SG11201701272UA - Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating - Google Patents
Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coatingInfo
- Publication number
- SG11201701272UA SG11201701272UA SG11201701272UA SG11201701272UA SG11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA SG 11201701272U A SG11201701272U A SG 11201701272UA
- Authority
- SG
- Singapore
- Prior art keywords
- protective coating
- semiconductor chip
- manufacturing semiconductor
- forming sheet
- chip provided
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000011253 protective coating Substances 0.000 title 1
- 230000001681 protective effect Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Dicing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Laser Beam Processing (AREA)
- Laminated Bodies (AREA)
- Paints Or Removers (AREA)
- Adhesive Tapes (AREA)
- Formation Of Insulating Films (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014169266 | 2014-08-22 | ||
JP2014169267 | 2014-08-22 | ||
PCT/JP2015/073503 WO2016027883A1 (en) | 2014-08-22 | 2015-08-21 | Protective-coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201701272UA true SG11201701272UA (en) | 2017-04-27 |
Family
ID=55350823
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201701272UA SG11201701272UA (en) | 2014-08-22 | 2015-08-21 | Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
SG11201701270QA SG11201701270QA (en) | 2014-08-22 | 2015-08-21 | Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201701270QA SG11201701270QA (en) | 2014-08-22 | 2015-08-21 | Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
Country Status (8)
Country | Link |
---|---|
JP (2) | JP6589209B2 (en) |
KR (2) | KR102368140B1 (en) |
CN (2) | CN106660332B (en) |
MY (2) | MY182846A (en) |
PH (2) | PH12017500285A1 (en) |
SG (2) | SG11201701272UA (en) |
TW (4) | TWI706023B (en) |
WO (2) | WO2016027883A1 (en) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102625473B1 (en) * | 2015-10-29 | 2024-01-15 | 린텍 가부시키가이샤 | Film for forming a protective film and composite sheet for forming a protective film |
CN108778721B (en) * | 2016-03-04 | 2021-06-04 | 琳得科株式会社 | Composite sheet for forming protective film |
KR102720279B1 (en) * | 2016-03-04 | 2024-10-21 | 린텍 가부시키가이샤 | Sheet for semiconductor processing |
WO2017149890A1 (en) * | 2016-03-04 | 2017-09-08 | リンテック株式会社 | Protective film-forming composite sheet |
WO2017149925A1 (en) * | 2016-03-04 | 2017-09-08 | リンテック株式会社 | Semiconductor processing sheet |
JP6617056B2 (en) * | 2016-03-04 | 2019-12-04 | リンテック株式会社 | Semiconductor processing sheet, winding body thereof, and method for manufacturing the winding body |
JP6573841B2 (en) * | 2016-03-04 | 2019-09-11 | リンテック株式会社 | Semiconductor processing sheet |
TWI778960B (en) * | 2016-04-28 | 2022-10-01 | 日商琳得科股份有限公司 | Film for forming protective film, composite sheet for forming protective film, and method of manufacturing semiconductor chip having protective film |
TWI731964B (en) * | 2016-04-28 | 2021-07-01 | 日商琳得科股份有限公司 | Complex sheet for forming protective film |
TWI721158B (en) * | 2016-04-28 | 2021-03-11 | 日商琳得科股份有限公司 | Protective film forming film and composite sheet for forming protective film |
KR102407322B1 (en) * | 2016-04-28 | 2022-06-10 | 린텍 가부시키가이샤 | A film for forming a protective film and a composite sheet for forming a protective film |
TWI796297B (en) * | 2016-04-28 | 2023-03-21 | 日商琳得科股份有限公司 | Composite sheet for forming protective film |
CN109328219B (en) * | 2016-05-12 | 2020-04-28 | 住友电木株式会社 | Adhesive tape for processing semiconductor substrate |
JP6776081B2 (en) * | 2016-09-28 | 2020-10-28 | リンテック株式会社 | Manufacturing method of semiconductor chip with protective film and manufacturing method of semiconductor device |
KR102387943B1 (en) * | 2017-05-17 | 2022-04-18 | 린텍 가부시키가이샤 | Semiconductor device and method for manufacturing same |
WO2019044046A1 (en) * | 2017-08-28 | 2019-03-07 | リンテック株式会社 | Film-like transparent adhesive and infrared sensor module |
WO2019146607A1 (en) * | 2018-01-24 | 2019-08-01 | リンテック株式会社 | Long laminated sheet, and winding body thereof |
KR102487552B1 (en) | 2018-02-05 | 2023-01-11 | 삼성전자주식회사 | Composition for protective film against sawing process and method of manufacturing semiconductor package using the composition |
CN111670231B (en) * | 2018-03-23 | 2022-06-03 | 琳得科株式会社 | Film-like adhesive and sheet for semiconductor processing |
KR102524205B1 (en) * | 2018-03-30 | 2023-04-20 | 린텍 가부시키가이샤 | Composite sheet for forming protective film and manufacturing method thereof |
WO2019187014A1 (en) * | 2018-03-30 | 2019-10-03 | リンテック株式会社 | Support sheet and composite sheet for protective film formation |
WO2020175423A1 (en) | 2019-02-26 | 2020-09-03 | リンテック株式会社 | Thermosetting resin film and sheet for forming first protective film |
CN118231319A (en) * | 2019-04-26 | 2024-06-21 | 琳得科株式会社 | Third laminate, fourth laminate, method for manufacturing semiconductor device with back surface protective film, and third laminate |
JP7453879B2 (en) | 2020-08-12 | 2024-03-21 | リンテック株式会社 | Protective film forming sheet roll and protective film forming sheet roll manufacturing method |
JP7484557B2 (en) | 2020-08-18 | 2024-05-16 | 三菱ケミカル株式会社 | Adhesive composition, adhesive sheet and laminate |
JP7084972B2 (en) * | 2020-10-06 | 2022-06-15 | リンテック株式会社 | Composite sheet for forming a protective film |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100848408B1 (en) | 2002-03-12 | 2008-07-28 | 하마마츠 포토닉스 가부시키가이샤 | Method for dicing substrate |
JP3857953B2 (en) * | 2002-05-16 | 2006-12-13 | 株式会社巴川製紙所 | Adhesive sheet for semiconductor device manufacturing |
TWI289155B (en) * | 2002-04-03 | 2007-11-01 | Tomoegawa Paper Co Ltd | Adhesive sheet for producing semiconductor devices |
JP4364508B2 (en) * | 2002-12-27 | 2009-11-18 | リンテック株式会社 | Protective film forming sheet for chip back surface and manufacturing method of chip with protective film |
KR101204197B1 (en) * | 2003-06-06 | 2012-11-26 | 히다치 가세고교 가부시끼가이샤 | Adhesive sheet, dicing tape integrated type, adhesive sheet, and semiconductor device producing method |
KR100850772B1 (en) * | 2003-07-08 | 2008-08-06 | 린텍 코포레이션 | Hardenable Pressure Sensitive Adhesive Sheet for Dicing/Die-Bonding and Method for Manufacturing Semiconductor Device |
JP4846406B2 (en) * | 2006-03-28 | 2011-12-28 | リンテック株式会社 | Chip protection film forming sheet |
KR101258920B1 (en) * | 2008-11-27 | 2013-04-29 | 듀폰-미츠이 폴리케미칼 가부시키가이샤 | Protective film for electronic component, manufacturing method therefor, and use thereof |
JP5335483B2 (en) * | 2009-02-27 | 2013-11-06 | リンテック株式会社 | Method for producing polarizing plate with adhesive layer |
JP5603757B2 (en) * | 2009-12-04 | 2014-10-08 | リンテック株式会社 | Laser dicing adhesive sheet and method for manufacturing semiconductor device |
JP2011151362A (en) | 2009-12-24 | 2011-08-04 | Nitto Denko Corp | Dicing tape-integrated film for semiconductor back surface |
JP2012033637A (en) | 2010-07-29 | 2012-02-16 | Nitto Denko Corp | Dicing tape integrated semiconductor rear face film, and method of manufacturing semiconductor device |
JP5580701B2 (en) * | 2010-09-13 | 2014-08-27 | 日東電工株式会社 | Dicing die bond film |
CN103620742B (en) * | 2011-07-01 | 2016-05-25 | 古河电气工业株式会社 | Adhesive film, diced chip junction film and use the semiconductor processing method of this diced chip junction film |
JP5865045B2 (en) * | 2011-12-07 | 2016-02-17 | リンテック株式会社 | Dicing sheet with protective film forming layer and chip manufacturing method |
JP6001273B2 (en) * | 2012-02-13 | 2016-10-05 | 信越化学工業株式会社 | Protective film for semiconductor wafer and method for manufacturing semiconductor chip |
WO2013172328A1 (en) * | 2012-05-14 | 2013-11-21 | リンテック株式会社 | Sheet having adhesive resin layer attached thereto, and method for producing semiconductor device |
KR102140470B1 (en) * | 2012-11-30 | 2020-08-03 | 린텍 가부시키가이샤 | Sheet for forming resin film for chips and method for manufacturing semiconductor device |
KR102221484B1 (en) * | 2014-03-24 | 2021-02-26 | 린텍 가부시키가이샤 | Protective film forming film, protective film forming sheet and work product manufacturing method |
SG11201607716PA (en) * | 2014-03-24 | 2016-11-29 | Lintec Corp | Protection membrane forming film, protection membrane forming utilization sheet, production method and inspection method for workpiece or processed product, workpiece determined as adequate product, and processed product determined as adequate product |
-
2015
- 2015-08-21 JP JP2016544263A patent/JP6589209B2/en active Active
- 2015-08-21 TW TW108122914A patent/TWI706023B/en active
- 2015-08-21 CN CN201580044561.4A patent/CN106660332B/en active Active
- 2015-08-21 SG SG11201701272UA patent/SG11201701272UA/en unknown
- 2015-08-21 TW TW104127316A patent/TWI672354B/en active
- 2015-08-21 WO PCT/JP2015/073503 patent/WO2016027883A1/en active Application Filing
- 2015-08-21 MY MYPI2017700479A patent/MY182846A/en unknown
- 2015-08-21 CN CN201580044562.9A patent/CN106660333B/en active Active
- 2015-08-21 WO PCT/JP2015/073545 patent/WO2016027888A1/en active Application Filing
- 2015-08-21 KR KR1020177004497A patent/KR102368140B1/en active IP Right Grant
- 2015-08-21 TW TW104127314A patent/TWI668290B/en active
- 2015-08-21 KR KR1020177004494A patent/KR102376017B1/en active IP Right Grant
- 2015-08-21 SG SG11201701270QA patent/SG11201701270QA/en unknown
- 2015-08-21 TW TW108128902A patent/TWI712670B/en active
- 2015-08-21 JP JP2016544268A patent/JPWO2016027888A1/en active Pending
- 2015-08-21 MY MYPI2017700515A patent/MY186759A/en unknown
-
2017
- 2017-02-16 PH PH12017500285A patent/PH12017500285A1/en unknown
- 2017-02-16 PH PH12017500284A patent/PH12017500284B1/en unknown
Also Published As
Publication number | Publication date |
---|---|
TWI712670B (en) | 2020-12-11 |
SG11201701270QA (en) | 2017-03-30 |
WO2016027883A1 (en) | 2016-02-25 |
TWI668290B (en) | 2019-08-11 |
CN106660333A (en) | 2017-05-10 |
WO2016027888A1 (en) | 2016-02-25 |
CN106660332B (en) | 2020-08-07 |
KR102368140B1 (en) | 2022-02-25 |
KR20170044108A (en) | 2017-04-24 |
JPWO2016027888A1 (en) | 2017-06-01 |
PH12017500285B1 (en) | 2017-06-28 |
MY186759A (en) | 2021-08-18 |
PH12017500284A1 (en) | 2017-07-03 |
CN106660333B (en) | 2018-11-06 |
TW201614024A (en) | 2016-04-16 |
MY182846A (en) | 2021-02-05 |
TWI672354B (en) | 2019-09-21 |
KR20170044652A (en) | 2017-04-25 |
JPWO2016027883A1 (en) | 2017-06-01 |
JP6589209B2 (en) | 2019-10-16 |
KR102376017B1 (en) | 2022-03-17 |
CN106660332A (en) | 2017-05-10 |
PH12017500285A1 (en) | 2017-06-28 |
TW201938728A (en) | 2019-10-01 |
PH12017500284B1 (en) | 2017-07-03 |
TW201940622A (en) | 2019-10-16 |
TW201614023A (en) | 2016-04-16 |
TWI706023B (en) | 2020-10-01 |
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