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USD1038900S1 - Showerhead for semiconductor processing - Google Patents

Showerhead for semiconductor processing Download PDF

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Publication number
USD1038900S1
USD1038900S1 US29/789,575 US202129789575F USD1038900S US D1038900 S1 USD1038900 S1 US D1038900S1 US 202129789575 F US202129789575 F US 202129789575F US D1038900 S USD1038900 S US D1038900S
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US
United States
Prior art keywords
view
semiconductor processing
showerhead
area shown
enlarged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/789,575
Inventor
Aaron Blake Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Priority to US29/789,575 priority Critical patent/USD1038900S1/en
Assigned to LAM RESEARCH CORPORATION reassignment LAM RESEARCH CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MILLER, Aaron Blake
Priority to TW111301461D01F priority patent/TWD229458S/en
Priority to JP2022006566F priority patent/JP1737180S/en
Priority to JP2022006567F priority patent/JP1737181S/en
Priority to TW111301461F priority patent/TWD229457S/en
Application granted granted Critical
Publication of USD1038900S1 publication Critical patent/USD1038900S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is an isometric view of a first embodiment of a showerhead for semiconductor processing.
FIG. 2 is a front view thereof.
FIG. 3 is a back view thereof.
FIG. 4 is a right-side view thereof.
FIG. 5 is a left-side view thereof.
FIG. 6 is a top view thereof.
FIG. 7 is a bottom view thereof.
FIG. 8 is a perspective view thereof.
FIG. 9 is another perspective view thereof.
FIG. 10 is the top view thereof.
FIG. 11 is an enlarged partial view of the area shown in FIG. 10 .
FIG. 12 is a cross-sectional view along line 12-12 shown in FIG. 10 .
FIG. 13 is an enlarged partial view of the area shown in FIG. 12 .
FIG. 14 is the bottom view thereof.
FIG. 15 is an enlarged view of the area shown in FIG. 14 .
FIG. 16 is an isometric view of a second embodiment of a showerhead for semiconductor processing.
FIG. 17 is a front view thereof.
FIG. 18 is a back view thereof.
FIG. 19 is a right-side view thereof.
FIG. 20 is a left-side view thereof.
FIG. 21 is a top view thereof.
FIG. 22 is a bottom view thereof.
FIG. 23 is a perspective view thereof.
FIG. 24 is another perspective view thereof.
FIG. 25 is the top view thereof.
FIG. 26 is an enlarged partial view of the area shown in FIG. 25 .
FIG. 27 is a cross-sectional view along line 27-27 shown in FIG. 25 .
FIG. 28 is an enlarged partial view of the area shown in FIG. 27 .
FIG. 29 is the bottom view thereof; and,
FIG. 30 is an enlarged view of the area shown in FIG. 29 .
The showerheads for semiconductor processing shown in FIGS. 1-30 are for use in semiconductor processing equipment in order to flow fluids, liquids, and/or gases onto a semiconductor substrate.
The dashed broken line portions in the drawings are included to show portions of the depicted articles that form no part of the claimed design. The dash-dot-dash broken line portions in the drawings are included to show boundaries of partial or sectional views.

Claims (1)

    CLAIM
  1. I claim the ornamental design for a showerhead for semiconductor processing, as shown and described.
US29/789,575 2021-09-30 2021-09-30 Showerhead for semiconductor processing Active USD1038900S1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US29/789,575 USD1038900S1 (en) 2021-09-30 2021-09-30 Showerhead for semiconductor processing
TW111301461D01F TWD229458S (en) 2021-09-30 2022-03-29 Showerhead for semiconductor processing
JP2022006566F JP1737180S (en) 2021-09-30 2022-03-29 Shower head for semiconductor processing equipment
JP2022006567F JP1737181S (en) 2021-09-30 2022-03-29 Shower head for semiconductor processing equipment
TW111301461F TWD229457S (en) 2021-09-30 2022-03-29 Showerhead for semiconductor processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/789,575 USD1038900S1 (en) 2021-09-30 2021-09-30 Showerhead for semiconductor processing

Publications (1)

