WO2020158305A1

WO2020158305A1 - Slurry supply device, wet blasting device, and slurry supply method

Info

Publication number: WO2020158305A1
Application number: PCT/JP2020/000206
Authority: WO
Inventors: 神田　真治
Original assignee: 新東工業株式会社
Priority date: 2019-02-01
Filing date: 2020-01-07
Publication date: 2020-08-06
Also published as: CN113365782A; KR20210120993A; JP6984623B2; KR102687543B1; TW202031426A; TWI810427B; JP2020124761A; CN113365782B

Abstract

One embodiment of the present invention provides a slurry supply device that supplies a slurry that includes an abrasive material to a nozzle. This slurry supply device comprises a tank, a roller, a drive device, a spraying part, and supply piping. A slurry is stored in the tank. A supply port is formed in a bottom part of the tank. The roller can rotate around a rotational axis and has a recess that fills with slurry that is supplied from the supply port. The drive device makes the roller rotate around the rotational axis. The spraying part sprays a high-pressure fluid at the recess. The supply piping supplies slurry that has been blown out of the recess by the spray of high-pressure fluid to a nozzle.

Description

Slurry supply device, wet blasting device and slurry supply method

The present disclosure relates to a slurry supply device, a wet blast processing device, and a slurry supply method.

Blasting, in which the abrasive is sprayed toward the object to be processed and the surface of the object is treated, is used for scale removal, descaling, rust removal, coating film removal, and ground treatment. For blasting, dry blasting in which abrasive is injected as solid-gas two-phase flow with compressed gas to the object to be processed, and slurry containing abrasive is injected into object to be processed as solid-gas three-phase flow together with compressed gas. Wet blasting is known.

In recent years, blasting is also used in the field of fine processing of members used for semiconductors, electronic parts, liquid crystals, etc., and it may be required to use it in a clean room in order to incorporate it into the production line. Although dry blasting has a higher processing capability than wet blasting, wet blasting equipment must be used because abrasives may scatter and contaminate the clean room during equipment maintenance and opening/closing of the housing. There is.

There are suction type blasting devices and direct pressure type blasting devices in the wet blast processing device. Patent Document 1 discloses a suction-type wet blasting device. Specifically, in Patent Document 1, a tank for storing the slurry, a slurry suction pipe for sucking the slurry to be supplied to the nozzle from the tank, and a stirring liquid introduction pipe for introducing a stirring liquid into the tank. A device comprising is described. In this device, stable blasting is realized by sucking the slurry in the tank from the slurry suction pipe while introducing the stirring liquid from the stirring liquid introduction pipe.

As a direct pressure type wet blasting device, those described in Patent Documents 2 and 3 are known. Patent Document 2 discloses a tank for storing slurry, a pressurizing conduit for introducing air for pressurization into the tank, a stirring blade for stirring the slurry in the tank, a drive motor for rotating the stirring blade, and a slurry. A wet blasting apparatus is disclosed that includes a nozzle that injects into a work together with compressed air. In this device, while stirring the slurry in the tank by the stirring blade, the pressure in the tank is pressurized to supply the slurry having a uniform concentration from the tank to the nozzle.

Patent Document 3 discloses a closed container for containing a slurry, a stop valve for closing a slurry containing portion of the closed container, a stirring conduit for supplying stirring air from the bottom of the closed container, and a pressurized air in the closed container. There is described a slurry supply apparatus including a pressurizing conduit for supplying the slurry and a slurry supply pipe for supplying the slurry to the injection gun. In this device, the stop valve rises by supplying the stirring air from the lower part of the closed container, and the abrasive material and the liquid on the stop valve are stirred by the stirring air that has passed through the stop valve. Then, the stirred slurry is supplied to the injection gun from the slurry supply pipe.

International Publication No. 2013/046854 JP 2004-230535A JP-A-4-343668

The polishing efficiency of wet blasting depends on the ratio of abrasive to liquid in the slurry. Generally, when the ratio of the abrasive in the slurry increases, the amount of the abrasive injected to the object to be processed increases, so that the processing efficiency of the blasting increases. On the other hand, in the devices described in Patent Documents 1 to 3, since the slurry stirred in the tank is supplied to the nozzle, the slurry containing a small proportion of the abrasive is supplied to the nozzle, resulting in processing efficiency. Will decrease.

Therefore, it is required to provide a slurry supply device, a wet blast processing device, and a slurry supply method capable of improving the processing efficiency.

In one aspect, a slurry supply device that supplies a slurry containing an abrasive to a nozzle is provided. This slurry supply device includes a tank, rollers, a drive device, an injection unit, and a supply pipe. The tank stores the slurry inside. A supply port is formed at the bottom of the tank. The roller is rotatable about a rotation axis and has a recessed portion that is filled with the slurry supplied from the supply port. The drive device rotates the roller about the rotation axis. The ejection unit ejects the high-pressure fluid onto the recess. The supply pipe supplies the slurry extracted from the recess by the injection of the high-pressure fluid to the nozzle.

In the slurry supply device according to the above aspect, the slurry supplied from the supply port of the tank is filled in the concave portion of the roller. Since the abrasive has a large specific gravity and settles to the bottom of the tank over time, a slurry having a high proportion of the abrasive is formed at the bottom of the tank. In the above aspect, since the supply port is provided at the bottom of the tank, the recess of the roller is filled with the slurry containing a high proportion of abrasive. The filled slurry is taken out from the recess by the injection of high-pressure fluid and supplied to the nozzle. Therefore, in the slurry supply device according to the above aspect, it is possible to supply the slurry having a high proportion of the abrasive to the nozzle, and as a result, it is possible to improve the processing efficiency of the wet blast processing.

In one embodiment, the injection unit includes a liquid supply pipe and an air supply pipe. The liquid supply pipe is connected to a liquid supply device that supplies a liquid. The air supply pipe is connected to a compressed air supply device that supplies compressed air. Then, the injection unit may inject a mixed fluid containing the liquid from the liquid supply pipe and the compressed air from the air supply pipe into the recess. In this embodiment, since the slurry is taken out from the recess using the mixed fluid containing the compressed air and the liquid, the ratio of the abrasive and the liquid in the slurry supplied to the nozzle can be adjusted.

In one embodiment, a valve that is provided between the liquid supply pipe and the liquid supply device and that adjusts the flow rate of the liquid flowing through the liquid supply pipe may be further provided. In this embodiment, since the ratio of the liquid in the mixed fluid can be adjusted according to the opening degree of the valve, the ratio of the abrasive to the liquid in the slurry can be adjusted more closely.

In one embodiment, the liquid may be cutting oil. In this embodiment, it is possible to suppress the generation of rust on the object to be processed when the object to be processed made of metal is processed using the slurry supplied to the nozzle. Further, when the workpiece is machined using the cutting oil in the preceding step of the blasting, the cutting oil may remain on the surface of the workpiece. In this case, since the liquid in the slurry and the cutting oil separated from the work piece have the same characteristics, the viscosity of the liquid in the slurry can be stabilized.

In one embodiment, the recess is a groove extending in a direction parallel to the rotation axis or along the circumferential direction of the roller, and the injection unit injects the high-pressure fluid along the extending direction of the groove. It may be configured. In this embodiment, by injecting the high-pressure fluid along the extending direction of the groove, the slurry can be reliably taken out from the recess.

In one embodiment, an auxiliary compressed air supply device that supplies auxiliary compressed air at a pressure lower than that of the high pressure fluid to the supply pipe may be further provided. In this embodiment, since the difference between the pressure in the flow path through which the high-pressure fluid flows and the pressure in the supply pipe can be reduced, it is possible to prevent the slurry filled in the recess from being taken out regardless of the injection of the high-pressure fluid. can do. Thereby, the slurry can be stably supplied to the nozzle.

In one embodiment, a pressurizing pipe for introducing pressurizing air into the tank may be further provided. In this embodiment, since the inside of the tank is pressurized by the compressed air supplied from the pressurizing pipe, the slurry from the tank can be densely filled in the recess and the high-pressure fluid is prevented from flowing back to the tank. be able to.

A wet blasting apparatus according to one aspect includes the above-described slurry supply device and a nozzle that injects the slurry supplied from the slurry supply device. According to this blasting device, it is possible to inject the slurry having a high ratio of the abrasive material from the nozzle, so that the efficiency of the wet blasting process can be improved.

In one aspect, a slurry supply method for supplying a slurry to a nozzle using a slurry supply device is provided. This slurry supply device is a tank that stores a slurry containing an abrasive therein, the tank having a supply port formed at the bottom thereof and the tank capable of rotating around a rotation axis and having a recess formed on the outer peripheral surface thereof. And a roller. The slurry supply method includes a step of causing the abrasive in the slurry to settle in the tank, a step of filling the recess into the recess from the supply port after the step of causing the abrasive to settle, and rotating the roller around the rotation axis. The process includes a step, a step of ejecting a high-pressure fluid to the recess, and a step of supplying the slurry extracted from the recess by the injection of the high-pressure fluid to the nozzle.

In the slurry supply method according to the above aspect, after the abrasive material in the slurry has settled, the slurry is filled in the concave portion through the supply port formed in the bottom of the tank, so that the concave portion is filled with the slurry having a high abrasive ratio Will be done. The filled slurry is taken out from the recess by the injection of high-pressure fluid and supplied to the nozzle. Therefore, according to this method, the slurry having a high ratio of the abrasive can be supplied to the nozzle, and as a result, the efficiency of the wet blasting can be improved.

In one embodiment, in the step of injecting the high-pressure fluid, a mixed fluid containing liquid and compressed air may be ejected to the recess. In this embodiment, since the slurry is taken out from the recess using the mixed fluid containing the compressed air and the liquid, the ratio of the abrasive and the liquid in the slurry supplied to the nozzle can be adjusted.

According to one aspect and various embodiments of the present invention, the processing efficiency of wet blasting can be improved.

It is a figure which shows the blasting system of one embodiment roughly. It is a partially broken perspective view which shows the slurry supply apparatus of one embodiment roughly. It is a figure which shows the peripheral part of a roller schematically. It is a flowchart which shows the blasting method which concerns on one Embodiment. It is a flow chart which shows the slurry supply method concerning one embodiment. It is a figure which shows the slurry supply apparatus which concerns on a modification.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the following description, the same or equivalent elements will be denoted by the same reference symbols, without redundant description. The dimensional ratios in the drawings do not always match those in the description. The terms “upper”, “lower”, “left” and “right” are based on the states shown in the figure and are for convenience.

FIG. 1 is a diagram schematically showing a blast processing system according to an embodiment. The blast processing system 1 shown in FIG. 1 includes a blast processing device 10, a recovery device 50, and a suction device 42. The blast processing apparatus 10 is a wet blast processing apparatus that processes a target object W by injecting a slurry containing an abrasive and a liquid onto the target object. Examples of the processing of the object W to be processed include cutting processing, groove forming processing, and drilling processing, but any processing can be performed. The blasting apparatus 10 shown in FIG. 1 is a so-called direct pressure type blasting apparatus, and supplies the abrasive in the tank to the nozzle by pressurizing the inside of the tank.

The blast processing device 10 includes a container 12 and a slurry supply device 60. The container 12 includes an upper container 13 and a lower container 14. The upper container 13 has an open lower part, and the lower container 14 has an open upper part. A passage plate 23 is provided between the upper container 13 and the lower container 14. The passage plate 23 is formed with a plurality of openings through which the slurry S described later can pass. The upper container 13 defines the processing chamber 13s together with the passage plate 23.

