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IT1401001B1 - Accelerometro capacitivo triassiale microelettromeccanico - Google Patents

Accelerometro capacitivo triassiale microelettromeccanico

Info

Publication number
IT1401001B1
IT1401001B1 ITTO2010A000511A ITTO20100511A IT1401001B1 IT 1401001 B1 IT1401001 B1 IT 1401001B1 IT TO2010A000511 A ITTO2010A000511 A IT TO2010A000511A IT TO20100511 A ITTO20100511 A IT TO20100511A IT 1401001 B1 IT1401001 B1 IT 1401001B1
Authority
IT
Italy
Prior art keywords
triassial
microelettromechanical
accelerometer
triassial accelerometer
microelettromechanical triassial
Prior art date
Application number
ITTO2010A000511A
Other languages
English (en)
Inventor
Masi Biagio De
Barbara Simoni
Attilio Frangi
Original Assignee
Milano Politecnico
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Milano Politecnico, St Microelectronics Srl filed Critical Milano Politecnico
Priority to ITTO2010A000511A priority Critical patent/IT1401001B1/it
Priority to US13/161,345 priority patent/US8863575B2/en
Publication of ITTO20100511A1 publication Critical patent/ITTO20100511A1/it
Application granted granted Critical
Publication of IT1401001B1 publication Critical patent/IT1401001B1/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Steroid Compounds (AREA)
ITTO2010A000511A 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico IT1401001B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO2010A000511A IT1401001B1 (it) 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico
US13/161,345 US8863575B2 (en) 2010-06-15 2011-06-15 Microelectromechanical three-axis capacitive accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A000511A IT1401001B1 (it) 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico

Publications (2)

Publication Number Publication Date
ITTO20100511A1 ITTO20100511A1 (it) 2011-12-16
IT1401001B1 true IT1401001B1 (it) 2013-07-05

Family

ID=43587119

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A000511A IT1401001B1 (it) 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico

Country Status (2)

Country Link
US (1) US8863575B2 (it)
IT (1) IT1401001B1 (it)

