JP2007155041A - Low-friction/low-wear sliding mechanism with floating operation - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sliding mechanism effectively utilizing the property of gas-phase synthesized diamond film formation applied to the sliding face of a slider while properly adjusting contact pressure during assembling the slider on a sliding member and during sliding movement with the floating operation of the slider on a holding member. <P>SOLUTION: The gas-phase synthesized diamond film formation is applied to the sliding face of a base material such as titanium silicon carbide for the slider which contacts the sliding member for friction sliding movement. Round-machining such as curve shaping is applied to the mounting face on the opposite side to the sliding face. The round-machined face is fitted to a fitting groove in the inner face of the holding member formed corresponding thereto and adhered thereto with adhesive. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention is a linear motion bearing device, a rotational motion bearing device, a linear motor, or a sliding tool that utilizes movement caused by sliding such as an artificial joint, a precision measuring device, a machine tool such as a surface grinder, and a writing / reading portion of an optical recording device. As a moving mechanism, a slider with a gas-phase synthetic diamond film formed on the sliding surface of the base material is used as the sliding portion, and a floating action is applied to the mounting structure of the slider base material and the holding member that holds the slider. This enables stable sliding with low friction and low wear, automatic alignment (maintaining assembly accuracy of the device) and automatic adjustment of impact pressure (uniform contact pressure), and stable over a long period of time. The present invention relates to a low-friction / low-wear sliding mechanism having a floating action that can accurately realize frictional sliding.

Such a sliding mechanism such as a bearing device that performs linear motion or rotational motion or an artificial joint that performs complicated motion requires high low friction and low wear. As what was devised to satisfy, there exists a thing of the postscript patent document 1 which the inventor developed, for example. This material satisfies the requirement by forming a thin-phase synthetic diamond film on titanium silicon carbide TiSiC and polishing it to near the mirror surface to form a sliding surface. In addition, in the linear motion bearing, a wood ceramic friction body that slides in contact with the upper surface and both side surfaces of the guide rail is disposed on the upper inner surface and both inner surface of the guide holder. The frictional body arranged on the guide rail is supported so as to be swingable by the operation of an attaching screw and an adjusting screw, and the contact pressure with respect to the guide rail is adjusted. Therefore, in a sliding mechanism with a diamond film formed on the sliding surface, the diamond thin film is assembled to the sliding surface such as a guide rail in order to fully exhibit the characteristics of low friction and low wear. In addition, it is required that the contact pressure does not come into contact with a uniform pressure during assembly installation, and that the impact pressure can be accurately adjusted for the eccentric load during sliding operation. However, in Patent Documents 1 and 2, if attention is paid to the aspect of such a request, it is not necessarily sufficient to satisfy it.
JP 2004-116770 A Japanese Patent Laid-Open No. 11-13758

  The present invention has been made in view of such a situation. While taking advantage of the characteristics of the above-mentioned conventional technology, the above-mentioned requirements are satisfied by correcting the deficiencies, that is, the diamond substrate is formed on the base material for the sliding member. A low-friction and low-wear sliding mechanism with a floating action that can maintain stable low-friction and low-wear characteristics over a long period of time by providing a floating action to the arrangement of the slider with film. The purpose is to provide.

  In order to solve the above problems, the present invention employs the following means described in the claims.

  According to the first aspect of the present invention, the sliding surface of the titanium silicon carbide TiSiC base material on the sliding member is coated with a phase synthetic diamond film and polished to near the mirror surface. , Arc-shaped curved surface, spherical curved surface, conical curved surface, etc. are subjected to curved surface R processing, and a fitting groove having a shape corresponding to the curved surface of the slider is formed on the inner surface of the holding member for mounting and holding the slider. The curved surface portion subjected to the R processing is fitted into the fitting groove of the holding member and bonded with an adhesive.

  In the invention according to claim 2, the sliding surface of the titanium silicon carbide TiSiC base material on the sliding member is subjected to a phase synthesis synthetic diamond film and polished close to the mirror surface on the mounting base end side opposite to the sliding surface of the slider. , Arc-shaped curved surface, spherical curved surface, conical curved surface, etc. are subjected to curved surface R processing, and a fitting groove having a shape corresponding to the curved surface of the slider is formed on the inner surface of the holding member for mounting and holding the slider. The curved surface portion subjected to the R processing is fitted in the fitting groove of the holding member.

