JP5896459B2 - Marking apparatus and method - Google Patents

Description

  The present invention relates to an apparatus and method for marking an identification code or an arbitrary pattern on a marking object such as a display material or a semiconductor device, and more particularly to a technique for marking a marking object that is continuously conveyed.

  Display materials such as TVs, PCs, and mobile devices, and semiconductor devices are marked with identification codes such as serial numbers and production lot information for use in production management and post-shipment traceability. Has been. In addition, an arbitrary pattern such as a logo, a mark, a model, and a product number is marked in order to easily distinguish the manufacturer and the product. These identification codes and arbitrary patterns are called drawing patterns, and are marked at positions where a plurality of drawing patterns are arranged in a matrix.

  The drawing pattern to be marked on the marking object is marked using a marking device, and is marked with the marking object stationary (for example, Patent Document 1).

FIG. 11 is a side view showing a state of marking in the prior art, and shows a state in which predetermined drawing patterns 15a and 15b are marked at two places on the marking object using a marking device in the prior art. .
The conventional marking device 1z includes a mounting table 20z that holds the marking object 10z in a stationary state, and a marking unit 4 that irradiates the marking light beam 47 corresponding to the drawing pattern toward the marking object 10z. Has been.

  The marking unit 4 is configured to be movable in the direction (y direction) indicated by the arrow 40y while maintaining a predetermined distance from the marking object 10z in the z direction. Further, the marking unit 4 includes a drawing pattern generation unit 40 and a marking position correction unit 45. The light beam 42 corresponding to the drawing pattern emitted from the drawing pattern generation unit 40 is incident on the optical component 43. After passing through the optical component 43, the light beam 44 corresponding to the drawing pattern is irradiated onto the mirror 45m of the marking position correction unit 45, and the light reflected by the mirror 45m passes through the optical component such as the fθ lens 46, thereby marking light. 47 is irradiated toward the marking object 10z. The marking position correction unit 45 can rotate the mirror 45m in the θ direction, and can change the irradiation direction of the marking light beam 47.

  The marking unit 4 is connected to an external control device, and controls the marking position correction unit 45 while moving the marking unit 4 in the direction indicated by the arrow 40y (y direction), so that the marking unit 4 is on the marking object 10z. The marking light beam 47 can be continuously applied to a predetermined place for a predetermined time.

  To explain in time series, the mirror 45 moves from the broken line 45m1 to the position shown by the broken line 45m2 while the marking unit 4 moves from the broken line 40t1 to the position shown by the broken line 40t2 from the past time t1 to time t2. At this time, the marking light beam 47 is irradiated while changing from the broken line 47t1 to the position / direction shown by the broken line 47t2. Therefore, a predetermined drawing pattern 15a is marked on the marking object 10z.

Further, from the past time t3 to the present time, the mirror 45 moves from the position indicated by the broken line 45m3 to the current position while the marking unit 4 moves from the position indicated by the broken line 40t3 to the current position indicated by the solid line. At this time, the marking light beam 47 is irradiated while changing from the position / direction indicated by the broken line 47t3 to the current position / direction indicated by the solid line. Therefore, a predetermined drawing pattern 15b is marked on the marking object 10z.
Therefore, predetermined drawing patterns 15a and 15b can be marked at two places on the marking object 10z.

JP 2006-259515 A

  However, when marking is performed in a state where the marking target object 10z is stationary, the marking target object 10z needs to be replaced or intermittently conveyed, and productivity cannot be increased. In order to increase the productivity, if a predetermined drawing pattern is marked using a conventional technique while the marking object 10z is continuously conveyed, “positional deviation” and “blurring” described below occur. There was a problem.

  FIG. 12 is a plan view showing a state of marking in the prior art, and a drawing pattern 16a when marking is performed while moving the marking object 10z in a direction crossing the moving direction of the marking unit 4 (that is, the x direction). , 16b marking positions are shown. The marking object 10z has moved in the direction indicated by the arrow 10v (x direction) until the current time t1, t2, t3 has passed, and the position on the marking object is indicated by broken lines 10e1, 10e2. , 10e3, and is currently at the position indicated by the solid line 10e. Since the marking unit 4 can change the irradiation position / direction of the marking light beam in the y direction while moving in the y direction, a predetermined drawing pattern 16a for marking from the past time t1 to t2 or a past time There is no “blurring” due to the relative movement speed in the y direction of the predetermined drawing pattern 16b to be marked from t3 to the present.

  On the other hand, the marking patterns 16a and 16b to be marked are marked with the marking object being conveyed in a direction (that is, the x direction) that intersects the direction in which the marking unit 4 moves (that is, the y direction). “Position misalignment” occurs in the transport direction (x direction), in which a pattern cannot be marked at a prescribed position in a state where the pattern is arranged in a matrix.

  Furthermore, since the marking object 10z moves relative to the marking unit relative to the marking unit in the drawing patterns 16a and 16b to be marked, “blurring” due to the relative movement speed in the conveyance direction (x direction) occurs. End up.

  That is, the predetermined drawing pattern 16a to be marked from the past time t1 to t2 changes from the position indicated by the broken line 16c1 to the position indicated by the broken line 16c2 during the marking, and is caused by the relative movement speed in the transport direction (x direction). “Blur” occurs. Similarly, the predetermined drawing pattern 16b marked from the past time t3 to the present changes from the position indicated by the broken line 16c3 to the position indicated by the solid line 16c4 during the marking, and “blurring” due to the relative movement speed in the transport direction. Will occur.

  In addition, since the drawing patterns 16a and 16b have different marking start position times, “position shift” occurs in the transport direction (x direction).

  Accordingly, the present invention can continuously mark a predetermined drawing pattern without any “positional deviation” or “blurring” even for a marking object that is continuously conveyed, thereby increasing productivity. It is an object to provide a marking device and method that can be used.

In order to solve the above problems, the invention described in claim 1
In a marking device that marks a drawing pattern on a marking object,
A transport unit for continuously transporting the marking object in a first direction;
A transport amount detector for detecting an amount of transport of the marking object in the first direction;
A marking unit that irradiates a marking beam corresponding to the drawing pattern toward the marking object;
A marking unit first moving part for moving the marking unit in the first direction;
Synchronous movement in which the marking unit first moving unit is moved in the same direction as the first direction based on the amount of the marking object conveyed per unit time detected by the conveyance amount detector. A control unit,
A marking unit second moving section for moving the marking unit in a second direction intersecting the first direction;
A position detector for detecting the position of the marking unit in the second direction;
A marking position correction unit that corrects the marking beam to be irradiated at the same position on the marking object by changing the position where the marking beam is irradiated, and
While the marking unit is moving in the second direction,
Based on the position of the marking unit in the second direction detected by the position detector,
By controlling the amount of shift in the marking position correction unit, the same position in the second direction on the marking object is irradiated with the marking light beam for a predetermined time,
It has a marking position superposition control unit,
Control the marking position overlay control unit and the synchronous movement control unit,
While continuously conveying the marking object in the first direction,
The marking apparatus includes an overall control unit that irradiates the marking light beam for a predetermined time at the same position in the first direction and the second direction on the marking object.

The invention described in claim 2
The marking object is provided with a positioning reference mark,
A drawing planned position registration unit that registers a relative position of a drawing pattern to be marked with respect to the position of the positioning reference mark as a marking planned position;
A mark imaging unit that images the positioning reference mark; and a mark position detection unit that detects position information of the positioning reference mark imaged by the mark imaging unit;
The overall control unit includes the marking position overlay control unit and the synchronous movement based on an interval between the mark imaging unit and the marking unit and position information of a positioning reference mark detected by the mark position detection unit. The marking device according to claim 1, wherein the marking device is controlled.

