JP7203170B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7203170B2 JP7203170B2 JP2021149534A JP2021149534A JP7203170B2 JP 7203170 B2 JP7203170 B2 JP 7203170B2 JP 2021149534 A JP2021149534 A JP 2021149534A JP 2021149534 A JP2021149534 A JP 2021149534A JP 7203170 B2 JP7203170 B2 JP 7203170B2
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Description
本実施の形態では、本発明の一態様の表示モジュールについて説明する。
本発明の一態様の表示装置が有する画素について説明する。表示装置は、マトリクス状に配置された複数の画素を有する。1つの画素は、複数の副画素を有する。1つの副画素は、1つの発光素子、1つの受発光素子、または1つの受光素子を有する。
本発明の一態様の表示装置は、表示部に、受光素子を有する第1の画素回路と、発光素子を有する第2の画素回路と、を有する。第1の画素回路と第2の画素回路は、それぞれ、マトリクス状に配置される。第1の画素回路は、図1の副画素32に相当し、第2の画素回路は、図1の副画素31に相当する。
本実施の形態では、本発明の一態様の表示装置について図8乃至図17を用いて説明する。
図8A乃至図8D及び図8Fに、本発明の一態様の表示装置の断面図を示す。
次に、本発明の一態様の表示装置に用いることができる、発光素子、受光素子、及び受発光素子の詳細な構成について説明する。
図12Aに表示装置100Aの断面図を示す。
図12B、図12Cに表示装置100Bの断面図を示す。なお、以降の表示装置の説明において、先に説明した表示装置と同様の構成については、説明を省略することがある。
図13Aに表示装置100Cの断面図を示す。
図14に表示装置100Dの斜視図を示し、図15に、表示装置100Dの断面図を示す。
図16及び図17Aに、表示装置100Eの断面図を示す。表示装置100Eの斜視図は表示装置100D(図14)と同様である。図16には、表示装置100Eの、FPC172を含む領域の一部、回路164の一部、及び、表示部162の一部をそれぞれ切断したときの断面の一例を示す。図17Aには、表示装置100Eの、表示部162の一部を切断したときの断面の一例を示す。図16では、表示部162のうち、特に、受光素子110と赤色の光を発する発光素子190Rを含む領域を切断したときの断面の一例を示す。図17Aでは、表示部162のうち、特に、緑色の光を発する発光素子190Gと青色の光を発する発光素子190Bを含む領域を切断したときの断面の一例を示す。
本実施の形態では、上記の実施の形態で説明したOSトランジスタに用いることができる金属酸化物について説明する。
酸化物半導体の結晶構造としては、アモルファス(completely amorphousを含む)、CAAC(c-axis-aligned crystalline)、nc(nanocrystalline)、CAC(cloud-aligned composite)、単結晶(single crystal)、及び多結晶(poly crystal)等が挙げられる。
なお、酸化物半導体は、構造に着目した場合、上記とは異なる分類となる場合がある。例えば、酸化物半導体は、単結晶酸化物半導体と、それ以外の非単結晶酸化物半導体と、に分けられる。非単結晶酸化物半導体としては、例えば、上述のCAAC-OS、及びnc-OSがある。また、非単結晶酸化物半導体には、多結晶酸化物半導体、擬似非晶質酸化物半導体(a-like OS:amorphous-like oxide semiconductor)、非晶質酸化物半導体、などが含まれる。
CAAC-OSは、複数の結晶領域を有し、当該複数の結晶領域はc軸が特定の方向に配向している酸化物半導体である。なお、特定の方向とは、CAAC-OS膜の厚さ方向、CAAC-OS膜の被形成面の法線方向、またはCAAC-OS膜の表面の法線方向である。また、結晶領域とは、原子配列に周期性を有する領域である。なお、原子配列を格子配列とみなすと、結晶領域とは、格子配列の揃った領域でもある。さらに、CAAC-OSは、a-b面方向において複数の結晶領域が連結する領域を有し、当該領域は歪みを有する場合がある。なお、歪みとは、複数の結晶領域が連結する領域において、格子配列の揃った領域と、別の格子配列の揃った領域と、の間で格子配列の向きが変化している箇所を指す。つまり、CAAC-OSは、c軸配向し、a-b面方向には明らかな配向をしていない酸化物半導体である。
nc-OSは、微小な領域(例えば、1nm以上10nm以下の領域、特に1nm以上3nm以下の領域)において原子配列に周期性を有する。別言すると、nc-OSは、微小な結晶を有する。なお、当該微小な結晶の大きさは、例えば、1nm以上10nm以下、特に1nm以上3nm以下であることから、当該微小な結晶をナノ結晶ともいう。また、nc-OSは、異なるナノ結晶間で結晶方位に規則性が見られない。そのため、膜全体で配向性が見られない。従って、nc-OSは、分析方法によっては、a-like OSや非晶質酸化物半導体と区別が付かない場合がある。例えば、nc-OS膜に対し、XRD装置を用いて構造解析を行うと、θ/2θスキャンを用いたOut-of-plane XRD測定では、結晶性を示すピークが検出されない。また、nc-OS膜に対し、ナノ結晶よりも大きいプローブ径(例えば50nm以上)の電子線を用いる電子線回折(制限視野電子線回折ともいう。)を行うと、ハローパターンのような回折パターンが観測される。一方、nc-OS膜に対し、ナノ結晶の大きさと近いかナノ結晶より小さいプローブ径(例えば1nm以上30nm以下)の電子線を用いる電子線回折(ナノビーム電子線回折ともいう。)を行うと、ダイレクトスポットを中心とするリング状の領域内に複数のスポットが観測される電子線回折パターンが取得される場合がある。
a-like OSは、nc-OSと非晶質酸化物半導体との間の構造を有する酸化物半導体である。a-like OSは、鬆または低密度領域を有する。即ち、a-like OSは、nc-OS及びCAAC-OSと比べて、結晶性が低い。また、a-like OSは、nc-OS及びCAAC-OSと比べて、膜中の水素濃度が高い。
次に、上述のCAC-OSの詳細について、説明を行う。なお、CAC-OSは材料構成に関する。
CAC-OSとは、例えば、金属酸化物を構成する元素が、0.5nm以上10nm以下、好ましくは、1nm以上3nm以下、またはその近傍のサイズで偏在した材料の一構成である。なお、以下では、金属酸化物において、一つまたは複数の金属元素が偏在し、該金属元素を有する領域が、0.5nm以上10nm以下、好ましくは、1nm以上3nm以下、またはその近傍のサイズで混合した状態をモザイク状、またはパッチ状ともいう。
続いて、上記酸化物半導体をトランジスタに用いる場合について説明する。
ここで、酸化物半導体中における各不純物の影響について説明する。
本実施の形態では、本発明の一態様の電子機器について、図18乃至図20を用いて説明する。
Claims (5)
- 読み出し回路を有し、
前記読み出し回路は、比較回路を有し、
前記読み出し回路には、第1の画素から得られた第1の受光信号と、第2の画素から得られた第2の受光信号と、ランプ信号と、第1の電位と、が与えられ、
前記比較回路は、第1乃至第8のトランジスタを有し、
前記第1のトランジスタのソースまたはドレインの一方は、電源線と電気的に接続され、
前記第1のトランジスタのソースまたはドレインの他方は、前記第2のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第3のトランジスタのソースまたはドレインの一方は、前記電源線と電気的に接続され、
前記第3のトランジスタのソースまたはドレインの他方は、前記第4のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第5のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第6のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第7のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第8のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第5のトランジスタのソースまたはドレインの他方は、前記第7のトランジスタのソースまたはドレインの他方と電気的に接続され、
前記第6のトランジスタのソースまたはドレインの他方は、前記第8のトランジスタのソースまたはドレインの他方と電気的に接続され、
前記第1のトランジスタのゲートは、前記第3のトランジスタのゲートと電気的に接続され、
前記第2のトランジスタのゲートは、前記第4のトランジスタのゲートと電気的に接続され、
前記第5のトランジスタのゲートには、前記ランプ信号が入力され、
前記第6のトランジスタのゲートには、前記第1の受光信号が入力され、
前記第7のトランジスタのゲートには、前記第2の受光信号が入力され、
前記第8のトランジスタのゲートには、前記第1の電位が入力され、
前記比較回路は、前記第1の受光信号および前記ランプ信号を用いて、第1の合成電流が生成し、
前記比較回路は、前記第2の受光信号および前記第1の電位を用いて、第2の合成電流が生成し、
