KR100792709B1 - Manufacturing method for semiconductor device - Google Patents
Manufacturing method for semiconductor device Download PDFInfo
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- KR100792709B1 KR100792709B1 KR1020010036285A KR20010036285A KR100792709B1 KR 100792709 B1 KR100792709 B1 KR 100792709B1 KR 1020010036285 A KR1020010036285 A KR 1020010036285A KR 20010036285 A KR20010036285 A KR 20010036285A KR 100792709 B1 KR100792709 B1 KR 100792709B1
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- insulating film
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title abstract description 11
- 238000002955 isolation Methods 0.000 claims abstract description 18
- 238000005530 etching Methods 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims description 15
- 238000007517 polishing process Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 45
- 238000005498 polishing Methods 0.000 abstract description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000001039 wet etching Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
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Abstract
본 발명은 반도체소자의 제조방법에 관한 것으로, 트렌치를 이용한 소자분리절연막의 형성공정에서 매립절연막을 평탄화시키는 화학적 기계적 연마(chemical mechanical polishing, 이하 CMP 라 함)공정 시 단차가 높은 활성영역 상의 매립절연막을 리버스 에치백(reverse etchback)공정으로 식각하여 단차를 줄이되, 일정 간격의 패턴을 갖는 식각마스크를 이용하여 상기 매립절연막의 단차를 줄인 후 CMP공정을 실시하여 CMP 공정 후 연마 균일도를 향상시킴으로써 후속 공정을 용이하게 하고 그에 따른 소자의 공정 수율 및 신뢰성을 향상시키는 기술이다. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a semiconductor device, and includes a buried insulating film on an active region having a high step height during a chemical mechanical polishing (CMP) process to planarize a buried insulating film in a process of forming a device isolation insulating film using a trench. The step is reduced by etching the reverse etchback process, but the step of reducing the gap between the buried insulating layer using an etch mask having a predetermined interval pattern is performed, followed by the CMP process to improve the polishing uniformity after the CMP process. It is a technique that facilitates and thereby improves the process yield and reliability of the device.
Description
도 1 은 종래기술에 따른 반도체소자의 제조방법에 의한 공정 단면도.1 is a cross-sectional view of a process by a method of manufacturing a semiconductor device according to the prior art.
도 2 는 본 발명에 따른 반도체소자의 제조방법에 의한 공정 단면도.2 is a cross-sectional view of a process by a method of manufacturing a semiconductor device according to the present invention.
< 도면의 주요부분에 대한 부호의 설명 ><Description of Symbols for Major Parts of Drawings>
11, 21 : 반도체기판 13, 23 : 절연막패턴11, 21:
15, 25 : 매립절연막 15, 25: buried insulation film
본 발명은 반도체소자의 제조방법에 관한 것으로서, 보다 상세하게 트렌치를 이용한 소자분리절연막 형성 공정 시 단차가 높은 활성영역 상의 매립절연막을 패턴을 갖는 식각마스크를 이용한 리버스 에치백공정으로 단차를 줄인 후 CMP공정을 실시하여 연마 균일도를 향상시키는 반도체소자의 제조방법에 관한 것이다. The present invention relates to a method for manufacturing a semiconductor device, and more particularly, to reduce the CMP after the step of reducing the step by a reverse etch back process using an etching mask having a pattern of the buried insulating film on the active region having a high step height in the process of forming a device isolation insulating film using a trench. The present invention relates to a method for manufacturing a semiconductor device that performs a step to improve polishing uniformity.
고집적화라는 관점에서 소자의 집적도를 높이기 위해서는 각각의 소자 디멘젼(dimension)을 축소하는 것과, 소자간에 존재하는 분리영역의 폭과 면적을 축소하는 것이 필요하며, 이 축소정도가 셀의 크기를 좌우한다는 점에서 소자분리 기술이 메모리 셀 사이즈(memory cell size)를 결정하는 기술이라고 할 수 있다. In order to increase the integration of devices from the viewpoint of high integration, it is necessary to reduce each device dimension and to reduce the width and area of the separation region existing between devices, and the degree of reduction depends on the size of the cell. In this regard, device isolation technology may be used to determine memory cell size.
일반적으로 소자분리 기술에서 디자인 룰이 감소함에 따라 작은 버즈빅 길이와 큰 체적비를 요구하고 있다.In general, as the design rule decreases in device isolation technology, a small buzz length and a large volume ratio are required.
그러나, 종래의 로코스(LOCOS : LOCal Oxidation of Silicon, 이하에서 LOCOS 라 함) 공정방법은 소자분리막이 얇아지는 문제와 버즈빅현상으로 기가(Giga DRAM)급 소자에서는 적용하는데 한계가 있다.However, the conventional LOCOS (LOCOS: LOCOS) process method has a limitation in that it is applied to a giga DRAM device due to a problem of thinning an isolation layer and a buzz big phenomenon.
또한, 트렌치 소자분리 공정도 공정의 복잡성뿐만 아니라 디자인 룰이 감소할수록 트렌치 영역을 매립하는 것이 어려워지므로 실제로 디자인 룰이 0.1 ㎛ 에 접근하면 트렌치 소자분리 공정도 적용하기가 어려워 질 것이다.In addition, the trench isolation process is difficult to bury the trench region as the design rule is reduced as well as the complexity of the process, it will be difficult to apply the trench isolation process when the design rule approaches 0.1 ㎛.
이하, 첨부된 도면을 참고로 하여 종래기술을 설명한다.Hereinafter, with reference to the accompanying drawings will be described in the prior art.
도 1 은 종래기술에 따른 반도체소자의 제조방법에 의한 공정단면도이다. 1 is a cross-sectional view of a process by a method of manufacturing a semiconductor device according to the prior art.
먼저, 반도체기판(11) 상부에 절연막을 형성한 후, 상기 절연막 상부에 소자분리영역으로 예정된 부분을 노출시키는 감광막 패턴을 형성한다. 이때, 상기 절연막은 패드산화막과 질화막의 적층구조로 형성된다. First, an insulating film is formed on the
다음, 상기 감광막 패턴을 식각마스크로 사용하여 상기 절연막 및 소정 두께의 반도체기판(11)을 식각하여 절연막패턴(13) 및 트렌치를 형성한다. Next, the insulating film and the
그 다음, 상기 감광막 패턴을 제거한다. Then, the photoresist pattern is removed.
다음, 상기 트렌치의 표면을 열산화시켜 희생산화막을 성장시킨 후 습식식각을 실시하여 제거함으로써 상기 트렌치 형성공정 시 발생된 상기 트렌치 표면의 결함을 제거한다. Next, the surface of the trench is thermally oxidized to grow a sacrificial oxide film, followed by wet etching to remove defects on the trench surface generated during the trench formation process.
그 후, 다시 열산화공정을 실시하여 상기 트렌치의 표면에 열산화막을 형성 한다. Thereafter, a thermal oxidation process is performed again to form a thermal oxide film on the surface of the trench.
다음, 전체표면 상부에 매립절연막(15)을 형성한다. Next, a buried
그 다음, 상기 반도체기판(11)의 활성영역을 노출시키는 리버스 마스크를 식각마스크로 사용하여 상기 매립절연막(15)을 소정 두께 식각한다. 이때, 상기 리버스 마스크는 단차가 높은 활성영역 전체를 완전히 노출시키도록 형성된다. (도 1 참조)Subsequently, the buried insulating
그 다음, 상기 매립절연막(15)을 상기 절연막패턴(13)을 연마방지막으로 사용하는 CMP공정으로 평탄화시킨다.Next, the buried
다음, 소자분리영역과 반도체기판과의 단차를 줄이기 위하여 상기 매립절연막을 습식식각방법으로 소정 두께 제거하여 소자분리막을 형성한다.Next, in order to reduce the difference between the device isolation region and the semiconductor substrate, the buried insulating film is removed by a wet etching method to form a device isolation film.