The invention according to claim 3
A mark angle detector that detects angle information of the positioning reference mark imaged by the mark imaging unit;
The marking unit is
A marking position shift function for irradiating the marking beam by shifting the position for irradiating the marking light beam by a predetermined amount in a predetermined direction,
The overall control unit
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected by the mark position detector,
Based on the angle information of the positioning reference mark detected by the mark angle detection unit,
The position of irradiating the marking beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control unit and the synchronous movement control unit are controlled. It is a marking device.

The invention according to claim 4
The marking object is provided with a plurality of positioning reference marks,
The mark position detector detects position information of the plurality of positioning reference marks;
An angle detection unit based on a plurality of mark positions, which detects angle information of the positioning reference mark based on position information of the plurality of positioning reference marks imaged by the mark imaging unit;
The marking unit is
The overall control unit further includes a marking position shift function for irradiating the marking light by shifting the position for irradiating the marking light beam by a predetermined amount in a predetermined direction.
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected by the mark position detector,
Based on the angle information of the positioning reference mark detected by the angle detection unit based on the plurality of mark positions,
The position of irradiating the marking beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control unit and the synchronous movement control unit are controlled. It is a marking device.

The invention described in claim 5
A transport speed calculation unit for calculating the transport speed of the transport unit;
In the planned drawing position registration unit,
Among the planned marking positions registered in the plurality of arrays,
A feed pitch registration unit for registering an interval for repeatedly marking in the direction of the first direction as a feed pitch;
A both-end drawing pattern interval registration unit that registers the interval between the first drawing pattern and the last drawing pattern that are sequentially marked in the second direction as the both-end drawing pattern interval;
The transport speed calculator is
The feed pitch, the both-end drawing pattern interval,
Time required for sequential marking in the marking unit second moving unit;
Based on the time required for repeated marking in the marking unit first moving unit, and calculating the allowable value of the conveyance speed of the conveyance unit,
The overall control unit
5. The marking device according to claim 2, further comprising a function of setting the calculated allowable value of the conveyance speed as a conveyance speed of the conveyance unit and performing repetitive marking.

The invention described in claim 6
In a marking method for marking a drawing pattern on a marking object,
A conveying step for continuously conveying the marking object in a first direction;
A conveyance amount detection step for detecting an amount of conveyance of the marking object in the first direction;
Using a marking unit that irradiates a marking beam corresponding to the drawing pattern toward the marking object,
A marking unit first moving step for moving the marking unit in the first direction;
Synchronous movement that moves the same amount in the same direction as the first direction in the marking unit first movement step based on the amount of the marking object conveyed per unit time detected in the conveyance amount detection step And a marking unit second moving step for moving the marking unit in a second direction intersecting the first direction,
A position detecting step for detecting a position in the second direction of the marking unit;
A marking position correcting step for changing the position for irradiating the marking light beam to correct the marking light beam to be irradiated at the same position on the marking object,
While the marking unit is moving in the second direction,
Based on the position in the second direction of the marking unit detected in the position detection step, the shift amount in the marking position correction step is controlled, and the same position in the second direction on the marking object is Irradiate the marking beam for a predetermined time,
A marking position overlay control step,
Centrally controlling the marking position overlay control step and the synchronous movement control step,
While the marking object is continuously conveyed in the first direction,
The marking method is characterized in that the same position in the first direction and the second direction on the marking object is irradiated with the marking light beam for a predetermined time.

The invention described in claim 7
The marking object is provided with a positioning reference mark,
A drawing planned position registration step of registering a relative position of a drawing pattern to be marked with respect to the position of the positioning reference mark as a marking planned position;
A mark imaging step of imaging the positioning reference mark;
A mark position detecting step for detecting position information of the positioning reference mark imaged in the mark imaging step,
The marking position overlay control step and the synchronous movement control based on the interval between the mark imaging unit and the marking unit used in the mark imaging step and the position information of the positioning reference mark detected in the mark position detection step The marking method according to claim 6, wherein the steps are collectively controlled.

The invention according to claim 8 provides:
A mark angle detection step of detecting angle information of the positioning reference mark imaged in the mark imaging step;
The marking unit is
A marking position shift function of irradiating the marking beam by shifting the position of irradiating the marking light beam by a predetermined amount in a predetermined direction,
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected in the mark position detecting step;
Based on the angle information of the positioning reference mark detected in the mark angle detection step,
The position for irradiating the marking light beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control step and the synchronous movement control step are comprehensively controlled. It is a marking method.

The invention according to claim 9 is:
The marking object is provided with a plurality of positioning reference marks,
In the mark position detection step, position information of the plurality of positioning reference marks is detected,
A mark angle detection step of detecting angle information of the positioning reference marks based on position information of the plurality of positioning reference marks imaged in the mark imaging step;
The marking unit is
A marking position shift function of irradiating the marking beam by shifting the position of irradiating the marking light beam by a predetermined amount in a predetermined direction,
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected in the mark position detecting step;
Based on the angle information of the positioning reference mark detected in the mark angle detection step,
The position for irradiating the marking light beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control step and the synchronous movement control step are comprehensively controlled. It is a marking method.

The invention according to claim 10 is:
A transport speed calculating step for calculating a transport speed of the transport step;
In the drawing planned position registration step,
Among the planned marking positions registered in the plurality of arrays,
A feed pitch registration step for registering an interval for repeatedly marking in the direction of the first direction as a feed pitch;
A both-end drawing pattern interval registration step for registering the interval between the first drawing pattern and the last drawing pattern sequentially marked in the second direction as the both-end drawing pattern interval;
The transport speed calculating step includes:
The feed pitch, the both-end drawing pattern interval,
The time required for sequential marking in the marking unit second movement step;
Based on the time required for repeated marking in the marking unit first movement step, the allowable value of the conveyance speed of the conveyance step is calculated,
10. The marking method according to claim 7, further comprising a function of setting the calculated allowable value of the conveyance speed as a conveyance speed of the conveyance step and performing repetitive marking.

  A predetermined drawing pattern can be continuously marked on a marking object to be continuously conveyed in a state free from “position shift” and “blur”, and productivity can be increased.

It is a perspective view which shows an example of the form which embodies this invention. It is the schematic of the apparatus used for an example of the form which embodies this invention. It is a system configuration figure showing an example of the form which embodies the present invention. It is a flowchart which shows an example of the form which embodies this invention. It is a top view which shows the example of marking in an example of the form which embodies this invention. It is a top view which shows the example of marking in another example of the form which embodies this invention. It is a top view which shows the example of marking in another example of the form which embodies this invention. It is a flowchart which shows another example of the form which embodies this invention. It is a time chart figure in another example of the form which embodies the present invention. It is a perspective view which shows an example of another form which embodies this invention. It is a side view which shows the mode of marking in a prior art. It is a top view which shows the mode of marking in a prior art.

DESCRIPTION OF EMBODIMENTS Embodiments for carrying out the present invention will be described with reference to the drawings. In the following description, a sheet-like continuous body will be described as an example of the marking object 10.
The three axes of the orthogonal coordinate system in each figure are X, Y, and Z, the XY plane is the horizontal plane, and the Z direction is the vertical direction. In particular, in the Z direction, the direction of the arrow is represented as the top, and the opposite direction is represented as the bottom.

FIG. 1 is a perspective view showing an example of a form embodying the present invention.
The marking device 1 according to the present invention includes a transport unit 2, a transport amount detector 22, a marking unit 4, a marking unit first moving unit 5, a marking unit second moving unit 6, and a control unit 9. It is configured.

The transport unit 2 continuously transports the marking target object 10 in the first direction indicated by the arrow 10v at the transport speed VS while keeping the marking target region 10 horizontal. In the present description, the first direction indicated by the arrow 10v and the orthogonal coordinate system x direction in the figure are made to coincide.
Specifically, a cylindrical roller 21 having a predetermined length in the y direction, which is attached to a housing frame 11 (indicated by a dotted line in the drawing) of the marking device 1, and a cylindrical roller 21 are rotated. The motor 21m can be appropriately arranged and configured.

