WO2024176450A1

WO2024176450A1 - Substrate storage container

Info

Publication number: WO2024176450A1
Application number: PCT/JP2023/006791
Authority: WO
Inventors: 和彦荒牧; 忠利井上
Original assignee: ミライアル株式会社
Priority date: 2023-02-24
Filing date: 2023-02-24
Publication date: 2024-08-29
Also published as: TW202435342A

Abstract

A substrate storage container 1 includes: a container body 2 including a cylindrical wall portion 20 in which a container body opening portion is formed in one end portion thereof on a front side D11 and another end portion thereof on a rear side D12 is closed by a back wall 22, the inner surface of the wall portion 20 forming a substrate storage space 27 capable of storing a plurality of substrates and in communication with the container body opening portion; and a lid body detachable from the container body opening portion and capable of closing the container body opening portion. The back wall 22 has a gate trace 226 projecting toward the rear side D12. The gate trace 226 projects toward the rear side D12 from the outer surface of the back wall 22 around the gate trace 226, and a base portion of the gate trace 226 is connected to the outer surface of the back wall 22 over an area equal to or greater than the area of a gate cut section.

Description

Substrate storage container

The present invention relates to a substrate storage container used for storing, transporting, shipping, etc., substrates such as semiconductor wafers.

As a substrate storage container for storing substrates made of semiconductor wafers and transporting them during processes in a factory, a container having a container body and a lid has been known for some time (see, for example, Patent Document 1).

One end of the container body has an opening periphery where the container body opening is formed. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed within the container body. The substrate storage space is surrounded by the wall and is capable of storing multiple substrates. The lid is detachable from the opening periphery and is capable of closing the container body opening. When the container body opening is closed by the lid, the substrate storage container holds multiple substrates in a state where adjacent substrates are spaced apart at a predetermined distance and aligned side by side.

The substrate storage container is formed by injection molding of a resin such as polycarbonate as a molding material. The resin flows from the injection device through the mold's sprue (resin flow path to the runner), the runner (resin flow path to the gate) that branches off from the sprue, and the gate (resin inlet to the cavity) before flowing into the cavity, filling the cavity and transferring the shape of the cavity to form the container body (see, for example, Patent Document 1). In the molded container body, gate marks (also called gate marks) are inevitably formed at the positions corresponding to the gates.

JP 2017-050494 A

Due to manufacturing constraints, gate marks are sometimes placed on the inner wall (rear wall) of the container body. However, water is likely to accumulate or remain around the gate marks placed on the inner wall of the container body during cleaning or drying, and particles generated during gate processing are likely to accumulate.

The present invention aims to provide a substrate storage container that has a gate mark on the back wall of the container body and that can prevent water from pooling or remaining around the gate mark during cleaning or drying, and prevents particles from pooling during gate processing.

The present invention is a substrate storage container comprising: a container body having a cylindrical wall portion with a container body opening formed at one end on the front side and the other end on the rear side closed by a back wall, the inner surface of the wall portion forming a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; and a lid body that is detachable from the container body opening and capable of closing the container body opening, wherein the back wall has a gate mark protruding rearward, the gate mark protruding rearward further than the outer surface of the back wall around the gate mark, and the base of the gate mark is connected to the outer surface of the back wall by an area equal to or greater than the area of the gate cut portion.

The rear wall may also have one or more legs that form a contact surface when the container body is placed with the rear wall facing downward, and some or all of the gate marks may function as some or all of the legs.

The gate mark may also be smoothly connected to the outer surface of the rear wall at the base of the gate mark.

The present invention provides a substrate storage container having a gate mark on the back wall of the container body, which can prevent water from pooling or remaining around the gate mark during cleaning or drying, and prevents particles from pooling during gate processing.

1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to a first embodiment of the present invention. 1 is a top perspective view showing a container body 2 of a substrate storing container 1 according to a first embodiment of the present invention, viewed from the front. 1 is an upper perspective view showing a container body 2 of a substrate storing container according to a first embodiment of the present invention, viewed from the rear. 1 is a top view of a container body 2 of a substrate storage container according to a first embodiment of the present invention. FIG. This is a cross-sectional view taken along line AA in FIG. 3A. 11 is a schematic diagram showing a first example of the shape of a gate mark 226. FIG. 13 is a schematic diagram showing a second example of the shape of the gate mark 226. FIG. 13 is a schematic diagram showing a third example of the shape of the gate mark 226. FIG. 13 is an upper perspective view showing a container body 2A of a substrate storing container according to a second embodiment of the present invention, viewed from the rear. FIG. This is a cross-sectional view taken along line BB shown in FIG. 5A.

The substrate storage container 1 according to the first embodiment will now be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1 according to the first embodiment of the present invention. FIG. 2 is an upper perspective view showing the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention from the front. FIG. 3A is an upper perspective view showing the container body 2 of the substrate storage container according to the first embodiment of the present invention from the rear. FIG. 3B is a top view of the container body 2 of the substrate storage container according to the first embodiment of the present invention. FIG. 3C is a cross-sectional view taken along line A-A in FIG. 3A.

Here, for ease of explanation, the direction from the container body 2 to the lid body 3 (direction from the upper right to the lower left in FIG. 1) is defined as the front direction D11 or front side D11, the opposite direction is defined as the rear direction D12 or rear side D12, and these are collectively defined as the front-rear direction D1. Also, the direction from the lower wall 24 to the upper wall 23 (upward direction in FIG. 1) is defined as the upward direction D21, the opposite direction is defined as the downward direction D22, and these are collectively defined as the up-down direction D2. Also, the direction from the second side wall 26 to the first side wall 25 (direction from the lower right to the upper left in FIG. 1) is defined as the leftward direction D31, the opposite direction is defined as the rightward direction D32, and these are collectively defined as the left-right direction D3 or lateral direction D3. Arrows indicating these directions are illustrated in some of the drawings.

The substrates W (see FIG. 1) stored in the substrate storage container 1 are disk-shaped silicon wafers, glass wafers, sapphire wafers, etc., and are thin wafers used in industry. In this embodiment, the substrates W are silicon wafers with a diameter of 300 mm.

As shown in Figure 1, the substrate storage container 1 is used as a shipping container for storing substrates W made of silicon wafers as described above and transporting the substrates W by land, air, sea or other transport means, and is composed of a container body 2 and a lid 3. The container body 2 has a side substrate support portion 5 and a rear substrate support portion 6 (see Figure 2, etc.). The lid 3 has a front retainer (not shown) as the substrate support portion on the lid side.

The container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end. A substrate storage space 27 is formed inside the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. The side substrate support portion 5 and the rear substrate support portion 6 are disposed in the portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, the substrate storage space 27 is capable of storing multiple substrates W.

The side substrate support parts 5 are provided on the wall part 20 so as to form a pair inside the substrate storage space 27. When the container body opening 21 is not closed by the lid body 3, the side substrate support parts 5 abut against the edges of the substrates W, thereby supporting the edges of the substrates W while arranging adjacent substrates W in parallel with a predetermined distance apart from each other. At the rear side of the side substrate support parts 5, a rear substrate support part 6 is provided and molded integrally with the side substrate support parts 5.

The rear substrate support portion 6 (see FIG. 2, etc.) is provided on the wall portion 20 inside the substrate storage space 27 so as to form a pair with the front retainer. When the container body opening 21 is closed by the lid body 3, the rear substrate support portion 6 abuts against the edges of the substrates W, thereby supporting the rear portions of the edges of the substrates W.

The lid body 3 is detachable from the opening periphery 28 that forms the container body opening 21, and is capable of closing the container body opening 21. The front retainer is provided on a portion of the lid body 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid body 3. The front retainer is disposed inside the substrate storage space 27 so as to form a pair with the rear substrate support portion 6.

When the container body opening 21 is closed by the lid 3, the front retainer can support the front of the edges of the multiple substrates W by abutting against the edges of the multiple substrates W. When the container body opening 21 is closed by the lid 3, the front retainer cooperates with the rear substrate support portion 6 to support the multiple substrates W, thereby holding adjacent substrates W in parallel with a predetermined distance between them.

The substrate storage container 1 is made of resin such as plastic material, and examples of the resin material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, as well as alloys of these. When making these resin materials conductive, conductive substances such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers are selectively added. It is also possible to add glass fiber or carbon fiber to increase rigidity.

The individual parts will be described in detail below. As shown in FIG. 1, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are integrally molded from the materials described above.

The first side wall 25 and the second side wall 26 face each other in the horizontal direction D3, and the upper wall 23 and the lower wall 24 face each other in the vertical direction D2. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22, and constitute an opening periphery 28 that forms the container body opening 21, which is approximately rectangular in shape.

The opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surfaces of the walls 20 is box-shaped. The inner surfaces of the walls 20, i.e., the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a substrate storage space 27 surrounded by these. The container body opening 21 formed at the opening periphery 28 is surrounded by the walls 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

As shown in FIG. 1, latch engagement recesses 231A, 231B, 241A, and 241B recessed toward the outside of the board storage space 27 are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one each near the left and right ends of the upper wall 23 and the lower wall 24.

As shown in FIG. 1, ribs 235 are integrally formed with the upper wall 23 on the outer surface of the upper wall 23. The ribs 235 increase the rigidity of the container body 2. A top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a member that is hung on the substrate storage container 1 when suspending the substrate storage container 1 in an AMHS (automated wafer transport system), PGV (wafer substrate transport vehicle), etc.

The lateral board support parts 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are interior components arranged in the board storage space 27 in pairs in the left-right direction D3. Specifically, as shown in FIG. 2, the lateral board support parts 5 have a plate part 51 and a support wall 52 as a plate part support part. The plate part 51 and the support wall 52 are integrally formed from a resin material, and the plate part 51 is supported by the support wall 52.

The plate portions 51 have a generally arc-shaped plate shape when viewed in the vertical direction D2. 25 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26 in the vertical direction D2, for a total of 50 plate portions 51. Adjacent plate portions 51 are spaced apart and parallel in the vertical direction D2. Note that above the topmost plate portion 51, another plate-shaped member is arranged parallel to the plate portion 51; this member is located at the top and acts as a guide for the substrate W being inserted into the substrate storage space 27.

The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 are positioned opposite each other in the left-right direction D3. The 50 plate portions 51 and the member acting as a plate-shaped guide parallel to the plate portions 51 are positioned parallel to the inner surface of the bottom wall 24. As shown in FIG. 2, a convex portion 511 is provided on the upper surface of the plate portion 51. The substrate W supported by the plate portions 51 contacts only the protruding ends of the convex portions 511 and does not contact the plate portions 51 at their surfaces.

The support wall 52 has a plate shape extending in the up-down direction D2 and in the approximately front-to-rear direction D1. The support wall 52 has a predetermined length in the longitudinal direction of the plate portion 51 and is connected to the side edge of the plate portion 51. The plate-shaped support wall 52 curves along the outer edge of the plate portion 51 toward the board storage space 27.

That is, the 25 plate portions 51 provided on the first side wall 25 are connected to the support wall 52 provided on the first side wall 25 side. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to the support wall 52 provided on the second side wall 26 side. The support walls 52 are fixed to the first side wall 25 and the second side wall 26, respectively.

The lateral substrate support portion 5 configured in this manner can support the edges of multiple substrates W while keeping adjacent substrates W spaced apart at a predetermined distance and parallel to each other.