  According to a third aspect of the present invention, the upper slider and the side slider that slide in contact with the upper surface and both side surfaces of the guide rail are held on the inner surface side of the guide holder, and the upper slider and the side slider are made of titanium silicon carbide TiSiC. The sliding surface is coated with a phase-combination diamond and polished to near the mirror surface, and an arcuate curved surface, spherical curved surface, conical curved surface, etc. are mounted on the mounting base end side opposite to the sliding surface of the upper slider. Curved surface R processing is performed, a fitting groove having a shape corresponding to the curved surface shape R processing of the slider is formed on the inner surface of the upper part of the guide holder, and the curved surface portion of the slider processed to R processing is fitted to the fitting groove of the holding member. The side slider is attached to the inside of the side of the guide holder via a mounting screw and an adjusting screw. Linear motion bearings as a low friction and low wear sliding mechanism having a computing action.

  According to a fourth aspect of the present invention, a phase-combination synthetic diamond film is formed on the sliding surface of a plurality of titanium silicon carbide TiSiC substrates at equal angular intervals on the inner peripheral surface of the outer ring that supports the rotating shaft, and close to the mirror surface. The slider, which is ground, is engaged and disposed, and the rotary shaft is slid and rotated through this slider. The engagement and disposition of the slider to the inner peripheral surface of the outer ring is the mounting base opposite to the slider sliding surface. A curved R shape such as an arcuate curved surface, a spherical curved surface, or a conical curved surface is provided on the end side, and a fitting groove having a shape corresponding to the curved surface R shape of the slider is formed on the inner surface side of the outer ring. Low-friction and low-abrasion sliding mechanism with a floating action characterized by fitting the processed curved surface part to the fitting groove of the outer ring and adhering it with an adhesive or fitting it into the fitting groove Rotary motion bearing as

  The invention according to claim 5 is characterized in that TiC, WC, SiC or SiN is used as the base material of the slider.

  In the invention according to claim 6, as a material of a sliding member on which a slider such as a guide rail slides, a structural steel or a material coated with carbide, nitride, oxide, boride, or a thin phase synthetic diamond film is formed. It is characterized by using the applied material.

  The invention according to claim 7 is characterized in that the surface roughness of a sliding member such as a slider or a guide rail has an arithmetic average roughness Ra of 0.3 μm or less.

  Since the present invention has the above-described configuration, the following specific effects can be obtained.

  Assembling the slider with respect to the sliding member by the swinging support, ie, the floating action of the holding member by the fitting structure of the curved R machining surface of the slider that slides in contact with the sliding member and the fitting groove of the holding member The slider comes into contact with the sliding member at a uniform and moderate contact pressure when set (the front surface is balanced), and the contact per piece is non-uniform and biased against the sliding member of the slider. Therefore, it is possible to ensure a predetermined good quality in which the assembly accuracy of the slider with respect to the sliding member and hence the assembly accuracy of the sliding mechanism is set.

  The action of the floating action on the holding member of the slider is effectively demonstrated by the elastic deformation of the adhesive after bonding, not only during assembly of the sliding mechanism but also during running or sliding movement, and appropriate contact pressure adjustment is possible. It is possible to relieve the impact pressure due to the uneven load, and it is possible to maintain stable and smooth frictional sliding.

  Therefore, as the frictional sliding can be made smooth and stable, the low friction and low wear characteristics of the thin-phase synthetic diamond film on the sliding surface of the slider can be effectively utilized. The durability of the mechanism is increased and the life can be extended. In addition, thin-phase synthetic diamond film formation has low friction and low wear and does not require lubricating oil, thus eliminating the need for lubricating oil maintenance. And since it is a sliding by surface contact, unlike the sliding by a ball | bowl, a rolling sound and a vibration do not generate | occur | produce and a high-speed sliding is attained.

  In addition, since the vapor phase synthetic diamond film does not have pores like ceramics, outgassing does not occur and it can be used in a clean room or in a vacuum.

  Furthermore, since no lubricating oil is required, it can be used in a low to high temperature environment of -200 ° C to + 200 ° C. In addition, since carbon steel is not used, it can be used without a metal under the environment of + 200 ° C, and it can be used in water since no lubricating oil is used.