The carry amount detector 22 detects the amount carried by the marking object 10 in the first direction (that is, the x direction) indicated by the arrow 10v, and constitutes the carry amount detector in the present invention.
Specifically, the conveyance amount detector 22 can be exemplified by a cylindrical roller 21 or a motor 21m provided with a rotary encoder, an FV counter, or the like. The conveyance amount detector 22 can be configured using one that outputs a pulse signal corresponding to the amount conveyed by the marking object 10 or one that outputs a voltage signal proportional to the conveyance speed per unit time.
Alternatively, the conveyance amount detector 22 may be a laser length measuring device or the like that detects the amount of conveyance by detecting the position of the unevenness or end face provided on the marking object 10.

  As will be described in detail later, the marking unit 4 irradiates the marking object 10 with a marking beam corresponding to a predetermined drawing pattern.

The marking unit first moving unit 5 moves the marking unit 4 in the first direction. In the present description, the first direction and the orthogonal coordinate system x direction in the figure are matched.
Specifically, the marking unit first moving unit 5 can be configured to include an X-axis slider unit 50. The X-axis slider unit 50 can be configured using a rail that is parallel to the surface of the marking object 10 and extends in the x direction, and an X-axis slider 51 that is movably attached on the rail. The X-axis slider 51 can move on the rail at a predetermined speed or can rest at a predetermined position on the rail based on a control signal from the outside. Further, the marking unit 4 is attached to the X-axis slider 51.

The marking unit second moving unit 6 moves the marking unit 4 in a second direction (direction indicated by the arrow 40y) intersecting the first direction. In the present description, the second direction and the orthogonal coordinate system y direction in the figure are matched.
Specifically, the marking unit second moving unit 6 includes a pair of support columns 12 arranged on the housing frame 11 and a Y-axis slider unit 60 attached on the support columns 12. Can do. The Y-axis slider unit 60 can be configured using a rail that is parallel to the surface of the marking object 10 and extends in the y direction, and a Y-axis slider 61 that is movably attached on the rail. The Y-axis slider 61 can move on the rail at a predetermined speed or can rest at a predetermined position on the rail based on a control signal from the outside. Further, an X-axis slider unit 50 is attached to the Y-axis slider 61.

  As will be described in detail later, the control unit 9 controls the above-described devices to mark a drawing code at a predetermined position on the marking object 10.

Therefore, the marking unit 4 moves or stops independently in the x direction and the y direction based on the control signal from the control unit 9 while keeping a predetermined distance from the marking object 10 in the z direction. Can be.
Furthermore, the marking device 1 includes a position detector 62 that detects the position of the marking unit 4 in the second direction. Specifically, the position detector 62 can be configured by a linear encoder incorporated in the Y-axis slider unit 60, and outputs a signal corresponding to the position and amount of movement of the Y-axis slider 61 in the y direction to an external device. The thing of the form to do can be illustrated.

[Details of marking unit]
FIG. 2 is a schematic diagram of a device used in an example of a form embodying the present invention, and is a diagram showing a device layout inside the marking unit 4.
The marking unit 4 includes a drawing pattern generation unit 40 and a marking position correction unit 45.

  The drawing pattern generation unit 40 includes a light source 40a and a pattern display 40m. Further, a reflection mirror 40c, a beam expander 40e, and a relay lens 43a are arranged as necessary. The laser beam 40b emitted from the light source 40a is reflected by the reflection mirror 40c, and after passing through the beam expander 40e, becomes a laser beam 40f with an expanded beam width. The laser beam 40f with the expanded beam width is irradiated onto the pattern display 40m. The beam 42a selectively reflected by the surface of the pattern display 40m passes through the relay lens 43a, and is irradiated from the drawing pattern generation unit 40 as a light beam 42 corresponding to the drawing pattern.

  The light beam 42 corresponding to the drawing pattern is reflected by the reflection mirror 43m as necessary, passes through the relay lens 43b, and is irradiated to the mirror 45m of the marking position correction unit as the light beam 44 corresponding to the drawing pattern. A light beam 44 corresponding to the drawing pattern is applied to the mirror 45 m, passes through the fθ lens 46, and is applied to the marking object 10 as a marking light beam 47. The mirror 45m is attached to the marking position correction unit 45. By transmitting a control signal from an external device to the marking position correction unit 45, the angle of the mirror 45m is changed and the irradiation direction of the marking light beam 47 is changed. The

  The light source 40a can be configured by using a laser diode, a laser oscillator, an LED illumination, a UV lamp, and the like, and a signal is input from an external device and ON / OFF and output are controlled. The pattern display 40m can be configured using a DMD (digital micromirror device), and can input data from an external device to obtain a predetermined drawing pattern.

  The marking position correction unit 45 can be configured using a galvanometer scanner, and can adjust the angle of the mirror 45m by inputting a signal from an external device.

[System configuration]
The control unit 9 of the marking apparatus 1 includes a marking position superposition control unit 91, a synchronous movement control unit 93, and an overall control unit 95.
FIG. 3 is a system configuration diagram showing an example of a form embodying the present invention, and shows how the respective devices constituting the marking device 1 are connected.

The marking position overlay control unit 91
While the marking unit 4 is moving in the second direction,
Based on the position of the marking unit 4 detected by the transport amount detector 22 in the second direction, the shift amount in the marking position correction unit 45 is controlled, and the second direction on the marking object 10 is the same. The marking light beam 47 is irradiated for a predetermined time so as to be positioned.

Specifically, the marking position overlay control unit 91 is configured by a control computer and processing blocks in an execution program of the control computer, and embodies the following operations.
The marking position superposition control unit 91 is connected to the light source 40a, the drawing pattern display unit 40m, and the marking position correction unit 45, and controls the light source 40a and the drawing pattern display unit 40m to emit light 44 corresponding to a predetermined drawing pattern. Can be irradiated to the mirror 45m. Furthermore, the direction of the marking light beam 47 can be changed by controlling the marking position correction unit 45.

  The marking position superposition control unit 91 is further connected to the position detector 62, and inputs a signal corresponding to the position and movement amount of the marking unit 4 detected by the position detector 62 in the second direction. Further, a processing block in the execution program is configured to control the shift amount in the marking position correction unit 45 based on the signal corresponding to the position and the movement amount.

  The marking position superposition control unit 91 is connected to an integrated control unit 95, which will be described in detail later, and based on the position and movement amount of the marking unit 4 and a control command from the integrated control unit 95, the light source 40a, the drawing The pattern display 40m and the marking position correction unit 45 can be controlled.

Since the marking position overlay control unit 91 has such a configuration,
While the marking unit 4 is moving in the second direction, the position in the second direction on the marking object 10 is not changed, and the same position on the marking object 10 corresponds to a predetermined drawing pattern. The marking light beam 47 is irradiated for a predetermined time, and marking can be performed in a state in which a line of drawing pattern groups is aligned at a predetermined position.

  The synchronous movement control unit 93 is connected to the conveyance unit 2, the marking unit first movement unit 5, and the marking unit second movement unit 6, and is a marking object per unit time detected by the conveyance amount detector 22. The marking unit first moving unit 5 is moved in the same direction as the first direction by the same amount based on the amount of transported 10.

