CN220104459U - Optical lens centering and positioning device based on multi-focus annular lens - Google Patents
Optical lens centering and positioning device based on multi-focus annular lens Download PDFInfo
- Publication number
- CN220104459U CN220104459U CN202321603329.8U CN202321603329U CN220104459U CN 220104459 U CN220104459 U CN 220104459U CN 202321603329 U CN202321603329 U CN 202321603329U CN 220104459 U CN220104459 U CN 220104459U
- Authority
- CN
- China
- Prior art keywords
- lens
- centering
- zone
- air bearing
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 58
- 239000004579 marble Substances 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims description 23
- 230000002706 hydrostatic effect Effects 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 230000004069 differentiation Effects 0.000 abstract description 2
- 238000003384 imaging method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The utility model discloses an optical lens centering and positioning device based on a multi-focus annular lens, which consists of an auto-collimator, the multi-focus annular lens, a precise five-dimensional adjusting frame, a lens group to be tested, a lens seat, a leveling and aligning device, an air bearing, a displacement sensor, a marble frame, an image display system and a centering, positioning and analyzing system, wherein the lens seat is arranged on the centering and aligning device of the air bearing and is aligned to the center axis of the lens seat through the displacement sensor to coincide with the center axis of the air bearing, the spherical center of the upper surface of the lens is positioned near the focus of the multi-focus annular lens, the rapid centering of the lens can be realized without adjusting the position of the multi-focus annular lens, and the adjustment time of the high-precision lens is greatly shortened; the utility model solves the problems of low centering and positioning precision and low assembly efficiency of the optical lens by analyzing the edge diffusion function of the cross differentiation wire through an image processing and display system so as to calculate the axial assembly error of the lens.
Description
Technical Field
The utility model relates to the technical field of optical detection, in particular to an optical lens centering and positioning device based on a multi-focus annular lens.
Background
An optical lens is an optical element having a front and back curved (or planar) boundary capable of refracting and focusing light. The optical lens group is a set formed by two or more optical lenses, and specific optical functions and performances are realized by combining different lenses, so that the optical lens group is commonly used in optical systems such as industrial cameras, telescopes, microscopes, illumination systems and the like, and the centering of the optical lens group (the circle centers of all lenses are in the same straight line) is very important when the optical lens group is designed, assembled and actually used, otherwise, light rays can be influenced to correctly pass through the lens group and be focused on an imaging plane, and further, the performances and the imaging quality of the optical system are influenced.
The common centering method is to use a centering instrument, light rays emitted by a light source generate parallel light after passing through a collimation system, then the parallel light rays are converged through a focusing lens with a single focus, when the focus of the focusing light rays is overlapped with the circle center of the lens surface, a part of the light rays are reflected to return along an original path, whether the assembly is correct can be judged by observing whether a light spot can change the center position along with the rotation of the lens, but the focusing lens is required to be repeatedly replaced or the up-down distance of the lens is required to be adjusted in actual assembly and adjustment, the position of the lens is required to be continuously adjusted to ensure the accurate focus, the adjustment process is time-consuming and complicated, the requirement on an operator is high, and errors are easy to be introduced.
Disclosure of Invention
The utility model aims to provide an optical lens centering and positioning device based on a multi-focus zone lens, wherein the multi-focus zone lens in the device has a plurality of focuses, and the lens position does not need to be adjusted repeatedly, so that imaging of the plurality of focuses can be detected rapidly and accurately, and the problems in the background art are solved.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
an optical lens centering and positioning device based on a multifocal zone lens specifically comprises:
the device comprises a marble frame, wherein an auto-collimator is arranged at the upper part of the marble frame, a precise five-dimensional adjusting frame is arranged at the middle part of the marble frame, a multi-focus annular lens is arranged in the precise five-dimensional adjusting frame, and an air bearing is arranged at the lower part of the marble frame;
the upper part of the air bearing is provided with a leveling and aligning device which is used for adjusting the center shaft of the lens base to be coaxial with the center shaft of the air bearing;
the top of the leveling and aligning device is provided with a lens seat which is used for installing a lens group to be tested;
the system also comprises an image display system and a centering positioning measurement analysis system, wherein the image display system is connected with the auto-collimator, and the image display system is connected with the centering positioning measurement analysis system;
the device also comprises a displacement sensor which is used for measuring the coaxiality of the lens seat and the air bearing and inputting the measurement result into the centering positioning measurement analysis system.
Preferably, the auto-collimator is used for outputting parallel collimated laser beams and collecting reflected images, and comprises a light source, a focusing lens, a cross reticle, a beam splitting prism, a collimating lens and an image collecting module;
wherein: the light source is used for emitting divergent laser beams;
the focusing lens is used for converging the light beams emitted by the light source onto the cross reticle so as to realize uniform illumination of the cross reticle;
two mutually perpendicular short transverse lines are engraved on the surface of the cross reticle and positioned at the focal length of the focusing lens for forming a cross hair image;
the beam splitting prism is used for separating the emitted light and the reflected returned light into two paths, the light emitted by the cross reticle is kept unchanged along the original direction, and the reflected returned light vertically propagates to the image acquisition module;
the collimating lens is used for collimating the light rays emitted by the cross reticle into horizontal light rays for centering;
and the image acquisition module acquires the cross wire reflected image by adopting an image sensor and outputs the image data to a given middle positioning measurement analysis system.
Preferably, each zone has a different focal length, the focal points of the different zones are distributed along the optical axis of the multi-focal zone lens, and the focal point position of the multi-focal zone lens is determined by the spherical center position of the optical lens in the lens group to be tested.
Preferably, the air bearing is a hydrostatic air bearing, and can rotate the lens base and the lens group to be tested in a horizontal direction, so as to provide high-precision rotation precision for the centering system.
Preferably, the upper surface of the multifocal zone lens is a standard spherical surface and an aspheric surface, the lower surface is a zone surface, and the zone surface is a discontinuous zone fresnel surface or is formed by a continuous and non-conductive curved surface.
Preferably, the multiple focuses of the multi-focus zone lens are sequentially located in the curvature center of the upper surface of the lens group to be tested from bottom to top.
An optical lens centering and positioning method based on a multi-focus annular lens comprises the following steps:
s1, mounting a lens seat on a leveling and aligning device, and enabling the lens seat to be coaxial with an air bearing through measurement of a displacement sensor;
s2, placing a first optical lens to be installed of a lens group to be detected on a lens seat, adjusting a precise five-dimensional adjusting frame to enable a focus in a multi-focus annular zone lens to coincide with the spherical center of the front surface of the optical lens, rotating an air bearing to analyze the movement track of a cross dividing line, and adjusting the position of the optical lens to be installed according to the movement track until the centering error is minimum in a centering positioning measurement analysis system;
s3, installing a lens of the next lens group to be measured, repeating S2, wherein at the moment, the optical lens is installed and adjusted without adjusting the multi-focus annular lens, the reflection image of the cross dividing line can be directly acquired in the image acquisition module, and the position of the installed optical lens is adjusted according to the motion trail until the centering error in the centering positioning measurement analysis system is minimum;
s4, carrying out Fourier transformation on the edge diffusion function of the cross reticle image to obtain a contrast value, and calculating the axial positioning error of the optical lens.
The device has simple structure, easy integration and small requirements on system change and adjustment, only needs to replace the focusing lens of the traditional centering device to be a multi-focus annular zone lens, solves the defect that the position of the focusing lens needs to be repeatedly adjusted in centering, can detect imaging of a plurality of focuses at one time, and provides an effective and convenient solution for the field of optical centering.
Drawings
Fig. 1 is a schematic diagram of an optical lens centering and positioning device based on a multifocal zone lens according to the present utility model.
Fig. 2 is a schematic view of the internal structure of the auto-collimator according to the present utility model.
Fig. 3 is a side view of the multi-focal zone lens according to the present utility model.
Reference numerals:
1. an autocollimator; 2. a multifocal zone lens; 3. a precise five-dimensional adjusting frame; 4. a lens group to be tested; 5. a lens base; 6. leveling and aligning device; 7. an air bearing; 8. a displacement sensor; 9. a marble frame; 10. an image display system; 11. a centering positioning measurement analysis system; 12. a light source; 13. a focusing lens; 14. a cross reticle; 15. a beam-splitting prism; 16. a collimator lens; 17. and an image acquisition module.
Detailed Description
Embodiments of the present utility model will be described below with reference to the accompanying drawings in the embodiments of the present utility model.
In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled" and "mounted" should be interpreted broadly, and for example, "coupled" may or may not be detachably coupled; may be directly connected or indirectly connected through an intermediate medium. In addition, "communication" may be direct communication or may be indirect communication through an intermediary. Wherein, "fixed" means that the relative positional relationship is not changed after being connected to each other. References to orientation terms, such as "inner", "outer", "top", "bottom", etc., in the embodiments of the present utility model are merely to refer to the orientation of the drawings and, therefore, the use of orientation terms is intended to better and more clearly illustrate and understand the embodiments of the present utility model, rather than to indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the embodiments of the present utility model.
In embodiments of the present utility model, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature.
An optical lens centering and positioning device based on a multi-focus annular lens specifically comprises an auto-collimator 1, the multi-focus annular lens 2, a precise five-dimensional adjusting frame 3, a lens group 4 to be measured, a lens seat 5, a leveling and aligning device 6, an air bearing 7, a displacement sensor 8, a marble frame 9, an image display system 10 and a centering, positioning, measuring and analyzing system 11.
The auto-collimator 1 is used for outputting parallel collimated laser beams and collecting reflected images, and consists of a light source 12, a focusing lens 13, a cross reticle 14, a beam splitting prism 15, a collimating lens 16 and an image collecting module 17; wherein: a light source 12 for emitting a divergent laser beam; a focusing lens 13 for converging the light beam emitted from the light source 12 onto the cross reticle 14 to uniformly illuminate the cross reticle 14; the cross dividing plate 14 is carved with two mutually perpendicular short transverse lines on the surface and is positioned at the focal length of the focusing lens 13 for forming a cross silk image; the beam splitter prism 15 is used for separating the emitted light and the reflected and returned light into two paths, the light emitted by the cross reticle 14 remains unchanged along the original direction, and the reflected and returned light vertically propagates to the image acquisition module 17; a collimator lens 16 for collimating the light emitted through the cross reticle 14 into horizontal light for centering; the image acquisition module 17 acquires the cross wire reflection image by adopting an image sensor and outputs the image data to the given middle positioning measurement analysis system 11.
A multifocal zone lens 2, each zone having a different focal length, i.e., a zone focus having a plurality of different positions; the focal points of the different zones are distributed along the optical axis of the multifocal zone lens 2; the position of the focal point of the multifocal zone lens 2 is determined by the position of the sphere center of the optical lens in the lens group 4 to be measured.
The precise five-dimensional adjusting frame 3 is used for adjusting the position of the multi-focus zone lens 2 to enable the focus of the multi-focus zone lens 2 to coincide with the sphere center of the lens to be measured of the lens group 4 to be measured.
And the lens group 4 to be tested is used for reflecting the light beam to return to the autocollimator 1.
The lens base 5 is used for fixing and adjusting the position of the lens group 4 to be measured.
The leveling and aligning device 6 is arranged on the air bearing 7 and is used for adjusting the center shaft of the lens seat 5 to be coaxial with the center shaft of the air bearing 7;
the air bearing 7 is a static pressure air bearing, is fixed with the lens base 5, can rotate the lens base 5 and the lens group 4 to be tested in the horizontal direction, and is used for providing high-precision rotation precision for the centering system.
