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WO2024135425A1 - Light emission device, display device, and electronic equipment - Google Patents

Light emission device, display device, and electronic equipment Download PDF

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Publication number
WO2024135425A1
WO2024135425A1 PCT/JP2023/044129 JP2023044129W WO2024135425A1 WO 2024135425 A1 WO2024135425 A1 WO 2024135425A1 JP 2023044129 W JP2023044129 W JP 2023044129W WO 2024135425 A1 WO2024135425 A1 WO 2024135425A1
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WO
WIPO (PCT)
Prior art keywords
layer
protective layer
display device
organic layer
substrate
Prior art date
Application number
PCT/JP2023/044129
Other languages
French (fr)
Japanese (ja)
Inventor
一裕 田村
Original Assignee
ソニーセミコンダクタソリューションズ株式会社
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Publication of WO2024135425A1 publication Critical patent/WO2024135425A1/en

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    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/88Terminals, e.g. bond pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/124Insulating layers formed between TFT elements and OLED elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals

Definitions

  • This disclosure relates to light-emitting devices, display devices, and electronic devices.
  • Light-emitting devices and display devices equipped with light-emitting elements have been developed.
  • light-emitting elements using organic electroluminescence elements are known as light-emitting elements capable of emitting high-brightness light when driven by low-voltage direct current.
  • Materials such as organic materials e.g., organic compounds
  • materials are materials whose characteristics are easily deteriorated by moisture.
  • technologies such as those disclosed in Patent Document 1 and Patent Document 2 have been proposed.
  • the intrusion of moisture from pads or the like into the organic layer is prevented by designing a protective film on the organic layer that contains the organic material, but this prevention effect may be insufficient, which may cause the properties of the organic material and other materials to deteriorate and the light-emitting properties to decrease.
  • the intrusion of moisture from the substrate side into the organic layer is not taken into consideration, which may cause the properties of the organic material and other materials to deteriorate and the light-emitting properties to decrease.
  • this disclosure proposes a light-emitting device, a display device, and an electronic device that can suppress the deterioration of light-emitting characteristics.
  • a light-emitting device includes a substrate, a wiring layer laminated on the substrate, an organic layer laminated on the wiring layer, a first electrode and a second electrode laminated to sandwich the organic layer, and a protective layer provided in the wiring layer to prevent moisture from entering.
  • a display device includes a substrate, a wiring layer laminated on the substrate, an organic layer laminated on the wiring layer, a pixel portion including a first electrode and a second electrode laminated to sandwich the organic layer, and a protective layer provided in the wiring layer to prevent moisture from entering.
  • An electronic device includes a display device, the display device having a substrate, a wiring layer laminated on the substrate, an organic layer laminated on the wiring layer, a pixel portion including a first electrode and a second electrode laminated to sandwich the organic layer, and a protective layer provided in the wiring layer to prevent moisture from entering.
  • FIG. 1 is a plan view illustrating a configuration example of a display device according to an embodiment of the present disclosure.
  • 1 is a cross-sectional view illustrating a configuration example of a display device according to an embodiment of the present disclosure.
  • FIG. 11 is a cross-sectional view showing a configuration example of a display device according to a first modified example.
  • FIG. 11 is a cross-sectional view showing a configuration example of a display device according to Modification 2.
  • FIG. 11 is a plan view showing a configuration example of a display device according to Modification 3.
  • FIG. 11 is a cross-sectional view showing a configuration example of a display device according to Modification 3.
  • FIG. 11 is a cross-sectional view showing a configuration example of a display device according to Modification 4.
  • FIG. 1 is a plan view illustrating a configuration example of a display device according to an embodiment of the present disclosure.
  • 1 is a cross-sectional view illustrating a configuration example of a display device according to an
  • FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 5.
  • FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 6.
  • FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 7.
  • FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 8.
  • FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 9.
  • FIG. 23 is a cross-sectional view showing a configuration example of a display device according to a modified example 10.
  • FIG. 23 is a cross-sectional view showing a configuration example of a display device according to Modification 11.
  • FIG. 23 is a cross-sectional view showing a configuration example of a display device according to Modification 11.
  • FIG. 23 is a plan view showing a configuration example of a display device according to a twelfth modification.
  • FIG. 23 is a plan view showing a configuration example of a display device according to a thirteenth modification.
  • FIG. 23 is a plan view showing a configuration example of a display device according to Modification 14.
  • 1A to 1C are diagrams for explaining a specific example 1 of a manufacturing method for a display device according to an embodiment of the present disclosure.
  • 11A to 11C are diagrams for explaining specific example 2 of the manufacturing method for a display device according to an embodiment of the present disclosure.
  • 11A to 11C are diagrams for explaining a specific example 3 of the manufacturing method for a display device according to an embodiment of the present disclosure.
  • FIG. 1 is a diagram illustrating an example of the appearance of a smartphone.
  • FIG. 1 is a diagram showing an example of the appearance of a digital still camera.
  • FIG. 1 is a diagram showing an example of the appearance of a digital still camera.
  • FIG. 1 is a diagram illustrating an example of the appearance of a head mounted display.
  • FIG. 1 is a diagram showing an example of the appearance of a see-through head mounted display.
  • FIG. 1 is a diagram illustrating an example of the appearance of a television device.
  • FIG. 2 is a diagram showing an example of the internal configuration of a vehicle.
  • FIG. 2 is a diagram showing an example of the internal configuration of a vehicle.
  • each embodiment can be implemented independently. However, at least a portion of the following embodiments may be implemented in appropriate combination with at least a portion of the other embodiments. These embodiments may include novel features that are different from one another. Thus, each embodiment may contribute to solving a different purpose or problem, and may provide different effects.
  • Embodiment 1-1 Configuration example of display device 1-2. Modified example of display device 1-3. Manufacturing method of display device 1-4. Function and effect 2. Other embodiments 3. Application example 4. Supplementary notes
  • Fig. 1 and Fig. 2 are diagrams for explaining an example of a schematic configuration of the display device 1 according to the present embodiment.
  • FIG. 1 is a plan view showing an example of the configuration of a display device 1 according to the present embodiment.
  • the display device 1 includes a pixel section 11, a horizontal drive circuit 12, a vertical drive circuit 13, and a pad section 14.
  • the pixel section 11 is disposed in an area substantially in the center of the display device 1, and the horizontal drive circuit 12, the vertical drive circuit 13, and the pad section 14 are disposed in the peripheral areas of the pixel section 11, but their arrangement is not limited thereto.
  • the pixel section 11 has a plurality of light-emitting elements 11a.
  • the light-emitting elements 11a are arranged in a matrix of M x N elements in total, for example, M elements in the vertical direction (Y-axis direction in FIG. 1) and N elements in the horizontal direction (X-axis direction in FIG. 1). These light-emitting elements 11a function as pixels of the display device 1, and the pixel section 11 generates a pixel area.
  • Each light-emitting element 11a is, for example, a light-emitting element that uses an organic EL element.
  • the horizontal drive circuit 12 and the vertical drive circuit 13 are drive circuits for driving the light-emitting elements 11a.
  • Each scanning line 12m is a line for scanning each light-emitting element 11a.
  • Each signal line 13n is a line for supplying various voltages to each light-emitting element 11a.
  • the display device 1 also includes, for example, a power supply line (not shown) for supplying a drive voltage, etc. to each light-emitting element 11a.
  • the pad section 14 has a plurality of pads 14a.
  • the pads 14a are arranged, for example, in a row in the horizontal direction (the X-axis direction in FIG. 1). In the example of FIG. 1, the number of pads 14a is five, but this is not limited to this. Also, each pad 14a is formed in a rectangular shape in a plan view, but this is not limited to this.
  • Each pad 14a is made of, for example, copper foil with an exposed pattern for soldering.
  • the display device 1 is an example of a light-emitting device (organic device) having a plurality of light-emitting elements 11a, and may be used alone or mounted in various devices, for example. Furthermore, the display device 1 may be a display device capable of color display, or a display device capable of displaying other than color.
  • FIG. 2 is a cross-sectional view showing an example of the configuration of the display device 1 taken along the line A1-A1 in FIG.
  • the display device 1 includes a substrate 10, a wiring layer 20, an anode layer 30, an organic layer 40, a cathode layer 50, and a protective layer 60.
  • the wiring layer 20, the anode layer 30, the organic layer 40, the cathode layer 50, and the protective layer 60 are stacked in the order shown.
  • the display device 1 may also include, for example, one or both of a color filter layer (e.g., color filters of red, green, and blue) and a lens layer (e.g., microlenses).
  • a color filter layer e.g., color filters of red, green, and blue
  • a lens layer e.g., microlenses
  • the substrate 10 is a support that supports various layers, namely the wiring layer 20, the anode layer 30, the organic layer 40, the cathode layer 50, and the protective layer 60.
  • various transistors that constitute a circuit may be provided on this substrate 10.
  • the wiring layer 20 is laminated on the upper surface of the substrate 10.
  • This wiring layer 20 has a plurality of wires 21 and an insulating layer 22.
  • the wiring layer 20 is, for example, a multi-layer wiring layer, and each wire 21 is arranged in a multi-layer manner via the insulating layer 22.
  • a pad 14a is formed on the upper surface side of this wiring layer 20.
  • An opening 20a is formed in the insulating layer 22 and the protective layer 60, and the upper surface of the pad 14a is exposed.
  • the wiring layer 20 also has multiple protective layers 23, 24. These protective layers 23, 24 are provided in the wiring layer 20 and are layers that suppress the intrusion of moisture. These protective layers 23, 24 are layers that suppress the amount of moisture that passes through, that is, layers that have a lower moisture permeability than the wiring layer 20.
  • the protective layer 23 corresponds to the first protective layer, and the protective layer 24 corresponds to the second protective layer.
  • the protective layer 23 is formed to prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side.
  • This protective layer 23 extends along a direction intersecting the stacking direction (Z-axis direction in FIG. 2).
  • the protective layer 23 extends in a direction perpendicular to the stacking direction (Y-axis direction in FIG. 2).
  • the protective layer 23 is formed, for example, over the entire surface of the display device 1 (for example, the entire upper surface of the substrate 10).
  • the stacking direction is the direction in which the substrate 10, wiring layer 20, anode layer 30, organic layer 40, cathode layer 50, protective layer 60, etc. are stacked and arranged.
  • the protective layer 23 is formed of, for example, an insulating material.
  • insulating materials include, but are not limited to, nitride film (SiN), aluminum oxide (AlO), etc., and insulating materials having low moisture permeability that are generally used in semiconductor manufacturing are used.
  • the moisture permeability is preferably, for example, 1 ⁇ 10 ⁇ 5 g/m 2 ⁇ day or less.
  • the thickness of the protective layer 23 depends on the material, but is, for example, several nm to several tens of nm.
  • the thickness of the protective layer 23 is the same in the entire region of the display device 1, but may be different depending on multiple regions (for example, pixel region, peripheral region). For example, the thickness of the protective layer 23 is set so that the pixel region is thicker than the peripheral region.
  • the protective layer 24 is formed to prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
  • the pad 14a side is a region of the wiring layer 20 that includes the pad 14a
  • the organic layer 40 side is a region of the wiring layer 20 below the organic layer 40.
  • the protective layer 24 extends along the stacking direction (Z-axis direction in FIG. 2) and is located at least between the pad 14a side and the organic layer 40 side.
  • the protective layer 24 extends in the stacking direction from the upper surface of the wiring layer 20 downward, but it is sufficient that the protective layer 24 extends along the stacking direction, and it may extend obliquely with respect to the stacking direction. In the example of FIG.
  • the protective layer 24 is formed in a frame shape so as to surround the periphery of the pixel unit 11 (for example, the organic layer 40) in a plan view.
  • This frame-shaped protective layer 24 is disposed so as to pass between the pixel unit 11 and the horizontal drive circuit 12 and between the pixel unit 11 and the vertical drive circuit 13.
  • the protective layer 24 may be formed of, for example, an insulating material, a metal material, or a combination of an insulating material and a metal material.
  • the protective layer 24 is laid out so as to block moisture intrusion, regardless of the material.
  • the insulating material include nitride film (SiN), aluminum oxide (AlO), and the like
  • the metal material include, but are not limited to, copper, aluminum, and tungsten, and insulating materials and metal materials with low moisture permeability that are generally used in semiconductor manufacturing are used.
  • the moisture permeability is preferably, for example, 1 ⁇ 10 ⁇ 5 g/m 2 ⁇ day or less.
  • protective layer 24 is located between protective layer 60 and protective layer 23, and is connected to both protective layer 60 and protective layer 23. More specifically, the upper end of protective layer 24 is connected to the lower surface of protective layer 60, and the lower end of protective layer 24 is connected to the upper surface of protective layer 23. In this manner, protective layer 23, protective layer 24, and protective layer 60 are connected, and organic layer 40 is surrounded by protective layer 23, protective layer 24, and protective layer 60. This prevents moisture from penetrating organic layer 40.
  • the anode layer 30 is laminated on the upper surface of the wiring layer 20.
  • the anode layer 30 has a plurality of anode electrodes 31 and a separation layer 32.
  • Each anode electrode 31 is provided on the upper surface of the wiring layer 20 for each light-emitting element 11a. These anode electrodes 31 are formed, for example, from a metal material and may reflect light.
  • Each anode electrode 31 is connected to a wiring 21 such as a via wiring in the wiring layer 20.
  • the separation layer 32 is laminated on the upper surface of the wiring layer 20 and electrically separates each anode electrode 31.
  • the separation layer 32 is formed, for example, from an insulating material and may have a reflective layer that reflects light.
  • the anode electrode 31 functions, for example, as a lower electrode and corresponds to a first electrode.
  • the organic layer 40 is laminated on the upper surface of the anode layer 30.
  • This organic layer 40 includes at least a light-emitting layer, and is formed to emit, for example, white, red, green, or blue light.
  • the organic layer 40 is shown as a single layer excluding each anode electrode 31, but in reality, it is composed of multiple layers including, for example, a light-emitting layer.
  • the cathode layer 50 is laminated on the organic layer 40.
  • the cathode layer 50 is formed, for example, from a material that is highly light-transmitting and conductive (for example, a transparent conductive material).
  • the cathode layer 50 is a cathode electrode.
  • the cathode electrode functions, for example, as an upper electrode, and corresponds to a second electrode.
  • the light-emitting element 11a is configured by sequentially stacking an organic layer 40 and a cathode layer 50 on an anode electrode 31. Light emitted from the organic layer 40 is emitted from the surface of the organic layer 40 facing the cathode layer 50.
  • the planar shape of the light-emitting surface of the light-emitting element 11a roughly follows the planar shape of the anode electrode 31.
  • the protective layer 60 is laminated on the upper surfaces of the cathode layer 50 and the wiring layer 20.
  • the protective layer 60 is formed to cover the cathode layer 50 and the wiring layer 20, and to suppress the intrusion of moisture from the outside to the organic layer 40.
  • the protective layer 60 is formed of, for example, an insulating material. Examples of the insulating material include, but are not limited to, nitride film (SiN) and aluminum oxide (AlO), and an insulating material with low moisture permeability that is generally used in semiconductor manufacturing is used.
  • the moisture permeability is preferably, for example, 1 ⁇ 10 ⁇ 5 g/m 2 ⁇ day or less, similar to the other protective layers 23 and 24.
  • the protective layer 60 corresponds to a third protective layer.
  • the protective layer 23 is provided over the entire surface of the wiring layer 20. This prevents moisture from entering the organic layer 40 from the substrate 10 through the wiring layer 20.
  • the protective layer 24 is provided between the pad 14a side and the organic layer 40 side in the wiring layer 20. This prevents moisture from entering the organic layer 40 from the pad 14a (e.g., the opening 20a) through the wiring layer 20 by the protective layer 24.
  • the protective layer 60 is provided so as to cover the cathode layer 50, the organic layer 40, etc. This prevents moisture from entering the organic layer 40 from the outside by the protective layer 60. In this way, it is possible to prevent moisture from entering the organic layer 40, thereby suppressing the deterioration of the characteristics of the organic layer 40 due to moisture and suppressing the deterioration of the light-emitting characteristics.
  • Fig. 3 to Fig. 17 are diagrams for explaining an example of a schematic configuration of the display device 1 according to any one of Modifications 1 to 14, respectively.
  • FIG. 3 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 1.
  • Modification 1 is a modification of the display device 1 shown in Fig. 2 of the above-described embodiment, and therefore differences from the display device 1 shown in Fig. 2 will be described.
  • the protective layer 23 is not present in the region below the pads 14a, but is formed so as to be present in the region below the organic layer 40 (e.g., the region facing the pixel region).
  • the protective layer 23 is formed so as not to cover from below the pad portion 14 (see FIG. 1), which is part of the peripheral region, but to cover from below at least the pixel region of the pixel portion 11 (see FIG. 1).
  • the lower end of the protective layer 24 is connected to the end of the protective layer 23.
  • the protective layer 23 can prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40, and the protective layer 24 can prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics.
  • FIG. 4 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 2. Since the modified example 2 is a modified example of the display device 1 shown in Fig. 3 of the modified example 1, differences from the display device 1 shown in Fig. 3 will be described.
  • the protective layer 23 is formed so as to be present in the region above the wiring 21 located on the same upper layer side as the pads 14a.
  • the protective layer 23 is desirable to place the protective layer 23 as high up as possible in the wiring layer 20.
  • this modified example 2 compared to modified example 1, it is possible to reliably prevent moisture from penetrating from the wiring layer 20 to the organic layer 40 by the protective layer 23. Also, as in modified example 1, it is possible to prevent moisture from penetrating from the pad 14a to the organic layer 40 via the wiring layer 20 by the protective layer 24. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
  • Fig. 5 is a plan view showing a configuration example of the display device 1 according to Modification 3.
  • Fig. 6 is a cross-sectional view showing a configuration example of the display device 1 cut along the line A2-A2 in Fig. 5.
  • Modification 3 is a modification of the display device 1 shown in Fig. 1 of the above-mentioned embodiment, so differences from the display device 1 shown in Fig. 1 will be described.
  • the protective layer 24 is formed in a frame shape so as to surround the periphery of each pad 14a in a plan view. Also, as shown in FIG. 6, the protective layer 23 is formed so as to exist only in the area below the pad 14a. In the example of FIG. 6, the pad 14a is surrounded by the protective layer 23 and the protective layer 24, and the side and bottom surfaces of the pad 14a are covered by the protective layer 23 and the protective layer 24 that face those surfaces.
  • the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This makes it possible to suppress the deterioration of the characteristics of the organic layer 40 caused by moisture, and to suppress the deterioration of the light-emitting characteristics.
  • Fig. 7 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 4.
  • Modification 4 is a modification of the display device 1 shown in Fig. 6 of Modification 3, and therefore differences from the display device 1 shown in Fig. 6 will be described.
  • the protective layer 23 is formed so as to be present over the entire surface of the wiring layer 20. That is, the protective layer 23 is formed so as to be present in the region below the pad 14a and the region below the organic layer 40 (e.g., the region facing the pixel region).
  • the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40, and the protective layer 23 can further prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40. This makes it possible to suppress the deterioration of the properties of the organic layer 40 due to moisture, and reliably suppress the deterioration of the light-emitting properties.
  • (Variation 5) 8 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 5.
  • Modification 5 is an example of a combination of Modification 2 (see FIG. 4) and Modification 3 (see FIG. 6).
  • the protective layer 23 is formed so as to be present in the region above the wiring 21 located on the same upper layer side as the pads 14a, as in the second modification, and further, is formed so as to be present in the region below the pads 14a, as in the third modification.
  • the protective layer 24 is formed so as to surround the periphery of each pad 14a in a planar view, as in the third modification (see FIG. 5).
  • FIG. 9 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 6.
  • Modification 6 is a modification of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, and therefore differences from the display device 1 shown in Fig. 2 will be described.
  • the protective layer 23 is not present, but the protective layer 24 is present.
  • the protective layer 24 penetrates the wiring layer 20 and extends through the wiring layer 20 from the top surface to the bottom surface.
  • One end of the protective layer 24 is connected to the protective layer 60, and the other end of the protective layer 24 is connected to the substrate 10.
  • the protective layer 24 is formed in a frame shape so as to surround the periphery of the pixel portion 11 (e.g., the organic layer 40) in a plan view (see FIG. 1).
  • the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40, and furthermore, the protective layer 24 can reliably prevent moisture from penetrating into the organic layer 40 from a part of the wiring layer 20 located below the pad 14a. This makes it possible to suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics.
  • Fig. 10 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 7. Since the modified example 7 is a modified example of the display device 1 shown in Fig. 6 of the modified example 3, differences from the display device 1 shown in Fig. 6 will be described.
  • the protective layer 23 is not present, but the protective layer 24 is present.
  • the protective layer 24 penetrates the wiring layer 20 and extends through the wiring layer 20 from the top surface to the bottom surface.
  • One end of the protective layer 24 is connected to the protective layer 60, and the other end of the protective layer 24 is connected to the substrate 10.
  • the protective layer 24 is formed in a frame shape so as to surround the periphery of each pad 14a in a plan view (see FIG. 5).
  • the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40, and the protective layer 24 can reliably prevent moisture from penetrating from a part of the wiring layer 20 located below the pad 14a into the organic layer 40. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
  • Fig. 11 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 8. Since the modified example 8 is a modified example of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 2 will be described.
  • the protective layer 24 is not present, but the protective layer 23 is present.
  • the protective layer 23 is present in the region above the wiring 21 located on the same upper layer side as the pad 14a, and is formed so as to connect to the pad 14a. For example, when moisture remains in the wiring layer 20, it is desirable to position the protective layer 23 as high as possible above the wiring layer 20.
