CN108871305A - Resonance microthrust test and preparation method thereof - Google Patents
Resonance microthrust test and preparation method thereof Download PDFInfo
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- CN108871305A CN108871305A CN201810651367.8A CN201810651367A CN108871305A CN 108871305 A CN108871305 A CN 108871305A CN 201810651367 A CN201810651367 A CN 201810651367A CN 108871305 A CN108871305 A CN 108871305A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5663—Manufacturing; Trimming; Mounting; Housings
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- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
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Abstract
The present invention provides a kind of resonance microthrust tests, including substrate (100), resonator (102)；The resonator (102) is arranged on substrate (100)；The resonator (102) includes protrusion (101), twin beams ring (103)；The central point of the protrusion (101) is overlapped with the central point of substrate (100)；One end of the twin beams ring (103) is circumferentially connected with protrusion (101).The present invention also provides a kind of preparation methods of resonance microthrust test.Preparation method step provided by the invention is succinct, is conducive to batch production；Resonance microthrust test has high symmetry, and structure is relatively stable, shock resistance, has excellent performance；The electrode of resonator peripheral edge is distributed in for the electrode being distributed in resonator inside concentric loop, the Q value of resonant gyroscope can be improved, thus is responded sensitiveer.
Description
Technical field
The present invention relates to resonator microthrust tests, and in particular, to diamond disc circular beam resonance microthrust test and its preparation
Method.
Background technique
Gyroscope is a kind of inertia device for capableing of sensitive detection carrier angle or angular speed, fixed in gesture stability and navigation
There is very important effect in the fields such as position.With science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system for
The requirement of gyroscope is also to low cost, small size, high-precision, multiaxis detection, high reliability, the side for adapting to various adverse circumstances
To development.Gyroscope based on MEMS (Micro-Electro-Mechanical System, MEMS) technology uses
The processing of micro-nano batch fabrication techniques, cost, size, power consumption are all very low, and environmental suitability, working life, reliability, collection
Cheng Du has a great raising compared with traditional technology, thus to have become MEMS technology in recent years extensive for MEMS grades of microthrust test
One important directions of research and application and development.
With application and development of the MEMS gyro in navigation system, the external scientist 1994 hemispherical resonator tops developed
Spiral shell performance with higher.By means of the research of this hemispherical reso nance gyroscope, researchers are to high q-factor and symmetrical structure
The design of MEMS resonator, which has, to be better understood.But since the bar part of the rod structure resonator of early stage needs are assembled in
In micromechanics mechanism, in the long run, higher dynamic load and the inaccurate connection in junction will lead to hemispherical resonator top
Spiral shell generates bigger offset.Then, it is contemplated that design a kind of with good symmetry, small and compact, planar structure MEMS
Gyro, i.e. diamond disc circular beam resonance microthrust test.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of resonance microthrust tests and preparation method thereof.
A kind of resonance microthrust test provided according to the present invention, including substrate, resonator；
The resonator is arranged in substrate；
The resonator includes protrusion, twin beams ring；
The central point of the protrusion is overlapped with the central point of substrate；
One end of the twin beams ring is circumferentially connected with protrusion.
It preferably, further include annular girder；
The resonator is arranged in annular girder；
The annular girder constitutes resonator holding tank；
The inner beam wall of the annular girder is connected with the other end of twin beams ring；
The resonance microthrust test, further includes electrode；
The electrode is circumferentially disposed at the outer side Liang Bi of annular girder；The electrode is evenly distributed in substrate；It is described
The quantity of electrode is multiple；There is gap between multiple electrodes；
The inner beam wall of the annular girder is the Liang Bi towards based central point direction；The outer Liang Bi direction of the annular girder
The Liang Bi of electrode direction.
Preferably, the quantity of the twin beams ring is multiple；
Multiple twin beams rings are uniformly distributed around protrusion；The line between multiple twin beams rings being oppositely arranged
Midpoint is on the central point of protrusion.
Preferably, the protrusion and electrode are coated with conductive film；
The position of the electrode and the position of twin beams ring correspond；
There is gap between multiple twin beams rings.