A processing table 24 is provided in the processing chamber 13s. The object W to be processed is placed on the processing table 24. The workpiece W can be, for example, a hard and brittle material such as a ceramic material or a glass material, or a difficult-to-cut material such as a CFRP (Carbon Fiber Reinforced Plastics) material. The processing table 24 is supported by the conveyor driving unit 26. The conveyor drive unit 26 is provided on the passage plate 23. The conveyor drive unit 26 is a moving mechanism such as an XY stage. The conveyor drive unit 26 moves the object W placed on the processing table 24 relative to the nozzle 30. The moving direction and the moving speed of the object W to be processed are appropriately set according to the size, shape, material, shape of the pattern to be processed, and the like of the object W to be processed.

A nozzle 30 is provided above the processing table 24. The nozzle 30 is a blast nozzle for direct pressure blasting, and has a tip portion 30a and a base end portion 30b. The tip portion 30a is provided in the processing chamber 13s so as to face the upper surface of the processing table 24. The base end portion 30b is arranged outside the processing chamber 13s and is connected to one end of the supply pipe 68. The nozzle 30 injects the slurry S supplied from the supply pipe 68, together with the compressed air, into the object W as a gas-liquid solid three-phase flow.

A nozzle drive unit 32 is provided above the upper container 13. The nozzle drive unit 32 includes a connection mechanism that connects to the nozzle 30 and a motor that drives the connection mechanism. The nozzle drive unit 32 drives the motor to move the horizontal position of the nozzle 30 relative to the object W placed on the processing table 24. The moving direction and the moving speed of the nozzle 30 by the nozzle driving unit 32 are appropriately set according to the size, shape, material of the object W to be processed, the shape of the pattern to be processed, and the like.

In one embodiment, one end of the recovery pipe 34 may be connected to the upper part of the upper container 13 so as to communicate with the processing chamber 13s. The other end of the recovery pipe 34 is connected to the recovery device 50. The recovery device 50 includes a cyclone 36 and a collector 38. The other end of the recovery pipe 34 and one end of the cyclone conduit 40 are connected to the cyclone 36. A suction device 42 is connected to the other end of the cyclone conduit 40. The suction device 42 sucks air in the processing chamber 13s through the cyclone conduit 40 and the recovery pipe 34 to make the processing chamber 13s negative pressure. Due to the suction force of the suction device 42, an airflow is generated from the processing chamber 13s toward the recovery device 50. As a result, a part of the slurry S sprayed from the nozzle 30 onto the object W to be processed and atomized is conveyed to the cyclone 36 through the recovery pipe 34. The cyclone 36 separates the mist-like slurry S from the air and selectively collects the mist-like slurry S in the collector 38. The air separated from the mist-like slurry S in the cyclone 36 is sucked into the suction device 42 through the cyclone conduit 40.

A shielding plate 44 may be provided above the processing chamber 13s. The shielding plate 44 is arranged so as to be interposed between the nozzle 30 and one end of the recovery pipe 34, and collects the mist-like slurry S drifting in the processing chamber 13s. The slurry S collected on the shielding plate 44 falls on the passing plate 23 as water droplets. By providing the shield plate 44 between the nozzle 30 and one end of the recovery pipe 34, the recovery rate of the slurry S is increased.

A lower container 14 is provided below the upper container 13. The lower container 14 has a tapered side wall whose width narrows downward. The lower container 14 defines a recovery space 14s together with the passage plate 23. The collection space 14s communicates with the processing chamber 13s through a plurality of openings formed in the passage plate 23. Therefore, the slurry S sprayed from the nozzle 30 onto the object W to be processed is recovered in the recovery space 14 s of the lower container 14 through the plurality of openings formed in the passage plate 23. At the bottom of the lower container 14, a lower opening 14e for supplying the recovered slurry S to the slurry supplying device 60 is formed.

The slurry supply device 60 is provided below the lower container 14. Hereinafter, the slurry supply device 60 will be described with reference to FIG. FIG. 2 is a partially cutaway perspective view schematically showing the slurry supply device 60. The slurry supply device 60 is a device that supplies the slurry S containing the abrasive M to the nozzle 30. The slurry supply device 60 includes a tank 62, rollers 65, a drive device 66, an injection unit 67, and a supply pipe 68.

The tank 62 is provided below the lower container 14. The tank 62 defines a storage space 62s therein, and stores the slurry S in the storage space 62s. The slurry S is a fluid containing the abrasive M and the liquid L, and has a viscosity according to the mixing ratio of the abrasive M and the liquid L. Examples of the material of the abrasive M include, but are not limited to, alumina powder, pig iron grit, and mold grit. Examples of the liquid L include, but are not limited to, water and cutting oil for machining. In addition, below, the ratio of the abrasive M contained in the slurry S is expressed using "concentration". That is, a high concentration of the slurry S indicates that the ratio of the abrasive M to the amount of the liquid L is high, and a low concentration of the slurry S indicates that the ratio of the abrasive M to the amount of liquid L is low. There is.

The tank 62 includes a top plate 62a and a side wall 62b. In the embodiment shown in FIG. 2, the tank 62 has four side walls 62b. Each of the four side walls 62b has an upper portion 62b1 arranged in parallel with the facing side wall 62b, and a lower portion 62b2 inclined so as to approach the facing side wall 62b as it goes downward. That is, the tank 62 has a side wall whose width becomes narrower as it goes downward. The shape of the side wall 62b of the tank 62 is not limited to that of the embodiment shown in FIG. 2 as long as the slurry S can be stored therein, and the side wall 62b may have any shape.

