KR100548683B1 - 회로 기판 유닛의 제조 방법 및 액정 장치의 제조 방법 - Google Patents
회로 기판 유닛의 제조 방법 및 액정 장치의 제조 방법 Download PDFInfo
- Publication number
- KR100548683B1 KR100548683B1 KR1019980030095A KR19980030095A KR100548683B1 KR 100548683 B1 KR100548683 B1 KR 100548683B1 KR 1019980030095 A KR1019980030095 A KR 1019980030095A KR 19980030095 A KR19980030095 A KR 19980030095A KR 100548683 B1 KR100548683 B1 KR 100548683B1
- Authority
- KR
- South Korea
- Prior art keywords
- circuit board
- alignment mark
- liquid crystal
- chip
- mark
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/16—Constructional details or arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0812—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/5442—Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
- H01L2223/5448—Located on chip prior to dicing and remaining on chip after dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15151—Shape the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/303—Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- General Engineering & Computer Science (AREA)
- Wire Bonding (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (5)
- 불투명한 회로 기판상에 이방성 도전막을 사용하여 IC를 접합하는 회로 기판 유닛의 제조 방법으로서,상기 회로 기판은 상기 IC에 설치된 IC측 얼라인먼트 마크와 위치맞춤하기 위한 광투과성 얼라인먼트 마크를 구비하고,촬영용 카메라를 상기 회로 기판을 사이에 두고 상기 IC의 반대측에 설치하며,상기 촬영용 카메라로 상기 광투과성 얼라인먼트 마크와 상기 IC측 얼라인먼트 마크를 동시에 촬영하고,상기 회로 기판과 상기 IC를 위치맞춤하며,상기 이방성 도전막을 사용하여 상기 회로 기판과 상기 IC를 접합하고,상기 회로 기판과 상기 IC를 접합하고 있는 상기 이방성 도전막의 상태를 상기 광투과성 얼라인먼트 마크를 통하여 검사하는 것을 특징으로 하는 회로 기판 유닛의 제조 방법.
- 제 1 항에 있어서,상기 광투과성 마크는 IC측 얼라이먼트 마크의 윤곽 형상보다도 약간 크고 그것과 상사(相似) 형상을 갖는 것을 특징으로 하는 회로 기판 유닛의 제조 방법.
- 제 1 항에 있어서,상기 광투과성 마크는 상기 회로 기판을 관통하는 구멍인 것을 특징으로 하는 회로 기판 유닛의 제조 방법.
- 제 1 항에 있어서,상기 회로 기판은 가요성 회로 기판인 것을 특징으로 하는 회로 기판 유닛의 제조 방법.
- 제 1 항 내지 제 9 항 중 어느 한 항에 기재된 회로 기판 유닛의 제조 방법을 이용한 액정 장치의 제조 방법.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP97-204694 | 1997-07-30 | ||
JP20469497 | 1997-07-30 | ||
JP98-138904 | 1998-05-20 | ||
JP10138904A JPH11102932A (ja) | 1997-07-30 | 1998-05-20 | Ic実装構造、液晶装置及び電子機器 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR19990014200A KR19990014200A (ko) | 1999-02-25 |
KR100548683B1 true KR100548683B1 (ko) | 2006-04-21 |
Family
ID=26471844
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019980030095A KR100548683B1 (ko) | 1997-07-30 | 1998-07-27 | 회로 기판 유닛의 제조 방법 및 액정 장치의 제조 방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6211935B1 (ko) |
JP (1) | JPH11102932A (ko) |
KR (1) | KR100548683B1 (ko) |
CN (1) | CN1169201C (ko) |
TW (1) | TW386273B (ko) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004038203A (ja) * | 1997-07-30 | 2004-02-05 | Seiko Epson Corp | 回路基板ユニットの製造方法及び液晶装置の製造方法 |
JP3919972B2 (ja) * | 1998-07-31 | 2007-05-30 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP3117010B2 (ja) * | 1998-11-05 | 2000-12-11 | 日本電気株式会社 | 液晶表示パネル |
WO2001007959A2 (en) * | 1999-07-22 | 2001-02-01 | Koninklijke Philips Electronics N.V. | Display device substrate with alignment markers |
SE516936C2 (sv) * | 1999-12-10 | 2002-03-26 | Ericsson Telefon Ab L M | Flytande-kristalldisplay, LCD |
JP2001282454A (ja) * | 2000-03-31 | 2001-10-12 | Nissha Printing Co Ltd | 周縁部に遮光性を有するタッチパネル |
US6614499B1 (en) * | 2000-08-16 | 2003-09-02 | Eastman Kodak Company | Electrically addressable display system with alignment reference features and process for forming same |
