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EP1657737A3 - Procedure for the production of a multipolar electrode arrangement as well as a multipolar electrode arrangement - Google Patents

Procedure for the production of a multipolar electrode arrangement as well as a multipolar electrode arrangement Download PDF

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Publication number
EP1657737A3
EP1657737A3 EP05023606A EP05023606A EP1657737A3 EP 1657737 A3 EP1657737 A3 EP 1657737A3 EP 05023606 A EP05023606 A EP 05023606A EP 05023606 A EP05023606 A EP 05023606A EP 1657737 A3 EP1657737 A3 EP 1657737A3
Authority
EP
European Patent Office
Prior art keywords
electrode arrangement
electrodes
electrode
carrier elements
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05023606A
Other languages
German (de)
French (fr)
Other versions
EP1657737B1 (en
EP1657737A2 (en
Inventor
Bernd Laser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacutec Hochvakuum- & Prazisionstechnik GmbH
Original Assignee
Vacutec Hochvakuum- & Prazisionstechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vacutec Hochvakuum- & Prazisionstechnik GmbH filed Critical Vacutec Hochvakuum- & Prazisionstechnik GmbH
Publication of EP1657737A2 publication Critical patent/EP1657737A2/en
Publication of EP1657737A3 publication Critical patent/EP1657737A3/en
Application granted granted Critical
Publication of EP1657737B1 publication Critical patent/EP1657737B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/068—Mounting, supporting, spacing, or insulating electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/4255—Device types with particular constructional features

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Herstellung einer mehrpoligen Elektrodenanordnung 1 zur Fokussierung oder Massenfilterung eines Strahls geladener Teilchen, wobei die Anordnung eine Mehrzahl langgestreckter, parallel zu einer Achse angeordneter Elektroden 2 aufweist, wobei das Verfahren folgende Schritte umfasst: a) Befestigen mehrerer rundstabförmiger Elektrodenrohlinge 9 - jedoch nur eines Teils der für die Elektrodenanordnung 1 vorgesehenen Gesamtanzahl von Elektroden 2 - an einem oder mehreren Trägerelementen 4, b) gleichzeitiges Bearbeiten von Endabschnitten 6 des bzw. der Trägerelemente 4 zusammen mit den an diesem bzw. diesen Trägerelementen befestigten Elektrodenrohlingen 9 in einem Arbeitsgang derart, dass jeder Elektrodenrohling 9 durch die Bearbeitung zu einer Elektrode 2 wird, die einen Querschnitt mit einem kreisförmigen Abschnitt KA und einem nicht-kreisförmigen, insbesondere im wesentlichen hyperbelförmigen, Abschnitt HA aufweist und am Ende dieser gleichzeitigen Bearbeitung des bzw. jedes der Trägerelemente 4 zwei unterschiedlich geformte, jedoch in ihrer Form aneinander angepasste Endabschnitte aufweist. Die Schritte a) und b) werden mehrfach und zwar so oft durchgeführt, bis die für die Elektrodenanordnung 1 vorgesehene Gesamtanzahl von Elektroden 2 bereitgestellt ist, wobei im Schritt a) jeweils ein bzw. mehrere eigene Trägerelemente 4 zur Befestigung verwendet werden. Die Trägerelemente 4 nebst daran befestigten Elektroden 2 werden dann derart zusammengefügt, dass mehrere Trägerelemente 4 einen bzw. mehrere geschlossene und die Elektroden umschließende mehrteilige Tragkörper 5 bilden.The invention relates to a method for producing a multi-pole electrode arrangement 1 for focusing or mass filtering a charged particle beam, the arrangement comprising a plurality of elongate electrodes 2 arranged parallel to an axis, the method comprising the steps of: a) fixing a plurality of round rod-shaped electrode blanks 9 but only a part of the total number of electrodes 2 provided for the electrode arrangement 1 on one or more carrier elements 4, b) simultaneous processing of end sections 6 of the carrier element 4 together with the electrode blanks 9 fixed to this or these carrier elements in one Operation such that each electrode blank 9 by machining becomes an electrode 2 having a cross section with a circular portion KA and a non-circular, in particular substantially hyperbolic, portion HA and the same at the end thereof Timely processing of or each of the support elements 4 has two differently shaped, but adapted in shape to one another end portions. The steps a) and b) are repeated a number of times until the total number of electrodes 2 provided for the electrode arrangement 1 is provided, wherein in step a) one or more own carrier elements 4 are used for attachment. The carrier elements 4 together with electrodes 2 attached thereto are then joined together in such a way that a plurality of carrier elements 4 form one or more closed multi-part carrier bodies 5 enclosing the electrodes.

Die Erfindung betrifft ferner eine auf diese Weise hergestellte mehrpolige Elektrodenanordnung.

