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JP4007526B2 - 6-side inspection system for chips - Google Patents

6-side inspection system for chips Download PDF

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Publication number
JP4007526B2
JP4007526B2 JP11015598A JP11015598A JP4007526B2 JP 4007526 B2 JP4007526 B2 JP 4007526B2 JP 11015598 A JP11015598 A JP 11015598A JP 11015598 A JP11015598 A JP 11015598A JP 4007526 B2 JP4007526 B2 JP 4007526B2
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JP
Japan
Prior art keywords
chip
recess
concave portion
camera
shaped chute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11015598A
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Japanese (ja)
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JPH11295236A (en
Inventor
滋 窪田
雅宏 久保
晴久 岡田
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Nitto Kogyo Corp
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Nitto Kogyo Corp
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Priority to JP11015598A priority Critical patent/JP4007526B2/en
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Description

【0001】
【発明の属する技術分野】
本発明はチップ(各種小形電子部品、例えば、コンデンサ、レジスタ、その他)の内、6面体のチップの製造工程において、該チップの6面(前、後、上、下、左、右の各面)をCCDカメラ等のチップ検査用のカメラで検査して、チップの各面の外部形状、傷、欠損、汚れ、その他の欠陥を検査して、チップを良品、不良品に分別し、不良品を排除するための、チップの6面検査装置に係る。
【0002】
【従来技術】
従来、チップの傷、欠損、汚れ等の欠陥を目視で検査して、チップを良品、不良品に分別することが広く行われ、最初は1面(上面)だけ、次で2面(上面と下面)の検査を行っていたが、チップの極小化(例、0603型は長さ0.6mm、幅0.3mmの長方形)が進行するに従って目視検査が困難となり、また最終製品(例、テレビ、ビデオ等)になってからチップを原因とするトラブルが発生した場合の重大性から、チップの検査精度の向上が希求されてきて、近時はカメラを使用してチップの4面、若しくは6面の全てを検査することが行われている。
【0003】
然して、従来のカメラを使用したチップの6面検査装置は、例えば、図7に示すように、フィダー2aからのチップtを円周部の凹部3aに1個宛装填して搬送する水平ローター1aと円周部の凹部3a、3bを垂直に交叉して垂直ローター1bを設置し、水平ローター1aの円周部の凹部3aに相対した前方、上方、及び下方の位置に備えたカメラ(1)a、(2)a、(3)aでチップtの前面、上面、及び下面の3面を検査したのち、該検査済みチップを水平ローター1aの凹部3aから垂直ローター1bの凹部3bに乗り換えて搬送して、該垂直ローター1bの凹部3bに相対した上方、左方、及び右方の位置に備えたカメラ(4)a、(5)a、(6)aでチップtの後面、右面、及び左面を検査して、チップtの6面を検査したのち、検査結果によってチップtを良品と不良品に分別するようにしたものである。
【0004】
【従来技術の課題】
上記の従来装置には下記のような課題があり、その有効な解決が希求されていた。
イ、精密で高価なローターを2個必要とするためコスト高である。
ロ、2個のローターを設置するため設置スペースを要し、装置が大形となる。
ハ、高速間欠回転(毎分1000〜2000ステップ)する2個のローターのタイミングの設定が難しく、チップの乗り換え時にトラブルを発生しやすい。
ニ、2個のローターで搬送して、ようやくチップの6面を検査し、良、不良分別を行うものであるため、検査スピード、分別スピードが遅く、高速処理化を阻害している。
【0005】
【本発明が解決した課題】
そこで、本発明は、1個のローター上でチップの6面検査をできるようにした、チップの6面検査装置を開発して、上記従来の課題を解決したものである。
【0006】
即ち、本発明は、ローターの凹部周辺に3台宛6台のカメラを備え、当初3台のカメラでチップの3面を検査し、検査済みチップを凹部からU形シュートを通過させてチップの前、後面の転換及び上、下、左、右面の90°回転をして凹部へ戻し、その姿勢転換したチップの3面を3台のカメラで検査して、もって、チップの6面を同一ローター上で検査できるようにした装置を提供して従来の課題を解決したものである。
【0007】
【課題を解決する手段】
本発明は、フィダー等で搬送してくるチップを、高速間欠回転する円板の円周部にチップ装填用の凹部を形成したローターの各凹部に1個宛分離装填して搬送するように備え、該ローターの凹部に相対した前方、上方、及び下方の位置に検査用のカメラ(1)、(2)、(3)を備え、
