JP5165460B2 - Work holder and work processing method - Google Patents
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- JP5165460B2 JP5165460B2 JP2008136444A JP2008136444A JP5165460B2 JP 5165460 B2 JP5165460 B2 JP 5165460B2 JP 2008136444 A JP2008136444 A JP 2008136444A JP 2008136444 A JP2008136444 A JP 2008136444A JP 5165460 B2 JP5165460 B2 JP 5165460B2
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- 238000003672 processing method Methods 0.000 title claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 32
- 238000003754 machining Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 14
- 238000003825 pressing Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 description 39
- 238000005498 polishing Methods 0.000 description 32
- 239000000463 material Substances 0.000 description 17
- 238000009826 distribution Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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- 239000013013 elastic material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Description
本発明は、ワーク保持具およびワーク加工方法に関し、たとえば、光学素子等のワークの研磨や研削加工等に適用して有効な技術に関する。 The present invention relates to a workpiece holder and a workpiece processing method, and more particularly to a technique effective when applied to polishing or grinding of a workpiece such as an optical element.
たとえば、レンズ等の光学素子の製造工程では、レンズに精密な光学機能面を形成する等の目的で、研磨や研削加工が行われている。なお、以下では、簡単のため、研磨および研削を総称して研磨と記すこととする。 For example, in the process of manufacturing an optical element such as a lens, polishing and grinding are performed for the purpose of forming a precise optical functional surface on the lens. Hereinafter, for simplicity, polishing and grinding are collectively referred to as polishing.
ところで、このような研磨や研削加工においてレンズ等の光学素子を保持する保持具として、非特許文献1に記載されているような、円筒状のベース部材にレンズを嵌め込む嵌め込み式の保持具が知られている。この参考技術の保持具の構成を図5、図6を用いて説明する。 By the way, as a holding tool for holding an optical element such as a lens in such polishing or grinding, a fitting type holding tool for fitting a lens into a cylindrical base member as described in Non-Patent Document 1 is provided. Are known. The structure of the holder of this reference technique will be described with reference to FIGS.
図5に示す研磨用の光学素子保持具11は、円筒状のベース12、ベース12内に固定された台座13、及びこの台座13に貼り付けられたレンズ受け材14が一体に構成されている。具体的にはベース12は研磨する被加工レンズ15の外径よりやや大きい内径をもつ円筒状をしており、このベース12に硬質体からなる台座13が固定されている。 The polishing optical element holder 11 shown in FIG. 5 includes a cylindrical base 12, a base 13 fixed in the base 12, and a lens receiver 14 attached to the base 13. . Specifically, the base 12 has a cylindrical shape having an inner diameter slightly larger than the outer diameter of the lens 15 to be polished, and a base 13 made of a hard body is fixed to the base 12.
この台座13の一方の保持面は、前記被加工レンズ15が嵌め込まれた際に当接する当該被加工レンズ15のレンズ受け面15aの曲率と同様な曲率の形状をしており、もう一方の背面は図示しない揺動軸(いわゆる、かんざし)で支持するためのかんざし受けの座グリ16が設けられている。また、座グリ16に配置するかんざしには、このかんざしを介して光学素子保持具11の全体に荷重を伝達するための図示しない加工機が接続されている。 One holding surface of the pedestal 13 has a shape similar to the curvature of the lens receiving surface 15a of the lens 15 to be processed that comes into contact with the lens 15 to be processed, and the other back surface. Is provided with a countersink 16 for a countersink for supporting by a swing shaft (not shown). In addition, a processing machine (not shown) for transmitting a load to the entire optical element holder 11 is connected to the hairpin arranged on the counterbore 16.
一方、レンズ受け面15aの曲率と同様な曲率の台座13の保持面には、レンズ受け材14として、レンズ受け面15aを保護するために弾性体からなる弾性体シート14aが接着剤等で貼り付けられている。 On the other hand, on the holding surface of the pedestal 13 having the same curvature as that of the lens receiving surface 15a, an elastic sheet 14a made of an elastic material is attached with an adhesive or the like as a lens receiving material 14 to protect the lens receiving surface 15a. It is attached.
また、保持具の他の構成として、図6に示すように上述の円筒状のベース12とベース12内に固定される台座13とを一体化してベース12とし、Oリング14bをレンズ受け材14としてベース12とレンズ受け面15aとの間に介在させたものもある。 As another configuration of the holder, as shown in FIG. 6, the above-described cylindrical base 12 and the pedestal 13 fixed in the base 12 are integrated into the base 12, and the O-ring 14 b is used as the lens receiving material 14. In some cases, it is interposed between the base 12 and the lens receiving surface 15a.
以下、上記構成の保持具を用いてレンズを研磨する場合について説明する。
まず、研磨する被加工レンズ15をベース12内に嵌め込み、ベース12内のレンズ受け材14に接触させた状態で図示しない砥石に当接させる。
Hereinafter, a case where the lens is polished using the holder having the above-described configuration will be described.
First, the lens 15 to be polished is fitted into the base 12 and brought into contact with a grindstone (not shown) while being in contact with the lens receiving material 14 in the base 12.
次に、加工機を作動させ、かんざしを介して荷重を光学素子保持具11に伝達させる。これによって光学素子保持具11のベース12内のレンズ受け材14に接触している被加工レンズ15が砥石に押し付けられる。 Next, the processing machine is operated, and the load is transmitted to the optical element holder 11 through the handle. As a result, the lens 15 to be processed that is in contact with the lens receiving member 14 in the base 12 of the optical element holder 11 is pressed against the grindstone.
そして、図示しない駆動装置によって砥石を回転させながら被加工レンズ15と砥石を相対運動をさせると、砥石の回転に従動してベース12と共に被加工レンズ15が回転し、砥石と被加工レンズ15との相対速度の差によって被加工面15bは研磨される。 Then, when the processing lens 15 and the grindstone are moved relative to each other while the grindstone is rotated by a driving device (not shown), the processing lens 15 is rotated together with the base 12 following the rotation of the grindstone, and the grindstone and the processing lens 15 The surface 15b to be processed is polished by the difference in the relative speeds.
この時、図5に示すように弾性体シート14aをレンズ受け材としている場合、レンズ受け面15a全体に被加工レンズ15を砥石に押し付けるための力が加わる。また図6に示すようにOリング14bをレンズ受け材としている場合、レンズ受け面15aに被加工レンズ15を砥石に押し付けるための力が輪帯状に加わる。 At this time, when the elastic sheet 14a is used as a lens receiving material as shown in FIG. 5, a force for pressing the lens 15 to be processed against the grindstone is applied to the entire lens receiving surface 15a. Further, when the O-ring 14b is used as a lens receiving material as shown in FIG. 6, a force for pressing the lens 15 to be processed against the grindstone is applied to the lens receiving surface 15a in a ring shape.
