CN104406547B - The eccentric measuring device and its measuring method of a kind of optical element - Google Patents
The eccentric measuring device and its measuring method of a kind of optical element Download PDFInfo
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- CN104406547B CN104406547B CN201410745409.6A CN201410745409A CN104406547B CN 104406547 B CN104406547 B CN 104406547B CN 201410745409 A CN201410745409 A CN 201410745409A CN 104406547 B CN104406547 B CN 104406547B
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Abstract
The invention discloses a kind of eccentric measuring device of optical element, comprising：Eccentric measurement is carried out for treating photometry element, comprising：Base；Column guide rail, its bottom surface is fixed on the base；Objective table, is disposed side by side on the base with the column guide rail, and the objective table can all around be slided along base；Parallel light tube, is slidably arranged on column guide rail；Optical element to be measured, is arranged on objective table, the directional light that reflected parallel light pipe is sent；Imaging sensor, receives optical element reflected parallel light to be measured；Imaging sensor is connected by a connecting elements with column guide rail, and parallel light tube presets angle with imaging sensor in one；Data processing unit, is connected with imaging sensor.The invention also discloses a kind of eccentric measuring method of optical element.The present invention conveniently can intuitively detect the offset of Cassegrain system aspheric surface optical accessory, and apparatus structure is simple, and light path is easily adjusted, and reliability is high, error is small.
Description
Technical field
The present invention relates to middle porose cassegrain optics detection offset technical field, and in particular to a kind of aspherical
There are the eccentric measuring device of the optical element in aperture and its measuring method in centre.
Background technology
Middle porose aspheric surface optical accessory, is widely used in the numerous areas such as space flight, military affairs, industry, medical treatment.By
In in various optical systems, the coaxiality of optical axis is to ensure the basic demand of optical system imaging quality, and aspherical
In the process of mirror, due to the influence of the factors such as artificial, technique, machine, errors of centration can be produced, so as to destroy optical system
The coaxiality of system, thus non-spherical lens errors of centration be also evaluate aspheric optical system optical axis it is misaligned the problem of,
The coaxiality of optical system is destroyed, therefore the measuring system of research and design non-spherical lens offset is main task.
In the prior art, non-spherical lens manufacturer in part carries out aspherical for the non-spherical lens of batch production
During the measurement of mirror offset, using more traditional measurement, the measuring method of similar spherical mirror, the measurement error of this measuring method
Greatly, it is impossible to intuitively show numerical value.
The content of the invention
It is an object of the invention to provide the eccentric measuring device and its measuring method of a kind of optical element, it can facilitate
The offset of Cassegrain system aspheric surface optical accessory is intuitively detected, apparatus structure is simple, and light path is easily adjusted, and reliability
High, error is small.
In order to achieve the above object, the present invention is achieved through the following technical solutions：Carried out partially for treating photometry element
Heart measurement, is characterized in, comprising：
Base；
Column guide rail, its bottom surface is fixed on the base；
Objective table, is disposed side by side on the base with the column guide rail, and the objective table can be along a left side before and after base
It is right to slide；
Parallel light tube, is slidably arranged on column guide rail, and above objective table, between parallel light tube and objective table
Height adjustable；
Optical element to be measured, is arranged on objective table, the directional light that reflected parallel light pipe is sent；
Imaging sensor, receives the directional light of optical element reflection to be measured；
Described image sensor is connected by a connecting elements with the column guide rail, and the parallel light tube and image
Sensor is in a default angle；
Data processing unit, is connected with described image sensor.
Described parallel light tube and the default angle of imaging sensor are 30 degree.
Diesis wire division plate is provided with described parallel light tube.
Described optical element to be measured is the optical element that there is aperture aspherical centre.
Described imaging sensor is CCD industrial cameras.
Described connecting elements includes pinboard and translation stage；
Described pinboard is slidably connected with the column guide rail；
Described translation stage is slidably arranged on pinboard；
Described imaging sensor is arranged on translation stage.
Described data processing unit is computer.
A kind of eccentric measuring method of optical element, is characterized in, comprises the steps of：
S1, by the optical mirror plane of optical element to be measured upward, placed using endoporus two-point locating mode and be placed into objective table
On；
S2, fine tuning objective table and translation stage so that imaging sensor after optical element to be measured focusing with receiving optics to be measured
The hot spot crosshair picture point of element reflection；
S3, imaging sensor send hot spot crosshair picture point to data processing unit；
S4, rotation optical element to be measured, repeat step S1-S2-S3；
S5, optical element to be measured, repeat step S1-S2-S3 are rotated again；
Cross centre line one circle of fitting for the hot spot crosshair picture point that S6, data processing unit are received with three times, circle
Diameter be offset.
The angle of described rotation optical element to be measured is more than 60 degree.
The eccentric measuring device and its measuring method of a kind of optical element of the present invention have following compared with prior art
Advantage：Because provided with objective table and translation stage, light path is easily adjusted, apparatus structure is simple, and error is small, and reliability is high, measurement accuracy
It can reach 10 "；It is that can determine that a round principle using not collinear three points, the fitting by computer to three measurement data,
Offset is determined, with more wide use value, the measurement of optical element offset in Cassegrain is can be applied to.
Brief description of the drawings
Fig. 1 is a kind of overall structure diagram of the eccentric measuring device of optical element of the invention；
Fig. 2 is the optical system schematic diagram of the embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by describing a preferably specific embodiment in detail, the present invention is further elaborated.
As shown in figure 1, a kind of eccentric measuring device of optical element, offset is carried out for treating photometry element 5
Measurement, optical element 5 to be measured is the optical element that there is aperture aspherical centre, and eccentric measurement is optics principal reflection mirror parabola
Optical axis and the non-coaxial measurement of magnet steel geometric center, measurement apparatus are included：Base 1, plays a supportive role；Column guide rail
2, its bottom surface is fixed on the base 1；Objective table 3, is disposed side by side on the base 1 with the column guide rail 2, described
Objective table 3 can all around be slided along base 1, i.e., actually objective table 3 be one can two-dimension translational platform, it is fine-tuning before and after
The distance of left and right；Parallel light tube 4, the light for light source to be sent projects for directional light, is slidably arranged on column guide rail 2,
It is easy to the height adjustable between parallel light tube 4 and objective table 3, and positioned at the top of objective table 3；Optical element 5 to be measured, is arranged on load
On thing platform 3, the directional light that reflected parallel light pipe 4 is sent；Imaging sensor 6, receives the directional light that optical element 5 to be measured reflects,
Opto-electronic conversion is carried out, is imaged on CCD minute surfaces；Described image sensor 6 passes through a connecting elements 7 and the column guide rail 2
Connection, connecting elements 7 includes pinboard 71 and translation stage 72；Described pinboard 71 is slidably connected with the column guide rail 2；
Described translation stage 72 is slidably arranged on pinboard 71, and translation stage 72 can only be moved in the horizontal direction；Described image sensing
Device 6 is arranged on translation stage 72, therefore, when needing to change the position of imaging sensor 6, it is necessary to operate the He of pinboard 71 simultaneously
Translation stage 72, parallel light tube 4 is set with imaging sensor 6 in a default angle, and it is to facilitate imaging sensor 6 to receive to set angle
The reflected light of optical element to be measured, data processing unit is connected with described image sensor 6, the picture that imaging sensor 6 is received
Point signal is analog signal, carries out A/D conversions by image plate, converts analog signals into data signal, be input at data
Unit is managed, data processing unit is a computer, data processing software is housed, for being compared, sentencing to picture point in computer
Disconnected, analysis, can accurately show the important performance indexes such as picture point size, collection image patch distance center misalignment of axe angle with fixed
Amount is determined as matter quality, final to print out test result using printer.
In the preferred embodiment, column guide rail 2 uses the structure of gear stick, parallel light tube 4 and pinboard
71 are equipped with gear clamper, are easy to change the position of parallel light tube 4 and pinboard 71.In one alternate embodiment, column
Formula guide rail 2 uses stretching structure, passes through the flexible position for changing parallel light tube 4 and pinboard 71.
