CN105486297A - Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof - Google Patents

Abstract

The invention provides a resonant gyroscope with S-shaped flexible beams in a disc multi-ring and a preparation method thereof, comprising a base; an S-shaped flexible beam resonator in a disc multi-ring, including a central cylinder, a plurality of S-shaped flexible beams, Multiple concentric rings and multiple sets of spokes, wherein: the central cylinder is connected to the base, the concentric rings are connected by multiple spokes, and the two ends of the multiple S-shaped flexible beams are respectively connected to the central cylinder and multiple concentric The inner side of the smallest ring among the rings is connected; a group of electrodes distributed on the peripheral edge of the S-shaped flexible beam resonator in the multi-ring of the disk, and each electrode is connected to the base respectively. The invention has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

Description

S-shaped flexible beam resonant gyroscope in a disc multi-ring and preparation method thereof

technical field

The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a resonant gyroscope with S-shaped flexible beams in a disc multi-ring and a preparation method thereof.

Background technique

Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliability, and integration are greatly improved compared with traditional technologies. Therefore, MEMS-level micro-gyroscopes have become an important direction in the extensive research and application development of MEMS technology in recent years.

With the application and development of MEMS gyroscopes in navigation systems, the hemispherical resonant gyroscope developed by foreign scientists in 1994 has higher performance. With the help of the study of this hemispherical resonator gyroscope, the researchers have a better understanding of the design of MEMS resonators with high Q value and symmetrical structure. However, since the rod part of the early rod-structure resonators needs to be assembled on the micromechanical mechanism, higher dynamic loads and imprecise connections at the joints will lead to larger deflection of the hemispherical resonator in the long run. Therefore, it is thought of designing a MEMS gyroscope with good symmetry, small and compact planar structure, that is, S-shaped flexible beam resonant gyroscope in disc multi-ring.

Contents of the invention

The purpose of the present invention is to provide a structure of S-shaped flexible beam resonant gyroscope in disc multi-ring, which has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

According to one aspect of the present invention, there is provided a S-shaped flexible beam resonant gyroscope in a disc multi-ring, comprising:

a base;

An S-shaped flexible beam resonator in a disk multi-ring, including a central cylinder, multiple S-shaped flexible beams, multiple concentric rings and multiple groups of spokes, wherein: the central cylinder is connected to the base, and the concentric rings are connected by multiple The two spokes are connected, and the two ends of the multiple S-shaped flexible beams are respectively connected with the central cylinder and the inner side of the smallest ring among the multiple concentric rings;

A group of electrodes distributed on the peripheral edge of the S-shaped flexible beam resonator in the multi-ring of the disk, and each electrode is respectively connected with the base.

Preferably, a protruding part is provided on the base, and the protruding part includes a central cylinder and n discrete fan ring parts on the peripheral edges, n≥8 and n is an even number, wherein: n discrete peripheral edges The fan ring parts are distributed at equal intervals and the width of each fan ring part is equal; the height of the central cylinder and n discrete fan ring parts on the outer edge is equal;

The outermost peripheral edge on the substrate is n electrode sheets distributed at equal intervals, wherein: the n electrode sheets correspond to the positions of the n peripheral edge discrete fan ring parts one by one, and the n electrode sheets correspond to the n peripheral edge discrete fan ring parts respectively. The ring parts are connected by wires and the distance between them is equal; the width and thickness of the n electrode sheets are equal;

A lead wire will be drawn from the central cylinder on the base for grounding or zero potential.

More preferably, a layer of conductive thin film is respectively provided on the central cylinder and the n discrete ring segments on the peripheral edge, and then the substrate is bonded to the single crystal silicon wafer.

Preferably, the material of the substrate is fused silica or heat-resistant glass or single crystal silicon.