上述の参考技術のように被加工レンズ15等の光学部品の被加工面と加工工具の加工面とを接触させ、光学部品の被加工面に圧力を加えながら相対移動することにより研磨を行う場合、光学部品の被加工面には不均等な圧力が加わり、この影響で光学部品の中央部近傍で面精度の悪化、いわゆるニュートンクセが生じやすくなる、という技術的課題がある。 When polishing is performed by bringing the processing surface of the optical component such as the processing lens 15 and the processing surface of the processing tool into contact with each other and applying relative pressure to the processing surface of the optical component while applying pressure to the processing surface of the optical component. However, there is a technical problem that uneven pressure is applied to the surface to be processed of the optical component, and this influence causes deterioration of surface accuracy near the center of the optical component, that is, so-called Newton's tendency.
図7、図8、図9を用いてこの面精度の悪化が発生する理由を説明する。
図7および図8は、近年、カメラレンズ等の量産加工で用いられている下軸揺動型の球心研磨の模式図である。光学素子保持具11に保持された被加工レンズ15を研磨する場合、光学素子保持具11を介して図示しない研磨機上軸から荷重Wを被加工レンズ15の被加工面15bに負荷し、砥石20を回転させつつ砥石軸の角度をθ1からθ2の間で変化させるように揺動する。
The reason why the surface accuracy is deteriorated will be described with reference to FIGS. 7, 8, and 9.
FIG. 7 and FIG. 8 are schematic views of lower-axis oscillating type ball center polishing used in mass production processing of camera lenses and the like in recent years. When polishing the lens 15 to be processed held by the optical element holder 11, a load W is applied to the processing surface 15 b of the lens 15 to be processed from the upper shaft of a polishing machine (not shown) via the optical element holder 11. While rotating 20, the rocker is swung so as to change the angle of the grindstone shaft between θ1 and θ2.
図7は砥石軸角度がθ1で、被加工レンズ15の被加工面15bの全面に砥石20が接して圧力がかかっている。このときの被加工面15b上で頂角αの輪帯Aでの圧力は、レンズ中心の圧力P1とすると球心方向の分力P1cosαとなる。 In FIG. 7, the grindstone axis angle is θ1, and the grindstone 20 is in contact with the entire surface 15b of the lens 15 to be processed, and pressure is applied. At this time, the pressure in the annular zone A having the apex angle α on the processing surface 15b is a component force P1 cos α in the direction of the sphere when the pressure P1 at the lens center is set.
図8は砥石軸角度がθ2(>θ1)の場合であるが、レンズの被加工面15bの一部が砥石20からはみ出しているため接触面15cの面積は小さくなり、中心での圧力はP2(>P1)となる。このとき輪帯Aでの圧力は前記接触面15cではP2cosαとなるが、接触面15c以外の領域ではゼロとなるため輪帯Aでの圧力はこれらの和となる。 FIG. 8 shows the case where the grindstone axis angle is θ2 (> θ1). However, since a part of the work surface 15b of the lens protrudes from the grindstone 20, the area of the contact surface 15c becomes small, and the pressure at the center is P2. (> P1). At this time, the pressure in the annular zone A becomes P2cosα in the contact surface 15c, but becomes zero in the region other than the contact surface 15c, and therefore the pressure in the annular zone A becomes the sum of these.
さらに被加工レンズ15の被加工面15bには、砥石20と被加工レンズ15の相対運動から生じるモーメントにより発生する圧力、および砥石20の外周エッジ部15dの近傍に生じる応力集中による局部的圧力等がかかり、被加工面15bに働く力はこれらの総和ΣPとなる。 Further, pressure generated by the moment generated by the relative movement of the grindstone 20 and the lens 15 to be processed, local pressure due to concentration of stress generated in the vicinity of the outer peripheral edge portion 15d of the grindstone 20, etc. The force acting on the work surface 15b is the sum ΣP of these.
図9は上記した種々の圧力をグラフ化したものである。このように被加工レンズ15の被加工面15bに働く圧力は均等ではなくレンズ中心点の近傍で大きな値となる。
図7で示した保持具においては弾性体シート14aにより被加工レンズ15を保持しているため、被加工レンズ15は中心付近で変形し易くなり、特に中心厚さの小さい薄肉レンズでは変形が大きくなる。
FIG. 9 is a graph of the various pressures described above. In this way, the pressure acting on the processing surface 15b of the processing lens 15 is not uniform and takes a large value in the vicinity of the lens center point.
In the holder shown in FIG. 7, since the lens 15 to be processed is held by the elastic sheet 14a, the lens 15 to be processed is easily deformed in the vicinity of the center, and the deformation is particularly large in a thin lens having a small center thickness. Become.
また、図8で示した保持具においてはOリング14bにより被加工レンズ15を保持しているため中心点近傍の変形はさらに大きく(起こりやすく)なる。
勿論、被加工レンズ15の被加工面15bの曲率、砥石20の揺動速度および揺動角度等の加工条件によって圧力分布は異なってくるが、中心点近傍で大きな値となることは同様である。
Further, in the holder shown in FIG. 8, since the lens 15 to be processed is held by the O-ring 14b, the deformation in the vicinity of the center point is further increased (prone to occur).
Of course, the pressure distribution differs depending on the processing conditions such as the curvature of the processing surface 15b of the lens 15 to be processed, the rocking speed and rocking angle of the grindstone 20, but it is the same that the pressure distribution becomes large near the center point. .
一方、プレストンの式としてよく知られているように、レンズの加工量は圧力、相対速度、滞留時間の関数となるため、圧力の分布が均等でなくても、加工条件の設定や、圧力、相対速度、滞留時間の各々の値を制御して加工量を制御することにより高精度な加工ができる。 On the other hand, as is well known as Preston's equation, the amount of processing of the lens is a function of pressure, relative speed, and residence time, so even if the pressure distribution is not uniform, setting of processing conditions, pressure, High-precision machining can be performed by controlling the amount of machining by controlling the values of relative speed and residence time.
しかし、圧力の分布があればレンズの変形は発生し、加工中に被加工レンズ15は変形したまま加工が行われ、加工が終了すると変形が元に戻るためこの変形量だけ面精度が悪化する。 However, if there is a pressure distribution, the lens is deformed, and the lens 15 to be processed is processed while being deformed. When the processing is completed, the deformation returns to the original state, and the surface accuracy is deteriorated by this deformation amount. .
この面精度の悪化の対策として、たとえば、被加工レンズに対する砥石の押圧力を小さくして被加工レンズの変形を抑制しながら加工することで、研磨面の面精度を向上させることも考えられるが、加工所要時間が長くなり、生産性の低下、すなわち製造コストの増大を招く。 As a countermeasure against the deterioration of the surface accuracy, for example, it is conceivable to improve the surface accuracy of the polished surface by processing while suppressing the deformation of the lens to be processed by reducing the pressing force of the grindstone against the lens to be processed. The required processing time becomes longer, resulting in a decrease in productivity, that is, an increase in manufacturing cost.
なお、ここでいう面精度の悪化とはいわゆるニュートンクセと言われるもので、その良品のレベルは例えばニュートン本数0.5本以下(約150nm以下)程度である。
上述のニュートン本数とは、評価対象のレンズとは逆の凹凸を有し、設計通りの表面形状を有する原器(レンズ)に当該評価対象のレンズを重ね合わせた時に観察されるニュートンリングの状態(本数)である。
The number of Newtons mentioned above refers to the state of Newton rings observed when the lens to be evaluated is superimposed on a prototype (lens) that has irregularities opposite to the lens to be evaluated and has a surface shape as designed. (Number).
本発明の目的は、ワークに対する加工工具による圧力分布が均等でない場合や、変形の大きい薄肉レンズ等のワークの高負荷加工においても、簡単に低コストで高精度な加工面を得ることができる技術を提供することにある。 The purpose of the present invention is to provide a technology that can easily obtain a highly accurate machining surface at low cost even when the pressure distribution by the machining tool on the workpiece is not uniform or in high-load machining of a workpiece such as a thin lens with large deformation. Is to provide.
本発明の第1の観点は、ワークの被加工面と反対側の被保持面に当接するワーク保持面を備えた台座部と、前記ワークの外周部を保持する枠部とを含むワーク保持具であって、
前記台座部における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接する形状を呈し、
前記ワークの前記被保持面の第1曲率半径よりも、前記台座部の前記ワーク保持面の第2曲率半径を大きくすることで、前記台座部における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接するようにしたワーク保持具を提供する。
According to a first aspect of the present invention, there is provided a work holder including a pedestal portion having a work holding surface that abuts a held surface opposite to a work surface of the work, and a frame portion that holds an outer peripheral portion of the work. Because
Central portion of the workpiece holding surface in the base portion is selectively caused a abutting shape with respect to the held surface of the workpiece,
By making the second radius of curvature of the workpiece holding surface of the pedestal portion larger than the first radius of curvature of the held surface of the workpiece, the central portion of the workpiece holding surface in the pedestal portion is Provided is a workpiece holder configured to selectively contact the held surface .
本発明の第2の観点は、ワークの被加工面と反対側の被保持面をワーク保持具のワーク保持面にて保持し、前記被加工面に加工工具を相対的に摺動させて加工を行うワーク加工方法であって、
前記ワーク保持具における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接する状態で前記ワークを前記ワーク保持具に保持する第1工程と、
前記ワーク保持具に保持された前記ワークに対して相対的に前記加工工具を押圧して摺動させることで加工を行う第2工程と、
を含み、
前記第1工程では、前記ワークの前記被保持面の第1曲率半径と前記ワーク保持具における前記ワーク保持面の第2曲率半径との相違により、前記ワーク保持具における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接する状態で前記ワークを前記ワーク保持具に保持するワーク加工方法を提供する。
According to a second aspect of the present invention, a workpiece holding surface opposite to a workpiece surface is held by a workpiece holding surface of a workpiece holder, and a machining tool is slid relative to the workpiece surface for machining. A workpiece machining method for performing
A first step of holding the workpiece on the workpiece holder in a state in which a center portion of the workpiece holding surface of the workpiece holder is selectively in contact with the held surface of the workpiece;
A second step of performing machining by pressing and sliding the machining tool relative to the workpiece held by the workpiece holder;
Only including,
In the first step, a center portion of the work holding surface of the work holder is determined by a difference between a first radius of curvature of the held surface of the work and a second radius of curvature of the work holding surface of the work holder. However, the present invention provides a workpiece machining method for holding the workpiece on the workpiece holder in a state of selectively contacting the held surface of the workpiece.
本発明によれば、ワークに対する加工工具による圧力分布が均等でない場合や、変形の大きい薄肉レンズ等のワークの高負荷加工においても、簡単に低コストで高精度な加工面を得ることができる技術を提供することができる。 According to the present invention, it is possible to easily obtain a highly accurate machining surface at a low cost even in the case where the pressure distribution by the machining tool on the workpiece is not uniform or in high-load machining of a workpiece such as a thin lens having a large deformation. Can be provided.
本実施の形態の第1態様では、光学素子保持具に交換可能に装着した弾性体シートのレンズ受け面と被加工レンズの当接面を中当たりとすることにより、被加工レンズはその外周側が上方に湾曲しようするため、加工圧力の分布による変形と相殺しクセのない研磨面を得る。 In the first aspect of the present embodiment, the lens receiving surface of the elastic sheet that is replaceably attached to the optical element holder and the contact surface of the lens to be processed are centered so that the lens to be processed has an outer peripheral side. Since it curves upward, it cancels out deformation due to the distribution of the processing pressure and obtains a polished surface with no habit.
本実施の形態の第2態様では、光学素子保持具の台座を金属等の硬質部材で構成し、これに段差を設けることにより、弾性体シートのレンズ受け面と被加工レンズの当接面を中当たりを実現し、加工圧力によるレンズ中心部の変形を抑えるとともに、さらに弾性体シートによりレンズ外周部は上側に湾曲する余地があるため変形が大きい薄肉レンズであってもクセのない研磨面を得る。 In the second aspect of the present embodiment, the pedestal of the optical element holder is made of a hard member such as a metal, and a step is provided on the pedestal so that the lens receiving surface of the elastic sheet and the contact surface of the lens to be processed are provided. Achieving a center hit, suppressing deformation of the center of the lens due to processing pressure, and there is room for the outer periphery of the lens to be curved upward due to the elastic sheet. obtain.
本実施の形態の第3態様では、光学素子保持具の台座に設ける段差部を着脱自在とすることにより種々の形状の段差を簡単に作ることができる構成とする。被加工レンズにかかる圧力分布は加工機の機差により1台毎に異なるため同じレンズ形状であっても変形量は同一ではない。このため機械毎に最適な形状の段差を得る必要があることに対応するためである。 In the third aspect of the present embodiment, the steps provided on the pedestal of the optical element holder are made detachable so that steps of various shapes can be easily made. Since the pressure distribution applied to the lens to be processed varies from machine to machine due to machine differences, the amount of deformation is not the same even with the same lens shape. For this reason, it is to cope with the necessity of obtaining a step having an optimal shape for each machine.
また、レンズ形状によっても変形量は異なるため被加工レンズの形状に最適な段差が必要であり、上述の第3態様によれば、段差部の交換によって、簡単に最適な形状の段差を実現することが可能である。 In addition, since the amount of deformation varies depending on the lens shape, an optimum step is necessary for the shape of the lens to be processed. According to the third aspect described above, a step having the optimum shape can be easily realized by replacing the step portion. It is possible.
以下、図面を参照しながら、本発明の実施の形態について詳細に説明する。
(実施の形態1)
図1は、本発明の一実施の形態であるワーク加工方法を実施するワーク保持具の構成の一例を示す断面図である。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Embodiment 1)
FIG. 1 is a cross-sectional view showing an example of a configuration of a workpiece holder that implements a workpiece machining method according to an embodiment of the present invention.
ワーク保持具H1は、円筒状のベース4(枠部)、ベース4内に固定された台座5及びこの台座5のレンズ受け面5a(ワーク保持面)に貼り付けられたレンズ受け材2が一体となって構成されている。具体的にはベース4は研磨する被加工レンズ1(ワーク)の外径よりやや大きい内径をもつ円筒状をしており、このベース4に、剛性の大きな硬質体からなる台座5が固定されている。 The workpiece holder H1 includes a cylindrical base 4 (frame portion), a pedestal 5 fixed in the base 4, and a lens receiving material 2 attached to a lens receiving surface 5a (work holding surface) of the pedestal 5. It is configured as. Specifically, the base 4 has a cylindrical shape with an inner diameter slightly larger than the outer diameter of the lens 1 (work) to be polished, and a base 5 made of a rigid body having a large rigidity is fixed to the base 4. Yes.
この台座5のレンズ受け面5aは、被加工レンズ1が嵌め込まれた際に当接する当該被加工レンズ1のレンズ当接面1a(被保持面)の曲率R1(第1曲率半径)より大きな曲率を有する形状を呈しており、さらに、レンズ当接面1aを保護するために弾性体からなるシートがレンズ受け材2として接着剤等で貼り付けられている。 The lens receiving surface 5a of the pedestal 5 has a curvature larger than the curvature R1 (first curvature radius) of the lens contact surface 1a (held surface) of the lens 1 to be processed that comes into contact with the lens 1 to be processed. Furthermore, in order to protect the lens contact surface 1a, a sheet made of an elastic body is attached as a lens receiving material 2 with an adhesive or the like.
このとき弾性体シートからなるレンズ受け材2のレンズ受け面2aの曲率R2(第2曲率半径)は、台座5のレンズ受け面5aの曲率を反映して、レンズ当接面1aの曲率R1より大きく構成されている。 At this time, the curvature R2 (second curvature radius) of the lens receiving surface 2a of the lens receiving member 2 made of an elastic sheet reflects the curvature of the lens receiving surface 5a of the pedestal 5 and is more than the curvature R1 of the lens contact surface 1a. It is composed largely.
すなわち、本実施の形態1のワーク保持具H1の場合、台座5のレンズ受け面5aの曲率は、レンズ受け材2の厚さを見込んで、曲率R2>曲率R1となるように設定されている。 That is, in the case of the workpiece holder H1 of the first embodiment, the curvature of the lens receiving surface 5a of the pedestal 5 is set so that the curvature R2> the curvature R1 in consideration of the thickness of the lens receiving material 2. .
このワーク保持具H1は、被加工レンズ1を保持した状態で、後述する研磨装置Kの側の上軸122に背面が固定されて支持され、被加工レンズ1の被加工面1bは、砥石スピンドル115に支持された工具皿10の加工作用面10aに対向する姿勢となる。 The workpiece holder H1 is supported with the back surface fixed to an upper shaft 122 of the polishing apparatus K, which will be described later, while the workpiece lens 1 is held, and the workpiece surface 1b of the workpiece lens 1 is a grindstone spindle. The posture is opposed to the machining surface 10 a of the tool tray 10 supported by the 115.
本実施の形態1では、被加工レンズ1をワーク保持具H1に保持したとき、無負荷状態では、被加工レンズ1のレンズ当接面1aはレンズ受け材2のレンズ受け面2aの中心部2bで最初に(選択的に)接触する、いわゆる中当たり状態となっている(第1工程)。 In the first embodiment, when the lens 1 to be processed is held on the work holder H1, the lens contact surface 1a of the lens 1 to be processed is the center portion 2b of the lens receiving surface 2a of the lens receiving material 2 in the no-load state. In the first (selective) contact, a so-called middle hit state is established (first step).
そして、被加工レンズ1の被加工面1bが工具皿10の加工作用面10aに押圧されて加工が開始されると加工荷重によりレンズ受け材2の変形および被加工レンズ1の変形により、被加工レンズ1のレンズ当接面1aは、レンズ受け材2のレンズ受け面2aに対して全面で密着する。この密着状態で、工具皿10の加工作用面10aによる被加工レンズ1の被加工面1bの研磨が行われる(第2工程)。 When the processing surface 1b of the lens 1 to be processed is pressed against the processing surface 10a of the tool plate 10 and processing is started, the processing is performed by the deformation of the lens receiving material 2 and the deformation of the processing lens 1 due to the processing load. The lens contact surface 1 a of the lens 1 is in close contact with the lens receiving surface 2 a of the lens receiving material 2 over the entire surface. In this close contact state, the processing surface 1b of the processing lens 1 is polished by the processing surface 10a of the tool plate 10 (second step).
本実施の形態1のワーク保持具H1によれば、被加工レンズ1のレンズ当接面1aが、台座5に支持されたレンズ受け材2のレンズ受け面2aの中心部2bに対して中当たり状態となっていることにより、加工圧力による被加工レンズ1の変形M1と反対方向に変形M2が生じるように力が働くため、工具皿10の加工圧力による変形は相殺され、たとえば、被加工レンズ1が薄肉レンズであっても、また、高負荷(圧力)加工においても、研磨加工後に、ニュートンクセのない高い形状精度のレンズを得ることができる。 According to the workpiece holder H1 of the first embodiment, the lens contact surface 1a of the lens 1 to be processed is centered against the central portion 2b of the lens receiving surface 2a of the lens receiving material 2 supported by the pedestal 5. Since the force acts so that the deformation M2 is generated in a direction opposite to the deformation M1 of the lens 1 to be processed due to the processing pressure, the deformation due to the processing pressure of the tool plate 10 is canceled, for example, the lens to be processed Even if the lens 1 is a thin lens or is subjected to high load (pressure) processing, a lens having a high shape accuracy without Newton's habit can be obtained after polishing.