An upper opening 70 for collecting the slurry S from the container 12 is formed in the top plate 62 a of the tank 62. The upper opening 70 is located below the lower opening 14e of the lower container 14. A valve body 72 is provided between the tank 62 and the lower container 14, more specifically, between the lower opening 14e and the upper opening 70. The valve body 72 is, for example, a pressurizing valve, and is a pressurizing valve that opens and closes according to the pressure inside the tank 62. Specifically, the valve body 72 is closed when the pressure in the storage space 62s is higher than a predetermined pressure, and is opened when the pressure in the storage space 62s is equal to or lower than the predetermined pressure. When the valve body 72 is closed, the communication between the storage space 62s and the collection space 14s is cut off, so that the supply of the slurry S collected in the lower container 14 to the tank 62 is stopped. On the contrary, when the valve body 72 is opened, the storage space 62s and the recovery space 14s communicate with each other through the lower opening 14e and the upper opening 70, and the slurry S collected in the lower container 14 is stored in the tank 62. Supplied. In one embodiment, the valve element 72 may be, for example, a triangular valve that raises and lowers a conical valve element by driving a dump valve, an air cylinder, or the like.

A lower opening 73 is formed at the bottom of the tank 62. More specifically, the lower opening 73 is formed at the lower end of the lower portion 62b2 of the side wall 62b. The lower opening 73 functions as a supply port for supplying the slurry S in the tank 62 to the roller 65.

Note that in one embodiment, the stirring blades 74 may be provided inside the tank 62. The stirring blade 74 is provided on the upper part of the storage space 62s and is rotated by the driving force of the motor. Here, since the abrasive M in the slurry S has a larger specific gravity than the liquid L, the abrasive M settles to the bottom of the tank 62 over time. On the other hand, the cutting powder of the object W to be processed and the fragments of the crushed abrasive M generated by the injection of the slurry S from the nozzle 30 have a small particle diameter, and thus float on the surface of the liquid L. By stirring the slurry S by the rotation of the stirring blades 74, it is possible to promote the floating of the cutting powder of the processing target W and the fragments of the abrasive M. Further, by adjusting the rotation speed of the stirring blades 74, it is possible to adjust the particle size of the cutting powder of the object W to be discharged and the fragments of the crushed abrasive M discharged from the discharge pipe 78 described later.

Further, in one embodiment, a discharge port 76 may be formed on the upper portion of the side wall 62b of the tank 62. The discharge port 76 is connected to a discharge liquid tank 79 via a discharge pipe 78 (see FIG. 1). The discharge port 76 collects the cutting powder of the workpiece W and the fragments of the abrasive M floating on the surface of the slurry S. The cutting powder and the fragments of the abrasive material M collected from the discharge port 76 are discharged to the discharge liquid tank 79 through the discharge pipe 78.

A roller 65 is provided below the lower opening 73 of the tank 62. The roller 65 is housed in a box-shaped casing C. FIG. 3 is a perspective view showing a peripheral portion of the roller 65 of the slurry supply device 60. As shown in FIG. 3, the roller 65 has a columnar shape and is rotatable around the rotation axis 65x. A recess 65a is formed on the outer peripheral surface (side surface) of the roller 65. In the embodiment shown in FIG. 3, the roller 65 is formed with a plurality of concave portions 65a, and between the plurality of concave portions 65a, a plurality of convex portions 65b forming the outer peripheral surface of the roller 65 are formed. There is.

The plurality of recesses 65a are arranged at substantially equal intervals along the circumferential direction of the roller 65. The plurality of recesses 65a extend parallel to each other. Each of the plurality of recesses 65a has a groove shape extending in a direction parallel to the rotating shaft 65x, and both ends thereof are open ends. The recess 65a has a substantially rectangular shape when viewed from a cross section orthogonal to the rotation axis 65x. The slurry S supplied from the lower opening 73 is filled in the plurality of recesses 65a. Since the settled abrasive material M has accumulated in the bottom portion of the tank 62, the high concentration slurry S is filled from the lower opening 73 into the concave portion 65a.

A drive device 66 is connected to the rotary shaft 65x of the roller 65 (see FIG. 1). The drive device 66 is, for example, a motor and applies a driving force to the roller 65 to rotate the roller 65 around the rotation shaft 65x. The drive device 66 receives a control signal from the control device CNT described later, and rotates the roller 65 at a rotation speed according to the control signal.

In one embodiment, the slurry supply device 60 may further include a filling cylinder 64. The filling cylinder 64 is provided between the lower opening 73 of the tank 62 and the roller 65. That is, the filling cylinder 64 is provided below the lower opening 73. As shown in FIG. 3, the filling cylinder 64 has a hollow cylindrical shape and has an upper end 64a and a lower end 64b.

The upper end 64a of the filling cylinder 64 is connected to the side wall 62b of the tank 62 so that the inside of the filling cylinder 64 communicates with the storage space 62s through the lower opening 73. The tank 62 and the filling cylinder 64 may be integrally formed. The lower end 64b of the filling cylinder 64 is curved along the outer peripheral surface of the roller 65 so as to approach or contact the outer peripheral surface of the roller 65. That is, the lower end 64b is arranged so as to cover the facing concave portion 65a from the radially outer side of the roller 65. The lower end 64b of the filling cylinder 64 has a width in the direction parallel to the rotary shaft 65x that is the same as or larger than the width of the recess 65a along the direction parallel to the rotary shaft 65x. The filling cylinder 64 fills the concave portion 65 a of the facing roller 65 with the slurry S supplied from the lower opening 73 of the tank 62.

An injection unit 67 is provided near the roller 65. The ejection unit 67 has a function of ejecting the slurry S from the recess 65a by ejecting the high-pressure fluid onto the recess 65a of the roller 65. As shown in FIG. 2, in one embodiment, the ejection unit 67 includes a liquid supply pipe 80 and an air supply pipe 82.

