WO2006090746A1

WO2006090746A1 - Mask clamp moving mechanism and film forming apparatus

Info

Publication number: WO2006090746A1
Application number: PCT/JP2006/303188
Authority: WO
Inventors: Tatsuya Kataoka; Kenji Nagao; Kenichi Saito
Original assignee: Mitsui Engineering & Shipbuilding Co., Ltd.; Vieetech Japan Co., Ltd.; Choshu Industry Company Limited
Priority date: 2005-02-23
Filing date: 2006-02-22
Publication date: 2006-08-31
Also published as: TWI323290B; KR100947572B1; JP2006233256A; CN101090993B; JP4609754B2; CN101090993A; KR20070087081A; TW200641549A

Abstract

A moving mechanism of a first mask clamp (20) is a mechanism for moving the first mask clamp (20) in a film forming apparatus for forming an organic EL element. The moving mechanism is provided with a chuck (16) which is arranged to face a vapor source (14) of an organic material (12) and places a mask (34) over a substrate; a first mask clamp (20) which has a leading edge section (20a) formed in a hook-shape and holds the mask (34) placed over the chuck (16) by the leading edge section (20a); and an extending/retracting means (22) for moving the substrate clamp (18). The extending/retracting means (22) is configured by arranging a first extending/retracting means (24) on an apparatus main body (11), connecting a first rod, which performs extending/extracting operation, to a board member (23), arranging a second extending/retracting means (26) on the board member (23), and connecting or bringing a second rod, which performs extending/retracting operation, to or into contact with an base end section of the substrate clamp (18).

Description

Specification

Mask clamp moving mechanism and film forming apparatus

Technical field

TECHNICAL FIELD [0001] The present invention relates to a mask clamp moving mechanism and a film forming apparatus, and more particularly to a mask clamp moving mechanism used in a film forming apparatus for manufacturing an organic EL element.

Background art

For example, a vacuum evaporation apparatus is used as a film forming apparatus for manufacturing an organic EL (Electroluminescence) element. FIG. 8 is an explanatory view of the upper part of the vacuum deposition apparatus. The vacuum evaporation apparatus 1 is provided with an organic material evaporation source (not shown) at the bottom, and a chuck 2 is provided at the upper part of the apparatus facing the evaporation source. The chuck 2 is a flat plate that keeps the glass substrate 3 flat, and can be rotated by a rotation mechanism provided outside the apparatus main body. A mask clamp 4 for holding the mask is provided around the chuck 2 so as to be movable up and down. The mask has an opening pattern for forming an organic EL element pattern (pixel) on the surface of the glass substrate 3.

[0003] The upper end of the mask clamp 4 protrudes to the outside of the apparatus main body, and a connecting member 5 is disposed at the upper end. Also, for example, a pair of cylinders 6 is provided below the connection member 5, the lower end is connected to the upper part of the apparatus main body, and the upper rod is connected to the plate member 7. The plate member 7 is provided so as to be in contact with the connection member 5. As the plate member 7 moves up and down due to the expansion and contraction of the cylinder 6, the connecting member 5 moves up and down, and the mask clamp 4 moves up and down.

In addition, the literature disclosed about moving the mask clamp up and down by the expansion and contraction of the cylinder is unknown.

Disclosure of the invention

Problems to be solved by the invention

[0004] The range in which the mask clamp 4 moves up and down is a mask whose upper limit is held by the mask clamp 4

(Not shown) is a position in contact with the glass substrate 3 held by the chuck 2. The lower limit is in contact with a substrate transport mechanism (not shown) inserted between the chuck 2 and the mask clamp 4. It is in a safe position. This substrate transport mechanism inserts a glass substrate from the outside of the vacuum vapor deposition apparatus and places it on the substrate clamp, and takes out the glass substrate on which the pattern is formed to the outside of the apparatus. Therefore, since the mask clamp and the substrate transport mechanism do not come into contact with each other, a large stroke of the cylinder for moving the mask clamp up and down is necessary.

