TW202031426A - Slurry supply device, wet blasting device, and slurry supply method - Google Patents

Abstract

One embodiment of the present invention provides a slurry supply device that supplies a slurry that includes an abrasive material to a nozzle. This slurry supply device comprises a tank, a roller, a drive device, a spraying part, and supply piping. A slurry is stored in the tank. A supply port is formed in a bottom part of the tank. The roller can rotate around a rotational axis and has a recess that fills with slurry that is supplied from the supply port. The drive device makes the roller rotate around the rotational axis. The spraying part sprays a high-pressure fluid at the recess. The supply piping supplies slurry that has been blown out of the recess by the spray of high-pressure fluid to a nozzle.

Description

Slurry supply device, wet jet processing device, and slurry supply method

The present invention relates to a slurry supply device, a wet jet processing device, and a slurry supply method.

The blasting process of spraying abrasives toward the treated body to perform surface treatment of the treated body is used for scale removal, flow-elimination, rust removal, spray coating removal, base treatment, etc. In jet processing, dry jet processing in which the abrasive material and compressed gas are sprayed toward the object to be processed in a solid-gas two-phase flow, and the slurry containing the abrasive material and compressed gas are sprayed toward the object in a solid-gas-liquid three-phase flow. Wet spray processing of the processed body spray.

In recent years, spray processing has also been used in the field of micro processing of components used in semiconductors, electronic parts, liquid crystals, etc., and it is sometimes used in clean rooms for assembly into manufacturing lines. Although dry jet processing has a higher processing capacity than wet jet processing, there is a risk that abrasive materials will scatter and contaminate the clean room during the maintenance of the device and the opening and closing of the housing, so wet jet processing equipment is used The situation.

There are suction type spraying devices and direct pressure spraying devices in wet spray processing devices. Patent Document 1 discloses a suction type wet spray device. Specifically, Patent Document 1 describes a device equipped with the following parts: a tank for storing slurry; a slurry suction pipe for sucking slurry from the tank for supply to the nozzle; and stirring liquid introduction The pipe introduces the liquid for stirring into the tank. In this device, by introducing the stirring liquid from the stirring liquid introduction pipe, while sucking the slurry in the tank from the slurry suction pipe, stable spray processing is realized.

As a direct pressure wet spray device, the direct pressure wet spray device described in Patent Documents 2 and 3 is known. Patent Document 2 discloses a wet jet processing device. The wet jet processing device includes: a tank for storing slurry; a pressurizing duct that introduces air for pressurization into the tank; a stirring blade and a stirring tank The slurry inside; the drive motor, which makes the stirring wing rotate; and the nozzle, which sprays the slurry and compressed air toward the workpiece. In this device, the slurry in the tank is stirred by the stirring blade on one side, and the slurry in the tank is pressurized on the other side, and the slurry of uniform concentration is supplied from the tank to the nozzle.

In Patent Document 3, a slurry supply device is described. The slurry supply device is provided with: a closed container that contains the slurry; a relay valve that seals the slurry storage portion of the closed container; and a stirring pipe that is self-sealed. The bottom part is supplied with stirring air; the pressurizing pipe is used to supply pressurized air into the closed container; and the slurry supply pipe is used to supply the slurry to the spray gun. In this device, the relay valve is raised by supplying stirring air from the lower part of the closed container, and the abrasive material and liquid on the relay valve are stirred by the stirring air passing through the relay valve. Furthermore, the stirred slurry is supplied from the slurry supply pipe to the spray gun. [Prior Technical Literature] [Patent Literature]

Patent Document 1: International Publication No. 2013/046854 Patent Document 2: Japanese Patent Application Publication No. 2004-230535 Patent Document 3: Japanese Patent Laid-Open No. 4-343668

[The problem to be solved by the invention]

The polishing efficiency of wet jet processing depends on the ratio of the abrasive material to the liquid in the slurry. Generally speaking, if the proportion of the abrasive material in the slurry becomes larger, the amount of abrasive material sprayed on the object to be processed increases, so the processing efficiency of spray processing increases. On the other hand, in the apparatuses described in Patent Documents 1 to 3, since the slurry stirred in the tank is supplied to the nozzle, the slurry is supplied to the nozzle with a small proportion of the abrasive, and the processing efficiency is reduced.

Therefore, it is desired to provide a slurry supply device, a wet jet processing device, and a slurry supply method that can improve processing efficiency. [Technical means to solve the problem]

In one aspect, a slurry supply device that supplies slurry containing abrasives to a nozzle is provided. The slurry supply device includes a tank, a roller, a driving device, a spraying part, and a supply pipe. The tank stores the slurry inside. A supply port is formed at the bottom of the tank. The drum is rotatable around a rotating shaft and is formed with a recess for filling with slurry supplied from the supply port. The driving device rotates the drum around the rotating shaft. The injection part injects high-pressure fluid to the concave part. The supply pipe supplies the nozzle with the slurry taken out from the recess by the jet of the high-pressure fluid.

In the slurry supply device of the above aspect, the slurry supplied from the supply port of the tank is filled in the recess of the drum. Because the specific gravity of the abrasive material is relatively large, it sinks to the bottom of the tank with the passage of time, and a slurry with a higher proportion of abrasive material is formed at the bottom of the tank. In the above aspect, since the supply port is provided at the bottom of the tank, the concave portion of the drum is filled with slurry with a higher proportion of abrasive. The filled slurry is taken out from the recessed portion by the jet of high-pressure fluid, and supplied to the nozzle. Therefore, in the slurry supply device of the above aspect, the slurry with a relatively high proportion of the abrasive can be supplied to the nozzle, and as a result, the processing efficiency of wet jet processing can be improved.

In one embodiment, the ejection part includes a liquid supply pipe and an air supply pipe. The liquid supply pipe is connected to a liquid supply device that supplies liquid. The air supply pipe is connected to a compressed air supply device that supplies compressed air. Furthermore, the spraying part can spray a mixed fluid containing liquid from the liquid supply pipe and compressed air from the air supply pipe to the concave portion. In this embodiment, since a mixed fluid containing compressed air and liquid is used to take out the slurry from the recess, the ratio of the abrasive material to the liquid in the slurry supplied to the nozzle can be adjusted.

In one embodiment, a valve may be further provided. The valve is provided between the liquid supply pipe and the liquid supply device to adjust the flow rate of the liquid flowing in the liquid supply pipe. In this embodiment, since the ratio of the liquid in the mixed fluid can be adjusted according to the opening of the valve, the ratio of the abrasive to the liquid in the slurry can be adjusted more finely.

In one embodiment, the liquid may be cutting oil. In this embodiment, when processing a metal to-be-processed body using the slurry supplied to the nozzle, it is possible to suppress the generation of rust in the to-be-processed body. In addition, in the case of machining the workpiece with cutting oil in the process prior to the jet processing, the cutting oil may remain on the surface of the workpiece. In this case, since the liquid in the slurry and the cutting oil separated from the workpiece have the same characteristics, the viscosity of the liquid in the slurry can be stabilized.

In one embodiment, the concave portion is a groove extending in a direction parallel to the rotation axis or the circumferential direction of the drum, and the spraying portion may be configured to spray high-pressure fluid along the extending direction of the groove. In this embodiment, by spraying the high-pressure fluid along the extending direction of the groove, the slurry can be reliably taken out from the recess.

In one embodiment, an auxiliary compressed air supply device may be further provided, and the auxiliary compressed air supply device supplies a higher-pressure fluid, which is a low-pressure auxiliary compressed air, to the supply pipe. In this embodiment, since the difference between the pressure in the flow path through which the high-pressure fluid flows and the pressure in the supply pipe can be reduced, it is possible to prevent the slurry filled in the recesses from being taken out without relying on the jet of the high-pressure fluid. Thereby, the slurry can be stably supplied to the nozzle.

In one embodiment, a pressurizing pipe that introduces pressurizing air into the tank may be further provided. In this embodiment, since the inside of the tank is pressurized by the compressed air supplied from the pressurizing pipe, the slurry from the tank can be densely filled in the recesses and the high-pressure fluid can be prevented from flowing back into the tank.

One aspect of the wet jet processing device includes: the above-mentioned slurry supply device; and a nozzle for spraying the slurry supplied from the slurry supply device. According to this spraying device, since the slurry with a relatively high proportion of the abrasive can be sprayed from the nozzle, the efficiency of wet spray processing can be improved.

In one aspect, a slurry supply method using a slurry supply device to supply slurry to a nozzle is provided. This slurry supply device is equipped with a tank which stores a slurry containing an abrasive in its inside, a supply port is formed at the bottom of the tank, and a drum that is rotatable around a rotating shaft and has a recess formed on its outer peripheral surface. The slurry supply method includes: the process of sinking the abrasive in the slurry in the tank; after the process of sinking the abrasive, the process of filling the recessed portion with slurry from the supply port; the process of rotating the drum around the rotating shaft; The process of spraying high-pressure fluid from the recessed part; and the process of supplying the slurry taken out from the recessed part by the spray of the high-pressure fluid to the nozzle.

In the slurry supply method of the above aspect, since the slurry in the slurry settles, the slurry is filled in the recessed portion from the supply port formed at the bottom of the tank, so the recessed portion is filled with a higher proportion of slurry material. The filled slurry is taken out from the recessed portion by the jet of high-pressure fluid, and supplied to the nozzle. Therefore, according to this method, it is possible to supply the slurry with a high proportion of the abrasive to the nozzle, and as a result, the efficiency of wet jet processing can be improved.

In one embodiment, in the process of injecting a high-pressure fluid, a mixed fluid containing liquid and compressed air may be injected into the concave portion. In this embodiment, since a mixed fluid containing compressed air and liquid is used to take out the slurry from the recess, the ratio of the abrasive material to the liquid in the slurry supplied to the nozzle can be adjusted. [Effects of Invention]

According to one aspect and various embodiments of the present invention, the processing efficiency of wet jet processing can be improved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in the following description, the same symbol is assigned to the same or equivalent element, and the repeated description will not be repeated. The size ratio of the drawing may not be consistent with the size ratio of the description. The terms "up", "down", "left", and "right" are based on the state of the illustration and are convenient for explanation.

Fig. 1 is a diagram schematically showing an injection processing system of an embodiment. The jet processing system 1 shown in FIG. 1 includes a jet processing device 10, a recovery device 50, and a suction device 42. The jet processing device 10 is a wet jet processing device that jets a slurry containing an abrasive and a liquid to the object to be processed to process the object W to be processed. As the processing of the object W to be processed, cutting processing, groove forming processing, punching processing, etc. are exemplified, but any processing can be performed. The jet processing device 10 shown in FIG. 1 is a so-called direct pressure jet device, and the nozzle supplies the abrasive in the groove by pressurizing the groove.

The jet processing device 10 includes a container 12 and a slurry supply device 60. The container 12 includes an upper container 13 and a lower container 14. The lower part of the upper container 13 is opened. The upper part of the lower container 14 is opened. A passage plate 23 is provided between the upper container 13 and the lower container 14. The passage plate 23 is formed with a plurality of openings through which the slurry S described later can pass. The upper container 13 and the passage plate 23 delimit the processing chamber 13s.

A processing table 24 is provided in the processing room 13s. The object W to be processed is placed on the processing table 24. The object to be processed W may be hard and brittle materials such as ceramic materials and glass materials, or hard-to-cut materials such as CFRP (Carbon Fiber Reinforced Plastics) materials. The processing table 24 is supported by the conveyor drive unit 26. The conveyor driving unit 26 is provided on the passing plate 23. The conveyor drive unit 26 is, for example, a moving mechanism of the X-Y stage. The conveyor drive unit 26 relatively moves the object W placed on the processing table 24 relative to the nozzle 30. The moving direction and speed of the processed body W are appropriately set corresponding to the size, shape, material, and shape of the processed pattern of the processed body W.