すなわち、本実施の形態1のワーク保持具H1によれば、ワークとしての被加工レンズ1に対する工具皿10等の加工工具による圧力分布が均等でない場合でも高精度な加工面を得ることができる。特に変形の大きい薄肉レンズ等の被加工レンズ1の高負荷加工においても、簡単に低コストで高精度な加工面を得ることが可能となる。 That is, according to the workpiece holder H1 of the first embodiment, a highly accurate machining surface can be obtained even when the pressure distribution by the machining tool such as the tool plate 10 on the workpiece lens 1 as a workpiece is not uniform. In particular, even in high-load processing of the lens 1 to be processed such as a thin lens having a large deformation, a highly accurate processed surface can be easily obtained at low cost.
(実施の形態2)
図2は、本発明の他の実施の形態であるワーク加工方法を実施するワーク保持具の構成の一例を示す断面図である。
(Embodiment 2)
FIG. 2 is a cross-sectional view showing an example of the configuration of a workpiece holder that implements a workpiece machining method according to another embodiment of the present invention.
本実施の形態2のワーク保持具H2では、台座5のレンズ受け面5aは被加工レンズ1のレンズ当接面1aの曲率R1と同様の曲率とし、このレンズ受け面5aの中央部に凸状の突起段差6(段差部)を設け、さらに、この突起段差6を有するレンズ受け面5aの全体を覆うように、弾性体シートからなるレンズ受け材2を接着剤等で貼り付けた構成となっている。 In the workpiece holder H2 of the second embodiment, the lens receiving surface 5a of the base 5 has a curvature similar to the curvature R1 of the lens contact surface 1a of the lens 1 to be processed, and is convex at the center of the lens receiving surface 5a. The projection receiving step 6 (stepped portion) is provided, and the lens receiving material 2 made of an elastic sheet is attached with an adhesive or the like so as to cover the entire lens receiving surface 5a having the protruding step 6. ing.
本実施の形態2のワーク保持具H2の場合には、突起段差6は台座5と一体に硬質部材で設けられているため、無負荷状態では、ワーク保持具H2に保持される被加工レンズ1のレンズ当接面1aは、やはり、台座5のレンズ受け面5aの中心部2bに選択的に接する中当たり状態となる。 In the case of the workpiece holder H2 according to the second embodiment, the projection step 6 is provided as a hard member integrally with the pedestal 5, and therefore the processed lens 1 held by the workpiece holder H2 in an unloaded state. The lens abutting surface 1a is also in a middle hit state in which it selectively contacts the central portion 2b of the lens receiving surface 5a of the pedestal 5.
このため、加工圧力による被加工レンズ1の変形M1と反対方向に変形M2が生じるように力が働くため、工具皿10の加工圧力による変形は相殺され、被加工レンズ1の中心部の変形を直接的に防止することができる。 For this reason, since the force acts so that the deformation M2 is generated in the opposite direction to the deformation M1 of the lens 1 to be processed due to the processing pressure, the deformation due to the processing pressure of the tool plate 10 is canceled out, and the deformation of the central portion of the lens 1 to be processed is prevented. It can be prevented directly.
また、このワーク保持具H2の場合には、台座5のレンズ受け面5aの中央における突起段差6の存在により、被加工レンズ1の外周部はレンズ受け材2の弾性により、台座5のレンズ受け面5aの曲率による制限を超えて、変形M2方向へも変形可能であるため、工具皿10から被加工レンズ1に作用する加工圧力の調整により、変形M2の量を制御して、被加工レンズ1の被加工面1bの研磨形状の制御が可能なる、という利点もある。 Further, in the case of this work holder H2, the outer periphery of the lens 1 to be processed is caused by the elasticity of the lens receiving material 2 due to the presence of the protruding step 6 at the center of the lens receiving surface 5a of the pedestal 5, so Since it can be deformed in the direction of deformation M2 beyond the limit due to the curvature of the surface 5a, the amount of deformation M2 is controlled by adjusting the processing pressure acting on the lens 1 to be processed from the tool plate 10, and the lens to be processed There is also an advantage that the polishing shape of one processed surface 1b can be controlled.
この実施の形態2のワーク保持具H2の場合には、被加工レンズ1が、工具皿10の加工圧力による変形が大きなレンズであっても、変形を抑えて高精度の研磨面、すなわち被加工面1bの形状精度を得ることができる。 In the case of the workpiece holder H2 of the second embodiment, even if the lens 1 to be processed is a lens that is greatly deformed by the processing pressure of the tool plate 10, the deformation is suppressed and a highly accurate polished surface, that is, the workpiece to be processed. The shape accuracy of the surface 1b can be obtained.
(実施の形態3)
図3は、本発明のさらに他の実施の形態であるワーク加工方法を実施するワーク保持具の構成の一例を示す断面図である。
(Embodiment 3)
FIG. 3 is a cross-sectional view showing an example of the configuration of a workpiece holder that implements a workpiece machining method according to still another embodiment of the present invention.
本実施の形態3のワーク保持具H3では、台座5のレンズ受け面5aの中央部に着脱可能な突起部材7(段差部)を設けた点が、上述の実施の形態2と異なっている。
すなわち、ワーク保持具H3に備えられた突起部材7は、先端側に段差7aが設けられ、後端側にネジ部7bが設けられた構成となっている。そして、台座5のレンズ受け面5aの中央部に設けられたネジ穴に、突起部材7のネジ部7bを螺合することにより、突起部材7が台座5に固定される。他の構成は上述の実施の形態2と同様である。
The workpiece holder H3 according to the third embodiment is different from the second embodiment described above in that a detachable protrusion member 7 (stepped portion) is provided at the center of the lens receiving surface 5a of the pedestal 5.
That is, the protrusion member 7 provided in the work holder H3 has a configuration in which a step 7a is provided on the front end side and a screw portion 7b is provided on the rear end side. Then, the protruding member 7 is fixed to the pedestal 5 by screwing the threaded portion 7b of the protruding member 7 into a screw hole provided in the central portion of the lens receiving surface 5a of the pedestal 5. Other configurations are the same as those of the second embodiment.
このため、台座5の突起部材7の段差により、ワーク保持具H3に保持される被加工レンズ1のレンズ当接面1aは、レンズ受け材2の中心部2bで選択的に当接する中当たり状態となる。 For this reason, the middle contact state in which the lens contact surface 1a of the lens 1 to be processed held by the work holder H3 is selectively brought into contact with the central portion 2b of the lens receiving member 2 due to the step of the protruding member 7 of the base 5 is provided. It becomes.
本実施の形態3のワーク保持具H3によれば、台座5に対して突起部材7がネジ部7bで交換可能に装着されていることにより、被加工レンズ1の種類や加工条件等に応じて、段差7aの形状を簡単に変更できるため、後述する研磨装置Kの機差や、被加工レンズ1の形状に応じて最適な段差形状(換言すれば、中当たり状態)を得ることができる利点がある。 According to the workpiece holder H3 of the third embodiment, the projection member 7 is attached to the pedestal 5 so as to be replaceable by the screw portion 7b, so that it depends on the type of the lens 1 to be processed, processing conditions, and the like. Since the shape of the step 7a can be easily changed, it is possible to obtain an optimum step shape (in other words, a middle hit state) according to the machine difference of the polishing apparatus K described later and the shape of the lens 1 to be processed. There is.