The liquid supply pipe 80 is connected to a liquid supply device 84 via a pipe 81 (see FIG. 1). The liquid supply device 84 is a supply source of the liquid 80f, and supplies the liquid 80f pressurized by compressed air or a liquid pump to the liquid supply pipe 80 via the pipe 81. The liquid 80f supplied from the liquid supply device 84 has the same components as the liquid L of the slurry S stored in the tank 62. For example, the liquid 80f is water or cutting oil. The air supply pipe 82 is connected to the air supply device 86 via a pipe 83. The air supply device 86 is a supply source of the compressed air 82f, and supplies the compressed air 82f to the air supply pipe 82 via the pipe 83. In one embodiment, as shown in FIG. 2, the liquid supply pipe 80 and the air supply pipe 82 have a double pipe structure in which the liquid supply pipe 80 is arranged inside the air supply pipe 82.

In one embodiment, the pipe 81 is provided with a valve 81a and a flow meter 81b. That is, the valve 81 a and the flow meter 81 b are provided between the liquid supply device 84 and the liquid supply pipe 80. The valve 81a adjusts the flow rate of the liquid 80f supplied from the liquid supply device 84 and flowing through the liquid supply pipe 80. The flowmeter 81b detects the flow rate of the liquid 80f supplied from the liquid supply device 84 and flowing through the liquid supply pipe 80.

In one embodiment, as shown in FIG. 2, the slurry supply device 60 further includes a pressurizing pipe 98. One end of the pressurizing pipe 98 is connected to the upper portion of the tank 62. The other end of the pressurizing pipe 98 is connected to the air supply pipe 82 between the tip portion 82t and the air supply device 86. Therefore, a part of the compressed air 82f supplied from the air supply device 86 to the air supply pipe 82 is branched and introduced into the tank 62 as the pressurizing air 98f via the pressurizing pipe 98.

The inside of the tank 62 is pressurized by supplying pressurized air 98f. When the pressure in the tank 62 rises, the valve body 72 is closed and the communication between the recovery space 14s of the lower container 14 and the storage space 62s of the tank 62 is cut off. In one embodiment, the compressed air 82f is supplied from the air supply device 86 at the timing when the slurry S is ejected from the nozzle 30, and accordingly the pressurizing air 98f is supplied into the tank 62. Good. By supplying the pressurizing air 98f into the tank 62, the inside of the tank 62 is pressurized. Due to the pressure, the slurry S in the tank 62 is densely filled in the recess 65 a of the roller 65 through the lower opening 73.

In one embodiment, the tip portion 80t of the liquid supply pipe 80 and the tip portion 82t of the air supply pipe 82 may have a tapered shape in which the diameter becomes smaller toward the tip. The liquid 80f flowing through the liquid supply pipe 80 is atomized when ejected from the tip portion 80t of the liquid supply pipe 80, becomes a mist, and joins with the compressed air 82f flowing through the air supply pipe 82. The combined liquid 80f and the compressed air 82f are jetted as a mixed fluid 88 from the tip portion 82t of the air supply pipe 82. The mixed fluid 88 is a high-pressure fluid containing the liquid 80f and the compressed air 82f.

The injection unit 67 further includes an extraction pipe 90. The extraction pipe 90 is connected to the tip end 82t side of the air supply pipe 82. The take-out pipe 90 extends along a direction parallel to the extending direction of the recess 65 a and is arranged adjacent to the roller 65. Note that the take-out pipe 90 may be arranged at a position downstream of the roller 65 in the rotation direction and at a position where the slurry S filled in the recess 65a does not drop from the recess 65a.

As shown in FIG. 3, the outlet pipe 90 is formed with a notch 92 in which the wall surface forming the pipeline is partially cut off and a part of the pipeline is opened. The notch 92 is provided so as to oppose the outer peripheral surface of the roller 65, and has a width substantially the same as the recess 65a in the extending direction of the recess 65a. The notch 92 is configured such that the two end faces of the take-out pipe 90 face the two protrusions 65b when the roller 65 is at the predetermined rotation position. Thus, the two end surfaces of the take-out pipe 90 and the two convex portions 65b face each other, so that the inner wall surface of the take-out pipe 90 and the concave portion 65a of the roller 65 are provided between the take-out pipe 90 and the roller 65. A defined flow path 93 is formed.

The mixed fluid 88 jetted from the tip portion 82t of the air supply pipe 82 flows into the flow passage 93 through the extraction pipe 90. When the mixed fluid 88 flows through the flow passage 93, the slurry S filled in the recess 65 a forming the flow passage 93 is taken out from the recess 65 a. That is, the mixed fluid 88 discharged from the tip portion 82t of the air supply pipe 82 is jetted along the extending direction of the recess 65a.

The take-out pipe 90 is connected to the supply pipe 68. The slurry S removed from the recess 65 a by the injection of the mixed fluid 88 is supplied to the supply pipe 68 along the flow of the mixed fluid 88. The supply pipe 68 supplies the slurry S, which has been removed from the recess 65 a by the injection of the mixed fluid 88, to the nozzle 30.

In one embodiment, an auxiliary compressed air supply device 94 may be connected to the supply pipe 68. The auxiliary compressed air supply device 94 is, for example, a compressor, and supplies the auxiliary compressed air 94f to the supply pipe 68 via the auxiliary conduit. In one embodiment, the auxiliary compressed air supply device 94 may supply the auxiliary compressed air 94 f having a pressure lower than that of the mixed fluid 88 to the supply pipe 68. For example, the differential pressure between the auxiliary compressed air 94f and the compressed air 82f is set to be 0.01 Mpa or more and 0.1 Mpa or less. By this compressed air 82f, the slurry S removed from the recess 65a is conveyed to the nozzle 30.

As described above, the slurry S supplied to the nozzle 30 is sprayed on the object W to be processed. A part of the slurry S sprayed onto the object to be processed W is recovered again in the recovery space 14s of the lower container 14 and is again supplied to the slurry supply device 60.

