TWI739261B - Electronic component inspection method and electronic component inspection device - Google Patents

Abstract

A method for inspecting electronic components is used for inspecting electronic components on a carrier plate. The electronic components have a first surface, a second surface, and a peripheral surface. The inspection method includes: providing a conveying flow path for conveying the carrier plate carrying the electronic component along a conveying direction; providing a first inspection unit including a first inspection unit for inspecting the electronic component, a second inspection unit, and a first inspection unit; The inspection mechanism of the third inspection unit; and the tray carrying the electronic component with the first surface facing upwards is transported in the conveying flow path, and the first, second and third inspection units are used to perform the first inspection of the electronic component 1. Inspection of the surface and the side surface. In the present invention, the appearance of each surface of the electronic component can be inspected without turning over the electronic component. The invention also provides an inspection device for inspecting electronic components.

Description

Electronic component inspection method and electronic component inspection device

The present invention relates to an inspection method, in particular to an inspection method of electronic components, and an electronic component inspection device.

A general electronic component includes a top surface, a bottom surface provided with a ball array package (Ball Grid Array, BGA), and a side peripheral surface connecting the top surface and the bottom surface. After the production of the electronic component is completed, it needs to go through quality management items such as inspection of the top surface, bottom surface, and side peripheral surface, and is judged to be a good product before it can be officially shipped.

The visual inspection process of the electronic component mainly first inspects the bottom surface, and then the top surface is inspected after the electronic component is turned over, and then the electronic component is turned over to an angle suitable for inspecting the side surface, and an image sensing element (such as a charge-coupled device (CCD)) is used. ))Check.

However, due to the trend toward miniaturization of electronic components, and the appearance inspection process usually requires inspection of multiple electronic components. Therefore, turning over and inspecting tiny electronic components individually will take a lot of time and become more difficult as the volume of electronic components continues to shrink; If the components are turned over at the same time, it will also complicate the mechanism or cause the electronic components to fall from the carrier and be damaged during the turning process.

Therefore, one of the objectives of the present invention is to provide an electronic component inspection method that can at least overcome the disadvantages of the prior art.

Therefore, the electronic component inspection method of the present invention is used to inspect at least one electronic component carried on a carrier, the at least one electronic component has a first surface and a second surface opposite to each other, and a connection to the first surface The inspection method for the side peripheral surface between the second surface and the second surface includes: providing a conveying flow path formed by a plurality of rail seats arranged on a machine platform, and the conveying flow path is used for conveying the carrier along a conveying direction. The carrier plate of the at least one electronic component; providing a viewing mechanism disposed on the machine, the viewing mechanism including a first viewing unit for viewing the first surface of the at least one electronic component, and a first viewing unit for viewing the at least one electronic component A second inspection unit for the second surface of an electronic component, and a third inspection unit for inspecting the lateral surface of the at least one electronic component; and placing the carrier plate carrying the at least one electronic component on the conveying flow path It is conveyed along the conveying direction, and the inspection of the first surface, the opposite second surface and the side peripheral surface of the at least one electronic component is performed in the first inspection unit, the second inspection unit, and the third inspection unit During the process, the at least one electronic component being inspected keeps the first surface facing upward.

Therefore, another object of the present invention is to provide an electronic component inspection device that can at least overcome the disadvantages of the prior art.

Therefore, the electronic component inspection device of the present invention includes a first inspection unit, a second inspection unit, and a third inspection unit for executing the aforementioned electronic component inspection method.

The effect of the present invention is that the at least one electronic component does not need to be turned over during the inspection process, and the appearance of each surface can be inspected, which effectively improves the efficiency of inspecting the appearance of the electronic component.

1: Machine

11: Countertop

12: side

2: Conveying mechanism

21: The first conveying unit

210: first stop group

211: The first rail seat

212: The first steering rail seat

213: The first rail frame

214: The first transport runner

215: Shading

216: The first turning runner

2161: first connection end

2162: second connection end

217: The first steering block group

218: Inlet

219: The first belt

22: The second conveying unit

221: second rail seat

222: second steering rail seat

223: second rail frame

224: The second conveying channel

225: The first mobile station

226: Second turning flow channel

2261: third connection end

227: The second steering block group

228: second belt

229: second gear group

23: The third conveying unit

231: third rail seat

232: third rail frame

233: second mobile station

234: The third conveying channel

235: Outlet

236: Third Belt

237: Third Gear Group

3: Inspection agency

31: The first inspection unit

32: The second viewing unit

321: Viewable area

33: The third viewing unit

331: viewable area

4: Extraction agency

41: The first extraction unit

411: The first extraction rail seat

412: first support seat

413: The first extraction group

414: The first height control rail seat

42: The second extraction unit

421: Second extraction rail seat

422: second support base

423: The second extraction group

424: Second height control rail seat

5: Transport flow path

51: conveying direction

X1: first direction

X2: second direction

X3: Third party

91: disk

92: electronic components

921: First Surface

922: second surface

923: Side circumference

924: substrate

925: heat sink

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: FIG. 1 is a three-dimensional view illustrating a carrier plate used in the electronic component inspection device of the present invention and carried on the carrier plate The multiple electronic components are represented by two electronic component examples in the figure; Figure 2 is a three-dimensional view illustrating a first embodiment of the electronic component inspection device of the present invention; Figure 3 is a top view illustrating the first embodiment; 4 is a perspective view illustrating a first rail seat of the first embodiment; FIG. 5 is a perspective view illustrating a first turning flow passage of a first steering rail seat of the first embodiment along a first direction X1 extension; Figure 6 is a perspective view illustrating the turning of the first steering rail seat so that the first turning flow passage extends in a second direction X2; Fig. 7 is a perspective view illustrating a second rail seat of the first embodiment; Fig. 8 is a perspective view illustrating a second turning flow passage of a second steering rail seat of the first embodiment along the second direction X2 extension; Figure 9 is a perspective view illustrating the turning of the second steering rail seat so that the second steering runner extends in a third direction X3; Figure 10 is a perspective view illustrating a third rail of the first embodiment 11 is a schematic top view, illustrating that the carrier plate carrying the electronic components is input from an inlet of the first conveying channel from an outlet of the third conveying channel to be output; 12 is a perspective view illustrating that a first inspection unit in the first embodiment is located above the first conveying channel and a second inspection unit; FIG. 13 is a perspective view illustrating a first inspection unit in the first embodiment The three viewing units are located below the two second extraction units; Figure 14 is a perspective view illustrating one of the first extraction units; Figure 15 is a perspective view illustrating one of the second extraction units; Figure 16 is a flowchart , Illustrates an electronic component inspection method using the first embodiment of the electronic component inspection device; and FIG. 17 is a top view illustrating a second embodiment of the electronic component inspection device of the present invention.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numbers.

Referring to FIGS. 1 to 3, a first embodiment of an inspection device suitable for an inspection method of electronic components of the present invention is suitable for inspecting a plurality of electronic components 92 carried on a carrier 91. Each electronic component 92 is roughly a cube, with a first surface 921 facing upward, a second surface 922 opposite to the first surface 921 and facing downward, and a second surface 922 connected to the first surface 921 and the second surface 921 The side peripheral surface 923 of the surface 922 is provided with a solder ball array package (BGA) and a concave and convex substrate 924 of the second surface 922, and a substrate 924 covering the substrate 924 and having the second surface away from the substrate 924 A heat sink 925 on a surface 921. It should be noted that the number of the electronic component 92 carried by the tray 91 can also be only one.

The inspection device includes a machine 1, a conveying mechanism 2, an inspection mechanism 3, and an extraction mechanism 4 provided on the machine 1.

The machine 1 has a table 11 that is flat and rectangular in a horizontal direction, and a side surface 12 connected to the table 11.

The conveying mechanism 2 is provided with a first conveying unit 21, a second conveying unit 22 connected to the first conveying unit 21 and located downstream of the first conveying unit 21, and a second conveying unit 22 connected to the second conveying unit 22 and located at the The third conveying unit 23 downstream of the second conveying unit 22.

Referring to FIGS. 3 to 5, the first conveying unit 21 is provided with a first rail seat 211 and a first steering rail seat 212 located downstream of the first rail seat 211. The first rail seat 211 is provided with two first rails 213 spaced apart and defining a first conveying channel 214 extending along a first direction X1, and two first rails 213 respectively disposed on the first rail 213 A belt 219 (the first belts 219 are symmetrically arranged, and only one of the first belts 219 is shown in FIG. 4), a first stop group 210 arranged between the first rails 213, And a shielding member 215 disposed between the first rails 213 and located below the first conveying channel 214. The first conveying channel 214 is used to convey the carrier 91 (as shown in FIG. 1). The first blocking group 210 can move up and down relative to the first conveying flow path 214, and when protruding upward from the first conveying flow path 214, blocks the movement of the carrier plate 91 to position the carrier plate 91. The shielding member 215 is used to shield the table 11 of the machine 1 under the shielding member 215 and other components of the first rail seat 211 below the shielding member 215, so as to view from above the carrier 91 The background at the time is simplistic. Referring to FIGS. 2 and 5 to 6, the first steering rail seat 212 defines a first steering flow passage 216 and includes a first steering stop group 217. The first turning flow channel 216 has a first connecting end 2161 and a second connecting end 2162 opposite to the first connecting end 2161. The first turning stop group 217 can move up and down relative to the first turning flow passage 216, and when protruding upward from the first turning flow passage 216, blocks the movement of the carrier plate 91 to position the carrier plate 91. The first turning flow passage 216 can rotate relative to the first rail seat 211 from extending along the first direction X1 to rotating along the first direction X1. A second vertical direction X2 extends.

Referring to FIGS. 2 and 7, the second conveying unit 22 is provided with a second rail seat 221 located downstream of the first steering rail seat 212 and a second steering rail seat 222 located downstream of the second rail seat 221. The second rail seat 221 is provided with two second rails 223 spaced apart and defining a second conveying channel 224 extending along the second direction X2, and two second rails 223 respectively disposed on the second rail 223 Belts 228 (the second belts 228 are symmetrically arranged, and only one of the second belts 228 is shown in FIG. 7), a second stop group 229 arranged between the second rails 223, and A first mobile station 225 arranged between the second rails 223. The second blocking group 229 can move up and down relative to the second conveying flow path 224, and when it protrudes upward from the second conveying flow path 224, it blocks the movement of the carrier plate 91 (as shown in FIG. 1) to make the carrier plate 91 positioning. The first moving table 225 is used to enable the tray 91 to move up and down and horizontally relative to the second conveying channel 224 in a vertical direction. Referring to FIGS. 2 and 8 to 9, the second steering rail seat 222 defines a second steering flow passage 226 and includes a first steering stop group 227. The second turning flow channel 226 has a third connecting end 2261. The second turning flow passage 226 can rotate relative to the second rail seat 221 from extending along the second direction X2 to extending along a third direction X3 opposite to the first direction X1. The second steering stop group 227 can move up and down relative to the second steering flow passage 226, and when protruding upward from the second steering flow passage 226, blocks the movement of the carrier plate 91 to position the carrier plate 91.

Referring to Figure 2, Figure 3, Figure 10, the third conveying unit 23 is provided with a The third rail seat 231 downstream of the second steering rail seat 222. The third rail seat 231 is provided with two third rails 232 spaced apart and defining a third conveying channel 234 extending along the third direction X3, and two third rails 232 respectively disposed on the third rail 232 Belts 236 (the third belts 236 are symmetrically arranged, and only one of the third belts 236 is shown in FIG. 10), a third stop group 237 arranged between the third rails 232, and A second mobile station 233 arranged between the third rails 232. The third blocking group 237 can move up and down relative to the third conveying flow path 234, and when it protrudes upward from the third conveying flow path 234, it blocks the movement of the carrier plate 91 (as shown in FIG. 1) to position the carrier plate 91 . The second moving table 233 is used for enabling the tray 91 to move up and down and horizontally relative to the third conveying channel 234 in the vertical direction. In this embodiment, the second conveying runner 224 is disposed between the first conveying runner 214 and the third conveying runner 234.

Referring to FIGS. 3 and 11, the first conveying channel 214 of the first rail seat 211, the first turning channel 216 of the first steering rail seat 212, the second conveying channel 224 of the second rail seat 221, The second turning flow channel 226 of the second turning rail base 222 and the third conveying flow channel 234 of the third rail base 231 jointly form a conveying flow path 5. The conveying flow path 5 is used for conveying the carrier 91 carrying the electronic component 92 along a conveying direction. The conveying direction first extends in the first direction X1, after being turned to extend in the second direction X2, and then turned to extend in the third direction X3. In this embodiment, the first conveying channel 214 has an inlet 218 for the carrier 91 to enter the conveying channel 5 and located above the side surface 12 of the machine 1, and the third conveying channel 234 have A discharge port 235 for the tray 91 to leave the conveying flow path 5 and located above the side surface 12 of the machine platform 1. Specifically, the side surface 12 of the machine 1 faces the third direction X3, and the inlet 218 and the discharge port 235 are also located on the same side as the side surface 12 and face the third direction X3.

11-13, the inspection mechanism 3 is provided with a first inspection unit 31 located above the shielding member 215 of the first rail seat 211, and a second inspection unit 31 located at a distance from one of the second rails 223 to the other. The second inspection unit 32 on the outer side of the rail 223 and a third inspection unit 33 located on the outer side of one of the third rails 232 away from the other third rail 232. The first viewing unit 31 is used to view the first surface 921 of one of the electronic components 92 from top to bottom (as shown in FIG. 1), and the second viewing unit 32 is used to view one of the electronic components from bottom to top The second surface 922 of 92 (as shown in FIG. 1), and the third inspection unit 33 is used to inspect the side peripheral surface 923 of one of the electronic components 92 (as shown in FIG. 1). In this embodiment, each of the first viewing unit 31, the second viewing unit 32, and the third viewing unit 33 is an image-carrying device (for example, a charge coupled device (CCD)).

Referring to Figures 2, 3, and 11, the extraction mechanism 4 is provided with two first extraction units 41 located above the second viewing unit 32, and two second extraction units 42 located above the third viewing unit 33 .

Referring to Figures 2, 3, and 14, each first extraction unit 41 is provided with a first extraction rail seat 411, and a first extraction rail seat 411 that can be controlled to be parallel to the first extraction rail seat 411 The first extraction rail seat 411 reciprocates a first height control rail seat 414, a first support seat that can be controlled to move up and down relative to the first height control rail seat 414 and along the first height control rail seat 414 412, and three first extraction groups 413 connected to the first supporting base 412 and moving together with the first supporting base 412. The first extraction rail base 411 extends from above the second rail base 221 along the third direction X3 to the rear side of the second rail base 221. Each first extraction group 413 can be controlled to move up and down relative to the first support base 412, and can use negative pressure technology to absorb the data on the carrier 91 on the first moving table 225 (as shown in FIG. 7). The first surface 921 of the electronic component 92. The height of the installation position of the first support base 412 can be controlled by the first height control rail base 414 respectively, so the first extraction group 413 of the first extraction unit 41 can be staggered by the height difference.

Referring to FIGS. 2, 3, and 15, each second extraction unit 42 is provided with a second extraction rail seat 421, which can be controlled to reciprocate relative to the second extraction rail seat 421 and along the second extraction rail seat 421 A movable second height control rail seat 424, a second support seat 422 that can be controlled to move up and down relative to the second height control rail seat 424 and along the second height control rail seat 424, and three connected to the The second supporting base 422 and the second extracting group 423 moving together with the second supporting base 422. The second extraction rail seat 421 extends from above the third rail seat 231 to the left side of the third rail seat 231 in a direction opposite to the second direction X2. Each second extraction group 423 can be controlled to move up and down relative to the second support base 422, and can use negative pressure technology to absorb the second moving The first surface 921 of a plurality of the electronic components 92 on the carrier 91 on the stage 233 (as shown in FIG. 10). The height of the installation position of the second support base 422 can be controlled by the second height control rail base 424 respectively, so the second extraction group 423 of the second extraction unit 42 can be staggered by the height difference. .

Referring to FIG. 16, an embodiment of an electronic component inspection method executed by the above-mentioned electronic component inspection apparatus will be described in detail as follows.

4, 11, and 12, the electronic component 92 is first placed on the carrier 91 with the first surface 921 facing upward; then the carrier 91 carrying the electronic component 92 is placed on the carrier 91 The material inlet 218 of the first conveying channel 214 is conveyed to the first conveying channel 214, and the operation of the first belt 219 is used to cause the carrier plate 91 to move along the first conveying channel 214 along the first conveying channel 214. The direction X1 is conveyed; when the electronic component 92 is conveyed above the shielding member 215 and below the first inspection unit 31, the first stop group 210 is used to stop the conveyance of the tray 91, and use The first inspection unit 31 inspects the first surface 921 of the electronic component 92. During the inspection of the first surface 921, the shielding member 215 can prevent the first inspection unit 31 from being interfered by a table 11 of the machine 1 when inspecting the first surface 921.

Referring to FIGS. 5-6 and 11, the first turning flow passage 216 of the first turning rail seat 212 is extended along the first direction X1 and the first connecting end of the first turning flow passage 216 2161 is connected to the first conveying channel 214, and makes the tray After 91 is transported from the first conveying channel 214 to the first turning channel 216, the first turning stop group 217 is used to position the carrier plate 91; then, the first turning flow channel 216 is rotated and turned to make The second connecting end 2162 is connected to the second conveying channel 224.

Referring to FIGS. 7, 11, and 14, after that, the carrier plate 91 is transported from the first turning flow path 216 to the second conveying flow path 224 in the second direction X2, and the second belt 228 is used Operation, so that the tray 91 is transported on the second conveying channel 224; when the tray 91 moves to be located on the first moving table 225, the second stop group 229 is used to position the tray 91 first , Then the first moving platform 225 is raised, and the first extraction unit 41 is moved toward the second conveying channel 224 in turn; when one of the first extraction units 41 moves above the carrier 91 , Using the first extraction group 413 to absorb three of the electronic components 92. During the suction process, since the first extraction unit 41 cannot move along the second direction X2, the first moving stage 225 is moved horizontally along the second direction X2 to fine-tune the position left and right for the first extraction unit 41 picks up three of the electronic components 92 on the carrier 91. After the first extraction unit 41 absorbs three of the electronic components 92, it returns to the top of the second viewing unit 32 along the third direction X3, and makes one of the first extraction groups 413 drop Move to a viewable area 321 of the second viewing unit 32 for inspection to view the second surface 922 of the electronic component 92 that has been sucked; then, the first extraction unit 41 is used to cooperate with the first moving stage 225 The movement will be absorbed by the first extraction group 413 and the second surface 922 inspection has been completed The electronic component 92 is moved back to the carrier 91. In addition, in order to save time for performing the inspection method, when one of the first extraction units 41 returns to the top of the second inspection unit 32, the other first extraction unit 41 can simultaneously move to the second conveying flow channel. 224 moves. Since the height of the first support base 412 can be controlled (as shown in FIG. 2), the first extraction units 41 will not collide with each other during the movement.

After the inspection of the second surface 922 of the electronic component 92 is completed, the first moving table 225 is first lowered, and then the carrier plate 91 is continued to be transported in the second conveying channel 224; refer to FIGS. 8 to 9 11, then, the second turning flow channel 226 of the second turning rail seat 222 is extended along the second direction X2 and the second connecting end 227 of the second turning flow channel 226 is connected to the second conveying flow Road 224 is connected; then, the carrier plate 91 is transported from the second conveying flow path 224 to the second turning flow path 226; after that, the second turning stop group 227 is first to position the carrier plate 91, and then the carrier plate 91 The second turning flow channel 226 rotates and turns to extend along the third direction X3 and connect the second connecting end 227 with the third conveying flow channel 234.

Then, the carrier plate 91 is transported from the second turning flow path 226 to the third conveying flow path 234 along the third direction X3; refer to FIGS. 10 to 11 and 15, and use the third The operation of the belt 236 causes the carrier plate 91 to be transported on the third conveying channel 234. When the carrier plate 91 moves to the second moving table 233, the third stop group 237 is first positioned to the Carry the disc 91, and then raise the second moving stage 233, and make the second extraction unit 42 move toward the third conveying channel 234 in turn When one of the second extraction units 42 moves to the top of the tray 91, the second extraction group 423 is used to absorb three of the electronic components 92. During the suction process, since the second extraction unit 42 cannot move along the third direction X3, the second mobile station 233 is moved horizontally along the third direction X3 to fine-tune the position back and forth for the second extraction The unit 42 sucks three of the electronic components 92 on the carrier 91. After the second extraction unit 42 absorbs three of the electronic components 92, it returns to the top of the third viewing unit 33 in the opposite direction to the second direction X2, and makes the second extraction group 423 One is moved down to a viewable area 331 of the third viewing unit 33 to view the side peripheral surface 923 of the electronic component 92 that is sucked; then, the second extraction unit 42 is used to cooperate with the second moving stage 233 The electronic component 92 that has been inspected on the side surface 923 sucked by the second extraction group 423 is moved back to the carrier 91. In addition, in order to save the time of performing the inspection method, when one of the second extraction units 42 returns to the top of the third viewing unit 33, the other second extraction unit 42 can simultaneously move to the third conveying flow channel. 324 moves. The height of the second support base 422 can be controlled, so during the movement, the second extraction units 42 will not collide with each other.

After the inspection of the side surface 923 of the electronic component 92 is completed, the second moving table 233 is first lowered, and then the carrier 91 is continued to be transported in the third conveying flow path 234 until the carrier 91 is free from The discharge port 235 is output.

It should be noted that the carrier plate 91 is at the same level in the conveying flow path. 5 is transported; specifically, the tray 91 is transported at the same level from the first transfer channel 214 through the first turning channel 216 to the second transfer channel 224, and the tray 91 Also at the same level, it is conveyed from the second conveying flow channel 224 through the second turning flow channel 226 to the third conveying flow channel 324.

Referring to FIG. 17, it is a second embodiment of the electronic component inspection device of the present invention. The second embodiment is similar to the first embodiment. The difference is that the conveying mechanism 2 of the electronic component inspection device is provided with two A second rail seat 221 located between the first steering rail seat 212 and the second steering rail seat 222 and sequentially arranged along the second direction X2; the extraction mechanism is provided with four first extraction units 41; And the inspection mechanism 3 is provided with two second inspection units 32 spaced apart from each other. Two of the first extracting units 41 are located above one of the second viewing units 32, and the other two of the first extracting units 41 are located above the other second viewing unit 32, and the second viewing unit 32 have different viewing magnifications. The second surface 922 of the electronic component 92 can be inspected by the second viewing unit 32 of low magnification, and the second surface 922 of the electronic component 92 can be inspected by the second viewing unit 32 of high magnification. The second surface 922 of the electronic component 92. The design of the first extraction unit 41 and the plurality of second inspection units 32 can improve the inspection accuracy of the second surface 922 of the electronic component 9 (as shown in FIG. 1 ).

In summary, the inspection method of the electronic component of the present invention utilizes the design of the conveying flow path 5 and the inspection mechanism 3 to make the carrier 91 carrying the electronic component 92 The conveying flow path 5 is conveyed along the conveying direction with the first surface 921 facing upwards, so that the electronic component 92 does not need to be turned over during the inspection process, and each surface of the electronic component 92 can be completed. The appearance inspection effectively improves the inspection efficiency of the electronic component 92. Secondly, since the inlet 218 of the first conveying channel 214 and the outlet 235 of the second conveying channel 214 are located on the same side, the tray 91 can be fed from the same side of the machine 1 With the removal of the conveying flow path 5, therefore, a feeding device (not shown) for conveying the carrier 91 in and out of the electronic component inspection device can be uniformly arranged on the same side of the machine 1, thereby reducing the device’s cost. The overall configuration area can indeed achieve the purpose of the invention.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.

