JP2013021254A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JP2013021254A JP2013021254A JP2011155525A JP2011155525A JP2013021254A JP 2013021254 A JP2013021254 A JP 2013021254A JP 2011155525 A JP2011155525 A JP 2011155525A JP 2011155525 A JP2011155525 A JP 2011155525A JP 2013021254 A JP2013021254 A JP 2013021254A
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
【解決手段】本発明にかかる半導体装置は、半導体素子1と、半導体素子1裏面上に設けられた第1金属体2と、第1金属体2裏面上に設けられた第1絶縁層4と、第1絶縁層4裏面上に設けられた第2金属体3と、半導体素子1表面上に設けられた第3金属体9と、第3金属体9表面上に設けられた第2絶縁層10と、第2絶縁層10表面上に設けられた第4金属体11とを備え、第2金属体3は、第1金属体2よりも薄く、第4金属体11は、第3金属体9よりも厚い。
【選択図】図1
Description
<A−1.構成>
図1は、本発明の実施の形態を説明するための、半導体装置の断面模式図である。
図4では、図3に示した半導体装置について、その製造フローを示す。
本発明にかかる実施の形態によれば、半導体装置において、半導体素子1と、半導体素子1裏面上に設けられた第1金属体2と、第1金属体2裏面上に設けられた第1絶縁層4と、第1絶縁層4裏面上に設けられた第2金属体3と、半導体素子1表面上に設けられた第3金属体9と、第3金属体9表面上に設けられた第2絶縁層10と、第2絶縁層10表面上に設けられた第4金属体11とを備え、第2金属体3は、第1金属体2よりも薄く、第4金属体11は、第3金属体9よりも厚いことで、半導体素子表面側においては、厚さの薄い第3金属体9を設け、半導体素子1へのストレスを抑制することができ、また、半導体素子1裏面側においては、厚さの厚い第1金属体2を設け、低熱抵抗化を可能とし、放熱性を向上させることができる。
Claims (13)
- 半導体素子と、
前記半導体素子裏面上に設けられた第1金属体と、
前記第1金属体裏面上に設けられた第1絶縁層と、
前記第1絶縁層裏面上に設けられた第2金属体と、
前記半導体素子表面上に設けられた第3金属体と、
前記第3金属体表面上に設けられた第2絶縁層と、
前記第2絶縁層表面上に設けられた第4金属体とを備え、
前記第2金属体は、前記第1金属体よりも薄く、
前記第4金属体は、前記第3金属体よりも厚いことを特徴とする、
半導体装置。 - 前記半導体素子、前記第1〜第4金属体、前記第1〜第2絶縁層を覆って形成される、モールド樹脂をさらに備え、
前記第2金属体は、裏面が前記モールド樹脂から露出し、
前記第4金属体は、表面が前記モールド樹脂から露出することを特徴とする、
請求項1に記載の半導体装置。 - 前記第3金属体と、前記第2絶縁層と、前記第4金属体とが、一体化されたラミネート基板として形成されることを特徴とする、
請求項1または2に記載の半導体装置。 - 前記第3金属体と、前記第2絶縁層と、前記第4金属体とが、回路基板を形成することを特徴とする、
請求項1〜3のいずれかに記載の半導体装置。 - 前記半導体素子は、炭化珪素を主成分とすることを特徴とする、
請求項1〜4のいずれかに記載の半導体装置。 - 前記半導体素子と前記第3金属体との間に設けられた、第5金属体をさらに備えることを特徴とする、
請求項1〜5のいずれかに記載の半導体装置。 - 前記第5金属体が、前記表面の方向に末広がり形状を有することを特徴とする、
請求項6に記載の半導体装置。 - 前記第3金属体と、前記第2絶縁層と、前記第5金属体とが、一体化された金属基板として形成されることを特徴とする、
請求項6または7に記載の半導体装置。 - 前記半導体素子を複数備え、
前記第5金属体が、各前記半導体素子に対応して複数備えられ、
前記第3金属体が、複数の前記第5金属体表面に跨って設けられることを特徴とする、
請求項6〜8のいずれかに記載の半導体装置。 - (a)半導体素子裏面上に、第1金属体を配設する工程と、
(b)前記第1金属体裏面上に、第1絶縁層を配設する工程と、
(c)前記第1絶縁層裏面上に、第2金属体を配設する工程と、
(d)前記半導体素子表面上に、第3金属体を配設する工程と、
(e)前記第3金属体表面上に、第2絶縁層を配設する工程と、
(f)前記第2絶縁層表面上に、第4金属体を配設する工程とを備え、
前記工程(c)が、前記第1金属体よりも薄い前記第2金属体を配設する工程であり、
前記工程(f)が、前記第3金属体よりも厚い前記第4金属体を配設する工程であることを特徴とする、
半導体装置の製造方法。 - 前記工程(d)(e)(f)における、前記第3金属体と、前記第2絶縁層と、前記第4金属体とが、一体化された金属基板として形成され、前記半導体素子表面上に配設されることを特徴とする、
請求項10に記載の半導体装置の製造方法。 - (g)前記半導体素子、前記第1〜第4金属体、前記第1〜第2絶縁層を覆う、モールド樹脂を形成する工程と、
(h)少なくとも前記第4金属体表面を、前記モールド樹脂から露出させる工程とをさらに備えることを特徴とする、
請求項10または11に記載の半導体装置の製造方法。 - (i)前記工程(d)の前に、前記半導体素子表面上に、第5金属体を配設する工程をさらに備え、
前記工程(d)が、前記第5金属体表面上に、第3金属体を配設する工程であることを特徴とする、
請求項10〜12のいずれかに記載の半導体装置の製造方法。
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JP2011155525A JP2013021254A (ja) | 2011-07-14 | 2011-07-14 | 半導体装置および半導体装置の製造方法 |
US13/405,720 US20130015468A1 (en) | 2011-07-14 | 2012-02-27 | Semiconductor device and method of manufacturing the same |
CN2012100898453A CN102881659A (zh) | 2011-07-14 | 2012-03-30 | 半导体装置以及半导体装置的制造方法 |
DE102012211424.6A DE102012211424B4 (de) | 2011-07-14 | 2012-07-02 | Halbleitervorrichtung und Verfahren für deren Herstellung |
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WO2018179981A1 (ja) * | 2017-03-29 | 2018-10-04 | トヨタ自動車株式会社 | 半導体装置 |
CN115589131A (zh) * | 2021-07-06 | 2023-01-10 | 英飞凌科技股份有限公司 | 具有电流传感器旋转棒的功率半导体模块 |
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