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JPS57106101A - Method of producing semiconductor resistance element - Google Patents

Method of producing semiconductor resistance element

Info

Publication number
JPS57106101A
JPS57106101A JP55182148A JP18214880A JPS57106101A JP S57106101 A JPS57106101 A JP S57106101A JP 55182148 A JP55182148 A JP 55182148A JP 18214880 A JP18214880 A JP 18214880A JP S57106101 A JPS57106101 A JP S57106101A
Authority
JP
Japan
Prior art keywords
resistance element
producing semiconductor
semiconductor resistance
producing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55182148A
Other languages
Japanese (ja)
Other versions
JPS6328341B2 (en
Inventor
Hiroshi Kobayashi
Takahiko Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP55182148A priority Critical patent/JPS57106101A/en
Publication of JPS57106101A publication Critical patent/JPS57106101A/en
Publication of JPS6328341B2 publication Critical patent/JPS6328341B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP55182148A 1980-12-24 1980-12-24 Method of producing semiconductor resistance element Granted JPS57106101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55182148A JPS57106101A (en) 1980-12-24 1980-12-24 Method of producing semiconductor resistance element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55182148A JPS57106101A (en) 1980-12-24 1980-12-24 Method of producing semiconductor resistance element

Publications (2)

Publication Number Publication Date
JPS57106101A true JPS57106101A (en) 1982-07-01
JPS6328341B2 JPS6328341B2 (en) 1988-06-08

Family

ID=16113193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55182148A Granted JPS57106101A (en) 1980-12-24 1980-12-24 Method of producing semiconductor resistance element

Country Status (1)

Country Link
JP (1) JPS57106101A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116160A (en) * 1983-11-29 1985-06-22 Sony Corp Manufacture of semiconductor device
US11547828B2 (en) 2009-05-29 2023-01-10 ResMed Pty Ltd Mask system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116160A (en) * 1983-11-29 1985-06-22 Sony Corp Manufacture of semiconductor device
US11547828B2 (en) 2009-05-29 2023-01-10 ResMed Pty Ltd Mask system

Also Published As

Publication number Publication date
JPS6328341B2 (en) 1988-06-08

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