그 후, 상기 절연막패턴(13)을 제거하고, 후속공정을 실시한다. Thereafter, the
상기와 같이 종래기술에 따른 반도체소자의 제조방법은, 리버스 마스크를 이용한 식각공정으로 단차가 높은 활성영역 상의 매립절연막을 식각한 후 CMP공정을 실시하였으나, CMP공정 후 상기 활성영역 부분이 더 낮게 형성되었으며, 활성영역의 면적이 넓은 경우 이 현상이 더 심하게 발생하여 후속공정을 저해하는 문제점이 있다. As described above, in the method of manufacturing a semiconductor device according to the related art, a CMP process is performed after etching a buried insulating film on an active region having a high step by an etching process using a reverse mask, but the active region portion is formed lower after the CMP process. If the area of the active area is large, this phenomenon occurs more severely, and there is a problem of inhibiting subsequent processes.
본 발명은 상기한 종래기술의 문제점을 해결하기 위하여, 단차가 높은 활성영역 상의 매립절연막을 패턴을 갖는 리버스 마스크를 식각마스크로 이용한 식각공정으로 소정 두께 제거한 후 CMP공정을 실시함으로써 CMP공정의 균일도를 향상시키 는 반도체소자의 제조방법을 제공하는데 그 목적이 있다.In order to solve the above problems of the prior art, the uniformity of the CMP process is removed by performing a CMP process after removing a predetermined thickness by an etching process using a reverse mask having a pattern as a etch mask with a buried insulating film on an active region having a high step height. It is an object of the present invention to provide a method for manufacturing a semiconductor device to be improved.
이상의 목적을 달성하기 위하여 본 발명에 따른 반도체소자의 제조방법은,In order to achieve the above object, a method of manufacturing a semiconductor device according to the present invention,
반도체기판 상부에 소자분리영역으로 예정되는 부분을 노출시키는 절연막패턴을 형성하는 공정과,Forming an insulating film pattern over the semiconductor substrate to expose a portion intended to be an isolation region;
상기 절연막패턴을 식각마스크로 상기 반도체기판을 식각하여 트렌치를 형성하는 공정과,Forming a trench by etching the semiconductor substrate using the insulating layer pattern as an etching mask;
전체표면 상부에 매립절연막을 형성하는 공정과,Forming a buried insulating film over the entire surface;
상기 반도체기판의 활성영역을 노출시키는 동시에 일정 밀도를 갖는 패턴이 구비되어 있는 리버스 마스크를 식각마스크로 이용하여 상기 매립절연막의 소정 두께를 식각하여 단차를 줄이는 공정과, Etching a predetermined thickness of the buried insulating film by using a reverse mask having a pattern having a predetermined density while exposing an active region of the semiconductor substrate to reduce a step;
상기 매립절연막을 화학적 기계적 연마공정으로 평탄화시켜 상기 트렌치를 매립하는 소자분리절연막을 형성하는 공정을 포함하는 것을 특징으로 한다. And planarizing the buried insulating film by a chemical mechanical polishing process to form a device isolation insulating film filling the trench.
이하, 첨부된 도면을 참고로 하여 본 발명에 따른 상세한 설명을 하기로 한다.Hereinafter, with reference to the accompanying drawings will be described in detail according to the present invention.
도 2 는 본 발명에 따른 반도체소자의 제조방법에 의한 공정 단면도이다. 2 is a cross-sectional view illustrating a process of manufacturing a semiconductor device according to the present invention.
먼저, 반도체기판(21) 상부에 절연막을 형성한 후, 상기 절연막 상부에 소자분리영역으로 예정된 부분을 노출시키는 감광막 패턴을 형성한다. 이때, 상기 절연막은 패드산화막과 질화막의 적층구조로 형성된다. First, an insulating film is formed on the
다음, 상기 감광막 패턴을 식각마스크로 사용하여 상기 절연막 및 소정 두께 의 반도체기판(21)을 식각하여 절연막패턴(23) 및 트렌치를 형성한다. Next, the insulating film and the
그 다음, 상기 감광막 패턴을 제거한다. Then, the photoresist pattern is removed.