  As a slider that slides in contact with a sliding member such as a guide rail, it is formed by applying a thin phase synthetic diamond film on the sliding surface of a base material such as titanium silicon carbide TiSiC, and attached to the holding member side such as a guide holder of the slider The surface of the curved surface is subjected to R processing, the R processing surface side is fitted into the fitting groove of the corresponding holding member, and the slider is attached to the holding member by bonding with an adhesive. By having a floating action that supports the swinging movement, it is possible to easily and accurately perform setting, that is, self-aligning or positioning operation with a uniform pressure on the sliding member such as a slider rail. When an unbalanced load is applied during operation, the contact pressure of the slider against the sliding member such as a rail is adjusted appropriately, reducing the impact pressure. That. Therefore, the characteristics of low friction and low wear due to diamond film formation are utilized as they are, and stable sliding movement can be performed for a long time. Therefore, linear motion bearing devices, rotational motion bearing devices, linear motors, or prosthetic joints, precision measuring devices, surface grinders and other machine tools, optical recording devices, etc. The present invention is suitable for a sliding mechanism that utilizes movement.

  An example of the implementation according to the present invention will be described with reference to the attached drawings. FIG. 1 shows a case where the present invention is applied to a sliding mechanism as a linear motion bearing, and FIG. 2 shows a slider used therefor. FIG. 3 shows a case where the present invention is applied to a sliding mechanism as a rotary motion bearing.

  Reference numeral 1 denotes a guide rail having a flat upper surface and symmetrical V-shaped notched sliding surfaces on both sides. Reference numerals 2 and 3 denote an upper surface slurder that slides in contact with the upper surface and both side surfaces of the guide rail 1, respectively. Side slider. The upper surface slider 2 and the side surface slider 3 are made of a titanium silicon carbide TiSiC base material, and phase-synthetic diamond film formations 4 and 5 are applied to the rail side sliding surfaces, respectively.

  The upper surface slider 2 and the side surface slider 3 are attached and held on the inner surface side of the guide holder 6. The mounting surface on the holder side of the upper surface slider 2 is subjected to R machining 7 of an arcuate curved surface, and the fitting groove corresponding to the curved surface shape of the R machining surface 7 is formed on the upper inner surface side of the guide holder 6. 8 is formed, and the curved curved surface 7 of the slider is fitted into the fitting groove 8 of the holder, and after the positioning set, the adhesive is fixed by an adhesive. The upper surface slider 2 is supported so as to be able to swing with respect to the pressure from the outside by the fitting structure of the curved R processed surface 7 and the fitting groove 8 of the holder, so that a floating action is generated and the contact pressure is adjusted. . In the figure, 9 is an escape groove for the adhesive. Although not shown, the side slider 3 is supported so as to be able to swing when it is slid by a mounting screw and a pressure adjusting screw, and the contact pressure of the slider 3 on the guide rail 1 with respect to the impact pressure is adjusted. The

  The slider 2 is slidably supported by the guide holder 6 by the fitting of the curved R processed surface 7 of the slider 2 and the fitting groove 8 of the guide holder 6, and the slider 2 contacts the guide rail 1 by the action of a floating action. The pressure is adjusted moderately, the positioning operation is easy and accurate, and the assembly accuracy is improved. Even during the sliding movement, the floating pressure works by the elastic deformation of the adhesive, and the contact pressure of the slider 2 with respect to the guide rail is adjusted, and the impact pressure is relieved.

  In FIG. 3, reference numeral 10 denotes a rotating shaft, and a plurality of sliders 12 are engaged and arranged at equal intervals on the inner peripheral surface of the outer ring 11 that supports the rotating shaft. The rotating shaft 10 supports the slider 12. Slid through and rotate. The slider 12 has a thin-phase synthetic diamond film 13 formed on the sliding surface of a titanium silicon carbide TiSiC substrate. The engagement arrangement of the slider with the inner peripheral surface of the outer ring 11 is such that a curved surface R processing 14 such as an arcuate curved surface, a spherical curved surface, or a conical curved surface is provided on the mounting base end side opposite to the sliding surface of the slider 12. Then, a fitting groove 15 having a shape corresponding to the curved surface R processing 14 of the slider 12 is formed on the inner surface side of the outer ring 11, and the curved surface portion 14 subjected to the R processing of the slider is fitted into the fitting groove 15 of the outer ring 11. Then, it is performed by bonding with an adhesive. Due to the fitting structure of the curved R surface 14 of the slider 12 and the fitting groove 15 of the outer ring 11, the slider 12 is swingably supported by the outer ring 11, and the floating pressure works to adjust the contact pressure against external stress. It is made accurately. In the figure, 16 is an escape groove for the adhesive. In the case of a linear motion bearing, the floating action on the slider 12 ensures good assembly accuracy with respect to the rotary shaft of the slider, and the elastic pressure of the adhesive allows accurate adjustment of the impact pressure against uneven load even during rotation. It is the same.