Specifically, it can be constituted by a processing block in an execution program of a programmable controller provided with a positioning control unit.
The synchronous movement control unit 93 is connected to the motor 21m of the transport unit 2, and can rotate the motor 21m at a predetermined rotational speed, stop it, or change the rotational speed.
The synchronous movement control unit 93 is connected to the transport amount detector 22 of the transport unit 2 and receives a signal output from the transport amount detector 22. If the signal output from the conveyance amount detector 22 is a pulse signal indicating the current position or movement amount, the marking object 10 is conveyed per unit time based on the count number of the pulse signal per unit time. Get the quantity.
Furthermore, the synchronous movement control unit 93 is connected to the X-axis slider 51 and outputs a control signal to the X-axis slider 51 based on the amount of the marking object 10 conveyed per unit time. The axis slider 51 can be moved in the first direction (x direction). Similarly, the synchronous movement control unit 93 is connected to the Y-axis slider 61, outputs a control signal to the Y-axis slider 61, and moves the Y-axis slider 61 in the second direction (y direction). Can do.

  The synchronous movement control unit 93 is connected to an integrated control unit 95 described later in detail, and based on the conveyance amount of the marking object 10 acquired from the conveyance amount detector 22 and the control command from the integrated control unit 95, While controlling the movement of the marking object 10 in the x direction and the movement of the X axis slider 51 in the x direction so that the movement direction and the movement amount are the same, a control signal is sent to the X axis slider 51. Output.

The overall control unit 95
While the marking position superimposing control unit 91 and the synchronous movement control unit 93 are controlled and the marking target object 10 is continuously conveyed in the first direction (x direction), the first on the marking target object is controlled. The marking light beam 47 is applied to the same position in the direction (x direction) and the second direction (y direction) for a predetermined time.
Specifically, the overall control unit 95 is configured by processing blocks in its execution program using a control computer, and is configured to perform the following processing.

  The overall control unit 95 is previously set with marking position information, the conveyance speed of the marking object 10, control parameters for the X-axis slider and Y-axis slider, and other control parameters necessary for marking. These pieces of information are output to each unit device through the marking position superposition control unit 91 and the synchronous movement control unit 93. Each unit is in a marking standby state in which a marking operation can be started based on a control command.

Based on the signal output from the transport amount detector 22, the overall control unit 95 moves the X-axis slider 51 and the Y-axis slider 61 after the marking object 10 has moved from the current position (for example, how many pulses). If the movement is started, it is calculated whether the drawing pattern group can be marked at a predetermined position on the moving marking object 10.
Then, the overall control unit 95 refers to the current position information of the marking object 10 output from the conveyance amount detector 22 based on the calculation result, and the X-axis slider 51 and the Y-axis through the synchronous movement control unit 93. While controlling the slider 61, the drawing pattern generation unit 40 and the marking position correction unit 45 of the marking unit 4 are controlled through the marking position superposition control unit 91 to perform predetermined drawing at a predetermined position on the marking object 10. Take overall control so that the pattern is marked.

  Since the marking device 1 according to the present invention has the above-described configuration, a predetermined drawing pattern can be applied to the marking object 10 that is continuously conveyed without any “positional deviation” or “blur”. Marking can be performed continuously. Further, since marking is performed while the marking object 10 is continuously conveyed, acceleration / deceleration time and stationary time required for intermittent feeding can be omitted, and productivity can be improved.

[flowchart]
FIG. 4 is a flowchart showing an example of a form embodying the present invention. A series of steps for marking a predetermined drawing pattern on the marking object 10 is shown step by step.

  First, the marking object 10 is set on the roller 21 of the transport unit 2 (s101). Next, the motor 21m is rotated to continuously convey the marking object 10 at a predetermined speed (s102). And the conveyance amount of the marking target object 10 detected from the conveyance amount detector 22 is detected (s104).

  While the marking object 10 is continuously conveyed, the marking unit 4 is moved in the first direction by using the marking unit first moving unit (s111). A series of steps from step s102 to step s111 is referred to as a synchronous movement control step (s10).

  On the other hand, the marking unit 4 is moved in the second direction using the marking unit second moving unit while the marking unit 4 is moved in the first direction while the marking object 10 is continuously conveyed (s121). . At this time, the position of the marking unit 4 in the second direction is detected from the position detector 62 (s122). Then, the angle of the mirror 45 is adjusted based on the position of the marking unit 4 in the second direction (s123). At this time, the angle of the mirror 45m is corrected so that the marking light beam 27 is irradiated to the same position on the marking object 10 by changing the position where the marking light beam 27 is irradiated. That is, the angle at which the marking light beam 27 is irradiated is changed in the direction opposite to the direction in which the marking unit 4 moves, and correction is performed so that there is no relative speed in the y direction. In this way, the marking light beam 27 is irradiated onto the marking object 10 at the same place for a predetermined time (s124).

  Then, it is determined whether or not marking has been completed for a line of drawing pattern groups (s125). If it is determined in step s125 that marking has not been completed for a line of drawing pattern groups, steps s121 to s125 are repeated. On the other hand, if it is determined in step s125 that marking has been completed for a line of drawing pattern groups, the process proceeds to the next step. A series of steps from step s121 to step s125 (that is, an operation of sequentially marking a line of drawing pattern groups) is referred to as a marking position superposition control step (s20).

  Then, while the synchronous movement control step (s10) and the marking position superposition control step (s20) are controlled in cooperation, the marking object 10 is continuously conveyed in the first direction. The marking light beam 27 is irradiated to the same position in the first direction and the second direction above for a predetermined time.

  When the marking unit 4 finishes moving in the second direction, the marking unit 4 is moved in the direction opposite to the x direction and returned to the original x position (s131). Then, it is determined whether or not marking has been completed (s132). If it is determined that marking has been completed, a series of flows is completed. On the other hand, if it is determined that the marking is not completed, the operations after step s104 are repeatedly performed, and the marking is repeatedly performed on the drawing pattern group of a plurality of columns.

[Marking example 1]
FIG. 5 is a plan view showing an example of marking in an example embodying the present invention, and shows a state in which a predetermined drawing pattern is well marked on the marking object 10.
The marking object 10 is conveyed at a predetermined speed VS in the direction indicated by the arrow 10v.
The marking unit 4 sequentially marks the drawing patterns 17a to 17d at predetermined positions on the marking object 10 while relatively moving in the direction indicated by the arrow 40v1.
Thereafter, the marking unit 4 sequentially marks the drawing patterns 17e to 17h at predetermined positions on the marking object 10 while relatively moving in the direction indicated by the arrow 40v2.

Note that 17a to 17d are a row of drawing pattern groups, and 17e to 17h are the next row of drawing pattern groups, and the interval between these rows is called a feed pitch PX. That is, although a line of drawing pattern groups is sequentially marked, the operation is repeatedly performed, and the marking is sequentially repeated for each feed pitch PX.
In addition, the interval between the drawing patterns at both ends (17a and 17d) of the drawing pattern group in one row and the drawing pattern interval at both ends (17e and 17h) in the next drawing pattern group are sequentially marked in the second direction. The interval between the first drawing pattern and the last drawing pattern is called an end pitch LY.

At this time, paying attention to the center position of the markable area of the marking unit 4, the locus that the center position has passed when marking the drawing patterns 17 a to 17 h (hereinafter, referred to as the operation locus of the marking unit) is a broken line. It is shown in the figure as 40k.
Hereinafter, the center position of the marking unit 4 will be described together with the operations of the X-axis slider 51, the Y-axis slider 61, and the like. The direction of the arrow in the y direction is called the forward path, and the opposite direction is called the backward path.