In the preferred embodiment, image is shown and data acquisition for convenience, provided with double ten in parallel light tube 4
There is provided measurement effect directly perceived for word wire division plate.Parallel light tube 4 is more than Φ 20 from high section parallel light tube series of products, diameter, puts down
Row degree 10 ", built-in pair of vertical line " crosshair ", energy of light source can adjust.
In the preferred embodiment, imaging sensor 6 selects CCD industrial cameras.From the work of German company
Industry camera, resolution is 1360 × 1024 as number.
In the preferred embodiment, data processing unit uses the IPC series type high-performance industry controls of Yan Hua companies
Machine.
The principle that the present invention is used is that light passes through principal reflection mirror（Optical element 5 to be measured）Reflection after enter CCD, warp
Clearly indicate crosshair in parallel light tube after CCD amplifications, optical schematic diagram as described in Figure 2, when rotating principal reflection mirror, cross
The circular motion of one closing of filament winding, data processing unit calculates diameter of a circle, that is, completes principal reflection mirror not coaxial automatically
The measurement of degree.
Optical element 5 to be measured uses endoporus two-point locating, and parallel light tube 4 sends a branch of directional light to optical element 5 to be measured,
Through parabolic reflector, reflection picture point can not be returned by original optical path, and vertical light is angled slants out, by imaging sensor
6 receive.
With reference to shown in Fig. 2, a kind of eccentric measuring method of optical element is comprised the steps of：
S1, by the optical mirror plane of optical element 5 to be measured upward, be placed into using endoporus two-point locating mode on objective table 3；
S2, fine tuning objective table 3 and translation stage 72 so that imaging sensor 6 receives to be measured after being focused with optical element 5 to be measured
The hot spot crosshair picture point that optical element 5 reflects；
S3, imaging sensor 6 send hot spot crosshair picture point to data processing unit；
S4, rotation optical element 5 to be measured, repeat step S1-S2-S3；
S5, optical element 5 to be measured, repeat step S1-S2-S3 are rotated again；
Cross centre line one circle of fitting for the hot spot crosshair picture point that S6, data processing unit are received with three times, is adopted
It is that can determine that a round principle with not conllinear 3 points, diameter of a circle is offset.
The angle of described rotation optical element 5 to be measured is more than 60 degree.
Although present disclosure is discussed in detail by above preferred embodiment, but it should be appreciated that above-mentioned
Description is not considered as limitation of the present invention.After those skilled in the art have read the above, for the present invention's
A variety of modifications and substitutions all will be apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (6)
1. the eccentric measuring device of a kind of optical element, for treating photometry element（5）Carry out eccentric measurement, its feature
It is, comprising：
Base（1）；
Column guide rail（2）, its bottom surface is fixed on the base（1）On；
Objective table（3）, with the column guide rail（2）It is disposed side by side on the base（1）On, the objective table（3）Can be the bottom of along
Seat（1）All around slide；
Parallel light tube（4）, it is slidably arranged in column guide rail（2）On, and positioned at objective table（3）Top, parallel light tube（4）With load
Thing platform（3）Between height adjustable；
Optical element to be measured（5）, it is arranged on objective table（3）On, reflected parallel light pipe（4）The directional light sent；
Imaging sensor（6）, receive optical element to be measured（5）The directional light of reflection；
Described image sensor（6）Pass through a connecting elements（7）With the column guide rail（2）Connection, and the parallel light tube
（4）With imaging sensor（6）In a default angle；
Data processing unit, with described image sensor（6）Connection；
Described connecting elements（7）Include pinboard（71）And translation stage（72）；
Described pinboard（71）With the column guide rail（2）It is slidably connected；
Described translation stage（72）It is slidably arranged in pinboard（71）On；
Described imaging sensor（6）It is arranged on translation stage（72）On；
Described parallel light tube（4）In be provided with diesis wire division plate；
Described optical element to be measured（5）There is the optical element in aperture for aspherical centre.
