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CN115615360A - High-precision photoelectric angular displacement sensor based on machine vision - Google Patents

High-precision photoelectric angular displacement sensor based on machine vision Download PDF

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Publication number
CN115615360A
CN115615360A CN202211203546.8A CN202211203546A CN115615360A CN 115615360 A CN115615360 A CN 115615360A CN 202211203546 A CN202211203546 A CN 202211203546A CN 115615360 A CN115615360 A CN 115615360A
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China
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coding
disc
angular displacement
displacement sensor
machine vision
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Inventor
梁士通
盖芳钦
王立
史永敏
孙秀清
刘继奎
程俊波
张述卿
张东来
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Beijing Institute of Control Engineering
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Beijing Institute of Control Engineering
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders

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  • General Physics & Mathematics (AREA)
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Abstract

The invention relates to a high-precision photoelectric angular displacement sensor based on machine vision, which comprises: a reader and a code wheel; the coding disc is of a thin-wall cylinder structure, and slits arranged according to a certain rule and circumference are processed in a coding region on the side wall of the thin-wall cylinder structure to form a coding pattern; the length direction of the slit is the same as the axial direction of the thin-wall cylinder structure; the reader images the coding area on the side wall of the coding disc in the rotation process of the coding disc, and obtains the rotation angle information of the coding disc to be output outwards through image resolving processing. The invention has the advantages of small volume, high precision, high reliability and the like, and can meet the technical requirements of a high-precision space pointing control demonstration verification system.