Figure imgaf001
The invention further relates to a multi-pole electrode arrangement produced in this way.
Figure imgaf001
EP05023606A 2004-11-12 2005-10-28 Procedure for the production of a multipolar electrode arrangement as well as a multipolar electrode arrangement Active EP1657737B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004054835A DE102004054835A1 (en) 2004-11-12 2004-11-12 Method for producing an electrode or multi-pole electrode arrangement as well as multi-pole electrode arrangement and electrode for a multi-pole electrode arrangement

Publications (3)

Publication Number Publication Date
EP1657737A2 EP1657737A2 (en) 2006-05-17
EP1657737A3 true EP1657737A3 (en) 2008-05-07
EP1657737B1 EP1657737B1 (en) 2012-09-19

Family

ID=35999501

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05023606A Active EP1657737B1 (en) 2004-11-12 2005-10-28 Procedure for the production of a multipolar electrode arrangement as well as a multipolar electrode arrangement

Country Status (3)

Country Link
US (1) US7348552B2 (en)
EP (1) EP1657737B1 (en)
DE (1) DE102004054835A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2645464T3 (en) * 2006-06-09 2017-12-05 Rapiscan Laboratories, Inc. Miniaturized ionic mobility spectrometer
PL2099584T3 (en) 2006-07-18 2018-01-31 Kistler Holding Ag Joining unit
US20100276063A1 (en) * 2009-05-02 2010-11-04 Henry Hoang Xuan Bui Methods of manufacturing quadrupole mass filters
US8173976B2 (en) * 2009-07-24 2012-05-08 Agilent Technologies, Inc. Linear ion processing apparatus with improved mechanical isolation and assembly
US8492713B2 (en) * 2011-07-14 2013-07-23 Bruker Daltonics, Inc. Multipole assembly and method for its fabrication
DE102013111254B4 (en) 2013-10-11 2019-04-25 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Electrode device with pre- and / or post-filter and manufacturing method for this purpose and mass spectrometer with such an electrode device
DE102013111253A1 (en) 2013-10-11 2015-04-16 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Electrode device and method of production thereof and mass spectrometer with such an electrode device
CN104716010A (en) * 2013-12-13 2015-06-17 中国科学院大连化学物理研究所 Vacuum ultraviolet photoionization and chemical ionization compound ionization source based on radio frequency electric field enhancement of quadrupole rod
DE102014208729A1 (en) * 2014-05-09 2015-11-12 Incoatec Gmbh Two-part high-voltage vacuum feed-through for an electron tube
DE102017107137B4 (en) * 2017-04-03 2022-06-23 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Device with a multipole and a holding device for holding the multipole, holding device, mass spectrometer with such a device, assembly unit for positioning the multipole and method for positioning a holding device in relation to a multipole
JP6911948B2 (en) * 2018-02-07 2021-07-28 株式会社島津製作所 Mass spectrometer
US11043371B2 (en) * 2018-02-07 2021-06-22 Shimadzu Corporation Mass spectrometer
DE102020128646B4 (en) * 2020-10-30 2024-10-24 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Multipole with receiving rings arranged on its front sides and such receiving ring
GB202214225D0 (en) * 2022-09-28 2022-11-09 Micromass Ltd A multipole rod support and a multipole rod assembly comprising the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2625660A1 (en) * 1976-06-08 1977-12-22 Leybold Heraeus Gmbh & Co Kg METHOD OF MANUFACTURING AN ION FILTER FOR A MASS ANALYZER
JPS58204464A (en) * 1982-05-21 1983-11-29 Shimadzu Corp Tetrode mass spectrograph
EP0572687A1 (en) * 1992-05-26 1993-12-08 Finnigan Corporation Ion filter, especially for a mass spectrometer, and method of manufacturing said filter
US5315120A (en) * 1993-06-07 1994-05-24 Accsys Technology, Inc. Univane RFQ
US20040245460A1 (en) * 2003-06-05 2004-12-09 Tehlirian Berg A. Integrated shield in multipole rod assemblies for mass spectrometers

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT528250A (en) * 1953-12-24
GB9110207D0 (en) * 1991-05-10 1991-07-03 Fisons Plc Process for the manufacture of a multipolar elongate-electrode lens or mass filter
US5525084A (en) * 1994-03-25 1996-06-11 Hewlett Packard Company Universal quadrupole and method of manufacture
IL157558A0 (en) * 2001-02-23 2004-03-28 Scripps Research Inst TRYPTOPHANYL-tRNA SYNTHETASE DERIVED POLYPEPTIDES USEFUL FOR THE REGULATION OF ANGIOGENESIS
US6723986B2 (en) * 2002-03-15 2004-04-20 Agilent Technologies, Inc. Apparatus for manipulation of ions and methods of making apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2625660A1 (en) * 1976-06-08 1977-12-22 Leybold Heraeus Gmbh & Co Kg METHOD OF MANUFACTURING AN ION FILTER FOR A MASS ANALYZER
JPS58204464A (en) * 1982-05-21 1983-11-29 Shimadzu Corp Tetrode mass spectrograph
EP0572687A1 (en) * 1992-05-26 1993-12-08 Finnigan Corporation Ion filter, especially for a mass spectrometer, and method of manufacturing said filter
US5315120A (en) * 1993-06-07 1994-05-24 Accsys Technology, Inc. Univane RFQ
US20040245460A1 (en) * 2003-06-05 2004-12-09 Tehlirian Berg A. Integrated shield in multipole rod assemblies for mass spectrometers

Also Published As

Publication number Publication date
US20060102835A1 (en) 2006-05-18
DE102004054835A1 (en) 2006-05-24
EP1657737B1 (en) 2012-09-19
US7348552B2 (en) 2008-03-25
EP1657737A2 (en) 2006-05-17

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