Preferably, the electrode is in annular segments shape；
The quantity of the twin beams ring is multiple；
The quantity of the electrode is identical as the quantity of twin beams ring；
The first line is formed between the twin beams ring being oppositely arranged；
The second line is formed between the electrode being oppositely arranged corresponding with the twin beams ring；
First line and the second line coincident.
The present invention also provides a kind of preparation methods of resonance microthrust test, including holding tank forming step, electrode to form step
Rapid and resonator forming step.
Preferably, the holding tank forming step includes resonator holding tank forming step, electrode holding tank forming step；
In the resonator holding tank forming step：Resonator holding tank is formed on the silicon layer of SOI；
In the electrode holding tank forming step：Electrode holding tank is formed on the silicon layer of SOI.
Preferably, in the electrode forming step：
Electrode is formed in the electrode holding tank.
Preferably, in the resonator forming step：
Resonator is formed in the resonator holding tank.
Preferably, the material of the electrode and resonator is carbon material.
Compared with prior art, the present invention has following beneficial effect：
1, processing technology step is succinct, using mature miromaching and lithographic method, is conducive to batch production；
2, diamond disc circular beam resonance microthrust test has high symmetry, and structure is relatively stable, and shock resistance has
Excellent performance；
3, the electrode for being distributed in diamond disc circle beam resonator peripheral edge is round relative to diamond disc is distributed in
For electrode in ellbeam resonator inside concentric loop, the Q value of diamond disc circular beam resonant gyroscope can be improved, thus
It responds sensitiveer.
4, the present invention has many advantages, such as that small in size, stable structure, response are sensitive, with good symmetry, thus can be with
Reach higher performance.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon：
Fig. 1 is the top view of resonance microthrust test provided by the invention.
Fig. 2 is the perspective view of resonance microthrust test provided by the invention.
Fig. 3 is the cross-sectional view of resonance microthrust test provided by the invention.
Fig. 4 is the top view of resonator provided by the invention.
Fig. 5 is the perspective view of resonator provided by the invention.
Fig. 6 is the main view of resonator provided by the invention.
Fig. 7 is the top view of resonator provided by the invention and its peripheral edge electrode relative position.
Fig. 8 is the perspective view of resonator provided by the invention and its peripheral edge electrode relative position.
Fig. 9 is the cross-sectional view of resonator provided by the invention and its peripheral edge electrode relative position.
Figure 10 is the production process schematic diagram of resonance microthrust test provided by the invention.
Figure 11 is the production process schematic diagram of resonance microthrust test provided by the invention.
Figure 12 is the production process schematic diagram of resonance microthrust test provided by the invention.
Figure 13 is the production process schematic diagram of resonance microthrust test provided by the invention.
Figure 14 is the production process schematic diagram of resonance microthrust test provided by the invention.
Figure 15 is the production process schematic diagram of resonance microthrust test provided by the invention.
Appended drawing reference is as shown in the table in figure：
| Substrate 100 |
| Protrusion 101 |
| Resonator 102 |
| Twin beams ring 103 |
| Electrode 104 |
| Silicon layer 105 |
| Electrode holding tank 106 |
| Resonator material 107 |
| Sacrificial layer 108 |
| Annular girder 109 |
| Resonator holding tank 110 |
| Isolated annulus 111 |
| Flexible beam 112 |
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention
Protection scope.
As shown in Figures 1 to 9, the present invention provides a kind of resonance microthrust tests, including substrate 100, resonator 102；It is described
Resonator 102 is arranged in substrate 100；The resonator 102 includes protrusion 101, twin beams ring 103；The protrusion 101
Central point is overlapped with the central point of substrate 100；One end of the twin beams ring 103 is circumferentially connected with protrusion 101.
Resonance microthrust test provided by the invention further includes annular girder 109；The resonator 102 is arranged in annular girder 109
It is interior；The annular girder 109 constitutes resonator holding tank 110；The inner beam wall of the annular girder 109 and the other end of twin beams ring 103
It is connected；The resonance microthrust test further includes electrode 104；The electrode 104 is circumferentially disposed at the Wai Liangbi of annular girder 109
Around；The electrode 104 is evenly distributed in substrate 100；The quantity of the electrode 14 is multiple；Between multiple electrodes 14
With gap；The inner beam wall of the annular girder 109 is the Liang Bi towards the central point direction of substrate 100；The annular girder 109
Liang Bi of the outer Liang Bi towards 104 direction of electrode.
The quantity of the twin beams ring 103 is multiple；Multiple twin beams rings 103 are uniformly distributed around protrusion 101；Relatively
The midpoint for the line between multiple twin beams rings 103 being arranged is on the central point of protrusion 101.The central point, preferably
Ground can be understood as the center of circle, but the shape of the protrusion 101 is not limited to annular or round, and rectangle and other shapes exist
In protection scope of the present invention.
The protrusion 101 and electrode 104 are coated with conductive film；The position of the electrode 104 and twin beams ring 103
Position corresponds；There is gap between multiple twin beams rings 103.
The electrode 104 is in annular segments shape；The quantity of the twin beams ring 103 is multiple；The quantity of the electrode 104
It is identical as the quantity of twin beams ring 103；The first line is formed between the twin beams ring 103 being oppositely arranged；
The second line is formed between the electrode 104 being oppositely arranged corresponding with the twin beams ring 103；Described first connects
Line and the second line coincident.Wherein, the annular segments shape, i.e., the shape cut annulus along radial direction, the shape
Shape belongs to a part of annulus.Described above-mentioned is oppositely arranged, and in particular, twin beams ring 103 is preferably oppositely arranged two-by-two,
And it is uniformly distributed circumferentially around protrusion 101, and be connected with the side wall of protrusion 101.
The present invention also provides a kind of resonance microthrust test preparation method, including holding tank forming step, electrode formed step
Rapid and resonator forming step.
The holding tank forming step includes resonator holding tank forming step, electrode holding tank forming step；Described
In resonator holding tank forming step：Resonator holding tank 110 is formed on the silicon layer 105 of SOI；Flute profile is accommodated in the electrode
At in step：Electrode holding tank 106 is formed on the silicon layer 105 of SOI.
In the electrode forming step：Electrode 104 is formed in the electrode holding tank 106.It is formed in the resonator
In step：Resonator 102 is formed in the resonator holding tank 110.
Resonance microthrust test provided by the invention and preparation method thereof is further described below：
As shown in Figures 1 to 9, the present invention provides a kind of resonance microthrust tests, it is preferable that the center of the substrate 100 is
The numberical range of bottom surface circular diameter can be the central cylindrical of 20 μm~2mm, i.e. protrusion 101；8 electrodes 104 of secondary periphery,
The numberical range for preferably fanning the width of ring electrode can be 10 μm~50 μm.
As shown in figure 3, the protrusion part of the substrate 100, i.e. protrusion 101 and preferably 8 peripheral edges are discrete
Electrode 104 height numberical range can be 1 μm~100 μm.
As shown in Figure 4, Figure 5, it is preferably 20 μm~2mm that the center of the resonator 102, which is the numberical range of diameter,
Central cylindrical；Isolated annulus 111 in each twin beams ring 103 is centrosymmetric, and preferably includes two 112 Hes of flexible beam
One isolated annulus 111, the size of two flexible beams 112 is identical, length preferably numberical range be 10 μm~100 μm, it is wide
The numberical range of degree is 5 μm~50 μm, and the numberical range of the outside diameter of annulus is the numerical value of 10 μm~100 μm, interior circular diameter
Range is 10 μm~100 μm.Flexible beam 112 is connected with the side wall of protrusion 101.
As shown in Figure 1 to Figure 3, it is preferable that discrete 104 equidistantly distributed of electrode of 8 peripheral edges in the substrate 100
And the width of each electrode 101 is all the same, the discrete electrode 104 of the central cylindrical and 8 peripheral edges that substrate 100 protrudes above
It is highly all the same.
As shown in Figs. 7-9, it is preferable that the center of resonator 102 is cylindrical structure, i.e., central cylindrical is cylindrical body knot
Structure, what it is around central cylindrical is 8 twin beams rings 103, and each twin beams ring 103 includes isolated 111, two flexible beams 112 of annulus；
The length of multiple flexible beams 112, width are all the same, and outside diameter, the interior circular diameter of multiple isolated annulus 111 are also equal
It is identical.