Preferably, in the S-shaped flexible beam resonator in the disc multi-ring: the central cylinder is located at the center of the S-shaped flexible beam resonator in the disc multi-ring;

The central axes of the plurality of concentric rings coincide with the central axis of the central cylinder; the widths of the concentric rings are all equal, and the widths of the gaps between the concentric rings are all equal;

Each set of spokes distributed between the concentric rings is evenly spaced; the number of each set of spokes is m, m≥8 and m is an even number; the interval angle of each set of spokes is 360°/m; the width of each spoke is equal;

In order to improve the sensitivity of the disk multi-ring resonator, a plurality of S-shaped flexible beams are added between the central cylinder and the smallest ring among the multiple concentric rings, and the number of the S-shaped flexible beams is n, n≥ 8 and n is an even number; n S-shaped flexible beams are equally spaced, and the centers of the n S-shaped flexible beams are located on the same circumference, and the n S-shaped flexible beams and the central cylinder are located on the same horizontal plane.

More preferably, each of the S-shaped flexible beams is symmetrical to the center and is composed of two "crescent" structures, wherein: each "crescent" structure is composed of two semicircular arcs with equal diameters, And the center of the semicircular arc is collinear with the center of the S-shaped flexible beam.

Preferably, the material of the S-shaped flexible beam resonator in the disc multi-ring is single crystal silicon.

Preferably, the electrodes are n sector-shaped electrodes, n≥8 and an even number, the n electrodes correspond to the positions of the n S-shaped flexible beams one by one, and the central axis of each electrode is more than the disc. The central axis of the S-shaped flexible beam resonator in the ring coincides; the gap distance between the n electrodes and the largest ring in the concentric ring is equal;

The n electrodes include n/2 driving electrodes and n/2 detecting electrodes, and the n/2 driving electrodes and n/2 detecting electrodes are arranged at regular intervals along the peripheral edge of the S-shaped flexible beam resonator in the disc multi-ring.

Preferably, the material of the electrodes is single crystal silicon.

According to another aspect of the present invention, there is provided a method for preparing an S-shaped flexible beam resonator gyroscope in a disc multi-ring, the method comprising the following steps:

(1) Using MEMS microfabrication technology, the substrate is etched to form grooves and protruding parts, and a conductive film is plated on the protruding parts;

(2) Using bonding technology, the substrate obtained in step (1) is bonded to the single crystal silicon wafer;

(3) Using Deep Reactive Ion Etching (DeepReactiveIonEtching) method to etch the single crystal silicon wafer to obtain the S-shaped flexible beam resonator in the multi-ring of the disc and the electrodes on the peripheral edge, and finally obtain the S in the multi-ring of the disc. Shaped flexible beam resonant gyroscope.

Compared with the prior art, the present invention has the following advantages:

1. The processing steps are simple, using mature micro-machining technology and etching methods, which is conducive to mass production;

2. The S-shaped flexible beam resonant gyro in the disc multi-ring has a high degree of symmetry, and the structure is relatively stable, impact-resistant, and has excellent performance;

3. The electrodes distributed on the peripheral edge of the S-shaped flexible beam resonator in the disk multi-ring can improve the performance of the disk multi-ring compared to the electrodes distributed inside the concentric rings in the S-shaped flexible beam resonator in the disk multi-ring. The Q value of the inner S-shaped flexible beam resonant gyroscope, so the response is more sensitive.

The invention has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

Description of drawings

Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

Fig. 1A is a top view of an S-shaped flexible beam resonator gyroscope in a disc multi-ring in an embodiment of the present invention;

Fig. 1B is a three-dimensional view of an S-shaped flexible beam resonator gyroscope in a disc multi-ring in an embodiment of the present invention;

Fig. 1C is a cross-sectional view of an S-shaped flexible beam resonator gyroscope in a disc multi-ring in an embodiment of the present invention;

Figure 2A is a top view of a substrate in an embodiment of the present invention;

Figure 2B is a three-dimensional view of the substrate in one embodiment of the present invention;

Figure 2C is a cross-sectional view of a substrate in an embodiment of the present invention;

Fig. 3A is a top view of an S-shaped flexible beam resonator in a disk multi-ring according to an embodiment of the present invention;

Fig. 3B is a three-dimensional view of an S-shaped flexible beam resonator in a disk multi-ring according to an embodiment of the present invention;

FIG. 3C is a front view of an S-shaped flexible beam resonator in a disc multi-ring in an embodiment of the present invention;

4A is a top view of the relative position of the S-shaped flexible beam resonator and its peripheral edge electrodes in the multi-ring of the disk in an embodiment of the present invention;

4B is a three-dimensional view of the relative position of the S-shaped flexible beam resonator and its peripheral edge electrodes in the disk multi-ring in an embodiment of the present invention;

4C is a cross-sectional view of the relative position of the S-shaped flexible beam resonator and its peripheral edge electrodes in the disk multi-ring according to an embodiment of the present invention;

Fig. 5A is the drive mode diagram of the four-antinode vibration made by the S-shaped flexible beam resonator in the disc multi-ring when the S-shaped flexible beam resonator gyroscope in the disc multi-ring is working;

Fig. 5B is a detection mode shape diagram of the four-antinode vibration made by the S-shaped flexible beam resonator in the disc multi-ring when the S-shaped flexible beam resonator gyro in the disc multi-ring is working;

6A-6C are schematic diagrams of the manufacturing process flow of the substrate in an embodiment of the present invention;

Fig. 7A is a schematic diagram before the substrate and the single crystal silicon wafer are bonded in an embodiment of the present invention;

Fig. 7B is a schematic diagram of the bonding of the substrate and the single crystal silicon wafer in an embodiment of the present invention;

Fig. 8 shows that in an embodiment of the present invention, a deep reactive ion etching (DeepReactiveIonEtching) method is used to etch a single crystal silicon wafer, and finally an S-shaped flexible beam resonant gyroscope in a disc multi-ring is obtained;

In the figure: a substrate 100 , an S-shaped flexible beam resonator 102 in a disk multi-ring, and an electrode 104 .

detailed description

The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

As shown in Fig. 1A, Fig. 1B, and Fig. 1C, an S-shaped flexible beam resonant gyroscope in a multi-ring disk is provided in this embodiment, including:

A base 100, the base 100 has a central cylinder and 8 protruding sector ring parts on the secondary periphery and 8 electrode sheets on the outermost periphery;

A disk multi-ring S-shaped flexible beam resonator 102, including a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of spokes, wherein: the central cylinder is connected to the base 100, and between the plurality of concentric rings Both ends are connected by multiple spokes, and the two ends of the multiple S-shaped flexible beams are respectively connected to the central cylinder and the inner side of the smallest ring among the multiple concentric rings;

A group of electrodes 104 distributed on the peripheral edge of the S-shaped flexible beam resonator 102 in the multi-ring of the disk, and each electrode 104 is respectively connected to the substrate 100 .

Descriptions about length, width, height, etc. involved in the embodiments are as follows:

As shown in FIG. 2A , the center of the base 100 is a central cylinder with a bottom circle diameter D ₁ (the value of D ₁ is 20 μm to 2 mm), and the width of the eight fan ring parts on the second periphery is W ₂ (the value of W ₂ 10μm～50μm), the width of the eight electrode pieces on the outermost edge is W ₃ (the value of W ₃ is 10μm～100μm), the distance between the electrode piece and the fan ring part is W ₄ (the value of W ₄ is 10μm ~100μm).

As shown in FIG. 2C , the height of the protruding part of the substrate 100 (that is, the central cylinder and the 8 ring segments) is H ₁ (the value of H ₁ is 1 μm to 100 μm); the conductive film deposited on the protruding part The thickness of each is H ₂ (the value of H ₂ is 100nm-1μm), and the thickness of the 8 electrode sheets on the outermost edge is H ₃ (the value of H ₃ is 100nm-1μm).

As shown in Figure 3A, the center of the S-shaped flexible beam resonator 102 in the disc multi-ring is a central cylinder with a diameter of D ₂ (the value of D ₂ is 20 μm to 2 mm), and the width of each concentric ring is W ₅ (the value of W ₅ is 5 μm to 50 μm), the width of the gap between the concentric rings is W ₆ (the value of W ₆ is 5 μm to 50 μm), and the width of each spoke is W ₇ (the value of W ₇ 5μm～50μm); the 8 S-shaped flexible beams are all symmetrical to the center, and are composed of two structures similar to the "crescent" shape, and each "crescent" structure is composed of two semicircular arcs, and the semicircular arc The diameter of each is D ₃ (the value of D ₃ is 10 μm to 100 μm), and the maximum distance between two semicircular arcs is W ₈ (the value of W ₈ is 5 μm to 50 μm).

As shown in FIG. 4A , the width of the eight electrodes 104 distributed on the peripheral edge of the S-shaped flexible beam resonator 102 in the multi-ring disk is all W ₁ (the value of W ₁ is 10 μm to 50 μm), and each electrode 104 is connected to The gap distance between the largest rings in the concentric rings is all W ₉ (the value of W ₉ is 5 μm to 50 μm).

As shown in Fig. 2A, Fig. 2B, and Fig. 2C, in this embodiment, the 8 fan ring parts on the secondary periphery _on the base 100 are equally spaced and the width W2 of each fan ring part is the same, and the base 100 is convex. The height H1 _of the protruding central cylinder and the eight fan ring parts is the same, and the thickness _H2 of the conductive film deposited on the protruding part (that is, the central cylinder and the eight fan ring parts) is also the same, and the eight electrodes on the outermost edge The thickness H3 _of the sheet is also the same.

As shown in Figure 3A, Figure 3B, and Figure 3C, in this embodiment, the center of the S-shaped flexible beam resonator 102 in the disc multi-ring is a cylindrical structure, and surrounding the central cylinder is a plurality of concentric rings and 8 S-shaped flexible beams, wherein: the width W ₅ of each concentric ring is the same, the gap width W ₆ between the concentric rings is the same, 8 spokes are evenly arranged between the concentric rings, and the width of each spoke is W ₇ are the same, the diameter D ₃ of the semicircle in each "crescent" is the same, and the maximum distance W ₈ between the two semicircles is the same.

As shown in Fig. 4A, Fig. 4B, and Fig. 4C, in this embodiment, the eight electrodes 104 are evenly distributed along the peripheral edge of the S-shaped flexible beam resonator 102 in the disk multi-ring, and the central axes of the eight electrodes 104 are uniformly distributed. Coincident with the central axis of the S-shaped flexible beam resonator 102 in the disc multi-ring, the width W ₁ of each electrode 104 is the same, and the gap distance W ₉ between each electrode 104 and the largest ring in the concentric rings is also the same.

In this embodiment, in the disc multi-ring inner S-shaped flexible beam resonator 102: the width of each concentric ring is W ₅ , the width between the concentric rings is W ₆ , and the width of each spoke is W ₇ , the angle difference θ between the spokes, the diameter D ₃ of the semicircle in each "crescent", and the maximum distance W ₈ between the two semicircles can be properly adjusted during processing to achieve ideal mode matching.

In this embodiment, the electrodes 104 on the peripheral edge of the S-shaped flexible beam resonator 102 in the disc multi-ring are 8 sector ring electrodes, which are 4 drive electrodes and 4 detection electrodes respectively, wherein: 4 drive electrodes and 4 detection electrodes The four detection electrodes are evenly spaced, the position interval between adjacent drive electrodes is 90°, the position interval between adjacent detection electrodes is 90°, and the position interval between adjacent drive electrodes and detection electrodes is 45°.

As shown in Figure 5A and Figure 5B, in this embodiment, the plane four-antinode vibration mode of the S-shaped flexible beam resonator 102 in the disc multi-ring is used as a reference vibration, and in this mode, the disc multi-ring The S-shaped flexible beam resonator 102 in the ring vibrates radially. The specific working principle is:

The S-shaped flexible beam resonator 102 in the disc multi-ring is grounded with the central cylinder of the substrate 100 to ensure that the same potential is 0V; using the plane four antinodes of the S-shaped flexible beam resonator 102 in the disc multi-ring The vibration mode is used as a reference vibration. When the driving electrode in the electrode 104 is applied with an AC voltage, the radial vibration is generated by the inverse piezoelectric effect, thereby driving the S-shaped flexible beam resonator 102 in the multi-ring of the disk to vibrate; when When the angular velocity in the direction of the central axis of the S-shaped flexible beam resonator 102 in the multi-ring of the disk is input, under the action of the Coriolis force, the mode shape of the S-shaped flexible beam resonator 102 in the multi-ring of the disk is detected in the direction of The mode transition drives the electrode 104 to vibrate, and the electric signal is obtained on the detection electrode in the electrode 104 by the positive piezoelectric effect, thereby obtaining the amplitude of the S-shaped flexible beam resonator 102 in the detection mode of the disk multi-ring, Since the amplitude of the detected modal resonance is proportional to the magnitude of the input angular velocity, the magnitude of the input angular velocity can be obtained. The difference between the driving mode and the detection mode in Fig. 5A and Fig. 5B is 45°.

In this embodiment, the substrate 100 has a thickness of 300 μm to 800 μm and a diameter of 2 mm to 8 mm; the material of the substrate 100 is fused silica, and the quartz material has characteristics such as high temperature resistance, small thermal expansion coefficient, corrosion resistance, and resonance, and can be So that the finished gyroscope can work in harsh environments.

In this embodiment, the thickness of the S-shaped flexible beam resonator 102 in the disc multi-ring is 100 μm-500 μm, and the diameter is 2 mm-8 mm; the thickness of the electrode 104 is 100 μm-500 μm; The materials of the S-shaped flexible beam resonator 102 and the electrodes 104 on its peripheral edge are all monocrystalline silicon, and monocrystalline silicon has semiconductor properties, which can make the gyroscope achieve higher performance.

This embodiment provides a method for preparing an S-shaped flexible beam resonator gyroscope in a disc multi-ring, and the method includes the following steps:

(1) Using the MEMS microfabrication process, the fused silica block is wet or dry etched to obtain the groove and the protruding part of the substrate 100, and then a conductive layer is deposited on the protruding part on the substrate 100. Thin film, finally obtain described substrate 100 (as shown in Figure 6A, Figure 6B, Figure 6C);

(2) Using bonding technology, the above-mentioned substrate 100 is bonded to the single crystal silicon wafer (as shown in Figure 7A and Figure 7B, wherein: Figure 7A is a schematic diagram before the substrate and the single crystal silicon wafer are bonded, and Figure 7B is the substrate Schematic diagram after bonding with single crystal silicon wafer):

(3) Using Deep Reactive Ion Etching (DeepReactiveIonEtching) method, the monocrystalline silicon wafer is etched to obtain the S-shaped flexible beam resonator 102 in the disc multi-ring and the electrodes 104 on the peripheral edge, and finally obtain the disc multi-ring Inner S-shaped flexible beam resonant gyroscope (as shown in Figure 8).

The advantages of the gyroscope in this embodiment: 1. Smaller size; 2. Good performance; 3. Good impact resistance; 4. Simple process steps, which is conducive to mass production, thereby reducing manufacturing costs.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention.

Claims (10)

