KR101706465B1 - Printed circuit board inspection apparatus and method - Google Patents
Printed circuit board inspection apparatus and method Download PDFInfo
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- KR101706465B1 KR101706465B1 KR1020150105732A KR20150105732A KR101706465B1 KR 101706465 B1 KR101706465 B1 KR 101706465B1 KR 1020150105732 A KR1020150105732 A KR 1020150105732A KR 20150105732 A KR20150105732 A KR 20150105732A KR 101706465 B1 KR101706465 B1 KR 101706465B1
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- probe
- current source
- constant current
- conductor pattern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
Abstract
According to the present invention, there is provided an electrical inspection apparatus for a printed circuit board which inspects a defective conductor pattern by applying an electrical signal to a conductor pattern formed on a printed circuit board. The electrical inspection apparatus includes a first probe contacting one end of the conductor pattern, A first connection device for connecting the first probe to the constant current source and a second connection device for connecting the second probe to the reference potential of the constant current source, And a measuring circuit for measuring the potential of the first probe with respect to the reference potential of the constant current source.
Description
The present invention relates to an apparatus for inspecting an electrical state of a conductor pattern of a printed board and a method of inspecting the apparatus.
This application claims priority based on Japanese Patent Application No. 2014-153493 filed on July 29, 2014, the content of which is incorporated herein by reference.
When inspecting an electrical state such as disconnection of a conductor pattern on a printed board, in general, conducting probes are brought into contact with both ends of a conductor pattern to conduct an electric connection. In the case where one terminal of the conductor pattern is covered with an insulating film, The inspection probe may not be brought into direct contact with the conductor pattern. In such a case, as described in
In
However, even in the method described in any patent document, since the probe for detecting the electric signal is disposed in a non-contact manner with respect to the conductor pattern and does not directly contact the conductor pattern, there is a possibility that the signal can not be reliably detected.
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances and provides a printed board inspection apparatus and an inspection method capable of reliably detecting a signal by making a probe for detecting an electric signal in direct contact with a conductor pattern, to provide.
A printed board inspection apparatus according to the present invention is an inspection apparatus for a printed board which inspects a defective conductor pattern by applying an electric signal to a conductor pattern formed on a printed board, A second probe disposed at the other end of the conductor pattern with an insulator interposed therebetween, a constant current source, a first connecting device for connecting the first probe to the constant current source, A second connecting device for changing an electrical connection state of the second probe and a measuring circuit for measuring a potential of the first probe with respect to a reference potential of the constant current source.
In the method of inspecting a printed circuit board according to the present invention, a first probe is directly brought into contact with one end of a conductor pattern, a second probe is arranged with an insulator at the other end of the conductor pattern, The electric connection state of the second probe with respect to the reference potential of the constant current source is changed at a time T2 that has elapsed after a predetermined time t12 from the time T1, A defect of the conductor pattern is judged from the measurement result of the potential of the first probe with respect to the reference potential.
In this printed board inspection method, when the electrical connection state of the second probe with respect to the reference potential of the constant current source is changed, when the potential displacement amount at one end of the conductor pattern is changed per predetermined unit time tu, It can be determined that the product is good.
In the present invention, the first probe is brought into contact with one end portion of the conductor pattern, and the second probe is arranged with the other end portion of the conductor pattern through the insulator so that the electrical connection state of the second probe side is changed, Is measured. That is, since the electric signal of the first probe in contact with the conductor pattern is detected, the electric signal can be reliably detected, and accurate substrate inspection can be performed.
In this case, when the other end of the conductor pattern is exposed on the surface of the printed circuit board, the insulator disposed on the other end of the conductor pattern of the printed circuit board is disposed on the other end of the conductor pattern. When the end portion is covered with the insulating film, the insulating film may be an insulator, and the second probe may be disposed on the insulating film.
Further, the second connection device can change the connection state of the second probe by connecting or disconnecting the second probe with respect to the reference potential of the constant current source.