The displacement sensor 8 is used for measuring the coaxiality of the lens base and the air bearing and inputting the measurement result into the centering positioning measurement analysis system 11.
And the marble frame 9 is used for fixing the auto-collimator 1, the precise five-dimensional adjusting frame 3 and the air bearing 7 and ensuring that the optical axis of the auto-collimator 1 coincides with the rotating axis of the air bearing 7.
The image display system 10 is used for receiving the reflected image input by the autocollimator 1 and displaying the motion trail of the cross differentiation silk reflected image.
The centering positioning measurement analysis system 11 is used for analyzing an eccentric error and an inclination error of a movement track of the cross wire through an image recognition algorithm after receiving data of the displacement sensor 8 and the image display system 10, and giving centering precision; and simultaneously, carrying out Fourier transformation on the edge diffusion function of the cross reticle image to obtain the contrast value, and calculating the axial assembly error of the optical lens.
In this embodiment, the parallel light beams are converged at the sphere center of the front surface of the optical lens by the multi-focal zone lens 2, and the light beams reach the optical lens of the lens group 4 to be tested and are reflected back to the autocollimator 1, and are imaged on the image acquisition module 17 by the beam splitting prism 15.
In the present embodiment, the upper surface of the multifocal zone lens 2 is a standard spherical surface and an aspherical surface, and the lower surface may be a zone surface; the annular surface of (2) may be a discontinuous annular fresnel surface or may be a continuous non-conductive curved surface.
In the present embodiment, the plurality of focuses of the multifocal zone lens 2 are located in the center of curvature of the lens upper surface of the lens group 4 to be measured from bottom to top in order from bottom to top.
The utility model also designs an optical lens centering and positioning method based on the multi-focus zone lens, fig. 3 is a side view of the multi-focus zone lens, taking the fresnel surface of the multi-focus zone lens 2 with n=7 zones as an example, and the 1 st zone located at the innermost circumference has a focal length f 1 The focal length of the 2 nd to 3 rd annular bands positioned in the secondary inner periphery is f 2 The focal length of the 4 th to 5 th annular zones positioned at the secondary periphery is f 3 The focal length of the 6 th to 7 th annular bands positioned at the outermost periphery is f 4 . The lens group 4 to be measured consists of 4 lenses, and the curvature center of the upper surface of each lens is sequentially positioned at f from bottom to top during design 1 、f 2 、f 3 And f 4 Is defined by a center of curvature of the lens.
Mounting the lens seat 5 on a leveling and aligning device 6, and enabling the lens seat 5 to be coaxial with an air bearing 7 through measurement of a displacement sensor 8;
the first optical lens (focal length f) to be mounted of the lens group 4 to be tested 1 ) Placing the lens seat 5, and adjusting the precise five-dimensional adjusting frame 3 to enable the focus in the multi-focus annular lens 2 to coincide with the sphere center of the front surface of the optical lens; and the air bearing 7 is rotated to analyze the movement track of the cross dividing line, and the position of the optical lens is adjusted according to the movement track until the centering error is minimum in the centering positioning measurement analysis system 11；
A second optical lens (focal length f) to be mounted on the lens group 4 to be tested 2 ) The lens is placed on the lens seat 5, and the optical lens is not required to be adjusted by the multi-focus annular lens 2 at the moment; the rotary air bearing 7 analyzes the motion trail of the cross dividing line, and adjusts the position of the installed optical lens according to the motion trail until the centering error is minimum in the centering positioning measurement analysis system 11;
a third optical lens (focal length f) to be mounted on the lens group 4 to be tested 3 ) The lens is placed on the lens seat 5, and the optical lens is not required to be adjusted by the multi-focus annular lens 2 at the moment; the rotary air bearing 7 analyzes the motion trail of the cross dividing line, and adjusts the position of the installed optical lens according to the motion trail until the centering error is minimum in the centering positioning measurement analysis system 11;
a fourth optical lens (focal length f) to be mounted on the lens group 4 to be tested 4 ) The lens is placed on the lens seat 5, and the optical lens is not required to be adjusted by the multi-focus annular lens 2 at the moment; the rotary air bearing 7 analyzes the motion trail of the cross dividing line, and adjusts the position of the installed optical lens according to the motion trail until the centering error is minimum in the centering positioning measurement analysis system 11;
and finally, carrying out Fourier transformation on the edge diffusion function of the cross dividing line image to obtain the contrast value, and calculating the axial positioning error of the optical lens, so that the centering of the lens is finished.