【0008】
上記凹部より後位の凹部に相対した前方位置にチップを通すシュート孔の導入口を開口し、該凹部より後位の凹部に相対した前方位置に排出口を開口したパイプ状のU形シュートを備え、
【0009】
該U形シュートはシュート孔をU形に形成すると共に導入口から排出口の中間で90°捻じって形成してチップが導入口から排出口に至る間にその前、後面を180°反転すると共に上、下、左、右面を90°回転するように備え、
【0010】
U形シュートの後位の凹部に相対した前方、上方、及び下方の位置に検査用のカメラ(4)、(5)、(6)を備えたものであり、
【0011】
ローターの間欠回転で各凹部に装填したチップを搬送する過程で、カメラ(1)でチップの前面、カメラ(2)で上面、カメラ(3)で下面をそれぞれ検査し、3面検査済みのチップを凹部からU形シュートを通過して前、後面を反転すると共に、上、下、左、右面を90°回転して凹部へ戻し、カメラ(4)で該チップの後面、カメラ(5)で左面、カメラ(6)で右面を検査することにより、チップの6面を検査するようにしたことを特徴とする、チップの6面検査装置によって課題を解決したものである。
【0012】
【実施例】
本発明の実施例を説明する。(図1〜図6参照)
フィダー2等で搬送してくるチップtを、高速間欠回転する円板の円周部にチップ装填用の凹部3を形成したローター1の各凹部3に1個宛分離装填して搬送するように備え、該ローター1の凹部3に相対した前方、上方、及び下方の位置に検査用のカメラ(1)、(2)、(3)を備え、
【0013】
上記凹部3より後位の凹部3に相対した前方位置にチップtを通すシュート孔4aの導入口4bを開口し、該凹部より後位の凹部に相対した前方位置に排出口4cを開口したパイプ状のU形シュート4を備え、
【0014】
該U形シュート4はシュート孔4a(孔の横断面形状をチップの横断面形状に見合った方形若しくは長方形に形成。)をU形に形成すると共に導入口4bから排出口4cの中間で90°捻じって形成して、チップtが導入口4bから排出口4cに至る間にその前、後面を180°反転すると共に上、下、左、右面を90°回転するように備え、
【0015】
U形シュート4の後位の凹部3に相対した前方、上方、及び下方の位置に検査用のカメラ(4)、(5)、(6)を備えたものであり、
【0016】
ローター1の間欠回転で各凹部3に装填したチップtを搬送する過程で、カメラ(1)でチップtの前面、カメラ(2)で上面、カメラ(3)で下面をそれぞれ検査し、3面検査済みのチップtを凹部3からU形シュート4を通過して前、後面を反転すると共に、上、下、左、右面を90°回転して凹部3へ戻し、カメラ(4)で該チップtの後面、カメラ(5)で左面、カメラ(6)で右面を検査することにより、チップtの6面を検査するようにした、チップの6面検査装置である。
【0017】
上記実施例装置の態様をより詳細に説明すると、例えば、ローター1の各凹部3に、吸気溝5に連通した吸気孔6を配設して、各凹部3に装填したチップtを吸着保持するように備え、
【0018】
また、下方位置に備えたカメラ(3)または(6)に相対した凹部3の上面に吸気口7をあけてチップtを吸着保持するように備えると共に、該凹部3の下面のベース8にチップtの下面、右面をカメラ(3)または(6)で検査するための窓9をあけて備え、
【0019】
U形シュート4の導入口4bに相対した位置の凹部3に噴気口10を備えて、凹部3のチップtを噴気口10の噴気力で導入口4bへ吹き込むと共に、搬出口4cに相対した凹部3の吸気孔6の吸気力と共働してU形シュート4内のチップtを移送し凹部3に戻し装填するように備えたものである。
【0020】
【作用】
図示実施例につき作用を説明すると、フィダー等2からローター1の各凹部3へチップtを1個宛分離装填して高速ステップ搬送し、凹部3の前方位置のカメラ(1)で凹部3のチップtの前面を検査し、次のステップで上方位置のカメラ(2)で上面を検査し、次のステップで下方位置のカメラ(3)で下面を検査する。
【0021】
下面検査のとき、吸気口7がチップtを上方に吸着保持すると共に、カメラ(3)の検査は下面の窓9を通して行う。
【0022】
上記3面検査済みのチップtの凹部3がU形シュート4の導入口4bに相対すると同時に噴気口10の噴気力で凹部3のチップtが導入口4bに吹き込まれ、同時に排出口4cに相対した凹部3の吸気孔6の吸気力が共働して、チップtは排出口4cへ移送され、その間にチップtの前、後面を180°転換すると共に、上、下、左、右面を90°回転した姿勢となって凹部3へ戻される。
【0023】
続くステップで凹部3の前方位置のカメラ(4)で再装填されたチップtの後面を検査し、次のステップで上方位置のカメラ(5)で左面を検査し、次のステップで下方位置のカメラ(6)で右面を検査する。
【0024】
右面検査のとき、前記の下面検査と同様に、吸気口7がチップtを上方に吸着保持すると共に、カメラ(6)の検査は下面の窓9を通して行う。
【0025】
上記で6面検査を終了したチップtは、その後のステップ搬送の途中で、6面検査結果による良品チップと不良品チップの分別に従って、不良品チップをローター外へ排除し、良品チップをローター外へ取り出し収納するものである。
【0026】
【効果】
1個のローターの円周部上でチップの6面検査を行うことができるので、ローターが1個だけで済んで、コストが安く、設置スペースが小さく、検査分別スピードが早い、極めて高効率の装置を提供し得る。
【図面の簡単な説明】
【図1】本発明の実施例装置の構成概略を示す平面図。
【図2】チップの6面(前、後、上、下、左、右面)を示す斜視図。
【図3】図2のチップをU形シュートを通過して、前、後面を180°転換し、上、下、左、右面を90°回転した状態の斜視図。
【図4】カメラ(1)でチップの前面、カメラ(4)で後面を検査する状態を示す一部拡大断面図。
【図5】カメラ(2)でチップの上面、カメラ(5)で左面を検査する状態を示す一部拡大断面図。
【図6】カメラ(3)でチップの下面、カメラ(6)で右面を検査する状態を示す一部拡大断面図。