Further, both the first probe and the second probe may be arranged on one side of the printed board and on the opposite side of the printed board.
In the printed board inspection apparatus of the present invention, a capacitor having a predetermined capacitance is provided between the second probe and the second connection device, or between the second probe and the reference potential of the constant current source It may be connected.
The presence of the capacitor makes it possible to increase the amount of displacement of the potential at the first probe side, thereby enabling more accurate inspection.
The printed board inspection apparatus of the present invention may have a configuration in which the third probe for connecting the first probe to the reference potential of the constant current source through the first connection device.
In the printed board inspection method of the present invention, the first probe is connected to the reference potential of the constant current source at a time T3 before the predetermined time t31 from the time T1, and the predetermined time t14 is elapsed from the time T1 to the time T2 And the first probe and the reference potential may be set in a blocking state at a time T4 that is earlier than the reference potential.
By connecting the first probe to the reference potential and discharging the charge charged in the wiring portion or the like prior to measurement of the potential, the influence of charging can be eliminated, and the current from the constant current source can be stabilized in a short time, can do.
In the printed-circuit board inspecting apparatus of the present invention, the conductor plate which is in contact with the conductor pattern of the printed board through the insulating plate may be connected to the reference potential of the constant-current source.
It is possible to inspect the failure of the contact state of the first probe with respect to the conductor pattern so that the accurate inspection can be performed in a state in which the first probe is in contact with the conductor pattern.
In this case, the insulating plate may be prepared separately from the printed board. However, if there is a portion covered with the insulating film on the surface of the printed board, the insulating film may be used as an insulating plate and the conductive plate may be contacted thereon.
According to the present invention, since a probe for detecting an electric signal is inspected in a state in which it is in direct contact with a conductor pattern, a signal can be reliably detected, and accurate inspection can be performed.
1 is a block diagram showing a schematic configuration of a first embodiment of a printed board inspection apparatus according to the present invention.
Fig. 2 is a side view showing a wiring state of the printed board according to the printed board inspection apparatus of Fig. 1; Fig.
3 is a flowchart showing a printed board inspection method in the first embodiment.
4 is an electrical characteristic diagram showing a temporal change of the potential of the first probe when the conductor pattern is good in the first embodiment.
Fig. 5 is an electrical characteristic diagram showing a temporal change of the potential of the first probe when the conductor pattern is defective in the first embodiment. Fig.
6 is another electric characteristic diagram when the conductor pattern is good in the first embodiment.
7 is another electric characteristic diagram when the conductor pattern is defective in the first embodiment.
Fig. 8 is a block diagram showing a schematic configuration of a second embodiment of a printed board inspection apparatus according to the present invention.
Fig. 9 is a side view showing a wiring state of the printed board according to the printed board inspection apparatus of Fig. 8; Fig.
10 is a block diagram showing a schematic configuration of a third embodiment of a printed-circuit board inspection apparatus according to the present invention.
Fig. 11 is a side view showing a wiring state of the printed board according to the printed board inspection apparatus of Fig. 10; Fig.
12 is a block diagram showing a schematic configuration of a fourth embodiment of the apparatus for inspecting a printed board according to the present invention.
13 is a side view showing a wiring state of the printed board according to the printed board inspection apparatus of FIG.
14 is a flowchart showing a printed board inspection method in the fourth embodiment.
Fig. 15 is an electrical characteristic diagram showing a temporal change of the potential of the first probe when the conductor pattern is good in the fourth embodiment. Fig.
16 is an electric characteristic diagram showing a temporal change in the potential of the first probe when the conductor pattern is defective in the fourth embodiment.
17 is another electric characteristic diagram when the conductor pattern is good in the fourth embodiment.
18 is another electric characteristic diagram in the case where the conductor pattern is defective in the fourth embodiment.
Fig. 19 is a block diagram showing a schematic configuration of a fifth embodiment of a printed board inspection apparatus according to the present invention.
20 is a side view showing a wiring state of the printed board according to the printed board inspection apparatus of FIG. 19;
21 is a flowchart showing a printed board inspection method in the fifth embodiment.
22 is an electric characteristic diagram showing a temporal change in the potential of the first probe when the conductor pattern is good in the fifth embodiment.
23 is an electric characteristic diagram showing a temporal change in the potential of the first probe when the conductor pattern is defective in the fifth embodiment.
24 is another electric characteristic diagram when the conductor pattern is good in the fifth embodiment.
25 is another electric characteristic diagram when the conductor pattern is defective in the fifth embodiment.
26 is an electric characteristic diagram when the first probe is in contact with the conductor pattern in the fifth embodiment.
27 is another electric characteristic diagram when the first probe is in contact with the conductor pattern in the fifth embodiment.
28 is a block diagram showing a configuration of a sixth embodiment of the apparatus for inspecting a printed board according to the present invention.
FIG. 29 is a side view showing the wiring state of the printed board according to the printed board inspection apparatus of FIG. 28; FIG.
30 is a block diagram showing a configuration of a seventh embodiment of the apparatus for inspecting a printed board according to the present invention.
31 is a side view showing a wiring state of the printed board according to the printed board inspection apparatus of FIG. 30;
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[About printed circuit board]
In the printed
In the drawings of the following embodiments, the printed
[First Embodiment]
As shown in Figs. 1 and 2, the printed-circuit board inspection apparatus 11 according to the first embodiment is for inspecting a plurality of conductor patterns E1 to E4 of the printed board 1, A plurality of first probes P1 to P4 which are in direct contact with one end of each of the conductor patterns E1 to E4 exposed on the printed circuit board 1 and a plurality of first probes P1 to P4 which are in direct contact with the other ends of the conductor patterns E1 to E4 A plurality of second probes P5 to P8 individually contacting with each other via the insulator 13 and a plurality of changeover switches A1 to A4 for connecting the first probes P1 to P4 to the constant current source 12, A second connecting device 15 having a plurality of change-over switches B1 to B4 for respectively connecting second probes P5 to P8 to a reference potential (usually ground potential) of the constant current source 12, In the first probe P1 relative to the reference potential of the circle 12 A constant current source control section 17 for controlling the constant current source 12, a connection device control section 18 for controlling each connection device, and a measurement circuit 16 for connecting the measurement circuit 16 and the constant current source 12, A main control unit 21 for controlling these control units and potential measurement units, and a display device 22. The A /
The printed
As described above, the other end portions of the conductor patterns E1 to E4 may be covered by the insulating film or the case where they are exposed on the surface of the printed
As described above, the first probes P1 to P4 and the second probes P5 to P8 are arranged so that any one of the change-over switches A1 to A4 of the first connecting
B2, B3 or B4 connected to any one conductor pattern (selected conductor pattern) connected to the constant
Details of this inspection will be described with reference to the flowchart of FIG. In the following description, a description will be given for each step in accordance with a code attached to each step of the flowchart.
Step S1: First, the first probes P1 to P4 are directly brought into contact with one ends of the conductor patterns E1 to E4. Also, the second probes P5 to P8 are arranged with the
Step S2: After arranging the probes P1 to P4 and P5 to P8, any one of the changeover switches A1 to A4 of the first connecting
Step S3: The changeover switches B1, B2, B3 connected to the selected conductor pattern E1, E2, E3 or E4 among the changeover switches B1 to B4 of the second connecting
Step S4: It is judged from the measurement result of the measuring
As shown in FIG. 4, at the time T2 at which the potential of one end of the selected conductor pattern E1, E2, E3, or E4 rises, the electric potential displacement amount (In Fig. 4, the potential displacement amount is small), the routine goes to step S5. When the potential displacement amount does not change as shown in Fig. 5, the routine goes to step S8. This change in the displacement amount is because the capacitance with respect to the reference potential of the conductor patterns E1 to E4 changes. Fig. 4 shows an example in which the capacitance is increased.
On the other hand, Fig. 5 shows a case in which no change in the potential displacement amount is confirmed even when the
In addition, with respect to the operation of the second connecting
Step S5: It is judged whether or not the potential of one end of the conductor pattern E1, E2, E3 or E4 selected just before the
In the example shown in Figs. 4 and 5, the potential in the time T2 point, open-circuit voltage V In although not to zero reached, the example shown in Figs. 6 and 7, and it electric potential is reaching up to the open potential V 0 to the time T2 , And in this case, the flow advances to step S6.
Step S6: It is judged whether or not the potential at one end of the selected conductor pattern E1, E2, E3 or E4 has been displaced in the descending direction. If it is determined that the displaced in the descending direction (YES) (In the case of "NO"), the flow advances to step S8.
6, the potential has reached the open-circuit voltage V 0 of the constant
On the other hand, if there is no change from the open-circuit voltage V 0 even if the
Step S7: It is judged that the selected conductor pattern E1, E2, E3 or E4 is good.
Step S8: It is judged that the selected conductor pattern E1, E2, E3 or E4 is a defective product.
That is, the amount of displacement of the potential at one end of the conductor patterns E1 to E4 in which the first probes P1 to P4 are directly in contact is smaller than the amount of displacement of the second probes P5 to P8 The conductor patterns E1 to E4 are good. If the potential displacement amount does not change, it is determined that the conductor patterns E1 to E4 are defective due to disconnection or the like.
As described above, since the potential is measured at the first probes P1 to P4 which are in direct contact with the conductor patterns E1 to E4, the potential displacement amount can be reliably detected, and accurate inspection can be performed.
In the first embodiment described above, any one of the conductive patterns E1 to E4 is selected by sequentially closing any one of the change-over switches A1 to A4 of the first connecting
When it is checked whether all of the conductive patterns E1 to E4 of the printed
[Second Embodiment]
8 and 9 show the printed
In the second embodiment, the rest of the configuration is the same as that of the first embodiment, and the same reference numerals are attached thereto, and a description thereof is omitted. The printed board inspection method by the printed
In the first embodiment, a potential displacement occurs during operation of the
[Third embodiment]
10 and 11 show the printed-circuit
Therefore, in the third embodiment, the capacitors C5 to C8 provided between the reference potentials of the
In addition to the above-described second embodiment and the third embodiment, it is also possible to switch between the angle switches
[Fourth Embodiment]
12 and 13 show a printed
Fig. 14 shows a flowchart of a printed board inspection method using the printed
The change in the potential of the first probe (one end of the conductor pattern) is shown in Figs. 15 to 18. These Figs. 15 to 18 correspond to Figs. 4 to 7 of the first embodiment.
S11: The
S12: The time when the predetermined time t14 has elapsed from the time T1, and the time when the time T4 before the time T2 is reached, the third connecting
15 and 16 show a state in which the potentials of the first probes P1 to P4 are elevated when the second connecting
17 and 18 show a case in which the potential at one end of the conductor patterns E1 to E4 reaches the open voltage V 0 of the constant
In this fourth embodiment, by providing the third connecting
[Modification of Fourth Embodiment]
The printed
10 and 11, the capacitors C5 to C8 may be disposed between the reference switches B1 to B4 of the
These two capacitors C1 to C4 and C5 to C8 may be arranged.
In any case, it is possible to make more precise inspections by increasing the amount of displacement of the potential as long as the capacitors C1 to C4 or C5 to C8 are provided.