Publication Number Publication Date
USD1038900S1 true USD1038900S1 (en) 2024-08-13

Family

ID=85198457

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/789,575 Active USD1038900S1 (en) 2021-09-30 2021-09-30 Showerhead for semiconductor processing

Country Status (3)

Country Link
US (1) USD1038900S1 (en)
JP (2) JP1737181S (en)
TW (2) TWD229458S (en)

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USD286319S (en) 1983-07-11 1986-10-21 Mathis Cleo D Guard for a water suction pipe
US20030010452A1 (en) * 2001-07-16 2003-01-16 Jong-Chul Park Shower head of a wafer treatment apparatus having a gap controller
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USD578619S1 (en) 2007-11-28 2008-10-14 Rainwater Management Solutions Siphonic roof drain
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USD614267S1 (en) 2007-09-10 2010-04-20 Silvano Breda Circular shower strainer
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USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD733843S1 (en) * 2014-02-04 2015-07-07 ASM IP Holding, B.V. Shower plate
USD759193S1 (en) 2015-04-01 2016-06-14 Cummins Emission Solutions, Inc. Water deflector
USD762814S1 (en) 2013-04-11 2016-08-02 Canada Pipeline Accessories, Co., Ltd. Flow conditioner
USD800782S1 (en) 2015-11-09 2017-10-24 Eaton Corporation Drive plate
USD807494S1 (en) 2016-03-24 2018-01-09 Lg Electronics Inc. Cover for air purifier with humidifier
USD829306S1 (en) * 2016-07-06 2018-09-25 Asm Ip Holding B.V. Shower plate
USD834686S1 (en) * 2016-12-15 2018-11-27 Asm Ip Holding B.V. Shower plate
USD849055S1 (en) 2017-03-02 2019-05-21 Ebm-Papst Landshut Gmbh Engine cap
USD900760S1 (en) 2018-07-24 2020-11-03 Hitachi High-Tech Corporation Ion shield plate for semiconductor manufacturing apparatus
USD923756S1 (en) 2019-02-22 2021-06-29 Robert William Aiken Shear gate
JP1693255S (en) 2020-08-03 2021-08-23
US20210404064A1 (en) * 2020-06-24 2021-12-30 Tokyo Electron Limited Showerhead for Process Tool

