USER MANUAL

IS40-WPS
WIEN MASS FILTER POWER SUPPLY
OPERATING MANUAL
English translation

IS40-WPS
WIEN MASS FILTER POWER SUPPLY

Document no. 1023549

Rev. 1
June 2018
Firmware version 3.2

Precision and Vacuum Technology

WIEN MASS FILTER POWER SUPPLY Contents

Contents
1 INTRODUCTION 8
1.1 INFORMATION ABOUT VERSION - RELEASE NOTE . . . . . . . . . . . . . . . . . . . . 8
1.2 INTENDED TO USE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.2.1 APPLICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.2.2 PRODUCT DESCRIPTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3 SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.3.1 PERSONNEL QUALIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.3.2 ILLUSTRATION OF RESIDUAL DANGERS . . . . . . . . . . . . . . . . . . . . . 9
1.3.3 GENERAL SAFETY INSTRUCTIONS . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.3.4 GROUNDING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.3.5 INTERNAL CIRCUITS OF DEVICE . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.3.6 SPARE PARTS AND MODIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . 12
1.3.7 VENTILATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.3.8 OPERATION IN EXPLOSIVE ATMOSPHERES . . . . . . . . . . . . . . . . . . . 12
1.3.9 CLEANING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.3.10 GENERAL SAFETY INSTRUCTIONS . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.4 TECHNICAL DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.4.1 MECHANICAL DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.4.2 AMBIENCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.4.3 OPERATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.4.4 SPECIFICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.4.5 STANDARDS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

2 INSTALLATION 17
2.1 UNPACKING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.2 MECHANICAL INSTALLATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.3 COOLING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.4 ELECTRICAL INSTALLATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.4.1 AC SOURCE REQUIREMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.4.2 AC INPUT POWER CONNECTION . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.5 DEVICE REAR PANEL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.5.1 HVOUT CONNECTOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.5.2 WIEN MASS FILTER RS232 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.5.3 GROUND BINDING POST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.6 CONNECTION TO THE WIEN MASS FILTER . . . . . . . . . . . . . . . . . . . . . . . . 22

3 OPERATING 23

4 STORAGE AND DISPOSAL 24

4.1 PACKING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
4.2 STORAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
4.3 DISPOSAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

User manual rev. 1 Page 5

List of Tables WIEN MASS FILTER POWER SUPPLY

List of Tables
1.1 Mechanical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.2 Ambience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.3 Speci ication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

2.1 AC source requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

2.2 HVOUT connector pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.3 Wien Mass Filter PS interface connector - pin description . . . . . . . . . . . . . . . . 21

4.1 Storage parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Page 6 User manual rev. 1

WIEN MASS FILTER POWER SUPPLY List of Figures

List of Figures
1.1 Make sure that no objects enter through the vent holes of the device. Keep the device
dry. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.2 Do not insert objects through louvers and keep device dry . . . . . . . . . . . . . . . 13
1.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

2.1 Three-conductor cable with protective ground (example) . . . . . . . . . . . . . . . . 19

2.2 Power connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.3 Back side of IS40-WPS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.4 HVOUT connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.5 Wien Mass Filter power supply interface connector . . . . . . . . . . . . . . . . . . . 21
2.6 Typical Wien Mass Filter wiring (example) . . . . . . . . . . . . . . . . . . . . . . . . 22

User manual rev. 1 Page 7

INTRODUCTION WIEN MASS FILTER POWER SUPPLY

1 INTRODUCTION
Please read this manual carefully to ensure the optimum operating conditions and safety of the
user. This user manual handbook contains important information about functionality, installation,
start-up and operation of the IS40-WPS device.

1.1 INFORMATION ABOUT VERSION - RELEASE NOTE

Information about IS40-WPS device version can be found at www.prevac.eu, in the DOWNLOAD tab.
There is information about any possible changes in subsequent versions of the device or software.

1.2 INTENDED TO USE

The IS40-WPS power supply produces all voltages required to operate the Wien Mass Filter.