A nozzle 30 is provided above the processing table 24. The nozzle 30 is a jet nozzle for direct pressure jet processing, and has a front end 30a and a base end 30b. The tip portion 30a is provided in the processing chamber 13s so as to face the upper surface of the processing table 24. The base end portion 30b is arranged outside the processing chamber 13s, and one end of the supply pipe 68 is connected. The nozzle 30 sprays the slurry S and compressed air supplied from the supply pipe 68 toward the object W in a gas-liquid-solid three-phase flow.

A nozzle driving unit 32 is provided above the upper container 13. The nozzle driving unit 32 includes a connecting mechanism connected to the nozzle 30 and driving the connecting mechanism. The nozzle driving unit 32 drives the motor to move the position of the nozzle 30 in the horizontal direction relative to the object to be processed W placed on the processing table 24. The moving direction and moving speed of the nozzle 30 caused by the nozzle driving unit 32 are appropriately set in accordance with the size, shape, material, and shape of the processed pattern of the object W to be processed.

In one embodiment, one end of the recovery pipe 34 may be connected to the upper part of the upper container 13 so as to communicate with the processing chamber 13s. The other end of the recovery pipe 34 is connected to the recovery device 50. The recovery device 50 includes a cyclone 36 and a trap 38. The other end of the recovery pipe 34 and one end of the cyclone pipe 40 are connected to the cyclone separator 36. An aspirator 42 is connected to the other end of the cyclone pipe 40. The suction device 42 sucks the air in the processing chamber 13s through the cyclone duct 40 and the recovery pipe 34 to set the processing chamber 13s to a negative pressure. The air flow from the processing chamber 13s toward the recovery device 50 is generated by the suction force of the suction device 42. Thereby, a part of the slurry S sprayed from the nozzle 30 toward the object W to be processed and turned into a mist is conveyed to the cyclone 36 through the recovery pipe 34. The cyclone separator 36 separates the misty slurry S from air, and selectively recovers the misty slurry S to the trap 38. The air separated from the mist-like slurry S in the cyclone 36 is sucked to the suction device 42 through the cyclone pipe 40.

In addition, a shielding plate 44 may be provided on the upper part of the processing chamber 13s. The shielding plate 44 is arranged so as to be interposed between the nozzle 30 and one end of the recovery pipe 34, and traps the mist-like slurry S floating in the processing chamber 13s. The slurry S collected by the shielding plate 44 drips onto the passing plate 23 as water droplets. By providing a shielding plate 44 between the nozzle 30 and one end of the recovery pipe 34, the recovery rate of the slurry S is improved.

A lower container 14 is provided below the upper container 13. The lower container 14 has a tapered side wall whose width becomes narrower as it goes downward. The lower container 14 and the passage plate 23 define a recovery space 14s together. The recovery space 14s communicates with the processing chamber 13s via a plurality of openings formed in the passage plate 23. Therefore, the slurry S sprayed from the nozzle 30 toward the object W to be processed is recovered to the recovery space 14 s of the lower container 14 through a plurality of openings formed in the passage plate 23. A lower opening 14e for supplying the recovered slurry S to the slurry supply device 60 is formed at the bottom of the lower container 14.

The slurry supply device 60 is installed below the lower container 14. Hereinafter, referring to FIG. 2, the slurry supply device 60 will be described. FIG. 2 is a partially cut-away perspective view schematically showing the slurry supply device 60. The slurry supply device 60 is a device that supplies the slurry S containing the abrasive M to the nozzle 30. The slurry supply device 60 includes a tank 62, a drum 65, a driving device 66, an injection unit 67, and a supply pipe 68.

The groove 62 is provided below the lower container 14. The tank 62 partitions a storage space 62s inside the tank 62, and the slurry S is stored in the storage space 62s. The slurry S is a fluid containing the abrasive material M and the liquid L, and has a viscosity corresponding to the ratio of the abrasive material M to the liquid L. Without being limited, as the material of the abrasive M, alumina powder, iron milling sand, and mold sand are exemplified. Not limited, as the liquid L, water and cutting oil for machining are exemplified. In addition, in the following, "concentration" is used to indicate the ratio of the abrasive M contained in the slurry S. That is, the higher the concentration of the slurry S indicates that the ratio of the abrasive M to the amount of liquid L is larger, and the lower the concentration of the slurry S indicates that the ratio of the abrasive M to the amount of liquid L is smaller.

The groove 62 includes a top plate 62a and a side wall 62b. In the embodiment shown in FIG. 2, the groove 62 has four side walls 62b. Each of the four side walls 62b has an upper part 62b1, which is arranged parallel to the opposite side wall 62b, and a lower part 62b2, which is inclined so as to approach the side wall 62b as it goes downward. That is, the groove 62 has a side wall whose width becomes narrower as it goes downward. In addition, if the slurry S can be stored inside, the shape of the side wall 62b of the tank 62 is not limited to the embodiment shown in FIG. 2 and may have any shape.

The top plate 62a of the tank 62 is formed with an upper opening 70 for recovering the slurry S from the container 12. The upper opening 70 is located below the lower opening 14e of the lower container 14. A valve body 72 is provided between the groove 62 and the lower container 14, more specifically, between the lower opening 14 e and the upper opening 70. The valve body 72 is, for example, a pressure valve, and is a pressure valve that opens and closes in accordance with the pressure inside the tank 62. Specifically, the valve body 72 is closed when the pressure of the storage space 62s is greater than a specific pressure, and is opened when the pressure of the storage space 62s becomes below the specific pressure. When the valve body 72 is closed, the supply of the slurry S recovered to the lower container 14 to the tank 62 is stopped by blocking the communication between the storage space 62s and the recovery space 14s. Conversely, when the valve body 72 is opened, the storage space 62s and the recovery space 14s are communicated through the lower opening 14e and the upper opening 70, and the slurry S recovered in the lower container 14 is supplied to the tank 62. In one embodiment, the valve body 72 may be, for example, a dump valve or a triangular valve in which a conical valve body is turned upside down by the drive of an air cylinder or the like.