Furthermore, in one embodiment, the blast processing apparatus 10 may further include the control device CNT. The control device CNT is composed of, for example, a programmable computer, and controls the overall operation of the blast processing system 1. The control device CNT is connected to, for example, the conveyor drive unit 26, the nozzle drive unit 32, the suction device 42, the drive device 66, the valve 81a, the liquid supply device 84, the air supply device 86, and the auxiliary compressed air supply device 94.

The control device CNT operates according to the input program and sends a control signal. By the control signal from the control device CNT, the moving direction and moving speed of the processing table 24, the moving direction and moving speed of the nozzle 30, the operation and stoppage of the operation of the suction device 42, the rotation speed of the roller 65, the liquid flowing through the liquid supply pipe 80 It is possible to control the activation and deactivation of the liquid supply device 84, the activation and deactivation of the air supply device 86, and the activation and deactivation of the auxiliary compressed air supply device 94 that adjust the flow rate of 80f. ..

Next, a wet blasting method according to an embodiment will be described with reference to FIG. This wet blasting method is executed using, for example, the blasting system 1 described above. FIG. 4 is a flowchart showing a wet blasting method according to one embodiment. In the wet blasting method according to one embodiment, first, in step ST1, the slurry S is supplied from the slurry supply device 60 to the nozzle 30. The slurry supply method in step ST1 will be described in detail with reference to FIG.

FIG. 5 is a flowchart showing a slurry supply method according to one embodiment. This slurry supply method is executed using, for example, the slurry supply device 60 shown in FIG. As shown in FIG. 5, the process ST1 includes processes ST11 to ST16. In the slurry supply method according to one embodiment, step ST11 is first performed.

In step ST11, the inside of the tank 62 is pressurized by supplying the pressurizing air 98f into the tank 62 from the air supply device 86. Next, in step ST12, the abrasive M in the slurry S is settled in the tank 62. Since the specific gravity of the abrasive M is larger than the specific gravity of the liquid L, the abrasive M in the slurry S settles on the bottom of the tank 62 by allowing the stirring blades 74 to stand for a predetermined time with the rotation thereof stopped. ..

Step ST13 is performed after the abrasive M in the tank 62 settles in step ST12. In step ST13, the slurry S supplied from the lower opening 73 is filled in the recess 65a of the roller 65 by the filling cylinder 64. Since the abrasive M is settled at the bottom of the tank 62, the slurry S filled in the recess 65a in step ST13 is a high-concentration slurry having high viscosity.

In the subsequent step ST14, a driving force is applied to the roller 65 by the driving device 66, and the roller 65 is rotated around the rotation shaft 65x. As a result, the slurry S filled in the recess 65 a moves downstream in the rotation direction of the roller 65 and is conveyed to a position facing the notch 92 of the extraction pipe 90. The amount of the slurry S supplied to the nozzle 30 depends on the rotation speed of the roller 65. In step ST14, the number of the concave portions 65a filled with the slurry S per unit time increases by increasing the rotation speed of the roller 65. On the contrary, by decreasing the rotation speed of the roller 65, the number of the concave portions 65a filled with the slurry S per unit time decreases. Therefore, the supply amount of the slurry S to the nozzle 30 can be controlled by changing the rotation speed of the roller 65.

Next, step ST15 is performed. In step ST15, the mixed fluid 88 containing the liquid 80f from the liquid supply pipe 80 and the compressed air 82f from the air supply pipe 82 is jetted to the recess 65a. The mixed fluid 88 is jetted along the extending direction of the recess 65a. The mixed fluid 88 thus jetted removes the slurry S filled in the concave portion 65a. In one embodiment, the amount of the liquid 80f contained in the mixed fluid 88 may be adjusted by adjusting the opening degree of the valve 81a before step ST15 is performed. By adjusting the amount of the liquid 80f contained in the mixed fluid 88, the concentration of the slurry S taken out from the concave portion 65a can be adjusted. When the concentration of the slurry becomes excessively high, as the processing of the object W to be processed progresses, the abrasive M in the slurry S may accumulate on the object W to be processed. The abrasive material M accumulated on the object to be processed W covers the surface of the object to be processed W and becomes a cause of hindering the progress of the blast processing. By adjusting the valve 81a to adjust the amount of the liquid 80f, it is possible to prevent the polishing material M from accumulating on the object W to be processed. The amount of the liquid 80f contained in the mixed fluid 88 may be adjusted by adjusting the supply pressure of the liquid 80f of the liquid supply device 84.

In the subsequent ST16, the slurry S removed from the recess 65a in the process ST15 is supplied to the nozzle 30. In one embodiment, the auxiliary compressed air supply device 94 supplies the auxiliary compressed air 94f, and the slurry S is conveyed to the nozzle 30 by the auxiliary compressed air 94f.

A wet blasting method according to an embodiment will be described with reference to FIG. 4 again. In the wet blasting method of one embodiment, step ST2 is performed after the slurry S is supplied to the nozzle 30 in step ST1. In step ST2, the slurry S is jetted from the nozzle 30 to the object W to be processed. At this time, the slurry S and the compressed air 82f are jetted from the nozzle as a gas-liquid solid three-phase flow. The slurry S jetted from the nozzle 30 collides with the object W to be processed, and the object W to be processed is processed. At this time, since the slurry S irradiated from the nozzle contains the polishing material M at a high rate, the object W to be processed is processed with high efficiency.

Next, a slurry supply device according to a modification will be described. Below, with respect to the slurry supply device according to the modification, differences from the above-described slurry supply device 60 will be mainly described. FIG. 6 is a diagram showing a slurry supply device 100 according to a modification.

As shown in FIG. 6, the slurry supply device 100 includes a roller 102 instead of the roller 65. The roller 102 has a columnar shape and is rotatable around the rotation shaft 102x. On the outer peripheral surface (side surface) of the roller 102, a recess 102a extending along the circumferential direction of the roller 102 is formed. In the embodiment shown in FIG. 6, a plurality of recesses 102a are arranged along a direction parallel to the rotating shaft 102x. Each of the plurality of recesses 102a has a groove shape and is formed so as to circulate on the outer peripheral surface of the roller 102. The plurality of recesses 102a extend parallel to each other.

Further, the slurry supply device 100 includes an injection unit 110 instead of the injection unit 67. The ejection unit 110 further includes an ejector 112 that ejects the mixed fluid 88 onto the roller 102. A liquid supply pipe 80 and an air supply pipe 82 are connected to the injector 112. Inside the injector 112, a merging chamber 114 is formed in which the liquid 80f and the compressed air 82f supplied from the liquid supply pipe 80 and the air supply pipe 82 merge. The injector 112 is formed with a plurality of openings 116 that communicate with the confluence chamber 114. The plurality of openings 116 are formed at positions corresponding to the plurality of recesses 102a.

When the liquid 80f and the compressed air 82f are supplied from the liquid supply pipe 80 and the air supply pipe 82, the liquid 80f and the compressed air 82f join together in the joining chamber 114. The combined liquid 80f and the compressed air 82f pass through the plurality of openings 116 and are jetted as the mixed fluid 88 toward the plurality of recesses 102a along the extending direction of the plurality of recesses 102a. In the embodiment shown in FIG. 6, the mixed fluid 88 is jetted in a direction coinciding with the plurality of recesses 102a when viewed from the outer peripheral direction of the roller 102. By injecting the mixed fluid 88 into the plurality of recesses 102a, the slurry S filled in the plurality of recesses 102a is taken out from the plurality of recesses 102a. The slurry S taken out from the plurality of recesses 102 a is collected in the recovery container 118 and sent to the supply pipe 68 through the opening provided at the bottom of the recovery container 118. The slurry S sent to the supply pipe 68 is supplied to the nozzle 30 by the auxiliary compressed air 94f.

Although the slurry supply device, the wet blast processing device, and the slurry supply method according to various embodiments have been described above, the present invention is not limited to the above-described embodiments, and various modified modes are configured without changing the gist of the invention. It is possible. For example, in the above-described embodiment, the

recesses

65a and 102a have a groove shape, but the

recesses

65a and 102a can have any shape as long as the slurry S can be filled. For example, the

recesses

65a and 102a may be holes having a circular, elliptical, or polygonal planar shape. Further, at least one

recess

65a, 102a may be formed in the

rollers

65, 102, and a plurality of recesses may not necessarily be formed.

Further, in the above-described embodiment, the slurry S is extracted from the

recesses

65a and 102a using the mixed fluid 88 containing the liquid 80f and the compressed air 82f, but only one of the liquid 80f and the compressed air 82f is injected into the

recesses

65a and 102a. By doing so, the slurry S may be taken out from the

recesses

65a and 102a. The slurry supply device 60 does not necessarily have to include the auxiliary compressed air supply device 94. In this case, the slurry S taken out from the

recesses

65 a and 102 a is supplied to the nozzle 30 by the pressure caused by the mixed fluid 88.

In one embodiment, the slurry supply device 60 may further include a recovery tank that recovers the slurry S that has overflowed from the

recesses

65a and 102a and has not been filled. The recovery tank is arranged below the roller 65, for example. In addition, in one embodiment, in order to adjust the supply amount of the slurry S, the depth of the recess 65a may be adjusted.

Hereinafter, the present invention will be described more specifically based on experimental examples, but the present invention is not limited to the following experimental examples.

(Experimental example 1)
In Experimental Example 1, the object W to be processed was blasted using the blasting apparatus 10 shown in FIG. In this experimental example, a dry film photoresist having a reverse pattern of holes formed thereon was placed on a glass substrate which was the object W to be processed, and the slurry S was sprayed from the nozzle 30 to perform the drilling process. Alumina #600 was used as the abrasive M contained in the slurry S, and water was used as the liquid L.

The processing conditions of Experimental Example 1 were as follows.
-Pressure of the pressurizing air 98f: 0.3 [MPa]
-Pressure of auxiliary compressed air 94f: 0.28 [MPa]
-Aperture diameter of nozzle 30: φ6 [mm]
-Flow rate of the liquid 80f flowing through the liquid supply pipe 80: 0.05 [L/min]
-Supply pressure of the liquid supply device 84: 0.4 [MPa]
-Movement speed of nozzle 30: 10 [m/min]
-Movement speed of the processing table 24: 20 [mm/min]

The processing target W was processed according to the above processing conditions, and the depth of the hole formed in the processing target W was measured. As a result, the processing depth of the hole was 430 [μm].

In Comparative Experimental Example 1, the workpiece W was blasted using a dry suction blasting apparatus (EMS-4 type manufactured by Elfotech Co., Ltd.). As the object W to be processed, the same glass substrate as in Experimental Example 1 was used. Alumina #600 was used as the abrasive.

The processing conditions of Comparative Experimental Example 1 were as follows.
・Pressure air pressure: 0.3 [MPa]
-Aperture diameter of nozzle 30: φ6 [mm]
-Movement speed of nozzle 30: 10 [m/min]
-Movement speed of the processing table 24: 20 [mm/min]

The processing target W was processed according to the above processing conditions, and the depth of the hole formed in the processing target W was measured. As a result, the drilling depth of Experimental Example 1 was 38 [μm].

From the results of Experimental Example 1 and Comparative Experimental Example 1, it was confirmed that the blast processing apparatus 10 of one embodiment had a processing capacity 11.3 times as high as that of the dry suction type blast apparatus.

