KR100397635B1 - Mask holding apparatus in the process of the O-EL display and method thereof - Google Patents

Abstract

The present invention relates to a mask fixing device and method for deposition during the manufacturing process of an organic EL flat panel display, the purpose of which is to tension the mask to prevent the wrinkles of the mask and sagging of the panel in the vacuum to enable the deposition mask fixing device to respond to large inches The present invention provides a mask fixing apparatus and method capable of responding to a large inch by applying a glass panel to the glass panel without sagging.

The configuration of the present invention is a device for fixing the mask and glass to the glass chucking plate during the process of manufacturing the organic EL flat panel display in the evaporator,

Located under the glass chucking plate 502 and installed under the glass chucking plate so that the clamper 501 for fixing the glass 504 from the side and the mask 5 in contact with the glass 504 are maintained under tension. An apparatus and method for fixing the glass and the mask to the glass chucking plate even in a full color of 5 " or more in full color.

Description

Mask holding apparatus in the process of manufacturing organic EL flat panel display

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mask fixing device and method for deposition during an organic EL flat panel display manufacturing process. The present invention relates to a fixing device and a method that can handle a large inch by applying tension and fixing the glass panel without sagging.

A configuration of a deposition mask fixing device for a conventional organic EL flat panel display manufacturing process is illustrated in FIG. 4, which is configured to mount a target 407 to a deposition source 405 in a vacuum, and then attach it to a heater 406. After the heat is applied, the glass (panel 403) is placed between the mask 404 and the glass chucking plate 402, and the magnetic force is applied to the magnet 401. There is no separate device configuration because a separate mechanical stretching or other tension is not applied by the method of maintaining and maintaining the flatness.

As a problem of the prior art as described above, a flat Ni mask, a flat panel, a panel keeping plate, which is manufactured by an electro-forming method by a deposition mask fixing device in an organic EL flat panel display manufacturing process, And a magnet is installed on it, and a mask and a thin panel glass are firmly fixed and deposited on the keeping plate. In this way, a small full size of about 5 "full color (Full) is used. There is a problem that it is difficult to apply to more than the size corresponding to the color).

An object of the present invention for solving the above problems is to apply a tension to the mask to prevent the mask wrinkles and sagging of the panel in the vacuum to enable large-inch response to the deposition mask fixing device used in the organic EL flat panel display manufacturing process The present invention provides a fixing device and method capable of dealing with a large inch by fixing a glass panel without sagging.

Figure 1 is to apply a tension to the mask to secure the mask to the mask holder

System configuration diagram of the present invention,

2 is a system block diagram of the present invention;

Figure 3 is a device of fixing the mask of the present invention by applying tension to the mask holder

Operation flow chart,

4 is an exemplary view showing a device configuration for a conventional deposition technique,

5 is an exemplary view showing a device configuration for the deposition technique of the present invention,

6 is an exemplary view showing a mask holder of the present invention;

7 is a device calibration configuration diagram of the present invention;

8 is an exemplary view showing a mask of the present invention,

9 is a mask stretching block diagram of the present invention.

<Description of the symbols for the main parts of the drawings>

(1): mask camera up and down drive cylinder (2): mask camera

(3): micro stepping motor (4): stretching die

(5): glass (panel) (6): mask light source

(7): mask carter ball groove (8): mask carter

(9): mask carter up and down drive cylinder (10): micro stepping motor

(11): mask clamper 12: power tree

(13): mask front light 14: mask plate

15: mask holder 16: X, Y, Θ table

17: Frame Carter Ball Groove 18: X, Y, Z Table

19: frame carter

20: Frame Carter Up-Down Driving Cylinder 21: Transfer Plate

(22): Servo motor (23): Swing arm / pulley

(24): vacuum pad (25): ball groove

(51): bolt fastening hole 52: mask recognition hole

75: mast mask

(151): lower body (152): upper cover

(152): top cover (153): mask fixing bolt

(154): rib (154a): piano wire

155: Effective Surface 501: Clamper

502: Glass Chucking Plate 504: Mask

505: deposition source 506: heater

(507): Target

The apparatus of the present invention to achieve the object as described above and to perform the problem for eliminating the conventional defects in the apparatus for manufacturing a mask holder which is a device for fixing the glass and mask put into the evaporator to the glass chucking plate ,

The mask clamper 11 is advanced by driving the power tree 12 by driving the micro stepping motor 3 to bite the mask 504, and then the mask camera 8 is moved to the mask stretching target position M1... A working area part which obtains vision data from 3 and 2) and stretches the mask 504;

