Nothing Special   »   [go: up one dir, main page]

TWI442531B - 具有可調間距柵格陣列封裝之熱消散改善的系統與方法 - Google Patents

具有可調間距柵格陣列封裝之熱消散改善的系統與方法 Download PDF

Info

Publication number
TWI442531B
TWI442531B TW99121577A TW99121577A TWI442531B TW I442531 B TWI442531 B TW I442531B TW 99121577 A TW99121577 A TW 99121577A TW 99121577 A TW99121577 A TW 99121577A TW I442531 B TWI442531 B TW I442531B
Authority
TW
Taiwan
Prior art keywords
region
pitch
package
solder
pads
Prior art date
Application number
TW99121577A
Other languages
English (en)
Other versions
TW201121016A (en
Inventor
Jianjun Li
Robert Warren
Nic Rossi
Original Assignee
Conexant Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Conexant Systems Inc filed Critical Conexant Systems Inc
Publication of TW201121016A publication Critical patent/TW201121016A/zh
Application granted granted Critical
Publication of TWI442531B publication Critical patent/TWI442531B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3677Wire-like or pin-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48105Connecting bonding areas at different heights
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/49105Connecting at different heights
    • H01L2224/49109Connecting at different heights outside the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16152Cap comprising a cavity for hosting the device, e.g. U-shaped cap
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Wire Bonding (AREA)