Patent Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD286319S (en) 1983-07-11 1986-10-21 Mathis Cleo D Guard for a water suction pipe
US20030010452A1 (en) * 2001-07-16 2003-01-16 Jong-Chul Park Shower head of a wafer treatment apparatus having a gap controller
US6854580B2 (en) 2003-02-06 2005-02-15 Borgwarner, Inc. Torsional damper having variable bypass clutch with centrifugal release mechanism
USD535673S1 (en) 2004-01-16 2007-01-23 Thermal Dynamics Corporation Gas distributor for a plasma arc torch
US20050258280A1 (en) 2004-05-24 2005-11-24 Shin-Etsu Chemical Co., Ltd. Shower plate for plasma processing apparatus and plasma processing apparatus
USD524600S1 (en) 2004-08-26 2006-07-11 Maytag Corporation Convection cover for cooking appliance
USD549815S1 (en) 2006-03-27 2007-08-28 Murphy Timothy M Air flow directing fixture for heating, air conditioning and ventilation devices
USD614258S1 (en) 2006-04-06 2010-04-20 Anemos Company Ltd. Motionless mixer
US20080216958A1 (en) * 2007-03-07 2008-09-11 Novellus Systems, Inc. Plasma Reaction Apparatus Having Pre-Seasoned Showerheads and Methods for Manufacturing the Same
USD562357S1 (en) 2007-04-20 2008-02-19 Alamo Group, Inc. Disk for rotary mower knives
USD614267S1 (en) 2007-09-10 2010-04-20 Silvano Breda Circular shower strainer
USD578619S1 (en) 2007-11-28 2008-10-14 Rainwater Management Solutions Siphonic roof drain
USD584697S1 (en) * 2008-04-23 2009-01-13 Littelfuse, Inc. Vehicle electrical center subassembly
USD665055S1 (en) * 2012-01-24 2012-08-07 Asm Ip Holding B.V. Shower plate
USD690671S1 (en) * 2012-03-20 2013-10-01 Veeco Instruments Inc. Wafer carrier having pockets
USD678483S1 (en) 2012-08-09 2013-03-19 Sun C. Barker Disposable shower strainer
US20140235069A1 (en) 2013-02-15 2014-08-21 Novellus Systems, Inc. Multi-plenum showerhead with temperature control
USD762814S1 (en) 2013-04-11 2016-08-02 Canada Pipeline Accessories, Co., Ltd. Flow conditioner
USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD733843S1 (en) * 2014-02-04 2015-07-07 ASM IP Holding, B.V. Shower plate
USD735836S1 (en) * 2014-02-04 2015-08-04 Asm Ip Holding B.V. Shower plate
USD759193S1 (en) 2015-04-01 2016-06-14 Cummins Emission Solutions, Inc. Water deflector
USD825614S1 (en) 2015-11-09 2018-08-14 Eaton Intelligent Power Limited Grease cover
USD800782S1 (en) 2015-11-09 2017-10-24 Eaton Corporation Drive plate
USD807494S1 (en) 2016-03-24 2018-01-09 Lg Electronics Inc. Cover for air purifier with humidifier
USD829306S1 (en) * 2016-07-06 2018-09-25 Asm Ip Holding B.V. Shower plate
USD834686S1 (en) * 2016-12-15 2018-11-27 Asm Ip Holding B.V. Shower plate
USD849055S1 (en) 2017-03-02 2019-05-21 Ebm-Papst Landshut Gmbh Engine cap
USD900760S1 (en) 2018-07-24 2020-11-03 Hitachi High-Tech Corporation Ion shield plate for semiconductor manufacturing apparatus
USD923756S1 (en) 2019-02-22 2021-06-29 Robert William Aiken Shear gate
US20210404064A1 (en) * 2020-06-24 2021-12-30 Tokyo Electron Limited Showerhead for Process Tool
JP1693255S (en) 2020-08-03 2021-08-23
USD948658S1 (en) * 2020-08-03 2022-04-12 Lam Research Corporation High density hole pattern dual plenum hole showerhead assembly

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Title
CN Office Action dated Jun. 17, 2022, in Application No. CN202230171545.4 with English translation.
CN Office Action dated Jun. 5, 2023, in Application No. CN202230171545.4 with English translation.
Delta RP62734 1.5 Gpm Handshower Flow Regulator Washer, May 15, 2011, amazon.com, Nov. 17, 2021.URL: https://www.amazon.com/Delta-RP62734-Handshower-Regulator-Washer/dp/B0050XGBXM (Year: 2011).
JP Office Action dated Jan. 13, 2023 in Application No. JP2022-006568 with English Translation.
JP Office Action dated Jun. 30, 2023, in Application No. JP2022-006568 with English Translation.
JP Office Action dated Oct. 7, 2022, in application No. JP2022-006566 with English Translation.
JP Office Action dated Oct. 7, 2022, in application No. JP2022-006567 with English Translation.
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KR Office Action dated Nov. 22, 2022, in Application No. KR30-2022-0012511 with English Translation.
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Le Keye Shower Drain Hair Catcher/Strainer, Mar. 16, 2017, amazon.com, Nov. 17, 2021, Nov. 17, 2021. URL: https://www.amazon.com/LEKEYE-Catcher-Strainer-Stainless-Silicone/dp/B06W2MPGZV (Year: 2017).
Standard Motor Products LX249 Ignition Pick Up, Nov. 11, 2005, Amazon.com, Nov. 17, 2021. URL: https://www.amazon.com/Standard-Motor-Products-LX249-Ignition/dp/B000C7ZTS4/ (Year: 2005).
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TW Office Action dated Mar. 16, 2023, in Application No. TW111301467 with English translation.
TW Office Action dated Sep. 18, 2023, in application No. TW111301467 with English translation.

Also Published As

Publication number Publication date
JP1737181S (en) 2023-02-17
TWD229458S (en) 2024-01-11
TWD229457S (en) 2024-01-11
JP1737180S (en) 2023-02-17

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