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FI20105168A - Parannettu mikromekaaninen resonaattori - Google Patents

Parannettu mikromekaaninen resonaattori Download PDF

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Publication number
FI20105168A
FI20105168A FI20105168A FI20105168A FI20105168A FI 20105168 A FI20105168 A FI 20105168A FI 20105168 A FI20105168 A FI 20105168A FI 20105168 A FI20105168 A FI 20105168A FI 20105168 A FI20105168 A FI 20105168A
Authority
FI
Finland
Prior art keywords
micromechanical resonator
improved micromechanical
improved
resonator
micromechanical
Prior art date
Application number
FI20105168A
Other languages
English (en)
Swedish (sv)
Other versions
FI124103B (fi
FI20105168A0 (fi
Inventor
Ville Kaajakari
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of FI20105168A0 publication Critical patent/FI20105168A0/fi
Priority to FI20105168A priority Critical patent/FI124103B/fi
Priority to KR1020127024552A priority patent/KR101738869B1/ko
Priority to CN201180010540.2A priority patent/CN102762954B/zh
Priority to EP11744325.9A priority patent/EP2539999B1/en
Priority to JP2012553363A priority patent/JP5873811B2/ja
Priority to PCT/FI2011/050152 priority patent/WO2011101547A1/en
Priority to TW100105580A priority patent/TWI511447B/zh
Priority to US13/032,106 priority patent/US8723611B2/en
Publication of FI20105168A publication Critical patent/FI20105168A/fi
Application granted granted Critical
Publication of FI124103B publication Critical patent/FI124103B/fi

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2484—Single-Ended Tuning Fork resonators with two fork tines, e.g. Y-beam cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2494—H-shaped, i.e. two tuning forks with common base
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
FI20105168A 2010-02-22 2010-02-22 Parannettu mikromekaaninen resonaattori FI124103B (fi)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20105168A FI124103B (fi) 2010-02-22 2010-02-22 Parannettu mikromekaaninen resonaattori
JP2012553363A JP5873811B2 (ja) 2010-02-22 2011-02-18 改良された微小機械共振器
CN201180010540.2A CN102762954B (zh) 2010-02-22 2011-02-18 改进的微机械共振器
EP11744325.9A EP2539999B1 (en) 2010-02-22 2011-02-18 Improved micromechanical resonator
KR1020127024552A KR101738869B1 (ko) 2010-02-22 2011-02-18 개선된 마이크로기계 공진기
PCT/FI2011/050152 WO2011101547A1 (en) 2010-02-22 2011-02-18 Improved micromechanical resonator
TW100105580A TWI511447B (zh) 2010-02-22 2011-02-21 改進的微機械共振器
US13/032,106 US8723611B2 (en) 2010-02-22 2011-02-22 Micromechanical resonator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20105168 2010-02-22
FI20105168A FI124103B (fi) 2010-02-22 2010-02-22 Parannettu mikromekaaninen resonaattori

Publications (3)

Publication Number Publication Date
FI20105168A0 FI20105168A0 (fi) 2010-02-22
FI20105168A true FI20105168A (fi) 2011-08-23
FI124103B FI124103B (fi) 2014-03-14

Family

ID=41727715

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20105168A FI124103B (fi) 2010-02-22 2010-02-22 Parannettu mikromekaaninen resonaattori

Country Status (8)

Country Link
US (1) US8723611B2 (fi)
EP (1) EP2539999B1 (fi)
JP (1) JP5873811B2 (fi)
KR (1) KR101738869B1 (fi)
CN (1) CN102762954B (fi)
FI (1) FI124103B (fi)
TW (1) TWI511447B (fi)
WO (1) WO2011101547A1 (fi)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9300227B2 (en) 2013-06-05 2016-03-29 Silicon Laboratories Inc. Monolithic body MEMS devices
CN104370272B (zh) * 2014-10-30 2016-07-06 无锡微奥科技有限公司 一种mems自对准高低梳齿及其制造方法
CN106932608B (zh) * 2015-12-25 2020-02-18 上海矽睿科技有限公司 加速度传感单元以及加速度计
US9966966B2 (en) 2016-01-20 2018-05-08 Uchicago Argonne, Llc Nonlinearity induced synchronization enhancement in mechanical oscillators
US10812046B2 (en) * 2018-02-07 2020-10-20 Murata Manufacturing Co., Ltd. Micromechanical resonator having reduced size

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1009018A (en) * 1911-08-15 1911-11-14 Bancroft G Braine Game-board.
US3727151A (en) * 1972-04-17 1973-04-10 Bulova Watch Co Inc Integrated circuit for electronic timepieces
GB1441192A (en) * 1973-03-29 1976-06-30 Seiko Instr & Electronics Oscillator
FR2452714A1 (fr) * 1979-03-30 1980-10-24 Thomson Csf Accelerometre a ondes elastiques
JPS6316170Y2 (fi) * 1980-06-11 1988-05-09
JPH0540224A (ja) * 1990-07-26 1993-02-19 Fuji Photo Film Co Ltd 走査型顕微鏡
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
JPH11271066A (ja) * 1998-01-21 1999-10-05 Denso Corp 角速度センサ
DE60037132T2 (de) * 2000-12-21 2008-09-11 Eta Sa Manufacture Horlogère Suisse Zeitbezug mit einem integrierten mikromechanischen Stimmgabelresonator
JP4219737B2 (ja) * 2003-05-30 2009-02-04 リバーエレテック株式会社 圧電振動子
US6874363B1 (en) * 2003-10-31 2005-04-05 Honeywell International, Inc. Trapped charge field bias vibrating beam accelerometer
US7043985B2 (en) * 2004-01-13 2006-05-16 Georgia Tech Research Corporation High-resolution in-plane tuning fork gyroscope and methods of fabrication
US7102467B2 (en) * 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
ATE421799T1 (de) * 2005-06-09 2009-02-15 Eta Sa Mft Horlogere Suisse Kompakter piezoelektrischer resonator
ATE390759T1 (de) * 2005-06-09 2008-04-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit kleinen abmessungen
US20090160581A1 (en) * 2007-12-21 2009-06-25 Paul Merritt Hagelin Temperature Stable MEMS Resonator
JP4538503B2 (ja) * 2008-01-18 2010-09-08 Ｏｋｉセミコンダクタ株式会社 共振器
JP5662160B2 (ja) * 2008-01-24 2015-01-28 ムラタ エレクトロニクス オサケユキチュア 微小機械式共振器

Also Published As

Publication number Publication date
EP2539999A4 (en) 2018-01-10
FI124103B (fi) 2014-03-14
JP5873811B2 (ja) 2016-03-01
CN102762954B (zh) 2015-11-25
TW201203856A (en) 2012-01-16
US20110210800A1 (en) 2011-09-01
KR101738869B1 (ko) 2017-05-23
JP2013520645A (ja) 2013-06-06
WO2011101547A1 (en) 2011-08-25
TWI511447B (zh) 2015-12-01
US8723611B2 (en) 2014-05-13
KR20130006629A (ko) 2013-01-17
CN102762954A (zh) 2012-10-31
EP2539999B1 (en) 2019-06-19
FI20105168A0 (fi) 2010-02-22
EP2539999A1 (en) 2013-01-02

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