(実施の形態4)
図4は、上述の各実施の形態に例示したワーク保持具H1からワーク保持具H3の各々を使用する研磨装置の代表的な一例を示す斜視図である。
(Embodiment 4)
FIG. 4 is a perspective view showing a typical example of a polishing apparatus that uses each of the workpiece holders H1 to H3 exemplified in the above-described embodiments.
この研磨装置Kでは、一例として、被加工レンズ1の被加工面1b、および工具皿10の加工作用面10aが球面の場合を例に採って説明する。
この図4の研磨装置Kにおいて、本実施の形態のワーク保持具H1(ワーク保持具H2)(ワーク保持具H3)は保持具121に相当する。また、台座5の背面は後述の上軸122に固定され、工具皿10の背面は、砥石スピンドル115に固定される。
In the polishing apparatus K, as an example, a case where the processing surface 1b of the processing lens 1 and the processing surface 10a of the tool plate 10 are spherical will be described as an example.
In the polishing apparatus K of FIG. 4, the work holder H <b> 1 (work holder H <b> 2) (work holder H <b> 3) of the present embodiment corresponds to the holder 121. Further, the back surface of the base 5 is fixed to an upper shaft 122 described later, and the back surface of the tool plate 10 is fixed to the grindstone spindle 115.
図4に例示されるように、本実施の形態1の研磨装置Kは、装置本体150と、この装置本体150の上部に設けた揺動板151と、揺動板151の下方に設けた例えば上部が開口し、下辺部161bが円弧状に形成され、かつ、半円状の両側板162を備えた砥石用揺動体161と、この砥石用揺動体161の下辺部161bを一体で支持するハウジング171とを有している。 As illustrated in FIG. 4, the polishing apparatus K according to the first embodiment includes an apparatus main body 150, a swing plate 151 provided on the upper portion of the apparatus main body 150, and, for example, provided below the swing plate 151. The upper part is opened, the lower side part 161b is formed in an arc shape, and the grindstone rocking body 161 provided with the semicircular side plates 162 and the lower side part 161b of the grindstone rocking body 161 are integrally supported. 171.
前記ハウジング171には、砥石モータ116と、この砥石モータ116により回転駆動される砥石スピンドル115が取り付けられ、さらに砥石スピンドル115の上端に球面研磨用の工具皿10が取り付けられている。前記砥石スピンドル115は球心104を通る軸線の回りに回転するように設定されている。 A grindstone motor 116 and a grindstone spindle 115 that is rotationally driven by the grindstone motor 116 are attached to the housing 171, and a tool plate 10 for spherical polishing is attached to the upper end of the grindstone spindle 115. The grindstone spindle 115 is set to rotate around an axis passing through the ball center 104.
前記ハウジング171は、さらに、前記砥石モータ116に隣接する位置に、Y軸方向に沿って配置した揺動モータ112を備えている。
一方、前記装置本体150からは、前記砥石用揺動体161を一対の軸受163によって支持する平行配置の一対の支持アーム164が突出形成されており、さらに、一対の支持アーム164の下側には、前記ハウジング171を揺動させるための円弧状揺動ギヤ部181を備えた固定突出体180を設けている。
The housing 171 further includes a swing motor 112 disposed along the Y-axis direction at a position adjacent to the grinding wheel motor 116.
On the other hand, a pair of support arms 164 arranged in parallel to support the grindstone rocker 161 by a pair of bearings 163 protrude from the apparatus main body 150, and further, below the pair of support arms 164. A fixed protrusion 180 having an arcuate rocking gear portion 181 for rocking the housing 171 is provided.
そして、前記揺動モータ112の原動軸に取り付けた歯車114と前記円弧状揺動ギヤ部181とを噛合させ、揺動モータ112により回転する歯車114と円弧状揺動ギヤ部181との噛み合いにより、前記ハウジング171、砥石用揺動体161を、前記球心104を揺動中心として図4に示す矢印方向(Y軸の回り)に揺動させるようになっている。 Then, the gear 114 attached to the drive shaft of the swing motor 112 and the arc-shaped swing gear portion 181 are engaged with each other, and the gear 114 rotated by the swing motor 112 and the arc-shaped swing gear portion 181 are engaged with each other. The housing 171 and the grindstone rocking body 161 are swung in the arrow direction (around the Y axis) shown in FIG. 4 with the ball center 104 as the rocking center.
前記装置本体150の上部に設けた揺動板151の突出端には、Z軸方向に沿ってシリンダ120、このシリンダ120の伸縮するロッド120aに連結した上軸122、この上軸122の下端部に取り付けた保持具121が配置され、さらに保持具121により被加工レンズ1を保持するようになっている。即ち、被加工レンズ1は、光学素子を上下方向で変位させる変位機構としてのシリンダ120の動作により保持具121に支持されつつZ軸方向に変位(上下動)可能で、前記工具皿10に所望の押圧力で押圧可能となっている。 The protruding end of the swing plate 151 provided on the upper part of the apparatus main body 150 includes a cylinder 120 along the Z-axis direction, an upper shaft 122 connected to a rod 120a that expands and contracts the cylinder 120, and a lower end portion of the upper shaft 122. A holder 121 attached to the lens is disposed, and the lens 1 to be processed is further held by the holder 121. That is, the lens 1 to be processed can be displaced (vertically moved) in the Z-axis direction while being supported by the holder 121 by the operation of the cylinder 120 as a displacement mechanism for displacing the optical element in the vertical direction. It is possible to press with a pressing force of.
また、前記揺動板151の基部は、装置本体150上に固定配置した軸受箱体191によりX軸(揺動板151の基部の揺動中心を通るX軸方向の軸線は前記球心104を通るように設定している)の回りを揺動可能に支持され、軸受箱体191に連結したX軸揺動モータ190により駆動されるようになっている。即ち、被加工レンズ1は、揺動板151、上軸122、保持具121を介して支持されつつX軸の回りに揺動可能となっている。 Further, the base of the swing plate 151 is fixed to the apparatus main body 150 by a bearing box body 191, and the X axis (the axis in the X axis direction passing through the swing center of the base of the swing plate 151 is the center of the ball 104. And is driven by an X-axis oscillating motor 190 connected to the bearing box body 191. That is, the lens 1 to be processed can swing around the X axis while being supported via the swing plate 151, the upper shaft 122, and the holder 121.
