JP2005533254A5

JP2005533254A5 -

Info

Publication number: JP2005533254A5
Application number: JP2004521866A
Authority: JP
Filing date: 2003-07-15
Publication date: 2006-08-17

Claims

An assembly for electrically connecting the part under test to a test machine for testing an electrical circuit on the part under test,
A plurality of first conductors, a plurality of first terminals each connected to each of the first conductors, and each connected to each of the first conductors and electrically connected to the component under test A contactor assembly including a resilient interconnection element having an end in contact with the contactor and a support component for supporting the contactor assembly;
An external interface component on the support component and including an electrical connector for making an electrical connection to the test machine;
A flexible substrate;
A flexible second conductor on the flexible substrate and electrically connected to the external interface component;
A plurality of second terminals on the flexible substrate and electrically connected to the flexible second conductor;
A plurality of conductive bumps disposed between the first terminal and the second terminal;
A clamp including first and second clamping members for pressing the first terminal and the second terminal toward each other to deform the conductive bump;
An assembly comprising:

A test assembly for electrically connecting the part under test to a test machine for testing an electrical circuit on the part under test,
A first electrical conductor, a plurality of first terminals connected to a first end of the first electrical conductor, and a plurality of second terminals connected to a second end of the first electrical conductor. A contactor assembly including a terminal and a resilient interconnection element that electrically interconnects the first terminal to the part under test;
A plate component supporting the contactor assembly, an interface component comprising a plurality of external electrical connectors on the plate component and electrically connected to the test machine, and a first connected to the interface component A flexible substrate having a second end opposite to the first end, a probe assembly including a flexible conductor on the flexible substrate;
With
The flexible conductor has a first portion connected to the interface component and a terminal portion at a second end of the flexible base, and the terminal portion is aligned with the second terminal. Including a plurality of third terminals;
The test assembly further includes
A plurality of electrical contactor bumps between the second terminal and the third terminal;
A clamping mechanism comprising a first clamping member and a second clamping member;
With
The clamping members are pressed to apply a clamping force that moves the second and third terminals to deform the contactor bumps between the terminals.
A test assembly characterized by that.

A unit for interfacing the device under test and a test machine to test an electrical circuit on the device under test;
A support component that supports the contactor assembly and is in electrical contact with the component under test;
An external interface component on the support component and including a plurality of electrical connectors for electrical connection to the test machine;
A flexible substrate having a first end electrically connected to the interface component and a second end opposite to the first end;
A flexible conductor on the flexible substrate;
With
The flexible conductor has a first portion electrically connected to the interface component and a terminal portion at a second end of the flexible base, and the terminal portion includes a plurality of terminals, and the flexible conductor Further includes a plurality of conductive bumps connected to each of the terminals, the terminal portion being connectable to the contactor assembly for transmitting electrical signals between the contactor assembly and the test machine. To communicate,
A unit characterized by that.

A contactor assembly for electrically connecting the device under test to a test machine for testing the device under test comprising:
Test structure and
A plurality of electrical terminals on the test structure;
A plurality of resilient interconnection elements each having a first end connected to the electrical terminal and a free end opposite the first end and connected to the part under test When,
A plurality of electrical contact elements on the test structure remote from the electrical terminals;
An electrical path that bridges each electrical terminal with a respective one of the electrical contact elements;
With
Each electrical contact element defines a flat surface that supports the corresponding contactor when the corresponding contactor element deforms under clamping force;
A contactor assembly characterized by that.

A contactor assembly for use in testing an electrical circuit comprising:
An electrical contactor including a contactor base and a plurality of electrical terminals on the contactor base;
An interposer including an interposer substrate having first and second sides and a plurality of first and second resilient interconnection elements extending from the first and second sides of the interposer substrate, respectively.
With
The interposer is positioned at a predetermined position relative to the electrical contactor, where the interposer base is relative to the contactor base such that the interposer base elastically deforms the first resilient interconnection element. Moving each first resilient interconnection element in electrical contact with an electrical terminal of the electrical contactor;
The contactor assembly further includes:
A holding part having a first position fixed to the electric contactor and a second position for contacting the interposer and holding the interposer in a predetermined position with respect to the electric contactor;
A contactor assembly comprising:

A test probe assembly for testing an electrical circuit comprising:
A frame member having a first member;
A contactor assembly secured to the first member;
With
The contactor assembly includes:
An electrical contactor including a contactor base and a plurality of electrical terminals on the contactor base;
An interposer including a conductive interposer substrate having first and second sides and a plurality of first and second resilient interconnecting elements extending from the first and second sides, respectively.
Including
The interposer is positioned at a predetermined position with respect to the electrical connector, wherein each first resilient interconnection element is in electrical contact with an electrical terminal of the electrical contactor and the second resilient The electrical interconnection element is in electrical contact with the substrate on which the electrical circuit under test is formed;
The contactor assembly further includes:
A holding part having a first position fixed to the electric contactor and a second position fixed to the interposer to hold the interposer in a predetermined position with respect to the electric contactor;
A test probe assembly comprising:

An alignment machine for aligning an electrical contactor with an interposer,
A frame that can be positioned on the electrical contactor;
a carriage attached to the frame so as to be displaced in the xy plane and in a z direction perpendicular to the xy plane;
A displacement mechanism on the frame and operable to displace the carriage in the xy plane and in the z direction;
A mounting arrangement on the carriage for mounting the interposer on the carriage;
An alignment machine characterized by comprising:

A method of assembling a test contactor,
Aligning the interposer and the electrical contactor,
The resilient interconnecting element of the interposer is elastically deformed to bring an electrical contact into contact with a corresponding electrical terminal on the electrical contactor;
The method further comprises:
Securing the aligned interposer and electrical contactor together;
A method comprising the steps of:

A method of assembling a test contactor for testing an integrated circuit comprising:
Sitting the interposer in the mount for it;
Coupling the mount to an alignment machine;
The alignment to displace the mount relative to the electrical contactor to an aligned position such that the resilient interconnecting element of the interposer contacts a corresponding electrical terminal on the electrical contactor and elastically deforms. Adjusting machine settings;
Securing the mount to the electrical contactor in the aligned position;
A method comprising the steps of:

A method of assembling a test contactor,
Aligning the interposer and the electrical contactor such that a first resilient interconnection element of the interposer contacts and flexibly deforms a corresponding electrical terminal on the electrical contactor;
Securing the aligned interposer and the electrical contactor together to form a subassembly;
Moving the subassembly toward a test substrate to electrically contact a second resilient interconnection element on the interposer to the test substrate;
Connecting the electrical contactor to a test probe circuit;
A method comprising the steps of:

A method of assembling a test contactor,
Positioning the interposer in an xy plane on the electrical contactor at a first position where respective reference markings on the interposer and electrical contactor are aligned;
Displacing the interposer in the z-direction to a second position where each of the plurality of resilient interconnection elements of the interposer is in electrical contact with each of a plurality of electrical terminals on the electrical contactor;
Displacing the interposer in the z-direction to a third position where each resilient interconnection element of the interposer is compressed;
A method comprising the steps of: