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Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
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2011-06-06 |
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High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
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2011-06-22 |
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Method for positioning wafers in multiple wafer transport
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2011-06-27 |
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Dual section module having shared and unshared mass flow controllers
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Process gas management for an inductively-coupled plasma deposition reactor
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Semiconductor reaction chamber showerhead
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Single-and dual-chamber module-attachable wafer-handling chamber
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Pulsed remote plasma method and system
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Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition
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Showerhead assembly and components thereof
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Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
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Variable conductance gas distribution apparatus and method
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Method for depositing thin film
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Semiconductor device and manufacturing method thereof
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2014-12-22 |
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Semiconductor device and manufacturing method thereof
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Drain cover
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Top plate
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2015-01-26 |
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Caterpillar Inc. |
Filter cap
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2015-02-13 |
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2015-03-11 |
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Cross-flow reactor and method
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Magnetic susceptor to baseplate seal
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Method for protecting layer by forming hydrocarbon-based extremely thin film
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Formation of boron-doped titanium metal films with high work function
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Method for forming aluminum nitride-based film by PEALD
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Caterpillar Inc. |
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Filter cap
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Method for depositing dielectric film in trenches by PEALD
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NbMC layers
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Counter flow mixer for process chamber
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Method for forming dielectric film in trenches by PEALD using H-containing gas
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Method for forming silicon oxide cap layer for solid state diffusion process
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Continuous process incorporating atomic layer etching
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Method of atomic layer etching using functional group-containing fluorocarbon
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Atomic layer deposition of III-V compounds to form V-NAND devices
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Atomic layer deposition of III-V compounds to form V-NAND devices
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Electrode plate for semiconductor manufacturing apparatus
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2016-01-08 |
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Gas dispersing plate for semiconductor manufacturing apparatus
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2016-02-19 |
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Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
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Method for forming silicon nitride film selectively on top/bottom portions
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Method for forming silicon nitride film selectively on top surface
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Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
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Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
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2016-03-09 |
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Gas distribution apparatus for improved film uniformity in an epitaxial system
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Aligned carbon nanotubes
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Process for forming a film on a substrate using multi-port injection assemblies
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Deposition of metal borides
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Deposition of metal borides and silicides
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Deposition of metal borides
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Deposition of metal borides
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Method of forming a germanium oxynitride film
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Source/drain performance through conformal solid state doping
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Source/drain performance through conformal solid state doping
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Method of forming a germanium oxynitride film
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Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method
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Organic reactants for atomic layer deposition
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Selective film deposition method to form air gaps
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Selective deposition method to form air gaps
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Selective deposition method to form air gaps
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Selective deposition of tungsten
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2016-07-28 |
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Method and apparatus for filling a gap
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3D stacked multilayer semiconductor memory using doped select transistor channel
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Methods for thermally calibrating reaction chambers
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Methods for thermally calibrating reaction chambers
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Deposition of charge trapping layers
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Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
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Methods for forming a semiconductor device and related semiconductor device structures
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Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
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2016-11-07 |
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Method of processing a substrate and a device manufactured by using the method
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2016-11-07 |
2020-04-14 |
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Method of processing a substrate and a device manufactured by using the method
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2016-11-15 |
2022-07-26 |
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Gas supply unit and substrate processing apparatus including the gas supply unit
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2016-11-15 |
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Gas supply unit and substrate processing apparatus including the gas supply unit
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2016-11-28 |
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Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
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Substrate processing apparatus
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Method of forming a structure on a substrate
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2024-04-30 |
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Sequential infiltration synthesis apparatus
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2016-12-15 |
2022-09-20 |
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Sequential infiltration synthesis apparatus and a method of forming a patterned structure
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2016-12-15 |
2023-02-14 |
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Sequential infiltration synthesis apparatus
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2016-12-15 |
2024-06-04 |
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Sequential infiltration synthesis apparatus and a method of forming a patterned structure
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2016-12-15 |
2023-12-26 |
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Sequential infiltration synthesis apparatus and a method of forming a patterned structure
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2016-12-15 |
2020-10-13 |
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Shower plate structure for exhausting deposition inhibiting gas
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2016-12-15 |
2018-11-27 |
Asm Ip Holding B.V. |
Shower plate
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2016-12-19 |
2021-05-11 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2016-12-22 |
2022-02-15 |
