CN105486297A - Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof - Google Patents
Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof Download PDFInfo
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- CN105486297A CN105486297A CN201510807733.0A CN201510807733A CN105486297A CN 105486297 A CN105486297 A CN 105486297A CN 201510807733 A CN201510807733 A CN 201510807733A CN 105486297 A CN105486297 A CN 105486297A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5663—Manufacturing; Trimming; Mounting; Housings
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Abstract
The invention provides a disc multiple-ring inner S-shaped flexible beam resonance gyro and a preparation method thereof. The disc multiple-ring inner S-shaped flexible beam resonant gyro comprises a substrate, a disc multiple-ring inner S-shaped flexible beam resonator and a group of electrodes distributed at the periphery of the disc multiple-ring inner S-shaped flexible beam resonator, wherein the disc multiple-ring inner S-shaped flexible beam resonator comprises a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of groups of spokes, the central cylinder is connected with the substrate, the concentric rings are connected through a plurality of spokes, two ends of each of the plurality of S-shaped flexible beams are connected with the central cylinder and the inner side of the smallest concentric ring in the plurality of concentric rings, and each of the electrodes is connected with the substrate. The disc multiple-ring inner S-shaped flexible beam resonance gyro has the advantages of a small size, stable structure, sensitive response, etc.; and the gyro has good symmetry, so high performance is obtained.
Description
Technical field
The present invention relates to a kind of gyro of field of micro electromechanical technology, particularly, relate to S shape flexible beam resonant gyroscope and preparation method thereof in the many rings of a kind of disk.
Background technology
Gyroscope be a kind of can the responsive inertia device detecting carrier angle or angular velocity, have very important effect in the field such as gesture stability and navigator fix.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system for gyrostatic requirement also to low cost, small size, high precision, multiaxis detection, high reliability, the future development of various rugged surroundings can be adapted to.Gyroscope based on MEMS technology adopts the processing of micro-nano batch fabrication techniques, its cost, size, power consumption are all very low, and environmental suitability, mission life, reliability, integrated level have great raising compared with conventional art, thus the microthrust test of MEMS level has become an important directions of the extensive investigation and application exploitation of MEMS technology in the last few years.
Along with the application and development of MEMS gyro in navigational system, the hemispherical reso nance gyroscope of external scientist development in 1994 has higher performance.By means of the research of this hemispherical reso nance gyroscope, researchers to have high q-factor and symmetrical structure MEMS resonator be designed with better understanding.But the bar part due to early stage bar structure resonator needs to be assembled in micromechanics mechanism, in the long run, higher dynamic load and the out of true connection in junction can cause hemispherical reso nance gyroscope to produce larger skew.So, contemplate that design is a kind of has good symmetry, MEMS gyro that is little and compact, planar structure, i.e. S shape flexible beam resonant gyroscope in the many rings of disk.
Summary of the invention
The object of this invention is to provide the structure of S shape flexible beam resonant gyroscope in the many rings of a kind of disk, have that volume is little, Stability Analysis of Structures, respond the advantages such as sensitive, there is good symmetry, thus can reach higher performance.
According to an aspect of the present invention, S shape flexible beam resonant gyroscope in the many rings of a kind of disk is provided, comprises:
A substrate;
S shape flexible beam resonator in a many ring of disk, comprise central cylindrical, multiple S shape flexible beam, multiple donut and organize spoke more, wherein: central cylindrical is connected with substrate, all be connected by multiple spoke between donut, the two ends of multiple S shape flexible beam are connected with inside central cylindrical and minimum annulus in multiple donut respectively;
One group of electrode being distributed in S shape flexible beam resonator peripheral edge in the many rings of disk, and each electrode is connected with substrate respectively.
Preferably, described substrate is provided with the part of protrusion, the part of described protrusion comprises central cylindrical and the discrete fan loop section of n peripheral edge, n >=8 and n is even number, wherein: the discrete fan loop section of n peripheral edge equidistantly distributes and the width of each fan loop section is equal; The height of the fan loop section that central cylindrical is discrete with n peripheral edge is equal;
In substrate, outermost peripheral edge is n the electrode slice equidistantly distributed, wherein: the position one_to_one corresponding of n electrode slice and the discrete fan loop section of n peripheral edge, the fan loop section wire that n electrode slice is discrete with n peripheral edge is respectively connected and distance is between the two all equal; Width, the thickness of n electrode slice are all equal;
By extraction one lead-in wire on suprabasil central cylindrical, for ground connection or connecting to neutral electromotive force.