Description

具有可調間距柵格陣列封裝之熱消散改善的系統與方法
本發明大體上係關於半導體封裝且特定言之係關於可調間距介面之使用。
由於對於具有現代積體電路(IC)之更多輸入-輸出(I/O)介面之需要,IC封裝已自雙列直插引腳(DIP)封裝(其中僅在引腳柵格陣列(PGA)周邊上引腳係有用的)演進而來,其中在該封裝下在一柵格圖案中引腳係有用的。在一PGA中之引腳係用於將來自積體電路之電訊號傳導至一印刷電路板,且反之亦然。一經封裝的球柵格陣列BGA以附接至該封裝(其將電訊號傳導至印刷電路板PCB且自印刷電路板PCB傳導電訊號)之底部之焊料球代替該等引腳,而不是具有長引腳。匹配的PCB具有呈匹配該等焊料球之圖案之導電墊。當加熱該封裝時,焊料熔化並耦合該封裝至該PCB。當該封裝冷卻時,焊料凝固,從而完成組裝。
一BGA封裝提供高密度連接,當技術微型化時尤為如此。隨著輸出引腳密度增加,諸如DIP與PGA之較老技術不得不將引腳更緊密地封裝在一起,使得組裝更困難。若焊料溢出,焊接高密度引腳則造成使相鄰引腳短路之一更高機率。BGA避免此缺點,此係因為該焊料為被禁大小之形式且係預先定位於該封裝上。
因為輸出導體比在基於封裝之引腳內短得多,所以BGA具有較低電感。在一封裝內之電感可引起不必要之訊號失真,在高速應用中尤為如此。優於基於封裝之引腳之BGA封裝之另一優點提供該封裝與PCB之間之較低熱電阻。此允許更多地將熱量從積體電路導走,從而有助於防止過熱。
一積體電路可透過接線或藉由覆晶連接而連接至球。圖1圖解說明一典型接線接合BGA封裝之一截面。經製造晶粒102與晶粒附接件104一起附接至基板106。經製造晶粒102係透過接合墊110而電氣地接達穿過接線108。接線108亦可透過諸如金屬跡線112之一金屬跡線而連接至基板106。在一些封裝中,基板106可包括多層且含有用於繞送之額外金屬跡線,但在此圖解中,基板106係一多層。金屬跡線112係透過通孔114而連接至諸如金屬跡線116之一接合指狀物。諸如金屬跡線116之在基板底部上之金屬跡線包括諸如焊料墊118之一焊料墊,其中諸如焊料球120之一焊料球可在工廠被附接。焊料遮罩122覆蓋在基板底部上之該等金屬跡線,但使開口曝露諸如焊料墊118之該等焊料墊。模製化合物130填充該封裝。
通常,諸如通孔114之該等通孔係鑽入該基板中且沿著通孔壁塗覆一金屬或導體以維持金屬跡線112與金屬跡線116之間之電接觸。出於此目的,以一導體完全填滿該通孔並非必要。
穿過基板106之通孔除了與一經製造晶粒、焊料球電接觸外,亦可用於熱目的。例如,通孔124係與經製造晶粒102熱接觸。該通孔124亦係耦合至焊料墊126與焊料球128。在此情況下,通孔124亦可用作為一熱通孔。一通孔可用作為一電通孔、一熱通孔之一者或二者。一熱通孔可用諸如一金屬之一熱導體完全填滿。此較若該通孔僅用熱導體塗覆提供更好之熱傳導。因此,該通孔接著將以焊料遮罩材料填滿。
諸如經電耦合之介面墊118之介面墊通常係耦合至一印刷電路板內之一金屬跡線,其中訊號或電流可耦合至其他組件。在BGA封裝之情況下,該等介面墊係稱為焊料墊。諸如可用於熱目的之焊料球128之該等焊料球經常係耦合至一單一共同金屬線。事實上,通常此金屬線係PCB上之一接地平面。
圖2更詳細地顯示基板之表面上之金屬跡線。一些例示性跡線係顯示為基板106之頂部上之金屬跡線112。亦指出晶粒102之位置。在該詳細視圖中,區域202顯示接線可在何處附接至金屬跡線。區域204顯示諸如鋪設於該等金屬跡線下方之通孔114之該等通孔之位置。
圖3更詳細地顯示基板底部上之金屬跡線。六個例示性金屬跡線係顯示為金屬跡線116。各金屬跡線包括顯示為118之一焊料墊。區域302顯示通孔下方之區域。
圖4顯示覆蓋圖3中顯示之該等金屬跡線之焊料遮罩122的一對應區段。焊料遮罩122覆蓋基板底部上之該等金屬跡線,但為焊料墊留下開口。
圖5圖解說明稱為一下腔BGA封裝之一替代BGA封裝。經製造晶粒502與晶粒附接件504一起附接至通常由銅製成之金屬塊506。此組態相較於圖1之組態係上下顛倒。接線510透過接合墊508連接至經製造晶粒502。接線510亦連接至層壓板512。層壓板512包括金屬跡線514與通孔516。接線510特定連接至金屬跡線514。通孔516連接金屬跡線514至焊料墊518與焊料球520。一蓋子或液體囊封劑(522)完成該封裝。
圖6圖解說明使用一覆晶附接之一BGA封裝。經製造晶粒602係附接於多層基板606。覆晶附接不僅提供經製造晶粒602至多層基板606之一實體附接,亦提供經製造晶粒602與多層基板606之間之電接觸。經製造晶粒602係使用凸塊604而不是使用接線附接至通孔墊620。通孔墊620繼而附接至本文藉由通孔610顯示之通孔。此後,介於經製造晶粒602與基板606之間包含凸塊604之介面被填膠622包住。此封裝使用金屬跡線608與額外通孔624以透過基板606將電訊號自經製造晶粒602繞送至焊料墊612。焊料球614係在工廠中附接至焊料墊612。該封裝係以導熱膏616與金屬蓋618完成。雖然實施可能較為複雜,但是熱介面亦可用於腔BGA與覆晶附接BGA封裝中。