After loading the mask 504, the X, Y, Θ table 16 is driven to maintain the mask 504 posture, and then the mask carter up and down driving cylinder 9 is raised to the mask carter ball groove 7 A mask Carter 8 portion for positioning to a degree of 占 퐉 and

Lift the X, Y, Z table 18 and the X, Y, Z table 18 that support the mask holder 15 from the lower side to bring the frame Carter ball groove 17 to the working area groove 26. A frame carter 19 portion composed of a frame carter vertical drive cylinder 20 for positioning at 2 占 퐉,

Consists of a transfer plate 21 and a transfer arm 21 consisting of a servo motor 22 and a swing arm / pulley 23 for transmitting a driving force thereto to supply the mask and the frame to the working area in turn.

Adjusting the X, Y tables in the X, Y, and Z tables 18 to fix the upper cover 152 to the mask holder 15 using the mask fixing bolt 153 for the mask 504 moved to the working area. After the frame carter ball groove 17 is positioned to the working area groove 26 by ± 2 μm by raising the frame cart up and down drive cylinder 20, the Z table in the X, Y, and Z tables 18 is raised to be in close contact with each other. By chucking the mask holder 15 with the mask fixing bolt 153 and then advancing the mask clamper 11 to release the mask 504.

A device configured to assemble a clamper positioned under the evaporator glass chucking plate to fix the glass from the side, and a mask holder 15 installed under the glass chucking plate to keep the mask in contact with the glass while maintaining tension. do.

The mask uses an etched mask corresponding to a full color of 5 "or larger, and the mask stretching amount is considered as the amount of stretching of the mask by radiant heat, considering the radiation temperature inside the vacuum evaporator is ΔT = 60 ° C. When adjusting the amount of stretching so as not to lose the strain fpin (Strain) is characterized in that the tension was applied by applying εm = 0.06% such that εm (elongation of the rigid body)> εT (elongation at temperature change).

The mask holder includes a lower body forming a lower portion, an upper cover forming an upper portion, and a plurality of mask fixing bolts that fix the stretched mask while fixing the holes formed in the lower body and the upper cover. The center portion is characterized in that the rectangular effective surface is formed.

In order to prevent the glass from sagging, ribs are formed on the effective surface of the mask holder when the glass is a sub-cell method.

In order to prevent the glass from sagging, the effective surface of the mask holder is characterized in that the glass is formed in the case of a full size piano wire.

In addition, the method of stretching the mask and fixing the stretched mask and glass to the glass chucking plate during the process of manufacturing an organic EL flat panel display in the present invention evaporator,

The mask 504 is loaded on the mask carter 8, and then the X, Y, Θ table 16 is driven to maintain the mask 504 posture, and then the mask carter up and down driving cylinder 9 is raised to raise the mask carter ball. Positioning the groove 7 on the order of ± 2 μm,

At this time, the mask clamper 11 is advanced by driving the power tree 12 by driving the micro stepping motor 3 to bite the mask 504, and then the mask camera is moved to the mask stretching target position M1... Obtaining vision data from 8 sets, 2) and stretching the mask 504;

When the stretching of the mask 504 is completed, evacuating the mask camera 2 through the rotational movement in the work area using the micro stepping motor 10,

The mask camera illumination is supplied to eight mask light sources 6 and the mask cart 8 is operated by the swing arm / pulley 23 by driving the servomotor 22 after the stretching of the mask 504 is completed. Moving to the opposite side and moving the frame carter 19 into the working area,

Adjusting the X, Y tables in the X, Y, and Z tables 18 to fix the upper cover 152 to the mask holder 15 using the mask fixing bolt 153 for the mask 504 moved to the working area. After the frame carter ball groove 17 is positioned to the working area groove 26 by ± 2 μm by raising the frame cart up and down drive cylinder 20, the Z table in the X, Y, and Z tables 18 is raised to be in close contact with each other. Chucking the mask holder 15 with a mask fixing bolt 153 and then advancing the mask clamper 11 to release the mask 504;

After the above steps, the mask holder is placed under the evaporator glass chucking plate to assemble the clamper fixing the glass from the side, and the mask holder 15 installed under the glass chucking plate to keep the mask in contact with the glass under tension. Characterized in that consisting of steps.