Description

High-precision photoelectric angular displacement sensor based on machine vision
Technical Field
The invention belongs to the field of optical engineering design, and relates to a high-precision photoelectric angular displacement sensor based on machine vision.
Background
The photoelectric angular displacement sensor is used for providing high-precision rotation angle information for the high-precision space pointing control demonstration verification system. The space pointing control demonstration verification system uses a motor to drive a mechanical device to drive a pointing mechanism to move, information such as the rotation angle and the rotation speed of a motor needs to be acquired in real time and with high precision in the moving process, and the information is control input of a motor system and has important influence on the precision and the reliability of the whole system. The photoelectric angular displacement sensor mainly has the function of providing high-speed, high-precision and high-reliability corner information for the whole system.
The existing conventional photoelectric angular displacement sensor product generally uses an optical encoding disc and a multi-point detection mechanism to measure the angle. The precision of the photoelectric angular displacement sensor is generally in the order of arc second, the technical limit of the scheme is basically reached, the precision is greatly improved, and the technical requirement of a high-precision space pointing control demonstration verification system cannot be met; the debugging period is calculated in cycles, the debugging period is long, and the debugging difficulty is high; the photoelectric angular displacement sensor is limited by the corresponding inconsistency of the point detector and the low reliability, the reliability of the photoelectric angular displacement sensor is low, the reliability requirement is generally met by screening the detector, and the price of the product is extremely high.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the photoelectric angular displacement sensor overcomes the defects of the prior art, has small volume, high precision and high reliability, and meets the requirement of axial angle measurement of a motion mechanism working in a severe environment in space.
The technical scheme adopted by the invention is as follows:
a high-precision photoelectric angular displacement sensor based on machine vision, comprising: a reader and a code wheel;
the coding disc is of a thin-wall cylinder structure, and a coding region on the side wall of the thin-wall cylinder structure is provided with slits arranged according to a certain rule and a circle to form a coding pattern; the length direction of the slit is the same as the axial direction of the thin-wall cylinder structure;
the reader images the coding area on the side wall of the coding disc in the rotation process of the coding disc to obtain an image, and the obtained rotation angle information of the coding disc is output outwards through image resolving processing.
Preferably, the length of the slit in the axial direction of the code disc ranges from 5mm to 10mm.
Preferably, the reader comprises: the system comprises an optical component, an illumination light source, a detector driving circuit and an algorithm processing circuit;
the illumination light source is used for illuminating the coding disc;
the optical assembly images a coding area on the side wall of the coding disc and transmits an optical signal to the detector;
the detector receives the optical signal, carries on the photoelectric conversion to get the electrical signal and transmits to the detector drive circuit;
the detector driving circuit receives the electric signal sent by the detector, performs signal caching processing, and transmits the cached signal to the algorithm processing circuit;
and the algorithm processing circuit receives the cache signal transmitted by the detector driving circuit, performs image resolving processing, and obtains and outputs the rotation angle information of the encoding disk.
Preferably, the spacing between two adjacent slits is no greater than 9 times the slit width.
Preferably, the code wheel is made of a metal material or a quartz glass material.
Preferably, a polishing process of the outer wall of the code disc made of a metal material is adopted.
Preferably, the outer wall of the coding disc made of quartz glass material is plated with chromium film.
Preferably, the coding pattern comprises a plurality of coding units which are adjacent and are uniformly distributed around the circumference; the width value range of each coding unit is 10-60 um, and a plurality of coding units are hollowed out to form slits;
the number of coding units which are not subjected to the hollow-out processing in each image obtained by the reader is not less than 20.
Preferably, the slits are uniformly distributed around the circumference, and the width of the slits is the same as the distance between the two slits.
Preferably, the code disc rotates at different angles, and the code pattern in the image obtained by the corresponding reader is different.
The invention has the following beneficial effects:
1) The invention adopts the machine vision technology, can simultaneously detect dozens of coding units, can solve the problems of reduced recognition accuracy and the like caused by physical damage of partial code channels and external interference, and improves the reliability of products.
2) The invention adopts the optical amplification technology, improves the physical resolution of the code channel to be observed by the code detection unit, and improves the measurement precision and resolution of the product.
3) The invention adopts the imaging objective lens to image the coding pattern, has larger tolerance to off-axis error and inclination error generated when the coding disc is installed on the rotor of the rotating structure, can reduce the installation requirement of the coding disc and reduce the installation and adjustment difficulty of products.
Drawings
FIG. 1 is an outline of a photoelectric angular displacement sensor reader structure according to the present invention;
FIG. 2 is a schematic diagram of the photoelectric angular displacement sensor of the present invention;
FIG. 3 is a light path diagram of the internal optical components of the present invention;
FIG. 4 is a flowchart of the application software operation of the present invention.
Detailed Description