As shown in Figure 1 to 9,8 electrodes 104 are uniformly distributed along 102 peripheral edge of resonator, and each electrode 104
Central axis with the center overlapping of axles of resonator 102, the width of each electrode 104 is all the same, each electrode 104 and resonator
101 clearance distance is also all the same.
Preferably, the electrode 104 of 102 peripheral edge of resonator is respectively 4 driving electrodes and 4 detecting electrodes；Wherein：
4 driving electrodes and 4 detecting electrode uniform intervals arrangements, 90 ° of the location interval of adjacent driven electrode, adjacent detecting electrode
90 ° of location interval, 45 ° of location interval of adjacent driven electrode and detecting electrode.
In one of embodiment of the invention, the numberical range of the thickness of the substrate 100 is 300 μm~800 μm,
The numberical range of diameter is 2mm~8mm；The substrate 100 is the silicon (Silicon-On-Insulator, SOI) on insulator
Piece, silicon materials have the characteristics such as high temperature resistant, small, the corrosion-resistant, resonance of thermal expansion coefficient, gyroscope finished product can be enable in severe ring
It works under border.
In wherein another embodiment of the invention, the numberical range of the thickness of resonator 102 is 100 μm~500 μm,
The numberical range of diameter is 2mm~8mm；The numberical range of the thickness of the electrode 104 is 100 μm~500 μm；The resonator
102 and its material of electrode 104 of peripheral edge be diamond, i.e., resonator material 107, diamond properties are stablized, can be with
Gyroscope is set to reach higher performance.
The preparation method of resonant gyroscope provided by the invention is further described below：
(1) such as Figure 10, silicon (Silicon-On-Insulator, SOI) piece in insulating substrate is cleaned；
(2) such as Figure 11, using deep reactive ion etch (Deep Reactive Ion Etching, DRIE) technology in SOI
Top layer silicon is etched slot identical with the dispersive electrode, the disk circular beam resonator shape by piece, i.e. electrode accommodates
Slot 106, resonator holding tank 110；The buries oxide layer of the SOI piece sacrifices once layer 108 and is used as the stopping for etching the slot
Layer；
(3) such as Figure 12, using low-pressure chemical deposition (Low Power Chemical Deposition, LPCVD) in institute
State depositing diamond in slot；
(4) it such as Figure 13, is removed outside the slot after the deposition step using the method for laser cutting or polishing
Diamond；Specifically, the diamond outside the slot, refers to being located at the electrode holding tank 106, resonator holding tank 110
Carbon material outside the notch of the two, it is therefore preferable to diamond；More specifically in step (3) by diamond deposition in electrode
In the vallecular cavity of both holding tank 106, resonator holding tank 110, the method then cut or polished by light will not excessively
Diamond removal outside notch；
(5) such as Figure 14, the top layer silicon of the SOI piece, the wet etching are removed with wet etching or gas etching method
Solution KOH solution may be selected, XeF may be selected in the gas etching2；
(6) such as Figure 15, the diamond device is obtained using HF acid etch SOI piece sacrificial layer silica, i.e. the present invention mentions
The resonance microthrust test of confession.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, this not shadow
Ring substantive content of the invention.In the absence of conflict, the feature in embodiments herein and embodiment can any phase
Mutually combination.
Claims (10)
1. a kind of resonance microthrust test, which is characterized in that including substrate (100), resonator (102)；
The resonator (102) is arranged on substrate (100)；
The resonator (102) includes protrusion (101), twin beams ring (103)；
The central point of the protrusion (101) is overlapped with the central point of substrate (100)；
One end of the twin beams ring (103) is circumferentially connected with protrusion (101).
2. resonance microthrust test according to claim 1, which is characterized in that further include annular girder (109)；
Resonator (102) setting is in annular girder (109)；
The annular girder (109) constitutes resonator holding tank (110)；
The inner beam wall of the annular girder (109) is connected with the other end of twin beams ring (103)；
The resonance microthrust test further includes electrode (104)；
The electrode (104) is circumferentially disposed at the outer side Liang Bi of annular girder (109)；The electrode (104) is evenly distributed on
In substrate (100)；The quantity of the electrode (14) is multiple；There is gap between multiple electrodes (14)；
The inner beam wall of the annular girder (109) is the Liang Bi towards the central point direction of substrate (100)；The annular girder (109)
Outer Liang Bi towards electrode (104) direction Liang Bi.