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Method of forming a structure on a substrate
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2016-12-22 |
2019-04-23 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
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2016-12-22 |
2020-09-22 |
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Method of forming a structure on a substrate
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2016-12-28 |
2020-12-15 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
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2017-01-10 |
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Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
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Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
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Cassette holder assembly for a substrate cassette and holding member for use in such assembly
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Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
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Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target
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Method for selectively depositing a metallic film on a substrate
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Storage device for storing wafer cassettes for use with a batch furnace
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2017-11-27 |
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Storage device for storing wafer cassettes for use with a batch furnace
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Method of post-deposition treatment for silicon oxide film
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Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
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Semiconductor processing apparatus and a method for processing a substrate
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Wafer handling chamber with moisture reduction
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Wafer handling chamber with moisture reduction
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Temperature-controlled flange and reactor system including same
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Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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2018-07-03 |
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Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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2018-07-16 |
2020-09-08 |
Asm Ip Holding B.V. |
Diaphragm valves, valve components, and methods for forming valve components
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2018-07-26 |
2019-11-19 |
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Method for forming thermally stable organosilicon polymer film
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2018-08-06 |
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Multi-port gas injection system and reactor system including same
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2018-08-09 |
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Vertical furnace for processing substrates and a liner for use therein
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2018-08-16 |
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Gas distribution device for a wafer processing apparatus
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2018-08-22 |
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Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
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2018-09-11 |
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Substrate processing apparatus and method
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2018-09-11 |
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Substrate processing apparatus and method
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2018-09-11 |
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Thin film deposition method
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2018-09-14 |
2021-06-29 |
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Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
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2018-10-01 |
2024-01-30 |
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Substrate retaining apparatus, system including the apparatus, and method of using same
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2018-10-03 |
2022-01-25 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
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2018-10-08 |
2022-08-16 |
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Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same
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2018-10-11 |
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Method of forming conformal silicon carbide film by cyclic CVD
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2018-10-16 |
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Method for etching a carbon-containing feature
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2018-10-19 |
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Substrate processing apparatus and substrate processing method
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2018-10-19 |
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Substrate processing apparatus and substrate processing method
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2018-10-24 |
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Susceptor for semiconductor substrate supporting apparatus
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2018-10-25 |
2019-08-13 |
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Methods for forming a silicon nitride film
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2018-10-31 |
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Substrate processing apparatus for processing substrates
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2018-10-31 |
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Substrate processing apparatus for processing substrates
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2018-11-02 |
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Substrate supporting unit and a substrate processing device including the same
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2018-11-02 |
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Substrate supporting unit and a substrate processing device including the same
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2018-11-06 |
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Methods for selectively depositing an amorphous silicon film on a substrate
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2018-11-07 |
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Methods for depositing a boron doped silicon germanium film
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2018-11-16 |
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Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
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2018-11-16 |
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Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
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2018-11-16 |
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Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
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2018-11-16 |
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Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
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2018-11-16 |
2020-10-27 |
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Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
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2018-11-26 |
2020-02-11 |
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Method of forming oxynitride film
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2018-11-28 |
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Substrate processing apparatus for processing substrates
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2018-11-30 |
2022-01-04 |
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Method for forming an ultraviolet radiation responsive metal oxide-containing film
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2018-12-04 |
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Method of cleaning substrate processing apparatus
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2018-12-13 |
2021-10-26 |
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Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
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2018-12-13 |
2023-09-26 |
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Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
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2018-12-14 |
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Method of forming a device structure using selective deposition of gallium nitride and system for same
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2019-01-17 |
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Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
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2019-01-17 |
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Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
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2019-01-22 |
2021-11-09 |
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Substrate processing device
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2019-02-01 |
2021-09-21 |
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Method of topology-selective film formation of silicon oxide
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2019-02-20 |
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Cyclical deposition method including treatment step and apparatus for same
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2019-02-20 |
2022-05-24 |
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Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
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2019-02-20 |
2023-10-24 |
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Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
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2019-02-20 |
2022-10-25 |
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Apparatus and methods for plug fill deposition in 3-D NAND applications
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2019-02-20 |
2022-01-18 |
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Method and apparatus for filling a recess formed within a substrate surface
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2019-02-20 |
2023-03-28 |
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Method and apparatus for filling a recess formed within a substrate surface
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2019-02-22 |
2023-04-18 |
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Substrate processing apparatus and method for processing substrates
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2019-02-26 |
2020-04-14 |
Ziyong Chen |
Filter
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2019-03-08 |
2021-09-07 |
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Structure including SiOC layer and method of forming same
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2019-03-08 |
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Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
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2019-03-08 |
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Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
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2019-03-08 |
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Structure including SiOCN layer and method of forming same
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2019-03-28 |
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Door opener and substrate processing apparatus provided therewith
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2019-04-01 |
2023-01-10 |
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Method for manufacturing a semiconductor device
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2019-04-19 |
2022-09-20 |
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Layer forming method and apparatus
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2019-04-24 |
2023-11-14 |
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Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly
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2019-05-07 |
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Asm Ip Holding B.V. |
Chemical source vessel with dip tube
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2019-05-07 |
2022-03-29 |
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Method for reforming amorphous carbon polymer film
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2019-05-10 |
2022-06-07 |
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Method of depositing material onto a surface and structure formed according to the method
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2019-05-16 |
2022-11-29 |
Asm Ip Holding B.V. |
Wafer boat handling device, vertical batch furnace and method
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2019-05-16 |
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Wafer boat handling device, vertical batch furnace and method
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2019-05-17 |
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Susceptor shaft
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2019-05-17 |
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Susceptor shaft
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Gas channel plate
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2019-06-05 |
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Device for controlling a temperature of a gas supply unit
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2019-06-06 |
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Method of using a gas-phase reactor system including analyzing exhausted gas
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2019-06-06 |
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Gas-phase reactor system including a gas detector
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2019-06-11 |
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Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method
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2019-06-11 |
2022-10-18 |
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Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method
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2019-06-14 |
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Asm Ip Holding B.V. |
Shower plate
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2019-06-27 |
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Showerhead vacuum transport
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2019-07-03 |
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Temperature control assembly for substrate processing apparatus and method of using same
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2019-07-03 |
2022-07-19 |
Asm Ip Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same
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2019-07-09 |
2023-03-14 |
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Plasma device using coaxial waveguide, and substrate treatment method
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2019-07-10 |
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Substrate support assembly and substrate processing device including the same
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2019-07-10 |
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Substrate support assembly and substrate processing device including the same
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2019-07-16 |
2024-05-28 |
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Substrate processing device
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2019-07-16 |
2023-05-30 |
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Substrate processing device
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2019-07-17 |
2023-06-27 |
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Methods of forming silicon germanium structures
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2019-07-17 |
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Radical assist ignition plasma system and method
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2019-07-18 |
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Method of forming structures using a neutral beam
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2019-07-18 |
2023-05-09 |
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Method of forming structures using a neutral beam
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2019-07-19 |
2024-10-08 |
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Method of forming topology-controlled amorphous carbon polymer film
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2019-07-19 |
2022-03-22 |
Asm Ip Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film
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2019-07-29 |
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Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation
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2019-07-30 |
2022-09-13 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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(en)
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2019-07-30 |
2022-08-30 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2019-07-31 |
2023-02-21 |
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Vertical batch furnace assembly
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2019-07-31 |
2023-02-21 |
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Vertical batch furnace assembly
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2019-07-31 |
2022-01-18 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
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2019-07-31 |
2024-01-16 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
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2019-08-05 |
2023-06-20 |
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Liquid level sensor for a chemical source vessel
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2019-08-19 |
2022-09-27 |
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Susceptor shaft
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2019-08-19 |
2022-10-04 |
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Susceptor support
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2019-08-21 |
2023-05-02 |
Asm Ip Holding B.V. |
Film-forming material mixed-gas forming device and film forming device
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2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Insulator
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2019-08-22 |
2022-04-19 |
Asm Ip Holding B.V. |
Exhaust duct
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2019-08-22 |
2022-01-11 |
Asm Ip Holding B.V. |
Electrode
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2019-08-22 |
2021-09-14 |
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Gas distributor
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2019-08-22 |
2024-07-16 |
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Method for forming a structure with a hole
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2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Method for forming a structure with a hole
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2019-08-23 |
2024-02-13 |
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Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film
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2019-08-23 |
2024-07-09 |
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Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane
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2019-08-23 |