(Experimental example 2)
In Experimental Example 2, the object W to be processed was blasted using the blasting apparatus 10 shown in FIG. However, in this experimental example, as the slurry supply device, the slurry supply device 100 shown in FIG. 6 was used instead of the slurry supply device 60 shown in FIG. In the present experimental example, deburring was performed on the object W to be processed by injecting the slurry S. As the object W to be processed, a machined part made of SUS304 to which cutting oil was attached by machining was used. As the abrasive M contained in the slurry S, KUAMET-32 μm manufactured by Epson Atmix Co., Ltd. was used, and as the liquid L, cutting oil Moresco Sealmate BS-6S manufactured by MORESCO Co., Ltd. was used.

The processing conditions of Experimental Example 2 were as follows.
-Pressure of the pressurizing air 98f: 0.2 [MPa]
-Pressure of auxiliary compressed air 94f: 0.18 [MPa]
-Aperture diameter of nozzle 30: φ6 [mm]
-Flow rate of the liquid 80f flowing through the liquid supply pipe 80: 0.05 [L/min]
-Supply pressure of the liquid supply device 84: 0.3 [MPa]
-Movement speed of nozzle 30: 10 [m/min]
-Movement speed of processing table 24: 30 [mm/min]

Deburring of the object W was performed according to the above processing conditions. In Experimental Example 2, it was confirmed that the burr was removed from the target object W by scanning the target object W once.

In Comparative Experimental Example 2, the same workpiece W was blasted using a dry suction blasting apparatus (EMS-4 type manufactured by Elfotech Co., Ltd.).

The processing conditions of Comparative Experimental Example 2 were as follows.
・Pressure air pressure: 0.3 [MPa]
-Aperture diameter of nozzle 30: φ6 [mm]
-Movement speed of nozzle 30: 10 [m/min]
-Movement speed of processing table 24: 30 [mm/min]

Deburring of the object W was performed according to the above processing conditions. In Comparative Experimental Example 2, it was confirmed that burrs were removed from the object W to be processed by scanning the object W eight times.

From the results of Experimental Example 2 and Comparative Experimental Example 2, it was confirmed that the blast processing apparatus 10 of one embodiment has a deburring processing capacity eight times that of the dry suction blast apparatus.

DESCRIPTION OF SYMBOLS 1... Blast processing system, 10... Blast processing apparatus, 12... Container, 30... Nozzle, 32... Nozzle drive part, 50... Recovery apparatus, 60... Slurry supply apparatus, 62... Tank, 62s... Storage space, 64... Filling cylinder , 65, 102... Rollers, 65a, 102a... Recesses, 65x... Rotating shafts, 66... Driving device, 67, 110... Injecting section, 68... Supply piping, 72... Valve body, 73... Lower opening (supply port), 74 ... stirring blade, 76... discharge port, 78... discharge pipe, 80... liquid supply pipe, 80f... liquid, 81a... valve, 81b... flow meter, 82... air supply pipe, 82f... compressed air, 84... liquid supply device, 86... Air supply device, 88... Mixed fluid, 90... Extraction pipe, 92... Notch part, 93... Flow path, 94... Auxiliary compressed air supply device, 94f... Auxiliary compressed air, 98... Pressurizing pipe, 98f... Pressurizing Air, 100... Slurry supply device, 102... Roller, 102a... Recess, 102x... Rotating shaft, 112... Injector, CNT... Control device, L... Liquid, M... Abrasive material, S... Slurry, W... Object to be treated.

Claims

A slurry supply device for supplying a slurry containing an abrasive to a nozzle,
A tank for storing the slurry inside, the tank having a supply port formed at the bottom thereof,
A roller that is rotatable around a rotation axis and that has a recessed portion that is filled with the slurry supplied from the supply port,
A drive device for rotating the roller about the rotation axis,
An injection unit that injects a high-pressure fluid to the recess,
A supply pipe for supplying the slurry extracted from the recess by the injection of the high-pressure fluid to the nozzle,
And a slurry supply device.
The injection unit includes a liquid supply pipe connected to a liquid supply device that supplies liquid, and an air supply pipe connected to a compressed air supply device that supplies compressed air, and the liquid from the liquid supply pipe. The slurry supply device according to claim 1, wherein a mixed fluid containing the compressed air from the air supply pipe is injected to the recess.
The slurry supply device according to claim 2, further comprising a valve provided between the liquid supply pipe and the liquid supply device, the valve adjusting the flow rate of the liquid flowing through the liquid supply pipe.
The slurry supply device according to claim 2 or 3, wherein the liquid is cutting oil.
The recess is a groove extending in a direction parallel to the rotation axis, or in the circumferential direction of the roller,
The slurry supply device according to any one of claims 1 to 4, wherein the injection unit is configured to inject the high-pressure fluid along the extending direction of the groove.
The slurry supply device according to any one of claims 1 to 5, further comprising an auxiliary compressed air supply device that supplies auxiliary compressed air having a pressure lower than that of the high-pressure fluid to the supply pipe.
The slurry supply device according to any one of claims 1 to 6, further comprising a pressurizing pipe for introducing pressurizing air into the tank.
A slurry supply device according to any one of claims 1 to 7,
A nozzle for injecting the slurry supplied from the slurry supply device,
Wet blasting machine equipped with.
A tank that stores a slurry containing an abrasive therein, the tank having a supply port formed at the bottom thereof, and a roller rotatable around a rotation axis and having a recess formed on the outer peripheral surface thereof. A slurry supply method for supplying the slurry to a nozzle using a slurry supply device,
A step of causing the abrasive in the slurry to settle in the tank;
After the step of settling the abrasive, a step of filling the slurry into the recess from the supply port,
Rotating the roller about the axis of rotation;
Injecting a high-pressure fluid into the recess,
Supplying the slurry extracted from the recess by the injection of the high-pressure fluid to a nozzle,
And a slurry supply method.
The slurry supply method according to claim 9, wherein in the step of injecting the high-pressure fluid, a mixed fluid containing a liquid and compressed air is injected into the recess.