The present utility model is not limited to the above embodiments, and any person skilled in the art can easily think about the changes or substitutions within the technical scope of the present utility model, and the changes or substitutions are intended to be covered by the scope of the present utility model; embodiments of the utility model and features of the embodiments may be combined with each other without conflict. Therefore, the protection scope of the utility model is subject to the protection scope of the claims.
Claims (6)
1. An optical lens centering and positioning device based on a multifocal zone lens is characterized by comprising the following specific components:
the device comprises a marble frame (9), wherein an auto-collimator (1) is arranged at the upper part of the marble frame (9), a precise five-dimensional adjusting frame (3) is arranged at the middle part of the marble frame (9), a multi-focus annular lens (2) is arranged in the precise five-dimensional adjusting frame (3), and an air bearing (7) is arranged at the lower part of the marble frame (9);
the upper part of the air bearing (7) is provided with a leveling and aligning device (6) for adjusting the center shaft of the lens seat (5) to be coaxial with the center shaft of the air bearing (7);
a lens seat (5) is arranged at the top of the leveling and aligning device (6), and the lens seat (5) is used for installing a lens group (4) to be tested;
the device also comprises an image display system (10) and a centering positioning measurement analysis system (11), wherein the image display system (10) is connected with the auto-collimator (1), and the image display system (10) is connected with the centering positioning measurement analysis system (11);
the device also comprises a displacement sensor (8) which is used for measuring the coaxiality of the lens seat (5) and the air bearing (7) and inputting the measurement result into a centering positioning measurement analysis system (11).
2. The optical lens centering and positioning device based on the multi-focal zone lens according to claim 1, wherein the auto-collimator (1) is used for outputting parallel collimated laser beams and collecting reflected images, and comprises a light source (12), a focusing lens (13), a cross reticle (14), a beam splitting prism (15), a collimating lens (16) and an image collecting module (17);
wherein: a light source (12) for emitting a divergent laser beam;
the focusing lens (13) is used for converging the light beam emitted by the light source (12) onto the cross reticle (14) so as to uniformly illuminate the cross reticle (14);
two mutually perpendicular short transverse lines are carved on the surface of the cross reticle (14) and are positioned at the focal length of the focusing lens (13) for forming a cross silk image;
the beam splitting prism (15) is used for separating the emitted light and the reflected and returned light into two paths, the light emitted by the cross reticle (14) is kept unchanged along the original direction, and the reflected and returned light vertically propagates to the image acquisition module (17);
the collimating lens (16) is used for collimating the light rays emitted by the cross reticle (14) into horizontal light rays for centering;
the image acquisition module (17) acquires the cross wire reflection image by adopting an image sensor and outputs the image data to the given middle positioning measurement analysis system (11).
3. An optical lens centering and positioning device based on a multi-focal zone lens according to claim 1, characterized in that the multi-focal zone lens (2) has different focal lengths for each zone, the focal points of the different zones being distributed along the optical axis of the multi-focal zone lens (2), the position of the focal point of the multi-focal zone lens (2) being determined by the position of the sphere center of the optical lens in the lens group (4) to be measured.
4. An optical lens centering and positioning device based on a multifocal zone lens according to claim 1, characterized in that said air bearing (7) is a hydrostatic air bearing capable of rotating the lens holder (5) and the lens group (4) to be tested in a horizontal direction for providing a centering system with high precision of revolution.
5. An optical lens centering and positioning device based on a multi-focal zone lens according to claim 3, wherein the upper surface of the multi-focal zone lens (2) is a standard spherical surface and an aspheric surface, the lower surface is a zone surface, and the zone surface is a discontinuous zone fresnel surface or is formed by a continuous non-conductive curved surface.
6. An optical lens centering and positioning device based on a multi-focal zone lens according to claim 3, wherein the multiple focuses of the multi-focal zone lens (2) are sequentially located in the center of curvature of the upper surface of the lens group (4) to be tested from bottom to top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321603329.8U CN220104459U (en) | 2023-06-25 | 2023-06-25 | Optical lens centering and positioning device based on multi-focus annular lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321603329.8U CN220104459U (en) | 2023-06-25 | 2023-06-25 | Optical lens centering and positioning device based on multi-focus annular lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220104459U true CN220104459U (en) | 2023-11-28 |
Family
ID=88868128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321603329.8U Active CN220104459U (en) | 2023-06-25 | 2023-06-25 | Optical lens centering and positioning device based on multi-focus annular lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220104459U (en) |
-
2023
- 2023-06-25 CN CN202321603329.8U patent/CN220104459U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107843213B (en) | Confocal auto-collimation center deviation and curvature radius measuring method and device | |
| EP2538170A1 (en) | Method and device for measuring multiple parameters of differential confocal interference component | |
| US8913234B2 (en) | Measurement of the positions of centres of curvature of optical surfaces of a multi-lens optical system | |
| US4758089A (en) | Holographic interferometer | |
| CN105738078A (en) | Measurement of the positions of curvature midpoints of optical areas of a single or multi-lens optical system | |
| CN108957781A (en) | Optical lens adjustment and detection system and method | |
| US6791696B1 (en) | Automated optical measurement apparatus and method | |
| CN108663197A (en) | A kind of small-sized lens detecting device and its detection method | |
| CN114577125B (en) | Non-contact optical lens center thickness measuring method and measuring device | |
| US6750958B1 (en) | Automated optical measurement apparatus and method | |
| US11391564B2 (en) | Active alignment technique for measuring tilt errors in aspheric surfaces during optical assembly using lens alignment station (LAS) | |
| Langehanenberg et al. | Smart and precise alignment of optical systems | |
| CN220104459U (en) | Optical lens centering and positioning device based on multi-focus annular lens | |
| CN217845590U (en) | Objective lens aberration testing device | |
| US6924897B2 (en) | Point source module and methods of aligning and using the same | |
| JP2005140673A (en) | Aspherical eccentricity measuring device and aspherical eccentricity measuring method | |
| JP2007240168A (en) | Inspection apparatus | |
| CN116754190A (en) | Optical lens centering and positioning device and method based on multi-focus annular lens | |
| CN109341587A (en) | Splicing measuring device and method | |
| JP2735104B2 (en) | Aspherical lens eccentricity measuring apparatus and measuring method | |
| JPH0626834A (en) | Method and apparatus for measuring radius of curvature | |
| JP2005214879A (en) | Instrument and method for measuring eccentricity of non-spherical face, and aspheric lens used therefor | |
| JP4190044B2 (en) | Eccentricity measuring device | |
| JP2004205478A (en) | Three-dimensional coordinate measuring method | |
| Parks | Versatile autostigmatic microscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: Room 102, 1st Floor, Block A, Building 10, No. 611 Dongguan Road, Puyan Street, Binjiang District, Hangzhou City, Zhejiang Province, 310000 Patentee after: Nanoscience Instrument Equipment (Hangzhou) Co.,Ltd. Country or region after: China Address before: 201206, 1st to 2nd floors, Building 48, No. 1000 Jinhai Road, China (Shanghai) Pilot Free Trade Zone, Pudong New Area, Shanghai Patentee before: Nano Science Instrument Equipment (Shanghai) Co.,Ltd. Country or region before: China |