Initially, the center position before the start of marking is at the waiting position 48z1 before forward marking.
Thereafter, the X-axis slider 51 and the Y-axis slider 61 move and move in the direction indicated by the arrow 48v1.
Thereafter, the drawing pattern 17a is drawn before and after the point 48a, the drawing pattern 17b before and after the point 48b, the drawing pattern 17c before and after the point 48c, and the drawing pattern 17d before and after the point 48d.
Thereafter, the X-axis slider 51 and the Y-axis slider decelerate and stop at the stop position 48z2 after forward marking.
Thereafter, the X-axis slider 51 moves in the direction indicated by the arrow 48v2 and stops at the standby position 48z3 before return marking.
Thereafter, the X-axis slider 51 and the Y-axis slider 61 move in the direction indicated by the arrow 48v3. Thereafter, the drawing pattern 17e is marked before and after the point 48e, the drawing pattern 17f before and after the point 48f, the drawing pattern 17g before and after the point 48g, and the drawing pattern 17h before and after the point 48h.
Thereafter, the X-axis slider 51 and the Y-axis slider decelerate and stop at the stop position 48z4 after return path marking.
Thereafter, the X-axis slider 51 moves in the direction indicated by the arrow 48v4 and stops at the standby position 48z5 before forward marking.
Thereafter, the X-axis slider 51 and the Y-axis slider 61 move again and move in the direction indicated by the arrow 48v1, and the same operation as described above is repeated. By repeating such an operation, the marking unit 4 marks a drawing pattern at a predetermined position while drawing a locus like a broken line 40k shown in FIG.

[Marking example 2]
In the above description, the configuration in which the X-axis slider 51 returns after both the X-axis slider 51 and the Y-axis slider 61 are stopped has been described. However, in order to shorten the time, the Y-axis slider 61 may start moving in the reverse direction immediately after the Y-axis slider 61 is decelerating and the X-axis slider 51 is decelerated after the marking position. In this case, the center position of the markable area does not reach the positions 48z2 and 48z4 described with reference to FIG.

  FIG. 6 is a plan view showing an example of marking in another example of a form embodying the present invention, and an example of movement along a locus different from FIG. 5 is shown in FIG.

In the case of the form shown in FIG. 6A, the marking unit 4 operates in the same manner as the form described above with reference to FIG. 5 until the drawing pattern 17d is marked before and after the point 48d. The axis slider 61 starts decelerating after marking the drawing pattern 17d.
However, the X-axis slider 51 starts moving toward the standby position 48z3 before the return marking immediately after the stop, and the Y-axis slider 61 is stopped during the movement.
Thereafter, the X-axis slider 51 and the Y-axis slider 61 are stopped at the standby position 48z3 before return path marking.

Thereafter, the marking unit 4 again marks the drawing patterns 17e to 17h with the same movement as described above with reference to FIG. Then, the X-axis slider 51 and the Y-axis slider 61 start decelerating after marking the drawing pattern 17e.
However, immediately after the stop, the X-axis slider 51 starts moving toward the standby position 48z5 before return marking, and the Y-axis slider 61 is stopped during the movement.
Thereafter, the X-axis slider 51 and the Y-axis slider 61 are stopped at the standby position 48z5 before the forward marking.
By repeating the above-described operation, the marking unit 4 marks a drawing pattern at a predetermined position while drawing a locus like a broken line 40k1 shown in FIG.

[Marking example 3]
FIG. 6B shows an example in which the center position of the marking unit 4 moves along a different locus from that in FIGS. 5 and 6A.
In this embodiment, after the Y-axis slider 61 is stopped, before the X-axis slider 51 stops, the Y-axis slider 61 starts to move for marking the next row.
By repeating the above-described operation, the marking unit 4 marks a drawing pattern at a predetermined position while drawing a locus like a broken line 40k2 shown in FIG.

[alignment]
The arrangement of the marking areas prepared in advance on the marking object 10 may be shifted in the x direction or the y direction. This is because the main circuit pattern or the like formed in the previous process has been formed in a state of being displaced in the conveyance speed direction or the width direction of the marking object. It is required to mark a predetermined place even for the arrangement of the marking areas that are displaced in this way. Therefore, it is preferable that the marking device 1 further includes a mark imaging unit 7, a scheduled drawing position registration unit 94, and a mark position detection unit 97.

  The mark imaging unit 7 images the positioning reference mark given to the marking object 10. Specifically, the mark imaging unit 7 includes an imaging camera 71, a lens, illumination, and the like, and can be arranged at a place as shown in FIG.

  The planned drawing position registration unit 94 registers the relative position of the drawing pattern to be marked with respect to the position of the positioning reference mark on the marking object 10 as the planned marking position.

  The mark position detection unit 97 detects position information of the positioning reference mark imaged by the mark imaging unit 7. Specifically, the mark position detecting unit 97 can be configured by a processing block in an execution program of the image processing unit using a commercially available image processing unit, and at any position in the visual field of the mark observing unit 7 Whether the center position or the reference position of the mark is present is detected by performing image processing. Further, as shown in FIG. 3, the mark position detection unit 97 is used in connection with the overall control unit 95, and outputs the detected position information of the positioning reference mark to the overall control unit 95.

  The overall control unit 95 is based on the pre-registered distance between the imaging camera 71 and the marking unit 4 (that is, the distance in the x direction and the distance in the y direction) and the detected position information of the positioning reference mark. , The position on the marking object 10 to be marked is calculated, and the marking position superposition control unit 91 and the synchronous movement control unit 93 are controlled based on the calculation result to mark the predetermined position. Do.

  By doing so, with the marking device and method according to the present invention, even if the arrangement of the marking areas prepared in advance on the marking object 10 is shifted in the x direction or the y direction, the marking is performed at a predetermined place. be able to.

[Marking position shift function]
The arrangement of marking areas prepared in advance on the marking object 10 may be rotated (so-called θ deviation) as well as deviation in the x direction and y direction. Here, the θ direction refers to the rotation direction (clockwise toward the paper surface) with the z direction as the center of rotation, and the θ shift is an example as shown in FIG.

  FIG. 7 is a plan view showing a marking example in yet another example of the embodiment embodying the present invention, and is set as an arrangement when there is no θ deviation and registered marking areas 19a to 19d indicated by broken lines 19d and 19e to 19h and positioning reference marks 76a and 77a corresponding to them are shown. Then, the positioning reference marks 76a ′ and 77a ′ attached on the actual marking object 10 are imaged, and the areas 19a ′ to 19d ′ and 19e ′ to 19h to be actually marked are determined from the position information and the angle information. Calculate the position of 'and perform a series of marking operations.

  At this time, if the marking unit 4 is relatively moved in the directions of the arrows 40 v 1 ′ and 40 v 2 ′, a relative movement speed in the x direction is generated between the marking object 10 and the marking unit 4. When a series of marking operations are performed in this state, the marking pattern to be marked is marked at a predetermined position without any "positional deviation", but is marked with "blurring" due to the relative movement speed in the transport direction. There is a risk.

Therefore, it is preferable that the marking device 1 according to the present invention further includes a mark angle detection unit 98 and a marking position shift function.
The mark angle detection unit 98 detects angle information of the positioning reference mark imaged by the mark imaging unit, and acquires the angle information by extracting the shape and feature points of the positioning reference mark. is there.
Specifically, the mark angle detection unit 98 can be configured by a processing block in an execution program of the image processing unit using the same device as the image processing unit configuring the mark position detection unit 97. In the image processing unit, the processing block is configured so that the position and angle of the mark imaged by the imaging camera 71 can be detected.

  Position information of the positioning reference mark detected by the mark position detection unit 97 and angle information of the positioning reference mark detected by the mark angle detection unit 98 are output to the overall control unit 95.

The marking position shift function irradiates the marking target position set and registered in advance by shifting the position where the marking light beam is irradiated by a predetermined amount in a predetermined direction.
Specifically, the marking unit 4 is assumed to move relative to the marking object 10 in the directions of arrows 40v1 and 40v2, and performs a series of marking operations without a relative movement speed in the x direction. At this time, the overall control unit 95 uses the interval between the imaging camera 71 of the mark imaging unit 7 and the marking unit 4, the position information of the positioning reference mark detected by the mark position detection unit 97, and the mark angle detection unit 98. Based on the detected angle information of the positioning reference mark, a predetermined amount for shifting the marking light irradiation position in a predetermined direction is determined for each drawing pattern, and the predetermined amount to be shifted is output to the marking unit 4 To do. Then, based on the positional information of the Y-axis slider 61 when actually marking the drawing pattern, the position where the marking light beam is irradiated for each drawing pattern is set in a predetermined direction (one or both of the x direction and the y direction). While shifting by a predetermined amount, the marking position superposition control unit 91 and the synchronous movement control unit 93 are controlled to perform a series of marking operations.

  By doing so, even if the marking area set in advance is displaced in one or both of the X direction and the Y direction due to the θ deviation, It is possible to mark a drawing pattern in a state of being arranged in a matrix at a predetermined place without any “” or “blur”.

[2-mark alignment]
In the above description, an embodiment has been described in which a single corresponding mark is imaged and aligned in order to mark a line of drawing code groups. When imaging one alignment mark, it is difficult to detect the angle of θ deviation.

  Therefore, the marking device 1 according to the present invention includes a mark imaging unit that images a plurality of positioning reference marks previously given to a marking object, an angle detection unit 98b based on a plurality of mark positions, and a marking position shift function. It is preferable that the above-described θ deviation is corrected.

As shown in FIG. 1, the mark imaging unit 7 used for two-mark alignment is configured using a plurality of imaging cameras 71 and 72. Alternatively, the mark imaging unit 7 may have other forms, or may use a single imaging camera 71 to observe a plurality of positioning reference marks and acquire respective imaging position information.
For example, referring to FIG. 7, positioning reference marks 76a and 76b are set for the marking areas 19a to 19d, and positioning reference marks 77a and 77b are set for the marking areas 19e to 19h. Is set in advance.

  In the case of two-mark alignment, the drawing position registration unit 94 sets and registers the relative positions of the drawing patterns to be marked on the marking object 10 corresponding to a plurality of positioning reference mark positions as the marking positions. Keep it.

  The mark position detection unit 97 detects the interval between the imaging cameras 71 and 72 of the mark imaging unit 7 and the marking unit 4 and the imaging position information of the plurality of positioning reference marks, and based on the plurality of mark positions. The position information is output to the angle detection unit 98b.

The angle detection unit 98b based on the plurality of mark positions acquires angle information based on the position information of the plurality of positioning reference marks imaged by the mark imaging unit 7.
Specifically, the mark angle detection unit 98b can be configured by a processing block in an execution program of the image processing unit using the same device as the image processing unit configuring the mark position detection unit 97.

  In the image processing unit, position information of a plurality of marks captured by the imaging cameras 71 and 72 is output to the angle detection unit 98b based on the plurality of mark positions. Then, the processing block is configured such that the angle detection unit 98b based on the plurality of mark positions performs calculations for detecting angles based on the position information of the plurality of marks. Position information of the positioning reference mark detected by the mark position detection unit 97 and angle information of the positioning reference mark detected by the angle detection unit 98b based on the plurality of mark positions are output to the overall control unit 95. .

The marking position shift function irradiates the marking target position set and registered in advance by shifting the position where the marking light beam is irradiated by a predetermined amount in a predetermined direction.
Specifically, the marking unit 4 is assumed to move relative to the marking object 10 in the directions of arrows 40v1 and 40v2, and performs a series of marking operations without a relative movement speed in the x direction. At this time, the overall control unit 95 includes the interval between the imaging cameras 71 and 72 of the mark imaging unit 7 and the marking unit 4, the position information of the positioning reference mark detected by the mark position detection unit 97, and a plurality of mark positions. A predetermined amount for shifting the position where the marking light beam is irradiated in a predetermined direction is determined for each drawing pattern based on the angle information of the positioning reference mark detected by the angle detection unit 98b based on The fixed amount is output to the marking unit 4. Then, based on the positional information of the Y-axis slider 61 when actually marking the drawing pattern, the position where the marking light beam is irradiated for each drawing pattern is set in a predetermined direction (one or both of the x and y directions). While shifting by a predetermined amount, the marking position superposition control unit 91 and the synchronous movement control unit 93 are controlled to perform a series of marking operations.

  By doing so, even if the marking area prepared in advance on the marking object 10 is in a state shifted in the θ direction, a plurality of positioning reference marks at a distant position are observed. The correction accuracy of θ deviation can be improved.

[Calculation of allowable transport speed]
In order to increase productivity, it is required to increase the conveying speed VS for continuously conveying the marking object 10 in the first direction as much as possible. However, if the conveying speed VS of the marking object is increased too much, the repetitive operation of the X-axis slider 51 and the operation of the Y-axis slider 61 may not be in time, and there is a possibility that marking cannot be performed at a predetermined position. For example, a state as shown in the following case can be exemplified.
(Case 1) The feed pitch PX is narrow, and the next marking position passes while the Y-axis slider 61 moves in the forward path or the return path in order to mark a line of drawing patterns.
(Case 2) The feed pitch PX is narrow, and the next marking position passes while the X-axis slider 51 reciprocates to mark a line of drawing patterns.

  In order to prevent such a situation from occurring and to operate at a transport speed VS as fast as possible, the transport speed VS can reliably perform the repetitive operation of the X-axis slider 51 and the operation of the Y-axis slider 61. A value needs to be calculated and set to that value.

Therefore, it is preferable that the marking device 1 according to the present invention further includes a conveyance speed calculation unit 99 that calculates an allowable value of the conveyance speed.
The conveyance speed calculation unit 99 includes a feed pitch PX, a both-end pitch LY,
The time required for the Y-axis slider 61 to sequentially mark a line of drawing patterns;
Based on the time required for the X-axis slider 51 to repeatedly mark a line of drawing pattern groups (that is, for reciprocal movement), an allowable value of the conveyance speed of the conveyance unit is calculated.

Furthermore, the general control unit 95
While setting the permissible value of the calculated transport speed as the transport speed VS of the transport unit, while continuously transporting the marking object 10 based on the marking planned positions that are registered in a plurality,
The marking position superposition control unit 91 and the synchronous movement control unit 93 are controlled to repeatedly mark a plurality of drawn and registered drawing patterns.

Specifically, the transport speed calculation unit 99 calculates an allowable value of the transport speed of the transport unit in the following procedure.
FIG. 8 is a flowchart showing another example of a form embodying the present invention, and a series of flows for calculating an allowable value of the conveyance speed for repeatedly marking a predetermined drawing pattern on the marking object 10. Is shown step by step.

First, a temporary transport speed Vp is set (s201).
Next, a time TS that can be repeatedly used for marking is calculated from the feed pitch PX and the provisional conveyance speed Vp (s202). This time TS becomes an interval time (so-called tact time) of repeated marking, and the repeated marking operation is executed every this time.
Next, a time TY required for the marking unit 4 to sequentially mark a line of drawing pattern groups is calculated (s203). This time TY is the total time from when the Y-axis slider 61 accelerates from the stopped state, moves at a constant speed, decelerates, and stops.

  At the same time, the time TX required for the marking unit 4 to repeatedly mark a line of drawing pattern groups is calculated (s204). This time TX is the sum of the total time TX1 until the X-axis slider 51 accelerates from the stopped state, moves at a constant speed, decelerates, and stops and the time TX2 for returning to the original position.

  Next, it is compared whether or not the times TX and TY calculated in the above steps are smaller than the time TS, and it is determined whether or not each marking operation is completed within the interval time (s205).

  If it is determined in step s205 that the times TX and TY are smaller than the time TS, the value of the temporary transport speed Vp at that time is set as an allowable transport speed and set as the actual transport speed VS. .

  On the other hand, if it is determined that one of the times TX and TY is greater than the time TS, the temporary transport speed Vp is changed to a small value (s211), and the steps s202 to s205 are repeated.