2. bias measuring device as claimed in claim 1, it is characterised in that described parallel light tube（4）With image sensing
Device（6）Default angle be 30 degree.
3. bias measuring device as claimed in claim 1, it is characterised in that described imaging sensor（6）For CCD industry
Video camera.
4. bias measuring device as claimed in claim 1, it is characterised in that described data processing unit is computer.
5. a kind of optics of the eccentric measuring device of the optical element as described in any one claim in Claims 1-4
The eccentric measuring method of part, it is characterised in that comprise the steps of：
S1, by optical element to be measured（5）Optical mirror plane upward, objective table is placed into using endoporus two-point locating mode（3）On；
S2, fine tuning objective table（3）And translation stage（72）So that imaging sensor（6）With optical element to be measured（5）Received after focusing
Optical element to be measured（5）The hot spot crosshair picture point of reflection；
S3, imaging sensor（6）Facula position data are sent to data processing unit；
S4, rotation optical element to be measured（5）, repeat step S1-S2-S3；
S5, optical element to be measured is rotated again（5）, repeat step S1-S2-S3；
S6, data processing unit are fitted a circle with the cross centre line of the hot spot picture point received for three times, and diameter of a circle is
Offset.
6. bias measuring method as claimed in claim 5, it is characterised in that described rotation optical element to be measured（5）'s
Angle is more than 60 degree.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410745409.6A CN104406547B (en) | 2014-12-09 | 2014-12-09 | The eccentric measuring device and its measuring method of a kind of optical element |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410745409.6A CN104406547B (en) | 2014-12-09 | 2014-12-09 | The eccentric measuring device and its measuring method of a kind of optical element |
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| CN104406547A CN104406547A (en) | 2015-03-11 |
| CN104406547B true CN104406547B (en) | 2017-11-07 |
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| CN110595736A (en) * | 2019-08-20 | 2019-12-20 | 扬州辰亚光学科技有限公司 | Eccentricity measuring device of optical part |
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| CN2919188Y (en) * | 2006-03-27 | 2007-07-04 | 西安北方光电有限公司 | Laser non-contact online detecting device |
| CN101086445A (en) * | 2006-06-06 | 2007-12-12 | 富士能株式会社 | Method for measuring eccentricity quantity |
| CN101135839A (en) * | 2006-08-30 | 2008-03-05 | 鸿富锦精密工业（深圳）有限公司 | Glasses lens partiality testing apparatus and rotating platform thereof |
| CN102607811A (en) * | 2012-03-23 | 2012-07-25 | 中国科学院西安光学精密机械研究所 | System and method for determining optical axis of aspheric reflector |
| JP5222796B2 (en) * | 2009-06-08 | 2013-06-26 | 富士フイルム株式会社 | Optical element eccentricity adjustment assembly method and eccentricity adjustment assembly apparatus |
| CN204255311U (en) * | 2014-12-09 | 2015-04-08 | 上海新跃仪表厂 | A kind of offset measurement mechanism of optical element |
-
2014
- 2014-12-09 CN CN201410745409.6A patent/CN104406547B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2919188Y (en) * | 2006-03-27 | 2007-07-04 | 西安北方光电有限公司 | Laser non-contact online detecting device |
| CN101086445A (en) * | 2006-06-06 | 2007-12-12 | 富士能株式会社 | Method for measuring eccentricity quantity |
| CN101135839A (en) * | 2006-08-30 | 2008-03-05 | 鸿富锦精密工业（深圳）有限公司 | Glasses lens partiality testing apparatus and rotating platform thereof |
| JP5222796B2 (en) * | 2009-06-08 | 2013-06-26 | 富士フイルム株式会社 | Optical element eccentricity adjustment assembly method and eccentricity adjustment assembly apparatus |
| CN102607811A (en) * | 2012-03-23 | 2012-07-25 | 中国科学院西安光学精密机械研究所 | System and method for determining optical axis of aspheric reflector |
| CN204255311U (en) * | 2014-12-09 | 2015-04-08 | 上海新跃仪表厂 | A kind of offset measurement mechanism of optical element |
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