  By adjusting the contact pressure on the sliding member due to the floating action of the holding member such as the slider holder, it can be used as a precision measuring device even if it is not a long distance traveling movement like a linear motion bearing or a rotary motion bearing. It is also preferable to carry out the sliding movement with a very small movement (very small movement, for example, a small distance such as several tens of microns).

It is a vertical front view at the time of implementing this invention to the sliding mechanism of a linear motion bearing. It is a perspective view of the slider which performed the R process of the curved structure on the attachment surface with respect to the holding member in the same as the above. It is a vertical front view at the time of implementing this invention to the sliding mechanism of a rotary motion bearing.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Guide rail 2 Upper surface slider 3 Side surface slider 4 Thin-phase synthetic diamond film formation 5 High-phase synthetic diamond film formation 6 Guide holder 7 Curved shape R processing surface 8 Fitting groove 9 Adhesive escape path 10 Rotating shaft 11 Outer ring 12 Slider 13 氣Phase synthesis diamond film formation 14 Curved surface R processing surface 15 Fitting groove 16 Adhesive escape path

Claims (7)

  Titanium silicon carbide TiSiC substrate sliding surface with respect to the sliding member is coated with a phase-combining diamond film and polished to near the mirror surface. , Curved surface R processing such as a conical curved surface, a fitting groove having a shape corresponding to the curved surface R processing of the slider is formed on the inner surface side of the holding member for attaching and holding the slider, and the curved surface portion subjected to R processing of the slider A low-friction / low-abrasion sliding mechanism having a floating action, characterized in that is fitted in a fitting groove of a holding member and adhered with an adhesive.   Titanium silicon carbide TiSiC substrate sliding surface with respect to the sliding member is coated with a phase-combining diamond film and polished to near the mirror surface. , Curved surface R processing such as a conical curved surface, a fitting groove having a shape corresponding to the curved surface R processing of the slider is formed on the inner surface side of the holding member for attaching and holding the slider, and the curved surface portion subjected to R processing of the slider A low-friction / low-abrasion sliding mechanism having a floating action, characterized in that is fitted in a fitting groove of a holding member.   The upper slider and the side slider that slide in contact with the upper and both sides of the guide rail are held on the inner surface of the guide holder, and the upper slider and the side slider are combined with the sliding surface of the titanium silicon carbide TiSiC base material. A diamond film is formed and polished to near the mirror surface, and curved surface R processing such as arcuate curved surface, spherical curved surface, conical curved surface, etc. is applied to the mounting base end side opposite to the sliding surface of the upper slider. A fitting groove having a shape corresponding to the curved surface R processing of the slider is formed on the inner surface of the upper part of the holder, and the curved surface portion subjected to the R processing of the slider is fitted into the fitting groove of the holding member and bonded with an adhesive. Alternatively, it is fitted in the fitting groove, and the side slider has a floating action characterized by being attached to the inside of the guide holder side via the mounting screw and adjusting screw Linear motion bearings as a low friction and low wear sliding mechanism.   Engage a slider that is formed on a sliding surface of a plurality of titanium silicon carbide TiSiC substrates at equal angular intervals on the inner peripheral surface of the outer ring that supports the rotating shaft and polished to near the mirror surface. The rotary shaft is slid and rotated through the slider, and the engagement arrangement of the slider with the inner peripheral surface of the outer ring is curved in an arc shape on the mounting base end side opposite to the slider sliding surface. Curved surface R processing such as surface, spherical curved surface, conical curved surface, etc. is performed, a fitting groove having a shape corresponding to the curved surface shape R processing of the slider is formed on the inner surface side of the outer ring, and the curved surface portion subjected to the R processing of the slider is the outer ring. A rotary motion bearing as a low friction / low wear sliding mechanism having a floating action, characterized in that it is fitted in the fitting groove and adhered with an adhesive or by being fitted in the fitting groove.   5. The low friction / low wear sliding mechanism having a floating action according to claim 1, wherein TiC, WC, SiC or SiN is used as a substrate of the slider.   As a material of the sliding member on which the slider such as a guide rail slides, structural steel or a material coated with carbide, nitride, oxide, boride or a material with a thin-phase synthetic diamond film is used. 6. A low friction / low wear sliding mechanism having a floating action according to claim 1, 2, 3, 4 or 5.   The floating action according to claim 1, 2, 3, 4, 5 or 6, characterized in that the surface roughness of a sliding member such as a slider or guide rail has an arithmetic average roughness Ra of 0.3 µm or less. Low friction and low wear sliding mechanism.

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