The invention provides a high-precision photoelectric angular displacement sensor based on machine vision. The thin-wall cylindrical coding disc is coaxially installed on the moving mechanism rotor, coding patterns in different coding arrangements are marked on the periphery of the coding disc, and the coding patterns can be uniform coding patterns or non-uniform coding patterns. The position (rotation angle) information of the code disc can be obtained by detecting and recognizing the code pattern using a reader.
The reader comprises: the system comprises an optical assembly, an illumination light source, a detector, an illumination driving circuit, a detector driving circuit and an algorithm processing circuit. The functions of each part are as follows:
the illumination system illuminates a plurality of groups of coding patterns simultaneously, the preferred illumination light source is an LED light source, and the illumination driving circuit: a constant current is supplied to the illumination source.
The optical assembly includes an imaging objective lens and a dioptric prism. The refraction prism is used for turning the light path, transmitting the light energy of the illumination light source on the encoding disc and illuminating the encoding disc; the imaging objective lens is used for optically amplifying the coding grating on the coding disc and imaging the coding grating on the photosensitive surface of the detector. The sets of coded patterns are imaged by an imaging objective onto a photosensitive surface of the detector.
Detector drive circuit: and receiving the electric signal sent by the detector, performing signal caching processing, and transmitting the cached signal to an algorithm processing circuit. The algorithm processing circuit: and receiving the cache signal transmitted by the detector driving circuit, performing image calculation processing, and outputting the obtained rotation angle information of the encoding disk.
The emergent light axis of the illumination light source is vertical to the section direction of the outer wall of the coding disc. The optical axis of the imaging objective lens is vertical to the tangential direction of the outer wall of the coding disc; the optical axis of the imaging objective lens passes through the geometric center of the dioptric prism; the included angle between the surface of the dioptric prism and the optical axis of the imaging objective lens is 35-55 degrees, and preferably 45 degrees. The photosensitive surface of the detector is vertical to the optical axis of the imaging objective lens. The optical axis of the imaging objective passes through the geometric center of the photosensitive surface of the detector. The photosensitive surface of the detector is positioned on the conjugate surface of the coding disc relative to the imaging objective lens;
the conjugate imaging of the outer wall of the code disc to be observed, the photosensitive surface of the detector and the optical system accords with the following formula:
Figure BDA0003872586000000041
in the formula: l is the object distance, namely the distance from the outer wall of the coding disc to be observed to the main surface of the object space of the imaging objective lens; l' is the image distance, namely the distance from the photosensitive surface of the detector to the image side main surface of the imaging objective; f' is the image space focal length of the imaging objective lens.
The coding disk is made of metal (such as stainless steel) or quartz glass. And (3) polishing the outer wall of the coding disc made of a metal material. The outer wall of the coding disc made of quartz glass material is plated with a chromium film. The radius of the optical encoding disc is not less than 20mm.
The coding region on the side wall of the coding disc is provided with a slit arranged according to a certain rule and a circle to form a coding pattern; the length direction of the slit is the same as the axial direction of the thin-walled cylindrical structure. The coding pattern comprises a plurality of adjacent coding units which are uniformly distributed on the periphery; the width value range of each coding unit is 10 um-60 um, and a plurality of coding units are hollowed out to form slits.
The coding patterns of different codes are marked at different positions of the coding disc, and the coding patterns can be uniform coding patterns or non-uniform coding patterns.
The opposite photoelectric angular displacement sensor uses a uniform coding pattern, the peripheries of the slits are uniformly distributed, and the width of the crack is the same as the distance between the two slits. The reader continuously collects images of the coding region along with the uniform rotation of the coding disc, and obtains the rotation angle of the coding disc relative to the starting point by detecting the number of the increased or decreased coding patterns. The width of the single slit ranges from 10um to 60um, and the length of the slit in the axial direction of the encoding disk ranges from 5mm to 10mm. In the embodiment of the invention, the rotating speed of the code disc is 10 degrees/s, and the sampling frequency of the reader is more than 2000Hz.
Absolute photoelectric angular displacement sensors require the use of non-uniform coding patterns. When the non-uniform coding pattern is adopted, the width of a single grating stripe of the grating is taken as a basic unit, and the space between two adjacent grating stripes is changed to code the grating, wherein the space is generally an odd multiple of the width of the single grating stripe of the grating. By analyzing the detected images, a code sequence within the range can be obtained, which is unique over the entire circumference. In order to ensure the measurement accuracy, the number of the dark stripe units (i.e. the coding units which are not hollowed out) in each image is not less than 20.
The photoelectric angular displacement sensor acquires angle information through detection and identification of a plurality of groups of grating codes, a plurality of information bits are contained in the group of codes, and the missing or error of local information in the codes can be corrected through the modes of checking, predicting, detecting local codes and comparing codes with a code table, so that the correctness of an output result is not influenced. The problems that the recognition accuracy rate is reduced and the like caused by physical damage and external interference of partial code channels can be effectively solved, and the reliability of products is improved.