JP4884586B2 (ja) * | 2000-12-18 | 2012-02-29 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
TW556016B (en) * | 2000-12-26 | 2003-10-01 | Hannstar Display Corp | Liquid crystal display and a method for detecting two connected pins thereof |
TWI225175B (en) * | 2000-12-26 | 2004-12-11 | Hannstar Display Corp | Inspection method for a liquid crystal display and its pin connection |
US6885427B2 (en) * | 2002-03-15 | 2005-04-26 | Lg.Philips Lcd Co., Ltd. | Substrate bonding apparatus for liquid crystal display device having alignment system with one end provided inside vacuum chamber |
US7141450B2 (en) * | 2002-04-08 | 2006-11-28 | Lucent Technologies Inc. | Flip-chip alignment method |
WO2004023859A1 (en) * | 2002-09-03 | 2004-03-18 | Pcb Plus, Inc. | Apparatus and method for replacing defective pcb of pcb panel |
WO2004028816A1 (ja) | 2002-09-30 | 2004-04-08 | Sony Corporation | 電子部品位置合わせ方法及びその装置 |
JP4065805B2 (ja) * | 2003-04-10 | 2008-03-26 | 富士機械製造株式会社 | 撮像装置 |
KR100700819B1 (ko) * | 2005-05-11 | 2007-03-27 | 삼성에스디아이 주식회사 | 발광표시장치 및 발광표시장치의 연결방법 |
US7371663B2 (en) * | 2005-07-06 | 2008-05-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Three dimensional IC device and alignment methods of IC device substrates |
JP4687340B2 (ja) * | 2005-09-02 | 2011-05-25 | ソニー株式会社 | 半導体装置 |
CN100437236C (zh) * | 2005-10-28 | 2008-11-26 | 友达光电股份有限公司 | 液晶显示面板与其上的线路布局 |
TW200720740A (en) * | 2005-11-18 | 2007-06-01 | Innolux Display Corp | Liquid crystal display device |
CN102856239B (zh) * | 2006-07-31 | 2018-03-30 | 温泰克工业有限公司 | 将预定元件置于目标平台的装置和方法 |
KR100809704B1 (ko) | 2006-09-22 | 2008-03-06 | 삼성전자주식회사 | 조립 정확도가 개선된 반도체 패키지 |
US20080156780A1 (en) * | 2006-12-29 | 2008-07-03 | Sergei Voronov | Substrate markings |
KR101304901B1 (ko) * | 2007-01-26 | 2013-09-05 | 삼성디스플레이 주식회사 | 표시 장치 |
KR100808419B1 (ko) | 2007-07-27 | 2008-03-06 | 실리콘 디스플레이 (주) | 탭 본딩 방법 |
CN100451741C (zh) * | 2007-10-16 | 2009-01-14 | 华映视讯(吴江)有限公司 | Ic芯片安装方法、ic芯片安装架构以及液晶显示器 |
CN101419954B (zh) * | 2007-10-22 | 2011-01-05 | 南茂科技股份有限公司 | 用于芯片封装构造的对位装置 |
KR100926652B1 (ko) | 2007-11-08 | 2009-11-16 | 세크론 주식회사 | 웨이퍼 정렬 방법 및 플립칩 제조 방법 |
DE102008014742A1 (de) * | 2008-03-18 | 2009-09-24 | Qimonda Ag | Anordnung in Flip-Chip-Montagebauweise, Überprüfungsanordnung zum Überprüfen der Positionierung eines integrierten Schaltkreises relativ zu einem Träger einer Anordnung in Flip-Chip-Montagebauweise und Verfahren zum Überprüfen der Positionierung eines integrierten Schaltkreises relativ zu einem Träger einer Anordnung in Flip-Chip-Montagebauweise |
CN101730461B (zh) * | 2008-10-17 | 2013-03-27 | 华南师范大学 | 一种用于bga芯片焊接的对位方法 |
JP2012043953A (ja) * | 2010-08-18 | 2012-03-01 | Renesas Electronics Corp | 電子部品および電子部品の製造方法 |
JP2012182358A (ja) * | 2011-03-02 | 2012-09-20 | Hitachi High-Technologies Corp | Fpdモジュールの組立装置及び組立方法 |
TWI543328B (zh) * | 2012-08-01 | 2016-07-21 | 天鈺科技股份有限公司 | 具有對準標記的半導體器件以及顯示裝置 |
CN103631042B (zh) * | 2013-12-03 | 2016-04-13 | 合肥京东方光电科技有限公司 | 基板、显示屏以及检测基板上透明玻璃的方法 |
CN104778910B (zh) * | 2015-03-31 | 2018-09-04 | 深超光电(深圳)有限公司 | 显示面板的检测装置及检测方法 |
WO2019040273A1 (en) | 2017-08-24 | 2019-02-28 | Cerebras Systems Inc. | APPARATUS AND METHOD FOR FIXING COMPONENTS OF AN INTEGRATED CIRCUIT |
CN108513425B (zh) * | 2018-03-29 | 2020-11-24 | 青岛海信宽带多媒体技术有限公司 | 一种光模块 |