【図7】従来装置の斜視図。
【符号の説明】
t チップ
1 ローター
2 フィダー等
3 凹部
4 U形シュート
4a シュート孔
4b 導入口
4c 排出口
5 吸気溝
6 吸気孔
7 吸気口
8 ベース
9 窓
10 噴気口
[0001]
BACKGROUND OF THE INVENTION
In the manufacturing process of a hexahedral chip among various chips (various small electronic components such as capacitors, resistors, etc.), the present invention has six surfaces (front, back, top, bottom, left and right surfaces). ) With a CCD camera or other chip inspection camera to inspect the external shape, scratches, defects, dirt, and other defects on each side of the chip, and separate the chips into non-defective products. This relates to a six-surface inspection apparatus for chips.
[0002]
[Prior art]
Conventionally, it has been widely practiced to visually inspect defects such as scratches, defects, and dirt on the chip to separate the chips into non-defective products and defective products. First, only one surface (upper surface) and then two surfaces (upper surface and Although the inspection of the lower surface has been performed, visual inspection becomes difficult as the miniaturization of the chip (for example, the 0603 type is 0.6 mm in length and 0.3 mm in width) progresses, and the final product (for example, television) From the seriousness of troubles caused by the chip after becoming a video, etc., improvement of the inspection accuracy of the chip has been demanded. Recently, four or six surfaces of the chip are used by using a camera. The entire surface is inspected.
[0003]
However, the conventional six-surface inspection apparatus for chips using a camera, for example, as shown in FIG. 7, loads a chip t from the feeder 2a into the concave portion 3a of the circumferential portion and conveys it to one side. A vertical rotor 1b is installed by vertically intersecting the circumferential recesses 3a and 3b, and a camera (1) provided at the front, upper, and lower positions opposite the circumferential recess 3a of the horizontal rotor 1a. After inspecting the front surface, the upper surface, and the lower surface of the chip t with a, (2) a, and (3) a, transfer the inspected chip from the concave portion 3a of the horizontal rotor 1a to the concave portion 3b of the vertical rotor 1b. The cameras (4) a, (5) a, (6) a provided at the upper, left, and right positions relative to the concave portion 3b of the vertical rotor 1b, After inspecting the left surface and inspecting the six surfaces of the chip t, The flop t is obtained so as to separation into non-defective products and defective products.
[0004]
[Prior art issues]
The above-described conventional apparatus has the following problems, and an effective solution has been demanded.
(B) The cost is high because two precision and expensive rotors are required.
(2) Installation space is required to install two rotors, and the apparatus becomes large.
C) It is difficult to set the timing of two rotors that rotate at high speed intermittent rotation (1000 to 2000 steps per minute), and troubles are likely to occur when changing chips.
(D) Since it is transported by two rotors and finally inspects the six surfaces of the chip and performs good / bad separation, the inspection speed and the separation speed are slow, which hinders high-speed processing.
[0005]
[Problems solved by the present invention]
Therefore, the present invention solves the above-described conventional problems by developing a chip six-surface inspection apparatus that can perform six-surface inspection of a chip on one rotor.
[0006]
That is, the present invention is provided with six cameras for three around the concave portion of the rotor, initially inspecting three surfaces of the chip with the three cameras, and passing the U-shaped chute from the concave portion through the U-shaped chute. Turn the front, back, and rotate the top, bottom, left, and right 90 ° and return to the recess, inspect the three sides of the tip with the three cameras, and the six sides of the tip are the same An apparatus capable of being inspected on a rotor is provided to solve a conventional problem.
[0007]
[Means for solving the problems]
The present invention is equipped with a chip conveyed by a feeder or the like so as to be separated and loaded one by one into each concave part of a rotor in which a concave part for chip loading is formed in the circumferential part of a disk that rotates intermittently at high speed. The inspection camera (1), (2), (3) at the front, upper, and lower positions relative to the recess of the rotor,
[0008]
A pipe-shaped U-shaped chute having a chute hole introduction port through which a chip is passed at a front position relative to the rear concave portion from the concave portion and a discharge port opened at a front position opposite to the rear concave portion from the concave portion. Prepared,
[0009]
The U-shaped chute is formed with a U-shaped chute hole and twisted by 90 ° between the inlet and outlet, and the front and rear surfaces are inverted by 180 ° before the tip reaches the outlet. With the top, bottom, left and right sides rotated 90 degrees,
[0010]
Cameras for inspection (4), (5), (6) are provided at front, upper, and lower positions relative to the rear concave portion of the U-shaped chute,
[0011]
In the process of transporting the chips loaded in each recess by intermittent rotation of the rotor, the camera (1) inspects the front surface of the chip, the camera (2) the upper surface, the camera (3) the lower surface, and the three-surface inspected chip Pass the U-shaped chute from the recess and reverse the front and rear surfaces, rotate the top, bottom, left and right surfaces by 90 ° and return them to the recess. The present invention solves the problem by a six-surface inspection device for a chip, wherein the six surfaces of the chip are inspected by inspecting the left surface and the right surface with a camera (6).
[0012]
【Example】
Examples of the present invention will be described. (See FIGS. 1-6)
The chip t conveyed by the feeder 2 or the like is conveyed by being separately loaded into each concave portion 3 of the rotor 1 in which the concave portion 3 for chip loading is formed in the circumferential portion of the disk that rotates intermittently at high speed. Provided with inspection cameras (1), (2), (3) at front, upper and lower positions relative to the recess 3 of the rotor 1,
[0013]
A pipe in which an introduction port 4b of a chute hole 4a through which the chip t is passed is opened at a front position opposite to the rear recess 3 from the recess 3, and a discharge port 4c is opened at a front position opposite to the rear recess from the recess. With a U-shaped chute 4
[0014]
The U-shaped chute 4 is formed with a U-shaped chute hole 4a (the cross-sectional shape of the hole is a square or a rectangle corresponding to the cross-sectional shape of the chip) and 90 ° between the inlet 4b and the outlet 4c. Twist and form the tip t from the introduction port 4b to the discharge port 4c, the front and rear surfaces are inverted 180 ° and the upper, lower, left and right surfaces are rotated 90 °,
[0015]
Cameras (4), (5), (6) for inspection are provided at front, upper, and lower positions relative to the rear recess 3 of the U-shaped chute 4;
[0016]
In the process of transporting the chip t loaded in each recess 3 by intermittent rotation of the rotor 1, the front surface of the chip t with the camera (1), the upper surface with the camera (2), and the lower surface with the camera (3) are inspected. The inspected chip t passes through the U-shaped chute 4 from the recess 3 and the front and rear surfaces are reversed, and the upper, lower, left, and right surfaces are rotated by 90 ° and returned to the recess 3, and the chip (4) is used to This is a six-surface inspection device for chips, in which six surfaces of the chip t are inspected by inspecting the rear surface of t, the left surface with the camera (5), and the right surface with the camera (6).