다음, 상기 트렌치의 표면을 열산화시켜 희생산화막을 성장시킨 후 습식식각을 실시하여 제거함으로써 상기 트렌치 형성공정 시 발생된 상기 트렌치 표면의 결함을 제거한다. Next, the surface of the trench is thermally oxidized to grow a sacrificial oxide film, followed by wet etching to remove defects on the trench surface generated during the trench formation process.
그 후, 다시 열산화공정을 실시하여 상기 트렌치의 표면에 열산화막을 형성한다. Thereafter, a thermal oxidation process is performed again to form a thermal oxide film on the surface of the trench.
다음, 전체표면 상부에 매립절연막(25)을 형성한다. Next, a buried insulating
그 다음, 상기 반도체기판(21)의 활성영역을 노출시키는 리버스 마스크를 식각마스크로 사용하여 상기 매립절연막(25)을 소정 두께 식각한다. 이때, 상기 리버스 마스크는 활성영역 이외의 다른 부분의 패턴 밀도와 비슷한 밀도를 갖는 패턴이 형성되도록 하거나, 새로운 디자인 룰을 적용하여 패턴이 형성되도록 한다. (도 2 참조)Subsequently, the buried insulating
그 다음, 상기 매립산화막(25)을 상기 절연막패턴(23)을 연마방지막으로 사용하는 CMP공정으로 평탄화시킨다.Next, the buried
다음, 소자분리영역과 반도체기판과의 단차를 줄이기 위하여 상기 매립절연막을 습식식각방법으로 소정 두께 제거하여 소자분리막을 형성한다.Next, in order to reduce the difference between the device isolation region and the semiconductor substrate, the buried insulating film is removed by a wet etching method to form a device isolation film.
그 후, 상기 절연막패턴(23)을 제거하고, 후속공정을 실시한다.Thereafter, the insulating
이상에서 설명한 바와 같이 본 발명에 따른 반도체소자의 방법은, 트렌치를 이용한 소자분리절연막의 형성공정에서 매립절연막을 평탄화시키는 CMP공정 시 단차가 높은 활성영역 상의 매립절연막을 리버스 에치백 공정으로 식각하여 단차를 줄이되, 일정 간격의 패턴을 갖는 식각마스크를 이용하여 상기 매립절연막의 단차를 줄인 후 CMP공정을 실시하여 CMP 공정 후 연마 균일도를 향상시킴으로써 후속 공정을 용이하게 하고 그에 따른 소자의 공정 수율 및 신뢰성을 향상시키는 이점이 있다.As described above, in the method of the semiconductor device according to the present invention, during the CMP process of planarizing the buried insulating film in the process of forming a device isolation insulating film using a trench, the buried insulating film on the high active region is etched by a reverse etch back process. Reduce the gap between the buried insulating film using an etching mask having a pattern of regular intervals, and then perform the CMP process to improve the polishing uniformity after the CMP process, thereby facilitating subsequent processes and thereby improving the process yield and reliability of the device. There is an advantage to improve.
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| KR980012255A (en) * | 1996-07-23 | 1998-04-30 | 김광호 | Device isolation method of semiconductor device |
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| KR19990061066A (en) * | 1997-12-31 | 1999-07-26 | 김영환 | Method of forming device isolation film of semiconductor device |
| KR20000004532A (en) * | 1998-06-30 | 2000-01-25 | 김영환 | Method for manufacturing an isolation layer of semiconductor devices |
| KR20000045374A (en) * | 1998-12-30 | 2000-07-15 | 김영환 | Method for manufacturing semiconductor device |
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| KR970003807A (en) * | 1995-06-26 | 1997-01-29 | 김광호 | Semiconductor device having device isolation structure including conductive layer and method of manufacturing same |
| KR980012255A (en) * | 1996-07-23 | 1998-04-30 | 김광호 | Device isolation method of semiconductor device |
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