  • the protective layer 23 can reliably prevent moisture from penetrating from the wiring layer 20 into the organic layer 40. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and suppress deterioration of the light-emitting characteristics.
  • Fig. 12 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 9. Since the modified example 9 is a modified example of the display device 1 shown in Fig. 11 of the modified example 8, differences from the display device 1 shown in Fig. 11 will be described.
  • the protective layer 23 is formed so as to be present on the upper surface of the wiring layer 20. This protective layer 23 extends up to above the pads 14a.
  • the protective layer 23 can reliably prevent moisture from entering the organic layer 40 from the wiring layer 20 and from entering the organic layer 40 from the pad 14a via the wiring layer 20. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
  • FIG. 13 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 10. Since the modified example 10 is a modified example of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 2 will be described.
  • a display device 1 according to variant 10 has a plurality of protective layers 23.
  • the number of protective layers 23 is two, the protective layers 23 are arranged parallel to each other, and the thicknesses (lengths in the stacking direction) of the protective layers 23 are different, but this is not limited to this.
  • the number of protective layers 23 is not particularly limited, the protective layers 23 do not have to be parallel to each other, and the thicknesses of the protective layers 23 may be different or the same.
  • the protective layers 23 are formed so that they are thicker the closer they are to the substrate 10, but conversely, they may be formed so that they are thicker the farther they are from the substrate 10.
  • this modification 10 compared to the previously described embodiment, it is possible to reliably prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40 by using the multiple protective layers 23. Also, as in the previously described embodiment, it is possible to prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40 by using the protective layer 24. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
  • Fig. 14 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 11. Since the modified example 11 is a modified example of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 2 will be described.
  • a display device 1 according to the eleventh modification has a plurality of protective layers 24.
  • the number of protective layers 24 is two, the protective layers 24 are arranged parallel to each other, and the widths (lengths in the direction perpendicular to the stacking direction) of the protective layers 24 are different, but this is not limited to this.
  • the number of protective layers 24 is not particularly limited, the protective layers 24 do not have to be parallel to each other, and the widths of the protective layers 24 may be different or the same.
  • the protective layers 24 are formed so that the closer they are to the pads 14a, the wider they are, but conversely, they may be formed so that the farther they are from the pads 14a, the wider they are.
  • this modification 11 compared to the previously described embodiment, it is possible to reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40 by using the multiple protective layers 24. Also, as in the previously described embodiment, it is possible to prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40 by using the protective layer 23. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
  • Fig. 15 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 12. Since the modified example 12 is a modified example of the display device 1 shown in Fig. 1 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 1 will be described.
  • the protective layer 24 is formed in a straight line in a plan view so as to be located between the pixel section 11 and the pad section 14.
  • the protective layer 24 can prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics. As in the previous embodiment (see FIG. 2), the protective layer 23 can prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40.
  • Fig. 16 is a cross-sectional view showing a configuration example of the display device 1 according to the modification 13. Since the modification 13 is a modification of the display device 1 shown in Fig. 5 of the modification 3, differences from the display device 1 shown in Fig. 5 will be described.
  • the protective layer 24 is formed in a frame shape so as to surround the periphery of the pad portion 14 in a plan view.
  • the protective layer 24 can prevent moisture from entering the organic layer 40 from the pad 14a via the wiring layer 20. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics.
  • Fig. 17 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 14. Since the modified example 14 is a modified example of the display device 1 shown in Fig. 1 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 1 will be described.
  • the protective layer 24 is formed in a frame shape so as to surround the pixel section 11, the horizontal drive circuit 12, and the vertical drive circuit 13 in a plan view.
  • the protective layer 24 can prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress the deterioration of the light-emitting characteristics. As in the previous embodiment (see FIG. 2), the protective layer 23 can prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40.
  • modified examples 1 to 14 are merely examples, and each of the modified examples 1 to 14 may be partially modified, or any of the modified examples 1 to 14 may be selected and combined. Furthermore, when protective layer 23 and protective layer 24 are present, protective layer 24 does not have to be connected to protective layer 23, but in order to prevent moisture from penetrating into organic layer 40, it is desirable that protective layer 24 be connected to protective layer 23. Furthermore, protective layer 24 does not have to be connected to protective layer 60, but in order to prevent moisture from penetrating into organic layer 40, it is desirable that protective layer 24 be connected to protective layer 60.
  • Fig. 18 to Fig. 20 are diagrams for explaining any one of specific examples 1 to 3 of the manufacturing method for the display device 1, respectively.
  • FIG. 18 is a diagram for explaining a specific example 1 of a manufacturing method for the display device 1.
  • FIG. 18 is a diagram for explaining a specific example 1 of a manufacturing method for the display device 1.
  • a wiring layer 20 is laminated on the upper surface of the substrate 10.
  • the wiring 21 and insulating layer 22 included in this wiring layer 20 are formed by normal semiconductor manufacturing techniques (e.g., lithography process).
  • a protective layer 23 is also laminated and formed, and a pad 14a is also formed, and further, wiring 24a such as a via wiring is formed as the protective layer 24.
  • a film formation process such as a contact stopper film may be provided in the wiring process. This is also the case in the following specific example 2 and specific example 3 of the manufacturing method.
  • anode layer 30, organic layer 40, cathode layer 50, and protective layer 60 are laminated in that order on the upper surface of the wiring layer 20. This forms each light-emitting element 11a.
  • an opening 20a is formed above the pad 14a by a lithography process/fabrication process, exposing the upper surface of the pad 14a.
  • the protective layer 24 is formed using the wiring 24a, making it possible to eliminate the need for an additional process for forming the protective layer 24.
  • FIG. 19 is a diagram for explaining a second specific example of the manufacturing method of the display device 1.
  • FIG. 19 is a diagram for explaining a second specific example of the manufacturing method of the display device 1.
  • a wiring layer 20 is laminated on the upper surface of the substrate 10.
  • the wiring 21 and insulating layer 22 included in this wiring layer 20 are formed by normal semiconductor manufacturing techniques (e.g., lithography process).
  • a protective layer 23 is also laminated and formed, and the pad 14a is also formed.
  • a groove M1 for forming the protective layer 24 is dug in the upper surface of the wiring layer 20 by a lithography process or a processing process.
  • the position of this groove M1 is the desired position for forming the protective layer 24.
  • the groove M1 is filled with a material with low moisture permeability (e.g., nitride film, aluminum oxide, etc.), and the groove M1 is filled and planarized. In this way, the protective layer 24 is formed.
  • the anode layer 30, the organic layer 40, the cathode layer 50, and the protective layer 60 are laminated in that order on the upper surface of the wiring layer 20. This forms each light-emitting element 11a. After that, an opening 20a is formed above the pad 14a by a lithography process or a processing process, and the upper surface of the pad 14a is exposed.
  • FIG. 20 is a diagram for explaining a specific example 3 of the manufacturing method for the display device 1.
  • FIG. 20 is a diagram for explaining a specific example 3 of the manufacturing method for the display device 1.
  • a wiring layer 20 is laminated on the upper surface of the substrate 10.
  • the wiring 21 and insulating layer 22 included in this wiring layer 20 are formed by normal semiconductor manufacturing techniques (e.g., lithography process).
  • a protective layer 23 is also laminated and formed, and a pad 14a is also formed.
  • an anode layer 30, an organic layer 40, a cathode layer 50, and a protective layer 60 are laminated in that order on the upper surface of the wiring layer 20.
  • a groove M2 for forming the protective layer 24 is dug in the upper surface of the protective layer 60 by a lithography process or a processing process.
  • the position of this groove M2 is the desired position for forming the protective layer 24.
  • a material with low moisture permeability e.g., nitride film, aluminum oxide, etc.
  • planarization or etch-back may be performed as necessary.
  • an opening 20a is formed in the upper part of the pad 14a by a lithography process or a processing process, and the upper surface of the pad 14a is exposed.
  • the specific examples 1 to 3 of the manufacturing method of the display device 1 described above are merely examples, and the display device 1 may be manufactured by other manufacturing methods.
  • the display device 1 includes the substrate 10, the wiring layer 20 laminated on the substrate 10, the organic layer 40 laminated on the wiring layer 20, the first electrode and the second electrode (e.g., the anode electrode 31 and the cathode electrode (cathode layer 50)) laminated so as to sandwich the organic layer 40, and one or both of the protective layer 23 and the protective layer 24 provided in the wiring layer 20 to suppress the intrusion of moisture.
  • This makes it possible to suppress the intrusion of moisture from the wiring layer 20 into the organic layer 40, thereby suppressing the deterioration of the characteristics of the organic layer 40 due to moisture and suppressing the deterioration of the light-emitting characteristics.
  • protective layers 23 and 24 may be layers having a lower moisture permeability than wiring layer 20. This can prevent moisture from penetrating from substrate 10 to organic layer 40, and reliably prevent the deterioration of the properties of organic layer 40 due to moisture.
  • the protective layer 23 may also be formed to prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side. This prevents moisture from penetrating from the substrate 10 side to the organic layer 40 side, and reliably prevents the deterioration of the properties of the organic layer 40 due to moisture.
  • the protective layer 23 may also be stretched in a direction intersecting the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40. This can prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side.
  • the display device 1 may further include a pad 14a formed on the wiring layer 20, and the protective layer 24 may be formed to prevent moisture from penetrating from the pad 14a side to the organic layer 40 side. This prevents moisture from penetrating from the pad 14a side to the organic layer 40 side, and reliably prevents degradation of the characteristics of the organic layer 40 due to moisture.
  • the protective layer 24 may also extend along the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40. This can prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
  • the protective layer 24 may also be formed so as to surround the organic layer 40 in plan view (see Figs. 1 and 17). This makes it possible to prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
  • the protective layer 24 may also be formed to surround the pad 14a in plan view (see Figs. 5 and 16). This can prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
  • the display device 1 may further include a pad 14a formed on the wiring layer 20, and the protective layer 23 and the protective layer 24 may be formed to suppress the intrusion of moisture from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side. This suppresses the intrusion of moisture from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side, and reliably suppresses the deterioration of the characteristics of the organic layer 40 due to moisture.
  • the protective layer 23 may extend along a direction intersecting the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40, and the protective layer 24 may extend along the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40. This can reliably prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side.
  • protective layer 24 may be formed to surround organic layer 40 in plan view. This can reliably prevent moisture from penetrating from pad 14a to organic layer 40.
  • protective layer 24 may be formed to surround pad 14a in plan view. This can reliably prevent moisture from penetrating from pad 14a to organic layer 40.
  • protective layer 24 may be connected to protective layer 23. This can reliably prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side.
  • one or both of the protective layers 23 and 23 may be provided in multiples. This can reliably prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side and/or moisture from the pad 14a side to the organic layer 40 side.
  • protective layer 23 may be formed from an insulating material
  • protective layer 24 may be formed from one or both of an insulating material and a metallic material. This allows protective layer 23 and protective layer 24 to be easily formed using normal semiconductor manufacturing techniques.
  • the display device 1 may further include a protective layer 60 that is laminated to the second electrode (cathode electrode (cathode layer 50)) and prevents moisture from entering. This makes it possible to prevent moisture from entering the organic layer 40 from the outside, thereby preventing deterioration of the properties of the organic layer 40 due to moisture and reliably preventing deterioration of the light-emitting properties.
  • protective layer 24 may be connected to protective layer 23 and protective layer 60. This can reliably prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
  • the protective layer 24 may also be connected to the substrate 10 and the protective layer 60. This can reliably prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
  • the constituent material of the substrate 10 can be a semiconductor material, a glass material, a plastic material, or the like.
  • a well region can be provided in a semiconductor substrate made of silicon, and the transistors can be formed in the well.
  • a substrate made of glass or plastic material can be used, and a semiconductor thin film can be formed on the substrate to form the drive circuit.
  • the various wiring can have well-known configurations and structures.
  • the material constituting the light-emitting element 11a is appropriately selected from transparent organic materials and inorganic materials.
  • the light-emitting element 11a is obtained, for example, by forming a resist on a transparent material layer and performing etching.
  • the light-emitting element 11a may also be configured to have a resonator structure that resonates light. By having the light-emitting element 11a have a resonator structure, the light-emitting color of the light-emitting element 11a can be set to a predetermined display color, so color filters are basically unnecessary. However, in order to further improve the color purity of light with a long wavelength, the display device 1 may also be configured to further include a color filter corresponding to the light-emitting element 11a for displaying red.
  • the display device 1 may also be configured to further include color filters corresponding to the light-emitting element 11a for displaying red, the light-emitting element 11a for displaying green, and the light-emitting element 11a for displaying blue.
  • the color filter may be configured to include color materials and/or particles that make up quantum dots.
  • the color filter may be configured using a known resist material to which desired color materials and the like have been added. Well-known pigments and dyes may be used as color materials.
  • the particles that make up the quantum dots are not particularly limited, and luminescent semiconductor nanoparticles may be used, for example.
  • a color filter that includes color materials displays color by transmitting light in a desired wavelength range from the light from the light-emitting element 11a.
  • a color filter that includes particles that make up quantum dots displays color by converting the wavelength of the light from the light-emitting element 11a.
  • color filter arrangement (color pattern)
  • various patterns such as a Bayer arrangement (e.g., RGBG, GRGB, RGGB, etc.), an RGB arrangement, an RGB stripe arrangement, an RGB mosaic arrangement, etc.
  • the stacking position of each color filter is not particularly limited as long as it is on the optical path of the light emitted from the light emitting element 11a.
  • the configuration of the drive circuit that controls the light emission of the light-emitting element 11a is not particularly limited.
  • the configuration of the transistors that make up the drive circuit is not particularly limited, and may be, for example, a p-channel type field effect transistor or an n-channel type field effect transistor.
  • the light-emitting element 11a is configured as a so-called top-emitting type.
  • the light-emitting element 11a which is an organic electroluminescence element, is configured by sandwiching an organic layer 40, which includes a hole transport layer, a light-emitting layer, an electron transport layer, etc., between a first electrode and a second electrode.
  • the cathode is shared, for example, the first electrode is the anode electrode 31, and the second electrode is the cathode electrode (cathode layer 50).
  • the first electrode may be formed of, for example, a single metal or alloy having a high work function, such as platinum (Pt), gold (Au), silver (Ag), chromium (Cr), tungsten (W), nickel (Ni), copper (Cu), iron (Fe), cobalt (Co), or tantalum (Ta).
  • the first electrode may also be formed as a laminated electrode in which a transparent conductive material, such as indium zinc oxide (IZO) or indium tin oxide (ITO), is laminated on a dielectric multilayer film or a thin film having high light reflectivity, such as aluminum.
  • IZO indium zinc oxide
  • ITO indium tin oxide
  • the second electrode may be formed of a metal or alloy with a low work function, such as aluminum (Al), silver (Ag), magnesium (Mg), calcium (Ca), sodium (Na), strontium (Sr), an alloy of an alkali metal and silver, an alloy of an alkaline earth metal and silver, an alloy of magnesium and calcium, or an alloy of aluminum and lithium.
  • the second electrode may also be formed of a transparent conductive material such as indium zinc oxide (IZO) or indium tin oxide (ITO), and may be formed as a laminated electrode of a layer made of the above-mentioned low work function material and a layer made of a transparent conductive material such as indium zinc oxide (IZO) or indium tin oxide (ITO).
  • the organic layer 40 is formed by laminating a plurality of material layers, and is provided as a common continuous film over the entire surface including the first electrode.
  • the organic layer 40 emits light when a voltage is applied between the first electrode and the second electrode.
  • the organic layer 40 is formed, for example, in a structure in which a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer are laminated in this order from the first electrode side.
  • the hole transport material, hole transport material, electron transport material, and organic light emitting material that constitute the organic layer 40 are not limited, and well-known materials can be used.
  • the organic layer 40 may also include a structure in which multiple light-emitting layers are stacked.
  • a light-emitting element 11a that emits white light can be configured by stacking red-, blue-, and green-emitting light-emitting layers, or by stacking blue- and yellow-emitting light-emitting layers.
  • the light-emitting layers can be painted differently for each light-emitting element 11a depending on the color to be displayed.
  • a pixel may be composed of one light-emitting element 11a or may be composed of multiple light-emitting elements 11a.
  • a pixel may be composed of multiple sub-pixels (light-emitting elements 11a).
  • one pixel may be composed of three types of sub-pixels: a red display sub-pixel, a green display sub-pixel, and a blue display sub-pixel.
  • One pixel may also be composed of a set of these three types of sub-pixels plus one or more types of sub-pixels (for example, a set of a sub-pixel that emits white light to improve brightness, a set of a sub-pixel that emits a complementary color to expand the color reproduction range, a set of a sub-pixel that emits yellow to expand the color reproduction range, or a set of sub-pixels that emit yellow and cyan to expand the color reproduction range).
  • a set of a sub-pixel that emits white light to improve brightness for example, a set of a sub-pixel that emits a complementary color to expand the color reproduction range, a set of a sub-pixel that emits yellow to expand the color reproduction range, or a set of sub-pixels that emit yellow and cyan to expand the color reproduction range.
  • partition wall that separates adjacent light-emitting elements 11a
  • this partition wall may be formed using a material appropriately selected from known inorganic materials or organic materials.
  • the partition wall may be formed by a combination of a known film formation method, such as a physical vapor deposition method (PVD method) exemplified by a vacuum deposition method or a sputtering method, or various chemical vapor deposition methods (CVD methods), and a known patterning method, such as an etching method or a lift-off method.
  • PVD method physical vapor deposition method
  • CVD methods chemical vapor deposition methods
  • the pixel may also be configured to have a shift structure that shifts any of the light-emitting portion, the lens member, and the wavelength selection portion (e.g., a color filter).
  • a shift structure that shifts any of the light-emitting portion, the lens member, and the wavelength selection portion (e.g., a color filter).
  • the pixel values of the display device 1 can be, for example, VGA (640,480), S-VGA (800,600), XGA (1024,768), APRC (1152,900), S-XGA (1280,1024), U-XGA (1600,1200), HD-TV (1920,1080), Q-XGA (2048,1536), as well as (1920,1035), (720,480), (1280,960), and other image display resolutions, but are not limited to these values.
  • the display device 1 according to the embodiment described above can be used as a display unit of electronic devices in various fields that displays a video signal input to the electronic device or a video signal generated within the electronic device as an image or video.
  • the display device 1 according to the embodiment can be used as a display unit of a mobile terminal device such as a smartphone or a mobile phone, a digital still camera, a head-mounted display, a see-through head-mounted display, a television device, a notebook personal computer, a video camera, an electronic book, a game device, etc.
  • the display device 1 may include a sealed module.
  • the display module may be provided with a circuit section or flexible printed circuit (FPC) for inputting and outputting signals from the outside to the light-emitting region.
  • FPC flexible printed circuit
  • Fig. 21 is a diagram showing an example of the appearance of a smartphone 400.
  • the smartphone 400 includes a display unit 401 that displays various information, and an operation unit 403 that includes buttons and the like that accept operation inputs by a user.
  • the display unit 401 is configured by the display device 1 according to this embodiment.
  • Figures 22 and 23 are diagrams each showing an example of the external appearance of a digital still camera 410.
  • Figure 22 shows a front view of the digital still camera 410
  • Figure 23 shows a rear view of the digital still camera 410.
  • the digital still camera 410 is, for example, a lens-interchangeable single-lens reflex type, and has an interchangeable photographing lens unit (interchangeable lens) 413 approximately in the center of the front of a camera main body (camera body) 411, and a grip part 415 for the photographer to hold on the left side of the front.
  • interchangeable photographing lens unit interchangeable lens
  • a monitor 417 is provided at a position shifted to the left from the center of the back of the camera body 411.
  • An electronic viewfinder (eyepiece window) 419 is provided at the top of the monitor 417. By looking through the electronic viewfinder 419, the photographer can visually confirm the optical image of the subject guided by the photographing lens unit 413 and determine the composition. Either or both of the monitor 417 and the electronic viewfinder 419 are configured by the display device 1 according to the embodiment.
  • FIG. 24 is a diagram showing an example of the appearance of a head mounted display 420.
  • the head mounted display 420 has, for example, ear hooks 423 for wearing on the user's head on both sides of a glasses-shaped display unit 421.
  • the display unit 421 is constituted by the display device 1 according to the embodiment.
  • Fig. 25 is a diagram showing an example of the appearance of the see-through head mounted display 430.
  • the see-through head mounted display 430 is composed of a main body 431, an arm 433, and a lens barrel 435.
  • the main body 431 is connected to the arm 433 and glasses 437. Specifically, an end of the main body 431 in the long side direction is joined to the arm 433, and one side of the main body 431 is connected to the glasses 437 via a connecting member (not shown).
  • the main body 431 may be directly attached to the head of the human body.
  • the main body 431 incorporates a control board and a display unit for controlling the operation of the see-through head mounted display 430.
  • the arm 433 connects the main body 431 to the telescope tube 435 and supports the telescope tube 435. Specifically, the arm 433 is coupled to an end of the main body 431 and an end of the telescope tube 435, respectively, and fixes the telescope tube 435.
  • the arm 433 also incorporates a signal line for communicating data related to images provided from the main body 431 to the telescope tube 435.
  • the lens barrel 435 projects image light provided from the main body 431 via the arm 433 through the lenses of the glasses 437 toward the eyes of the user wearing the see-through head mounted display 430.
  • the display unit of the main body 431 is configured by the display device 1 according to the embodiment.
  • FIG. 26 is a diagram showing an example of the external appearance of a television device 440.