圖7顯示用於一BGA封裝之一例示性焊料球圖案。基板702係顯示為包括複數個焊料墊704。在各焊料墊上的是一焊料球,在該圖中由焊料球706表示。在此特定實例中,焊料球不覆蓋該基板之整個基底。對於BGA封裝之一些形式,此係更佳。圖8顯示一BGA封裝之另一焊料球圖案。基板802係顯示為包括由焊料墊804表示之複數個焊料墊。在各焊料墊上的是一焊料球806。在放大圖中,為清晰起見,一些焊料墊係顯示為不具有一焊料球。更為清晰地,只顯示由該焊料遮罩保留為曝露之該焊料墊。應瞭解在此圖表與後續圖表中一焊料遮罩可呈現為僅曝露上文金屬跡線層中之焊料墊。各焊料墊具有於808處所示之一相對均勻直徑。各焊料球亦具有於810處所示之一實質均勻直徑。此外,相鄰焊料球中心或等效焊料墊中心之間之距離被稱為間距812。
值得一提的是亦存在非焊料遮罩界定之BGA封裝。與一非焊料遮罩界定之BGA之間之關鍵區別係焊料遮罩中之開口未界定焊料墊之曝露程度。圖9A顯示該焊料遮罩界定之BGA封裝之一近視圖。此實質上係與上述描述之BGA封裝一致。焊料墊902為焊料球904提供一接觸點。焊料遮罩906為焊料球904提供一開口。事實上,該焊料球可填滿藉由焊料遮罩906提供之整個開口。
圖9B顯示一非焊料遮罩界定之BGA封裝之一近視圖。不同於該焊料遮罩界定之BGA封裝,焊料球914位於焊料墊912上且潛在地圍繞焊料墊912。在此情況下,焊料遮罩916具有比該等焊料墊更大之開口。不管使用焊料遮罩界定之BGA或非焊料遮罩界定之BGA與否,關於熱傳導所討論之原理仍適用。
雖然使用熱通孔以從該經製造晶粒汲取熱量,可助於熱消散,但是其具有其限制。首先,可用於熱目的之焊料墊數量受電連接至該經製造晶粒所需之焊料墊數量的限制。因此若存在100個焊料墊,但是電連接需要88個,則僅12個可用於熱目的。焊料墊數量可藉由減少間距增加。然而,此可構成增加該封裝與用於與該封裝連通之PCB之成本之挑戰,此是因為必須使用細尺寸跡線與通孔用於繞送。對於由短路或開路引起之較低良率,細間距BGA之組裝亦可為更有挑戰性。
其他方法已藉由下列方式試圖解決該熱消散問題:為封裝添加散熱器;使用較高熱導率模製化合物;增加封裝層數或大小或使用較高熱導率晶粒附接環氧樹脂。在一些極端情況下,增加該晶粒大小以改善熱消散。然而,此等努力係非常昂貴且負面影響產品利潤,加上已證明影響裝置之可靠性。因此在工業中需要廉價封裝技術來改善熱消散。
在諸如BGA、PGA、圓柱柵格陣列(CGA)及平面柵格陣列(LGA)之一陣列式介面封裝中,可列陣該等介面之間距。一半導體封裝包括附接至一基板之一經製造晶粒。該基板之頂面含有通常用於將電訊號傳導至該基板中之通孔之金屬跡線。該基板之底面亦含有連接該等通孔至可為一引腳或一焊料墊之介面之金屬跡線。該等介面可隔開至少兩個間距。一焊料遮罩係視需要應用於該基板底部以防止短路。該焊料遮罩具有對應於該等焊料墊之開口。若該等焊料墊具有可調間距,則該等焊料遮罩開口亦具有可調間距。然後可在該等焊料墊上放置焊料球。該等焊料球之間距係與該等對應焊料墊之間距相同。
通常,電通孔或用於傳導電訊號之通孔僅以導體塗覆於其等之壁。與之相反,熱通孔係以導體填滿以使其等能夠從晶粒導走更多熱量。此外,耦合至熱通孔之焊料墊可以更高密度封裝在一起並因此成為較高間距介面之理想候選者。
額外的封裝類型亦可利用可調間距陣列佈局,包含覆晶BGA、下腔BGA、PGA與LGA。
在檢視下列圖式及詳細描述後,本揭示內容之其他系統、方法、特徵及優點將為熟悉此項技術者所顯而易見。希望所有此類額外系統、方法、特徵及優點係包含於此描述內,係在本揭示內容之範疇內,且受隨附申請專利範圍的保護。
可參考下列圖式更好地理解本揭示內容之許多態樣。圖式中之組件未必係按比例繪製,重點而是在於清晰地圖解說明本揭示內容之原理。此外,在圖式中,相同參考數字指定貫穿若干圖視之對應部分。
下文呈現本發明之實施例之一詳細描述。雖然將結合此等圖式描述本揭示內容,但是不希望將本揭示內容限於本文所揭示之該(等)實施例。相反言之,本發明意欲涵蓋包含於如由隨附申請專利範圍定義之本揭示內容之精神及範疇內之所有替代物、修改及等效物。
圖10顯示具有可調間距I/O介面之一封裝之一仰視圖。該封裝可為諸如BGA、PGA及/或LGA之陣列技術之任一者,但是出於本文之目的,使用BGA之實例。此外,使用類似圖1描述之封裝作為一實例。然而,一般技術者將瞭解其對諸如PGA與LGA之替代陣列封裝及諸如CBGA與覆晶BGA之不同BGA組態之適用性。
在圖11中,區域1102係最直接地位於經製造晶粒下方。在一多層基板中,如圖1所示,該經製造晶粒下方之區域係最不適合於繞送電訊號但最適合於熱傳導。該經製造晶粒下方之一細間距陣列允許每單位面積更大數量之焊料球,其增加自晶粒至該晶粒所安裝之PCB之導熱路徑。在區域1102外,使用允許更經濟之電繞送之一粗間距。因為該間距更寬,故跡線寬度、跡線間隔及該PCB之電鍍穿孔大小可為更大,其導致更高的組件良率。