Hereinafter, the configuration and the operation of the embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a system configuration diagram of the present invention, a device for applying a tension to a mask to secure a mask to a mask holder, and FIG. 2 is a system block diagram for applying a tension to a mask of the present invention. Is a device for manufacturing a mask holder, which is a device for fixing the glass and mask introduced into the evaporator to the glass chucking plate, and is a mask clamper that can apply tension to the mask camera and the mask in the working area. The clamper number is composed of 12 sets of long sides and 10 sets of short sides, and a mask carter for supplying a mask, a frame cart part for supplying a mask holder, and a working area alternately for a mask and a frame. It is composed of a transfer part which is supplied to the working area.

In detail, the mask clamper 11 is advanced by driving the power tree 12 by driving the micro stepping motor 3 to bite the mask 504 and then masked by the mask stretching target position M1... A working area for obtaining vision data from the cameras (8 sets, 2) and stretching the mask 504;

After loading the mask 504, the X, Y, Θ table 16 is driven to maintain the mask 504 posture, and then the mask carter up and down driving cylinder 9 is raised to the mask carter ball groove 7 A mask Carter 8 portion for positioning to a degree of 占 퐉 and

Lift the X, Y, Z table 18 and the X, Y, Z table 18 that support the mask holder 15 from the lower side to bring the frame Carter ball groove 17 to the working area groove 26. A frame carter 19 portion composed of a frame carter vertical drive cylinder 20 for positioning at 2 占 퐉,

The work area consists of a transfer plate 21 and a transfer part composed of a servo motor 22 and a swing arm / pulley 23 which transfer driving force to the working area so as to alternately supply the mask and the frame to the working area. After adjusting the X, Y table of the X, Y, Z table 18 so that the upper cover 152 can be fixed to the mask holder 15 using the mask fixing bolt 153 with the mask 504 moved to the frame. When the frame Carter ball groove 17 is positioned to the working area groove 26 by ± 2 μm by raising the Carter vertical drive cylinder 20, the Z table in the X, Y, and Z tables 18 is raised to bring the mask into close contact. The mask holder fixing member is assembled by chucking the mask fixing bolt 153 to the holder 15 and then advancing the mask clamper 11 to release the mask 504.

3 is an operational flow diagram of the present invention, showing the operational flow of the device for fixing the mask by applying tension to the frame.

FIG. 5 illustrates a deposition technique of the present invention. In the organic EL thin film deposition, a mask holder fixed by applying a tension to a mask holder and a structure for preventing panel sag are provided. And a mask holder 15 disposed below the glass chucking plate so as to be in contact with the clamper 501 for fixing the glass 5 from the side and the mask 504 in contact with the glass 5 while maintaining tension. To fix the glass and mask to the glass chucking plate.

In more detail, the deposition technology of the present invention as described above will be described in detail. If the target 507 is supplied to the deposition source 505 and then heated by the heater 506 for a predetermined time, the deposition target 507 is scattered and chucked to the upper portion. The thin glass 5 is uniformly coated. For this purpose, the thin film mask 504 is stretched on the mask holder 15, and then bolted to the mask fixing bolt 153. The glass 5 then clamps the clamper 501. To the glass chucking plate 502.

At this time, the outer periphery of the glass 5 is accurately chucked, but the center of the glass is sag, so as to prevent this, as shown in FIG. 6, the mask holder (Rib) prevents the panel sagging ribs 154 by applying the center portion. Prevent sag.

However, this can be done by partitioning the cell into several masks inside the mask 504, and damper wires in three rows using the piano wire 154a during full color deposition on one sheet of mask 504. (Damper Wire) can be used to pass outside the effective surface.

FIG. 6 illustrates a mask holder of the present invention, wherein the mask holder includes a lower body 151 forming a lower portion, an upper cover 152 forming an upper portion, and a lower body 151 and an upper cover ( It consists of a plurality of mask fixing bolts 153 for fixing through the hole formed in the 152 and at the same time to secure the stretched mask, the center effective surface 155 is formed.

In order to prevent the glass from sagging, ribs are formed on the effective surface 155 of the mask holder, and a piano wire is formed when the glass is full size. Form.

FIG. 7 shows a device calibration configuration diagram of the present invention, which relates to a method of positioning a mask mask 75 panel on a lower side thereof and setting the upper mask camera 2 to a coordinate system at an accurate position. The technique is shown.

Figure 8 shows the mask of the present invention, the outer portion that can be bitten by a clamper to apply tension to the mask, the bolt fastening hole 51 and the mask recognition for bolting after applying the tension to the mask after the mask stretch The hole 52 is shown.