本実施の形態4の研磨装置Kは、さらに、全体の制御を行う制御装置106と、前記揺動モータ112に接続した砥石揺動制御部107と、前記砥石モータ116の回転数制御用のインバータ108とを具備している。前記制御装置106は、前記X軸揺動モータ190及びシリンダ120の駆動制御をも行うようになっている。 The polishing apparatus K according to the fourth embodiment further includes a control device 106 that performs overall control, a grindstone rocking control unit 107 connected to the rocking motor 112, and an inverter for controlling the rotational speed of the grindstone motor 116. 108. The control device 106 also performs drive control of the X-axis swing motor 190 and the cylinder 120.
次に、本実施の形態4の研磨装置Kによる、上述のワーク保持具H1、ワーク保持具H2、ワーク保持具H3を用いた被加工レンズ1の研磨方法について説明する。
前記工具皿10は、砥石モータ116により駆動される砥石スピンドル115を介して回転駆動される。また、前記揺動モータ112の回転により歯車114が円弧状揺動ギヤ部181と噛み合いつつ回転し、これにより、前記ハウジング171、砥石用揺動体161とともに工具皿10は球心104を中心にY軸の回りを揺動する。
Next, a method for polishing the lens 1 to be processed using the above-described workpiece holder H1, workpiece holder H2, and workpiece holder H3 by the polishing apparatus K according to the fourth embodiment will be described.
The tool plate 10 is rotationally driven via a grinding wheel spindle 115 driven by a grinding wheel motor 116. Further, the gear 114 rotates while meshing with the arcuate rocking gear portion 181 due to the rotation of the rocking motor 112, so that the tool plate 10 together with the housing 171 and the grindstone rocking body 161 rotates around the ball center 104. Swing around the axis.
一方、被加工レンズ1を保持した保持具121は、シリンダ120のロッド120aの伸動作によりZ軸に沿って下方に変位し、被加工レンズ1を工具皿10に一定押圧力にて押圧接触させる。 On the other hand, the holder 121 holding the workpiece lens 1 is displaced downward along the Z axis by the extending operation of the rod 120a of the cylinder 120, and presses the workpiece lens 1 against the tool plate 10 with a constant pressing force. .
さらに、保持具121により保持された被加工レンズ1は、X軸揺動モータ190により駆動される前記揺動板151の揺動に連動して、工具皿10に接触しつつ被加工面1b(光学機能面)の曲率中心(すなわち、被加工面1bの球心)を工具皿10の加工作用面10aの球心104に一致させてX軸の回りを揺動する。 Furthermore, the lens 1 to be processed held by the holder 121 is in contact with the tool plate 10 while being in contact with the tool plate 10 in conjunction with the swing of the swing plate 151 driven by the X-axis swing motor 190. The center of curvature of the optical function surface (that is, the sphere center of the surface 1b to be processed) is made to coincide with the sphere center 104 of the processing surface 10a of the tool plate 10 to swing around the X axis.
このようにして、前記球心104を中心として、前記工具皿10がY軸の回りを揺動し、被加工レンズ1がX軸の回りを揺動して、被加工レンズ1の研磨面である被加工面1bと加工作用面10aとの相対的な摺動動作により、被加工面1bの所望の球面研磨が実行される。 In this way, the tool plate 10 swings around the Y axis around the spherical center 104, and the lens 1 to be processed swings around the X axis. A desired spherical polishing of the work surface 1b is performed by a relative sliding movement between the work surface 1b and the work surface 10a.
この研磨装置Kによれば、保持具121として、上述のワーク保持具H1、ワーク保持具H2、ワーク保持具H3の何れかを使用することで、ワーク保持具H1からH3の各々に対応した、上述の効果を得ることができる。 According to this polishing apparatus K, by using any one of the above-mentioned workpiece holder H1, workpiece holder H2, and workpiece holder H3 as the holder 121, it corresponds to each of the workpiece holders H1 to H3. The effects described above can be obtained.
以上説明したように、本発明の上述の各実施の形態によれば、たとえば、カメラレンズの量産加工のように、被加工レンズ1に対して高速高負荷の研磨加工を行う場合、薄肉レンズのように変形しやすい形状の光学素子であってもクセのない高精度な研磨面を得ることができる、という効果が得られる。 As described above, according to each of the above-described embodiments of the present invention, when a high-speed and high-load polishing process is performed on the lens 1 to be processed, for example, in a mass production process of a camera lens, Thus, even if it is an easily deformable optical element, it is possible to obtain a highly accurate polished surface without habit.
なお、本発明は、上述の実施の形態に例示した構成に限らず、その趣旨を逸脱しない範囲で種々変更可能であることは言うまでもない。
たとえば、ワークとしては光学素子に限らず、一般の精密研磨の必要な製品にも適用できる。
Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, the workpiece is not limited to an optical element, and can be applied to a general product requiring precision polishing.
また、研磨装置に関しても、被加工レンズの被加工面と工具皿の加工作用面とを相対的に摺動動作させて研磨加工を行う他の構成の装置であってもよい。
(付記1) レンズ等の光学素子を保持して研削研磨する保持具において、前記光学素子が挿脱可能な枠部と、この枠部に挿入した状態の前記光学素子の一面に当接して光学素子を保持する光学素子保持面の形状が、前記光学素子の当接面と中当たり状態となるように形成したことを特徴とする光学素子保持具。
(付記2) レンズ等の光学素子を保持して研削研磨する保持具であって、前記光学素子が挿脱可能な枠部と前記光学素子を保持するための中央部に段差を設けた台座とからなり、この台座の光学素子保持面側にシート状弾性体を装着してなることを特徴とする光学素子保持具。
(付記3) 光学素子を保持するための前記台座の中央部に設けた段差が着脱可能であることを特徴とする付記2記載の光学素子保持具。
The polishing apparatus may also be an apparatus having another configuration that performs polishing by relatively sliding the processing surface of the processing lens and the processing surface of the tool plate.
(Supplementary Note 1) In a holding tool for holding and polishing an optical element such as a lens, the optical element is in contact with one surface of the optical element in a state in which the optical element can be inserted and removed, and the optical element in a state of being inserted into the frame part. An optical element holder, wherein the optical element holding surface for holding the element is formed so that the contact surface of the optical element is in a mid-contact state.
(Supplementary Note 2) A holding tool for holding and polishing an optical element such as a lens, a frame part in which the optical element can be inserted and removed, and a pedestal provided with a step in a central part for holding the optical element; An optical element holder comprising a sheet-like elastic body on the optical element holding surface side of the pedestal.
(Supplementary note 3) The optical element holder according to supplementary note 2, wherein a step provided in a central portion of the pedestal for holding the optical element is detachable.