使用可調間距之一困難係為了允許二級組裝,該等焊料球大小必須為相同大小。圖11圖解說明使用不同大小焊料球之一封裝之截面。假定區域1104中具有一粗間距之焊料球大於區域1102中具有一細間距之焊料球。因為該等焊料球之直徑不同,故該等較小焊料球不與下方之PCB接觸,從而無法達到藉由該等焊料球之熱傳導之目的,或者區域1104中之該等焊料球在附接程序期間經過度壓縮使得焊料可溢出並與相鄰焊料球電接觸。因此為使此類型之封裝為有效,應維持一均勻焊料球平坦性。
通常,建議一給定焊料球大小用於某一範圍之柵格陣列間距。例如,通常將相同焊料球大小用於0.8毫米及1.0毫米間距。例如,500微米或600微米焊料球可通常用在0.8毫米或1.0毫米間距應用中。由於球數係與間距大小的平方成正比,故用於熱消散之該0.8毫米間距允許超過40%的球數增加。圖12圖解說明一封裝之截面,其中相同球大小用於所示之兩個間距。在區域1202中,使用一細間距,諸如0.8毫米。在區域1204中,使用一粗間距,諸如1.0毫米。
在圖12中,建議相同球大小用於區域1202及區域1204中之間距,若在一特定區域中需要球之較高密度,則可使用經建議用於細間距之球大小。圖13圖解說明此實例,在區域1302中使用甚至細於圖12所示之間距的一間距。通常,會建議一較小球大小用於細間距。然而,由於熱疲勞,該較小球大小會遭遇較低可靠度之問題,且使用該較小球大小之封裝在一落下測試中會有一較高失敗率。為了避免圖11所示之情形,此較小球大小即可用於所有區域,包含具有一粗間距且將通常使用一經建議較大球大小之區域1304。
使用經建議用於每一各自區域之兩個球大小之較小者之主要基本原理係為了避免當球被加熱及被附接至PCB時該等球之間之電接觸。此將防止短路。然而,如圖14所示,若具有細間距之區域1402係用於熱目的,則可使用該兩個球大小之較大者。相較於該較小球大小,該較大球大小將有助於更多熱傳導。因為區域1402中之該等焊料球與對應通孔係僅用於熱目的,故相鄰焊料球之間的接觸將不會有負面影響。
一般而言,使用細間距陣列之另一困難係,諸如基板底面上之跡線之金屬跡線必須具有細線且此外該等焊料墊在其等之間潛在地具有較小間隔,此導致較低良率及/或較高封裝成本。然而,若一可調間距封裝之該細間距區域僅用於熱目的,則不必為各焊料墊維持單獨金屬跡線。圖15圖解說明一金屬跡線,其包括一可調間距封裝之細間距區域中之複數個焊料墊。此實例中之金屬跡線1502實際上包括該細間距區域中之所有該等焊料墊。由開口1504表示之該等區域表示由焊料遮罩留下之該等開口。(為清晰起見,僅標注該等開口中之一些)。由於為熱目的,不必電分開該等焊料墊,一單一金屬跡線或若干大金屬跡線可包括在該細間距區域內之該等焊料墊。若在該細間距區域中需要一些電介面,則對應焊料墊可由與用於熱介面之金屬跡線分開之金屬跡線形成。
雖然上述實例暗指在中心區域中之細間距之用途,可調間距之用途可應用於封裝底部上之任何位置。圖16顯示使用細間距之兩個區域之一實例。特定言之,區域1604及1606上之焊料墊/焊料球具有較基板1602之剩餘區域上之焊料墊/焊料球為細的間距。該兩個區域可代表一多晶粒封裝中之兩個單獨晶粒下方之基板。雖然並非必要,在附接晶粒下配置熱通孔係用於冷卻之一有效焊料球配置。因此,若晶粒附接在區域1604及1606上,則焊料球之一細間距陣列更能促進冷卻。
在電性上,可調間距封裝亦可能係有用的。通常,該等接合墊在一晶粒之表面上基本上係等距間隔的。晶粒中之內部電路必須繞送訊號至其等之各自接合墊。為了滿足由該等接合墊引起之該等需求,可能需要金屬跡線方面之進一步繞送。然而,若放寬此等需求,晶粒繞送中之金屬跡線數量可潛在減少。事實上,可行的是,可消除若干金屬跡線層,從而減少製造一晶粒及/或基板之成本。
圖17顯示利用可調間距以放鬆對晶粒之繞送需求之一假定實例。在此實例中,晶粒1706係以略圖顯示。為了清晰起見,未顯示在晶粒1706下之任何焊料墊及焊料球。舉例而言,晶粒1706裝置可需要100個接合墊於該晶粒之各側上,但區域1708中需要150個。此可引起在區域1708附近之側上之繞送困難,因為其將需要不在該封裝側上之額外I/O。傳統地,留給該設計者之唯一選擇,貫穿該封裝不使用一細間距以獲得額外介面,係為了從該封裝之其他側借封裝介面(例如焊料球)並將I/O繞送至該等借來的介面。取而代之,藉由使用一細間距在區域1704中提供額外介面,使得繞送更容易,且由於該等跡線不必經繞送至該封裝之其他側,故跡線電阻及電感係較低且性能不會退化。不平衡的I/O情形可(尤其)在多晶片封裝中出現。因為細間距使用於該封裝之僅一部分,故由細間距介面施加之較高容限需求僅應用於該封裝之一部分,因此使得在具有細間距之一封裝上製造更容易。
圖18顯示圖解說明用於產生具有一可調間距介面之一封裝之流程圖。一般技術者將注意到並非所有步驟需按所述順序執行且許多步驟可按不同順序執行。在步驟1802處,在一基板中形成通孔。此通常係藉由鑽孔而執行。在步驟1804處,將一導體材料施加於該通孔。在電通孔之情形下,該等導體通常塗覆該通孔之壁,且在熱通孔之情形下,該等導體填滿該通孔。在步驟1806處,在為一接線提供一場所之基板頂部上形成金屬跡線且將該等金屬跡線連接至該等通孔之至少一些通孔。在步驟1808處,於基板底部上形成金屬跡線,其中該等金屬跡線包括成一陣列之介面墊。該等介面墊包括至少兩個區域,一粗區域(其中該等介面墊係分開得較遠)及一細區域(其中該等介面墊分開得較近)。在步驟1810處,將一焊料遮罩施加於具有開口之基板底部,該等開口曝露粗區域中之該等介面墊與細區域中之該等介面墊。在步驟1812處,將該晶粒附接至該基板。在步驟1814處,將接線附接至晶粒上之該等接合墊並附接至基板頂部上之該等金屬跡線。或者,可將該晶粒覆晶至該等通孔墊或基板頂部上之金屬跡線上。在步驟1816處,使用一模製化合物来囊封該晶粒、接線及該基板頂部。在步驟1818處,將諸如焊料球之介面之一陣列附接至該等介面墊,其中該等焊料球在該細區域中係一起間隔得較近且在一粗區域中係分開得較遠。在PGA情形下,一引腳陣列可附接至該等介面墊。在CGA情形下,一陣列圓柱可附接至該等介面墊。在LGA情形下,該等介面墊本身係該等介面。
因為應用可調間距介面之製造技術使用既有製造技術且僅要求修改基板下之金屬跡線層之設計,放置該等介面墊,修改焊料遮罩之設計及放置介面,所以不會招致明顯額外製造成本。使用一可調間距BGA封裝已觀察到封裝熱消散之一2%至5%的改善。儘管該熱改善可能看似很小,此差別可影響5%至15%之封裝成本,及/或影響一裝置可適應之功能量或速度量。
如前所述,除了所示之多層基板BGA外,可調間距介面亦可用於使用介面陣列(諸如上述BGA以及PGA及LGA之其他類型)之任何封裝技術中。
應強調上述實施例僅係可能實施方案之實例。舉例而言,所描述之實施例係在BGA之背景下,但可同樣應用於使用陣列式介面之PGA、LGA或其他封裝。熟悉此項技術者應瞭解彼等可容易地使用所揭示之概念與特定實施例作為設計或修改其他結構之一基礎以實現本文所提出之相同目的。熟悉此項技術者應瞭解彼等可在不脫離本發明之最廣泛形式之本發明的精神及範疇的情況下,可於本文中作出各種改變、替代及變更。所有此等修改及變動於本文中係意欲包含於此揭示內容之範疇內且受下列申請專利範圍的保護。
102...經製造晶粒
104...附接晶粒
106...基板
108...接線
110...接合墊
112...金屬跡線
114...通孔
116...金屬跡線
118...焊料墊/介面墊
120...焊料球
122...焊料遮罩
124...通孔
126...焊料墊
128...焊料球
130...模製化合物
202...區域202
204...區域204
302...區域302
502...經製造晶粒
504...附接晶粒
506...金屬塊
508...接合墊
510...接線
512...層壓板
514...金屬跡線
516...通孔
518...焊料墊
520...焊料球
522...液體囊封劑
602...經製造晶粒
604...凸塊
606...多層基板
608...金屬跡線
610...通孔
612...焊料墊
614...焊料球
616...導熱膏
618...金屬蓋
620...通孔墊
622...填膠
624...額外通孔
702...基板
704...焊料墊
706...焊料球
802...基板
804...焊料墊
806...焊料墊
808...直徑
810...直徑
902...焊料墊
904...焊料墊
906...焊料遮罩
912...焊料墊
914...焊料墊
916...焊料遮罩
1102...區域
1104...區域
1202...區域
1204...區域
1302...區域
1304...區域
1402...區域
1502...金屬跡線
1504...開口
1602...基板
1604...區域
1606...區域
1704...區域
1706...晶粒
1708...區域
圖1圖解說明一典型接線之BGA封裝之一截面;
圖2更詳細地顯示基板表面上之金屬跡線;
圖3更詳細地顯示基板底部上之金屬跡線;
圖4顯示覆蓋圖3所示之金屬跡線之一焊料遮罩之一對應區段;
圖5圖解說明被稱為一腔BGA封裝之一替代BGA封裝;
圖6圖解說明使用一覆晶附接之一BGA封裝;
圖7顯示一BGA封裝之一例示性焊料球圖案;
圖8顯示一BGA封裝之另一焊料球圖案;
圖9A顯示該焊料遮罩BGA封裝之一近視圖;
圖9B顯示一非焊料遮罩BGA封裝之一近視圖;
圖10顯示具有可調間距I/O介面之一封裝之一仰視圖;
圖11圖解說明使用不同球大小之一封裝之一截面;
圖12圖解說明相同球大小用於所示之兩個間距之一封裝之一截面;
圖13圖解說明一封裝之截面,其中若介面為細間距,則該兩個球大小之較大者係用於熱目的;
圖14圖解說明一金屬跡線,其包括在一可調間距封裝之細間距區域內之複數個焊料墊;
圖15顯示包括疊於其上的諸焊料墊之一金屬跡線;
圖16顯示使用細間距之兩個區域之一實例;
圖17顯示利用可調間距以放鬆對晶粒之繞送要求之一假定實例;及
圖18顯示圖解說明用於產生具有一可調間距介面之一封裝之程序之一流程圖。
(無元件符號說明)