1.2.1 APPLICATIONS

The Wien Mass Filter is used for SIMS and SNMS depth pro iling analysis in combination with an ion
source for producing a pure ion beam, free from neutral particles. In surface and thin ilm analysis
systems it may be used as a primary ion source for Dynamic SIMS and SNMS analysis, meeting most
exacting requirements Ion Scattering Spectroscopy (ISS).

1.2.2 PRODUCT DESCRIPTION

For accurate depth pro iling analysis the ion beam of an electron impact or plasma ion source must
be of high purity and free from neutral particles. This is ensured by the Wien Mass Filter which
eliminates ions of unwanted isotopes and impurities as well as multiply charged ions and neutral
particles.
The Wien Mass Filter is arranged between the ionizer volume and the focussing stages of the ion
source IS40E1. It selects de ined ions and suppresses impurities and neutrals by a combination of
electric and magnetic ields.

The Wien Mass Filter has the ability to eliminate:

1. Ions of unwanted isotopes.

2. Ions of impurities.

3. Multiple charged ions.

4. Charged clusters.

5. Neutral particles and clusters by inclination of the optical axis.

Page 8 User manual rev. 1

WIEN MASS FILTER POWER SUPPLY INTRODUCTION

1.3 SAFETY
The owner of the device must ensure that all the users have been informed about the safety require-
ments contained in this manual. In the event of sale or transfer of the device to another owner this
manual should be attached.

1.3.1 PERSONNEL QUALIFICATIONS

All work described in this document may only be carried out by persons who have suitable technical
training and the necessary experience or who have been instructed by the inal user of the device.

1.3.2 ILLUSTRATION OF RESIDUAL DANGERS

This user manual illustrates safety notes concerning dangers as follows:

1. Information on potential serious accident or personal injury.

2. Information on possible damage to the device.

3. Information on correct handling or use. Disregarding safety notes can lead to malfunctions
or device damage.

4. Note. Indicates particularly important, but not safety-relevant information.

1.3.3 GENERAL SAFETY INSTRUCTIONS

The IS40-WPS has been designed to maximally protect the user and his environment against burns
or electric shocks, mechanical hazards, high temperature and ire spreading out of the device. The
environmental conditions different from those speci ied below may pose a threat to the user and
his environment:

• Use inside buildings.

• Elevation above sea level of up to 2000 metres.

• Temperature range of safe operation: 5 °C to 40 °C.

User manual rev. 1 Page 9

INTRODUCTION WIEN MASS FILTER POWER SUPPLY

• Maximum relative humidity: 80% (to 31°C), decreased linearly down to max. 50% at 40°C.

• Fluctuations of supply voltage cannot exceed ±10% of the rated value.

• Protection class 1.

During all the operations carried out with the use of the device described in this manual, observe
the applicable safety regulations. Observe all the safety notes given in this document and forward
the information to all other users of the device. Pay particular attention to the following safety
notes:

Supply voltage..
Contact with live parts is extremely hazardous when any objects are introduced
or any liquids penetrate into the device.
Make sure that no objects enter through the vent holes of the device. Keep the
device dry.

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WIEN MASS FILTER POWER SUPPLY INTRODUCTION

Fire of device.
If smoke or lames coming from the device are sighted, disconnect power sup-
ply immediately (by unplugging the power cord, or if it is not possible by dis-
connecting a relevant circuit in the switchboard powering the device). Remove
lammable materials at a safe distance. Start extinguishing the ire. If the power
supply could not be disconnected use only E-type extinguishers or dry-powder
extinguishers designed to extinguish equipment under voltage.

Improper installation, operation or use.

Improper installation, operation or use may damage the IS40-WPS . Strictly ad-
here to the stipulated installation and operation data.

Self-con iguration of the device.

Self-con iguration of the IS40-WPS by the user through the service application
results in waiver of the PREVAC’s liability for proper functioning of the device.

Figure 1.1: Make sure that no objects enter through the vent holes of the device. Keep the device
dry.

Failure to observe the general safety instructions may result in potentially dangerous situa-
tions.

User manual rev. 1 Page 11

INTRODUCTION WIEN MASS FILTER POWER SUPPLY

1.3.4 GROUNDING

The IS40-WPS is the class 1 device. To minimize a risk of electric shock connect the device to the
mains with a 3-conductor mains cable. Conductor cross-section should be min. 1 mm2 (17AWG).
Plug the mains cable into wall sockets with protective ground only.

1.3.5 INTERNAL CIRCUITS OF DEVICE

The operating personnel cannot remove the device covers. The device does not contain any inter-
nal control systems and replaceable elements, which could be operated by unauthorized persons.
Replace any attached components only after disconnecting the mains cable. To avoid electric shock
always disconnect the mains cable, any external voltage sources and discharge the output circuits.

1.3.6 SPARE PARTS AND MODIFICATIONS

Replacement of spare parts, modi ications and repairs may be carried out only by the PREVAC’s
authorized personnel. Therefore, the device must be delivered to the PREVAC’s service.

1.3.7 VENTILATION

The device has vent holes located on the side panels of the enclosure. Do not cover the vent holes
during the operation of the device.

1.3.8 OPERATION IN EXPLOSIVE ATMOSPHERES

Operation in explosive atmospheres.

The device cannot be used in the presence of lammable gases or vapours. The
device cannot be used in potentially explosive atmospheres.

1.3.9 CLEANING

Keep the device dry. For cleaning device’s enclosure, use only moistened cloth. Do not use any
aggressive or abrasive cleaning agents.

1.3.10 GENERAL SAFETY INSTRUCTIONS

For all work you are going to do, adhere to the applicable safety regulations. Also observe all safety
notes given in this document and forward the information to all other users of the product. In par-
ticular, pay attention to the following safety notes:

Page 12 User manual rev. 1

WIEN MASS FILTER POWER SUPPLY INTRODUCTION

Mains voltage.
A lethal voltage up to 5kV (1 mA) is present on the cabling interconnecting
the Ion source and on the power supply IS40-WPS . Contact with live parts
is extremely hazardous when any objects are introduced or any liquids pene-
trate into the device. Make sure that no objects enter through the louvers of the
device. Keep the device dry.

Figure 1.2: Do not insert objects through louvers and keep device dry

Improper use.
Improper use can damage the IS40-WPS . Use the IS40-WPS only as intended
by the manufacturer.

Improper installation and operation data.

Improper installation and operation data may damage the IS40-WPS . Strictly
adhere to the stipulated installation and operation data.

User manual rev. 1 Page 13

INTRODUCTION WIEN MASS FILTER POWER SUPPLY

Individual con iguration of the device.

Individual con iguration of the device by the client via the service application
will void the liability of PREVAC.

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WIEN MASS FILTER POWER SUPPLY INTRODUCTION

1.4 TECHNICAL DATA

This section describes mechanical and ambience parameters, operational information and stan-
dards ful illed by the device.

1.4.1 MECHANICAL DATA

Figure 1.3 shows the IS40-WPS rack mounted and standalone dimensions.

Figure 1.3: Dimensions

PARAMETER VALUE
Dimensions Width: 448.8 mm (84HP)
Height: 88.1 mm (2HU)
Depth: 437 mm
Net weight 5,4kg
Use Rack mounted or Desktop device

Table 1.1: Mechanical data

User manual rev. 1 Page 15

INTRODUCTION WIEN MASS FILTER POWER SUPPLY

1.4.2 AMBIENCE

PARAMETER VALUE
Storage temperature 0 - 70°C
Operation temperature 15 - 45°C
Relative humidity Max. 80% (up to 31°C),
decreasing to max. 50% (above 30°C)
Allocation Use indoors only