前記比較回路は、前記第1の合成電流と、前記第2の合成電流と、の電流値が同じになるように制御される半導体装置。 - 発光素子および受光素子を含む表示部を有する表示装置用の読み出し回路を有し、
前記読み出し回路は、比較回路を有し、
前記読み出し回路には、第1の画素から得られた第1の受光信号と、第2の画素から得られた第2の受光信号と、ランプ信号と、第1の電位と、が与えられ、
前記比較回路は、第1乃至第8のトランジスタを有し、
前記第1のトランジスタのソースまたはドレインの一方は、電源線と電気的に接続され、
前記第1のトランジスタのソースまたはドレインの他方は、前記第2のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第3のトランジスタのソースまたはドレインの一方は、前記電源線と電気的に接続され、
前記第3のトランジスタのソースまたはドレインの他方は、前記第4のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第5のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第6のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第7のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第2のトランジスタのソースまたはドレインの他方は、前記第8のトランジスタのソースまたはドレインの一方と電気的に接続され、
前記第5のトランジスタのソースまたはドレインの他方は、前記第7のトランジスタのソースまたはドレインの他方と電気的に接続され、
前記第6のトランジスタのソースまたはドレインの他方は、前記第8のトランジスタのソースまたはドレインの他方と電気的に接続され、
前記第1のトランジスタのゲートは、前記第3のトランジスタのゲートと電気的に接続され、
前記第2のトランジスタのゲートは、前記第4のトランジスタのゲートと電気的に接続され、
前記第5のトランジスタのゲートには、前記ランプ信号が入力され、
前記第6のトランジスタのゲートには、前記第1の受光信号が入力され、
前記第7のトランジスタのゲートには、前記第2の受光信号が入力され、
前記第8のトランジスタのゲートには、前記第1の電位が入力され、
前記比較回路は、前記第1の受光信号および前記ランプ信号を用いて、第1の合成電流が生成し、
前記比較回路は、前記第2の受光信号および前記第1の電位を用いて、第2の合成電流が生成し、
前記比較回路は、前記第1の合成電流と、前記第2の合成電流と、の電流値が同じになるように制御される半導体装置。 - 請求項1または請求項2において、
前記第1の受光信号及び前記第2の受光信号は、CDS回路によって、オフセット成分が除去された信号である半導体装置。 - 請求項1乃至請求項3のいずれか一において、
前記第1の画素と、前記第2の画素と、は隣り合うように配置され、
前記第1の画素は、第1の副画素と、第2の副画素と、を有し、
前記第2の画素は、第3の副画素と、第4の副画素と、を有し、
前記第1の副画素および前記第3の副画素は、受光素子を有し、
前記第2の副画素および前記第4の副画素は、発光素子を有する半導体装置。 - 請求項4において、
前記発光素子は第1の有機化合物を含む層を有し、
前記受光素子は第2の有機化合物を含む層を有し、
前記発光素子と前記受光素子とは、共通する層を有する半導体装置。
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CN117957932A (zh) * | 2021-09-17 | 2024-04-30 | 株式会社半导体能源研究所 | 光电转换器件用材料、显示装置 |
KR20240131405A (ko) * | 2022-01-05 | 2024-08-30 | 엘지전자 주식회사 | 디스플레이 장치 |
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US20220352265A1 (en) | 2022-11-03 |
KR20220075191A (ko) | 2022-06-07 |
US12016236B2 (en) | 2024-06-18 |
JP2022094304A (ja) | 2022-06-24 |
CN113614820A (zh) | 2021-11-05 |
DE112020001899T5 (de) | 2021-12-30 |
JPWO2021064518A1 (ja) | 2021-04-08 |
WO2021064518A1 (ja) | 2021-04-08 |
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