  FIG. 9 is a time chart in another example of a form embodying the present invention. In FIG. 9, the horizontal axis is time t, the vertical axis is the speed of the Y-axis slider 61, the speed of the X-axis slider 51, and the center position of the marking possible area of the marking unit 4 draws a locus shown in FIG. The movement of the Y-axis slider 61 and the movement of the X-axis slider 51 when moving in this way are shown. The time chart shown in FIG. 9 corresponds to the form described above with reference to FIG. If the conveying speed of the marking object 10 is VS, the X-axis slider and the Y-axis slider are controlled as follows.

At time t1, the alignment mark is read, and the distance between the current position of the alignment mark and the reference position is measured.
The Y-axis slider is accelerated in the Y direction from time t2, and is switched to constant speed movement at time t4.
From time t4 to time t5, the Y-axis slider is moved at a constant speed.
The Y-axis slider is decelerated from time t5 and stopped at time t7.
From the time t7 to the next mark observation time t11, the Y-axis slider is put on standby.
On the other hand, the X-axis slider is accelerated from time t3 and switched to constant speed movement at time t4.
The X-axis slider is decelerated from time t5 and stopped at time t6.
Thereafter, the X-axis slider is moved in the reverse direction, returned to the standby position at time t8, and stopped.
After the next mark observation time t11, the Y-axis slider is accelerated in the reverse direction from time t12, and switched to constant speed movement at time t13.
On the other hand, the X-axis slider is accelerated from time t12 and switched to constant speed movement at time t14.
The marking object is marked by the marking unit between time t4 and time t5.

  Note that the timings at times t8 and t11 may be simultaneous or may be mixed in actual operation. For example, a mode in which acceleration of the Y-axis slider 61 shown at time t12 is started immediately after time t7 and acceleration of the X-axis slider 51 shown at time t13 is started immediately after time t8 can be exemplified. In the case of this form, the marking unit 4 repeatedly moves so that the center position draws a locus as shown in FIG. 6B, and draws a drawing pattern at a predetermined position on the marking object 10 that is continuously conveyed. Can be marked.

  On the other hand, the acceleration for the return movement of the X-axis slider 51 shown at time t6 is started after the deceleration of the Y-axis slider 61 shown at time t7 is completed, and the deceleration for the return movement of the X-axis slider 51 shown at time t8. A mode in which the Y-axis slider 61 is kept stationary until completion can be exemplified. In the case of this form, the marking unit 4 can repeat the movement so that the center position draws a locus as shown in FIG. 5, and can mark the drawing pattern at a predetermined position on the marking object 10 that is continuously conveyed.

  In any case, while marking a line of drawn pattern groups, the marking unit 4 does not have a “blur” because there is no relative movement speed in the conveying direction of the marking object 10.

[variation]
FIG. 10 is a perspective view showing an example of another embodiment embodying the present invention. The marking device 1a shown in FIG. 10 includes a marking unit first moving unit 5 and a marking unit second moving unit 6 that move the marking unit 4 in the x and y directions. Is different. The marking unit first moving unit 5a in the marking device 1a includes an X-axis slider unit 50a attached on the housing frame 11 and an X-axis slider 51a.

  The marking unit first moving unit 5a includes an X-axis auxiliary slider unit 50b mounted on the housing frame 11 and an X-axis auxiliary slider 51b so as to be parallel to the X-axis slider unit 50a. ing.

The marking unit second moving unit 6 includes an X-axis slider 51a, a Y-axis slider unit 60 attached on the X-axis auxiliary slider 51b, and a Y-axis slider 61.
The Y-axis slider unit 60 is mounted on the X-axis slider 51a and the X-axis auxiliary slider 51b via the support column 13, so that the Y-axis slider unit 60 can move in the x direction while keeping the distance from the marking object 10 in the z direction constant. Is attached. The Y-axis slider unit 60 is configured to include a Y-axis slider 61 that can move in the y direction, and the Y-axis slider 61 can be moved to a predetermined position and stopped based on a control signal from the outside. it can.
The marking unit 4 is attached to the Y-axis slider 61 of the marking unit second moving unit 6. Therefore, the marking unit 4 can move independently in one or both of the x direction and the y direction.

  Other devices and the system configuration are the same as those shown in FIGS. 1 and 2. For this reason, the marking device 1a, like the marking device 1 described above, does not “shake” due to the relative movement speed in the transport direction with respect to the marking object 10 that is continuously transported. It can be continuously marked in the state.

[Another marking unit example]
In the above description, the drawing pattern generation unit 41 used in the marking unit 4 has been described with reference to an example in which the pattern display 40m is configured using a DMD (digital micromirror device). However, the pattern display 40m may be of another type, for example, a transmissive liquid crystal mask type pattern display can be used. In this case, another Y-axis slider 61b is arranged between the Y-axis slider 61 and the marking unit, and the other Y-axis slider 61b is moved in the opposite direction to the Y-axis slider 61 at the same speed during marking. A marking position correction unit that performs marking is configured. By doing so, the position correction is performed so that the energy corresponding to the drawing pattern is continuously applied to the same place on the marking object 10 for a predetermined time, and the marking to which the present invention is applied can be performed.

DESCRIPTION OF SYMBOLS 1 Marking apparatus 1a Marking apparatus 2 Conveyance part (x direction)
4 Marking unit 5 Marking unit first moving part (x direction)
6 Marking unit second moving part (y direction)
7 Mark imaging unit 9 Control unit 10 Marking target object 10v Transport direction 10z Marking target object 11 Housing frame 12 Support column 13 Support column 15 Drawing pattern (conventional: stationary OK)
16 Drawing pattern (Conventional: NG during transport)
17 Drawing pattern (this application: OK during transport)
18 Drawing pattern (application: transport speed too high: NG)

20z mounting table 21 roller 21m motor 22 transport amount detector 40 drawing pattern generation unit 40a light source 40b laser beam 40c DMD mirror 40v1 arrow (relative movement direction / outward path of marking unit)
40v2 arrow (Relative movement direction / return path of marking unit)
DESCRIPTION OF SYMBOLS 41 Drawing pattern production | generation part 41a UV lamp 41b UV light 41c Liquid crystal mask 42 Light beam corresponding to a drawing pattern 43 Optical component 43m Mirror 43a Relay lens 43b Relay lens 44 Light beam corresponding to a drawing pattern 45 Marking position correction | amendment part (galvano mirror etc.)
46 fθ lens 47 light beam for marking 47a
48v1 arrow (outward marking)
48v2 arrow (Move to return path standby position)
48v3 arrow (return mark)
48v4 arrow (move to forward standby position)
48z1 Standby position before forward marking 48z2 Stop position after forward marking 48z3 Standby position before backward marking 48z4 Stop position after backward marking 50 X-axis slider unit 51 X-axis slider 50a X-axis slider unit 51a X-axis slider 50b X-axis auxiliary slider unit 51b X Axis auxiliary slider 60 Y-axis slider unit 61 Y-axis slider 62 Position detector 71 Imaging camera 72 Imaging camera 76a Positioning reference mark 76b Positioning reference mark (for two-mark alignment)
77a Positioning reference mark 77b Positioning reference mark (for 2-mark alignment)
91 Marking Position Overlay Control Unit 93 Synchronous Movement Control Unit 94 Draw Scheduled Position Registration Unit 95 General Control Unit 97 Mark Position Detection Unit 98 Mark Angle Detection Unit 99 Conveyance Speed Calculation Unit 98b Angle Detection Unit Based on Multiple Mark Positions PX Feeding Pitch LY End pitch TS Time required for repeated marking TX Time required for repeated marking of a row of drawing patterns TY Time required for sequentially marking a row of drawing patterns Vp Temporary transport speed VS Marking object Conveying speed VX Marking unit moving speed (x direction)
VY Marking unit moving speed (y direction)