[Fifth Embodiment]
19 and 20 show a printed
When both ends of the conductor patterns E1 to E4 are formed on both sides of the printed
21, the first probe P1 to P4 are brought into direct contact with one end of the conductor patterns E1 to E4 in the initial preparation for inspection, And the second probes P5 to P8 are provided with the
By arranging the
22 is a graph showing the relationship between the capacitance of the first probes P1 to P4 when the
In the case where the conductor patterns E1 to E4 are defective, there is no change in the potential displacement amount even when the second connecting
On the other hand, when the electrostatic capacitance of the wiring portion is larger than the electrostatic capacitance between the conductor patterns E1 to E4 and the
If the conductor patterns E1 to E4 are defective, there is no change in the potential displacement amount even when the second connecting
The capacitance between the conductor patterns E1 to E4 and the
[Modification of the fifth embodiment]
In the case of the fifth embodiment shown in Figs. 19 and 20, the printed-circuit
10 and 11, the capacitors C5 to C8 may be disposed between the reference switches B1 to B4 of the
These two capacitors C1 to C4 and C5 to C8 may be arranged.
In any case, it is possible to perform more accurate inspection by increasing the displacement amount of the potential by the provision of the capacitors C1 to C4 or C5 to C8.
The third connecting
By providing the third connecting
In the fifth embodiment and its modifications, it is also possible to detect whether the first probes P1 to P4 are in contact with the conductor patterns E1 to E4 securely.
Fig. 26 is a diagram showing a case where the capacitors C1 to C4 are disposed between the switches B1 to B4 of the second probes P5 to P8 and the second connecting
27 shows a case where the third connecting
When the contact failure of the first probes P1 to P4 is detected from the rising state of the potential, the contact position and posture of the first probes P1 to P4 may be adjusted again.
[Sixth Embodiment]
Next, the printed-circuit
The printed-circuit
As a result, electric charges are accumulated in the capacitance of the wiring portion and the like of the device including the conductor patterns E1 to E4. As a result, the electric potentials measured by the measuring
Subsequently, the changeover switches B1 to B4 of the second connecting
In the above-described sixth embodiment, the first connecting device 14 'which integrates the change-over switches A1 to A4 of the first connecting
[Seventh Embodiment]
Next, the printed-circuit
The printed
According to this configuration, any one of the change-over switches A1 to A4 of the first connecting
In the above-described seventh embodiment, the changeover switches B1 to B4 of the
Further, when the second connecting device 15 'having the single changeover switch B1 is applied to the printed board inspection apparatus of the second embodiment, the plurality of capacitors C1 to C4 are used as one capacitor, and the second probes P5 to P5 P8 and the second connection device 15 '. Similarly, when the second connecting device 15 'having the single changeover switch B1 is applied to the printed board inspection apparatus of the third embodiment, the plurality of capacitors C5 to C8 are used as one capacitor having a large capacity, 2 connecting device 15 'and the ground.
Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and various modifications can be made without departing from the gist of the present invention.
For the predetermined times t12, t31, t14, and tu, it is possible to set an optimal time in accordance with the electrical characteristics of the printed board, and by this adjustment, the change of the potential displacement amount at one end of the conductor patterns E1 to E4 can be detected more quickly And accurate substrate inspection can be performed quickly.
Also, with respect to the capacitances of the capacitors C1 to C4 and C5 to C8, it is possible to surely detect the change of the potential displacement amount at one end of the conductor patterns E1 to E4 more quickly by setting an optimum value matching the electric characteristics of the printed board, Accurate substrate inspection can be performed quickly.
1: printed board
2: Insulating layer
E1 to E4: Conductor pattern
11: Printed board inspection device
12: constant current source
13: Insulator
14: First connection device
15: second connecting device
16: Measurement circuit
17: Constant current source control
18:
19: A / D conversion section
20:
21: Main control device
22: Display device
23: Third connection device
25: conductor plate
P1 to P4: First probe
P5 to P8: a second probe
A1 to A4: changeover switch
B1 to B4: changeover switch
C1 to C4: capacitors
C5 to C8: Capacitors
S: Conversion switch
31, 41, 51: Printed board inspection apparatus
Claims (9)
A capacitor having a predetermined capacitance is connected to either or both of the second probe and the second connection device or between the second probe and the reference potential of the constant current source. Device.
And a third connecting device for connecting the first probe to the reference potential of the constant current source via the first connecting device.
When the electrical connection state of the second probe with respect to the reference potential of the constant current source is changed, when the potential displacement amount at one end of the conductor pattern is changed per predetermined unit time tu, it is determined that the conductor pattern is good The method comprising the steps of:
The first probe is connected to the reference potential of the constant current source at a time T3 before the predetermined time t31 from the time T1, and at a time T4 before the time T2 after elapse of a time t14 shorter than the time t12 from the time T1, Wherein the first probe and the reference potential are in a cutoff state.
A capacitor having a predetermined capacitance is connected to either or both of the second probe and the second connection device or between the second probe and the reference potential of the constant current source. Device.
And a third connecting device for connecting the first probe to the reference potential of the constant current source via the first connecting device.
Applications Claiming Priority (2)
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JPJP-P-2014-153493 | 2014-07-29 | ||
JP2014153493 | 2014-07-29 |
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JP (1) | JP6095735B2 (en) |
KR (1) | KR101706465B1 (en) |
CN (1) | CN105319476B (en) |
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JP6474362B2 (en) * | 2016-04-04 | 2019-02-27 | ファナック株式会社 | Printed circuit board deterioration detection device |
CN106824832B (en) * | 2017-02-15 | 2019-05-17 | 友达光电(苏州)有限公司 | A kind of detection device and its application method |
JP7009814B2 (en) * | 2017-07-27 | 2022-02-10 | 日本電産リード株式会社 | Insulation inspection equipment and insulation inspection method |
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JP3165056B2 (en) * | 1997-02-28 | 2001-05-14 | 日本電産リード株式会社 | Substrate inspection device and substrate inspection method |
JP3361311B2 (en) | 1997-02-28 | 2003-01-07 | 日本電産リード株式会社 | Substrate inspection device and substrate inspection method |
JP2002156399A (en) * | 2000-11-17 | 2002-05-31 | Oht Inc | Device and method for inspecting circuit board |
US7250781B2 (en) * | 2002-12-19 | 2007-07-31 | Fuji Xerox Co., Ltd. | Circuit board inspection device |
JP4825083B2 (en) * | 2006-08-28 | 2011-11-30 | 株式会社アドテックエンジニアリング | Trace type circuit board inspection equipment |
CN201014993Y (en) * | 2006-12-04 | 2008-01-30 | 杨世光 | Testing circuit improvement for PCB tester |
JP6229877B2 (en) * | 2013-08-27 | 2017-11-15 | 日本電産リード株式会社 | Inspection device |
JP6229876B2 (en) * | 2013-08-27 | 2017-11-15 | 日本電産リード株式会社 | Inspection device |
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- 2015-07-21 JP JP2015143817A patent/JP6095735B2/en active Active
- 2015-07-24 TW TW104124154A patent/TWI598604B/en active
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JP2002014135A (en) * | 2000-06-30 | 2002-01-18 | Hioki Ee Corp | Method and device for inspecting circuit board |
JP2002014134A (en) * | 2000-06-30 | 2002-01-18 | Hioki Ee Corp | Device for inspecting circuit board |
JP2008232963A (en) * | 2007-03-23 | 2008-10-02 | Hioki Ee Corp | Probe, probe device, and inspection apparatus |
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JP2016033511A (en) | 2016-03-10 |
TWI598604B (en) | 2017-09-11 |
JP6095735B2 (en) | 2017-03-15 |
KR20160014540A (en) | 2016-02-11 |
TW201604564A (en) | 2016-02-01 |
CN105319476A (en) | 2016-02-10 |
CN105319476B (en) | 2018-05-08 |
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