The lid 3 has a generally rectangular shape that generally matches the shape of the opening periphery 28 of the container body 2, as shown in FIG. 1 and other figures. The lid 3 is detachable from the opening periphery 28 of the container body 2, and the lid 3 can close the container body opening 21 by attaching the lid 3 to the opening periphery 28. An annular seal member 4 is attached to the inner surface of the lid 3 (the back surface of the lid 3 shown in FIG. 1) and the seal surface that faces the surface of the step formed in the position in the rear direction D12 immediately behind the opening periphery 28 when the lid 3 closes the container body opening 21. The seal member 4 is made of various thermoplastic elastomers such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc. The seal member 4 is arranged so as to go around the outer periphery of the lid 3.

When the lid 3 is attached to the opening periphery 28, the seal member 4 is sandwiched between the sealing surface and the inner surface of the lid 3 and elastically deforms, so that the lid 3 closes the container body opening 21 in a sealed state. By removing the lid 3 from the opening periphery 28, the substrate W can be inserted and removed from the substrate storage space 27 inside the container body 2.

The lid body 3 is provided with a latch mechanism. The latch mechanism is provided near both the left and right ends of the lid body 3, and as shown in FIG. 1, includes two upper latch portions 32A that can protrude in an upward direction D21 from the top edge of the lid body 3, and two lower latch portions 32B that can protrude in a downward direction D22 from the bottom edge of the lid body 3. The two upper latch portions 32A are located near both the left and right ends of the top edge of the lid body 3, and the two lower latch portions 32B are located near both the left and right ends of the bottom edge of the lid body 3.

An operating portion 33 is provided on the outer surface of the lid body 3. By operating the operating portion 33 from the front side of the lid body 3, the upper latch portion 32A and the lower latch portion 32B can be made to protrude from the upper and lower edges of the lid body 3, or can be made not to protrude from the upper and lower edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid body 3 and engages with the latch engagement recesses 231A, 231B of the container body 2, and the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid body 3 and engages with the latch engagement recesses 241A, 241B of the container body 2, thereby fixing the lid body 3 to the opening periphery 28 of the container body 2.

Next, the rear wall 22 will be described in detail. As shown in Figures 3A to 3C, the rear wall 22 has legs 221 on its outer surface (rear side D12) that form a contact surface CP (shown by a two-dot chain line in Figure 3C) when the container body 2 is placed with the rear wall 22 facing downwards. The container body 2 may be placed with the rear wall 22 facing downwards, for example, when it does not contain a substrate W. There are no restrictions on the number or shape of the legs 221, as long as they are able to form the contact surface CP. For example, if the leg 221 has a large area and is a straight plane, one leg 221 can form the contact surface CP.

In the first embodiment, the rear wall 22 has four legs 221, one at each corner. The bottom surfaces 222 (surfaces on the rear side D12) of the legs 221 are straight planes parallel to the D2-D3 plane (plane perpendicular to the front-to-rear direction D1). The bottom surfaces 222 of the four legs 221 are positioned so as to form the vertices of a rectangle, and form a ground plane CP parallel to the D2-D3 plane. In other words, the ground plane CP is formed by the bottom surfaces 222 of one or more legs 221.

The parts of the rear wall 22 other than the legs 221 on the rear side D12 are located on the front side D11 of the bottom surfaces 222 of the legs 221 that form the contact surface CP. The parts of the rear wall 22 other than the legs 221 on the rear side D12 can take on various shapes depending on the container body 2. For example, between two legs 221 aligned in the vertical direction D2, a recessed area 223 is provided that is recessed toward the front side D11 from the bottom surfaces 222 of the legs 221. Two linear grooves 224 are provided on the inside of the horizontal direction D3 of the legs 221 and the recessed area 223 aligned in the horizontal direction D3, recessed toward the front side D11 and extending in the vertical direction D2. The depth of the linear grooves 224 with respect to the contact surface CP is, for example, 20 to 40 mm.

An island region 225 is provided between two linear grooves 224 aligned in the horizontal direction D3. The rear side D12 surface of the island region 225 is located on the front side D11 of the bottom surface 222 of the leg 221. In correspondence with the linear grooves 224, the board storage space 27 is provided with a linear bulge 271 that bulges out to the front side D11 and extends in the up-down direction D2.

The rear wall 22 has a gate mark 226 facing the rear side D12. The gate mark 226 is located on the front side D11 of the ground surface CP. The gate mark 226 is provided in the island region 225. In detail, the rear side D12 surface of the island region 225 is the outer surface of the rear wall 22 located on the front side D11 of the ground surface CP other than the bottom surface 22 of the leg 221, and is located on the front side D11 of the bottom surface 222 of the leg 221. The gate mark 226 is provided on the rear side D12 surface of the island region 225. The gate mark 226 is located on the outer surface of the island region 225, and is located on the front side D11 of the ground surface CP.

A gate is an entrance through which molten resin is poured from an injection molding machine into a mold (molded product). A gate mark inevitably remains in the molded product at a position corresponding to the gate. When the container body 2 of the substrate storage container 1 is manufactured by molding, due to constraints such as the shape of the container body 2 and molding conditions, the gate mark is often located on the back wall 22 of the container body 2.

The gate mark 226 protrudes rearward D12 beyond the outer surface of the rear wall 22 around the gate mark 226, and is connected to the outer surface of the rear wall 22 at the base 2261 of the gate mark 226 by an area S61 that is greater than or equal to the area S62 of the gate cut portion 2262. In this embodiment, the gate mark 226 protrudes rearward D12 beyond the outer surface of the island region 225 of the rear wall 22. The gate mark 226 is smoothly connected to the outer surface of the island region 225 of the rear wall 22 by an area S61 that is greater than or equal to the area S62 of the gate cut portion 2262 at the base 2261 of the gate mark 226.

The height H226 of the gate mark 226 (see FIG. 3C) is, for example, 1.0 to 3.0 mm, and preferably 1.5 to 2.0 mm. The ratio S61/S62 of the area S61 of the base 2261 of the gate mark 226 to the area S62 of the gate cut portion 2262 is, for example, 5 to 10 times.

The gate cut portion 2262 is a portion that is cut off during gate processing at the top of the gate mark 226, and generally, the entire top of the gate mark 226 becomes the gate cut portion 2262. However, if the shape of the gate mark 226 is columnar (typically, cylindrical), then a portion of the top of the gate mark 226 becomes the gate cut portion 2262 (see, for example, the shape shown in FIG. 4C).

Examples of the shape of the gate mark 226 will now be described. FIG. 4A is a schematic diagram showing a first example of the shape of the gate mark 226. FIG. 4B is a schematic diagram showing a second example of the shape of the gate mark 226. FIG. 4C is a schematic diagram showing a third example of the shape of the gate mark 226.

The shape of the gate mark 226 is not limited. For example, as shown in FIG. 4A, the gate mark 226 may be substantially hemispherical. As shown in FIG. 4B, the gate mark 226 may be substantially truncated cone. As shown in FIG. 4C, the gate mark 226 may be substantially cylindrical. In the substantially cylindrical gate mark 226, the entire top portion is the gate cut portion 2262.

The identification member 245 (see FIG. 3A) is a detachable member that is attached to the lower rear part of the container body 2 in order to identify information about the substrates W stored in the substrate storage container 1. Depending on its shape, the identification member 245 may be located behind the ground surface CP D12 when attached to the container body 2. However, when attempting to place the container body 2 with the rear wall 22 facing downwards, the identification member 245 is removed from the container body 2 beforehand.

The substrate storage container 1 according to the first embodiment can provide the following effects. The substrate storage container 1 according to the first embodiment includes a container body 2 having a cylindrical wall 20 with a container body opening 21 formed at one end on the front side D11 and the other end on the rear side D12 closed by a rear wall 22, and a substrate storage space 27 formed by the inner surface of the wall 20 that can store multiple substrates W and communicates with the container body opening 21, and a lid 3 that is detachable from the container body opening 21 and can close the container body opening 21. The rear wall 22 has a gate mark 226 that protrudes toward the rear side D12, and the gate mark 226 protrudes toward the rear side D12 further than the outer surface of the rear wall 22 around the gate mark 226, and is connected to the outer surface of the rear wall 22 at a base 2261 of the gate mark 226 by an area equal to or greater than the area of the gate cut portion 2262.