Off-axis errors and tilt errors will occur during the mounting of the code disc. The off-axis error of the coding disc can bring the object distance change between the object plane position and the reader in the rotation process of the coding disc, and the inclination error of the coding disc can bring the jitter of the object plane position in the field of view of the reader. The machine vision type photoelectric angular displacement sensor has larger depth of field and larger field range, and is insensitive to defocusing of an object and jitter of an observation code in the field. Meanwhile, the compensation and prediction of the coded information in the photoelectric angular displacement sensor are corrected, so that the measurement error caused by defocusing and jumping of an object space is further reduced. The insensitivity of off-axis error and inclination error can reduce the installation requirement of the coding disc and reduce the difficulty in product adjustment.
The specific implementation mode is as follows:
a typical photoelectric angular displacement sensor reader is shown in figure 1 and in principle in figure 2. The reader structure is designed according to the space layout and size requirements of the motion mechanism, and meanwhile, the size requirements of hardware such as internal optical components and circuit components are met. The component is made of aluminum alloy, and has the size of 55mm × 41mm × 34mm and the weight of 120g.
Optical assembly as shown in fig. 3, the optical assembly is used for imaging the illuminated image of the code disc on the detector, the size of the observation area on the code disc is 1.5mm, and the imaging objective lens is used for imaging the observation area in real time. The optical total length of the imaging objective lens is 47.1mm, the focal length is 5.8mm, the diameter of an entrance pupil is 3mm, the distance between an observation object and the front surface of the catadioptric prism is about 3.6mm, and the maximum clear aperture of an optical part is 7.6mm. The imaging objective lens is composed of three lenses, the first lens is made of LaK3 materials, and the second lens and the third lens are made of ZF4 materials. The refraction prism comprises a prism with an isosceles right triangle section and a right trapezoid section, the inclined angle of the inclined edge of the right trapezoid is 45 degrees, the 45-degree inclined plane is coated with the semitransparent and semi-reflective film and then is glued with the long edge of the isosceles right triangle section, and the refraction prism is formed after the gluing. The dioptric prism uses fused quartz material.
The circuit component comprises an FPGA, a detector, an LED light source, a voltage follower, an analog-digital conversion period, a storage area, an RS422 serial port, a power supply and the like. An ARM processor is integrated in the FPGA and is a controller of a circuit assembly, and the ARM processor controls the integration time of the detector, the on/off of the LED light source, the digital conversion of analog signals, the digital signal conversion, the image filtering, the coding identification, the edge accurate positioning and the angle calculation. The storage area stores the coded data of the whole circumference, and the angle information is calculated by comparing and searching the coded data with the data in the storage area after the coded data are identified. And the RS422 serial port is used for receiving instructions and outputting data such as angle information. The power supply converts the input primary power supply voltage into the voltage required by each module.
Algorithm software: the unit comprises an image preprocessing module, an image recognition module, a position judgment module and a precision correction module, and is used for recognizing the characteristic stripes and calculating the position of the coding disc.
The application software comprises functions and modes of code identification, parameter calibration, ground detection and the like. The code identification is mainly to carry out operations and processing such as filtering, code identification, edge accurate positioning, angle calculation and the like on image data input by a circuit component. The parameter calibration is to correct and compensate the measurement result by using an error model according to the installation and adjustment error of the product after installation and adjustment, so that the accuracy of angle measurement is improved. The ground inspection mode is to externally output internal parameters such as images inside the product and register data of circuit components, so that a developer can monitor the working state of the product, and problems in the working process of the product can be conveniently found and processed.
The work flow and the work mode of the angular displacement sensor product are shown in fig. 4, and the work flow and the work mode mainly comprise the following steps: the system comprises a standby MODE, a global code searching MODE (MODE _ A), a local code searching MODE (MODE _ B), a ground detection MODE and a calibration MODE, wherein the ground detection MODE and the calibration MODE are only used in product development and test in principle. The operation of these several modes of operation in software is shown in the following figure.
After the system is powered on, firstly, initializing, configuring default working parameters for the system, and carrying out self-checking; and then entering a standby mode, and judging whether to enter the standby mode or to switch to other modes according to whether the power-on self-test result is normal. The switched MODEs mainly comprise a calibration MODE, a ground detection MODE, a MODE _ A and a MODE _ B working MODE. If the video circuit does not enter the calibration MODE and the ground detection MODE, setting the state of the video circuit, judging whether the image is ready, entering a MODE _ A after the image is ready, and if the image needs to enter a MODE _ B, setting the state of the video circuit if the image needs to enter the MODE _ A; the system circularly works in the circulation of the MODE _ a and the MODE _ B until the MODE _ a is yes, and the system works in the MODE _ a MODE.
And entering a standby mode after the calibration mode and the ground detection mode are finished, and waiting for the next instruction to arrive.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.
Those skilled in the art will appreciate that those matters not described in detail in the present specification are well known in the art.

Claims (10)

1. A high-precision photoelectric angular displacement sensor based on machine vision is characterized by comprising: a reader and a code wheel;
the coding disc is of a thin-wall cylinder structure, and a coding region on the side wall of the thin-wall cylinder structure is provided with slits arranged according to a certain rule and a circle to form a coding pattern; the length direction of the slit is the same as the axial direction of the thin-wall cylinder structure;
the reader images the coding area on the side wall of the coding disc in the rotation process of the coding disc to obtain an image, and the obtained rotation angle information of the coding disc is output outwards through image resolving processing.
2. The high-precision photoelectric angular displacement sensor based on machine vision according to claim 1, wherein the length of the slit in the axial direction of the code disc ranges from 5mm to 10mm.
3. The machine-vision-based high-precision photoelectric angular displacement sensor according to claim 1, wherein the reader comprises: the system comprises an optical component, an illumination light source, a detector driving circuit and an algorithm processing circuit;
the illumination light source is used for illuminating the coding disc;
the optical assembly images a coding area on the side wall of the coding disc and transmits an optical signal to the detector;
the detector receives the optical signal, carries on the photoelectric conversion to get the electrical signal and transmits to the detector drive circuit;
the detector driving circuit receives the electric signal sent by the detector, performs signal caching processing, and transmits the cached signal to the algorithm processing circuit;
and the algorithm processing circuit receives the cache signal transmitted by the detector driving circuit, performs image calculation processing, and obtains and outputs the rotation angle information of the encoding disk.
4. A high precision photoelectric angular displacement sensor based on machine vision according to claim 1, wherein the distance between two adjacent slits is not more than 9 times the slit width.
5. The high-precision photoelectric angular displacement sensor based on machine vision of claim 1, wherein the code disc is made of metal material or quartz glass material.
6. The high-precision photoelectric angular displacement sensor based on machine vision of claim 5, wherein the outer wall of the coding disc made of metal material is polished.
7. The high-precision photoelectric angular displacement sensor based on machine vision of claim 5, wherein the outer wall of the coding disc made of quartz glass material is plated with chrome film.
8. The high-precision photoelectric angular displacement sensor based on machine vision according to any one of claims 1-7, characterized in that the coding pattern comprises a plurality of adjacent coding units which are distributed uniformly around the circumference; the width value range of each coding unit is 10-60 um, and a plurality of coding units are hollowed to form slits;
the number of coding units which are not subjected to the hollow-out processing in each image obtained by the reader is not less than 20.
9. The sensor of claim 8, wherein the slits are evenly distributed around the circumference, and the width of the slit is the same as the distance between two adjacent slits.
10. The machine vision-based high-precision photoelectric angular displacement sensor according to claim 8, wherein the code patterns in the images obtained by the corresponding readers are different according to different rotation angles of the code disc.
CN202211203546.8A 2022-09-29 2022-09-29 High-precision photoelectric angular displacement sensor based on machine vision Pending CN115615360A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117824538A (en) * 2024-01-09 2024-04-05 北京控制工程研究所 Angular displacement measuring device and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117824538A (en) * 2024-01-09 2024-04-05 北京控制工程研究所 Angular displacement measuring device and method
CN117824538B (en) * 2024-01-09 2024-09-10 北京控制工程研究所 Angular displacement measuring device and method

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