[0005] By the way, after the glass substrate is inserted into the apparatus and mounted and fixed to the chuck, the mask and the glass substrate are aligned to form an organic EL element pattern at a predetermined position on the glass substrate. Done. In this alignment, the mask placed on the alignment arm and the glass substrate are not in contact with each other. ! / Do it! /, So it is done at a slight distance.

[0006] At the time of this alignment, a mask clamp for fixing the mask conventionally uses an air cylinder whose stroke cannot be adjusted. For this reason, since the two-step operation cannot be performed, the mask clamp 4 is positioned at the lower limit of the moving range, and when the rising starts after the alignment is completed, the mask clamp 4 moves a long distance until the mask is fixed on the glass substrate. . As a result, it takes a lot of time to travel a long distance, which slows down the manufacturing speed and lowers the manufacturing efficiency.

In addition, the glass substrate is rotated in the horizontal direction in order to make the thickness of the organic thin film formed on the glass substrate uniform within the substrate surface. Therefore, in order to rotate the glass substrate, the chuck, mask, mask holder, etc. must be rotated. Therefore, the rotation mechanism must be arranged at the top of the vacuum evaporation system. However, since the vacuum vapor deposition system is complicatedly connected with wiring for driving each mechanism provided in the system, there is a mechanism that lifts and lowers the mask clamp in multiple stages on the axis of the rotating mechanism. It was considered difficult to install.

An object of the present invention is to provide a mask clamp moving mechanism that divides the amount of movement of the mask clamp into a plurality of parts.

Another object of the present invention is to provide a film forming apparatus having a mask clamp moving mechanism.

Means for solving the problem [0009] In order to achieve the above object, the mask clamp moving mechanism according to the present invention can move the mask arranged on the front surface of the substrate on which the organic EL element is formed with respect to the substrate. A moving mechanism of the mask clamp, characterized in that the moving mechanism is provided with expansion / contraction means capable of moving the mask clamp for holding the mask in a plurality of stages.

[0010] The expansion / contraction means is attached to the first expansion / contraction means provided in a film forming apparatus main body for forming a film of the organic EL element on the substrate, and is engaged with the mask clamp. Second extending / contracting means.

[0011] In this case, it is preferable that the first expansion / contraction means and the second expansion / contraction means can expand and contract independently of each other. The first expansion / contraction means and the second expansion / contraction means may be an air cylinder or a hydraulic cylinder. Further, the expansion / contraction means can be configured using a multistage cylinder.

[0012] The film forming apparatus according to the present invention is a film forming apparatus for manufacturing an organic EL element on a substrate, the chuck holding the substrate facing an organic material supply source, and the organic EL A mask clamp held by a mask on which an element pattern is formed; expansion / contraction means for moving the mask back and forth in a plurality of stages with respect to the substrate via the mask clamp; the chuck provided on an apparatus main body; and the mask clamp And a rotation mechanism for rotating the expansion / contraction means in the horizontal direction.

[0013] The expansion / contraction means is attached to the first expansion / contraction means provided in the apparatus main body and the first expansion / contraction means, and is extendable / contractible independently of the first expansion / contraction means engaged with the mask clamp. And a second expansion / contraction means.

The invention's effect

In the mask clamp moving mechanism, when the expansion / contraction means expands and contracts in multiple stages, the mask clamp connected thereto moves up and down in multiple stages. That is, when the expansion / contraction means is composed of the first expansion / contraction means and the second expansion / contraction means, when at least one of the first expansion / contraction means and the second expansion / contraction means is expanded / contracted, the mask clamp moves up and down in accordance with this operation. To do. Therefore, if the expansion / contraction operation of each expansion / contraction means is controlled independently, the movement amount of the mask clamp can be divided into two stages. [0015] The expansion and contraction of the first and second expansion / contraction means can be performed by expanding and contracting a cylinder rod provided in the air cylinder and the hydraulic cylinder.

During the manufacturing of the organic EL element, the first expansion / contraction means is extended with the second expansion / contraction means contracted during the positioning of the mask and the substrate, and after the positioning is completed, the first expansion / contraction means and the second expansion / contraction means are expanded. Extending the means shortens the amount of movement of the mask clamp after positioning is completed, thereby shortening the manufacturing time of the organic EL element.

Brief Description of Drawings

FIG. 1 is an explanatory diagram of a vacuum vapor deposition apparatus.

FIG. 2 is a schematic plan view of a mask clamp.

FIG. 3 is an explanatory diagram when the apparatus upper mechanism is in a reference position.

FIG. 4 is an explanatory diagram of the upper mechanism of the apparatus when the glass substrate and the mask are aligned.

FIG. 5 is an explanatory view of the upper mechanism of the apparatus after aligning the glass substrate and the mask.

FIG. 6 is an explanatory diagram of alignment between a glass substrate and a mask.

FIG. 7 is a diagram for explaining a camera installation position.

FIG. 8 is an explanatory diagram of the upper part of the vacuum evaporation apparatus.

Explanation of symbols

[0017] 10 vacuum deposition apparatus, 11 apparatus main body, 16 chuck, 18 substrate clamp, 20 first mask clamp, 20c connecting member, 22 expansion / contraction means, 2

3 plate members, 24 first expansion / contraction means, 26 second expansion / contraction means, 28 second mask clamp, 32 glass substrate, 34 mask, 40 camera.

BEST MODE FOR CARRYING OUT THE INVENTION

[0018] The best mode of the mask clamp moving mechanism and film forming apparatus according to the present invention will be described below. In the following description, a mode in which a vacuum deposition apparatus is used as the film forming apparatus will be described.

FIG. 1 is an explanatory diagram of a vacuum vapor deposition apparatus according to an embodiment. FIG. 2 is a schematic plan view of the mask clamp according to the embodiment. In these drawings, the vacuum deposition apparatus 10 includes an evaporation source 14 (sublimation source) of the organic material 12 at the bottom of the apparatus main body 11, and The chuck 16, the substrate clamp 18, the first mask clamp 20, the expansion / contraction means 22, the second mask clamp 28 and the like are provided on the upper part.

[0020] Specifically, the evaporation source 14 of the organic material 12 includes a crucible 14a into which the organic material 12 is placed, and a heater 14b for heating and evaporating (sublimating) the organic material 12 is provided on the outer surface of the crucible 14a. It has been. Further, the chuck 16 provided on the inner upper portion of the apparatus main body 11 is disposed so as to face the crucible 14a, and is a flat plate disposed along the horizontal direction. The chuck 16 holds the glass substrate 32 at the part facing the crucible 14a. Further, the chuck 16 can be horizontally rotated by a rotation mechanism 30 provided on the outer upper portion of the apparatus main body 11.

[0021] The lower end of the substrate clamp 18 passes through the ceiling of the apparatus main body 11 and is inserted into the apparatus main body 11. The lower end 18a of the substrate clamp 18 is folded toward the chuck 16 side (the central side of the vacuum deposition apparatus 10). A plurality of bent bowls are provided along the side edge of the chuck 16. These substrate clamps 18 are set so that each tip 18a has the same height (in the same plane) in order to support the edge of the glass substrate 32 with the tip 18a (folded portion). . The substrate clamp 18 can be moved up and down by an elevating mechanism (not shown) provided on the outer upper portion of the apparatus body 11 while maintaining the state in which the tip portions 18a are in the same plane. When the substrate clamp 18 is raised, the glass substrate 32 can be brought into contact with the chuck 16 and mounted and held in a flat shape.

[0022] The lower end of the first mask clamp 20 passes through the ceiling of the apparatus main body 11 and is inserted into the apparatus main body 11, and the lower end 20a is directed toward the chuck 16 (center side of the vacuum evaporation apparatus 10). A plurality of bowls are bent along the side edges of the chuck 16. The first mask clamp 20 supports the edge of the mask 34 with the lower tip 20a (folded portion) so that the lower tips 20a are at the same height (in the same plane). It is set! The mask 34 includes a mask film 34a in which a plurality of opening patterns corresponding to each pixel of the organic EL element are provided, and a frame-type mask frame 34b that holds the periphery of the mask film 34a (FIG. 2). reference).

[0023] The upper tip portion 20b of the first mask clamp 20 protrudes outside the apparatus main body 11, and each upper tip portion 20b is connected to the connection member 20c. And the upper tip 20 b and the connection member 20c serve as a base end portion of the first mask clamp 20. By moving the connecting member 20c up and down, the first mask clamps 20 connected to the connecting member 20c are moved up and down. Accordingly, the tip portions 20a provided below the first mask clamp 20 can be moved up and down while maintaining a state where they are in the same plane.

[0024] Further, below the connection member 20c, expansion / contraction means 22 for raising and lowering the connection member 20c is provided. In other words, the connecting member 20c and the expansion / contraction means 22 are arranged to face each other. In the embodiment, the expansion / contraction means 22 includes a first expansion / contraction means 24 and a second expansion / contraction means 26. The first expansion / contraction means 24 and the second expansion / contraction means 26 may be an actuator such as an air cylinder or a hydraulic cylinder. If an air cylinder is used, maintenance is easy. In the embodiment, a plurality of first expansion / contraction means 24 are provided, the lower end of each tube is connected to the upper part of the apparatus main body 11, and the tip 24a of the rod serving as the upper end is connected to the plate member 23. . More specifically, a plurality of first expansion / contraction means 24 (cylinder main body) are disposed on the outer upper portion of the apparatus main body 11 along the rotation direction of the chuck 16, and the tip 24 a of each rod is connected to the plate member 23. It is the structure connected by. The plate member 23 is moved up and down as the first expansion / contraction means 24 expands and contracts.

The plate member 23 is provided with second expansion / contraction means 26 via a bracket provided at the lower end of the plate member 23. In the second expansion / contraction means 26, the rod 26a penetrates the plate member 23, and the tip of the rod 26a is engaged, that is, connected or in contact with the connection member 20c. More specifically, the plurality of second expansion / contraction means 26 (cylinder main body) are arranged below the plate member 23, and the rod 26a (second rod) is provided in the hole provided in the plate member 23. It extends upward via a portion (not shown), and its tip is connected to or in contact with the connecting member 20c. The second expansion / contraction means 26 and the first expansion / contraction means 24 can expand and contract independently of each other, and the connecting member 20c is moved up and down in accordance with at least one expansion / contraction operation.

The substrate clamp 18, the first mask clamp 20, and the expansion / contraction means 22 can be rotated together with the chuck 16 by a rotation mechanism 30 provided on the outer upper portion of the apparatus main body 11.

[0027] The second mask clamp 28 is disposed between the chuck 16 and the evaporation source 14 so that the lower part thereof is bent inward so as to face the chuck 16, and the configuration of the second mask clamp 28 is the edge of the mask 34. Corresponding to the portion (mask frame 34b), it has an extending portion 28a extending from the side of the mask 34, and a fitting pin 28b provided at the tip of the extending portion 28a. More specifically, the extended portion 28a supports the edge of the mask 34, is disposed at a position where the first mask clamp 20 is sandwiched along the side edge of the chuck 16, and is formed in a bowl shape. The outer force of the mask 34 extends to the edge of the mask 34 along the tip of the first mask clamp 20 thus formed. A fitting pin 28b that fits into the fitting hole 34c of the mask 34 is provided at the tip of the extended portion 28a. In some embodiments, a fitting hole may be provided at the tip of the extended portion 28a, and a fitting pin may be provided on the mask 34. Further, the base end portions of the extending portions 28a disposed so as to sandwich the first mask clamp 20 on both sides are connected to each other. In the form shown in FIG. 2, the extended portion 28a extends from the outer cover of the mask 34 so as to support each corner portion of the mask 34. Since the second mask clamp 28 is at the reference position with respect to the vacuum deposition apparatus 10, when the mask 34 is placed on the second mask clamp 28 so that the fitting hole 34c and the fitting pin 28b are fitted, the mask 34 is Positioned relative to the vacuum deposition apparatus 10.

Next, the operation of the moving mechanism of the first mask clamp 20 and the operation of the vacuum evaporation apparatus 10 will be described. Hereinafter, the chuck 16, the substrate clamp 18, the first mask clamp 20, and the second mask clamp 28 may be referred to as an apparatus upper mechanism. FIG. 3 is an explanatory diagram when the upper mechanism of the apparatus is at the reference position. FIG. 4 is an explanatory view of the upper mechanism of the apparatus when the glass substrate and the mask are aligned. FIG. 5 is an explanatory view of the upper mechanism of the apparatus after aligning the glass substrate and the mask.

A mask 34 is disposed on the second mask clamp 28 in advance. At this time, since the second mask clamp 28 is in the reference position with respect to the vacuum deposition apparatus 10, when the mask 34 is placed so that the fitting pin 28b and the fitting hole 34c are fitted, the mask 34 is placed on the vacuum deposition apparatus 10. Positioned against. The glass substrate 32 is placed inside the apparatus main body 11 by the substrate transport mechanism and inserted between the chuck 16 and the mask 34. Then, the glass substrate 32 is moved downward along with the lowering operation of the substrate transport mechanism and placed on the substrate clamp 18.

[0030] Thereafter, the mask 34 is moved upward by raising the second mask clamp 28, and the mask 34 is moved upward. A glass substrate 32 is placed on the disc 34. The second mask clamp 28 continues to be raised until the glass substrate 32 contacts the bottom surface (chuck surface) of the chuck 16. When the glass substrate 32 is placed on the mask 34, the glass substrate 32 becomes horizontal along the mask 34, and is kept in contact with the chuck 16 while maintaining this horizontal state.

Thereafter, the substrate clamp 18 is raised until it contacts the glass substrate 32. Thus, the glass substrate 32 is mounted and held on the chuck 16 while maintaining the horizontal state by the substrate clamp 18. Then, the second mask clamp 28 is lowered and the mask 34 is moved downward. During the above operation, since the first expansion / contraction means 24 and the second expansion / contraction means 26 are contracted, the lower end portion 20a of the first mask clamp 20 is in contact with the mask 34 and the substrate transport mechanism. There is no.

Thereafter, the alignment between the glass substrate 32 and the mask 34 is performed using the alignment mark provided on the glass substrate 32 and the alignment mark provided on the mask 34. Fig. 6 is an explanatory diagram of alignment between the glass substrate and the mask. FIG. 6A is a diagram for explaining the arrangement of the camera, the glass substrate, and the mask. FIG. 6B is an image taken by a camera and shows a case where a positional deviation has occurred. Furthermore, Fig. 6 (C) is an image taken by a camera and shows a case where the positions are correct.

Specifically, the glass substrate 32 is provided with alignment marks 42 in at least two places. The alignment mark 42 provided on the glass substrate 32 is provided, for example, at the opposite corner of the glass substrate 32. At the same time as forming the electrode film of the organic EL element on the glass substrate 32, the alignment mark 42 is made of the same material as this electrode. It may be formed. The shape of the alignment mark 42 provided on the glass substrate 32 may be, for example, a circle, a dot or a cross!

In addition, the alignment mark 44 provided on the mask 34 may be a dot, a circle, or a cross, as long as it is provided at a position corresponding to the alignment mark 42 provided on the glass substrate 32. If there is. If the alignment mark 42 on the glass substrate 32 is rounded, the alignment mark 44 on the mask 34 should be set as a dot. If the alignment mark 42 on the glass substrate 32 is set as a dot, the alignment on the mask 34 is set. The mark 44 may be a circle with a different size or a different shape.

Furthermore, the vacuum deposition apparatus 10 includes an alignment mark 42 provided on the glass substrate 32, A camera 40 for imaging the alignment mark 44 provided on the mask 34 may be provided (see FIG. 6A).

[0036] Then, while confirming the image captured by the camera 40, the mask 34 (second mask clamp 28) is arranged so that the dot of the alignment mark 44 (42) enters the circle of the alignment mark 42 (44). If the X (vertical), Y (horizontal), and Θ (rotation) directions are adjusted, the alignment between the glass substrate 32 and the mask 34 is completed (see FIGS. 6B and 6C). At the time of alignment between the glass substrate 32 and the mask 34, the mask 34 is positioned with respect to the vacuum deposition apparatus 10, so that the alignment mark 44 of the mask 34 surely enters the field of view of the camera 40.

While the mask 34 and the glass substrate 32 are positioned as described above, the first expansion / contraction means 24 is extended to raise the first mask clamp 20 (see FIG. 4). As a result, the lower end of the first mask clamp 20 is raised. The lower tip when the first expansion / contraction means 24 is extended is below the mask 34 on which the positioning operation is performed.

Thereafter, the second expansion / contraction means 26 is extended to raise the first mask clamp 20 (see FIG. 5).

Specifically, when the lower tip 20a of the first mask clamp 20 is raised, the mask 34 is transferred from the second mask clamp 28 to the first mask clamp 20, and the lower tip 20a is further raised. Then, the mask 34 is put on the glass substrate 32. When the mask 34 is placed on the glass substrate 32, the lower tip 20a rises, that is, the second expansion / contraction means 26 stops. Note that the upper limit position of the lower end portion 20a when the second expansion / contraction means 26 is extended is slightly smaller than the distance from the chuck 16 surface to the lower surface of the mask 34 when the mask 34 is placed on the glass substrate 32 (at least several mm) If it is located above.

Thereafter, the glass substrate 32 and the mask 34 are rotated by the operation of the rotating mechanism 30, and the organic material 12 is heated and evaporated by the heater 14 b to form an organic EL element pattern on the glass substrate 32.

Thereafter, the first expansion / contraction means 24 and the second expansion / contraction means 26 are contracted, and the first mask clamp 20 is lowered. At this time, the mask 34 is moved downward along with the lowering of the first mask clamp 20, but is replaced on the way from the first mask clamp 20 to the second mask clamp 28 below the chuck 16. The substrate clamp 18 is also lowered, and the glass substrate 32 is moved downward. After that, the substrate transfer device enters the apparatus body 11 and collects the glass substrate 32. To do. An organic EL element is manufactured by such an operation.

[0041] According to such a moving mechanism of the first mask clamp 20 and the vacuum deposition apparatus 10, the first expansion / contraction means 24 and the second expansion / contraction means 26 are provided as the expansion / contraction means 22 for moving the first mask clamp 20 up and down. Therefore, the first mask clamp 20 can be moved up and down in two stages by extending and contracting each independently. That is, the movement amount of the first mask clamp 20 can be divided into two stages. Therefore, during the alignment of the mask 34 and the glass substrate 32, the first mask clamp 20 is raised by one step, and the distance between the mask 34 and the lower tip of the first mask clamp 20 is slightly increased, When the first mask clamp 20 is moved up one more stage after the alignment is completed and the mask 34 is put on the glass substrate 32, the moving distance of the first mask clamp 20 after the alignment can be shortened. Therefore, since the alignment of the mask 34 and the glass substrate 32 and the raising of the first mask clamp 20 are performed at the same time, the manufacturing time of the organic EL element can be shortened and the manufacturing speed can be improved. In addition, the manufacturing efficiency of organic EL elements can be improved.

The expansion / contraction means 22 has a configuration in which a plate member 23 is connected to the other end 24a of the first expansion / contraction means 24, and the second expansion / contraction means 26 is disposed on the plate member 23. In addition, there is no interference with wiring for driving each mechanism (the device upper mechanism) and the like. Therefore, the first masking means 24 and the second expanding / contracting means 26 can lift and lower the first mask clamp 20 in two stages on the axis of the rotating mechanism 30.

[0043] The first mask clamp 20 is lowered to the lowest point by retracting the first expansion means 24 and the second expansion means 26 when the glass substrate 32 is inserted and recovered and the mask 34 is replaced. In other cases, the second expansion / contraction means 26 may be expanded and contracted while the first expansion / contraction means 24 is extended, and moved up and down.

In the present embodiment, the first expansion / contraction means 24 and the second expansion / contraction means 26 are connected vertically via the plate member 23. However, as another embodiment, the other end 26a of the second expansion / contraction means 26 is used. Further, a plate member may be connected to the plate member, the third expansion / contraction means may be disposed on the plate member, and the other end of the third expansion / contraction means may be engaged (connected or contacted) with the connection member 20c. . That is, the first expansion / contraction means, the second expansion / contraction means, and the third expansion / contraction means can be connected vertically via the plate member, and the first mask clamp 20 can be moved up and down in three stages. Further expansion and contraction via plate members By repeating a configuration in which a plurality of means are connected vertically, the first mask clamp 20 can be lifted and lowered in a plurality of stages. In the above-described embodiment, when the first mask clamp 20 is configured by the first expansion / contraction means 24 and the second expansion / contraction means 26 as the expansion / contraction means for moving up and down, the multistage cylinder of the hydraulic pressure or hydraulic pressure described above is used. You can use!

In the present embodiment, the force is a form in which two cameras for aligning the glass substrate and the mask are provided. The present invention is not limited to this. That is, three cameras can be provided as shown in FIG. 7 (A), and four cameras can be provided as shown in FIG. 7 (B).

Further, in the present embodiment, the formation in which the mask moving mechanism is used in the vacuum vapor deposition apparatus 10 has been described. It can also be used for other film forming apparatuses such as a vapor phase growth apparatus. Also, the substrate may be a substrate with material strength other than glass, not limited to the glass substrate 32! / ヽ Industrial Applicability

The present invention can be applied to a film forming apparatus that forms a thin film on a substrate such as glass or semiconductor by vapor deposition or sputtering.

Claims

The scope of the claims

[1] A mask clamp moving mechanism capable of moving a mask arranged in front of a substrate on which an organic EL element is formed with respect to the substrate,

The moving mechanism of the mask clamp, characterized in that the moving mechanism includes expansion / contraction means capable of moving the mask clamp holding the mask in a plurality of stages.

[2] The expansion and contraction means is

A first telescopic means provided in a film forming apparatus body for forming a film of the organic EL element on the substrate;

A second telescopic means attached to the first telescopic means and engaged with the mask clamp;

The mask clamp moving mechanism according to claim 1, further comprising:

3. The mask clamp moving means according to claim 2, wherein the first extending / contracting means and the second extending / contracting means can be extended / contracted independently of each other.

4. The mask clamp moving mechanism according to claim 2 or 3, wherein the first expansion / contraction means and the second expansion / contraction means are air cylinders or hydraulic cylinders.

5. The mask clamp moving mechanism according to claim 1, wherein the expansion / contraction means is a multistage cylinder.

[6] A film forming apparatus for manufacturing an organic EL element on a substrate,

A chuck for holding the substrate against a source of organic material;

A mask clamp held by a mask on which the pattern of the organic EL element is formed; and a stretching means for moving the mask forward and backward with respect to the substrate through the mask clamp;

A rotation mechanism provided in the apparatus main body for rotating the chuck, the mask clamp and the expansion / contraction means in a horizontal direction;

A film forming apparatus comprising:

[7] The expansion and contraction means includes

A first expansion / contraction means provided in the apparatus body;

It is attached to the first expansion / contraction means and the mask clamp is engaged. 7. The film forming apparatus according to claim 6, further comprising: a first expansion / contraction means and a second expansion / contraction means that can expand and contract independently.