  • the television device 440 has an image display screen unit 441.
  • the image display screen unit 441 includes, for example, a front panel 443 and a filter glass 445.
  • the image display screen unit 441 is configured by the display device 1 according to the embodiment.
  • FIG. 27 and Fig. 28 are diagrams showing an example of the internal configuration of the vehicle 600.
  • Fig. 27 shows the interior of the vehicle 600 from the rear to the front
  • Fig. 28 shows the interior of the vehicle 600 from the diagonally rear to the diagonally front.
  • the vehicle 600 has a center display 701 (701C, 701L, 701R), a console display 702, a head-up display 703, a digital rear mirror 704, a steering wheel display 705, and a rear entertainment display 706. Any or all of these displays 701 to 706 are configured by the display device 1 according to the embodiment.
  • the center display 701 is disposed on the dashboard 605 in a position facing the driver's seat 601 and the passenger seat 602.
  • Figs. 27 and 28 show an example of a horizontally elongated center display 701 extending from the driver's seat 601 to the passenger seat 602
  • the screen size and location of the center display 701 are arbitrary.
  • the center display 701 can display information detected by various sensors. As a specific example, the center display 701 can display an image captured by an image sensor, an image showing the distance to an obstacle in front of or beside the vehicle measured by a ToF sensor, and the body temperature of a passenger detected by an infrared sensor.
  • the center display 701 can be used to display, for example, at least one of safety-related information, operation-related information, a life log, health-related information, authentication/identification-related information, and entertainment-related information.
  • the safety-related information includes information such as detection of drowsiness, detection of distraction, detection of tampering by children in the vehicle, whether or not a seat belt is fastened, and detection of an occupant being left behind, and is information detected, for example, by a sensor arranged on the back side of the center display 701.
  • the operation-related information is obtained by detecting gestures related to the operation of the occupant using a sensor.
  • the detected gestures may include operations of various facilities in the vehicle 600. For example, operations of air conditioning equipment, navigation equipment, AV equipment, lighting equipment, etc. are detected.
  • the life log includes the life log of all occupants. For example, the life log includes a record of the actions of each occupant while on board.
  • the health-related information is obtained by detecting the body temperature of the occupant using a temperature sensor, and inferring the health condition of the occupant based on the detected body temperature.
  • the face of the occupant may be captured using an image sensor, and the health condition of the occupant may be inferred from the facial expression captured in the image.
  • the occupant may be spoken to by an automated voice and the occupant's health condition may be inferred based on the occupant's responses.
  • Authentication/identification related information includes a keyless entry function that uses a sensor to perform face authentication, and a function for automatically adjusting seat height and position using face recognition.
  • Entertainment related information includes a function for detecting operation information of an AV device by an occupant using a sensor, and a function for recognizing the occupant's face using a sensor and providing content suitable for the occupant via the AV device.
  • the console display 702 can be used to display life log information, for example.
  • the console display 702 is disposed near the shift lever 608 on the center console 607 between the driver's seat 601 and the passenger seat 602.
  • the console display 702 can also display information detected by various sensors.
  • the console display 702 may also display an image of the surroundings of the vehicle captured by an image sensor, or an image showing the distance to obstacles around the vehicle.
  • the head-up display 703 is virtually displayed behind the windshield 604 in front of the driver's seat 601.
  • the head-up display 703 can be used to display, for example, at least one of safety-related information, operation-related information, a life log, health-related information, authentication/identification-related information, and entertainment-related information. Since the head-up display 703 is often virtually positioned in front of the driver's seat 601, it is suitable for displaying information directly related to the operation of the vehicle 600, such as the speed of the vehicle 600 and the remaining fuel (battery) level.
  • the digital rear-view mirror 704 can not only display the rear of the vehicle 600, but can also display the state of passengers in the back seats. Therefore, by placing a sensor on the back side of the digital rear-view mirror 704, it can be used to display life log information, for example.
  • the steering wheel display 705 is disposed near the center of the steering wheel 606 of the vehicle 600.
  • the steering wheel display 705 can be used to display, for example, at least one of safety-related information, operation-related information, life log, health-related information, authentication/identification-related information, and entertainment-related information.
  • the steering wheel display 705 since the steering wheel display 705 is located near the driver's hands, it is suitable for displaying life log information such as the driver's body temperature, and for displaying information related to the operation of AV equipment, air conditioning equipment, etc.
  • the rear entertainment display 706 is attached to the back side of the driver's seat 601 and passenger seat 602, and is intended for viewing by rear seat passengers.
  • the rear entertainment display 706 can be used to display at least one of safety-related information, operation-related information, life log, health-related information, authentication/identification-related information, and entertainment-related information, for example.
  • information related to the rear seat passengers is displayed on the rear entertainment display 706.
  • the rear entertainment display 706 may display information related to the operation of AV equipment or air conditioning equipment, or may display the results of measuring the body temperature of the rear seat passengers using a temperature sensor.
  • Optical distance measurement methods are broadly divided into passive and active types.
  • Passive types measure distance by receiving light from an object without projecting light from the sensor onto the object.
  • Passive types include the lens focusing method, the stereo method, and the monocular vision method.
  • Active types measure distance by projecting light onto an object and receiving reflected light from the object with a sensor.
  • Active types include the optical radar method, the active stereo method, the photometric stereo method, the moire topography method, and the interference method.
  • the display device 1 according to the embodiment can be applied to any of these distance measurement methods.
  • a sensor arranged on the back side of the display device 1 according to the embodiment it is possible to perform the above-mentioned passive or active distance measurement.
  • the electronic devices to which the display device 1 according to each embodiment can be applied are not limited to the above examples.
  • the display device 1 according to each embodiment can be applied to the display unit of electronic devices in any field that perform display based on an image signal input from the outside or an image signal generated internally.
  • the technology according to the present disclosure can be applied to various products.
  • the display device 1 according to each embodiment may be realized as a display unit of any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, personal mobility, an airplane, a drone, a ship, a robot, a construction machine, or an agricultural machine (tractor), such as the above-mentioned vehicle 600.
  • the display device 1 according to each embodiment may be applied to a display unit included in an endoscopic surgery system, a microsurgery system, or the like.
  • the present technology can also be configured as follows.
  • a light emitting device comprising: (2) The protective layer has a lower moisture permeability than the wiring layer.
  • (3) the protective layer is formed so as to suppress the intrusion of moisture from the substrate side to the organic layer side; The light emitting device according to (1) or (2) above.
  • the protective layer extends along a direction intersecting a stacking direction of the substrate, the wiring layer, and the organic layer; The light emitting device according to (3) above.
  • a pad is further formed on the wiring layer.
  • the protective layer is formed so as to prevent moisture from penetrating from the pad side to the organic layer side.
  • the light emitting device according to any one of (1) to (4). (6) the protective layer extends along a stacking direction of the substrate, the wiring layer, and the organic layer; The light emitting device according to (5) above. (7) The protective layer is formed so as to surround the organic layer in a plan view. The light emitting device according to (6) above. (8) The protective layer is formed so as to surround the periphery of the pad in a plan view. The light emitting device according to (6) or (7) above. (9) A pad is further formed on the wiring layer.
  • the protective layer is formed so as to suppress intrusion of moisture from the substrate side to the organic layer side and from the pad side to the organic layer side.
  • the light emitting device according to (1) above. The protective layer is a first protective layer extending in a direction intersecting a stacking direction of the substrate, the wiring layer, and the organic layer; A second protective layer extending along the lamination direction; having The light emitting device according to (9) above. (11) the second protective layer is formed so as to surround the organic layer in a plan view; The light emitting device according to (10) above. (12) The second protective layer is formed so as to surround the periphery of the pad in a plan view. The light emitting device according to (10) or (11) above. (13) The second protective layer is connected to the first protective layer.
  • the light emitting device according to any one of (10) to (12). (14) One or both of the first protective layer and the second protective layer are provided in plurality. The light emitting device according to any one of (10) to (13).
  • the first protective layer is formed of an insulating material
  • the second protective layer is formed of one or both of an insulating material and a metallic material.
  • the light emitting device according to any one of (10) to (14).
  • the light emitting device according to any one of (10) to (15).
  • the second protective layer is connected to the first protective layer and the third protective layer. The light emitting device according to (16) above.
  • the second protective layer is connected to the substrate and the third protective layer;
  • a display device comprising: (20) A display device is provided, The display device includes: A substrate; A wiring layer laminated on the substrate; a pixel section including an organic layer laminated on the wiring layer, and a first electrode and a second electrode laminated to sandwich the organic layer; a protective layer provided in the wiring layer to prevent moisture from entering;

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Abstract

A light emission device according to an embodiment of the present disclosure comprises a substrate, a wiring layer laminated on the substrate, an organic layer laminated on the wiring layer, a first electrode and a second electrode laminated so as to sandwich the organic layer, and a protective layer that is provided in the wiring layer and that prevents the ingress of moisture.

Description

発光装置、表示装置及び電子機器Light-emitting device, display device and electronic device
 本開示は、発光装置、表示装置及び電子機器に関する。 This disclosure relates to light-emitting devices, display devices, and electronic devices.
 発光素子を備える発光装置や表示装置などが開発されている。例えば、有機エレクトロルミネッセンス素子(有機EL素子)を用いる発光素子は、低電圧直流駆動による高輝度発光が可能な発光素子として知られている。有機材料(例えば、有機化合物)などの材料は、水分によってその特性が劣化しやすい材料である。この水分による特性劣化を抑えるため、例えば、特許文献1や特許文献2などの技術が提案されている。 Light-emitting devices and display devices equipped with light-emitting elements have been developed. For example, light-emitting elements using organic electroluminescence elements (organic EL elements) are known as light-emitting elements capable of emitting high-brightness light when driven by low-voltage direct current. Materials such as organic materials (e.g., organic compounds) are materials whose characteristics are easily deteriorated by moisture. To suppress this deterioration of characteristics due to moisture, technologies such as those disclosed in Patent Document 1 and Patent Document 2 have been proposed.
特開2019-194970号公報JP 2019-194970 A 特開2018-73760号公報JP 2018-73760 A
 しかしながら、前述のいずれの技術でも、有機材料を含む有機層上の保護膜を工夫することでパッドなどから有機層への水分侵入を抑えるが、その抑制力が不十分な場合があり、有機材料などの材料の特性が劣化し、発光特性が低下することがある。また、前述のいずれの技術でも、基板側から有機層への水分侵入が考慮されておらず、有機材料などの材料の特性が劣化し、発光特性が低下することがある。 However, in all of the above technologies, the intrusion of moisture from pads or the like into the organic layer is prevented by designing a protective film on the organic layer that contains the organic material, but this prevention effect may be insufficient, which may cause the properties of the organic material and other materials to deteriorate and the light-emitting properties to decrease. In addition, in all of the above technologies, the intrusion of moisture from the substrate side into the organic layer is not taken into consideration, which may cause the properties of the organic material and other materials to deteriorate and the light-emitting properties to decrease.
 そこで、本開示では、発光特性の低下を抑えることが可能な発光装置、表示装置及び電子機器を提案する。 Therefore, this disclosure proposes a light-emitting device, a display device, and an electronic device that can suppress the deterioration of light-emitting characteristics.
 本開示の一形態に係る発光装置は、基板と、前記基板に積層された配線層と、前記配線層に積層された有機層と、前記有機層を挟むように積層された第1電極及び第2電極と、前記配線層中に設けられ、水分の侵入を抑える保護層と、を備える。 A light-emitting device according to one embodiment of the present disclosure includes a substrate, a wiring layer laminated on the substrate, an organic layer laminated on the wiring layer, a first electrode and a second electrode laminated to sandwich the organic layer, and a protective layer provided in the wiring layer to prevent moisture from entering.
 本開示の一形態に係る表示装置は、基板と、前記基板に積層された配線層と、前記配線層に積層された有機層、及び、前記有機層を挟むように積層された第1電極及び第2電極を含む画素部と、前記配線層中に設けられ、水分の侵入を抑える保護層と、を備える。 A display device according to one embodiment of the present disclosure includes a substrate, a wiring layer laminated on the substrate, an organic layer laminated on the wiring layer, a pixel portion including a first electrode and a second electrode laminated to sandwich the organic layer, and a protective layer provided in the wiring layer to prevent moisture from entering.
 本開示の一形態に係る電子機器は、表示装置を備え、前記表示装置は、基板と、前記基板に積層された配線層と、前記配線層に積層された有機層、及び、前記有機層を挟むように積層された第1電極及び第2電極を含む画素部と、前記配線層中に設けられ、水分の侵入を抑える保護層と、を有する。 An electronic device according to one embodiment of the present disclosure includes a display device, the display device having a substrate, a wiring layer laminated on the substrate, an organic layer laminated on the wiring layer, a pixel portion including a first electrode and a second electrode laminated to sandwich the organic layer, and a protective layer provided in the wiring layer to prevent moisture from entering.
本開示の実施形態に係る表示装置の構成例を示す平面図である。FIG. 1 is a plan view illustrating a configuration example of a display device according to an embodiment of the present disclosure. 本開示の実施形態に係る表示装置の構成例を示す断面図である。1 is a cross-sectional view illustrating a configuration example of a display device according to an embodiment of the present disclosure. 変形例1に係る表示装置の構成例を示す断面図である。FIG. 11 is a cross-sectional view showing a configuration example of a display device according to a first modified example. 変形例2に係る表示装置の構成例を示す断面図である。FIG. 11 is a cross-sectional view showing a configuration example of a display device according to Modification 2. 変形例3に係る表示装置の構成例を示す平面図である。FIG. 11 is a plan view showing a configuration example of a display device according to Modification 3. 変形例3に係る表示装置の構成例を示す断面図である。FIG. 11 is a cross-sectional view showing a configuration example of a display device according to Modification 3. 変形例4に係る表示装置の構成例を示す断面図である。FIG. 11 is a cross-sectional view showing a configuration example of a display device according to Modification 4. 変形例5に係る表示装置の構成例を示す断面図である。FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 5. 変形例6に係る表示装置の構成例を示す断面図である。FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 6. 変形例7に係る表示装置の構成例を示す断面図である。FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 7. 変形例8に係る表示装置の構成例を示す断面図である。FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 8. 変形例9に係る表示装置の構成例を示す断面図である。FIG. 13 is a cross-sectional view showing a configuration example of a display device according to Modification 9. 変形例10に係る表示装置の構成例を示す断面図である。FIG. 23 is a cross-sectional view showing a configuration example of a display device according to a modified example 10. 変形例11に係る表示装置の構成例を示す断面図である。FIG. 23 is a cross-sectional view showing a configuration example of a display device according to Modification 11. 変形例12に係る表示装置の構成例を示す平面図である。FIG. 23 is a plan view showing a configuration example of a display device according to a twelfth modification. 変形例13に係る表示装置の構成例を示す平面図である。FIG. 23 is a plan view showing a configuration example of a display device according to a thirteenth modification. 変形例14に係る表示装置の構成例を示す平面図である。FIG. 23 is a plan view showing a configuration example of a display device according to Modification 14. 本開示の実施形態に係る表示装置の製造方法の具体例1を説明するための図である。1A to 1C are diagrams for explaining a specific example 1 of a manufacturing method for a display device according to an embodiment of the present disclosure. 本開示の実施形態に係る表示装置の製造方法の具体例2を説明するための図である。11A to 11C are diagrams for explaining specific example 2 of the manufacturing method for a display device according to an embodiment of the present disclosure. 本開示の実施形態に係る表示装置の製造方法の具体例3を説明するための図である。11A to 11C are diagrams for explaining a specific example 3 of the manufacturing method for a display device according to an embodiment of the present disclosure. スマートフォンの外観の一例を示す図である。FIG. 1 is a diagram illustrating an example of the appearance of a smartphone. デジタルスチルカメラの外観の一例を示す図である。FIG. 1 is a diagram showing an example of the appearance of a digital still camera. デジタルスチルカメラの外観の一例を示す図である。FIG. 1 is a diagram showing an example of the appearance of a digital still camera. ヘッドマウントディスプレイの外観の一例を示す図である。FIG. 1 is a diagram illustrating an example of the appearance of a head mounted display. シースルーヘッドマウントディスプレイの外観の一例を示す図である。FIG. 1 is a diagram showing an example of the appearance of a see-through head mounted display. テレビジョン装置の外観の一例を示す図である。FIG. 1 is a diagram illustrating an example of the appearance of a television device. 乗物の内部構成の一例を示す図である。FIG. 2 is a diagram showing an example of the internal configuration of a vehicle. 乗物の内部構成の一例を示す図である。FIG. 2 is a diagram showing an example of the internal configuration of a vehicle.
 以下に本開示の実施形態について図面に基づいて詳細に説明する。実施形態は、実施例や変形例なども含む。なお、実施形態により本開示に係る発光装置、表示装置及び電子機器などが限定されるものではない。また、以下の各実施形態において、基本的に同一の部位には同一の符号を付することにより重複する説明を省略する。 The following describes in detail the embodiments of the present disclosure with reference to the drawings. The embodiments include examples and modified examples. Note that the light-emitting devices, display devices, and electronic devices according to the present disclosure are not limited to the embodiments. In addition, in the following embodiments, the same reference numerals are used to designate the same parts, and redundant descriptions will be omitted.
 以下の1または複数の実施形態は、各々が独立に実施されることが可能である。一方で、以下の複数の実施形態は少なくとも一部が他の実施形態の少なくとも一部と適宜組み合わされて実施されてもよい。これら複数の実施形態は、互いに異なる新規な特徴を含み得る。したがって、各実施形態は、互いに異なる目的または課題を解決することに寄与し得、互いに異なる効果を奏し得る。 The following one or more embodiments can be implemented independently. However, at least a portion of the following embodiments may be implemented in appropriate combination with at least a portion of the other embodiments. These embodiments may include novel features that are different from one another. Thus, each embodiment may contribute to solving a different purpose or problem, and may provide different effects.
 以下に示す項目順序に従って本開示を説明する。
 1.実施形態
 1-1.表示装置の構成例
 1-2.表示装置の変形例
 1-3.表示装置の製造方法
 1-4.作用・効果
 2.他の実施形態
 3.適用例
 4.付記
The present disclosure will be described in the following order.
1. Embodiment 1-1. Configuration example of display device 1-2. Modified example of display device 1-3. Manufacturing method of display device 1-4. Function and effect 2. Other embodiments 3. Application example 4. Supplementary notes
 <1.実施形態>
 <1-1.表示装置の構成例>
 本実施形態に係る表示装置1の構成例について図1及び図2を参照して説明する。図1及び図2は、それぞれ本実施形態に係る表示装置1の概略構成の一例を説明するための図である。
1. Embodiment
<1-1. Configuration example of display device>
An example of the configuration of a display device 1 according to the present embodiment will be described with reference to Fig. 1 and Fig. 2. Fig. 1 and Fig. 2 are diagrams for explaining an example of a schematic configuration of the display device 1 according to the present embodiment.
 (平面図)
 図1は、本実施形態に係る表示装置1の構成例を示す平面図である。
(Plan view)
FIG. 1 is a plan view showing an example of the configuration of a display device 1 according to the present embodiment.
 図1に示すように、本実施形態に係る表示装置1は、画素部11と、水平駆動回路12と、垂直駆動回路13と、パッド部14とを備える。図1の例では、画素部11が表示装置1のほぼ中央の領域に配置されており、水平駆動回路12、垂直駆動回路13及びパッド部14はそれぞれ画素部11の周辺領域に配置されているが、それらの配置は限定されるものではない。 As shown in FIG. 1, the display device 1 according to this embodiment includes a pixel section 11, a horizontal drive circuit 12, a vertical drive circuit 13, and a pad section 14. In the example of FIG. 1, the pixel section 11 is disposed in an area substantially in the center of the display device 1, and the horizontal drive circuit 12, the vertical drive circuit 13, and the pad section 14 are disposed in the peripheral areas of the pixel section 11, but their arrangement is not limited thereto.
 画素部11は、複数の発光素子11aを有する。各発光素子11aは、例えば、垂直方向(図1中のY軸方向)にM個及び水平方向(図1中のX軸方向)にN個並ぶよう、合計M×N個マトリクス状に配置されている。これらの発光素子11aは表示装置1の各画素として機能し、画素部11は画素領域を生成する。各発光素子11aは、例えば、有機EL素子を用いる発光素子である。 The pixel section 11 has a plurality of light-emitting elements 11a. The light-emitting elements 11a are arranged in a matrix of M x N elements in total, for example, M elements in the vertical direction (Y-axis direction in FIG. 1) and N elements in the horizontal direction (X-axis direction in FIG. 1). These light-emitting elements 11a function as pixels of the display device 1, and the pixel section 11 generates a pixel area. Each light-emitting element 11a is, for example, a light-emitting element that uses an organic EL element.
 水平駆動回路12及び垂直駆動回路13は、それぞれ発光素子11aを駆動するための駆動回路である。水平駆動回路12には複数の走査線12m(m=1~M)が接続されている。各走査線12mは各発光素子11aを走査するための線である。垂直駆動回路13には複数の信号線13n(n=1~N)が接続されている。各信号線13nは各発光素子11aに各種電圧を供給するための線である。なお、表示装置1は、例えば、各発光素子11aに駆動電圧などを供給する給電線(不図示)なども備える。 The horizontal drive circuit 12 and the vertical drive circuit 13 are drive circuits for driving the light-emitting elements 11a. A plurality of scanning lines 12m (m = 1 to M) are connected to the horizontal drive circuit 12. Each scanning line 12m is a line for scanning each light-emitting element 11a. A plurality of signal lines 13n (n = 1 to N) are connected to the vertical drive circuit 13. Each signal line 13n is a line for supplying various voltages to each light-emitting element 11a. The display device 1 also includes, for example, a power supply line (not shown) for supplying a drive voltage, etc. to each light-emitting element 11a.