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US20120131994A1 (en) * 2010-03-25 2012-05-31 Yona Ben-David Retainer structure for vehicle testing platform, use of the retainer, and specialized vehicle testing platform to test an electronic stability program of a vehicle
US8555719B2 (en) 2011-01-24 2013-10-15 Freescale Semiconductor, Inc. MEMS sensor with folded torsion springs
DE102012200740B4 (de) * 2011-10-27 2024-03-21 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
US8978475B2 (en) * 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
JP5799929B2 (ja) * 2012-10-02 2015-10-28 株式会社村田製作所 加速度センサ
JP6070113B2 (ja) * 2012-11-27 2017-02-01 株式会社村田製作所 加速度センサ
JP6070112B2 (ja) * 2012-11-27 2017-02-01 株式会社村田製作所 加速度センサ
US9316666B2 (en) * 2012-11-27 2016-04-19 Murata Manufacturing Co., Ltd. Acceleration sensor having a capacitor array located in the center of an inertial mass
US9106575B2 (en) * 2013-01-31 2015-08-11 Apple Inc. Multiplexing multiple serial interfaces
KR20140123258A (ko) * 2013-04-12 2014-10-22 삼성전기주식회사 3축 가속도 센서의 가속도 측정 회로
FI20135714L (fi) * 2013-06-28 2014-12-29 Murata Manufacturing Co Kapasitiivinen mikromekaaninen kiihtyvyysanturi
US20150268269A1 (en) * 2014-03-20 2015-09-24 Freescale Semiconductor, Inc. Sensor with combined sense elements for multiple axis sensing
DE102014211054A1 (de) * 2014-06-10 2015-12-17 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
US10241129B1 (en) * 2014-08-01 2019-03-26 Faez Ba-Tis MEMS piston-tube based capacitive accelerometer
US9733269B2 (en) * 2014-11-06 2017-08-15 Richtek Technology Corporation Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame
US10436812B2 (en) 2015-03-20 2019-10-08 Nxp Usa, Inc. Micro-electro-mechanical acceleration sensor device
US9720012B2 (en) * 2015-07-21 2017-08-01 Nxp Usa, Inc. Multi-axis inertial sensor with dual mass and integrated damping structure
RU2018119485A (ru) * 2015-10-30 2019-12-02 Ион Джиофизикал Корпорейшн Океанические донные сейсмические системы
US10012671B2 (en) 2015-11-03 2018-07-03 Richtek Technology Corporation Micro-electro-mechanical system device
US10393770B2 (en) * 2016-04-28 2019-08-27 Semiconductor Components Industries, Llc Multi-axis accelerometer with reduced stress sensitivity
KR101915954B1 (ko) * 2016-06-29 2018-11-08 주식회사 신성씨앤티 멤스 기반의 3축 가속도 센서
US10122392B2 (en) * 2016-08-18 2018-11-06 Advanced Micro Devices, Inc. Active equalizing negative resistance amplifier for bi-directional bandwidth extension
CN107782914B (zh) * 2016-08-27 2021-07-09 深迪半导体(绍兴)有限公司 一种三轴加速计
US10732196B2 (en) * 2017-11-30 2020-08-04 Invensense, Inc. Asymmetric out-of-plane accelerometer
CN112955752A (zh) 2018-09-13 2021-06-11 离子地球物理学公司 多轴线、单质量加速度计
US11733263B2 (en) * 2018-09-21 2023-08-22 Analog Devices, Inc. 3-axis accelerometer
RU204922U1 (ru) * 2019-03-19 2021-06-17 Российская Федерация, От Имени Которой Выступает Министерство Промышленности И Торговли Российской Федерации Чувствительный элемент трехосевого микромеханического акселерометра
CN110308308B (zh) * 2019-06-27 2021-07-13 深迪半导体(绍兴)有限公司 一种带补偿电极的面内平动式加速度计
EP4123313B1 (en) * 2021-07-23 2024-11-13 STMicroelectronics S.r.l. Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer
EP4131256A1 (en) * 2021-08-06 2023-02-08 STMicroelectronics S.r.l. Voice recognition system and method using accelerometers for sensing bone conduction
CN114487480A (zh) * 2022-01-14 2022-05-13 瑞声开泰科技(武汉)有限公司 微机电系统加速度计

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DE69938658D1 (de) 1999-09-10 2008-06-19 St Microelectronics Srl Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
CN101069099A (zh) * 2003-02-24 2007-11-07 佛罗里达大学 微机械加工的集成单片三轴加速度计
US6845670B1 (en) * 2003-07-08 2005-01-25 Freescale Semiconductor, Inc. Single proof mass, 3 axis MEMS transducer
US6935175B2 (en) * 2003-11-20 2005-08-30 Honeywell International, Inc. Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
US7140250B2 (en) * 2005-02-18 2006-11-28 Honeywell International Inc. MEMS teeter-totter accelerometer having reduced non-linearty
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DE602006010534D1 (de) * 2006-07-14 2009-12-31 St Microelectronics Srl Mikro-Elektromechanischer Inertialsensor, insbesondere für Freifall-Anwendungen
US7487661B2 (en) * 2006-10-11 2009-02-10 Freescale Semiconductor, Inc. Sensor having free fall self-test capability and method therefor
DE102006058747A1 (de) * 2006-12-12 2008-06-19 Robert Bosch Gmbh Mikromechanischer z-Sensor
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
DE102008001442A1 (de) * 2008-04-29 2009-11-05 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements
DE102008041327B4 (de) * 2008-08-19 2021-12-30 Robert Bosch Gmbh Dreiachsiger Beschleunigungssensor
US8020443B2 (en) * 2008-10-30 2011-09-20 Freescale Semiconductor, Inc. Transducer with decoupled sensing in mutually orthogonal directions
DE102008043788A1 (de) * 2008-11-17 2010-05-20 Robert Bosch Gmbh Mikromechanisches Bauelement
US8205498B2 (en) * 2008-11-18 2012-06-26 Industrial Technology Research Institute Multi-axis capacitive accelerometer

Also Published As

Publication number Publication date
ITTO20100511A1 (it) 2011-12-16
US20120000287A1 (en) 2012-01-05
US8863575B2 (en) 2014-10-21

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