1. S-shaped flexible beam resonant gyroscope in a kind of disc multi-ring, is characterized in that, comprises: a base; An S-shaped flexible beam resonator in a disc multi-ring, including a central cylinder, multiple S-shaped flexible beams, multiple concentric rings and multiple groups of spokes, wherein: the central cylinder is connected to the base, and the concentric rings are connected to each other. Connected by multiple spokes, both ends of multiple S-shaped flexible beams are respectively connected to the inner side of the smallest ring among the central cylinder and multiple concentric rings; A group of electrodes distributed on the peripheral edge of the S-shaped flexible beam resonator in the multi-ring of the disk, and each electrode is respectively connected with the base. 2. The S-shaped flexible beam resonator gyro in a disc multi-ring according to claim 1, characterized in that: the base is provided with a protruding part, and the protruding part includes a central cylinder and n Discrete fan ring parts on the peripheral edge, n≥8 and n is an even number, wherein: n discrete fan ring parts on the peripheral edge are equally spaced and the width of each fan ring part is equal; the central cylinder and n discrete fan ring parts on the peripheral edge the heights of the ring parts are equal; The outermost peripheral edge on the substrate is n electrode sheets distributed at equal intervals, wherein: the n electrode sheets correspond to the positions of the n peripheral edge discrete fan ring parts one by one, and the n electrode sheets correspond to the n peripheral edge discrete fan ring parts respectively. The ring parts are connected by wires and the distance between them is equal; the width and thickness of the n electrode sheets are equal; A lead wire will be drawn from the central cylinder on the base for grounding or zero potential. 3. The S-shaped flexible beam resonator gyroscope in a kind of disk multi-ring according to claim 2, characterized in that: a layer of conductive film is respectively arranged on the discrete fan ring parts of the central cylinder and n peripheral edges, The substrate is then bonded to a single crystal silicon wafer. 4 . The S-shaped flexible beam resonant gyroscope with multi-rings in a disk according to claim 1 , wherein the material of the substrate is fused silica or heat-resistant glass or single crystal silicon. 5. The resonant gyro with S-shaped flexible beams in a disc multi-ring according to claim 1, wherein, in the S-shaped flexible beam resonator in the disc multi-rings: the central cylinder is located in the disc multi-rings The center position of the S-shaped flexible beam resonator; The central axes of the plurality of concentric rings coincide with the central axis of the central cylinder; the widths of the concentric rings are all equal, and the widths of the gaps between the concentric rings are all equal; Each set of spokes distributed between the concentric rings is evenly spaced; the number of each set of spokes is m, m≥8 and m is an even number; the interval angle of each set of spokes is 360°/m; the width of each spoke is equal; The number of the S-shaped flexible beams is n, n≥8 and n is an even number; the n S-shaped flexible beams are equally spaced, and the centers of the n S-shaped flexible beams are located on the same circumference, and the n S-shaped flexible beams The beams are on the same level as the central column. 6. The resonant gyro with S-shaped flexible beams in a disc multi-ring according to claim 5, wherein each said S-shaped flexible beam is symmetrical to the center, and consists of two "crescent" shaped Structural composition, wherein: each "crescent" structure is composed of two semicircular arcs with equal diameters, and the center of the semicircular arcs is collinear with the center of the S-shaped flexible beam. 7. The S-shaped flexible beam resonator gyro in a multi-ring disc according to any one of claims 1-6, wherein the material of the S-shaped flexible beam resonator in the multi-ring disc is a single crystal silicon. 8. The S-shaped flexible beam resonant gyroscope in a disc multi-ring according to any one of claims 1-6, wherein the electrodes are n sector-shaped electrodes, n≥8 and an even number , the n electrodes correspond to the positions of the n S-shaped flexible beams one by one, and the central axis of each electrode coincides with the central axis of the S-shaped flexible beam resonator in the multi-ring of the disk; the n electrodes and the concentric rings The gap distances between the largest rings are all equal; The n electrodes include n/2 driving electrodes and n/2 detecting electrodes, and the n/2 driving electrodes and n/2 detecting electrodes are arranged at regular intervals along the peripheral edge of the S-shaped flexible beam resonator in the disc multi-ring. 9 . The resonant gyroscope with S-shaped flexible beams in a multi-ring disk according to claim 8 , wherein the material of the electrodes is single crystal silicon. 10 . 10. a method for preparing the S-shaped flexible beam resonant gyroscope in the disc multi-ring described in any one of claims 1-9, the method may further comprise the steps: (1) Using MEMS microfabrication technology, the substrate is etched to form grooves and protruding parts, and a conductive film is plated on the protruding parts; (2) Using bonding technology, the substrate obtained in step (1) is bonded to the single crystal silicon wafer; (3) Using deep reactive ion etching method to etch the single crystal silicon wafer to obtain the S-shaped flexible beam resonator in the multi-ring of the disc and the electrodes on the peripheral edge, and finally obtain the S-shaped flexible beam in the multi-ring of the disc resonant gyroscope.