Claims (20)

  1. 一種半導體封裝,其包括:一半導體晶粒;具有一頂面及一底面之一基板,該基板包括若干含有一導體之通孔;在該基板頂面上之若干金屬跡線;在該底面上若干包含介面墊之金屬跡線;其中該底面上之諸金屬跡線耦合該等介面墊至該等通孔;及其中該底面包括一第一區域及一第二區域且該第一區域中之該等介面墊係以一第一間距隔開且該第二區域中之該等介面墊係以一第二間距隔開,其中該第一間距比該第二間距較為細,且其中該第一區域之至少一部分具有位於遠離直接在該半導體晶粒下方的一區之該第一間距。
  2. 如請求項1之半導體封裝,其進一步包括:一焊料遮罩,其具有在各介面墊下之一開口;其中在該第一區域中該焊料遮罩中之該等開口係以該第一間距隔開,且在該第二區域中該焊料遮罩係以該第二間距隔開。
  3. 如請求項1之半導體封裝,其進一步包括耦合至各介面墊之一焊料球。
  4. 如請求項1之半導體封裝,其中該封裝係一覆晶BGA。
  5. 如請求項1之半導體封裝,其中該封裝係一下腔BGA。
  6. 如請求項1之半導體封裝,其中該封裝係一PGA或CGA。
  7. 如請求項1之半導體封裝,其中該封裝係一LGA。
  8. 如請求項1之半導體封裝,其中頂部基板上之該等金屬跡線包括諸接合指狀物且諸接線耦合該晶粒至該等接合指狀物。
  9. 如請求項1之半導體封裝,其中該頂部基板上之該等金屬跡線包括若干通孔墊且該晶粒係覆晶連接至該等通孔墊。
  10. 如請求項1之半導體封裝,其中該等通孔包括諸電通孔及熱通孔且在該第一區域中該等介面墊係耦合至諸電通孔及在該第二區域中諸介面墊係耦合至諸熱通孔。
  11. 如請求項10之半導體封裝,其中該等電通孔具有以一導體塗覆之各壁且該等熱通孔係以一導體填滿。
  12. 一種用於封裝一半導體晶粒之方法,其包括:在具有一頂面與一底面並具有一第一區域與一第二區域之一基板中產生若干通孔;添加導體至該等通孔;在該頂面上形成若干金屬跡線;在該底面上形成若干金屬跡線,其中該等金屬跡線包括在該第一區域中以一第一間距隔開之若干介面墊及在該第二區域中以一第二間距隔開之若干介面墊,其中該第一間距比該第二間距較為細,且其中該第一區域之至少一部分具有位於遠離直接在該半導體晶粒下方的一區之該第一間距; 附接該半導體晶粒至該頂面;電連接該半導體晶粒至該頂面上之該等金屬跡線;及囊封該封裝於一模製化合物中。
  13. 如請求項12之方法,其中在該頂面上之該等金屬跡線包括若干接合指狀物且該電連接包括在該晶粒與該等接合指狀物之間附接若干接線。
  14. 如請求項12之方法,其中在該頂面上之該等金屬跡線包括若干通孔墊且該電連接包括覆晶連接該晶粒至該等通孔墊上。
  15. 如請求項12之方法,其進一步包括形成一焊料遮罩以覆蓋在該底面上之該等金屬跡線,其中該焊料遮罩在各介面墊下方具有若干開口。
  16. 如請求項12之方法,其進一步包括在各介面墊下方附加一引腳。
  17. 如請求項12之方法,其進一步包括附接一焊料球至各介面墊。
  18. 如請求項12之方法,其中添加導體至該等通孔包括以一導體填滿該等通孔。
  19. 一種半導體封裝,其包括:一半導體晶粒;具有一頂面及一底面之一基板,該基板包括若干通孔;用於電連接該晶粒至該等通孔之構件;於該底面上之若干介面墊; 用於連接該等介面墊至該等通孔之構件;其中該底面包括一第一區域及一第二區域且在該第一區域中該等介面墊係以一第一間距隔開及在該第二區域中該等介面墊係以一第二間距隔開,其中該第一間距比該第二間距較為細,且其中該第一區域之至少一部分具有位於遠離直接在該半導體晶粒下方的一區之該第一間距。
  20. 如請求項19之半導體封裝,其進一步包括:一遮罩構件,其係用於覆蓋該底面,且包括各介面墊下方之若干開口。
TW99121577A 2009-07-02 2010-06-30 具有可調間距柵格陣列封裝之熱消散改善的系統與方法 TWI442531B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/497,241 US20110001230A1 (en) 2009-07-02 2009-07-02 Systems and Methods of Improved Heat Dissipation with Variable Pitch Grid Array Packaging

Publications (2)

Publication Number Publication Date
TW201121016A TW201121016A (en) 2011-06-16
TWI442531B true TWI442531B (zh) 2014-06-21

Family

ID=43411702

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99121577A TWI442531B (zh) 2009-07-02 2010-06-30 具有可調間距柵格陣列封裝之熱消散改善的系統與方法

Country Status (4)

Country Link
US (1) US20110001230A1 (zh)
CN (1) CN102449757A (zh)
TW (1) TWI442531B (zh)
WO (1) WO2011002794A2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10453802B2 (en) 2017-08-30 2019-10-22 Advanced Semiconductor Engineering, Inc. Semiconductor package structure, semiconductor device and method for manufacturing the same

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI357135B (en) * 2008-05-29 2012-01-21 Ind Tech Res Inst Chip package structure and manufacturing method th
US8093708B2 (en) * 2009-07-06 2012-01-10 Sony Ericsson Mobile Communications Ab Semiconductor package having non-uniform contact arrangement
JP2011146519A (ja) * 2010-01-14 2011-07-28 Panasonic Corp 半導体装置及びその製造方法
CN103165472A (zh) * 2011-12-15 2013-06-19 北京大学深圳研究生院 一种fc-bga封装凸点分布的热耗散新方法
CN103943585B (zh) * 2013-01-22 2017-02-08 联想(北京)有限公司 主板及其芯片封装模块和母板
US9343397B2 (en) * 2014-02-27 2016-05-17 Infineon Technologies Ag Method of connecting a semiconductor package to a board
US10090251B2 (en) 2015-07-24 2018-10-02 Infineon Technologies Ag Semiconductor chip having a dense arrangement of contact terminals
US9679861B1 (en) 2016-03-24 2017-06-13 Altera Corporation Integrated circuit package with active warpage control printed circuit board mount
US10177107B2 (en) * 2016-08-01 2019-01-08 Xilinx, Inc. Heterogeneous ball pattern package
US20180184524A1 (en) * 2016-12-27 2018-06-28 Innovium, Inc. Mixed ball grid array pitch for integrated circuit package
JP6719400B2 (ja) * 2017-02-14 2020-07-08 三菱電機株式会社 半導体パッケージ
DE102017218273B4 (de) 2017-10-12 2022-05-12 Vitesco Technologies GmbH Halbleiterbaugruppe
CN110618375A (zh) * 2019-10-18 2019-12-27 天津津航计算技术研究所 用于快速温变的bga测试插座
US11721643B2 (en) * 2021-06-17 2023-08-08 Taiwan Semiconductor Manufacturing Company, Ltd. Package structure
US20220406695A1 (en) * 2021-06-22 2022-12-22 Western Digital Technologies, Inc. Semiconductor device package having a ball grid array with multiple solder ball materials

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6274391B1 (en) * 1992-10-26 2001-08-14 Texas Instruments Incorporated HDI land grid array packaged device having electrical and optical interconnects
JP3292798B2 (ja) * 1995-10-04 2002-06-17 三菱電機株式会社 半導体装置
US5942795A (en) * 1997-07-03 1999-08-24 National Semiconductor Corporation Leaded substrate carrier for integrated circuit device and leaded substrate carrier device assembly
JP3834426B2 (ja) * 1997-09-02 2006-10-18 沖電気工業株式会社 半導体装置
US6194782B1 (en) * 1998-06-24 2001-02-27 Nortel Networks Limited Mechanically-stabilized area-array device package
KR100280083B1 (ko) * 1998-11-10 2001-03-02 마이클 디. 오브라이언 인쇄회로기판 및 인쇄회로기판의 제조 방법과 이를 이용한 반도체패키지
US6707152B1 (en) * 1999-04-16 2004-03-16 Micron Technology, Inc. Semiconductor device, electrical conductor system, and method of making
US6452113B2 (en) * 1999-07-15 2002-09-17 Incep Technologies, Inc. Apparatus for providing power to a microprocessor with integrated thermal and EMI management
TW462121B (en) * 2000-09-19 2001-11-01 Siliconware Precision Industries Co Ltd Heat sink type ball grid array package
US6867493B2 (en) * 2000-11-15 2005-03-15 Skyworks Solutions, Inc. Structure and method for fabrication of a leadless multi-die carrier
JP2004134648A (ja) * 2002-10-11 2004-04-30 Seiko Epson Corp 回路基板、ボール・グリッド・アレイの実装構造、及び電気光学装置、並びに電子機器
TW576549U (en) * 2003-04-04 2004-02-11 Advanced Semiconductor Eng Multi-chip package combining wire-bonding and flip-chip configuration
KR100495219B1 (ko) * 2003-06-25 2005-06-14 삼성전기주식회사 Ic칩 내장형 파워 엠프 모듈
US7714451B2 (en) * 2005-02-18 2010-05-11 Stats Chippac Ltd. Semiconductor package system with thermal die bonding
KR100714917B1 (ko) * 2005-10-28 2007-05-04 삼성전자주식회사 차폐판이 개재된 칩 적층 구조 및 그를 갖는 시스템 인패키지
TWI285424B (en) * 2005-12-22 2007-08-11 Princo Corp Substrate including a multi-layer interconnection structure, methods of manufacturing and recycling the same, method of packaging electronic devices by using the same, and method of manufacturing an interconnection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10453802B2 (en) 2017-08-30 2019-10-22 Advanced Semiconductor Engineering, Inc. Semiconductor package structure, semiconductor device and method for manufacturing the same

Also Published As

Publication number Publication date
WO2011002794A3 (en) 2011-03-31
CN102449757A (zh) 2012-05-09
WO2011002794A2 (en) 2011-01-06
US20110001230A1 (en) 2011-01-06
TW201121016A (en) 2011-06-16

Similar Documents

Publication Publication Date Title
TWI442531B (zh) 具有可調間距柵格陣列封裝之熱消散改善的系統與方法
US8633587B2 (en) Package structure
US7960827B1 (en) Thermal via heat spreader package and method
US8405231B2 (en) Semiconductor device, manufacturing method thereof, and manufacturing method of semiconductor module
JP3685947B2 (ja) 半導体装置及びその製造方法
US8159057B2 (en) Semiconductor device and manufacturing method therefor
US8022532B2 (en) Interposer and semiconductor device
US6489687B1 (en) Semiconductor device and method of manufacturing the same, manufacturing device, circuit board, and electronic equipment
US8623753B1 (en) Stackable protruding via package and method
US20080153324A1 (en) Circuit board structure having embedded semiconductor element and fabrication method thereof
TWI402954B (zh) Assembly board and semiconductor module
KR20070045929A (ko) 전자 부품 내장 기판 및 그 제조 방법
US10515890B2 (en) Semiconductor device
JP3820022B2 (ja) ボールグリッドアレーパッケージ用印刷回路基板及びボールグリッドアレーパッケージの製造方法
TW201405728A (zh) 半導體封裝及半導體封裝基座的製造方法
CN103839897B (zh) 集成电路封装及制造方法
JP5767695B2 (ja) 半導体装置
JP4494249B2 (ja) 半導体装置
US8546187B2 (en) Electronic part and method of manufacturing the same
JP2011119481A (ja) 半導体装置および半導体装置の製造方法
TWI613771B (zh) 半導體封裝
KR20130050077A (ko) 스택 패키지 및 이의 제조 방법
CN107017230B (zh) 多层级芯片互连
KR101089647B1 (ko) 단층 패키지 기판 및 그 제조방법
KR20200039884A (ko) 반도체 패키지, 반도체 패키지 제조방법 및 재배선 구조체 제조방법