3. resonance microthrust test according to claim 2, which is characterized in that the quantity of the twin beams ring (103) is multiple；
Multiple twin beams rings (103) are uniformly distributed around protrusion (101)；The multiple twin beams rings (103) being oppositely arranged
Between line midpoint on the central point of protrusion (101).
4. resonance microthrust test according to claim 3, which is characterized in that the protrusion (101) and electrode (104) apply
It is covered with conductive film；
The position of the electrode (104) and the position of twin beams ring (103) correspond；
There is gap between multiple twin beams rings (103).
5. resonance microthrust test according to claim 4, which is characterized in that the electrode (104) is in annular segments shape；
The quantity of the twin beams ring (103) is multiple；
The quantity of the electrode (104) is identical as the quantity of twin beams ring (103)；
The first line is formed between the twin beams ring (103) being oppositely arranged；
The second line is formed between the electrode (104) being oppositely arranged corresponding with twin beams ring (103)；
First line and the second line coincident.
6. the preparation method of resonance microthrust test described in a kind of any one of claims 1 to 5, which is characterized in that including accommodating
Slot forming step, electrode forming step and resonator forming step.
7. the preparation method of resonance microthrust test according to claim 6, which is characterized in that the holding tank forming step packet
Include resonator holding tank forming step, electrode holding tank forming step；
In the resonator holding tank forming step：Resonator holding tank (110) are formed on the silicon layer (105) of SOI；
In the electrode holding tank forming step：Electrode holding tank (106) are formed on the silicon layer (105) of SOI.
8. the preparation method of resonance microthrust test according to claim 7, which is characterized in that in the electrode forming step
In：
Electrode (104) are formed in the electrode holding tank (106).
9. the preparation method of resonance microthrust test according to claim 8, which is characterized in that in the resonator forming step
In：
Resonator (102) are formed in the resonator holding tank (110).
10. the preparation method of resonance microthrust test according to claim 9, which is characterized in that the electrode (104) and resonance
The material of device (102) is carbon material.
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| CN201810651367.8A CN108871305A (en) | 2018-06-22 | 2018-06-22 | Resonance microthrust test and preparation method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021134675A1 (en) * | 2019-12-31 | 2021-07-08 | 瑞声声学科技(深圳)有限公司 | Mems gyroscope |
| CN114964192A (en) * | 2022-07-26 | 2022-08-30 | 深圳市景创科技电子股份有限公司 | Novel gyroscope structure and device |
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| CN105371833A (en) * | 2015-11-19 | 2016-03-02 | 上海交通大学 | Disc multi-ring outer S-shaped flexible beam resonator gyro and preparation method thereof |
| CN105371832A (en) * | 2015-11-19 | 2016-03-02 | 上海交通大学 | Disc multi-ring inner double-beam isolated ring resonator gyro and preparation method thereof |
| CN105486297A (en) * | 2015-11-19 | 2016-04-13 | 上海交通大学 | Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof |
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2018
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20140224016A1 (en) * | 2011-09-21 | 2014-08-14 | Tronics Microsystems S.A. | Micro-electromechanical gyro device |
| CN105371833A (en) * | 2015-11-19 | 2016-03-02 | 上海交通大学 | Disc multi-ring outer S-shaped flexible beam resonator gyro and preparation method thereof |
| CN105371832A (en) * | 2015-11-19 | 2016-03-02 | 上海交通大学 | Disc multi-ring inner double-beam isolated ring resonator gyro and preparation method thereof |
| CN105486297A (en) * | 2015-11-19 | 2016-04-13 | 上海交通大学 | Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021134675A1 (en) * | 2019-12-31 | 2021-07-08 | 瑞声声学科技(深圳)有限公司 | Mems gyroscope |
| CN114964192A (en) * | 2022-07-26 | 2022-08-30 | 深圳市景创科技电子股份有限公司 | Novel gyroscope structure and device |
| CN114964192B (en) * | 2022-07-26 | 2022-10-14 | 深圳市景创科技电子股份有限公司 | Novel gyroscope structure and device |
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Application publication date: 20181123 |