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IT1276331B1 - Perfezionamento nei processi di deposizione di strati di barriera trasparente, ossidati parzialmente in modo controllato - Google Patents

Perfezionamento nei processi di deposizione di strati di barriera trasparente, ossidati parzialmente in modo controllato

Info

Publication number
IT1276331B1
IT1276331B1 IT94RM000626A ITRM940626A IT1276331B1 IT 1276331 B1 IT1276331 B1 IT 1276331B1 IT 94RM000626 A IT94RM000626 A IT 94RM000626A IT RM940626 A ITRM940626 A IT RM940626A IT 1276331 B1 IT1276331 B1 IT 1276331B1
Authority
IT
Italy
Prior art keywords
deposition
improvement
processes
barrier layers
partially oxidized
Prior art date
Application number
IT94RM000626A
Other languages
English (en)
Inventor
Carlo Misiano
Enrico Simonetti
Francesco Staffetti
Original Assignee
Cetev Cent Tecnolog Vuoto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cetev Cent Tecnolog Vuoto filed Critical Cetev Cent Tecnolog Vuoto
Priority to IT94RM000626A priority Critical patent/IT1276331B1/it
Publication of ITRM940626A0 publication Critical patent/ITRM940626A0/it
Priority to DE69526167T priority patent/DE69526167D1/de
Priority to EP95830275A priority patent/EP0704547B1/en
Priority to JP7253239A priority patent/JPH08197676A/ja
Publication of ITRM940626A1 publication Critical patent/ITRM940626A1/it
Priority to US08/640,095 priority patent/US5704980A/en
Priority to US08/937,314 priority patent/US5900271A/en
Application granted granted Critical
Publication of IT1276331B1 publication Critical patent/IT1276331B1/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
IT94RM000626A 1994-09-29 1994-09-29 Perfezionamento nei processi di deposizione di strati di barriera trasparente, ossidati parzialmente in modo controllato IT1276331B1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT94RM000626A IT1276331B1 (it) 1994-09-29 1994-09-29 Perfezionamento nei processi di deposizione di strati di barriera trasparente, ossidati parzialmente in modo controllato
DE69526167T DE69526167D1 (de) 1994-09-29 1995-06-30 Verfahren zum Herstellen durchsichtiger Sperrschichten
EP95830275A EP0704547B1 (en) 1994-09-29 1995-06-30 Deposition process for transparent barrier layer
JP7253239A JPH08197676A (ja) 1994-09-29 1995-09-29 障壁層を有するプラスチックフィルムの製造方法および装置
US08/640,095 US5704980A (en) 1994-09-29 1996-04-30 Method of and apparatus for making plastic film with barrier layers
US08/937,314 US5900271A (en) 1994-09-29 1997-09-22 Method for making plastic film with barrier layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT94RM000626A IT1276331B1 (it) 1994-09-29 1994-09-29 Perfezionamento nei processi di deposizione di strati di barriera trasparente, ossidati parzialmente in modo controllato

Publications (3)

Publication Number Publication Date
ITRM940626A0 ITRM940626A0 (it) 1994-09-29
ITRM940626A1 ITRM940626A1 (it) 1996-03-29
IT1276331B1 true IT1276331B1 (it) 1997-10-28

Family

ID=11402749

Family Applications (1)

Application Number Title Priority Date Filing Date
IT94RM000626A IT1276331B1 (it) 1994-09-29 1994-09-29 Perfezionamento nei processi di deposizione di strati di barriera trasparente, ossidati parzialmente in modo controllato

Country Status (5)

Country Link
US (2) US5704980A (it)
EP (1) EP0704547B1 (it)
JP (1) JPH08197676A (it)
DE (1) DE69526167D1 (it)
IT (1) IT1276331B1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4261680B2 (ja) * 1999-05-07 2009-04-30 株式会社クレハ 防湿性多層フィルム
DE60040851D1 (de) * 1999-07-21 2009-01-02 Kao Corp N und einrichtung zu dessen herstellung
TW523943B (en) * 2001-12-26 2003-03-11 Ritdisplay Corp Deposition apparatus of organic light emitting device
AU2003207950A1 (en) * 2002-01-07 2003-07-24 Hanita Coatings Translucent barrier static shielding film
US6811815B2 (en) 2002-06-14 2004-11-02 Avery Dennison Corporation Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
EP1591750B1 (de) * 2004-04-26 2016-04-13 Applied Materials GmbH & Co. KG Verfahren und Vorrichtung zur Regelung der Dicke einer Beschichtung auf einem in seiner Längsrichtung bewegten Band
US20070160786A1 (en) * 2004-07-04 2007-07-12 Gila Levin Semi-transparent shielding bag formed by translucent barrier statis shielding film
US9751254B2 (en) * 2008-10-09 2017-09-05 Bobst Manchester Ltd Apparatus for treating substrates
EP3500691A1 (en) * 2016-08-16 2019-06-26 Flisom AG Deposition system
JP2018171726A (ja) * 2017-03-31 2018-11-08 東レフィルム加工株式会社 アルミニウム蒸着フィルム積層体
JP6642605B2 (ja) * 2018-03-05 2020-02-05 大日本印刷株式会社 真空断熱材用外包材、真空断熱材、および真空断熱材付き物品
WO2022233992A1 (en) 2021-05-06 2022-11-10 Basf Coatings Gmbh Multilayer barrier film, its manufacture and use in photovoltaic applications
TW202432360A (zh) 2022-12-14 2024-08-16 德商巴斯夫塗料有限責任公司 經多層障壁膜塗覆之聚合物基板、其製造及其在電子裝置中之用途

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4197337A (en) * 1978-12-22 1980-04-08 Mobil Oil Corporation Optical transformation of metallized polymeric film material
US4364995A (en) * 1981-02-04 1982-12-21 Minnesota Mining And Manufacturing Company Metal/metal oxide coatings
EP0082001A1 (en) * 1981-12-16 1983-06-22 General Engineering Radcliffe 1979 Limited Apparatus for and a method of metallising a length of material
JPS6082660A (ja) * 1983-10-08 1985-05-10 Konishiroku Photo Ind Co Ltd 酸化物層の形成装置
GB8928706D0 (en) * 1989-12-20 1990-02-28 Bowater Packaging Ltd Transparent barrier packaging materials
DE4308632B4 (de) * 1993-03-18 2007-10-04 Applied Materials Gmbh & Co. Kg Verfahren und Vorrichtung zum Nachbehandeln von Aluminium-beschichteten Kunststoff-Folien
GB9318143D0 (en) * 1993-09-01 1993-10-20 Bowater Packaging Ltd Microwave interactive barrier films

Also Published As

Publication number Publication date
JPH08197676A (ja) 1996-08-06
EP0704547A1 (en) 1996-04-03
DE69526167D1 (de) 2002-05-08
US5900271A (en) 1999-05-04
US5704980A (en) 1998-01-06
ITRM940626A0 (it) 1994-09-29
ITRM940626A1 (it) 1996-03-29
EP0704547B1 (en) 2002-04-03

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Effective date: 19970404