Claims (10)

In a marking device that marks a drawing pattern on a marking object,
A transport unit for continuously transporting the marking object in a first direction;
A transport amount detector for detecting an amount of transport of the marking object in the first direction;
A marking unit that irradiates a marking beam corresponding to the drawing pattern toward the marking object;
A marking unit first moving part for moving the marking unit in the first direction;
Synchronous movement in which the marking unit first moving unit is moved in the same direction as the first direction based on the amount of the marking object conveyed per unit time detected by the conveyance amount detector. A control unit,
A marking unit second moving section for moving the marking unit in a second direction intersecting the first direction;
A position detector for detecting the position of the marking unit in the second direction;
A marking position correction unit that corrects the marking beam to be irradiated at the same position on the marking object by changing the position where the marking beam is irradiated, and
While the marking unit is moving in the second direction,
Based on the position of the marking unit in the second direction detected by the position detector,
By controlling the amount of shift in the marking position correction unit, the same position in the second direction on the marking object is irradiated with the marking light beam for a predetermined time,
It has a marking position superposition control unit,
Control the marking position overlay control unit and the synchronous movement control unit,
While continuously conveying the marking object in the first direction,
A marking apparatus, comprising: an overall control unit that irradiates the marking light beam for a predetermined time at the same position in the first direction and the second direction on the marking object. The marking object is provided with a positioning reference mark,
A drawing planned position registration unit that registers a relative position of a drawing pattern to be marked with respect to the position of the positioning reference mark as a marking planned position;
A mark imaging unit that images the positioning reference mark; and a mark position detection unit that detects position information of the positioning reference mark imaged by the mark imaging unit;
The overall control unit includes the marking position overlay control unit and the synchronous movement based on an interval between the mark imaging unit and the marking unit and position information of a positioning reference mark detected by the mark position detection unit. The marking device according to claim 1, wherein the controller is controlled. A mark angle detector that detects angle information of the positioning reference mark imaged by the mark imaging unit;
The marking unit is
A marking position shift function for irradiating the marking beam by shifting the position for irradiating the marking light beam by a predetermined amount in a predetermined direction,
The overall control unit
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected by the mark position detector,
Based on the angle information of the positioning reference mark detected by the mark angle detection unit,
The position of irradiating the marking beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control unit and the synchronous movement control unit are controlled. Marking device. The marking object is provided with a plurality of positioning reference marks,
The mark position detector detects position information of the plurality of positioning reference marks;
An angle detection unit based on a plurality of mark positions, which detects angle information of the positioning reference mark based on position information of the plurality of positioning reference marks imaged by the mark imaging unit;
The marking unit is
The overall control unit further includes a marking position shift function for irradiating the marking light by shifting the position for irradiating the marking light beam by a predetermined amount in a predetermined direction.
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected by the mark position detector,
Based on the angle information of the positioning reference mark detected by the angle detection unit based on the plurality of mark positions,
The position of irradiating the marking beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control unit and the synchronous movement control unit are controlled. Marking device. A transport speed calculation unit for calculating the transport speed of the transport unit;
In the planned drawing position registration unit,
Among the planned marking positions registered in the plurality of arrays,
A feed pitch registration unit for registering an interval for repeatedly marking in the direction of the first direction as a feed pitch;
A both-end drawing pattern interval registration unit that registers the interval between the first drawing pattern and the last drawing pattern that are sequentially marked in the second direction as the both-end drawing pattern interval;
The transport speed calculator is
The feed pitch, the both-end drawing pattern interval,
Time required for sequential marking in the marking unit second moving unit;
Based on the time required for repeated marking in the marking unit first moving unit, and calculating the allowable value of the conveyance speed of the conveyance unit,
The overall control unit
The marking apparatus according to claim 2, further comprising a function of setting the calculated allowable value of the conveyance speed as a conveyance speed of the conveyance unit and performing repetitive marking. In a marking method for marking a drawing pattern on a marking object,
A conveying step for continuously conveying the marking object in a first direction;
A conveyance amount detection step for detecting an amount of conveyance of the marking object in the first direction;
Using a marking unit that irradiates a marking beam corresponding to the drawing pattern toward the marking object,
A marking unit first moving step for moving the marking unit in the first direction;
Synchronous movement that moves the same amount in the same direction as the first direction in the marking unit first movement step based on the amount of the marking object conveyed per unit time detected in the conveyance amount detection step And a marking unit second moving step for moving the marking unit in a second direction intersecting the first direction,
A position detecting step for detecting a position in the second direction of the marking unit;
A marking position correcting step for changing the position for irradiating the marking light beam to correct the marking light beam to be irradiated at the same position on the marking object,
While the marking unit is moving in the second direction,
Based on the position in the second direction of the marking unit detected in the position detection step, the shift amount in the marking position correction step is controlled, and the same position in the second direction on the marking object is Irradiate the marking beam for a predetermined time,
A marking position overlay control step,
Centrally controlling the marking position overlay control step and the synchronous movement control step,
While the marking object is continuously conveyed in the first direction,
A marking method comprising irradiating the marking light beam for a predetermined time at the same position in the first direction and the second direction on the marking object. The marking object is provided with a positioning reference mark,
A drawing planned position registration step of registering a relative position of a drawing pattern to be marked with respect to the position of the positioning reference mark as a marking planned position;
A mark imaging step of imaging the positioning reference mark;
A mark position detecting step for detecting position information of the positioning reference mark imaged in the mark imaging step,
The marking position overlay control step and the synchronous movement control based on the interval between the mark imaging unit and the marking unit used in the mark imaging step and the position information of the positioning reference mark detected in the mark position detection step The marking method according to claim 6, wherein the steps are comprehensively controlled. A mark angle detection step of detecting angle information of the positioning reference mark imaged in the mark imaging step;
The marking unit is
A marking position shift function of irradiating the marking beam by shifting the position of irradiating the marking light beam by a predetermined amount in a predetermined direction,
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected in the mark position detecting step;
Based on the angle information of the positioning reference mark detected in the mark angle detection step,
The position for irradiating the marking light beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control step and the synchronous movement control step are comprehensively controlled. Marking method. The marking object is provided with a plurality of positioning reference marks,
In the mark position detection step, position information of the plurality of positioning reference marks is detected,
A mark angle detection step of detecting angle information of the positioning reference marks based on position information of the plurality of positioning reference marks imaged in the mark imaging step;
The marking unit is
A marking position shift function of irradiating the marking beam by shifting the position of irradiating the marking light beam by a predetermined amount in a predetermined direction,
An interval between the mark imaging unit and the marking unit;
Position information of the positioning reference mark detected in the mark position detecting step;
Based on the angle information of the positioning reference mark detected in the mark angle detection step,
The position for irradiating the marking light beam for each drawing pattern is shifted by a predetermined amount in a predetermined direction, and the marking position superposition control step and the synchronous movement control step are comprehensively controlled. Marking method. A transport speed calculating step for calculating a transport speed of the transport step;
In the drawing planned position registration step,
Among the planned marking positions registered in the plurality of arrays,
A feed pitch registration step for registering an interval for repeatedly marking in the direction of the first direction as a feed pitch;
A both-end drawing pattern interval registration step for registering the interval between the first drawing pattern and the last drawing pattern sequentially marked in the second direction as the both-end drawing pattern interval;
The transport speed calculating step includes:
The feed pitch, the both-end drawing pattern interval,
The time required for sequential marking in the marking unit second movement step;
Based on the time required for repeated marking in the marking unit first movement step, the allowable value of the conveyance speed of the conveyance step is calculated,
The marking method according to claim 7, further comprising a function of setting the calculated allowable value of the conveyance speed as a conveyance speed of the conveyance step and performing repetitive marking.

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