9 is a block diagram showing a structure of stretching the mask in the mask stretching block diagram of the present invention.

Hereinafter, an embodiment in which the mask of the present invention is stretched and mounted on the mask holder will be described.

An apparatus configuration for fixing the mask 504 by applying tension to the mask holder 15 while maintaining the degree of ± 1 μm is illustrated in the system configuration of FIG. 1 according to the configuration of the mask 504. Is loaded onto the mask carter 8 and then the X, Y, Θ table 16 is driven to maintain the mask 504 posture, and then the mask carter up and down drive cylinder 9 is raised to raise the mask carter ball groove 7. Position is within ± 2㎛.

At this time, the mask clamper 11 is driven by advancing the mask clamper 11 by driving the power tree 12 by driving the micro stepping motor 3, and then the mask stretching target is shown in FIG. 7. The mask 504 is stretched to the positions M1... M8.

At this time, vision data for stretching the mask 504 is obtained using the mask cameras (8 sets, 2).

In the system configuration of the present invention, the mask camera 2 is positioned by the mask camera up-and-down driving cylinder 1 to the ball groove 25 to a degree of ± 1 μm.

For reference, the power tree 12 is composed of a lever ratio so that all the effective surfaces 155 can be stretched into a rectangle when the mask is stretched by? = 0.06%.

When the stretching of the mask 504 is completed, the mask camera 2 is evacuated through the rotational movement in the work area using the micro stepping motor 10.

The mask camera illumination is supplied to eight mask light sources 6 and the mask cart 8 is operated by the swing arm / pulley 23 by driving the servomotor 22 after the mask 504 has been stretched. It moves to the opposite side and moves the frame carter 19 into the working area.

The mask 504 panel moved to the working area is shown in the FIG. 1 system configuration diagram to allow the upper cover 152 to be fixed to the mask holder 15 using a mask fixing bolt 153 in the FIG. 6 mask holder diagram of the invention. The frame carter ball groove 17 is positioned to the working area groove 26 by ± 2 μm by adjusting the X, Y table among the X, Y, Z tables 18 and then raising the frame cart up and down drive cylinder 20. When the Z table of the X, Y, and Z tables 18 is brought up to be in close contact with each other, the mask holder 15 is chucked with the mask fixing bolt 153, and the mask clamper 11 is advanced to release the mask 504. Is done.

As shown in FIG. 8, the mask 504 passes through a bolt fastening hole 51 through which the mask fixing bolt 153 passes and illumination when determining the stretching target positions M1... M8 of FIG. 7. A mask recognition hole 52 is formed.

In FIG. 1, reference numeral 4 is a stretching die, 13 is a mask front illumination, 14 is a mask plate, 21 is a transfer plate, and 24 is a vacuum pad.

The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by any person having ordinary skill in the art without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.

In the organic EL flat panel display manufacturing process of the present invention as an effect of the deposition mask fixing device to respond to an etching mask (Etched Mask) to correspond to a full color of 5 "or more, it is possible to manufacture a mask of a large size (Size) In addition, the mask is stretched to firmly fix the mask holder by applying tension on the mask holder, and supply the mask holder to each position of the evaporator, and the gripping in the vacuum of the glass is performed without sagging. To support the chucking plate to eliminate the deflection of the glass, a mechanical structure clamper is adopted at the side, and the central deflection may provide a rib to the mask holder to prevent the deflection.

The mask stretching amount is adjusted considering the ΔT = 60 ℃ considering the radiation temperature inside the vacuum evaporator, the stretching amount is adjusted so as not to lose the stretching amount of the mask by the radiant heat, the adjusted strain, εm (rigid body) Elongation) >> εT (Elongation due to temperature change) is applied by applying εm = 0.06% to stretch the mask, and it is easy to cope with large size full color by applying tension to the mask and fixing it to the mask holder. have.

