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TWI399342B - Process for the preparation of waste liquid containing tetraalkylammonium ion - Google Patents

Process for the preparation of waste liquid containing tetraalkylammonium ion Download PDF

Info

Publication number
TWI399342B
TWI399342B TW97115100A TW97115100A TWI399342B TW I399342 B TWI399342 B TW I399342B TW 97115100 A TW97115100 A TW 97115100A TW 97115100 A TW97115100 A TW 97115100A TW I399342 B TWI399342 B TW I399342B
Authority
TW
Taiwan
Prior art keywords
resin
waste liquid
cation exchange
ion
taa
Prior art date
Application number
TW97115100A
Other languages
English (en)
Chinese (zh)
Other versions
TW200906732A (en
Inventor
Iwamoto Hisahiko
Yamashita Yoshifumi
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Publication of TW200906732A publication Critical patent/TW200906732A/zh
Application granted granted Critical
Publication of TWI399342B publication Critical patent/TWI399342B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
    • B01J39/04—Processes using organic exchangers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J45/00—Ion-exchange in which a complex or a chelate is formed; Use of material as complex or chelate forming ion-exchangers; Treatment of material for improving the complex or chelate forming ion-exchange properties
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00—Nature of the contaminant
    • C02F2101/30—Organic compounds
    • C02F2101/38—Organic compounds containing nitrogen
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
    • C02F2103/40—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from the manufacture or use of photosensitive materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
TW97115100A 2007-04-25 2008-04-24 Process for the preparation of waste liquid containing tetraalkylammonium ion TWI399342B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007114985 2007-04-25

Publications (2)

Publication Number Publication Date
TW200906732A TW200906732A (en) 2009-02-16
TWI399342B true TWI399342B (zh) 2013-06-21

Family

ID=39925768

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97115100A TWI399342B (zh) 2007-04-25 2008-04-24 Process for the preparation of waste liquid containing tetraalkylammonium ion

Country Status (5)

Country Link
JP (1) JP5167253B2 (ko)
KR (1) KR101258730B1 (ko)
CN (1) CN101652325A (ko)
TW (1) TWI399342B (ko)
WO (1) WO2008133322A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3528045B2 (ja) * 2000-07-31 2004-05-17 株式会社村田製作所 積層セラミック電子部品の製造装置
JP5062093B2 (ja) * 2008-08-06 2012-10-31 栗田工業株式会社 アミノ基を有する水溶性有機溶媒の回収方法
JP5256002B2 (ja) * 2008-11-25 2013-08-07 オルガノ株式会社 フォトレジスト現像排水の排水処理システム
JP2011183298A (ja) * 2010-03-08 2011-09-22 Sharp Corp シランカップリング剤を含む溶液の再資源化方法およびそれを用いたシランカップリング剤の製造方法
JP7137318B2 (ja) * 2018-02-22 2022-09-14 オルガノ株式会社 被処理液の精製方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI231292B (en) * 1998-10-30 2005-04-21 Organo Corp Process and equipment for recovering developer from photoresist development waste and reusing it

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775152A (en) * 1980-10-30 1982-05-11 Hitachi Ltd Regenerating method for granular ion exchange resin and regenerating system thereof
JPH1099853A (ja) 1996-09-27 1998-04-21 Kurita Water Ind Ltd 水酸化テトラアルキルアンモニウム含有水の処理装置
JP3671644B2 (ja) 1998-01-05 2005-07-13 オルガノ株式会社 フォトレジスト現像廃液の再生処理方法及び装置
JP3968678B2 (ja) 1998-10-26 2007-08-29 オルガノ株式会社 テトラアルキルアンモニウムイオン含有液の処理方法
JP4437383B2 (ja) * 2001-08-27 2010-03-24 株式会社日本触媒 不飽和有機酸塩の精製方法並びにそれに用いられた弱塩基性陰イオン交換樹脂及び吸着樹脂の再生方法
JP3949450B2 (ja) * 2001-12-27 2007-07-25 株式会社トクヤマ 陽イオン交換樹脂又はキレート樹脂の再生方法
WO2005102993A1 (ja) * 2004-04-22 2005-11-03 Adeka Corporation 酸水溶液の精製方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI231292B (en) * 1998-10-30 2005-04-21 Organo Corp Process and equipment for recovering developer from photoresist development waste and reusing it

Also Published As

Publication number Publication date
JP5167253B2 (ja) 2013-03-21
WO2008133322A1 (ja) 2008-11-06
TW200906732A (en) 2009-02-16
KR20100014915A (ko) 2010-02-11
KR101258730B1 (ko) 2013-05-02
CN101652325A (zh) 2010-02-17
JPWO2008133322A1 (ja) 2010-07-29

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees