid is immersed therein.   The priming processing method according to claim 3, wherein the cleaning liquid soaked in the cleaning pad includes the cleaning liquid recovered in the third step or the fourth step. A priming method for forming a liquid film of a coating solution as a preparation for coating processing near the discharge port of a slit nozzle used for spinless coating processing,
For one priming process, the slit nozzle discharge port is made to face the top of a horizontally arranged cylindrical or columnar priming roller with a predetermined gap in parallel, and fixed to the slit nozzle. A first step of rotating a part of the discharged coating liquid on an outer peripheral surface of the priming roller by rotating the priming roller after discharging an amount of the coating liquid;
A second step of performing rough cleaning by bringing a cleaning pad made of a porous resin into contact with a region of the outer peripheral surface of the priming roller wound around the coating liquid while rotating the priming roller;
A third step of supplying a cleaning liquid to the outer peripheral surface of the priming roller that has been subjected to the rough cleaning while performing the final cleaning while rotating the priming roller;
A fourth step of drying the outer peripheral surface of the priming roller that has been subjected to the finish cleaning while rotating the priming roller;
Crushing the cleaning pad in order to discharge the coating liquid sucked out by the cleaning pad,
Priming processing method.   The crushing of the cleaning pad is performed by pressing the cleaning pad against the outer peripheral surface of the priming roller with a larger pressing force immediately after the cleaning pad has finished the rough cleaning and before leaving the priming roller. The priming processing method according to claim 5.   The priming processing method according to any one of claims 1 to 6, wherein, in the third step, the cleaning liquid is mixed with gas toward the outer peripheral surface of the priming roller and sprayed with a high-pressure two-fluid jet flow.   The priming processing method according to claim 7, wherein the two-fluid jet flow is sprayed only on a predetermined region of the outer peripheral surface of the priming roller that is used for winding the coating liquid. The fourth step includes
A fifth step of wiping off the cleaning liquid adhering to the outer peripheral surface of the priming roller;
The priming processing method according to claim 1, further comprising: a sixth step of volatilizing the cleaning liquid remaining on the outer peripheral surface of the priming roller.   The priming method according to claim 9, wherein, in the fifth step, a plate-like wiping pad made of a non-porous material is brought into contact with the outer peripheral surface of the priming roller.   The priming processing method according to claim 10, wherein one end of the wiping pad is brought into contact with the outer peripheral surface of the priming roller at an oblique angle following the rotation direction of the priming roller.   The priming processing method according to claim 10 or 11, wherein the wiping pad is moved away from the priming roller immediately after the droplets are wiped off.   In the sixth step, a dry gas is injected into a gap formed around the priming roller over a certain section in a circumferential direction so as to blow in a direction opposite to the rotation direction of the priming roller. The priming treatment method according to any one of 9 to 12. A priming processing apparatus for forming a liquid film of a coating liquid as a preparation for coating processing in the vicinity of a discharge port of a slit nozzle used for spinless coating processing,
A cylindrical or columnar priming roller disposed horizontally at a predetermined position;
A rotation mechanism for rotating the priming roller about its central axis;
A cleaning pad made of a porous resin for performing rough cleaning on the outer peripheral surface of the priming roller, and a contact cleaning position that contacts the outer peripheral surface of the priming roller and a retreat position that is separated from the outer peripheral surface of the priming roller A rough cleaning processing section for switching the position of the cleaning pad between,
A finish cleaning processing section for supplying a cleaning liquid to the outer peripheral surface of the priming roller to perform finish cleaning;
A drying processing unit for forcibly drying the outer peripheral surface of the priming roller;
A control unit that controls each operation of the rotation mechanism, the rough cleaning processing unit, the finish cleaning processing unit, and the drying processing unit,
For one priming process, the slit nozzle discharge port is made to face the top of a horizontally arranged cylindrical or columnar priming roller with a predetermined gap in parallel, and fixed to the slit nozzle. An amount of the coating liquid is discharged, and then the priming roller is rotated by the rotating mechanism to wind a part of the discharged coating liquid on the outer peripheral surface of the priming roller,
The priming roller is stopped through the rotating mechanism immediately before the region where the coating liquid is wound on the outer peripheral surface of the priming roller reaches the contact cleaning position, and the position of the cleaning pad is retracted by the rough cleaning processing unit. After switching from the position to the contact cleaning position, rotation of the priming roller is resumed by the rotation mechanism, and the liquid film of the coating liquid on the region is rubbed with the cleaning pad by the rough cleaning processing unit, and the remaining liquid Immediately after the film comes out of the contact cleaning position, the rough cleaning processing unit returns the cleaning pad to the retracted position, and the rotation mechanism continues or restarts the rotation of the priming roller,
While rotating the priming roller by the rotating mechanism, the cleaning liquid is supplied to the outer peripheral surface of the priming roller after being subjected to rough cleaning by the finishing cleaning processing unit, and finish cleaning is performed.
While rotating the priming roller by the rotating mechanism, the outer peripheral surface of the priming roller after finishing cleaning is dried by the drying processing unit.
Priming processing device.   The priming processing apparatus according to claim 14, wherein in the rough cleaning processing unit, the first position of the cleaning pad is set in the vicinity of approximately 90 · s away from the top of the priming roller along the rotation direction.   The priming processing apparatus according to claim 14, wherein the rough cleaning processing unit includes a pressure mechanism for pressing the cleaning pad against an outer peripheral surface of the priming roller with a desired pressure.   The priming processing apparatus according to any one of claims 14 to 16, wherein the rough cleaning processing unit includes a cleaning liquid supply unit for supplying a cleaning liquid to the cleaning pad directly or via an outer peripheral surface of the priming roller. .   The cleaning pad has a length that covers from one end to the other end of the priming roller in the horizontal direction and a rectangular cross-sectional shape, and is in surface contact with the outer peripheral surface of the priming roller at the first position. The priming processing apparatus according to any one of 14 to 17.   The priming process according to any one of claims 14 to 18, wherein the finishing cleaning unit includes a two-fluid jet nozzle that mixes a cleaning liquid with a gas and sprays the cleaning liquid with a jet toward an outer peripheral surface of the priming roller. apparatus.   The priming processing apparatus according to claim 14, further comprising an exhaust mechanism for removing mist generated around the priming roller by forced exhaust.

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