1 被加工レンズ
1a レンズ当接面
1b 被加工面
2 レンズ受け材
2a レンズ受け面
2b 中心部
4 ベース
5 台座
5a レンズ受け面
6 突起段差
7 突起部材
7a 段差
7b ネジ部
10 工具皿
10a 加工作用面
11 光学素子保持具
12 ベース
13 台座
14 レンズ受け材
14a 弾性体シート
14b Oリング
15 被加工レンズ
15a レンズ受け面
15b 被加工面
15c 接触面
15d 外周エッジ部
16 座グリ
20 砥石
104 球心
106 制御装置
107 砥石揺動制御部
108 インバータ
112 揺動モータ
114 歯車
115 砥石スピンドル
116 砥石モータ
120 シリンダ
120a ロッド
121 保持具
122 上軸
150 装置本体
151 揺動板
161 砥石用揺動体
161b 下辺部
162 両側板
163 軸受
164 支持アーム
171 ハウジング
180 固定突出体
181 円弧状揺動ギヤ部
190 X軸揺動モータ
191 軸受箱体
H1 ワーク保持具
H2 ワーク保持具
H3 ワーク保持具
K 研磨装置
M1 変形
M2 変形
R1 被加工レンズ1のレンズ当接面1aの曲率
R2 レンズ受け材2のレンズ受け面2aの曲率
DESCRIPTION OF SYMBOLS 1 Processed lens 1a Lens contact surface 1b Processed surface 2 Lens receiving material 2a Lens receiving surface 2b Center part 4 Base 5 Base 5a Lens receiving surface 6 Projection step 7 Projection member 7a Step 7b Screw part 10 Tool plate 10a Processing surface DESCRIPTION OF SYMBOLS 11 Optical element holder 12 Base 13 Base 14 Lens receiving material 14a Elastic sheet 14b O-ring 15 Processed lens 15a Lens receiving surface 15b Processed surface 15c Contact surface 15d Outer peripheral edge part 16 Spot facing 20 Grinding stone 104 Ball center 106 Control device 107 Grinding wheel rocking control unit 108 Inverter 112 Swing motor 114 Gear 115 Grinding wheel spindle 116 Grinding wheel motor 120 Cylinder 120a Rod 121 Holder 122 Upper shaft 150 Device main body 151 Swing plate 161 Wobbling rocking body 161b Lower side portion 162 Both side plates 163 Bearing 164 Support Arm 171 How 180 Fixed projection 181 Arc-shaped swing gear 190 X-axis swing motor 191 Bearing box H1 Work holder H2 Work holder H3 Work holder K Polishing device M1 Deformation M2 Deformation R1 Lens contact of lens 1 to be processed Curvature R2 of surface 1a Curvature of lens receiving surface 2a of lens receiving material 2
Claims (6)
前記台座部における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接する形状を呈し、
前記ワークの前記被保持面の第1曲率半径よりも、前記台座部の前記ワーク保持面の第2曲率半径を大きくすることで、前記台座部における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接するようにしたことを特徴とするワーク保持具。 A workpiece holder including a pedestal portion having a workpiece holding surface that abuts a held surface opposite to a workpiece surface of the workpiece, and a frame portion that holds an outer peripheral portion of the workpiece,
Central portion of the workpiece holding surface in the base portion is selectively caused a abutting shape with respect to the held surface of the workpiece,
By making the second radius of curvature of the workpiece holding surface of the pedestal portion larger than the first radius of curvature of the held surface of the workpiece, the central portion of the workpiece holding surface in the pedestal portion is A work holder that selectively contacts the held surface .
前記台座部の前記中央部に段差部を形成することにより、前記台座部における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接するようにしたことを特徴とするワーク保持具。 The workpiece holder according to claim 1,
By forming a stepped portion at the central portion of the pedestal portion, the central portion of the work holding surface of the pedestal portion is selectively brought into contact with the held surface of the work. Work holding tool.
前記段差部が前記台座部に対して着脱可能に装着されていることを特徴とするワーク保持具。 The workpiece holder according to claim 2 ,
The workpiece holder, wherein the step portion is detachably attached to the pedestal portion.
前記台座部の前記ワーク保持面にシート状弾性体が装着されていることを特徴とするワーク保持具。 In the workpiece holder according to any one of claims 1 to 3 ,
A workpiece holder, wherein a sheet-like elastic body is mounted on the workpiece holding surface of the pedestal portion.
前記ワーク保持具における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接する状態で前記ワークを前記ワーク保持具に保持する第1工程と、
前記ワーク保持具に保持された前記ワークに対して相対的に前記加工工具を押圧して摺動させることで加工を行う第2工程と、
を含み、
前記第1工程では、前記ワークの前記被保持面の第1曲率半径と前記ワーク保持具における前記ワーク保持面の第2曲率半径との相違により、前記ワーク保持具における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接する状態で前記ワークを前記ワーク保持具に保持することを特徴とするワーク加工方法。 A workpiece machining method of holding a workpiece holding surface opposite to a workpiece machining surface with a workpiece holding surface of a workpiece holder and performing machining by sliding a machining tool relative to the workpiece surface,
A first step of holding the workpiece on the workpiece holder in a state in which a center portion of the workpiece holding surface of the workpiece holder is selectively in contact with the held surface of the workpiece;
A second step of performing machining by pressing and sliding the machining tool relative to the workpiece held by the workpiece holder;
Only including,
In the first step, a center portion of the work holding surface of the work holder is determined by a difference between a first radius of curvature of the held surface of the work and a second radius of curvature of the work holding surface of the work holder. However, the workpiece | work processing method characterized by hold | maintaining the said workpiece | work in the said workpiece holder in the state which contact | abuts selectively with respect to the said to-be-held surface of the said workpiece | work .
前記第1工程では、前記ワーク保持具における前記ワーク保持面の中央部に段差部を突設することで、前記ワーク保持具における前記ワーク保持面の中央部が、前記ワークの前記被保持面に対して選択的に当接する状態で前記ワークを前記ワーク保持具に保持することを特徴とするワーク加工方法。 In the workpiece processing method according to claim 5 ,
In the first step, by providing a stepped portion at the center of the workpiece holding surface of the workpiece holder, the center of the workpiece holding surface of the workpiece holder is brought into contact with the held surface of the workpiece. A workpiece machining method, wherein the workpiece is held by the workpiece holder in a state of being selectively in contact with the workpiece holder.
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EP0169931A1 (en) * | 1984-08-03 | 1986-02-05 | Wilhelm Loh Wetzlar Optikmaschinen GmbH & Co. KG | Supporting device for optical lenses and other components during grinding and polishing |
JPH063557U (en) * | 1991-04-05 | 1994-01-18 | オリンパス光学工業株式会社 | Lens holder |
GB2275633B (en) * | 1993-03-05 | 1996-07-10 | Europtica Int Ltd | Lens blocking |
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