Table 1.2: Ambience

1.4.3 OPERATION
Only remote control via RS232 from IS40-WPS .

1.4.4 SPECIFICATION

Parameter Description
High voltage power supply output cur- -/+ 20 mA DC
rent limit
High voltage power supply output volt- -/+ 670 V DC
age:
Communication RS232
Mains power 100-120 VAC/200-240 VAC, 50-60Hz
Operating ambient temperature range +15 ºC - +45 ºC

Table 1.3: Speci ication

1.4.5 STANDARDS
SAFETY:
• EN61010-1 - Safety requirements for electrical equipment for measurement, control, and lab-
oratory use - Part 1: General requirements
EMC:
• EN61000-4-2 - Electrostatic discharge immunity test - Air-disch.-8KV, contact disch.-4KV
• EN61000-4-3 - Radiated, radio-frequency, electromagnetic ield immunity test 3V/m
• EN61000-4-4 - Fast transient/burst immunity test - 2KV
• EN61000-4-5 - Surge immunity test1KV line to line, 2KV line to Ground
• EN61000-4-6 - Immunity to conducted disturbances, induced by radio-frequency ields 3V
• EN61000-4-11 - Voltage dips, short interruptions and voltage variations immunity tests

Page 16 User manual rev. 1

WIEN MASS FILTER POWER SUPPLY INSTALLATION

2 INSTALLATION
This chapter describes the procedures for unpacking, mechanical installation and electrical instal-
lation. Take care when lifting the unit that the weight and position do not exceed comfortable limits.

2.1 UNPACKING
1. Visually inspect the transport packaging for signs of external damage.

2. Unpack the IS40-WPS and retain the packaging materials.

Note: Retain the packaging materials for later use. The IS40-WPS must be stored and
transported in the original packaging material only.

3. Examine the IS40-WPS for completeness.

4. Visually inspect the IS40-WPS for signs of damage.

Damaged product.
Putting a damaged product into operation can be extremely dangerous. Never
attempt to put a damaged product into operation. Secure the damaged product
from unintended operation. Send a damage report to the haulage company or
the insurer.

2.2 MECHANICAL INSTALLATION

The IS40-WPS is designed for installation into a rack according to DIN 41 494 (19”, 2HU) and occu-
pying the whole width of the cassette. Before taking any actions read the safety notes below.

Ambient temperature.
Exceeding the maximum permitted ambient temperature may damage the de-
vice. Make sure that the maximum permitted ambient temperature is not ex-
ceeded and that the air can low freely through the louvers. Do not expose the
device to direct sunlight.

Protection class of the rack.

If the product is installed in a rack, it is likely to lower the protection class of the
rack (protection from foreign bodies and water) e.g. according to the EN 60204-
1 regulations for switching cabinets. Take appropriate measures to restore the
required protection class of the rack.

User manual rev. 1 Page 17

INSTALLATION WIEN MASS FILTER POWER SUPPLY

2.3 COOLING
IS40-WPS is equipped with a cooling system . A set of fans is installed inside the power supply. The
air is supplied from the power supply housing side panels. Hot air outlet is located on the right
panel. A minimum 15mm space for air intake ( side panels ) and 15 cm for expelling warm air from
the back of the power supply should be observed. IS40-WPS should not be used at temperatures
exceeding 70°C.

2.4 ELECTRICAL INSTALLATION

2.4.1 AC SOURCE REQUIREMENTS
This section describes general power requirements and how to connect AC power to the unit.

PARAMETER VALUE
Voltage 100-120 VAC/200-240 VAC
Frequency 50 – 60 Hz
Overvoltage category II
Protection class 1
Connection European appliance connector IEC 320
C13
Power consumption Max. 50VA
Current consumption T-0,315A (for 230V)
T-0,63A (for 110V)
Fuse 1A

Table 2.1: AC source requirements

2.4.2 AC INPUT POWER CONNECTION

The mains connection is an IEC 320 type connector on the rear side of the unit. A mains cable is
supplied with the device. If the plug is not compatible with your wall socket, you should replace it
with a suitable mains cable:

• Three-conductor cable with protective ground.

• Conductor cross-section 3x1.0 mm2 or larger.

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WIEN MASS FILTER POWER SUPPLY INSTALLATION

Figure 2.1: Three-conductor cable with protective ground (example)

Mains power.
Improperly grounded devices can be extremely dangerous in the event of a fault.
Use three-wire mains or extension cables with protective ground only provided
with IS40-WPS . Plug the mains cable into wall sockets with protective ground
only.

• Connect the European appliance connector of the mains cord with the
mains connection of the device

• Connect the plug of the mains cable with the wall socket

NOTE: If the device is installed in a switching cabinet, the mains power can
be supplied via a switchable central power distributor.

Figure 2.2: Power connector

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INSTALLATION WIEN MASS FILTER POWER SUPPLY

2.5 DEVICE REAR PANEL

This section contains a description of available sockets and connectors on the rear panel.
You should read this section in order to properly attach accessories available for your device.

Figure 2.3: Back side of IS40-WPS

2.5.1 HVOUT CONNECTOR

The HVOUT socket in the IS40-WPS is designed for connect de lection, Lens In and Lens Out voltages
to Wien Mass Filter.

Figure 2.4: HVOUT connector

PIN NUMBER FUNCTION DESCRIPTION

1 Lens in Lens In pin
2 Lens out Lens Out pin
3 Y+ Plate Y+ de lection voltage pin
4 Y- Plate Y- de lection voltage pin

Table 2.2: HVOUT connector pin description

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WIEN MASS FILTER POWER SUPPLY INSTALLATION

2.5.2 WIEN MASS FILTER RS232

The communication interface is designed to connect exclusively with the Ion Source power supply
(IS40-PS). It’s not possible to connect any other device through this interface. This interface is only
available in extended version (E) of IS40-PS power supply.

Figure 2.5: Wien Mass Filter power supply interface connector

PIN NUMBER FUNCTION DESCRIPTION

2 TX RS232 - Data Signal TX
3 RX RS232 - Data signal RX
5 GND Ground
1,4,6,7,8,9 none not used

Table 2.3: Wien Mass Filter PS interface connector - pin description

2.5.3 GROUND BINDING POST

The ground screw can be used to connect the IS40-WPS with the protective ground of e.g. a pumping
station. If required, connect the protective ground of the pumping station with the ground screw.
Use a protective conductor.

Screw for internal protective conductor.

The internal protective conductor is connected to the casing with a screw. Do
not turn or loosen this screw.

User manual rev. 1 Page 21

INSTALLATION WIEN MASS FILTER POWER SUPPLY

2.6 CONNECTION TO THE WIEN MASS FILTER

Connect Wien Mass Filter to the IS40-WPS using the cables supplied with the unit. A sample dia-
gram is shown in the igure 2.6.

Figure 2.6: Typical Wien Mass Filter wiring (example)

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WIEN MASS FILTER POWER SUPPLY OPERATING

3 OPERATING
Interaction with the IS40-WPS takes place mainly via the remote control interface by the IS40-PS
power supply. The front panel contains only the power switch. The rear panel has LED indicator,
indicating the presence of high voltages on the HVOUT connector.

For all information about the parameters con iguration of the IS40-WPS , please refer to the IS40-PS
user manual supplied with the IS40-PS power supply.

User manual rev. 1 Page 23

STORAGE AND DISPOSAL WIEN MASS FILTER POWER SUPPLY

4 STORAGE AND DISPOSAL

4.1 PACKING
Please retain the original packaging. The packaging is required for storing the IS40-WPS and for
shipping it to an authorized PREVAC service center.

4.2 STORAGE
The IS40-WPS should only be stored in a dry room. The following requirements must be met:

PARAMETER VALUE
Ambient temperature -20...50°C
Humidity As low as possible. Preferably in an air-
tight plastic bag with a desiccant.

Table 4.1: Storage parameters

4.3 DISPOSAL
The product must be disposed of in accordance with the relevant local regulations for the environ-
mentally safe disposal of systems and electronic components.

Page 24 User manual rev. 1