In addition, a lower opening 73 is formed at the bottom of the groove 62. In more detail, the lower opening 73 is formed at the lower end of the lower portion 62b2 of the side wall 62b. The lower opening 73 functions as a supply port for supplying the slurry S in the tank 62 to the drum 65.

In addition, in one embodiment, a stirring blade 74 may be provided inside the tank 62. The stirring wing 74 is arranged at the upper part of the storage space 62s, and is rotated by the driving force of the motor. Here, since the abrasive material M in the slurry S has a greater specific gravity than the liquid L, the abrasive material M sinks to the bottom of the tank 62 as time passes. On the other hand, the cutting powder of the processed object W and the crushed abrasive M produced by the spray of the slurry S from the nozzle 30 float on the surface of the liquid L due to the small particle size of the fragments. By using the rotation of the stirring blade 74 to agitate the slurry S, the floating of the cutting powder of the object W and the fragments of the abrasive material M can be promoted. Furthermore, by adjusting the rotation speed of the stirring blade 74, the particle size of the cutting powder of the processed body W and the fragments of the crushed abrasive material M discharged from the discharge pipe 78 described later can be adjusted.

Furthermore, in one embodiment, a discharge port 76 may be formed on the upper portion of the side wall 62b of the groove 62. The discharge port 76 is connected to the discharge liquid tank 79 via the discharge pipe 78 (refer to FIG. 1). The discharge port 76 recovers the cutting powder of the processed body W floating on the surface of the slurry S and the fragments of the abrasive material M. The cutting powder and the fragments of the abrasive material M recovered from the discharge port 76 are discharged to the discharge liquid tank 79 through the discharge pipe 78.

A roller 65 is provided below the opening 73 in the lower portion of the groove 62. The drum 65 is housed in a box-shaped casing C. FIG. 3 is a perspective view showing the peripheral part of the drum 65 of the slurry supply device 60. As shown in FIG. 3, the drum 65 has a cylindrical shape and is rotatable about a rotation axis 65x. A recess 65a is formed on the outer peripheral surface (side surface) of the drum 65. In the embodiment shown in FIG. 3, a plurality of recesses 65a are formed in the roller 65, and a plurality of protrusions 65b constituting the outer circumferential surface of the roller 65 are formed between the plurality of recesses 65a.

The plurality of recesses 65 a are arranged at substantially equal intervals along the circumferential direction of the drum 65. The plurality of recesses 65a extend parallel to each other. Each of the plurality of recesses 65a has a groove shape extending in a direction parallel to the rotation axis 65x, and both ends thereof form an open end. The recess 65a is formed in a substantially rectangular shape when viewed in a cross section perpendicular to the rotation axis 65x. The plurality of recesses 65a are filled with the slurry S supplied from the lower opening 73. Since the deposited abrasive material M is accumulated at the bottom of the groove 62, the slurry S with a higher concentration is filled from the lower opening 73 toward the recess 65a.

The drive device 66 is connected to the rotating shaft 65x of the drum 65 (refer to FIG. 1). The driving device 66 is, for example, a motor, and applies a driving force to the drum 65 to rotate the drum 65 around the rotating shaft 65x. The driving device 66 receives a control signal from the control device CNT described later, and rotates the drum 65 at a rotation speed corresponding to the control signal.

In one embodiment, the slurry supply device 60 may further include a filling cylinder 64. The filling cylinder 64 is arranged between the lower opening 73 of the tank 62 and the drum 65. That is, the filling cylinder 64 is arranged below the lower opening 73. As shown in FIG. 3, the filling cylinder 64 has a hollow cylindrical shape and has an upper end 64a and a lower end 64b.

The upper end 64a of the filling cylinder 64 is connected to the side wall 62b of the groove 62 in such a way that the inside of the filling cylinder 64 communicates with the storage space 62s through the lower opening 73. In addition, the groove 62 and the filling cylinder 64 may be integrally formed. The lower end 64b of the filling cylinder 64 is curved along the outer circumferential surface of the drum 65 so as to be close to or in contact with the outer circumferential surface of the drum 65. That is, the lower end 64b is arranged to cover the opposing recess 65a from the radially outer side of the roller 65. The lower end 64b of the filling cylinder 64 has the same width as or greater than the width of the recess 65a in the direction parallel to the rotation axis 65x in the direction parallel to the rotation axis 65x. The filling cylinder 64 fills the slurry S supplied from the lower opening 73 of the tank 62 into the recess 65 a of the opposite roller 65.

A spray part 67 is provided in the vicinity of the drum 65. The spray part 67 has a function of taking out the slurry S from the recess 65a by spraying a high-pressure fluid to the recess 65a of the drum 65. As shown in FIG. 2, in one embodiment, the spray part 67 has a liquid supply pipe 80 and an air supply pipe 82.

The liquid supply pipe 80 is connected to a liquid supply device 84 via a pipe 81 (refer to FIG. 1). The liquid supply device 84 is a supply source of the liquid 80f, and supplies the liquid 80f pressurized by compressed air or a liquid pump to the liquid supply pipe 80 through the pipe 81. The liquid 80 f supplied from the liquid supply device 84 has the same composition as the liquid L of the slurry S stored in the tank 62. For example, the liquid 80f is water or cutting oil. The air supply pipe 82 is connected to an air supply device 86 via a pipe 83. The air supply device 86 is a supply source of the compressed air 82f, and supplies the compressed air 82f to the air supply pipe 82 via the pipe 83. In one embodiment, as shown in FIG. 2, the liquid supply pipe 80 and the air supply pipe 82 have a double-pipe structure in which the liquid supply pipe 80 is arranged inside the air supply pipe 82.