 パッド部14は、複数のパッド14aを有する。各パッド14aは、例えば、水平方向(図1中のX軸方向)に並ぶように配置されている。図1の例では、パッド14aの個数は五つであるが、これに限定されるものではない。また、各パッド14aは、それぞれ平面視で矩形状に形成されているが、これに限定されるものではない。各パッド14aは、例えば、はんだ付けのためにパターンを露出させた銅箔により構成されている。 The pad section 14 has a plurality of pads 14a. The pads 14a are arranged, for example, in a row in the horizontal direction (the X-axis direction in FIG. 1). In the example of FIG. 1, the number of pads 14a is five, but this is not limited to this. Also, each pad 14a is formed in a rectangular shape in a plan view, but this is not limited to this. Each pad 14a is made of, for example, copper foil with an exposed pattern for soldering.
 ここで、表示装置1は、複数の発光素子11aを有する発光装置(有機デバイス)の一例であり、例えば、単独で用いられたり、各種装置に搭載されたりする。また、表示装置1、カラー表示が可能な表示装置であっても、カラー表示以外の表示が可能な表示装置であってもよい。 Here, the display device 1 is an example of a light-emitting device (organic device) having a plurality of light-emitting elements 11a, and may be used alone or mounted in various devices, for example. Furthermore, the display device 1 may be a display device capable of color display, or a display device capable of displaying other than color.
 (断面図)
 図2は、図1のA1-A1線で切断した表示装置1の構成例を示す断面図である。
(Cross-section view)
FIG. 2 is a cross-sectional view showing an example of the configuration of the display device 1 taken along the line A1-A1 in FIG.
 図2に示すように、表示装置1は、基板10と、配線層20と、アノード層30と、有機層40と、カソード層50と、保護層60とを備える。基板10の上面には、配線層20、アノード層30、有機層40、カソード層50及び保護層60が、その記載順番で積層されている。なお、表示装置1は、例えば、カラーフィルタ層(例えば、赤色、緑色及び青色などのカラーフィルタ)及びレンズ層(例えば、マイクロレンズ)の一方又は両方を有してもよい。 As shown in FIG. 2, the display device 1 includes a substrate 10, a wiring layer 20, an anode layer 30, an organic layer 40, a cathode layer 50, and a protective layer 60. On the upper surface of the substrate 10, the wiring layer 20, the anode layer 30, the organic layer 40, the cathode layer 50, and the protective layer 60 are stacked in the order shown. The display device 1 may also include, for example, one or both of a color filter layer (e.g., color filters of red, green, and blue) and a lens layer (e.g., microlenses).
 基板10は、各種の層、すなわち配線層20、アノード層30、有機層40、カソード層50及び保護層60などを支持する支持体である。この基板10には、例えば、回路を構成する各種のトランジスタなどが設けられてもよい。 The substrate 10 is a support that supports various layers, namely the wiring layer 20, the anode layer 30, the organic layer 40, the cathode layer 50, and the protective layer 60. For example, various transistors that constitute a circuit may be provided on this substrate 10.
 配線層20は、基板10の上面に積層されている。この配線層20は、複数の配線21と、絶縁層22とを有する。配線層20は、例えば、多層配線層であり、各配線21は絶縁層22を介して多層となるように配置されている。この配線層20の上面側にはパッド14aが形成されている。絶縁層22及び保護層60には開口部20aが形成されており、パッド14aの上面は露出している。 The wiring layer 20 is laminated on the upper surface of the substrate 10. This wiring layer 20 has a plurality of wires 21 and an insulating layer 22. The wiring layer 20 is, for example, a multi-layer wiring layer, and each wire 21 is arranged in a multi-layer manner via the insulating layer 22. A pad 14a is formed on the upper surface side of this wiring layer 20. An opening 20a is formed in the insulating layer 22 and the protective layer 60, and the upper surface of the pad 14a is exposed.
 また、配線層20は、複数の保護層23、24を有する。これらの保護層23、24は、配線層20中に設けられており、水分の侵入を抑える層である。これらの保護層23、24は、水分が通る量を抑える層、すなわち配線層20よりも水分透過率が低い層である。保護層23は第1保護層に相当し、保護層24は第2保護層に相当する。 The wiring layer 20 also has multiple protective layers 23, 24. These protective layers 23, 24 are provided in the wiring layer 20 and are layers that suppress the intrusion of moisture. These protective layers 23, 24 are layers that suppress the amount of moisture that passes through, that is, layers that have a lower moisture permeability than the wiring layer 20. The protective layer 23 corresponds to the first protective layer, and the protective layer 24 corresponds to the second protective layer.
 保護層23は、基板10側から有機層40側への水分の侵入を抑えるように形成されている。この保護層23は、積層方向(図2中のZ軸方向)に交差する方向に沿って延伸している。例えば、保護層23は、積層方向に直交する方向(図2中のY軸方向)に延伸する。保護層23は、例えば、表示装置1の全面(例えば、基板10の上面の全面)にわたって形成されている。積層方向は、基板10、配線層20、アノード層30、有機層40、カソード層50及び保護層60などが積層されて並んでいる方向である。 The protective layer 23 is formed to prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side. This protective layer 23 extends along a direction intersecting the stacking direction (Z-axis direction in FIG. 2). For example, the protective layer 23 extends in a direction perpendicular to the stacking direction (Y-axis direction in FIG. 2). The protective layer 23 is formed, for example, over the entire surface of the display device 1 (for example, the entire upper surface of the substrate 10). The stacking direction is the direction in which the substrate 10, wiring layer 20, anode layer 30, organic layer 40, cathode layer 50, protective layer 60, etc. are stacked and arranged.
 また、保護層23は、例えば、絶縁材料により形成されている。絶縁材料としては、例えば、窒化膜(SiN)、酸化アルミ(AlO)などが用いられるが、これらに限定されるものではなく、半導体製造で一般的に用いられる水分透過率が低い絶縁材料が用いられる。水分透過率は、例えば、1×10-5g/m・day以下であることが望ましい。保護層23の層厚は、材料次第であるが、例えば、数nm~数十nmである。また、保護層23の層厚は、表示装置1の全領域で同等であるが、複数の領域(例えば、画素領域、周辺領域)に応じて異なっていてもよい。例えば、保護層23の層厚は、画素領域の方が周辺領域よりも厚くなるように設定される。 The protective layer 23 is formed of, for example, an insulating material. Examples of insulating materials include, but are not limited to, nitride film (SiN), aluminum oxide (AlO), etc., and insulating materials having low moisture permeability that are generally used in semiconductor manufacturing are used. The moisture permeability is preferably, for example, 1×10 −5 g/m 2 ·day or less. The thickness of the protective layer 23 depends on the material, but is, for example, several nm to several tens of nm. The thickness of the protective layer 23 is the same in the entire region of the display device 1, but may be different depending on multiple regions (for example, pixel region, peripheral region). For example, the thickness of the protective layer 23 is set so that the pixel region is thicker than the peripheral region.
 保護層24は、パッド14a側から有機層40側への水分の侵入を抑えるように形成されている。パッド14a側とは配線層20におけるパッド14aを含む領域であり、有機層40側とは配線層20における有機層40の下方の領域である。保護層24は、積層方向(図2中のZ軸方向)に沿って延伸しており、少なくともパッド14a側と有機層40側との間に位置している。例えば、保護層24は、配線層20の上面から下方に向かって積層方向に延伸しているが、積層方向に沿って延伸していればよく、積層方向に対して斜めに延伸してもよい。なお、図1の例では、保護層24は、平面視で画素部11(例えば、有機層40)の周囲を囲むように枠形状に形成されている。この枠形状の保護層24は、画素部11と水平駆動回路12との間を通過し、画素部11と垂直駆動回路13との間を通過するように配置されている。 The protective layer 24 is formed to prevent moisture from penetrating from the pad 14a side to the organic layer 40 side. The pad 14a side is a region of the wiring layer 20 that includes the pad 14a, and the organic layer 40 side is a region of the wiring layer 20 below the organic layer 40. The protective layer 24 extends along the stacking direction (Z-axis direction in FIG. 2) and is located at least between the pad 14a side and the organic layer 40 side. For example, the protective layer 24 extends in the stacking direction from the upper surface of the wiring layer 20 downward, but it is sufficient that the protective layer 24 extends along the stacking direction, and it may extend obliquely with respect to the stacking direction. In the example of FIG. 1, the protective layer 24 is formed in a frame shape so as to surround the periphery of the pixel unit 11 (for example, the organic layer 40) in a plan view. This frame-shaped protective layer 24 is disposed so as to pass between the pixel unit 11 and the horizontal drive circuit 12 and between the pixel unit 11 and the vertical drive circuit 13.
 また、保護層24は、例えば、絶縁材料、金属材料、あるいは、絶縁材料及び金属材料の組み合わせの材料により形成されてもよい。保護層24は、いずれの材料であっても、水分侵入をブロックするようにレイアウトされている。絶縁材料としては、例えば、窒化膜(SiN)、酸化アルミ(AlO)などが用いられ、金属材料としては、例えば、銅、アルミ、タングステンなどが用いられるが、これらに限定されるものではなく、半導体製造で一般的に用いられる水分透過率が低い絶縁材料や金属材料が用いられる。水分透過率は、例えば、1×10-5g/m・day以下であることが望ましい。 The protective layer 24 may be formed of, for example, an insulating material, a metal material, or a combination of an insulating material and a metal material. The protective layer 24 is laid out so as to block moisture intrusion, regardless of the material. Examples of the insulating material include nitride film (SiN), aluminum oxide (AlO), and the like, and examples of the metal material include, but are not limited to, copper, aluminum, and tungsten, and insulating materials and metal materials with low moisture permeability that are generally used in semiconductor manufacturing are used. The moisture permeability is preferably, for example, 1×10 −5 g/m 2 ·day or less.
 ここで、保護層24は、保護層60及び保護層23の間に位置しており、保護層60及び保護層23の両方に接続されている。詳しくは、保護層24の上端は保護層60の下面に接続されており、保護層24の下端は保護層23の上面に接続されている。このように保護層23、保護層24及び保護層60が接続されており、有機層40は保護層23、保護層24及び保護層60によって囲まれている。これにより、有機層40に対する水分の侵入が抑えられている。 Here, protective layer 24 is located between protective layer 60 and protective layer 23, and is connected to both protective layer 60 and protective layer 23. More specifically, the upper end of protective layer 24 is connected to the lower surface of protective layer 60, and the lower end of protective layer 24 is connected to the upper surface of protective layer 23. In this manner, protective layer 23, protective layer 24, and protective layer 60 are connected, and organic layer 40 is surrounded by protective layer 23, protective layer 24, and protective layer 60. This prevents moisture from penetrating organic layer 40.
 アノード層30は、配線層20の上面に積層されている。このアノード層30は、複数のアノード電極31と、分離層32とを有する。各アノード電極31は、発光素子11a毎に配線層20の上面に設けられている。これらのアノード電極31は、例えば、金属材料により形成されており、光を反射してもよい。また、各アノード電極31は、配線層20中のビア配線などの配線21に接続されている。分離層32は、配線層20の上面に積層されており、各アノード電極31を電気的に分離する。この分離層32は、例えば、絶縁材料により形成されており、光を反射する反射層などを有してもよい。アノード電極31は、例えば下部電極として機能し、第1電極に相当する。 The anode layer 30 is laminated on the upper surface of the wiring layer 20. The anode layer 30 has a plurality of anode electrodes 31 and a separation layer 32. Each anode electrode 31 is provided on the upper surface of the wiring layer 20 for each light-emitting element 11a. These anode electrodes 31 are formed, for example, from a metal material and may reflect light. Each anode electrode 31 is connected to a wiring 21 such as a via wiring in the wiring layer 20. The separation layer 32 is laminated on the upper surface of the wiring layer 20 and electrically separates each anode electrode 31. The separation layer 32 is formed, for example, from an insulating material and may have a reflective layer that reflects light. The anode electrode 31 functions, for example, as a lower electrode and corresponds to a first electrode.
 有機層40は、アノード層30の上面に積層されている。この有機層40は、少なくとも発光層を含み、例えば、白色、赤色、緑色又は青色を発光するように形成されている。図2の例では、有機層40は各アノード電極31を別として一層で示されているが、実際には、例えば、発光層を含む複数層により構成されている。 The organic layer 40 is laminated on the upper surface of the anode layer 30. This organic layer 40 includes at least a light-emitting layer, and is formed to emit, for example, white, red, green, or blue light. In the example of FIG. 2, the organic layer 40 is shown as a single layer excluding each anode electrode 31, but in reality, it is composed of multiple layers including, for example, a light-emitting layer.
 カソード層50は、有機層40上に積層されている。このカソード層50は、例えば、光透過性が高く、かつ、導電性を有する材料(一例として、透明導電材料)により形成されている。カソード層50は、カソード電極である。カソード電極は、例えば上部電極として機能し、第2電極に相当する。 The cathode layer 50 is laminated on the organic layer 40. The cathode layer 50 is formed, for example, from a material that is highly light-transmitting and conductive (for example, a transparent conductive material). The cathode layer 50 is a cathode electrode. The cathode electrode functions, for example, as an upper electrode, and corresponds to a second electrode.
 ここで、発光素子11aは、アノード電極31上に有機層40及びカソード層50が順次積層されて構成されている。有機層40で発光した光は、有機層40のカソード層50側の面から出射する。発光素子11aの発光面の平面形状は、概ね、アノード電極31の平面形状に倣った形状である。 Here, the light-emitting element 11a is configured by sequentially stacking an organic layer 40 and a cathode layer 50 on an anode electrode 31. Light emitted from the organic layer 40 is emitted from the surface of the organic layer 40 facing the cathode layer 50. The planar shape of the light-emitting surface of the light-emitting element 11a roughly follows the planar shape of the anode electrode 31.
 保護層60は、カソード層50及び配線層20などの上面に積層されている。この保護層60は、カソード層50及び配線層20などを覆い、外部側から有機層40側への水分の侵入を抑えるように形成されている。保護層60は、例えば、絶縁材料により形成されている。絶縁材料としては、例えば、窒化膜(SiN)、酸化アルミ(AlO)などが用いられるが、これらに限定されるものではなく、半導体製造で一般的に用いられる水分透過率が低い絶縁材料が用いられる。水分透過率は、他の保護層23や保護層24などと同様、例えば、1×10-5g/m・day以下であることが望ましい。保護層60は、第3保護層に相当する。 The protective layer 60 is laminated on the upper surfaces of the cathode layer 50 and the wiring layer 20. The protective layer 60 is formed to cover the cathode layer 50 and the wiring layer 20, and to suppress the intrusion of moisture from the outside to the organic layer 40. The protective layer 60 is formed of, for example, an insulating material. Examples of the insulating material include, but are not limited to, nitride film (SiN) and aluminum oxide (AlO), and an insulating material with low moisture permeability that is generally used in semiconductor manufacturing is used. The moisture permeability is preferably, for example, 1×10 −5 g/m 2 ·day or less, similar to the other protective layers 23 and 24. The protective layer 60 corresponds to a third protective layer.
 このような構成の表示装置1によれば、保護層23が配線層20中に全面にわたって設けられている。これにより、基板10から配線層20を介する有機層40への水分の侵入が保護層23によって防がれている。また、保護層24が配線層20中のパッド14a側と有機層40側との間に設けられている。これにより、パッド14a(例えば、開口部20a)から配線層20を介する有機層40への水分の侵入が保護層24によって防がれている。また、保護層60がカソード層50や有機層40などを覆うように設けられている。これにより、外部から有機層40への水分の侵入も保護層60によって防がれている。このようにして、有機層40に対する水分の侵入を防ぐことが可能になるので、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。 In the display device 1 having such a configuration, the protective layer 23 is provided over the entire surface of the wiring layer 20. This prevents moisture from entering the organic layer 40 from the substrate 10 through the wiring layer 20. In addition, the protective layer 24 is provided between the pad 14a side and the organic layer 40 side in the wiring layer 20. This prevents moisture from entering the organic layer 40 from the pad 14a (e.g., the opening 20a) through the wiring layer 20 by the protective layer 24. In addition, the protective layer 60 is provided so as to cover the cathode layer 50, the organic layer 40, etc. This prevents moisture from entering the organic layer 40 from the outside by the protective layer 60. In this way, it is possible to prevent moisture from entering the organic layer 40, thereby suppressing the deterioration of the characteristics of the organic layer 40 due to moisture and suppressing the deterioration of the light-emitting characteristics.
 <1-2.表示装置の変形例>
 本実施形態に係る表示装置1の変形例1から14について図3から図17を参照して説明する。図3から図17は、それぞれ変形例1から14のいずれかに係る表示装置1の概略構成の一例を説明するための図である。
<1-2. Modified Examples of Display Device>
Modifications 1 to 14 of the display device 1 according to the present embodiment will be described with reference to Fig. 3 to Fig. 17. Fig. 3 to Fig. 17 are diagrams for explaining an example of a schematic configuration of the display device 1 according to any one of Modifications 1 to 14, respectively.
 (変形例1)
 図3は、変形例1に係る表示装置1の構成例を示す断面図である。変形例1は、前述の実施形態の図2に示す表示装置1の変形例であるため、図2に示す表示装置1との相違点について説明する。
(Variation 1)
Fig. 3 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 1. Modification 1 is a modification of the display device 1 shown in Fig. 2 of the above-described embodiment, and therefore differences from the display device 1 shown in Fig. 2 will be described.
 図3に示すように、変形例1に係る表示装置1において、保護層23は、パッド14aの下方の領域に存在せず、有機層40の下方の領域(例えば、画素領域に対向する領域)に存在するように形成されている。詳しくは、保護層23は、周辺領域の一部であるパッド部14(図1参照)を下方から覆わず、少なくとも画素部11(図1参照)の画素領域を下方から覆うように形成されている。なお、図3の例では、保護層24の下端は、保護層23の端部に接続されている。 As shown in FIG. 3, in the display device 1 according to the first modification, the protective layer 23 is not present in the region below the pads 14a, but is formed so as to be present in the region below the organic layer 40 (e.g., the region facing the pixel region). In detail, the protective layer 23 is formed so as not to cover from below the pad portion 14 (see FIG. 1), which is part of the peripheral region, but to cover from below at least the pixel region of the pixel portion 11 (see FIG. 1). In the example of FIG. 3, the lower end of the protective layer 24 is connected to the end of the protective layer 23.
 このような変形例1によれば、前述の実施形態と同様、基板10から配線層20を介する有機層40への水分の侵入を保護層23によって防ぎ、さらに、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。 In this modified example 1, as in the above-described embodiment, the protective layer 23 can prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40, and the protective layer 24 can prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics.
 (変形例2)
 図4は、変形例2に係る表示装置1の構成例を示す断面図である。変形例2は、変形例1の図3に示す表示装置1の変形例であるため、図3に示す表示装置1との相違点について説明する。
(Variation 2)
Fig. 4 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 2. Since the modified example 2 is a modified example of the display device 1 shown in Fig. 3 of the modified example 1, differences from the display device 1 shown in Fig. 3 will be described.
 図4に示すように、変形例2に係る表示装置1において、保護層23は、パッド14aと同じ上層側に位置する配線21の上方の領域に存在するように形成されている。例えば、配線層20に水分が残留している場合など、保護層23をできるだけ配線層20の上側に配置することが望ましい。一例として、パッド14aと同じ層よりも上側の層に保護層23を配置することが望ましい。 As shown in FIG. 4, in the display device 1 according to the second modification, the protective layer 23 is formed so as to be present in the region above the wiring 21 located on the same upper layer side as the pads 14a. For example, when moisture remains in the wiring layer 20, it is desirable to place the protective layer 23 as high up as possible in the wiring layer 20. As an example, it is desirable to place the protective layer 23 in a layer above the same layer as the pads 14a.
 このような変形例2によれば、変形例1に比べ、配線層20から有機層40への水分の侵入を保護層23によって確実に防ぐことが可能である。また、変形例1と同様、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。 In this modified example 2, compared to modified example 1, it is possible to reliably prevent moisture from penetrating from the wiring layer 20 to the organic layer 40 by the protective layer 23. Also, as in modified example 1, it is possible to prevent moisture from penetrating from the pad 14a to the organic layer 40 via the wiring layer 20 by the protective layer 24. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
 (変形例3)
 図5は、変形例3に係る表示装置1の構成例を示す平面図である。図6は、図5のA2-A2線で切断した表示装置1の構成例を示す断面図である。変形例3は、前述の実施形態の図1に示す表示装置1の変形例であるため、図1に示す表示装置1との相違点について説明する。
(Variation 3)
Fig. 5 is a plan view showing a configuration example of the display device 1 according to Modification 3. Fig. 6 is a cross-sectional view showing a configuration example of the display device 1 cut along the line A2-A2 in Fig. 5. Modification 3 is a modification of the display device 1 shown in Fig. 1 of the above-mentioned embodiment, so differences from the display device 1 shown in Fig. 1 will be described.
 図5に示すように、変形例3に係る表示装置1において、保護層24は、平面視でパッド14aごとにパッド14aの周囲を囲むように枠形状に形成されている。また、図6に示すように、保護層23はパッド14aの下方の領域だけに存在するように形成されている。図6の例では、パッド14aは保護層23及び保護層24により囲まれており、パッド14aの側面及び下面は、それらの面に対向する保護層23及び保護層24により覆われている。 As shown in FIG. 5, in the display device 1 according to the third modification, the protective layer 24 is formed in a frame shape so as to surround the periphery of each pad 14a in a plan view. Also, as shown in FIG. 6, the protective layer 23 is formed so as to exist only in the area below the pad 14a. In the example of FIG. 6, the pad 14a is surrounded by the protective layer 23 and the protective layer 24, and the side and bottom surfaces of the pad 14a are covered by the protective layer 23 and the protective layer 24 that face those surfaces.
 このような変形例3によれば、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって確実に防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。 In accordance with this modification 3, the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This makes it possible to suppress the deterioration of the characteristics of the organic layer 40 caused by moisture, and to suppress the deterioration of the light-emitting characteristics.
 (変形例4)
 図7は、変形例4に係る表示装置1の構成例を示す断面図である。変形例4は、変形例3の図6に示す表示装置1の変形例であるため、図6に示す表示装置1との相違点について説明する。
(Variation 4)
Fig. 7 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 4. Modification 4 is a modification of the display device 1 shown in Fig. 6 of Modification 3, and therefore differences from the display device 1 shown in Fig. 6 will be described.
 図7に示すように、変形例4に係る表示装置1において、保護層23は、配線層20中に全面にわたって存在するように形成されている。すなわち、保護層23は、パッド14aの下方の領域及び有機層40の下方の領域(例えば、画素領域に対向する領域)に存在するように形成されている。 As shown in FIG. 7, in the display device 1 according to the fourth modification, the protective layer 23 is formed so as to be present over the entire surface of the wiring layer 20. That is, the protective layer 23 is formed so as to be present in the region below the pad 14a and the region below the organic layer 40 (e.g., the region facing the pixel region).
 このような変形例4によれば、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって確実に防ぎ、さらに、基板10から配線層20を介する有機層40への水分の侵入を保護層23によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。 In accordance with this fourth modification, the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40, and the protective layer 23 can further prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40. This makes it possible to suppress the deterioration of the properties of the organic layer 40 due to moisture, and reliably suppress the deterioration of the light-emitting properties.
 (変形例5)
 図8は、変形例5に係る表示装置1の構成例を示す断面図である。変形例5は、変形例2(図4参照)と変形例3(図6参照)との組み合わせの例である。
(Variation 5)
8 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 5. Modification 5 is an example of a combination of Modification 2 (see FIG. 4) and Modification 3 (see FIG. 6).
 図8に示すように、変形例5に係る表示装置1において、保護層23は、変形例2と同様、パッド14aと同じ上層側に位置する配線21の上方の領域に存在するように形成されており、さらに、変形例3と同様、パッド14aの下方の領域に存在するように形成されている。なお、保護層24は、変形例3と同様、平面視でパッド14aごとにパッド14aの周囲を囲むように形成されている(図5参照)。 As shown in FIG. 8, in the display device 1 according to the fifth modification, the protective layer 23 is formed so as to be present in the region above the wiring 21 located on the same upper layer side as the pads 14a, as in the second modification, and further, is formed so as to be present in the region below the pads 14a, as in the third modification. Note that the protective layer 24 is formed so as to surround the periphery of each pad 14a in a planar view, as in the third modification (see FIG. 5).
 このような変形例5によれば、変形例2及び変形例3と同様の効果を得ることができる。 With this modification 5, the same effects as those of modification 2 and modification 3 can be obtained.
 (変形例6)
 図9は、変形例6に係る表示装置1の構成例を示す断面図である。変形例6は、前述の実施形態の図2に示す表示装置1の変形例であるため、図2に示す表示装置1との相違点について説明する。
(Variation 6)
Fig. 9 is a cross-sectional view showing a configuration example of the display device 1 according to Modification 6. Modification 6 is a modification of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, and therefore differences from the display device 1 shown in Fig. 2 will be described.
 図9に示すように、変形例6に係る表示装置1において、保護層23は存在せずに、保護層24が存在している。保護層24は、配線層20を貫通しており、配線層20を上面から下面まで延伸している。この保護層24の一端は保護層60に接続されており、その保護層24の他端は基板10に接続されている。なお、保護層24は、平面視で画素部11(例えば、有機層40)の周囲を囲むように枠形状に形成されている(図1参照)。 As shown in FIG. 9, in the display device 1 according to the sixth modification, the protective layer 23 is not present, but the protective layer 24 is present. The protective layer 24 penetrates the wiring layer 20 and extends through the wiring layer 20 from the top surface to the bottom surface. One end of the protective layer 24 is connected to the protective layer 60, and the other end of the protective layer 24 is connected to the substrate 10. The protective layer 24 is formed in a frame shape so as to surround the periphery of the pixel portion 11 (e.g., the organic layer 40) in a plan view (see FIG. 1).
 このような変形例6によれば、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって確実に防ぐことが可能であり、さらに、パッド14aの下方に位置する配線層20の一部から有機層40への水分の侵入を保護層24によって確実に防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。 In this manner, according to the sixth modification, the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40, and furthermore, the protective layer 24 can reliably prevent moisture from penetrating into the organic layer 40 from a part of the wiring layer 20 located below the pad 14a. This makes it possible to suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics.
 (変形例7)
 図10は、変形例7に係る表示装置1の構成例を示す断面図である。変形例7は、変形例3の図6に示す表示装置1の変形例であるため、図6に示す表示装置1との相違点について説明する。
(Variation 7)
Fig. 10 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 7. Since the modified example 7 is a modified example of the display device 1 shown in Fig. 6 of the modified example 3, differences from the display device 1 shown in Fig. 6 will be described.
 図10に示すように、変形例7に係る表示装置1において、保護層23は存在せずに、保護層24が存在している。保護層24は、配線層20を貫通しており、配線層20を上面から下面まで延伸している。この保護層24の一端は保護層60に接続されており、その保護層24の他端は基板10に接続されている。なお、保護層24は、平面視でパッド14aごとにパッド14aの周囲を囲むように枠形状に形成されている(図5参照)。 As shown in FIG. 10, in the display device 1 according to the seventh modification, the protective layer 23 is not present, but the protective layer 24 is present. The protective layer 24 penetrates the wiring layer 20 and extends through the wiring layer 20 from the top surface to the bottom surface. One end of the protective layer 24 is connected to the protective layer 60, and the other end of the protective layer 24 is connected to the substrate 10. The protective layer 24 is formed in a frame shape so as to surround the periphery of each pad 14a in a plan view (see FIG. 5).
 このような変形例7によれば、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって確実に防ぐことが可能であり、また、パッド14aの下方に位置する配線層20の一部から有機層40への水分の侵入を保護層24によって確実に防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。 In accordance with this modification 7, the protective layer 24 can reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40, and the protective layer 24 can reliably prevent moisture from penetrating from a part of the wiring layer 20 located below the pad 14a into the organic layer 40. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
 (変形例8)
 図11は、変形例8に係る表示装置1の構成例を示す断面図である。変形例8は、前述の実施形態の図2に示す表示装置1の変形例であるため、図2に示す表示装置1との相違点について説明する。
(Variation 8)
Fig. 11 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 8. Since the modified example 8 is a modified example of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 2 will be described.
 図11に示すように、変形例8に係る表示装置1において、保護層24は存在せずに、保護層23が存在している。保護層23は、パッド14aと同じ上層側に位置する配線21の上方の領域に存在し、パッド14aに接続するように形成されている。例えば、配線層20に水分が残留している場合など、保護層23をできるだけ配線層20の上側に配置することが望ましい。 As shown in FIG. 11, in the display device 1 according to the eighth modification, the protective layer 24 is not present, but the protective layer 23 is present. The protective layer 23 is present in the region above the wiring 21 located on the same upper layer side as the pad 14a, and is formed so as to connect to the pad 14a. For example, when moisture remains in the wiring layer 20, it is desirable to position the protective layer 23 as high as possible above the wiring layer 20.
 このような変形例8によれば、前述の実施形態に比べ、配線層20から有機層40への水分の侵入を保護層23によって確実に防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。 In this modification 8, compared to the above-described embodiment, the protective layer 23 can reliably prevent moisture from penetrating from the wiring layer 20 into the organic layer 40. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and suppress deterioration of the light-emitting characteristics.
 (変形例9)
 図12は、変形例9に係る表示装置1の構成例を示す断面図である。変形例9は、変形例8の図11に示す表示装置1の変形例であるため、図11に示す表示装置1との相違点について説明する。
(Variation 9)
Fig. 12 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 9. Since the modified example 9 is a modified example of the display device 1 shown in Fig. 11 of the modified example 8, differences from the display device 1 shown in Fig. 11 will be described.
 図12に示すように、変形例9に係る表示装置1において、保護層23は、配線層20の上面に存在するように形成されている。この保護層23は、パッド14aの上方まで延伸している。 As shown in FIG. 12, in the display device 1 according to the ninth modification, the protective layer 23 is formed so as to be present on the upper surface of the wiring layer 20. This protective layer 23 extends up to above the pads 14a.
 このような変形例9によれば、配線層20から有機層40への水分の侵入及びパッド14aから配線層20を介する有機層40への水分の侵入を保護層23によって確実に防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。 In accordance with this modification 9, the protective layer 23 can reliably prevent moisture from entering the organic layer 40 from the wiring layer 20 and from entering the organic layer 40 from the pad 14a via the wiring layer 20. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
 (変形例10)
 図13は、変形例10に係る表示装置1の構成例を示す断面図である。変形例10は、前述の実施形態の図2に示す表示装置1の変形例であるため、図2に示す表示装置1との相違点について説明する。
(Variation 10)
Fig. 13 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 10. Since the modified example 10 is a modified example of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 2 will be described.
 図13に示すように、変形例10に係る表示装置1において、複数の保護層23が存在している。図13の例では、保護層23の層数は二つであり、各保護層23は互いに平行に配置されており、各保護層23の個々の厚さ(積層方向の長さ)は異なっているが、これに限定されるものではない。つまり、保護層23の層数は特に限定されるものではなく、各保護層23は互いに平行でなくてもよく、また、各保護層23の厚さは異なっていても、同じであってもよい。図13の例では、各保護層23は、基板10に近いほど厚さが厚くなるように形成されているが、その逆に、基板10から遠いほど厚さが厚くなるように形成されてもよい。 As shown in FIG. 13, a display device 1 according to variant 10 has a plurality of protective layers 23. In the example of FIG. 13, the number of protective layers 23 is two, the protective layers 23 are arranged parallel to each other, and the thicknesses (lengths in the stacking direction) of the protective layers 23 are different, but this is not limited to this. In other words, the number of protective layers 23 is not particularly limited, the protective layers 23 do not have to be parallel to each other, and the thicknesses of the protective layers 23 may be different or the same. In the example of FIG. 13, the protective layers 23 are formed so that they are thicker the closer they are to the substrate 10, but conversely, they may be formed so that they are thicker the farther they are from the substrate 10.
 このような変形例10によれば、前述の実施形態に比べ、基板10から配線層20を介する有機層40への水分の侵入を複数の保護層23によって確実に防ぐことが可能である。また、前述の実施形態と同様に、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。 In this modification 10, compared to the previously described embodiment, it is possible to reliably prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40 by using the multiple protective layers 23. Also, as in the previously described embodiment, it is possible to prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40 by using the protective layer 24. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
 (変形例11)
 図14は、変形例11に係る表示装置1の構成例を示す断面図である。変形例11は、前述の実施形態の図2に示す表示装置1の変形例であるため、図2に示す表示装置1との相違点について説明する。
(Modification 11)
Fig. 14 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 11. Since the modified example 11 is a modified example of the display device 1 shown in Fig. 2 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 2 will be described.
 図14に示すように、変形例11に係る表示装置1において、複数の保護層24が存在している。図14の例では、保護層24の層数は二つであり、各保護層24は互いに平行に配置されており、各保護層24の個々の幅(積層方向に直交する方向の長さ)は異なっているが、これに限定されるものではない。つまり、保護層24の層数は特に限定されるものではなく、各保護層24は互いに平行でなくてもよく、また、各保護層24の幅は異なっていても、同じであってもよい。図14の例では、各保護層24は、パッド14aに近いほど幅が広くなるように形成されているが、その逆に、パッド14aから遠いほど幅が広くなるように形成されてもよい。 As shown in FIG. 14, a display device 1 according to the eleventh modification has a plurality of protective layers 24. In the example of FIG. 14, the number of protective layers 24 is two, the protective layers 24 are arranged parallel to each other, and the widths (lengths in the direction perpendicular to the stacking direction) of the protective layers 24 are different, but this is not limited to this. In other words, the number of protective layers 24 is not particularly limited, the protective layers 24 do not have to be parallel to each other, and the widths of the protective layers 24 may be different or the same. In the example of FIG. 14, the protective layers 24 are formed so that the closer they are to the pads 14a, the wider they are, but conversely, they may be formed so that the farther they are from the pads 14a, the wider they are.
 このような変形例11によれば、前述の実施形態に比べ、パッド14aから配線層20を介する有機層40への水分の侵入を複数の保護層24によって確実に防ぐことが可能である。また、前述の実施形態と同様に、基板10から配線層20を介する有機層40への水分の侵入を保護層23によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。 In this modification 11, compared to the previously described embodiment, it is possible to reliably prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40 by using the multiple protective layers 24. Also, as in the previously described embodiment, it is possible to prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40 by using the protective layer 23. This makes it possible to suppress deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress deterioration of the light-emitting characteristics.
 (変形例12)
 図15は、変形例12に係る表示装置1の構成例を示す断面図である。変形例12は、前述の実施形態の図1に示す表示装置1の変形例であるため、図1に示す表示装置1との相違点について説明する。
(Variation 12)
Fig. 15 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 12. Since the modified example 12 is a modified example of the display device 1 shown in Fig. 1 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 1 will be described.
 図15に示すように、変形例12に係る表示装置1において、保護層24は、画素部11とパッド部14との間に位置するように、平面視で一直線に形成されている。 As shown in FIG. 15, in the display device 1 according to the modified example 12, the protective layer 24 is formed in a straight line in a plan view so as to be located between the pixel section 11 and the pad section 14.
 このような変形例12によれば、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。なお、前述の実施形態(図2参照)と同様に、基板10から配線層20を介する有機層40への水分の侵入を保護層23によって防ぐことができる。 In accordance with this modification 12, the protective layer 24 can prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics. As in the previous embodiment (see FIG. 2), the protective layer 23 can prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40.
 (変形例13)
 図16は、変形例13に係る表示装置1の構成例を示す断面図である。変形例13は、変形例3の図5に示す表示装置1の変形例であるため、図5に示す表示装置1との相違点について説明する。
(Variation 13)
Fig. 16 is a cross-sectional view showing a configuration example of the display device 1 according to the modification 13. Since the modification 13 is a modification of the display device 1 shown in Fig. 5 of the modification 3, differences from the display device 1 shown in Fig. 5 will be described.
 図16に示すように、変形例13に係る表示装置1において、保護層24は、平面視でパッド部14の周囲を囲むように枠形状に形成されている。 As shown in FIG. 16, in the display device 1 according to the modified example 13, the protective layer 24 is formed in a frame shape so as to surround the periphery of the pad portion 14 in a plan view.
 このような変形例13によれば、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。 In this modification 13, the protective layer 24 can prevent moisture from entering the organic layer 40 from the pad 14a via the wiring layer 20. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and suppress the deterioration of the light-emitting characteristics.
 (変形例14)
 図17は、変形例14に係る表示装置1の構成例を示す断面図である。変形例14は、前述の実施形態の図1に示す表示装置1の変形例であるため、図1に示す表示装置1との相違点について説明する。
(Modification 14)
Fig. 17 is a cross-sectional view showing a configuration example of the display device 1 according to the modified example 14. Since the modified example 14 is a modified example of the display device 1 shown in Fig. 1 of the above-mentioned embodiment, differences from the display device 1 shown in Fig. 1 will be described.
 図17に示すように、変形例14に係る表示装置1において、保護層24は、平面視で画素部11、水平駆動回路12及び垂直駆動回路13の周囲を囲むように枠形状に形成されている。 As shown in FIG. 17, in the display device 1 according to the modification 14, the protective layer 24 is formed in a frame shape so as to surround the pixel section 11, the horizontal drive circuit 12, and the vertical drive circuit 13 in a plan view.
 このような変形例14によれば、パッド14aから配線層20を介する有機層40への水分の侵入を保護層24によって防ぐことが可能である。これにより、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。なお、前述の実施形態(図2参照)と同様に、基板10から配線層20を介する有機層40への水分の侵入を保護層23によって防ぐことができる。 In accordance with this modification 14, the protective layer 24 can prevent moisture from penetrating from the pad 14a through the wiring layer 20 into the organic layer 40. This can suppress the deterioration of the characteristics of the organic layer 40 due to moisture, and reliably suppress the deterioration of the light-emitting characteristics. As in the previous embodiment (see FIG. 2), the protective layer 23 can prevent moisture from penetrating from the substrate 10 through the wiring layer 20 into the organic layer 40.
 以上のような変形例1から14は、あくまでも例示であり、変形例1から14の個々の一部を変更してもよく、あるいは、変形例1から14のいずれかを選択して組み合わせてもよい。また、保護層23及び保護層24が存在する場合、保護層24は保護層23に接続されなくてもよいが、有機層40に対する水分の侵入を抑えるためには、保護層24が保護層23に接続されることが望ましい。また、保護層24は保護層60に接続されなくてもよいが、有機層40に対する水分の侵入を抑えるためには、保護層24は保護層60に接続されることが望ましい。 The above-mentioned modified examples 1 to 14 are merely examples, and each of the modified examples 1 to 14 may be partially modified, or any of the modified examples 1 to 14 may be selected and combined. Furthermore, when protective layer 23 and protective layer 24 are present, protective layer 24 does not have to be connected to protective layer 23, but in order to prevent moisture from penetrating into organic layer 40, it is desirable that protective layer 24 be connected to protective layer 23. Furthermore, protective layer 24 does not have to be connected to protective layer 60, but in order to prevent moisture from penetrating into organic layer 40, it is desirable that protective layer 24 be connected to protective layer 60.
 <1-3.表示装置の製造方法>
 本実施形態に係る表示装置1の製造方法の具体例1から3について図18から図20を参照して説明する。図18から図20は、それぞれ表示装置1の製造方法の具体例1から3のいずれかを説明するための図である。
<1-3. Manufacturing method of display device>
Specific examples 1 to 3 of the manufacturing method for the display device 1 according to the present embodiment will be described with reference to Fig. 18 to Fig. 20. Fig. 18 to Fig. 20 are diagrams for explaining any one of specific examples 1 to 3 of the manufacturing method for the display device 1, respectively.
 (製造方法の具体例1)
 図18は、表示装置1の製造方法の具体例1を説明するための図である。
(Specific Example of Manufacturing Method 1)
FIG. 18 is a diagram for explaining a specific example 1 of a manufacturing method for the display device 1. In FIG.
 図18に示すように、基板10の上面に配線層20が積層される。この配線層20に含まれる配線21及び絶縁層22は、通常の半導体製造技術(例えば、リソグラフィプロセス)により形成される。このとき、保護層23も積層されて形成され、また、パッド14aも形成され、さらに、ビア配線などの配線24aが保護層24として形成される。 As shown in FIG. 18, a wiring layer 20 is laminated on the upper surface of the substrate 10. The wiring 21 and insulating layer 22 included in this wiring layer 20 are formed by normal semiconductor manufacturing techniques (e.g., lithography process). At this time, a protective layer 23 is also laminated and formed, and a pad 14a is also formed, and further, wiring 24a such as a via wiring is formed as the protective layer 24.
 なお、保護層23の形成のためには、例えば、コンタクトストッパ膜などの膜形成工程が配線工程に設けられてもよい。これは、以下の製造方法の具体例2及び具体例3でも同様である。 In addition, in order to form the protective layer 23, for example, a film formation process such as a contact stopper film may be provided in the wiring process. This is also the case in the following specific example 2 and specific example 3 of the manufacturing method.
 次に、配線層20の上面にアノード層30、有機層40、カソード層50及び保護層60がその順番で積層される。これにより、各発光素子11aが形成される。その後、パッド14aの上部に開口部20aがリソグラフィプロセス/加工プロセスにより形成され、パッド14aの上面が露出する。 Next, the anode layer 30, organic layer 40, cathode layer 50, and protective layer 60 are laminated in that order on the upper surface of the wiring layer 20. This forms each light-emitting element 11a. After that, an opening 20a is formed above the pad 14a by a lithography process/fabrication process, exposing the upper surface of the pad 14a.
 このような製造工程では、保護層24を配線24aにより形成するため、保護層24を形成するための追加工程を不要とすることができる。 In this manufacturing process, the protective layer 24 is formed using the wiring 24a, making it possible to eliminate the need for an additional process for forming the protective layer 24.
 (製造方法の具体例2)
 図19は、表示装置1の製造方法の具体例2を説明するための図である。
(Specific Example of Manufacturing Method 2)
FIG. 19 is a diagram for explaining a second specific example of the manufacturing method of the display device 1. In FIG.
 図19に示すように、基板10の上面に配線層20が積層される。この配線層20に含まれる配線21及び絶縁層22は、通常の半導体製造技術(例えば、リソグラフィプロセス)により形成される。このとき、保護層23も積層されて形成され、また、パッド14aも形成される。 As shown in FIG. 19, a wiring layer 20 is laminated on the upper surface of the substrate 10. The wiring 21 and insulating layer 22 included in this wiring layer 20 are formed by normal semiconductor manufacturing techniques (e.g., lithography process). At this time, a protective layer 23 is also laminated and formed, and the pad 14a is also formed.
