TW270233B - - Google Patents

Info

Publication number: TW270233B
Authority: TW; Taiwan

Application number

TW084104516A

Original Assignee

Fujitsu Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-03-17

Filing date

1995-05-06

Publication date

1996-02-11

1995-05-06 Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd

1996-02-11 Application granted granted Critical

1996-02-11 Publication of TW270233B publication Critical patent/TW270233B/zh

Classifications

- H01L29/4933—

TW084104516A 1994-03-17 1995-05-06 TW270233B (zh)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP6046674A JPH07263674A (ja)	1994-03-17	1994-03-17	電界効果型半導体装置とその製造方法

Publications (1)

Publication Number	Publication Date
TW270233B true TW270233B (zh)	1996-02-11

Family

ID=12753928

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW084104516A TW270233B (zh)	1994-03-17	1995-05-06

Country Status (3)

Country	Link
JP (1)	JPH07263674A (zh)
KR (1)	KR0185461B1 (zh)
TW (1)	TW270233B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5958508A (en) *	1997-03-31	1999-09-28	Motorlola, Inc.	Process for forming a semiconductor device
JPH10308454A (ja) *	1997-05-02	1998-11-17	Mitsubishi Electric Corp	半導体装置およびその製造方法
US6277744B1 (en)	2000-01-21	2001-08-21	Advanced Micro Devices, Inc.	Two-level silane nucleation for blanket tungsten deposition
US6274472B1 (en)	2000-01-21	2001-08-14	Advanced Micro Devices, Inc.	Tungsten interconnect method
US6284636B1 (en) *	2000-01-21	2001-09-04	Advanced Micro Devices, Inc.	Tungsten gate method and apparatus
KR100745604B1 (ko) *	2006-07-03	2007-08-02	삼성전자주식회사	반도체 소자 및 그 형성 방법

1994
- 1994-03-17 JP JP6046674A patent/JPH07263674A/ja not_active Withdrawn
1995
- 1995-03-11 KR KR1019950005041A patent/KR0185461B1/ko not_active IP Right Cessation
- 1995-05-06 TW TW084104516A patent/TW270233B/zh active

Also Published As

Publication number	Publication date
KR950028175A (ko)	1995-10-18
JPH07263674A (ja)	1995-10-13
KR0185461B1 (ko)	1999-03-20

Similar Documents

Publication	Publication Date	Title
DK105996A (zh)	1996-11-14
DK0677466T3 (zh)	1997-02-24
EP0666525A3 (zh)	1995-09-20
EP0669187A3 (zh)	1995-10-11
EP0665261A3 (zh)	1995-09-13
EP0667387A3 (zh)	1995-09-27
DE69535748D1 (zh)	2008-06-19
DK0685247T3 (zh)	1997-02-24
KR950027415U (zh)	1995-10-18
BY1704C1 (zh)	1997-09-30
ECSMU940035U (zh)	1994-11-16
ECSMU940033U (zh)	1994-09-16
IN187133B (zh)	2002-02-09
EP0662420A3 (zh)	1995-08-23
ECSDI940187S (zh)	1994-11-16
ECSDI940182S (zh)	1994-08-15
IN179186B (zh)	1997-09-06
ECSDI940191S (zh)	1994-11-16
CU22450A3 (zh)	1996-10-05
CN3026925S (zh)	1994-09-07
EP0666294A3 (zh)	1995-09-06
CN3029189S (zh)	1994-12-21
CN3028520S (zh)	1994-11-30
CN3028012S (zh)	1994-11-09
CN3027481S (zh)	1994-10-12