In one embodiment, the pipe 81 is provided with a valve 81a and a flow meter 81b. That is, the valve 81 a and the flow meter 81 b are provided between the liquid supply device 84 and the liquid supply pipe 80. The valve 81a adjusts the flow rate of the liquid 80f supplied from the liquid supply device 84 and flowing in the liquid supply pipe 80. The flow meter 81b detects the flow rate of the liquid 80f supplied from the liquid supply device 84 and flowing in the liquid supply pipe 80.

In one embodiment, as shown in FIG. 2, the slurry supply device 60 further includes a pressurizing pipe 98. One end of the pressurizing pipe 98 is connected to the upper part of the groove 62. The other end of the pressurizing pipe 98 is connected to the air supply pipe 82 between the tip portion 82t and the air supply device 86. Therefore, a part of the compressed air 82f supplied from the air supply device 86 to the air supply pipe 82 branches, and is introduced into the tank 62 as the pressurized air 98f through the pressurizing pipe 98.

The inside of the tank 62 is pressurized by supplying pressurizing air 98f. As the pressure in the tank 62 rises and the valve body 72 is closed, the communication between the recovery space 14s of the lower container 14 and the storage space 62s of the tank 62 is blocked. In one embodiment, the compressed air 82f may be supplied from the air supply device 86 at the timing of spraying the slurry S from the nozzle 30, and the pressurized air 98f may be supplied into the tank 62 along with this. When the pressurizing air 98f is supplied into the tank 62, the tank 62 is pressurized. With this pressure, the slurry S in the tank 62 is densely filled into the recess 65 a of the drum 65 through the lower opening 73.

In one embodiment, the front end portion 80t of the liquid supply pipe 80 and the front end portion 82t of the air supply pipe 82 may have a tapered shape whose diameter decreases toward the front end. The liquid 80f flowing in the liquid supply pipe 80 is refined into a mist when ejected from the front end portion 80t of the liquid supply pipe 80, and merges with the compressed air 82f flowing in the air supply pipe 82. The merged liquid 80f and compressed air 82f are injected as a mixed fluid 88 from the front end 82t of the air supply pipe 82. The mixed fluid 88 is a high-pressure fluid including liquid 80f and compressed air 82f.

The injection unit 67 further includes a take-out pipe 90. The extraction pipe 90 is connected to the front end 82t side of the air supply pipe 82. The take-out pipe 90 extends in a direction parallel to the extending direction of the recess 65a, and is arranged adjacent to the roller 65. In addition, the take-out pipe 90 is downstream in the rotation direction of the drum 65, and can be arranged at a position where the slurry S filled in the recess 65a does not drip from the recess 65a.

As shown in FIG. 3, a notch 92 is formed in the take-out pipe 90 in which the wall surface constituting the pipe is partially cut off and a part of the pipe is opened. The notch 92 is provided to face the outer circumferential surface of the drum 65, and has approximately the same width as the recess 65a in the extending direction of the recess 65a. In the notch portion 92, when the roller 65 is located at a specific rotation position, the two end surfaces of the take-out pipe 90 and the two convex portions 65b face each other. In this way, by the two end surfaces of the take-out pipe 90 facing the two convex portions 65b, a flow path is formed between the take-out pipe 90 and the drum 65, which is partitioned by the inner wall surface of the take-out pipe 90 and the concave portion 65a of the drum 65 93.

The mixed fluid 88 injected from the front end 82t of the air supply pipe 82 flows into the flow path 93 through the take-out pipe 90. When the mixed fluid 88 flows in the flow path 93, the slurry S filled in the recess 65a constituting the flow path 93 is taken out from the recess 65a. That is, the mixed fluid 88 ejected from the front end 82t of the air supply pipe 82 is ejected along the extending direction of the recess 65a.

The take-out pipe 90 is connected to the supply pipe 68. The slurry S dropped from the recess 65 a by the injection of the mixed fluid 88 is supplied to the supply pipe 68 along the flow of the mixed fluid 88. The supply pipe 68 supplies the slurry S dropped from the recess 65 a by the spray of the mixed fluid 88 to the nozzle 30.

In one embodiment, an auxiliary compressed air supply device 94 may be connected to the supply pipe 68. The auxiliary compressed air supply device 94 is, for example, a compressor, and supplies 94 f of auxiliary compressed air to the supply pipe 68 via an auxiliary duct. In one embodiment, the auxiliary compressed air supply device 94 can supply auxiliary compressed air 94f having a lower pressure than the mixed fluid 88 to the supply pipe 68. For example, the differential pressure between the auxiliary compressed air 94f and the compressed air 82f is set to 0.01 Mpa or more and 0.1 Mpa or less. The slurry S dropped from the recess 65a by the compressed air 82f is transferred to the nozzle 30.

As described above, the slurry S supplied to the nozzle 30 is sprayed toward the object W to be processed. A part of the slurry S sprayed to the object W to be processed is recovered in the recovery space 14 s of the lower container 14 again, and is supplied to the slurry supply device 60 again.

Furthermore, in one embodiment, the jet processing apparatus 10 may further include a control device CNT. The control device CNT is composed of, for example, a programmable computer, and controls the overall operation of the jet processing system 1. The control device CNT includes, for example, a conveyor drive unit 26, a nozzle drive unit 32, a suction device 42, a drive device 66, a valve 81a, a liquid supply device 84, an air supply device 86, and an auxiliary compressed air supply device 94.

The control device CNT operates in accordance with the input program and sends a control signal. With the control signal from the control device CNT, it is possible to control the moving direction and moving speed of the processing table 24, the moving direction and moving speed of the nozzle 30, the operation and stopping of the suction device 42, the rotation speed of the drum 65, and the adjustment of the liquid The operation and operation stop of the liquid supply device 84 at the flow rate of the liquid 80f flowing in the supply pipe 80, the operation and operation stop of the air supply device 86, and the operation and operation stop of the auxiliary compressed air supply device 94.

Next, referring to FIG. 4, a wet jet processing method according to an embodiment will be described. This wet blasting method is executed using, for example, the blasting system 1 described above. Fig. 4 is a flow chart showing an embodiment of the wet jet processing method. In the wet jet processing method of one embodiment, first, in step ST1, the slurry S is supplied to the nozzle 30 from the slurry supply device 60. 5, the slurry supply method in step ST1 will be described in detail.

Fig. 5 is a flowchart showing a slurry supply method of an embodiment. This slurry supply method is executed using, for example, the slurry supply device 60 shown in FIG. 2. As shown in FIG. 5, step ST1 includes step ST11 to step ST16. In the slurry supply method of one embodiment, first, step ST11 is performed.

In step ST11, by supplying pressurizing air 98f into the tank 62 from the air supply device 86, the tank 62 is pressurized. Next, in step ST12, in the tank 62, the abrasive material M in the slurry S settles. Since the specific gravity of the abrasive material M is greater than the specific gravity of the liquid L, the abrasive material M in the slurry S sinks to the bottom of the tank 62 by leaving it for a specific time in a state where the rotation of the stirring blade 74 is stopped.

After the abrasive material M in the tank 62 settles in step ST12, step ST13 is performed. In step ST13, the slurry S supplied from the lower opening 73 is filled in the recess 65a of the drum 65 by the filling cylinder 64. Since the abrasive material M sinks to the bottom of the groove 62, the slurry S filled in the recess 65a in the step ST13 is a high-concentration slurry with high viscosity.

In the subsequent step ST14, the driving device 66 is used to apply a driving force to the drum 65 to rotate the drum 65 around the rotation axis 65x. Thereby, the slurry S filled in the recess 65a moves downstream in the rotation direction of the drum 65, and is conveyed to a position facing the notch 92 of the take-out pipe 90. In addition, the amount of slurry S supplied to the nozzle 30 depends on the rotation speed of the drum 65. In step ST14, as the rotation speed of the drum 65 increases, the number of recesses 65a filled with the slurry S per unit time increases. On the contrary, by reducing the rotation speed of the drum 65, the number of recesses 65a filled with the slurry S per unit time is reduced. Therefore, by changing the rotation speed of the drum 65, the supply amount of the slurry S to the nozzle 30 can be controlled.

Next, step ST15 is performed. In step ST15, the mixed fluid 88 containing the liquid 80f from the liquid supply pipe 80 and the compressed air 82f from the air supply pipe 82 is sprayed into the recess 65a. The mixed fluid 88 is sprayed along the extending direction of the recess 65a. The slurry S filled in the recess 65a drops by the mixed fluid 88 sprayed as described above. In one embodiment, by adjusting the opening degree of the valve 81a before performing the step ST15, the amount of the liquid 80f contained in the mixed fluid 88 can be adjusted. By adjusting the amount of the liquid 80f contained in the mixed fluid 88, the concentration of the slurry S falling from the recess 65a can be adjusted. If the concentration of the slurry is too high, the polishing material M in the slurry S may accumulate on the object W as the processing of the object W proceeds. The abrasive material M accumulated on the object to be processed W covers the surface of the object to be processed W, and becomes a cause of hindering the progress of the spray processing. By adjusting the amount of the liquid 80f by the adjustment valve 81a, it is possible to suppress the accumulation of the polishing material M on the object W to be processed. In addition, the amount of liquid 80f contained in the mixed fluid 88 can be adjusted by adjusting the supply pressure of the liquid 80f of the liquid supply device 84.

In the subsequent ST16, the slurry S dropped from the recess 65a in the step ST15 is supplied to the nozzle 30. In one embodiment, the auxiliary compressed air 94f is supplied from the auxiliary compressed air supply device 94, and the slurry S is conveyed to the nozzle 30 by the auxiliary compressed air 94f.

Referring again to FIG. 4, the wet jet processing method of an embodiment will be described. In the wet jet processing method of one embodiment, the step ST2 is performed after the slurry S is supplied to the nozzle 30 in the step ST1. In step ST2, the slurry S is sprayed toward the object W from the nozzle 30. At this time, the slurry S and the compressed air 82f are sprayed in a gas-liquid-solid three-phase flow from the nozzle. The slurry S sprayed from the nozzle 30 collides with the processed body W, and the processed body W is processed. At this time, since the abrasive material M is contained in a relatively high proportion in the slurry S sprayed from the nozzle, the object to be processed W is processed with high efficiency.

Next, the slurry supply device of the modified example will be described. Hereinafter, regarding the slurry supply device of the modified example, the difference from the above-mentioned slurry supply device 60 will be mainly described. FIG. 6 is a diagram showing a slurry supply device 100 of a modified example.

As shown in FIG. 6, the slurry supply device 100 includes a drum 102 instead of the drum 65. The drum 102 has a cylindrical shape and can rotate around a rotating shaft 102x. A concave portion 102a extending in the circumferential direction of the drum 102 is formed on the outer peripheral surface (side surface) of the drum 102. In the embodiment shown in FIG. 6, a plurality of recesses 102a are arranged in a direction parallel to the rotation axis 102x. Each of the plurality of recesses 102a is formed in a groove shape and formed to surround the outer peripheral surface of the drum 102. The plurality of recesses 102a extend parallel to each other.

In addition, the slurry supply device 100 includes a spray unit 110 instead of the spray unit 67. The spray part 110 further has an sprayer 112 for spraying the mixed fluid 88 to the drum 102. A liquid supply pipe 80 and an air supply pipe 82 are connected to the ejector 112. A confluence chamber 114 in which the liquid 80f supplied from the liquid supply pipe 80 and the air supply pipe 82 and the compressed air 82f merge is formed inside the ejector 112. A plurality of openings 116 communicating with the confluence chamber 114 are formed in the ejector 112. A plurality of openings 116 are formed at positions corresponding to the plurality of recesses 102a.

When the liquid 80f and the compressed air 82f are supplied from the liquid supply pipe 80 and the air supply pipe 82, the liquid 80f and the compressed air 82f merge in the merging chamber 114. The confluent liquid 80f and compressed air 82f pass through the plurality of openings 116, and the mixed fluid 88 is sprayed toward the plurality of concave portions 102a along the extending direction of the plurality of concave portions 102a. In the embodiment shown in FIG. 6, the mixed fluid 88 is sprayed in the same direction as the plurality of recesses 102a when viewed from the outer circumferential direction of the drum 102. The mixed fluid 88 is sprayed toward the plurality of concave portions 102a, and the slurry S filled in the plurality of concave portions 102a is taken out from the plurality of concave portions 102a. The slurry S taken out from the plurality of recesses 102 a is collected in the recovery container 118, and is fed to the supply pipe 68 from the opening provided at the bottom of the recovery container 118. The slurry S fed to the supply pipe 68 is supplied to the nozzle 30 by the auxiliary compressed air 94f.

Above, various embodiments of the slurry supply device, wet jet processing device, and slurry supply method have been described, but they are not limited to the above-mentioned embodiments, and various modifications can be made within the scope of not changing the gist of the invention. kind. For example, in the above embodiment, the recesses 65a, 102a are groove-shaped, but the recesses 65a, 102a may have any shape as long as the slurry S can be filled. For example, the recesses 65a, 102a may be holes having a circular, elliptical, or polygonal planar shape. In addition, as long as at least one recessed part 65a, 102a is formed in the roller 65, 102, it does not need to form a plural number.

Furthermore, in the above embodiment, the mixed fluid 88 containing the liquid 80f and the compressed air 82f is used to take out the slurry S from the recesses 65a, 102a, but it is possible to spray only one of the liquid 80f or the compressed air 82f toward the recesses 65a, 102a. , And the slurry S is taken out from the recesses 65a and 102a. In addition, the slurry supply device 60 does not need to include the auxiliary compressed air supply device 94. In this case, the slurry S taken out from the recesses 65 a and 102 a is supplied to the nozzle 30 due to the pressure of the mixed fluid 88.

In one embodiment, the slurry supply device 60 may further include a recovery tank for recovering the unfilled slurry S overflowing from the recesses 65a and 102a. The recovery tank is arranged below the drum 65, for example. Moreover, in one embodiment, in order to adjust the supply amount of the slurry S, the depth of the recess 65a can be adjusted.

Hereinafter, the present invention will be explained more specifically based on experimental examples, but the present invention is not limited to the following experimental examples.

(Experimental example 1) In Experimental Example 1, the body W to be processed was subjected to blast processing using the blast processing apparatus 10 shown in FIG. 1. In this experimental example, a dry film photoresist with a reverse pattern of holes formed on the glass substrate W, which is the object to be processed, is drilled by spraying the slurry S from the nozzle 30. Alumina #600 was used as the abrasive M contained in the slurry S, and water was used as the liquid L.

The processing conditions of Experimental Example 1 are as follows. ・Pressure of pressurized air 98f: 0.3 [MPa] ・Pressure of auxiliary compressed air 94f: 0.28 [MPa] ・Aperture of nozzle 30: ϕ6 [mm] ・Flow rate of liquid 80f flowing in liquid supply pipe 80: 0.05 [L/min] ・Supply pressure of liquid supply device 84: 0.4 [MPa] ・Movement speed of nozzle 30: 10 [m/min] ・Moving speed of processing table 24: 20 [mm/min]

The body W to be processed was processed according to the above processing conditions, and the depth of the hole formed in the body W was measured. As a result, the processing depth of the hole was 430 [μm].

In Comparative Experimental Example 1, a dry suction jet processing device (EMS-4 type manufactured by Elfotech Co., Ltd.) was used to jet processing the object W. The same glass substrate as in Experimental Example 1 was used as the object W to be processed. Alumina #600 is used as the abrasive.

The processing conditions of Comparative Experimental Example 1 are as follows. ・Pressure of pressurized air: 0.3 [MPa] ・Aperture of nozzle 30: ϕ6 [mm] ・Movement speed of nozzle 30: 10 [m/min] ・Moving speed of processing table 24: 20 [mm/min]

The body W to be processed was processed according to the above processing conditions, and the depth of the hole formed in the body W was measured. As a result, the processing depth of the hole in Experimental Example 1 was 38 [μm].

According to the results of Experimental Example 1 and Comparative Experimental Example 1, it can be confirmed that the jet processing device 10 of one embodiment has 11.3 times the processing capacity compared with the dry suction jet device.

<Experimental example 2> In Experimental Example 2, the body W to be processed was spray-processed by the spray-processing device 10 shown in FIG. 1. However, in this experimental example, as the slurry supply device, the slurry supply device 100 shown in FIG. 6 was used instead of the slurry supply device 60 shown in FIG. 1. In this experimental example, the object W was sprayed with slurry S to perform deburring processing. A machined part made of SUS304 to which cutting oil is adhered by machining is used as the object to be processed W. As the abrasive M contained in the slurry S, KUAMET-32 μm manufactured by Epson Atmix Co., Ltd. was used, and the cutting oil Moresco Seal Mate BS-6S manufactured by MORESCO Co., Ltd. was used as the liquid L.

The processing conditions of Experimental Example 2 are as follows. ・Pressure of pressurized air 98f: 0.2 [MPa] ・Pressure of auxiliary compressed air 94f: 0.18 [MPa] ・Aperture of nozzle 30: ϕ6 [mm] ・Flow rate of liquid 80f flowing in liquid supply pipe 80: 0.05 [L/min] ・Supply pressure of liquid supply device 84: 0.3 [MPa] ・Movement speed of nozzle 30: 10 [m/min] ・Moving speed of processing table 24: 30 [mm/min]

Deburring of the processed body W is performed according to the above processing conditions. In Experimental Example 2, it was confirmed that the burr was removed from the processed body W by scanning the processed body W once.

In Comparative Experimental Example 2, the same to-be-processed body W was spray-processed using a dry suction jet processing device (EMS-4 type manufactured by Elfotech Co., Ltd.).

The processing conditions of Comparative Experimental Example 2 are as follows. ・Pressure of pressurized air: 0.3 [MPa] ・Aperture of nozzle 30: ϕ6 [mm] ・Movement speed of nozzle 30: 10 [m/min] ・Moving speed of processing table 24: 30 [mm/min]

Deburring of the processed body W is performed according to the above processing conditions. In Comparative Experimental Example 2, it was confirmed that the burr was removed from the processed body W by scanning the processed body W eight times.

According to the results of Experimental Example 2 and Comparative Experimental Example 2, it is confirmed that the jet processing device 10 of one embodiment has 8 times the deburring processing ability compared with the dry suction jet device.

1: Jet processing system 10: Jet processing device 12: container 13: upper container 13s: processing room 14: Lower container 14e: lower opening 14s: Reclaim space 23: Pass the board 24: Processing table 26: Conveyor Drive 30: nozzle 30a: Front end 30b: Base end 32: Nozzle drive 34: Nozzle drive 36: Cyclone 38: catcher 40: Cyclone separator duct 42: attractor 44: Shading plate 50: recovery device 60: Slurry supply device 62: Slot 62a: top plate 62b: side wall 62b1: upper part 62b2: lower part 62s: storage space 64: filling cylinder 64a: upper end 64b: bottom 65: roller 65a: recess 65b: convex 65x: rotation axis 66: Drive 67: Jet Department 68: Supply piping 70: upper opening 72: Valve body 73: Lower opening 74: Lower opening 76: Outlet 78: discharge pipe 79: Drain the liquid tank 80: Liquid supply pipe 80f: liquid 81: Piping 81a: Valve 81b: Flowmeter 82: Air supply pipe 82f: compressed air 82t: Front end 83: Piping 84: Liquid supply device 86: Air supply device 88: Mixed fluid 90: Take out the piping 92: Notch 93: Flow Path 94: auxiliary compressed air supply device 94f: auxiliary compressed air 98: Piping for pressurization 98f: Air for pressurization 100: Slurry supply device 102: roller 102a: recess 102x: Rotation axis 110: Jet Department 112: ejector 114: Confluence Room 116: open 118: recycling container C: Box type enclosure CNT: control device L: Liquid M: Abrasive material S: Slurry W: processed body

Fig. 1 is a diagram schematically showing an injection processing system of an embodiment. Fig. 2 is a perspective view schematically showing a partial cross-sectional view of a slurry supply device of an embodiment. Figure 3 is a diagram schematically showing the periphery of the drum. Fig. 4 is a flow chart showing an embodiment of the spray processing method. Fig. 5 is a flowchart showing a slurry supply method of an embodiment. Fig. 6 is a diagram showing a slurry supply device of a modified example.

30: nozzle

60: Slurry supply device

62: Slot

62a: top plate

62b: side wall

62b1: upper part

62b2: lower part

62s: storage space

64: filling cylinder

65: roller

65a: recess

66: Drive

67: Jet Department

68: Supply piping

70: upper opening

72: Valve body

73: Lower opening

74: Lower opening

76: Outlet

78: discharge pipe

80: Liquid supply pipe

80f: liquid

82: Air supply pipe

82f: compressed air

82t: Front end

88: Mixed fluid

90: Take out the piping

94f: auxiliary compressed air

98: Piping for pressurization

98f: Air for pressurization

C: Box type enclosure

L: Liquid

M: Abrasive material

S: Slurry

W: processed body

Claims (10)

A slurry supply device, which supplies slurry containing abrasives to a nozzle, and includes: The tank, which stores the aforementioned slurry inside, has a supply port formed at the bottom; A drum, which can rotate around a rotating shaft, and is formed with a recess for filling the slurry supplied from the supply port; A driving device that rotates the aforementioned drum around the aforementioned rotating shaft; A spraying part, which sprays high-pressure fluid to the aforementioned concave part; and A supply pipe that supplies the slurry taken out from the recessed portion by the jet of the high-pressure fluid to the nozzle. The slurry supply device of claim 1, wherein the spraying part includes: a liquid supply pipe connected to a liquid supply device that supplies liquid; and an air supply pipe connected to a compressed air supply device that supplies compressed air; and The concave portion sprays a mixed fluid containing the liquid from the liquid supply pipe and the compressed air from the air supply pipe. The slurry supply device of claim 2 further includes a valve provided between the liquid supply pipe and the liquid supply device to adjust the flow rate of the liquid flowing in the liquid supply pipe. The slurry supply device of claim 2 or 3, wherein the aforementioned liquid is cutting oil. The slurry supply device of any one of claims 1 to 4, wherein the recess is a groove extending in a direction parallel to the rotation axis or the circumferential direction of the drum; and The injection portion is configured to inject the high-pressure fluid in the extending direction of the groove. The slurry supply device of any one of claims 1 to 5 further includes an auxiliary compressed air supply device that supplies auxiliary compressed air at a lower pressure than the high-pressure fluid to the supply pipe. The slurry supply device according to any one of claims 1 to 6, further equipped with a pressurizing piping that introduces pressurizing air into the tank. A wet jet processing device, which is provided with the slurry supply device according to any one of claims 1 to 7; and The nozzle sprays the slurry supplied from the slurry supply device. A slurry supply method is used to supply slurry to a nozzle using a slurry supply device. The slurry supply device is provided with a tank for storing slurry containing abrasives inside, and a supply is formed at the bottom of the tank. Mouth; and the drum, which can be rotated around the axis of rotation, is formed with a recess on its outer peripheral surface; and the slurry supply method includes: The process of settling the abrasive in the slurry in the tank; After the step of sinking the abrasive material, the step of filling the concave portion with the slurry from the supply port; The process of rotating the aforementioned drum around the aforementioned rotating shaft; The process of spraying high-pressure fluid to the aforementioned recesses; and The process of supplying the nozzle with the slurry taken out from the recess by the jet of the high-pressure fluid. The slurry supply method of claim 9, wherein in the step of spraying the high-pressure fluid, a mixed fluid containing liquid and compressed air is sprayed to the concave portion.

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