Claims (5)

In the apparatus for manufacturing a mask holder which is a device for fixing the glass and mask introduced into the evaporator to the glass chucking plate, The mask clamper 11 is advanced by driving the power tree 12 by driving the micro stepping motor 3 to bite the mask 504, and then the mask camera 8 is moved to the mask stretching target position M1... A working area section which stretches the mask 504 by obtaining vision data from (3) and (2), After loading the mask 504, the X, Y, Θ table 16 is driven to maintain the mask 504 posture, and then the mask carter up and down driving cylinder 9 is raised to the mask carter ball groove 7 A mask Carter 8 portion for positioning to a degree of 占 퐉 and Lift the X, Y, Z table 18 and the X, Y, Z table 18 that support the mask holder 15 from the lower side, and move the frame Carter ball groove 17 to the working area groove 26. A frame carter 19 portion composed of a frame carter vertical drive cylinder 20 for positioning at 2 占 퐉, Consists of a transfer plate 21 and a transfer arm 21 consisting of a servo motor 22 and a swing arm / pulley 23 for transmitting a driving force thereto to supply the mask and the frame to the working area in turn. Adjusting the X, Y tables in the X, Y, and Z tables 18 to fix the upper cover 152 to the mask holder 15 using the mask fixing bolt 153 for the mask 504 moved to the working area. After the frame carter ball groove 17 is positioned to the working area groove 26 by ± 2 μm by raising the frame cart up and down drive cylinder 20, the Z table in the X, Y, and Z tables 18 is raised to be in close contact with each other. By chucking the mask holder 15 with the mask fixing bolt 153 and then advancing the mask clamper 11 to release the mask 504. A device configured to assemble a clamper positioned under the evaporator glass chucking plate to fix the glass from the side, and a mask holder 15 installed under the glass chucking plate to keep the mask in contact with the glass while maintaining tension. Mask fixing device for deposition during organic EL flat panel display manufacturing process. The method of claim 1, The mask uses an etched mask corresponding to a full color of 5 "or larger, and the mask stretching amount is considered as the amount of stretching of the mask by radiant heat, considering the radiation temperature inside the vacuum evaporator is ΔT = 60 ° C. When adjusting the amount of stretching so as not to lose the strain, the strain is applied to the organic EL flat panel display, which is applied by applying ε m = 0.06% so that ε m (elongation of rigid body)> ε T (elongation due to temperature change). Mask fixing device for in-process deposition. The method of claim 1, The mask holder is fixed through the lower body 151 forming a lower portion, the upper cover 152 forming an upper portion, and the holes formed in the lower body 151 and the upper cover 152 and stretched at the same time. A mask fixing body for vapor deposition in an organic EL flat panel display manufacturing process, characterized in that it comprises a plurality of mask fixing bolts (153) for fixing the, and the central effective surface 155 is formed in the center portion. The method of claim 3, wherein In order to prevent the glass from sagging, ribs are formed on the effective surface 155 of the mask holder, and piano lines are formed when the glass is full size. A mask fixture for vapor deposition during an organic EL flat panel display manufacturing process, characterized in that. A method of stretching a mask and fixing the stretched mask and glass to a glass chucking plate during a process of manufacturing an organic EL flat panel display in a vapor deposition machine, The mask 504 is loaded onto the mask carter 8, and then the X, Y, Θ table 16 is driven to maintain the mask 504 posture, and then the mask carter up and down driving cylinder 9 is raised to raise the mask carter ball. Positioning the groove 7 on the order of ± 2 μm, At this time, the mask clamper 11 is advanced by driving the power tree 12 by driving the micro stepping motor 3 to bite the mask 504, and then the mask camera is moved to the mask stretching target position M1... Obtaining vision data from 8 sets, 2) and stretching the mask 504; When the stretching of the mask 504 is completed, evacuating the mask camera 2 through the rotational movement in the work area using the micro stepping motor 10, The mask camera illumination is supplied to eight mask light sources 6 and the mask cart 8 is operated by the swing arm / pulley 23 by driving the servomotor 22 after the stretching of the mask 504 is completed. Moving to the opposite side and moving the frame carter 19 into the working area, Adjusting the X, Y tables in the X, Y, and Z tables 18 to fix the upper cover 152 to the mask holder 15 using the mask fixing bolt 153 for the mask 504 moved to the working area. After the frame carter ball groove 17 is positioned to the working area groove 26 by ± 2 μm by raising the frame cart up and down drive cylinder 20, the Z table in the X, Y, and Z tables 18 is raised to be in close contact with each other. Chucking the mask holder 15 with a mask fixing bolt 153 and then advancing the mask clamper 11 to release the mask 504; After the above steps, the mask holder is placed under the evaporator glass chucking plate to assemble the clamper to fix the glass from the side, and the mask holder 15 installed under the glass chucking plate to keep the mask in contact with the glass under tension. A method for fixing a mask for deposition during an organic EL flat panel display manufacturing process comprising the steps of: