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JPS52102791A - Ion microanalyzer - Google Patents

Ion microanalyzer

Info

Publication number
JPS52102791A
JPS52102791A JP1889876A JP1889876A JPS52102791A JP S52102791 A JPS52102791 A JP S52102791A JP 1889876 A JP1889876 A JP 1889876A JP 1889876 A JP1889876 A JP 1889876A JP S52102791 A JPS52102791 A JP S52102791A
Authority
JP
Japan
Prior art keywords
ion microanalyzer
microanalyzer
ion
deflecting
advancement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1889876A
Other languages
Japanese (ja)
Inventor
Hiroshi Hirose
Kazumitsu Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1889876A priority Critical patent/JPS52102791A/en
Publication of JPS52102791A publication Critical patent/JPS52102791A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make possible the analysis at a high speed by deflecting a primary ion beam with electrostatic deflecting means and by blocking the advancement of neutral particles.
JP1889876A 1976-02-25 1976-02-25 Ion microanalyzer Pending JPS52102791A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1889876A JPS52102791A (en) 1976-02-25 1976-02-25 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1889876A JPS52102791A (en) 1976-02-25 1976-02-25 Ion microanalyzer

Publications (1)

Publication Number Publication Date
JPS52102791A true JPS52102791A (en) 1977-08-29

Family

ID=11984391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1889876A Pending JPS52102791A (en) 1976-02-25 1976-02-25 Ion microanalyzer

Country Status (1)

Country Link
JP (1) JPS52102791A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100044A (en) * 1984-09-28 1985-06-03 Hitachi Ltd Liquid chromatograph-mass spectrometer linked analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100044A (en) * 1984-09-28 1985-06-03 Hitachi Ltd Liquid chromatograph-mass spectrometer linked analyzer

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