More preferably, described central cylindrical and the discrete fan loop section of n peripheral edge are respectively equipped with layer of conductive film, then by described substrate and monocrystalline silicon piece bonding.
Preferably, the material of described substrate is fused quartz or pyroceram or monocrystalline silicon.
Preferably, in the many rings of described disk in S shape flexible beam resonator: central cylindrical is positioned at the center of disk many ring S shape flexible beam resonator;
The central shaft of multiple donut all overlaps with the central shaft of central cylindrical; The width of donut is all equal, and the gap width between donut is all equal;
Be distributed in the often group spoke uniform intervals arrangement between donut; The number often organizing spoke is m, m >=8 and m is even number; The interval angles often organizing spoke is 360 °/m; The width of each spoke is all equal;
In order to promote the sensitivity of the many ring resonators of disk, in central cylindrical and multiple donut, add multiple S shape flexible beam between minimum annulus, the number of described S shape flexible beam is n, n >=8 and n is even number; N S shape flexible beam equidistantly distributes, and being centrally located at of n S shape flexible beam is circumferentially same, and n S shape flexible beam and central cylindrical are positioned at same level.
More preferably, each described S shape flexible beam is all centrosymmetric, and by the Structure composing of two " crescent moon " shapes, wherein: each " crescent moon " structure is formed by the semi arch of two equal diameters, and the center conllinear of the center of circle of semi arch and S shape flexible beam.
Preferably, in the many rings of described disk, the material of S shape flexible beam resonator is monocrystalline silicon.
Preferably, described electrode is n the annular electrode of fan, n >=8 and be even number, the position one_to_one corresponding of n electrode and n S shape flexible beam, and in all many with the disk rings of the central shaft of each electrode, the central shaft of S shape flexible beam resonator overlaps; N electrode is all equal with the clearance distance between annulus maximum in donut;
N electrode comprises n/2 drive electrode and n/2 detecting electrode, and n/2 drive electrode and n/2 detecting electrode are along S shape flexible beam resonator peripheral edge uniform intervals arrangement in the many rings of disk.
Preferably, the material of described electrode is monocrystalline silicon.
According to another aspect of the present invention, provide the preparation method of S shape flexible beam resonant gyroscope in the many rings of a kind of disk, the method comprises the steps:
(1) adopt MEMS fine process, substrate is etched, form groove and projection, projection plates layer of conductive film;
(2) bonding techniques is adopted, the substrate obtain step (1) and monocrystalline silicon piece bonding;
(3) deep reaction ion etching (DeepReactiveIonEtching) method is adopted, monocrystalline silicon piece is etched, obtain the electrode of S shape flexible beam resonator and peripheral edge thereof in the many rings of disk, finally obtain S shape flexible beam resonant gyroscope in the many rings of disk.
Compared with prior art, the present invention has following advantage:
1. processing technology step is succinct, adopts ripe miromaching and lithographic method, is beneficial to batch production;
2. in the many rings of disk, S shape flexible beam resonant gyroscope has high symmetry, and structure is relatively stable, shock resistance, has excellent performance;
3. be distributed in the electrode of S shape flexible beam resonator peripheral edge in the many rings of disk for being distributed in the electrode of donut inside in S shape flexible beam resonator in the many rings of disk, the Q value of S shape flexible beam resonant gyroscope in the many rings of disk can be improved, thus respond sensitiveer.
The advantage such as the present invention has that volume is little, Stability Analysis of Structures, response are sensitive, has good symmetry, thus can reach higher performance.
Accompanying drawing explanation
By reading with reference to the following drawings to the detailed description done in non-limiting example, other features, objects and advantages of the present invention will become more obvious:
Figure 1A is the vertical view of S shape flexible beam resonant gyroscope in the many rings of disk in one embodiment of the invention;
Figure 1B is the 3-D view of S shape flexible beam resonant gyroscope in the many rings of disk in one embodiment of the invention;
Fig. 1 C is the cut-open view of S shape flexible beam resonant gyroscope in the many rings of disk in one embodiment of the invention;
Fig. 2 A is the vertical view of substrate in one embodiment of the invention;
Fig. 2 B is the 3-D view of substrate in one embodiment of the invention;
Fig. 2 C is the cut-open view of substrate in one embodiment of the invention;
Fig. 3 A is the vertical view of S shape flexible beam resonator in the many rings of disk in one embodiment of the invention;
Fig. 3 B is the 3-D view of S shape flexible beam resonator in the many rings of disk in one embodiment of the invention;
Fig. 3 C is the front view of S shape flexible beam resonator in the many rings of disk in one embodiment of the invention;
Fig. 4 A is the vertical view of S shape flexible beam resonator and its peripheral edge electrode relative position in the many rings of disk in one embodiment of the invention;
Fig. 4 B is the 3-D view of S shape flexible beam resonator and its peripheral edge electrode relative position in the many rings of disk in one embodiment of the invention;
Fig. 4 C is the cut-open view of S shape flexible beam resonator and its peripheral edge electrode relative position in the many rings of disk in one embodiment of the invention;
When Fig. 5 A is S shape flexible beam resonant gyroscope work in the many rings of disk, in disk many rings, the driving bending vibation mode picture that four antinodes vibrate is done by S shape flexible beam resonator institute;
When Fig. 5 B is S shape flexible beam resonant gyroscope work in the many rings of disk, in disk many rings, the detection bending vibation mode picture that four antinodes vibrate is done by S shape flexible beam resonator institute;
Fig. 6 A-6C is the fabrication processing schematic diagram of substrate in one embodiment of the invention;
Fig. 7 A is the schematic diagram in one embodiment of the invention before substrate and monocrystalline silicon piece bonding;
Fig. 7 B is the schematic diagram in one embodiment of the invention after substrate and monocrystalline silicon piece bonding;
Fig. 8 adopts deep reaction ion etching (DeepReactiveIonEtching) method in one embodiment of the invention, etch monocrystalline silicon piece, finally obtains S shape flexible beam resonant gyroscope in the many rings of disk;
In figure: substrate 100, S shape flexible beam resonator 102 in the many rings of disk, electrode 104.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art and understand the present invention further, but not limit the present invention in any form.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, some distortion and improvement can also be made.These all belong to protection scope of the present invention.
As shown in Figure 1A, Figure 1B, Fig. 1 C, S shape flexible beam resonant gyroscope in the many rings of a kind of disk is provided in the present embodiment, comprises:
A substrate 100, substrate 100 has 8 electrode slices of a central cylindrical and time 8 peripheral fan loop sections protruded and outermost;
S shape flexible beam resonator 102 in a many ring of disk, comprise central cylindrical, multiple S shape flexible beam, multiple donut and multiple spoke, wherein: central cylindrical is connected with substrate 100, all be connected by multiple spoke between multiple donut, the two ends of multiple S shape flexible beam are connected with inside central cylindrical and minimum annulus in multiple donut respectively;
One group of electrode 104 being distributed in S shape flexible beam resonator 102 peripheral edge in the many rings of disk, each electrode 104 is connected with substrate 100 respectively.
Below to relate in embodiment about explanations such as length, width, height:
As shown in Figure 2 A, the central authorities of described substrate 100 are bottom surface circular diameters is D
1(D
1value be 20 μm ~ 2mm) central cylindrical, the width of 8 of secondary periphery fan loop sections are W
2(W
2value be 10 μm ~ 50 μm), the width of 8 electrode slices of outermost peripheral edge is W
3(W
3value be 10 μm ~ 100 μm), electrode slice and fan loop section between spacing be W
4(W
4value be 10 μm ~ 100 μm).
As shown in Figure 2 C, the height of the projection (i.e. central cylindrical and 8 fan loop section) of described substrate 100 is H
1(H
1value be 1 μm ~ 100 μm); The thickness of the conductive film that protruding parts deposits is respectively H
2(H
2value be 100nm ~ 1 μm), the thickness of outermost peripheral edge 8 electrode slices is H
3(H
3value be 100nm ~ 1 μm).
As shown in Figure 3A, in the many rings of described disk, the central authorities of S shape flexible beam resonator 102 are diameters is D
2(D
2value be 20 μm ~ 2mm) central cylindrical, the width of every bar donut is W
5(W
5value be 5 μm ~ 50 μm), the gap width between donut is W
6(W
6value be 5 μm ~ 50 μm), the width of each spoke is W
7(W
7value be 5 μm ~ 50 μm); 8 S shape flexible beams are all centrosymmetric, and are similar to the Structure composing of " crescent moon " shape by two, and each " crescent moon " structure is formed by two semi arches, and the diameter of semi arch is D
3(D
3value be 10 μm ~ 100 μm), between two semi arches, ultimate range is apart W
8(W
8value be 5 μm ~ 50 μm).
As shown in Figure 4 A, 8 described electrode 104 width being distributed in S shape flexible beam resonator 102 peripheral edge in the many rings of disk are W
1(W
1value be 10 μm ~ 50 μm), the clearance distance in each electrode 104 and donut between maximum annulus is W
9(W
9value be 5 μm ~ 50 μm).
As shown in Fig. 2 A, Fig. 2 B, Fig. 2 C, in the present embodiment, time 8 the peripheral fan loop sections in described substrate 100 equidistantly distribute and the wide W of each fan loop section
2identical, the height H of the central cylindrical that substrate 100 is protruded and 8 fan loop sections
1identical, at the thickness H of the conductive film of protruding parts (i.e. central cylindrical and 8 fan loop sections) upper deposition
2also identical, the thickness H of 8 electrode slices of outermost peripheral edge
3also identical.
As shown in Fig. 3 A, Fig. 3 B, Fig. 3 C, in the present embodiment, in the many rings of described disk, the central authorities of S shape flexible beam resonator 102 are cylindrical structures, and round central cylindrical is multiple donut and 8 S shape flexible beams, wherein: the wide W of every bar donut
5identical, the gap width W between donut
6identical, all there are 8 spokes evenly distributed between donut, the width W of each spoke
7identical, the diameter D of semi arch in each " crescent moon "
3identical, ultimate range W apart between two semi arches
8identical.
As shown in Fig. 4 A, Fig. 4 B, Fig. 4 C, in the present embodiment, 8 described electrodes 104 are uniformly distributed along S shape flexible beam resonator 102 peripheral edge in the many rings of disk, and in all many with the disk rings of the central shaft of 8 electrodes 104, the central shaft of S shape flexible beam resonator 102 overlaps, the width W of each electrode 104
1identical, the clearance distance W in each electrode 104 and donut between maximum annulus
9also identical.
In the present embodiment, in the many rings of described disk in S shape flexible beam resonator 102: the width W of every bar donut
5, width between donut is W
6, each spoke width be W
7, the diameter D of semi arch in differential seat angle θ between spoke and each " crescent moon "
3, ultimate range W apart between two semi arches
8, can suitably regulate man-hour to reach desirable mode vectors correlation adding.
In the present embodiment, in the many rings of described disk, the electrode 104 of S shape flexible beam resonator 102 peripheral edge is 8 fan ring electrodes, be respectively 4 drive electrodes and 4 detecting electrodes, wherein: 4 drive electrodes and 4 detecting electrode uniform intervals arrangements, location interval between adjacent driven electrode 90 °, location interval between adjacent detecting electrode 90 °, the location interval of adjacent driven electrode and detecting electrode 45 °.
