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JPS5566848A - Sample apparatus of scanning electron microscope - Google Patents

Sample apparatus of scanning electron microscope

Info

Publication number
JPS5566848A
JPS5566848A JP14069378A JP14069378A JPS5566848A JP S5566848 A JPS5566848 A JP S5566848A JP 14069378 A JP14069378 A JP 14069378A JP 14069378 A JP14069378 A JP 14069378A JP S5566848 A JPS5566848 A JP S5566848A
Authority
JP
Japan
Prior art keywords
sample
working distance
sample holder
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14069378A
Other languages
Japanese (ja)
Inventor
Shunichi Odajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TEKUNIKUSU KK
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TEKUNIKUSU KK
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TEKUNIKUSU KK, NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TEKUNIKUSU KK
Priority to JP14069378A priority Critical patent/JPS5566848A/en
Publication of JPS5566848A publication Critical patent/JPS5566848A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable working distance to be varied easily according to the purpose of observation by arranging, in a sample chamber, the sample transferring mechanism for shifting horizontally two pairs of samples, successively along the optical axis.
CONSTITUTION: A sample holder 15 is arranged on the optical axis Z, thus reducing the working distance and permitting the observation in high resolving power. Then a transfer body 10 is shifted leftward (in the Y axis direction) by a micrometer 11, and the sample holder 15 is shifted, then the sample 25 set under the sample holder 15 for high resolving power is radiated by electron beam EB. Accordingly, working distance becomes larger, and a very large sample can be observed.
COPYRIGHT: (C)1980,JPO&Japio
JP14069378A 1978-11-14 1978-11-14 Sample apparatus of scanning electron microscope Pending JPS5566848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14069378A JPS5566848A (en) 1978-11-14 1978-11-14 Sample apparatus of scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14069378A JPS5566848A (en) 1978-11-14 1978-11-14 Sample apparatus of scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5566848A true JPS5566848A (en) 1980-05-20

Family

ID=15274548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14069378A Pending JPS5566848A (en) 1978-11-14 1978-11-14 Sample apparatus of scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5566848A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864063U (en) * 1981-10-26 1983-04-30 株式会社島津製作所 Sample device in electronic analyzer
JPS58178948A (en) * 1982-04-12 1983-10-20 Shimadzu Corp Sampling device for electron-ray radiating type analyzer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864063U (en) * 1981-10-26 1983-04-30 株式会社島津製作所 Sample device in electronic analyzer
JPS58178948A (en) * 1982-04-12 1983-10-20 Shimadzu Corp Sampling device for electron-ray radiating type analyzer

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