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JPS5515263A - Mos type semiconductor device - Google Patents

Mos type semiconductor device

Info

Publication number
JPS5515263A
JPS5515263A JP8876678A JP8876678A JPS5515263A JP S5515263 A JPS5515263 A JP S5515263A JP 8876678 A JP8876678 A JP 8876678A JP 8876678 A JP8876678 A JP 8876678A JP S5515263 A JPS5515263 A JP S5515263A
Authority
JP
Japan
Prior art keywords
film
stepped portion
etched
thin
schottky junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8876678A
Other languages
English (en)
Inventor
Yoshio Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP8876678A priority Critical patent/JPS5515263A/ja
Publication of JPS5515263A publication Critical patent/JPS5515263A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP8876678A 1978-07-19 1978-07-19 Mos type semiconductor device Pending JPS5515263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8876678A JPS5515263A (en) 1978-07-19 1978-07-19 Mos type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8876678A JPS5515263A (en) 1978-07-19 1978-07-19 Mos type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5515263A true JPS5515263A (en) 1980-02-02

Family

ID=13951976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8876678A Pending JPS5515263A (en) 1978-07-19 1978-07-19 Mos type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5515263A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932172A (ja) * 1982-07-23 1984-02-21 ウェスターン　エレクトリック　カムパニー，インコーポレーテッド シヨツトキ−障壁ｍｏｓデバイスからなる集積回路及びその製造方法
JPS6034066A (ja) * 1983-08-06 1985-02-21 Fujitsu Ltd 半導体装置及びその製造方法
JPS60103671A (ja) * 1983-11-11 1985-06-07 Toshiba Corp 半導体装置
US7564061B2 (en) 2004-09-28 2009-07-21 Fujitsu Limited Field effect transistor and production method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932172A (ja) * 1982-07-23 1984-02-21 ウェスターン　エレクトリック　カムパニー，インコーポレーテッド シヨツトキ−障壁ｍｏｓデバイスからなる集積回路及びその製造方法
JPS6034066A (ja) * 1983-08-06 1985-02-21 Fujitsu Ltd 半導体装置及びその製造方法
JPS60103671A (ja) * 1983-11-11 1985-06-07 Toshiba Corp 半導体装置
US7564061B2 (en) 2004-09-28 2009-07-21 Fujitsu Limited Field effect transistor and production method thereof

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