2022-12-13 |
Asm Ip Holding B.V. |
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
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2019-08-23 |
2022-03-29 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
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2019-08-23 |
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2019-08-26 |
2021-01-26 |
Applied Materials, Inc. |
Sputtering target for a physical vapor deposition chamber
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2019-09-04 |
2022-11-08 |
Asm Ip Holding B.V. |
Methods for selective deposition using a sacrificial capping layer
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2019-09-05 |
2023-11-21 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2019-09-25 |
2023-01-24 |
Asm Ip Holding B.V. |
Substrate processing method
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2019-10-02 |
2023-03-21 |
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Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process
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2019-10-08 |
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Reactor system including a gas distribution assembly for use with activated species and method of using same
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2019-10-08 |
2022-05-24 |
Asm Ip Holding B.V. |
Substrate processing device having connection plates, substrate processing method
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2019-10-10 |
2023-08-22 |
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Method of forming a photoresist underlayer and structure including same
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2019-10-14 |
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Vertical batch furnace assembly with detector to detect cassette
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2019-10-16 |
2023-04-25 |
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Method of topology-selective film formation of silicon oxide
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2019-10-17 |
2023-04-25 |
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Methods for selective deposition of doped semiconductor material
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2019-10-21 |
2022-04-26 |
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Apparatus and methods for selectively etching films
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2019-10-25 |
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Methods for filling a gap feature on a substrate surface and related semiconductor structures
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2019-10-29 |
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Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
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Asm Ip Holding B.V. |
Structures with doped semiconductor layers and methods and systems for forming same
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2019-11-15 |
2022-11-15 |
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Method for providing a semiconductor device with silicon filled gaps
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2019-11-20 |
2023-04-11 |
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Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
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2019-11-26 |
2024-02-27 |
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Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
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2019-11-26 |
2022-08-02 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2019-11-29 |
2023-05-09 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2019-11-29 |
2024-03-05 |
Asm Ip Holding B.V. |
Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing
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2019-12-02 |
2024-03-12 |
Asm Ip Holding B.V. |
Substrate processing apparatus having electrostatic chuck and substrate processing method
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2019-12-04 |
2023-12-12 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2019-12-17 |
2024-01-30 |
Asm Ip Holding B.V. |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
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2019-12-19 |
2022-12-13 |
Asm Ip Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures
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2019-12-19 |
2024-10-15 |
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Channeled lift pin
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Injector
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Method of forming high aspect ratio features
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Method of forming thin film and method of modifying surface of thin film
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Method of forming structures including a vanadium or indium layer
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Method and apparatus for transmittance measurements of large articles
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Methods for depositing gap filling fluids and related systems and devices
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Method for depositing low temperature phosphorous-doped silicon
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System dedicated for parts cleaning
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Substrate handling device with adjustable joints
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Substrate handling device with adjustable joints
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Method for fabricating layer structure having target topological profile
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Applied Materials, Inc. |
Sputter target for a physical vapor deposition chamber
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Thin film forming method
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Method for forming barrier layer and method for manufacturing semiconductor device
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Apparatus and methods for selectively etching silicon oxide films
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Method of forming chromium nitride layer and structure including the chromium nitride layer
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Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods
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Vertical batch furnace assembly comprising a cooling gas supply
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Vertical batch furnace assembly comprising a cooling gas supply
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Solid source precursor vessel
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Fast FOUP swapping with a FOUP handler
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Fast FOUP swapping with a FOUP handler
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Substrate processing system for processing substrates with an electronics module located behind a door in a front wall of the substrate processing system
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Laser alignment fixture for a reactor system
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Substrate processing apparatus
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Apparatus for depositing thin films using hydrogen peroxide
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Rotating substrate support
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Structures and methods for use in photolithography
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Method and system for forming patterned structures using multiple patterning process
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Weighted lift pin
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Electrode for semiconductor processing apparatus
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Apparatus and method for etching metal nitrides
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Deposition method and an apparatus for depositing a silicon-containing material
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Gas supply unit and substrate processing apparatus including gas supply unit
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Method of depositing material on stepped structure
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Method of depositing vanadium metal
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Method and device for depositing silicon onto substrates
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Methods for filling a gap and related systems and devices
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Injector configured for arrangement within a reaction chamber of a substrate processing apparatus
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Runout and wobble measurement fixtures
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Precursor capsule, a vessel and a method
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Plasma treatment device having matching box
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Transition metal deposition method
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Asm Ip Holding B.V. |
Electrode for substrate processing apparatus
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Asm Ip Holding B.V. |
Reactor wall for substrate processing apparatus
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Asm Ip Holding B.V. |
Gas flow control plate for substrate processing apparatus
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Asm Ip Holding B.V. |
Gas distributor for substrate processing apparatus
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Asm Ip Holding B.V. |
Gas flow control plate
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2021-09-29 |
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Hansgrohe Se |
Shower head
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2024-01-23 |
Hansgrohe Se |
Shower head
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2021-09-30 |
2024-08-13 |
Lam Research Corporation |
Showerhead for semiconductor processing
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