As shown in Fig. 5 A, Fig. 5 B, in the present embodiment, in the many rings of described disk, the plane four antinode mode of oscillation of S shape flexible beam resonator 102 is as reference vibration, S shape flexible beam resonator 102 radial vibration in the many rings of described disk under this mode.Concrete principle of work is:
In the many rings of described disk, S shape flexible beam resonator 102 and the central cylindrical ground connection of described substrate 100, ensure that same electromotive force is 0V; Utilize the plane four antinode mode of oscillation of S shape flexible beam resonator 102 in the many rings of described disk as reference vibration, when drive electrode in described electrode 104 is applied in alternating voltage, produce radial vibration by inverse piezoelectric effect, thus drive S shape flexible beam resonator 102 in the many rings of described disk to vibrate; When there being the turning rate input of S shape flexible beam resonator 102 central axis direction in the many rings of described disk, under the effect of coriolis force, in the many rings of described disk, the vibration shape of S shape flexible beam resonator 102 changes to sensed-mode, described electrode 104 is driven to vibrate, electric signal is obtained by the detecting electrode of direct piezo electric effect in electrode 104, thus obtain the amplitude of S shape flexible beam resonator 102 under sensed-mode in the many rings of disk, because sensed-mode resonance amplitude is directly proportional to the size of input angular velocity, and then the size of input angular velocity can be obtained.The driven-mode of Fig. 5 A, Fig. 5 B and sensed-mode differ 45 °.
In the present embodiment, the thick of described substrate 100 is 300 μm ~ 800 μm, and diameter is 2mm ~ 8mm; The material of described substrate 100 is fused quartzs, and quartz material has high temperature resistant, the characteristic such as thermal expansivity is little, corrosion-resistant, resonance, and gyroscope finished product can be made to work in the presence of a harsh environment.
In the present embodiment, in the many rings of described disk, the thick of S shape flexible beam resonator 102 is 100 μm ~ 500 μm, and diameter is 2mm ~ 8mm; The thick of described electrode 104 is 100 μm ~ 500 μm; In the many rings of described disk, the material of the electrode 104 of S shape flexible beam resonator 102 and peripheral edge thereof is monocrystalline silicon, and monocrystalline silicon has semiconductor property, can make the performance that gyroscope reaches higher.
The present embodiment provides the preparation method of S shape flexible beam resonant gyroscope in the many rings of a kind of disk, and described method comprises the steps:
(1) MEMS fine process is adopted, wet method or dry etching are carried out to fused quartz block, obtain the described groove of substrate 100 and the part of protrusion, then the projection in substrate 100 deposits layer of conductive film, finally obtains described substrate 100 (as shown in Fig. 6 A, Fig. 6 B, Fig. 6 C);
(2) bonding techniques is adopted, by above-mentioned substrate 100 and monocrystalline silicon piece bonding (as shown in Figure 7 A, 7 B, wherein: Fig. 7 A is the schematic diagram before substrate and monocrystalline silicon piece bonding, Fig. 7 B is the schematic diagram after substrate and monocrystalline silicon piece bonding):
(3) deep reaction ion etching (DeepReactiveIonEtching) method is adopted, monocrystalline silicon piece is etched, obtain the electrode 104 of S shape flexible beam resonator 102 and peripheral edge thereof in the many rings of disk, finally obtain S shape flexible beam resonant gyroscope (as shown in Figure 8) in the many rings of disk.
The advantage of gyro in the present embodiment: 1, less size; 2, good performance; 3, impact resistance is good; 4, processing step is simple, is beneficial to batch production, thus reduces manufacturing cost.
Above specific embodiments of the invention are described.It is to be appreciated that the present invention is not limited to above-mentioned particular implementation, those skilled in the art can make various distortion or amendment within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (10)
1. a S shape flexible beam resonant gyroscope in the many rings of disk, is characterized in that, comprising:
A substrate;
S shape flexible beam resonator in a many ring of disk, comprise central cylindrical, multiple S shape flexible beam, multiple donut and organize spoke more, wherein: central cylindrical is connected with described substrate, all be connected by multiple spoke between donut, the two ends of multiple S shape flexible beam are connected with inside central cylindrical and minimum annulus in multiple donut respectively;
One group of electrode being distributed in S shape flexible beam resonator peripheral edge in the many rings of described disk, and each electrode is connected with described substrate respectively.
2. S shape flexible beam resonant gyroscope in the many rings of a kind of disk according to claim 1, it is characterized in that: described substrate is provided with the part of protrusion, the part of described protrusion comprises central cylindrical and the discrete fan loop section of n peripheral edge, n >=8 and n is even number, wherein: the discrete fan loop section of n peripheral edge equidistantly distributes and the width of each fan loop section is equal; The height of the fan loop section that central cylindrical is discrete with n peripheral edge is equal;
In substrate, outermost peripheral edge is n the electrode slice equidistantly distributed, wherein: the position one_to_one corresponding of n electrode slice and the discrete fan loop section of n peripheral edge, the fan loop section wire that n electrode slice is discrete with n peripheral edge is respectively connected and distance is between the two all equal; Width, the thickness of n electrode slice are all equal;
By extraction one lead-in wire on suprabasil central cylindrical, for ground connection or connecting to neutral electromotive force.
3. S shape flexible beam resonant gyroscope in the many rings of a kind of disk according to claim 2, is characterized in that: on described central cylindrical and the discrete fan loop section of n peripheral edge, be respectively equipped with layer of conductive film, then by described substrate and monocrystalline silicon piece bonding.
4. S shape flexible beam resonant gyroscope in the many rings of a kind of disk according to claim 1, is characterized in that, the material of described substrate is fused quartz or pyroceram or monocrystalline silicon.
5. S shape flexible beam resonant gyroscope in the many rings of a kind of disk according to claim 1, is characterized in that, in the many rings of described disk in S shape flexible beam resonator: central cylindrical is positioned at the center of disk many ring S shape flexible beam resonator;
The central shaft of multiple donut all overlaps with the central shaft of central cylindrical; The width of donut is all equal, and the gap width between donut is all equal;
Be distributed in the often group spoke uniform intervals arrangement between donut; The number often organizing spoke is m, m >=8 and m is even number; The interval angles often organizing spoke is 360 °/m; The width of each spoke is all equal;
The number of described S shape flexible beam is n, n >=8 and n is even number; N S shape flexible beam equidistantly distributes, and being centrally located at of n S shape flexible beam is circumferentially same, and n S shape flexible beam and central cylindrical are positioned at same level.
6. S shape flexible beam resonant gyroscope in the many rings of a kind of disk according to claim 5, it is characterized in that, each described S shape flexible beam is all centrosymmetric, and by the Structure composing of two " crescent moon " shapes, wherein: each " crescent moon " structure is formed by the semi arch of two equal diameters, and the center conllinear of the center of circle of semi arch and S shape flexible beam.
7. in the many rings of a kind of disk according to any one of claim 1-6, S shape flexible beam resonant gyroscope, is characterized in that, in the many rings of described disk, the material of S shape flexible beam resonator is monocrystalline silicon.
8. S shape flexible beam resonant gyroscope in the many rings of a kind of disk according to any one of claim 1-6, it is characterized in that, described electrode is n the annular electrode of fan, n >=8 and be even number, the position one_to_one corresponding of n electrode and n S shape flexible beam, and in all many with the disk rings of the central shaft of each electrode, the central shaft of S shape flexible beam resonator overlaps; N electrode is all equal with the clearance distance between annulus maximum in donut;
N electrode comprises n/2 drive electrode and n/2 detecting electrode, and n/2 drive electrode and n/2 detecting electrode are along S shape flexible beam resonator peripheral edge uniform intervals arrangement in the many rings of disk.
9. S shape flexible beam resonant gyroscope in the many rings of a kind of disk according to claim 8, is characterized in that, the material of described electrode is monocrystalline silicon.
10. a preparation method for S shape flexible beam resonant gyroscope in the many rings of the disk described in any one of claim 1-9, the method comprises the steps:
(1) adopt MEMS fine process, substrate is etched, form groove and projection, projection plates layer of conductive film;
(2) bonding techniques is adopted, the substrate obtain step (1) and monocrystalline silicon piece bonding;
(3) adopt deep reaction ion etching method, monocrystalline silicon piece is etched, obtains the electrode of S shape flexible beam resonator and peripheral edge thereof in the many rings of disk, finally obtain S shape flexible beam resonant gyroscope in the many rings of disk.
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