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SG11201701272UA - Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating - Google Patents

Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating

Info

Publication number
SG11201701272UA
SG11201701272UA SG11201701272UA SG11201701272UA SG11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA
Authority
SG
Singapore
Prior art keywords
protective coating
semiconductor chip
manufacturing semiconductor
forming sheet
chip provided
Prior art date
Application number
SG11201701272UA
Inventor
Daisuke Yamamoto
Naoya Saiki
Hiroyuki Yoneyama
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of SG11201701272UA publication Critical patent/SG11201701272UA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/53Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dicing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laser Beam Processing (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Adhesive Tapes (AREA)
  • Formation Of Insulating Films (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
SG11201701272UA 2014-08-22 2015-08-21 Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating SG11201701272UA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014169266 2014-08-22
JP2014169267 2014-08-22
PCT/JP2015/073503 WO2016027883A1 (en) 2014-08-22 2015-08-21 Protective-coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating

Publications (1)

Publication Number Publication Date
SG11201701272UA true SG11201701272UA (en) 2017-04-27

Family

ID=55350823

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201701272UA SG11201701272UA (en) 2014-08-22 2015-08-21 Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating
SG11201701270QA SG11201701270QA (en) 2014-08-22 2015-08-21 Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201701270QA SG11201701270QA (en) 2014-08-22 2015-08-21 Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating

Country Status (8)

Country Link
JP (2) JP6589209B2 (en)
KR (2) KR102368140B1 (en)
CN (2) CN106660332B (en)
MY (2) MY182846A (en)
PH (2) PH12017500285A1 (en)
SG (2) SG11201701272UA (en)
TW (4) TWI706023B (en)
WO (2) WO2016027883A1 (en)

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KR102625473B1 (en) * 2015-10-29 2024-01-15 린텍 가부시키가이샤 Film for forming a protective film and composite sheet for forming a protective film
CN108778721B (en) * 2016-03-04 2021-06-04 琳得科株式会社 Composite sheet for forming protective film
KR102720279B1 (en) * 2016-03-04 2024-10-21 린텍 가부시키가이샤 Sheet for semiconductor processing
WO2017149890A1 (en) * 2016-03-04 2017-09-08 リンテック株式会社 Protective film-forming composite sheet
WO2017149925A1 (en) * 2016-03-04 2017-09-08 リンテック株式会社 Semiconductor processing sheet
JP6617056B2 (en) * 2016-03-04 2019-12-04 リンテック株式会社 Semiconductor processing sheet, winding body thereof, and method for manufacturing the winding body
JP6573841B2 (en) * 2016-03-04 2019-09-11 リンテック株式会社 Semiconductor processing sheet
TWI778960B (en) * 2016-04-28 2022-10-01 日商琳得科股份有限公司 Film for forming protective film, composite sheet for forming protective film, and method of manufacturing semiconductor chip having protective film
TWI731964B (en) * 2016-04-28 2021-07-01 日商琳得科股份有限公司 Complex sheet for forming protective film
TWI721158B (en) * 2016-04-28 2021-03-11 日商琳得科股份有限公司 Protective film forming film and composite sheet for forming protective film
KR102407322B1 (en) * 2016-04-28 2022-06-10 린텍 가부시키가이샤 A film for forming a protective film and a composite sheet for forming a protective film
TWI796297B (en) * 2016-04-28 2023-03-21 日商琳得科股份有限公司 Composite sheet for forming protective film
CN109328219B (en) * 2016-05-12 2020-04-28 住友电木株式会社 Adhesive tape for processing semiconductor substrate
JP6776081B2 (en) * 2016-09-28 2020-10-28 リンテック株式会社 Manufacturing method of semiconductor chip with protective film and manufacturing method of semiconductor device
KR102387943B1 (en) * 2017-05-17 2022-04-18 린텍 가부시키가이샤 Semiconductor device and method for manufacturing same
WO2019044046A1 (en) * 2017-08-28 2019-03-07 リンテック株式会社 Film-like transparent adhesive and infrared sensor module
WO2019146607A1 (en) * 2018-01-24 2019-08-01 リンテック株式会社 Long laminated sheet, and winding body thereof
KR102487552B1 (en) 2018-02-05 2023-01-11 삼성전자주식회사 Composition for protective film against sawing process and method of manufacturing semiconductor package using the composition
CN111670231B (en) * 2018-03-23 2022-06-03 琳得科株式会社 Film-like adhesive and sheet for semiconductor processing
KR102524205B1 (en) * 2018-03-30 2023-04-20 린텍 가부시키가이샤 Composite sheet for forming protective film and manufacturing method thereof
WO2019187014A1 (en) * 2018-03-30 2019-10-03 リンテック株式会社 Support sheet and composite sheet for protective film formation
WO2020175423A1 (en) 2019-02-26 2020-09-03 リンテック株式会社 Thermosetting resin film and sheet for forming first protective film
CN118231319A (en) * 2019-04-26 2024-06-21 琳得科株式会社 Third laminate, fourth laminate, method for manufacturing semiconductor device with back surface protective film, and third laminate
JP7453879B2 (en) 2020-08-12 2024-03-21 リンテック株式会社 Protective film forming sheet roll and protective film forming sheet roll manufacturing method
JP7484557B2 (en) 2020-08-18 2024-05-16 三菱ケミカル株式会社 Adhesive composition, adhesive sheet and laminate
JP7084972B2 (en) * 2020-10-06 2022-06-15 リンテック株式会社 Composite sheet for forming a protective film

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KR100848408B1 (en) 2002-03-12 2008-07-28 하마마츠 포토닉스 가부시키가이샤 Method for dicing substrate
JP3857953B2 (en) * 2002-05-16 2006-12-13 株式会社巴川製紙所 Adhesive sheet for semiconductor device manufacturing
TWI289155B (en) * 2002-04-03 2007-11-01 Tomoegawa Paper Co Ltd Adhesive sheet for producing semiconductor devices
JP4364508B2 (en) * 2002-12-27 2009-11-18 リンテック株式会社 Protective film forming sheet for chip back surface and manufacturing method of chip with protective film
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Also Published As

Publication number Publication date
TWI712670B (en) 2020-12-11
SG11201701270QA (en) 2017-03-30
WO2016027883A1 (en) 2016-02-25
TWI668290B (en) 2019-08-11
CN106660333A (en) 2017-05-10
WO2016027888A1 (en) 2016-02-25
CN106660332B (en) 2020-08-07
KR102368140B1 (en) 2022-02-25
KR20170044108A (en) 2017-04-24
JPWO2016027888A1 (en) 2017-06-01
PH12017500285B1 (en) 2017-06-28
MY186759A (en) 2021-08-18
PH12017500284A1 (en) 2017-07-03
CN106660333B (en) 2018-11-06
TW201614024A (en) 2016-04-16
MY182846A (en) 2021-02-05
TWI672354B (en) 2019-09-21
KR20170044652A (en) 2017-04-25
JPWO2016027883A1 (en) 2017-06-01
JP6589209B2 (en) 2019-10-16
KR102376017B1 (en) 2022-03-17
CN106660332A (en) 2017-05-10
PH12017500285A1 (en) 2017-06-28
TW201938728A (en) 2019-10-01
PH12017500284B1 (en) 2017-07-03
TW201940622A (en) 2019-10-16
TW201614023A (en) 2016-04-16
TWI706023B (en) 2020-10-01

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