 次に、配線層20の上面に保護層24形成用の溝M1がリソグラフィプロセス又は加工プロセスにより掘られる。この溝M1の位置は、保護層24を形成するための所望の位置である。そして、その溝M1に水分透過率が低い材料(例えば、窒化膜、酸化アルミなど)が充填され、溝M1が埋められて平坦化が実行される。これにより、保護層24が形成される。 Next, a groove M1 for forming the protective layer 24 is dug in the upper surface of the wiring layer 20 by a lithography process or a processing process. The position of this groove M1 is the desired position for forming the protective layer 24. Then, the groove M1 is filled with a material with low moisture permeability (e.g., nitride film, aluminum oxide, etc.), and the groove M1 is filled and planarized. In this way, the protective layer 24 is formed.
 次いで、配線層20の上面にアノード層30、有機層40、カソード層50及び保護層60がその順番で積層される。これにより、各発光素子11aが形成される。その後、パッド14aの上部に開口部20aがリソグラフィプロセス又は加工プロセスにより形成され、パッド14aの上面が露出する。 Next, the anode layer 30, the organic layer 40, the cathode layer 50, and the protective layer 60 are laminated in that order on the upper surface of the wiring layer 20. This forms each light-emitting element 11a. After that, an opening 20a is formed above the pad 14a by a lithography process or a processing process, and the upper surface of the pad 14a is exposed.
 (製造方法の具体例3)
 図20は、表示装置1の製造方法の具体例3を説明するための図である。
(Specific Example of Manufacturing Method 3)
FIG. 20 is a diagram for explaining a specific example 3 of the manufacturing method for the display device 1. In FIG.
 図20に示すように、基板10の上面に配線層20が積層される。この配線層20に含まれる配線21及び絶縁層22は、通常の半導体製造技術(例えば、リソグラフィプロセス)により形成される。このとき、保護層23も積層されて形成され、また、パッド14aも形成される。次に、配線層20の上面にアノード層30、有機層40、カソード層50及び保護層60がその順番で積層される。 As shown in FIG. 20, a wiring layer 20 is laminated on the upper surface of the substrate 10. The wiring 21 and insulating layer 22 included in this wiring layer 20 are formed by normal semiconductor manufacturing techniques (e.g., lithography process). At this time, a protective layer 23 is also laminated and formed, and a pad 14a is also formed. Next, an anode layer 30, an organic layer 40, a cathode layer 50, and a protective layer 60 are laminated in that order on the upper surface of the wiring layer 20.
 次いで、保護層60の上面に保護層24形成用の溝M2がリソグラフィプロセス又は加工プロセスにより掘られる。この溝M2の位置は、保護層24を形成するための所望の位置である。そして、その溝M2に水分透過率が低い材料(例えば、窒化膜、酸化アルミなど)が充填され、溝M2が埋められる。これにより、保護層24を含む保護層70が形成される。なお、必要に応じて平坦化やエッチバックが実行されてもよい。 Next, a groove M2 for forming the protective layer 24 is dug in the upper surface of the protective layer 60 by a lithography process or a processing process. The position of this groove M2 is the desired position for forming the protective layer 24. Then, a material with low moisture permeability (e.g., nitride film, aluminum oxide, etc.) is filled into the groove M2 to fill the groove M2. In this way, the protective layer 70 including the protective layer 24 is formed. Note that planarization or etch-back may be performed as necessary.
 その後、パッド14aの上部に開口部20aがリソグラフィプロセス又は加工プロセスにより形成され、パッド14aの上面が露出する。 Then, an opening 20a is formed in the upper part of the pad 14a by a lithography process or a processing process, and the upper surface of the pad 14a is exposed.
 以上のような表示装置1の製造方法の具体例1から3はあくまでも例示であり、他の製造方法により表示装置1を製造してもよい。 The specific examples 1 to 3 of the manufacturing method of the display device 1 described above are merely examples, and the display device 1 may be manufactured by other manufacturing methods.
 <1-4.作用・効果>
 以上説明したように、本実施形態に係る表示装置1は、基板10と、基板10に積層された配線層20と、配線層20に積層された有機層40と、有機層40を挟むように積層された第1電極及び第2電極(例えば、アノード電極31及びカソード電極(カソード層50))と、配線層20中に設けられ、水分の侵入を抑える保護層23及び保護層24の一方又は両方と、を備える。これにより、配線層20から有機層40への水分の侵入を抑えることが可能になるので、水分による有機層40の特性の低下を抑制し、発光特性の低下を抑えることができる。例えば、水分が基板10やパッド14aから配線層20を介して有機層40に侵入することを保護層23及び保護層24の一方又は両方によって防ぐことが可能であり、発光特性の低下を確実に抑えることができる。
<1-4. Actions and Effects>
As described above, the display device 1 according to the present embodiment includes the substrate 10, the wiring layer 20 laminated on the substrate 10, the organic layer 40 laminated on the wiring layer 20, the first electrode and the second electrode (e.g., the anode electrode 31 and the cathode electrode (cathode layer 50)) laminated so as to sandwich the organic layer 40, and one or both of the protective layer 23 and the protective layer 24 provided in the wiring layer 20 to suppress the intrusion of moisture. This makes it possible to suppress the intrusion of moisture from the wiring layer 20 into the organic layer 40, thereby suppressing the deterioration of the characteristics of the organic layer 40 due to moisture and suppressing the deterioration of the light-emitting characteristics. For example, it is possible to prevent moisture from intruding into the organic layer 40 from the substrate 10 or the pad 14a through the wiring layer 20 by one or both of the protective layer 23 and the protective layer 24, and the deterioration of the light-emitting characteristics can be reliably suppressed.
 また、保護層23及び保護層24の一方又は両方は、配線層20よりも水分透過率が低い層であってもよい。これにより、基板10側から有機層40側への水分の侵入を抑え、水分による有機層40の特性の低下を確実に抑えることができる。 Furthermore, one or both of protective layers 23 and 24 may be layers having a lower moisture permeability than wiring layer 20. This can prevent moisture from penetrating from substrate 10 to organic layer 40, and reliably prevent the deterioration of the properties of organic layer 40 due to moisture.
 また、保護層23は、基板10側から有機層40側への水分の侵入を抑えるように形成されていてもよい。これにより、基板10側から有機層40側への水分の侵入を抑え、水分による有機層40の特性の低下を確実に抑えることができる。 The protective layer 23 may also be formed to prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side. This prevents moisture from penetrating from the substrate 10 side to the organic layer 40 side, and reliably prevents the deterioration of the properties of the organic layer 40 due to moisture.
 また、保護層23は、基板10、配線層20及び有機層40の積層方向に交差する方向に沿って延伸してもよい。これにより、基板10側から有機層40側への水分の侵入を抑えることができる。 The protective layer 23 may also be stretched in a direction intersecting the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40. This can prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side.
 また、表示装置1は、配線層20に形成されたパッド14aをさらに備え、保護層24は、パッド14a側から有機層40側への水分の侵入を抑えるように形成されていてもよい。これにより、パッド14a側から有機層40側への水分の侵入を抑え、水分による有機層40の特性の低下を確実に抑えることができる。 The display device 1 may further include a pad 14a formed on the wiring layer 20, and the protective layer 24 may be formed to prevent moisture from penetrating from the pad 14a side to the organic layer 40 side. This prevents moisture from penetrating from the pad 14a side to the organic layer 40 side, and reliably prevents degradation of the characteristics of the organic layer 40 due to moisture.
 また、保護層24は、基板10、配線層20及び有機層40の積層方向に沿って延伸してもよい。これにより、パッド14a側から有機層40側への水分の侵入を抑えることができる。 The protective layer 24 may also extend along the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40. This can prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
 また、保護層24は、平面視で有機層40の周囲を囲むように形成されていてもよい(図1及び図17参照)。これにより、パッド14a側から有機層40側への水分の侵入を抑えることができる。 The protective layer 24 may also be formed so as to surround the organic layer 40 in plan view (see Figs. 1 and 17). This makes it possible to prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
 また、保護層24は、平面視でパッド14aの周囲を囲むように形成されていてもよい(図5及び図16参照)。これにより、パッド14a側から有機層40側への水分の侵入を抑えることができる。 The protective layer 24 may also be formed to surround the pad 14a in plan view (see Figs. 5 and 16). This can prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
 また、表示装置1は、配線層20に形成されたパッド14aをさらに備え、保護層23及び保護層24は、基板10側から有機層40側への水分の侵入及びパッド14a側から有機層40側への水分の侵入を抑えるように形成されていてもよい。これにより、基板10側から有機層40側への水分の侵入及びパッド14a側から有機層40側への水分の侵入を抑え、水分による有機層40の特性の低下を確実に抑えることができる。 The display device 1 may further include a pad 14a formed on the wiring layer 20, and the protective layer 23 and the protective layer 24 may be formed to suppress the intrusion of moisture from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side. This suppresses the intrusion of moisture from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side, and reliably suppresses the deterioration of the characteristics of the organic layer 40 due to moisture.
 また、保護層23は、基板10、配線層20及び有機層40の積層方向に交差する方向に沿って延伸し、保護層24は、基板10、配線層20及び有機層40の積層方向に沿って延伸してもよい。これにより、基板10側から有機層40側への水分の侵入及びパッド14a側から有機層40側への水分の侵入を確実に抑えることができる。 In addition, the protective layer 23 may extend along a direction intersecting the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40, and the protective layer 24 may extend along the stacking direction of the substrate 10, the wiring layer 20, and the organic layer 40. This can reliably prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side.
 また、保護層23及び保護層24の両方が存在する場合でも、保護層24は、平面視で有機層40の周囲を囲むように形成されていてもよい。これにより、パッド14a側から有機層40側への水分の侵入を確実に抑えることができる。 Even if both protective layer 23 and protective layer 24 are present, protective layer 24 may be formed to surround organic layer 40 in plan view. This can reliably prevent moisture from penetrating from pad 14a to organic layer 40.
 また、保護層23及び保護層24の両方が存在する場合でも、保護層24は、平面視でパッド14aの周囲を囲むように形成されていてもよい。これにより、パッド14a側から有機層40側への水分の侵入を確実に抑えることができる。 Even if both protective layer 23 and protective layer 24 are present, protective layer 24 may be formed to surround pad 14a in plan view. This can reliably prevent moisture from penetrating from pad 14a to organic layer 40.
 また、保護層24は、保護層23に接続されていてもよい。これにより、基板10側から有機層40側への水分の侵入及びパッド14a側から有機層40側への水分の侵入を確実に抑えることができる。 In addition, protective layer 24 may be connected to protective layer 23. This can reliably prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side and from the pad 14a side to the organic layer 40 side.
 また、保護層23及び保護層23の一方又は両方は、それぞれ複数設けられていてもよい。これにより、基板10側から有機層40側への水分の侵入及びパッド14a側から有機層40側への水分の侵入の一方又は両方を確実に抑えることができる。 Furthermore, one or both of the protective layers 23 and 23 may be provided in multiples. This can reliably prevent moisture from penetrating from the substrate 10 side to the organic layer 40 side and/or moisture from the pad 14a side to the organic layer 40 side.
 また、保護層23は、絶縁材料により形成されており、保護層24は、絶縁材料及び金属材料の一方又は両方により形成されていてもよい。これにより、通常の半導体製造技術を用いて保護層23及び保護層24を容易に形成することができる。 In addition, protective layer 23 may be formed from an insulating material, and protective layer 24 may be formed from one or both of an insulating material and a metallic material. This allows protective layer 23 and protective layer 24 to be easily formed using normal semiconductor manufacturing techniques.
 また、表示装置1は、第2電極(カソード電極(カソード層50))に積層され、水分の侵入を抑える保護層60をさらに備えてもよい。これにより、外部から有機層40側への水分の侵入を抑えることが可能になるので、水分による有機層40の特性の低下を抑制し、発光特性の低下を確実に抑えることができる。 The display device 1 may further include a protective layer 60 that is laminated to the second electrode (cathode electrode (cathode layer 50)) and prevents moisture from entering. This makes it possible to prevent moisture from entering the organic layer 40 from the outside, thereby preventing deterioration of the properties of the organic layer 40 due to moisture and reliably preventing deterioration of the light-emitting properties.
 また、保護層24は、保護層23及び保護層60に接続されていてもよい。これにより、パッド14a側から有機層40側への水分の侵入を確実に抑えることができる。 In addition, protective layer 24 may be connected to protective layer 23 and protective layer 60. This can reliably prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
 また、保護層24は、基板10及び保護層60に接続されていてもよい。これにより、パッド14a側から有機層40側への水分の侵入を確実に抑えることができる。 The protective layer 24 may also be connected to the substrate 10 and the protective layer 60. This can reliably prevent moisture from penetrating from the pad 14a side to the organic layer 40 side.
 <2.他の実施形態>
 上述した実施形態(実施例、変形例)に係る構成や処理などは、上記の実施形態以外にも種々の異なる形態にて実施されてもよい。例えば、構成や処理などは、上述した例に限らず、種々の態様であってもよい。また、例えば、上記文書中や図面中で示した構成、処理手順、具体的名称、各種のデータやパラメータを含む情報については、特記する場合を除いて任意に変更することができる。また、上述した実施形態(実施例、変形例)に係る構成や処理などは、適宜組み合わせされてもよい。また、本明細書に記載された効果はあくまで例示であって限定されるものではなく、他の効果があってもよい。
2. Other embodiments
The configurations and processes according to the above-mentioned embodiments (examples, modifications) may be implemented in various different forms other than the above-mentioned embodiments. For example, the configurations and processes may be various forms, not limited to the above-mentioned examples. In addition, for example, the configurations, processing procedures, specific names, and information including various data and parameters shown in the above documents and drawings can be changed arbitrarily unless otherwise specified. In addition, the configurations and processes according to the above-mentioned embodiments (examples, modifications) may be appropriately combined. In addition, the effects described in this specification are merely examples and are not limited, and other effects may be present.
 例えば、基板10の構成材料としては、半導体材料やガラス材料、プラスチック材料などを用いることができる。半導体基板に形成されたトランジスタによって駆動回路を構成する場合には、例えば、シリコンから成る半導体基板にウェル領域を設け、ウェル内にトランジスタを形成する構成とすることができる。一方、薄膜トランジスタなどによって駆動回路を構成する場合には、ガラス材料やプラスチック材料から成る基板を用いてその上に半導体薄膜を形成し駆動回路を形成することができる。各種の配線は、周知の構成や構造とすることが可能である。 For example, the constituent material of the substrate 10 can be a semiconductor material, a glass material, a plastic material, or the like. When configuring the drive circuit using transistors formed on a semiconductor substrate, for example, a well region can be provided in a semiconductor substrate made of silicon, and the transistors can be formed in the well. On the other hand, when configuring the drive circuit using thin film transistors or the like, a substrate made of glass or plastic material can be used, and a semiconductor thin film can be formed on the substrate to form the drive circuit. The various wiring can have well-known configurations and structures.
 また、発光素子11aを構成する材料としては、透明な有機材料や無機材料から適宜好適なものが選択されて用いられる。発光素子11aは、例えば、透明材料層の上にレジストを形成し、エッチングを施すことによって得られる。 The material constituting the light-emitting element 11a is appropriately selected from transparent organic materials and inorganic materials. The light-emitting element 11a is obtained, for example, by forming a resist on a transparent material layer and performing etching.
 また、発光素子11aは、光を共振させる共振器構造を備える構成とされてもよい。発光素子11aが共振器構造を備えることによって、発光素子11aの発光色を所定の表示色に設定することができるので、カラーフィルタは基本的には不要となる。ただし、波長が長い光の色純度を更に向上させるために、表示装置1は、赤色表示用の発光素子11aに対応したカラーフィルタを更に備えている構成とされてもよい。あるいは、表示色全般の色純度の向上のために、表示装置1は、赤色表示用の発光素子11a、緑色表示用の発光素子11aおよび青色表示用の発光素子11aに対応したカラーフィルタをさらに備える構成とされてもよい。 The light-emitting element 11a may also be configured to have a resonator structure that resonates light. By having the light-emitting element 11a have a resonator structure, the light-emitting color of the light-emitting element 11a can be set to a predetermined display color, so color filters are basically unnecessary. However, in order to further improve the color purity of light with a long wavelength, the display device 1 may also be configured to further include a color filter corresponding to the light-emitting element 11a for displaying red. Alternatively, in order to improve the color purity of the display colors in general, the display device 1 may also be configured to further include color filters corresponding to the light-emitting element 11a for displaying red, the light-emitting element 11a for displaying green, and the light-emitting element 11a for displaying blue.
 また、カラーフィルタは、色材および/または量子ドットを構成する微粒子を含む構成にされてもよい。また、カラーフィルタは、所望の色材等を添加した周知のレジスト材料を用いて構成されればよい。色材として、周知の顔料や染料を用いることができる。また、量子ドットを構成する微粒子は、特に限定されるものではなく、例えば、発光性の半導体ナノ粒子が用いられてもよい。色材を含むカラーフィルタは、発光素子11aからの光のうち目的の波長範囲の光を透過させることでカラー表示を行う。また、量子ドットを構成する微粒子を含むカラーフィルタは、発光素子11aからの光の波長変換を行うことによってカラー表示を行う。 The color filter may be configured to include color materials and/or particles that make up quantum dots. The color filter may be configured using a known resist material to which desired color materials and the like have been added. Well-known pigments and dyes may be used as color materials. The particles that make up the quantum dots are not particularly limited, and luminescent semiconductor nanoparticles may be used, for example. A color filter that includes color materials displays color by transmitting light in a desired wavelength range from the light from the light-emitting element 11a. A color filter that includes particles that make up quantum dots displays color by converting the wavelength of the light from the light-emitting element 11a.
 また、カラーフィルタ配列(色パターン)としては、例えば、ベイヤー配列(例えば、RGBG、GRGB、RGGBなど)、RGB配列、RGBのストライプ配列、RGBのモザイク配列などの各種のパターンを用いることが可能であり、また、RGBの原色のカラーフィルタ以外にも、各種の補色のカラーフィルタを用いることが可能である。また、各カラーフィルタ(例えば、カラーフィルタ層)の積層位置は、発光素子11aから出射された光の光路上であれば、特に限定されるものではない。 Furthermore, as the color filter arrangement (color pattern), various patterns such as a Bayer arrangement (e.g., RGBG, GRGB, RGGB, etc.), an RGB arrangement, an RGB stripe arrangement, an RGB mosaic arrangement, etc., can be used, and in addition to the primary color filters of RGB, various complementary color filters can be used. Furthermore, the stacking position of each color filter (e.g., color filter layer) is not particularly limited as long as it is on the optical path of the light emitted from the light emitting element 11a.
 また、表示装置1において、発光素子11aの発光を制御する駆動回路などの構成は特に限定されるものではない。駆動回路を構成するトランジスタの構成は、特に限定されるものではなく、例えば、pチャネル型の電界効果トランジスタであってもよいし、nチャネル型の電界効果トランジスタであってもよい。 Furthermore, in the display device 1, the configuration of the drive circuit that controls the light emission of the light-emitting element 11a is not particularly limited. The configuration of the transistors that make up the drive circuit is not particularly limited, and may be, for example, a p-channel type field effect transistor or an n-channel type field effect transistor.
 また、表示装置1において、発光素子11aは、いわゆる上面発光型である構成とされる。例えば、有機エレクトロルミネッセンス素子から成る発光素子11aは、正孔輸送層、発光層、電子輸送層などを備えた有機層40を、第1電極と第2電極で挟まれることによって構成される。カソードを共通化する場合、例えば、第1電極がアノード電極31であり、第2電極がカソード電極(カソード層50)である。 In addition, in the display device 1, the light-emitting element 11a is configured as a so-called top-emitting type. For example, the light-emitting element 11a, which is an organic electroluminescence element, is configured by sandwiching an organic layer 40, which includes a hole transport layer, a light-emitting layer, an electron transport layer, etc., between a first electrode and a second electrode. When the cathode is shared, for example, the first electrode is the anode electrode 31, and the second electrode is the cathode electrode (cathode layer 50).
 第1電極は、例えば、白金(Pt)、金(Au)、銀(Ag)、クロム(Cr)、タングステン(W)、ニッケル(Ni)、銅(Cu)、鉄(Fe)、コバルト(Co)、もしくは、タンタル(Ta)などの仕事関数が高い金属の単体または合金などで形成されてもよい。また、第1電極は、誘電体多層膜またはアルミニウムなどの光反射性の高い薄膜の上に、酸化インジウム亜鉛(IZO)または酸化インジウムスズ(ITO)などの透明導電性材料を積層した積層電極として形成されてもよい。 The first electrode may be formed of, for example, a single metal or alloy having a high work function, such as platinum (Pt), gold (Au), silver (Ag), chromium (Cr), tungsten (W), nickel (Ni), copper (Cu), iron (Fe), cobalt (Co), or tantalum (Ta). The first electrode may also be formed as a laminated electrode in which a transparent conductive material, such as indium zinc oxide (IZO) or indium tin oxide (ITO), is laminated on a dielectric multilayer film or a thin film having high light reflectivity, such as aluminum.
 第2電極は、例えば、アルミニウム(Al)、銀(Ag)、マグネシウム(Mg)、カルシウム(Ca)、ナトリウム(Na)、ストロンチウム(Sr)、アルカリ金属と銀との合金、アルカリ土類金属と銀との合金、マグネシウムとカルシウムとの合金、またはアルミニウムとリチウムとの合金などの仕事関数が低い金属または合金などで形成されてもよい。また、第2電極は、酸化インジウム亜鉛(IZO)または酸化インジウムスズ(ITO)などの透明導電性材料にて形成されてもよく、上述した仕事関数が低い材料からなる層と、酸化インジウム亜鉛(IZO)または酸化インジウムスズ(ITO)などの透明導電性材料からなる層との積層電極として形成されてもよい。 The second electrode may be formed of a metal or alloy with a low work function, such as aluminum (Al), silver (Ag), magnesium (Mg), calcium (Ca), sodium (Na), strontium (Sr), an alloy of an alkali metal and silver, an alloy of an alkaline earth metal and silver, an alloy of magnesium and calcium, or an alloy of aluminum and lithium. The second electrode may also be formed of a transparent conductive material such as indium zinc oxide (IZO) or indium tin oxide (ITO), and may be formed as a laminated electrode of a layer made of the above-mentioned low work function material and a layer made of a transparent conductive material such as indium zinc oxide (IZO) or indium tin oxide (ITO).
 また、有機層40は、複数の材料層が積層されて成り、共通の連続膜として、第1電極上を含む全面に設けられる。有機層40は、第1電極と第2電極との間に電圧が印加されることによって発光する。有機層40は、例えば、第1電極側から、正孔注入層、正孔輸送層、発光層、電子輸送層及び電子注入層を順に積層した構造で構成される。有機層40を構成する正孔輸送材料、正孔輸送材料、電子輸送材料、有機発光材料は、限定されるものではなく、周知の材料を用いることができる。 The organic layer 40 is formed by laminating a plurality of material layers, and is provided as a common continuous film over the entire surface including the first electrode. The organic layer 40 emits light when a voltage is applied between the first electrode and the second electrode. The organic layer 40 is formed, for example, in a structure in which a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer are laminated in this order from the first electrode side. The hole transport material, hole transport material, electron transport material, and organic light emitting material that constitute the organic layer 40 are not limited, and well-known materials can be used.
 また、有機層40は、複数の発光層が積層された構造を含んでいてもよい。例えば、赤色発光、青色発光及び緑色発光の発光層を積層することによって、あるいは、青色発光及び黄色発光の発光層を積層することによって、白色で発光する発光素子11aを構成することができる。また、表示すべき色に応じて、発光素子11aごとに発光層を塗分ける構成とすることもできる。 The organic layer 40 may also include a structure in which multiple light-emitting layers are stacked. For example, a light-emitting element 11a that emits white light can be configured by stacking red-, blue-, and green-emitting light-emitting layers, or by stacking blue- and yellow-emitting light-emitting layers. Also, the light-emitting layers can be painted differently for each light-emitting element 11a depending on the color to be displayed.
 また、画素は、一つの発光素子11aにより構成されてもよく、複数の発光素子11aにより構成されてもよい。例えば、画素は、複数の副画素(発光素子11a)により構成されてもよい。具体的には、一つの画素は、赤色表示副画素、緑色表示副画素、及び、青色表示副画素の3種の副画素から成る構成を用いることができる。また、一つの画素は、それらの3種の副画素に更に1種類あるいは複数種類の副画素を加えた1組(例えば、輝度向上のために白色光を発光する副画素を加えた1組、色再現範囲を拡大するために補色を発光する副画素を加えた1組、色再現範囲を拡大するためにイエローを発光する副画素を加えた1組、色再現範囲を拡大するためにイエロー及びシアンを発光する副画素を加えた1組)を用いることができる。 A pixel may be composed of one light-emitting element 11a or may be composed of multiple light-emitting elements 11a. For example, a pixel may be composed of multiple sub-pixels (light-emitting elements 11a). Specifically, one pixel may be composed of three types of sub-pixels: a red display sub-pixel, a green display sub-pixel, and a blue display sub-pixel. One pixel may also be composed of a set of these three types of sub-pixels plus one or more types of sub-pixels (for example, a set of a sub-pixel that emits white light to improve brightness, a set of a sub-pixel that emits a complementary color to expand the color reproduction range, a set of a sub-pixel that emits yellow to expand the color reproduction range, or a set of sub-pixels that emit yellow and cyan to expand the color reproduction range).
 また、隣接する発光素子11aを区画する隔壁部が存在してもよく、この隔壁部は公知の無機材料や有機材料から適宜選択した材料を用いて形成されてもよい。例えば、隔壁部は、真空蒸着法やスパッタリング法に例示される物理的気相成長法(PVD法)、各種の化学的気相成長法(CVD法)などの周知の成膜方法と、エッチング法やリフトオフ法などの周知のパターニング法との組み合わせによって形成されてもよい。 Also, there may be a partition wall that separates adjacent light-emitting elements 11a, and this partition wall may be formed using a material appropriately selected from known inorganic materials or organic materials. For example, the partition wall may be formed by a combination of a known film formation method, such as a physical vapor deposition method (PVD method) exemplified by a vacuum deposition method or a sputtering method, or various chemical vapor deposition methods (CVD methods), and a known patterning method, such as an etching method or a lift-off method.
 また、画素は、発光部、レンズ部材及び波長選択部(例えば、カラーフィルタ)のいずれかをシフトさせるシフト構造を備える構成とされてもよい。 The pixel may also be configured to have a shift structure that shifts any of the light-emitting portion, the lens member, and the wavelength selection portion (e.g., a color filter).
 また、表示装置1の画素(ピクセル)の値としては、VGA(640,480)、S-VGA(800,600)、XGA(1024,768)、APRC(1152,900)、S-XGA(1280,1024)、U-XGA(1600,1200)、HD-TV(1920,1080)、Q-XGA(2048,1536)の他、(1920,1035)、(720,480)、(1280,960)等、画像表示用解像度の幾つかを例示することができるが、これらの値に限定するものではない。 The pixel values of the display device 1 can be, for example, VGA (640,480), S-VGA (800,600), XGA (1024,768), APRC (1152,900), S-XGA (1280,1024), U-XGA (1600,1200), HD-TV (1920,1080), Q-XGA (2048,1536), as well as (1920,1035), (720,480), (1280,960), and other image display resolutions, but are not limited to these values.
 <3.適用例>
 以上説明した実施形態に係る表示装置1は、電子機器に入力された映像信号、若しくは、電子機器内で生成した映像信号を、画像若しくは映像として表示する、あらゆる分野の電子機器の表示部として用いることができる。例えば、スマートフォンや携帯電話機等の携帯端末装置、デジタルスチルカメラ、ヘッドマウントディスプレイ(頭部装着型ディスプレイ)、シースルーヘッドマウントディスプレイ、テレビジョン装置、ノート型パーソナルコンピュータ、ビデオカメラ、電子ブック、ゲーム機器等の表示部として、実施形態に係る表示装置1を用いることができる。
<3. Application Examples>
The display device 1 according to the embodiment described above can be used as a display unit of electronic devices in various fields that displays a video signal input to the electronic device or a video signal generated within the electronic device as an image or video. For example, the display device 1 according to the embodiment can be used as a display unit of a mobile terminal device such as a smartphone or a mobile phone, a digital still camera, a head-mounted display, a see-through head-mounted display, a television device, a notebook personal computer, a video camera, an electronic book, a game device, etc.
 なお、実施形態に係る表示装置1は、封止された構成のモジュール形状のものを含んでもよい。表示モジュールには、外部から発光領域への信号等を入出力するための回路部やフレキシブルプリントサーキット(FPC)などが設けられていてもよい。 The display device 1 according to the embodiment may include a sealed module. The display module may be provided with a circuit section or flexible printed circuit (FPC) for inputting and outputting signals from the outside to the light-emitting region.
 以下に、実施形態に係る表示装置1を用いる電子機器の具体例(適用例)として、スマートフォン400、デジタルスチルカメラ410、ヘッドマウントディスプレイ420、シースルーヘッドマウントディスプレイ430、テレビジョン装置440、乗物600を例示する。ただし、ここで例示する具体例は一例に過ぎず、これに限られるものではない。 Below, specific examples (application examples) of electronic devices using the display device 1 according to the embodiment are exemplified as a smartphone 400, a digital still camera 410, a head mounted display 420, a see-through head mounted display 430, a television device 440, and a vehicle 600. However, the specific examples exemplified here are merely examples, and the present invention is not limited to these.
 (具体例1)
 図21は、スマートフォン400の外観の一例を示す図である。図21に示すように、スマートフォン400は、各種情報を表示する表示部401と、ユーザによる操作入力を受け付けるボタン等から構成される操作部403とを備える。表示部401は、本実施形態に係る表示装置1により構成される。
(Specific Example 1)
Fig. 21 is a diagram showing an example of the appearance of a smartphone 400. As shown in Fig. 21, the smartphone 400 includes a display unit 401 that displays various information, and an operation unit 403 that includes buttons and the like that accept operation inputs by a user. The display unit 401 is configured by the display device 1 according to this embodiment.
 (具体例2)
 図22及び図23は、それぞれデジタルスチルカメラ410の外観の一例を示す図である。図22はデジタルスチルカメラ410の正面図を示し、図23はデジタルスチルカメラ410の背面図を示す。図22及び図23に示すように、デジタルスチルカメラ410は、例えば、レンズ交換式一眼レフレックスタイプのものであり、カメラ本体部(カメラボディ)411の正面略中央に交換式の撮影レンズユニット(交換レンズ)413を有し、正面左側に撮影者が把持するためのグリップ部415を有している。
(Specific Example 2)
Figures 22 and 23 are diagrams each showing an example of the external appearance of a digital still camera 410. Figure 22 shows a front view of the digital still camera 410, and Figure 23 shows a rear view of the digital still camera 410. As shown in Figures 22 and 23, the digital still camera 410 is, for example, a lens-interchangeable single-lens reflex type, and has an interchangeable photographing lens unit (interchangeable lens) 413 approximately in the center of the front of a camera main body (camera body) 411, and a grip part 415 for the photographer to hold on the left side of the front.
 カメラ本体部411の背面中央から左側にずれた位置には、モニタ417が設けられている。モニタ417の上部には、電子ビューファインダ(接眼窓)419が設けられている。撮影者は、電子ビューファインダ419を覗くことによって、撮影レンズユニット413から導かれた被写体の光像を視認して構図決定を行うことが可能である。モニタ417及び電子ビューファインダ419の両方又は一方は、実施形態に係る表示装置1により構成される。 A monitor 417 is provided at a position shifted to the left from the center of the back of the camera body 411. An electronic viewfinder (eyepiece window) 419 is provided at the top of the monitor 417. By looking through the electronic viewfinder 419, the photographer can visually confirm the optical image of the subject guided by the photographing lens unit 413 and determine the composition. Either or both of the monitor 417 and the electronic viewfinder 419 are configured by the display device 1 according to the embodiment.
 (具体例3)
 図24は、ヘッドマウントディスプレイ420の外観の一例を示す図である。図24に示すように、ヘッドマウントディスプレイ420は、例えば、眼鏡形の表示部421の両側に、使用者の頭部に装着するための耳掛け部423を有している。表示部421は、実施形態に係る表示装置1により構成される。
(Specific Example 3)
Fig. 24 is a diagram showing an example of the appearance of a head mounted display 420. As shown in Fig. 24, the head mounted display 420 has, for example, ear hooks 423 for wearing on the user's head on both sides of a glasses-shaped display unit 421. The display unit 421 is constituted by the display device 1 according to the embodiment.
 (具体例4)
 図25は、シースルーヘッドマウントディスプレイ430の外観の一例を示す図である。図25に示すように、シースルーヘッドマウントディスプレイ430は、本体部431、アーム433および鏡筒435で構成される。本体部431は、アーム433および眼鏡437と接続される。具体的には、本体部431の長辺方向の端部はアーム433と結合され、本体部431の側面の一側は接続部材(図示せず)を介して眼鏡437と連結される。なお、本体部431は、直接的に人体の頭部に装着されてもよい。
(Specific Example 4)
Fig. 25 is a diagram showing an example of the appearance of the see-through head mounted display 430. As shown in Fig. 25, the see-through head mounted display 430 is composed of a main body 431, an arm 433, and a lens barrel 435. The main body 431 is connected to the arm 433 and glasses 437. Specifically, an end of the main body 431 in the long side direction is joined to the arm 433, and one side of the main body 431 is connected to the glasses 437 via a connecting member (not shown). The main body 431 may be directly attached to the head of the human body.
 本体部431は、シースルーヘッドマウントディスプレイ430の動作を制御するための制御基板や表示部を内蔵する。アーム433は、本体部431と鏡筒435とを接続し、鏡筒435を支える。具体的には、アーム433は、本体部431の端部および鏡筒435の端部とそれぞれ結合され、鏡筒435を固定する。また、アーム433は、本体部431から鏡筒435に提供される画像に係るデータを通信するための信号線を内蔵する。 The main body 431 incorporates a control board and a display unit for controlling the operation of the see-through head mounted display 430. The arm 433 connects the main body 431 to the telescope tube 435 and supports the telescope tube 435. Specifically, the arm 433 is coupled to an end of the main body 431 and an end of the telescope tube 435, respectively, and fixes the telescope tube 435. The arm 433 also incorporates a signal line for communicating data related to images provided from the main body 431 to the telescope tube 435.
 鏡筒435は、本体部431からアーム433を経由して提供される画像光を、眼鏡437のレンズを通じて、シースルーヘッドマウントディスプレイ430を装着するユーザの目に向かって投射する。このシースルーヘッドマウントディスプレイ430において、本体部431の表示部は、実施形態に係る表示装置1により構成される。 The lens barrel 435 projects image light provided from the main body 431 via the arm 433 through the lenses of the glasses 437 toward the eyes of the user wearing the see-through head mounted display 430. In this see-through head mounted display 430, the display unit of the main body 431 is configured by the display device 1 according to the embodiment.
 (具体例5)
 図26は、テレビジョン装置440の外観の一例を示す図である。図26に示すように、テレビジョン装置440は、映像表示画面部441を有している。映像表示画面部441は、例えば、フロントパネル443およびフィルターガラス445を含む。映像表示画面部441は、実施形態に係る表示装置1により構成される。
(Specific Example 5)
Fig. 26 is a diagram showing an example of the external appearance of a television device 440. As shown in Fig. 26, the television device 440 has an image display screen unit 441. The image display screen unit 441 includes, for example, a front panel 443 and a filter glass 445. The image display screen unit 441 is configured by the display device 1 according to the embodiment.
 (具体例6)
 図27及び図28は、それぞれ乗物600の内部構成の一例を示す図である。図27は乗物600の後方から前方にかけての乗物600の内部の様子を示し、図28は乗物600の斜め後方から斜め前方にかけての乗物600の内部の様子を示す。
(Specific Example 6)
Fig. 27 and Fig. 28 are diagrams showing an example of the internal configuration of the vehicle 600. Fig. 27 shows the interior of the vehicle 600 from the rear to the front, and Fig. 28 shows the interior of the vehicle 600 from the diagonally rear to the diagonally front.
 図27及び図28に示すように、乗物600は、センターディスプレイ701(701C、701L、701R)と、コンソールディスプレイ702と、ヘッドアップディスプレイ703と、デジタルリアミラー704と、ステアリングホイールディスプレイ705と、リアエンタテイメントディスプレイ706とを有する。これらのディスプレイ701~706のいずれか又は全ては、実施形態に係る表示装置1により構成される。 As shown in Figures 27 and 28, the vehicle 600 has a center display 701 (701C, 701L, 701R), a console display 702, a head-up display 703, a digital rear mirror 704, a steering wheel display 705, and a rear entertainment display 706. Any or all of these displays 701 to 706 are configured by the display device 1 according to the embodiment.
 センターディスプレイ701は、ダッシュボード605において運転席601及び助手席602に対向する場所に配置されている。図27及び図28では、運転席601側から助手席602側まで延びる横長形状のセンターディスプレイ701の例を示すが、センターディスプレイ701の画面サイズや配置場所は任意である。センターディスプレイ701には、種々のセンサで検知された情報を表示可能である。具体的な一例として、センターディスプレイ701には、イメージセンサで撮影した撮影画像、ToFセンサで計測された乗物前方や側方の障害物までの距離画像、赤外線センサで検出された乗客の体温などを表示可能である。センターディスプレイ701は、例えば、安全関連情報、操作関連情報、ライフログ、健康関連情報、認証/識別関連情報、及びエンタテイメント関連情報の少なくとも一つを表示するために用いることができる。 The center display 701 is disposed on the dashboard 605 in a position facing the driver's seat 601 and the passenger seat 602. Although Figs. 27 and 28 show an example of a horizontally elongated center display 701 extending from the driver's seat 601 to the passenger seat 602, the screen size and location of the center display 701 are arbitrary. The center display 701 can display information detected by various sensors. As a specific example, the center display 701 can display an image captured by an image sensor, an image showing the distance to an obstacle in front of or beside the vehicle measured by a ToF sensor, and the body temperature of a passenger detected by an infrared sensor. The center display 701 can be used to display, for example, at least one of safety-related information, operation-related information, a life log, health-related information, authentication/identification-related information, and entertainment-related information.
 安全関連情報は、居眠り検知、よそ見検知、同乗している子供のいたずら検知、シートベルト装着有無、乗員の置き去り検知などの情報であり、例えばセンターディスプレイ701の裏面側に重ねて配置されたセンサにて検知される情報である。操作関連情報は、センサを用いて乗員の操作に関するジェスチャを検知する。検知されるジェスチャは、乗物600内の種々の設備の操作を含んでいてもよい。例えば、空調設備、ナビゲーション装置、AV装置、照明装置等の操作を検知する。ライフログは、乗員全員のライフログを含む。例えば、ライフログは、乗車中の各乗員の行動記録を含む。ライフログを取得及び保存することで、事故時に乗員がどのような状態であったかを確認できる。健康関連情報は、温度センサを用いて乗員の体温を検知し、検知した体温に基づいて乗員の健康状態を推測する。あるいは、イメージセンサを用いて乗員の顔を撮像し、撮像した顔の表情から乗員の健康状態を推測してもよい。さらに、乗員に対して自動音声で会話を行って、乗員の回答内容に基づいて乗員の健康状態を推測してもよい。認証/識別関連情報は、センサを用いて顔認証を行うキーレスエントリ機能や、顔識別でシート高さや位置の自動調整機能などを含む。エンタテイメント関連情報は、センサを用いて乗員によるAV装置の操作情報を検出する機能や、センサで乗員の顔を認識して、乗員に適したコンテンツをAV装置にて提供する機能などを含む。 The safety-related information includes information such as detection of drowsiness, detection of distraction, detection of tampering by children in the vehicle, whether or not a seat belt is fastened, and detection of an occupant being left behind, and is information detected, for example, by a sensor arranged on the back side of the center display 701. The operation-related information is obtained by detecting gestures related to the operation of the occupant using a sensor. The detected gestures may include operations of various facilities in the vehicle 600. For example, operations of air conditioning equipment, navigation equipment, AV equipment, lighting equipment, etc. are detected. The life log includes the life log of all occupants. For example, the life log includes a record of the actions of each occupant while on board. By acquiring and saving the life log, it is possible to confirm the condition of the occupant at the time of the accident. The health-related information is obtained by detecting the body temperature of the occupant using a temperature sensor, and inferring the health condition of the occupant based on the detected body temperature. Alternatively, the face of the occupant may be captured using an image sensor, and the health condition of the occupant may be inferred from the facial expression captured in the image. Furthermore, the occupant may be spoken to by an automated voice and the occupant's health condition may be inferred based on the occupant's responses. Authentication/identification related information includes a keyless entry function that uses a sensor to perform face authentication, and a function for automatically adjusting seat height and position using face recognition. Entertainment related information includes a function for detecting operation information of an AV device by an occupant using a sensor, and a function for recognizing the occupant's face using a sensor and providing content suitable for the occupant via the AV device.
 コンソールディスプレイ702は、例えばライフログ情報の表示に用いることができる。コンソールディスプレイ702は、運転席601と助手席602の間のセンターコンソール607のシフトレバー608の近くに配置されている。コンソールディスプレイ702にも、種々のセンサで検知された情報を表示可能である。また、コンソールディスプレイ702には、イメージセンサで撮像された車両周辺の画像を表示してもよいし、車両周辺の障害物までの距離画像を表示してもよい。 The console display 702 can be used to display life log information, for example. The console display 702 is disposed near the shift lever 608 on the center console 607 between the driver's seat 601 and the passenger seat 602. The console display 702 can also display information detected by various sensors. The console display 702 may also display an image of the surroundings of the vehicle captured by an image sensor, or an image showing the distance to obstacles around the vehicle.
 ヘッドアップディスプレイ703は、運転席601の前方のフロントガラス604の奥に仮想的に表示される。ヘッドアップディスプレイ703は、例えば、安全関連情報、操作関連情報、ライフログ、健康関連情報、認証/識別関連情報、及びエンタテイメント関連情報の少なくとも一つを表示するために用いることができる。ヘッドアップディスプレイ703は、運転席601の正面に仮想的に配置されることが多いため、乗物600の速度や燃料(バッテリ)残量などの乗物600の操作に直接関連する情報を表示するのに適している。 The head-up display 703 is virtually displayed behind the windshield 604 in front of the driver's seat 601. The head-up display 703 can be used to display, for example, at least one of safety-related information, operation-related information, a life log, health-related information, authentication/identification-related information, and entertainment-related information. Since the head-up display 703 is often virtually positioned in front of the driver's seat 601, it is suitable for displaying information directly related to the operation of the vehicle 600, such as the speed of the vehicle 600 and the remaining fuel (battery) level.
 デジタルリアミラー704は、乗物600の後方を表示できるだけでなく、後部座席の乗員の様子も表示できるため、デジタルリアミラー704の裏面側に重ねてセンサを配置することで、例えばライフログ情報の表示に用いることができる。 The digital rear-view mirror 704 can not only display the rear of the vehicle 600, but can also display the state of passengers in the back seats. Therefore, by placing a sensor on the back side of the digital rear-view mirror 704, it can be used to display life log information, for example.
 ステアリングホイールディスプレイ705は、乗物600のハンドル606の中央付近に配置されている。ステアリングホイールディスプレイ705は、例えば、安全関連情報、操作関連情報、ライフログ、健康関連情報、認証/識別関連情報、及びエンタテイメント関連情報の少なくとも一つを表示するために用いることができる。特に、ステアリングホイールディスプレイ705は、運転者の手の近くにあるため、運転者の体温等のライフログ情報を表示したり、AV装置や空調設備等の操作に関する情報などを表示したりするのに適している。 The steering wheel display 705 is disposed near the center of the steering wheel 606 of the vehicle 600. The steering wheel display 705 can be used to display, for example, at least one of safety-related information, operation-related information, life log, health-related information, authentication/identification-related information, and entertainment-related information. In particular, since the steering wheel display 705 is located near the driver's hands, it is suitable for displaying life log information such as the driver's body temperature, and for displaying information related to the operation of AV equipment, air conditioning equipment, etc.
 リアエンタテイメントディスプレイ706は、運転席601や助手席602の背面側に取り付けられており、後部座席の乗員が視聴するためのものである。リアエンタテイメントディスプレイ706は、例えば、安全関連情報、操作関連情報、ライフログ、健康関連情報、認証/識別関連情報、及びエンタテイメント関連情報の少なくとも一つを表示するために用いることができる。特に、リアエンタテイメントディスプレイ706は、後部座席の乗員の目の前にあるため、後部座席の乗員に関連する情報が表示される。例えば、AV装置や空調設備の操作に関する情報を表示したり、後部座席の乗員の体温等を温度センサで計測した結果を表示したりしてもよい。 The rear entertainment display 706 is attached to the back side of the driver's seat 601 and passenger seat 602, and is intended for viewing by rear seat passengers. The rear entertainment display 706 can be used to display at least one of safety-related information, operation-related information, life log, health-related information, authentication/identification-related information, and entertainment-related information, for example. In particular, since the rear entertainment display 706 is located in front of the rear seat passengers, information related to the rear seat passengers is displayed on the rear entertainment display 706. For example, the rear entertainment display 706 may display information related to the operation of AV equipment or air conditioning equipment, or may display the results of measuring the body temperature of the rear seat passengers using a temperature sensor.
 上述したように、ディスプレイの裏面側に重ねてセンサを配置することで、周囲に存在する物体までの距離を計測することができる。光学的な距離計測の手法には、大きく分けて、受動型と能動型がある。受動型は、センサから物体に光を投光せずに、物体からの光を受光して距離計測を行うものである。受動型には、レンズ焦点法、ステレオ法、及び単眼視法などがある。能動型は、物体に光を投光して、物体からの反射光をセンサで受光して距離計測を行うものである。能動型には、光レーダ方式、アクティブステレオ方式、照度差ステレオ法、モアレトポグラフィ法、干渉法などがある。実施形態に係る表示装置1は、これらのどの方式の距離計測にも適用可能である。実施形態に係る表示装置1の裏面側に重ねて配置されるセンサを用いることで、上述した受動型又は能動型の距離計測を行うことができる。 As described above, by arranging a sensor on the back side of the display, it is possible to measure the distance to surrounding objects. Optical distance measurement methods are broadly divided into passive and active types. Passive types measure distance by receiving light from an object without projecting light from the sensor onto the object. Passive types include the lens focusing method, the stereo method, and the monocular vision method. Active types measure distance by projecting light onto an object and receiving reflected light from the object with a sensor. Active types include the optical radar method, the active stereo method, the photometric stereo method, the moire topography method, and the interference method. The display device 1 according to the embodiment can be applied to any of these distance measurement methods. By using a sensor arranged on the back side of the display device 1 according to the embodiment, it is possible to perform the above-mentioned passive or active distance measurement.
 なお、各実施形態に係る表示装置1が適用され得る電子機器は、上記例示に限定されない。各実施形態に係る表示装置1は、外部から入力された画像信号、または内部で生成された画像信号に基づいて表示を行うあらゆる分野の電子機器の表示部に適用することが可能である。つまり、本開示に係る技術は、様々な製品へ応用することができる。例えば、各実施形態に係る表示装置1は、上述した乗物600のように、自動車、電気自動車、ハイブリッド電気自動車、自動二輪車、自転車、パーソナルモビリティ、飛行機、ドローン、船舶、ロボット、建設機械、農業機械(トラクター)などのいずれかの種類の移動体の表示部として実現されてもよい。また、例えば、各実施形態に係る表示装置1は、内視鏡手術システムや顕微鏡手術システム等に含まれる表示部に適用されてもよい。 Note that the electronic devices to which the display device 1 according to each embodiment can be applied are not limited to the above examples. The display device 1 according to each embodiment can be applied to the display unit of electronic devices in any field that perform display based on an image signal input from the outside or an image signal generated internally. In other words, the technology according to the present disclosure can be applied to various products. For example, the display device 1 according to each embodiment may be realized as a display unit of any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, personal mobility, an airplane, a drone, a ship, a robot, a construction machine, or an agricultural machine (tractor), such as the above-mentioned vehicle 600. In addition, for example, the display device 1 according to each embodiment may be applied to a display unit included in an endoscopic surgery system, a microsurgery system, or the like.
 以上、添付図面を参照しながら本開示の各実施形態、各変形例、各適用例などについて詳細に説明したが、本開示の技術的範囲はかかる例に限定されない。本開示の技術分野における通常の知識を有する者であれば、特許請求の範囲に記載された技術的思想の範疇内において、各種の変更例または修正例に想到し得ることは明らかであり、これらについても、当然に本開示の技術的範囲に属するものと了解される。  Although each embodiment, each modified example, each application example, etc. of the present disclosure have been described in detail above with reference to the attached drawings, the technical scope of the present disclosure is not limited to such examples. It is clear that a person with ordinary knowledge in the technical field of the present disclosure can conceive of various modified or revised examples within the scope of the technical ideas described in the claims, and it is understood that these also naturally fall within the technical scope of the present disclosure.
 <4.付記>
 なお、本技術は以下のような構成も取ることができる。
(1)
 基板と、
 前記基板に積層された配線層と、
 前記配線層に積層された有機層と、
 前記有機層を挟むように積層された第1電極及び第2電極と、
 前記配線層中に設けられ、水分の侵入を抑える保護層と、
 を備える、発光装置。
(2)
 前記保護層は、前記配線層よりも水分透過率が低い層である、
 前記(1)に記載の発光装置。
(3)
 前記保護層は、前記基板側から前記有機層側への水分の侵入を抑えるように形成されている、
 前記(1)又は(2)に記載の発光装置。
(4)
 前記保護層は、前記基板、前記配線層及び前記有機層の積層方向に交差する方向に沿って延伸する、
 前記(3)に記載の発光装置。
(5)
 前記配線層に形成されたパッドをさらに備え、
 前記保護層は、前記パッド側から前記有機層側への水分の侵入を抑えるように形成されている、
 前記(1)から(4)のいずれか一つに記載の発光装置。
(6)
 前記保護層は、前記基板、前記配線層及び前記有機層の積層方向に沿って延伸する、
 前記(5)に記載の発光装置。
(7)
 前記保護層は、平面視で前記有機層の周囲を囲むように形成されている、
 前記(6)に記載の発光装置。
(8)
 前記保護層は、平面視で前記パッドの周囲を囲むように形成されている、
 前記(6)又は(7)に記載の発光装置。
(9)
 前記配線層に形成されたパッドをさらに備え、
 前記保護層は、前記基板側から前記有機層側への水分の侵入及び前記パッド側から前記有機層側への水分の侵入を抑えるように形成されている、
 前記(1)に記載の発光装置。
(10)
 前記保護層は、
 前記基板、前記配線層及び前記有機層の積層方向に交差する方向に沿って延伸する第1保護層と、
 前記積層方向に沿って延伸する第2保護層と、
 を有する、
 前記(9)に記載の発光装置。
(11)
 前記第2保護層は、平面視で前記有機層の周囲を囲むように形成されている、
 前記(10)に記載の発光装置。
(12)
 前記第2保護層は、平面視で前記パッドの周囲を囲むように形成されている、
 前記(10)又は(11)に記載の発光装置。
(13)
 前記第2保護層は、前記第1保護層に接続されている、
 前記(10)から(12)のいずれか一つに記載の発光装置。
(14)
 前記第1保護層及び前記第2保護層の一方又は両方は、それぞれ複数設けられている、
 前記(10)から(13)のいずれか一つに記載の発光装置。
(15)
 前記第1保護層は、絶縁材料により形成されており、
 前記第2保護層は、絶縁材料及び金属材料の一方又は両方により形成されている、
 前記(10)から(14)のいずれか一つに記載の発光装置。
(16)
 前記第2電極に積層され、水分の侵入を抑える第3保護層をさらに備える、
 前記(10)から(15)のいずれか一つに記載の発光装置。
(17)
 前記第2保護層は、前記第1保護層及び前記第3保護層に接続されている、
 前記(16)に記載の発光装置。
(18)
 前記第2保護層は、前記基板及び前記第3保護層に接続されている、
 前記(16)又は(17)に記載の発光装置。
(19)
 基板と、
 前記基板に積層された配線層と、
 前記配線層に積層された有機層、及び、前記有機層を挟むように積層された第1電極及び第2電極を含む画素部と、
 前記配線層中に設けられ、水分の侵入を抑える保護層と、
 を備える、表示装置。
(20)
 表示装置を備え、
 前記表示装置は、
 基板と、
 前記基板に積層された配線層と、
 前記配線層に積層された有機層、及び、前記有機層を挟むように積層された第1電極及び第2電極を含む画素部と、
 前記配線層中に設けられ、水分の侵入を抑える保護層と、
 を有する、電子機器。
(21)
 前記(1)から(18)のいずれか一つに記載の発光装置が有する構成要素を備える、表示装置。
(22)
 前記(21)に記載の表示装置を備える、電子機器。
<4. Notes>
The present technology can also be configured as follows.
(1)
A substrate;
A wiring layer laminated on the substrate;
an organic layer laminated on the wiring layer;
a first electrode and a second electrode stacked on each side of the organic layer;
a protective layer provided in the wiring layer to prevent moisture from entering;
A light emitting device comprising:
(2)
The protective layer has a lower moisture permeability than the wiring layer.
The light emitting device according to (1) above.
(3)
the protective layer is formed so as to suppress the intrusion of moisture from the substrate side to the organic layer side;
The light emitting device according to (1) or (2) above.
(4)
the protective layer extends along a direction intersecting a stacking direction of the substrate, the wiring layer, and the organic layer;
The light emitting device according to (3) above.
(5)
A pad is further formed on the wiring layer.
the protective layer is formed so as to prevent moisture from penetrating from the pad side to the organic layer side.
The light emitting device according to any one of (1) to (4).
(6)
the protective layer extends along a stacking direction of the substrate, the wiring layer, and the organic layer;
The light emitting device according to (5) above.
(7)
The protective layer is formed so as to surround the organic layer in a plan view.
The light emitting device according to (6) above.
(8)
The protective layer is formed so as to surround the periphery of the pad in a plan view.
The light emitting device according to (6) or (7) above.
(9)
A pad is further formed on the wiring layer.
the protective layer is formed so as to suppress intrusion of moisture from the substrate side to the organic layer side and from the pad side to the organic layer side.
The light emitting device according to (1) above.
(10)
The protective layer is
a first protective layer extending in a direction intersecting a stacking direction of the substrate, the wiring layer, and the organic layer;
A second protective layer extending along the lamination direction;
having
The light emitting device according to (9) above.
(11)
the second protective layer is formed so as to surround the organic layer in a plan view;
The light emitting device according to (10) above.
(12)
The second protective layer is formed so as to surround the periphery of the pad in a plan view.
The light emitting device according to (10) or (11) above.
(13)
The second protective layer is connected to the first protective layer.
The light emitting device according to any one of (10) to (12).
(14)
One or both of the first protective layer and the second protective layer are provided in plurality.
The light emitting device according to any one of (10) to (13).
(15)
the first protective layer is formed of an insulating material,
The second protective layer is formed of one or both of an insulating material and a metallic material.
The light emitting device according to any one of (10) to (14).
(16)
Further comprising a third protective layer laminated on the second electrode to prevent moisture from entering.
The light emitting device according to any one of (10) to (15).
(17)
The second protective layer is connected to the first protective layer and the third protective layer.
The light emitting device according to (16) above.
(18)
the second protective layer is connected to the substrate and the third protective layer;
The light emitting device according to (16) or (17) above.
(19)
A substrate;
A wiring layer laminated on the substrate;
a pixel section including an organic layer laminated on the wiring layer, and a first electrode and a second electrode laminated to sandwich the organic layer;
a protective layer provided in the wiring layer to prevent moisture from entering;
A display device comprising:
(20)
A display device is provided,
The display device includes:
A substrate;
A wiring layer laminated on the substrate;
a pixel section including an organic layer laminated on the wiring layer, and a first electrode and a second electrode laminated to sandwich the organic layer;
a protective layer provided in the wiring layer to prevent moisture from entering;
An electronic device having
(21)
A display device comprising components of the light-emitting device according to any one of (1) to (18).
(22)
An electronic device comprising the display device according to (21).
 1   表示装置
 10  基板
 11  画素部
 11a 発光素子
 12  水平駆動回路
 12m 走査線
 13  垂直駆動回路
 13n 信号線
 14  パッド部
 14a パッド
 20  配線層
 20a 開口部
 21  配線
 22  絶縁層
 23  保護層
 24  保護層
 24a 配線
 30  アノード層
 31  アノード電極
 32  分離層
 40  有機層
 50  カソード層
 60  保護層
 70  保護層
 400 スマートフォン
 410 デジタルスチルカメラ
 420 ヘッドマウントディスプレイ
 430 シースルーヘッドマウントディスプレイ
 440 テレビジョン装置
 600 乗物
 M1  溝
 M2  溝
REFERENCE SIGNS LIST 1 display device 10 substrate 11 pixel section 11a light emitting element 12 horizontal drive circuit 12m scanning line 13 vertical drive circuit 13n signal line 14 pad section 14a pad 20 wiring layer 20a opening 21 wiring 22 insulating layer 23 protective layer 24 protective layer 24a wiring 30 anode layer 31 anode electrode 32 separation layer 40 organic layer 50 cathode layer 60 protective layer 70 protective layer 400 smartphone 410 digital still camera 420 head mounted display 430 see-through head mounted display 440 television device 600 vehicle M1 groove M2 groove

Claims (20)

  1.  基板と、
     前記基板に積層された配線層と、
     前記配線層に積層された有機層と、
     前記有機層を挟むように積層された第1電極及び第2電極と、
     前記配線層中に設けられ、水分の侵入を抑える保護層と、
     を備える、発光装置。
    A substrate;
    A wiring layer laminated on the substrate;
    an organic layer laminated on the wiring layer;
    a first electrode and a second electrode stacked on each side of the organic layer;
    a protective layer provided in the wiring layer to prevent moisture from entering;
    A light emitting device comprising:
  2.  前記保護層は、前記配線層よりも水分透過率が低い層である、
     請求項1に記載の発光装置。
    The protective layer has a lower moisture permeability than the wiring layer.
    The light emitting device according to claim 1 .
  3.  前記保護層は、前記基板側から前記有機層側への水分の侵入を抑えるように形成されている、
     請求項1に記載の発光装置。
    the protective layer is formed so as to prevent moisture from penetrating from the substrate side to the organic layer side;
    The light emitting device according to claim 1 .
  4.  前記保護層は、前記基板、前記配線層及び前記有機層の積層方向に交差する方向に沿って延伸する、
     請求項3に記載の発光装置。
    the protective layer extends along a direction intersecting a stacking direction of the substrate, the wiring layer, and the organic layer;
    The light emitting device according to claim 3 .
  5.  前記配線層に形成されたパッドをさらに備え、
     前記保護層は、前記パッド側から前記有機層側への水分の侵入を抑えるように形成されている、
     請求項1に記載の発光装置。
    A pad is further formed on the wiring layer.
    the protective layer is formed so as to suppress the intrusion of moisture from the pad side to the organic layer side;
    The light emitting device according to claim 1 .
  6.  前記保護層は、前記基板、前記配線層及び前記有機層の積層方向に沿って延伸する、
     請求項5に記載の発光装置。
    the protective layer extends along a stacking direction of the substrate, the wiring layer, and the organic layer;
    The light emitting device according to claim 5 .
  7.  前記保護層は、平面視で前記有機層の周囲を囲むように形成されている、
     請求項6に記載の発光装置。
    The protective layer is formed so as to surround the organic layer in a plan view.
    The light emitting device according to claim 6.
  8.  前記保護層は、平面視で前記パッドの周囲を囲むように形成されている、
     請求項6に記載の発光装置。
    The protective layer is formed so as to surround the periphery of the pad in a plan view.
    The light emitting device according to claim 6.
  9.  前記配線層に形成されたパッドをさらに備え、
     前記保護層は、前記基板側から前記有機層側への水分の侵入及び前記パッド側から前記有機層側への水分の侵入を抑えるように形成されている、
     請求項1に記載の発光装置。
    A pad is further formed on the wiring layer.
    the protective layer is formed so as to suppress intrusion of moisture from the substrate side to the organic layer side and from the pad side to the organic layer side.
    The light emitting device according to claim 1 .
  10.  前記保護層は、
     前記基板、前記配線層及び前記有機層の積層方向に交差する方向に沿って延伸する第1保護層と、
     前記積層方向に沿って延伸する第2保護層と、
     を有する、
     請求項9に記載の発光装置。
    The protective layer is
    a first protective layer extending in a direction intersecting a stacking direction of the substrate, the wiring layer, and the organic layer;
    A second protective layer extending along the lamination direction;
    having
    10. The light emitting device according to claim 9.
  11.  前記第2保護層は、平面視で前記有機層の周囲を囲むように形成されている、
     請求項10に記載の発光装置。
    the second protective layer is formed so as to surround the organic layer in a plan view;
    11. The light emitting device according to claim 10.
  12.  前記第2保護層は、平面視で前記パッドの周囲を囲むように形成されている、
     請求項10に記載の発光装置。
    The second protective layer is formed so as to surround the periphery of the pad in a plan view.
    11. The light emitting device according to claim 10.
  13.  前記第2保護層は、前記第1保護層に接続されている、
     請求項10に記載の発光装置。
    The second protective layer is connected to the first protective layer.
    11. The light emitting device according to claim 10.
  14.  前記第1保護層及び前記第2保護層の一方又は両方は、それぞれ複数設けられている、
     請求項10に記載の発光装置。
    One or both of the first protective layer and the second protective layer are provided in plurality.
    11. The light emitting device according to claim 10.
  15.  前記第1保護層は、絶縁材料により形成されており、
     前記第2保護層は、絶縁材料及び金属材料の一方又は両方により形成されている、
     請求項10に記載の発光装置。
    the first protective layer is formed of an insulating material;
    The second protective layer is formed of one or both of an insulating material and a metallic material.
    11. The light emitting device according to claim 10.
  16.  前記第2電極に積層され、水分の侵入を抑える第3保護層をさらに備える、
     請求項10に記載の発光装置。
    Further comprising a third protective layer laminated on the second electrode to prevent moisture from entering.
    11. The light emitting device according to claim 10.
  17.  前記第2保護層は、前記第1保護層及び前記第3保護層に接続されている、
     請求項16に記載の発光装置。
    The second protective layer is connected to the first protective layer and the third protective layer.
    17. The light emitting device of claim 16.
  18.  前記第2保護層は、前記基板及び前記第3保護層に接続されている、
     請求項16に記載の発光装置。
    the second protective layer is connected to the substrate and the third protective layer;
    17. The light emitting device of claim 16.
  19.  基板と、
     前記基板に積層された配線層と、
     前記配線層に積層された有機層、及び、前記有機層を挟むように積層された第1電極及び第2電極を含む画素部と、
     前記配線層中に設けられ、水分の侵入を抑える保護層と、
     を備える、表示装置。
    A substrate;
    A wiring layer laminated on the substrate;
    a pixel section including an organic layer laminated on the wiring layer, and a first electrode and a second electrode laminated to sandwich the organic layer;
    a protective layer provided in the wiring layer to prevent moisture from entering;
    A display device comprising:
  20.  表示装置を備え、
     前記表示装置は、
     基板と、
     前記基板に積層された配線層と、
     前記配線層に積層された有機層、及び、前記有機層を挟むように積層された第1電極及び第2電極を含む画素部と、
     前記配線層中に設けられ、水分の侵入を抑える保護層と、
     を有する、電子機器。
    A display device is provided,
    The display device includes:
    A substrate;
    A wiring layer laminated on the substrate;
    a pixel section including an organic layer laminated on the wiring layer, and a first electrode and a second electrode laminated to sandwich the organic layer;
    a protective layer provided in the wiring layer to prevent moisture from entering;
    An electronic device having
PCT/JP2023/044129 2022-12-22 2023-12-11 Light emission device, display device, and electronic equipment WO2024135425A1 (en)

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JP2004095199A (en) * 2002-08-29 2004-03-25 Seiko Epson Corp Electroluminescence device, its manufacturing process and electronic apparatus
JP2009049001A (en) * 2007-07-20 2009-03-05 Canon Inc Organic light-emitting device and its manufacturing method
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