Claims (11)

An inspection method for electronic components is used to inspect at least one electronic component carried on a carrier, the at least one electronic component has a first surface and a second surface opposite to each other, and a connection between the first surface and the second surface The inspection method for the lateral surface between the two surfaces includes: providing a conveying flow path formed by a plurality of rail seats arranged on a machine platform, and the conveying flow path is used for conveying the at least one bearing along a conveying direction The carrier disk of the electronic component; providing a viewing mechanism set on the machine, the viewing mechanism including a first viewing unit for viewing the first surface of the at least one electronic component, and a first viewing unit for viewing the at least one electronic component A second inspection unit on the second surface of the second surface, and a third inspection unit for inspecting the side surface of the at least one electronic component; The direction is conveyed, while the first inspection unit, the second inspection unit, and the third inspection unit perform inspections of the first surface, the opposite second surface, and the side peripheral surface of the at least one electronic component, The at least one electronic component being inspected keeps the first surface upward. The method for inspecting an electronic component according to claim 1, wherein the at least one electronic component includes a substrate, and a heat sink covering the substrate and having the first surface away from the substrate. The electronic component inspection method according to claim 1, wherein a shield is provided on the conveying flow path, and the first inspection unit, the second inspection unit, and the third inspection unit perform the first inspection of the at least one electronic component Surface, second When inspecting the surface and the side peripheral surface, the shield prevents at least one of the first inspection unit, the second inspection unit, and the third inspection unit from being interfered with. The electronic component inspection method according to claim 1, wherein the transport flow path includes a first transport flow path, a second transport flow path located downstream of the first transport flow path, and a second transport flow path located at the downstream of the first transport flow path. The third conveying flow path downstream of the flow path, when the carrier plate carrying the at least one electronic component with the first surface facing upward is transported along the conveying direction on the conveying flow path, the carrier plate sequentially passes through the first A conveying runner, the second conveying runner, and the third conveying runner. The method for inspecting electronic components according to claim 4, wherein the first surface is a flat surface, and the at least one electronic component placed on the carrier is inspected on the first conveying channel by the first inspection unit On the first surface, when the carrier plate is transported to the second conveying flow channel, a first extraction unit extracts the at least one electronic component placed on the carrier plate, and uses the second viewing unit to view the at least one electronic component When the second surface of the electronic component is transported to the third conveying flow path, a second extraction unit is used to extract the at least one electronic component placed on the carrier, and the third viewing unit is used to inspect it The side peripheral surface of the at least one electronic component. The method for inspecting electronic components according to claim 5, wherein the carrier disk carries a plurality of the electronic components, and the first extraction unit simultaneously extracts several of the electronic components from the carrier disk to the second inspection Above the unit, one of the electronic components is lowered to a viewable area of the second viewing unit, and the second extraction unit simultaneously extracts several of the electronic components from the carrier to above the third viewing unit , And make one of the electronic elements The piece descends to an inspectable area of the third inspecting unit. The electronic component inspection method according to claim 4, wherein the second conveying flow path of the conveying flow path is provided between the first conveying flow path and the third conveying flow path, and the at least The process in which an electronic component carrier is conveyed along the conveying direction on the conveying flow path, so that the carrier is conveyed in a first conveying flow path extending in a first direction, and the carrier is moved in a second direction The extended second conveying channel is conveyed, so that the carrier is conveyed in a third conveying channel extending in a third direction, the third direction is opposite to the first direction, and the second direction is perpendicular to the first direction. One direction and the third direction. The electronic component inspection method according to claim 7, wherein the first transport stream of the transport flow path has an inlet for the tray to enter the transport flow path, and the third transport of the transport flow path The flow tool has a discharge port for the tray to leave the conveying flow path, and the input port and the discharge port are located on the same side of the machine. The electronic component inspection method according to claim 7, wherein the transport flow path further includes a first turning flow path provided between the first transport flow path and the second transport flow path, and a first turning flow path provided at The second turning flow channel between the second conveying flow channel and the third conveying flow channel uses the first turning flow channel to transport the carrier plate located in the first conveying flow channel through the first turning flow channel To the second conveying flow channel, the second turning flow channel is used to transport the carrier plate located in the second conveying flow channel to the third conveying flow channel through the second turning flow channel. The electronic component inspection method according to claim 1, wherein the carrier plate is conveyed in the conveying flow path at the same level. An electronic component inspection device includes: a first inspection unit, a second inspection unit, and a third inspection unit for performing the inspection method of electronic components as described in any one of claim 1 to claim 10.

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