JPS55126951A - Electron microscope - Google Patents
Electron microscopeInfo
- Publication number
- JPS55126951A JPS55126951A JP3337879A JP3337879A JPS55126951A JP S55126951 A JPS55126951 A JP S55126951A JP 3337879 A JP3337879 A JP 3337879A JP 3337879 A JP3337879 A JP 3337879A JP S55126951 A JPS55126951 A JP S55126951A
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- condenser
- image observation
- radiation system
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To sharply change the spot diameter of electron beam by providing 3 condenser lenses independently in a radiation system and properly using these for transparent electron microscope image observation and the scanning image observation.
CONSTITUTION: The first and third condenser lenses 3 and 5 are used as the radiation system for transparent electron microscope image observation, that is, the so-called radiation system of a doble condenser system. In this case, by changing the excitation of the first condenser 3, the spot diameter electron beam can sharply be changed. On the other hand, when the electron microscope is used as a scanning electron microscope, the second condenser 4 is actuated besides the first and third condensers 3 and 5. By jointly using the electron lens of a magnetic field by the strong excitation of the object lens 7, an exceedingly small electron beam spot is formed on the surface of a sample.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3337879A JPS55126951A (en) | 1979-03-23 | 1979-03-23 | Electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3337879A JPS55126951A (en) | 1979-03-23 | 1979-03-23 | Electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55126951A true JPS55126951A (en) | 1980-10-01 |
Family
ID=12384923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3337879A Pending JPS55126951A (en) | 1979-03-23 | 1979-03-23 | Electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55126951A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193248A (en) * | 1984-03-15 | 1985-10-01 | Internatl Precision Inc | Method for irradiating electron rays in electron ray device |
| JPS614142A (en) * | 1984-06-16 | 1986-01-10 | Jeol Ltd | Illumination lens system in electron microscope or the like |
| JPS6171539A (en) * | 1984-09-13 | 1986-04-12 | Internatl Precision Inc | Irradiation system for electron beam device |
| JPS6199257A (en) * | 1984-10-22 | 1986-05-17 | Internatl Precision Inc | Irradiation system of electron beam equipment |
| JPS6261252A (en) * | 1985-09-12 | 1987-03-17 | Jeol Ltd | Irradiation lens device for electron microscope |
| NL9300952A (en) * | 1992-06-05 | 1994-01-03 | Hitachi Ltd | FIELD EMISSION TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR ITS COMPANIES. |
-
1979
- 1979-03-23 JP JP3337879A patent/JPS55126951A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193248A (en) * | 1984-03-15 | 1985-10-01 | Internatl Precision Inc | Method for irradiating electron rays in electron ray device |
| JPS614142A (en) * | 1984-06-16 | 1986-01-10 | Jeol Ltd | Illumination lens system in electron microscope or the like |
| JPH041459B2 (en) * | 1984-06-16 | 1992-01-13 | Nippon Electron Optics Lab | |
| JPS6171539A (en) * | 1984-09-13 | 1986-04-12 | Internatl Precision Inc | Irradiation system for electron beam device |
| JPS6199257A (en) * | 1984-10-22 | 1986-05-17 | Internatl Precision Inc | Irradiation system of electron beam equipment |
| JPS6261252A (en) * | 1985-09-12 | 1987-03-17 | Jeol Ltd | Irradiation lens device for electron microscope |
| NL9300952A (en) * | 1992-06-05 | 1994-01-03 | Hitachi Ltd | FIELD EMISSION TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR ITS COMPANIES. |
| US5373158A (en) * | 1992-06-05 | 1994-12-13 | Hitachi, Ltd. | Field-emission transmission electron microscope and operation method thereof |
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