US10971401B2 (en) | 2018-10-16 | 2021-04-06 | Cerebras Systems Inc. | Systems and methods for precision fabrication of an orifice within an integrated circuit |
US11145530B2 (en) * | 2019-11-08 | 2021-10-12 | Cerebras Systems Inc. | System and method for alignment of an integrated circuit |
WO2023144972A1 (ja) * | 2022-01-27 | 2023-08-03 | 東京エレクトロン株式会社 | 基板処理装置、及び基板処理方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04167600A (ja) * | 1990-10-31 | 1992-06-15 | Taiyo Yuden Co Ltd | 位置補正装置及び位置補正方法 |
JPH06310569A (ja) * | 1993-04-27 | 1994-11-04 | Seikosha Co Ltd | 半導体素子のフェースダウンボンディング法 |
JPH0875417A (ja) * | 1994-09-08 | 1996-03-22 | Fujitsu Ltd | アライメント装置 |
JPH0961118A (ja) * | 1995-08-28 | 1997-03-07 | Hitachi Electron Eng Co Ltd | 液晶セル用ドライバチップの位置合せ光学系 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62108206A (ja) * | 1985-11-06 | 1987-05-19 | Canon Inc | カラ−フィルタ−の製造方法 |
US5231471A (en) * | 1986-03-25 | 1993-07-27 | Canon Kabushiki Kaisha | Alignment and exposure apparatus |
JP2754609B2 (ja) * | 1988-06-08 | 1998-05-20 | 日本電気株式会社 | 半導体装置の製造方法 |
WO1996004592A1 (en) * | 1994-08-02 | 1996-02-15 | Philips Electronics N.V. | Method of repetitively imaging a mask pattern on a substrate |
JP3256391B2 (ja) * | 1994-11-28 | 2002-02-12 | キヤノン株式会社 | 回路基板構造 |
JP3405087B2 (ja) * | 1995-11-06 | 2003-05-12 | ソニー株式会社 | 液晶表示装置およびその製造方法 |
TW543787U (en) * | 1996-03-29 | 2003-07-21 | Toshiba Corp | Liquid crystal display apparatus |
JPH1064796A (ja) * | 1996-08-23 | 1998-03-06 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
US5936311A (en) * | 1996-12-31 | 1999-08-10 | Intel Corporation | Integrated circuit alignment marks distributed throughout a surface metal line |
US5783490A (en) * | 1997-04-21 | 1998-07-21 | Vanguard International Semiconductor Corporation | Photolithography alignment mark and manufacturing method |
US5923996A (en) * | 1997-06-02 | 1999-07-13 | Taiwan Semiconductor Manufacturing Company, Ltd | Method to protect alignment mark in CMP process |
US5972793A (en) * | 1997-06-09 | 1999-10-26 | Vanguard International Semiconductor Corporation | Photolithography alignment mark manufacturing process in tungsten CMP metallization |
US5876884A (en) * | 1997-10-02 | 1999-03-02 | Fujitsu Limited | Method of fabricating a flat-panel display device and an apparatus therefore |
-
1998
- 1998-05-20 JP JP10138904A patent/JPH11102932A/ja active Pending
- 1998-07-08 TW TW087111074A patent/TW386273B/zh not_active IP Right Cessation
- 1998-07-27 KR KR1019980030095A patent/KR100548683B1/ko not_active IP Right Cessation
- 1998-07-29 CN CNB981166296A patent/CN1169201C/zh not_active Expired - Lifetime
- 1998-07-30 US US09/126,149 patent/US6211935B1/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04167600A (ja) * | 1990-10-31 | 1992-06-15 | Taiyo Yuden Co Ltd | 位置補正装置及び位置補正方法 |
JPH06310569A (ja) * | 1993-04-27 | 1994-11-04 | Seikosha Co Ltd | 半導体素子のフェースダウンボンディング法 |
JPH0875417A (ja) * | 1994-09-08 | 1996-03-22 | Fujitsu Ltd | アライメント装置 |
JPH0961118A (ja) * | 1995-08-28 | 1997-03-07 | Hitachi Electron Eng Co Ltd | 液晶セル用ドライバチップの位置合せ光学系 |
Also Published As
Publication number | Publication date |
---|---|
US6211935B1 (en) | 2001-04-03 |
KR19990014200A (ko) | 1999-02-25 |
TW386273B (en) | 2000-04-01 |
JPH11102932A (ja) | 1999-04-13 |
CN1169201C (zh) | 2004-09-29 |
CN1208955A (zh) | 1999-02-24 |
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