[0017]
The aspect of the above-described embodiment apparatus will be described in more detail. For example, the intake holes 6 communicating with the intake grooves 5 are provided in the respective recesses 3 of the rotor 1 to suck and hold the chips t loaded in the respective recesses 3. So that
[0018]
In addition, an air inlet 7 is opened in the upper surface of the recess 3 facing the camera (3) or (6) provided in the lower position so as to suck and hold the chip t, and the chip is mounted on the base 8 on the lower surface of the recess 3. t is provided with a window 9 for inspecting the lower and right surfaces of t with the camera (3) or (6),
[0019]
A recess 3 at a position opposite to the inlet 4b of the U-shaped chute 4 is provided with an injection port 10, and the tip t of the recess 3 is blown into the inlet 4b by the injection force of the outlet 10 and a recess opposite to the carry-out port 4c. The tip t in the U-shaped chute 4 is transferred in cooperation with the suction force of the third suction hole 6 and is loaded back into the recess 3.
[0020]
[Action]
The operation of the illustrated embodiment will be described below. One chip t is separately loaded from the feeder 2 or the like into each recess 3 of the rotor 1 and conveyed at high speed, and the chip in the recess 3 is moved by the camera (1) in front of the recess 3. The front surface of t is inspected, and in the next step, the upper surface is inspected with the camera (2) in the upper position, and in the next step, the lower surface is inspected with the camera (3) in the lower position.
[0021]
In the lower surface inspection, the air inlet 7 sucks and holds the chip t upward, and the inspection of the camera (3) is performed through the window 9 on the lower surface.
[0022]
The recess 3 of the tip t that has undergone the three-surface inspection is opposed to the introduction port 4b of the U-shaped chute 4, and at the same time, the tip t of the recess 3 is blown into the introduction port 4b by the blowing force of the blowing port 10, and at the same time relative to the discharge port 4c The suction force of the suction hole 6 of the recessed portion 3 cooperates and the tip t is transferred to the discharge port 4c. During this time, the front and rear surfaces of the tip t are turned 180 °, and the upper, lower, left and right sides are turned 90 °. A rotated posture is returned to the recess 3.
[0023]
In the next step, the rear surface of the chip t reloaded by the camera (4) in the front position of the recess 3 is inspected. In the next step, the left surface is inspected by the upper camera (5). Inspect the right side with the camera (6).
[0024]
In the right side inspection, similarly to the lower surface inspection, the air inlet 7 sucks and holds the chip t upward, and the camera (6) is inspected through the window 9 on the lower surface.
[0025]
The chip t that has been subjected to the six-surface inspection in the above-described manner is excluded from the rotor in accordance with the classification of the non-defective chip and the defective chip according to the six-surface inspection result during the subsequent step conveyance, and the non-defective chip is removed from the rotor. Take out and store.
[0026]
【effect】
6-side inspection of the chip can be performed on the circumference of one rotor, so only one rotor is required, the cost is low, the installation space is small, the inspection separation speed is fast, and extremely high efficiency An apparatus may be provided.
[Brief description of the drawings]
FIG. 1 is a plan view showing a schematic configuration of an apparatus according to an embodiment of the present invention.
FIG. 2 is a perspective view showing six surfaces (front, back, top, bottom, left, right) of the chip.
FIG. 3 is a perspective view showing a state in which the front and rear surfaces of the chip of FIG. 2 are turned by 180 ° and the upper, lower, left, and right surfaces are rotated by 90 °.
FIG. 4 is a partially enlarged cross-sectional view showing a state in which the front surface of the chip is inspected with the camera (1) and the rear surface is inspected with the camera (4).
FIG. 5 is a partially enlarged cross-sectional view showing a state in which the upper surface of the chip is inspected with the camera (2) and the left surface is inspected with the camera (5).
6 is a partially enlarged cross-sectional view showing a state in which the lower surface of the chip is inspected with the camera (3) and the right surface is inspected with the camera (6). FIG.
FIG. 7 is a perspective view of a conventional device.
[Explanation of symbols]
t Chip 1 Rotor 2 Feeder 3 Recess 4 U-shaped chute 4a Chute hole 4b Inlet 4c Discharge port 5 Intake groove 6 Intake hole 7 Intake port 8 Base 9 Window 10 Fumarole

Claims (3)

フィダー等で搬送してくるチップを、高速間欠回転する円板の円周部にチップ装填用の凹部を形成したローターの各凹部に1個宛分離装填して搬送するように備え、該ローターの凹部に相対した前方、上方、及び下方の位置に検査用のカメラ(1)、(2)、(3)を備え、
上記凹部より後位の凹部に相対した前方位置にチップを通すシュート孔の導入口を開口し、該凹部より後位の凹部に相対した前方位置に排出口を開口したパイプ状のU形シュートを備え、
該U形シュートはシュート孔をU形に形成すると共に導入口から排出口の中間で90°捻じって形成してチップが導入口から排出口に至る間にその前、後面を180°反転すると共に上、下、左、右面を90°回転するように備え、
U形シュートの後位の凹部に相対した前方、上方、及び下方の位置に検査用のカメラ(4)、(5)、(6)を備えたものであり、
ローターの間欠回転で各凹部に装填したチップを搬送する過程で、カメラ(1)でチップの前面、カメラ(2)で上面、カメラ(3)で下面をそれぞれ検査し、3面検査済みのチップを凹部からU形シュートを通過して前、後面を反転すると共に、上、下、左、右面を90°回転して凹部へ戻し、カメラ(4)で該チップの後面、カメラ(5)で左面、カメラ(6)で右面を検査することにより、チップの6面を検査するようにしたことを特徴とする、
チップの6面検査装置。
Chips transported by a feeder or the like are prepared so as to be separately loaded and transported to each recess of a rotor in which a recess for chip loading is formed on the circumferential portion of a disk that rotates intermittently at high speed. Cameras for inspection (1), (2), (3) are provided at front, upper, and lower positions relative to the recess,
A pipe-shaped U-shaped chute having a chute hole introduction port through which a chip is passed at a front position relative to the rear concave portion from the concave portion and a discharge port opened at a front position opposite to the rear concave portion from the concave portion. Prepared,
The U-shaped chute is formed with a U-shaped chute hole and twisted by 90 ° between the inlet and outlet, and the front and rear surfaces are inverted by 180 ° before the tip reaches the outlet. With the top, bottom, left and right sides rotated 90 degrees,
Cameras for inspection (4), (5), (6) are provided at front, upper, and lower positions relative to the rear concave portion of the U-shaped chute,
In the process of transporting the chips loaded in each recess by intermittent rotation of the rotor, the camera (1) inspects the front surface of the chip, the camera (2) the upper surface, the camera (3) the lower surface, and the three-surface inspected chip Pass the U-shaped chute from the recess and reverse the front and rear surfaces, rotate the top, bottom, left and right surfaces by 90 ° and return them to the recess. The left side is inspected on the right side with the camera (6), so that 6 sides of the chip are inspected.
6-side inspection device for chips.
ローターの各凹部に、吸気溝に連通した吸気孔を配設して、各凹部に装填したチップを吸着保持するように備え、
また、下方位置に備えたカメラに相対した凹部の上面に吸気口をあけてチップを吸着保持するように備えると共に、該凹部の下面のベース板にチップの下面、右面をカメラで検査するための窓をあけた、
請求項1のチップの6面検査装置。
In each recess of the rotor, an intake hole communicating with the intake groove is arranged, and the chip loaded in each recess is prepared to be sucked and held,
In addition, an air inlet is opened in the upper surface of the concave portion facing the camera provided in the lower position so that the chip is sucked and held, and the lower surface and right surface of the chip are inspected by the camera on the base plate on the lower surface of the concave portion. Opened the window,
6. A six-surface inspection apparatus for chips according to claim 1.
U形シュートの導入口に相対した位置の凹部に噴気口を備えて、凹部のチップを噴気口の噴気力で導入口へ吹き込むと共に、搬出口に相対した凹部の吸気孔の吸気力と共働してU形シュート内のチップを移送し凹部に戻し装填するように備えた、
請求項1のチップの6面検査装置。
A concave portion at a position opposite to the inlet of the U-shaped chute is provided with a jet port, and the tip of the concave portion is blown into the inlet by the jet force of the jet port, and cooperates with the suction force of the inlet hole of the concave portion opposite to the carry-out port. The tip in the U-shaped chute is transported and loaded back into the recess.
6. A six-surface inspection apparatus for chips according to claim 1.
JP11015598A 1998-04-06 1998-04-06 6-side inspection system for chips Expired - Lifetime JP4007526B2 (en)

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