As a result, in a substrate storage container 1 having a gate mark 226 on the rear wall 22 of the container body 2, no depressions or flat surfaces are formed around the gate mark 226. When attempting to clean or dry the container body 2 with the rear wall 22 facing upward, it is possible to prevent water from pooling or remaining around the gate mark 226. It is also possible to prevent particles generated during gate processing from pooling around the gate mark 226.

In gate marks 226 such as the roughly hemispherical shape shown in FIG. 4A or the roughly truncated cone shape shown in FIG. 4B, the gate marks 226 smoothly connect to the outer surface of the rear wall 22 at their bases 2261. Therefore, the aforementioned accumulation or residue of water, accumulation of particles, etc., are even less likely to occur near the bases 2261 of the gate marks 226.

Next, a substrate storage container according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 5A is an upper perspective view showing the container body 2A of the substrate storage container according to the second embodiment of the present invention from the rear. Fig. 5B is a cross-sectional view taken along line B-B shown in Fig. 5A.

In the second embodiment, the features of the present invention are different from those in the first embodiment, for example, the function, position, and number of gate marks 226. The rest of the configuration is generally the same as in the first embodiment, so the same members are illustrated with the same reference numerals and the description is omitted (the description of the configuration and effects of the first embodiment can be applied to the other embodiments as appropriate).

In the container body 2A of the substrate storage container according to the second embodiment, as shown in Figs. 5A and 5B, the rear wall 22 has one or more legs 221 that form a contact surface CP when the container body 2A is placed with the rear wall 22 facing downward. Part or all of the gate mark 226 functions as part or all of the leg 221. In this embodiment, the gate mark 226 protrudes rearward D12 beyond the outer surface of the rear wall 22 around the gate mark 226. The gate mark 226 is connected to the outer surface of the rear wall 22 at the base 2261 of the gate mark 226 by an area S61 that is equal to or greater than the area S62 of the gate cut portion 2262.

All (four) gate marks 226 function as all (four) legs 221. Note that a portion of gate marks 226 may function as all of legs 221, a portion of gate marks 226 may function as part of legs 221, or all of gate marks 226 may function as part of legs 221. The number of legs 221 is not limited and may be, for example, 1, 2, or 3.

The substrate storage container according to the second embodiment can provide the following effects. In the substrate storage container of the second embodiment, the rear wall 22 has one or more legs 221 that form the contact surface CP when the container body 2A is placed with the rear wall 22 facing downward, and part or all of the gate mark 226 functions as part or all of the leg 221. Therefore, the gate mark 226 can be utilized as the leg 221.

The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope described in the claims.

For example, the shapes of the container body and the lid, and the number and dimensions of the substrates that can be stored in the container body are not limited to the shapes of the container body 2 and the lid 3 in this embodiment, and the number and dimensions of the substrates W that can be stored in the container body 2. Also, although the substrates W in this embodiment were silicon wafers with a diameter of 300 mm, they are not limited to this value.

Reference Signs List 1 Substrate storage container 2 Container body 3 Lid 21 Container body opening 20 Wall 22 Back wall 27 Substrate storage space 221 Leg 226 Gate mark 2261 Base 2262 Gate cut portion CP Ground surface D11 Front side D12 Rear side W Substrate

Claims

a container body having a cylindrical wall portion with a container body opening formed at one end on the front side and the other end on the rear side closed by a back wall, the inner surface of the wall portion forming a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening;
A substrate storage container comprising: a lid body that is detachable from the container body opening and capable of closing the container body opening,
The rear wall has a gate mark protruding rearward,
A substrate storage container, wherein the gate mark protrudes rearward beyond the outer surface of the rear wall around the gate mark, and is connected to the outer surface of the rear wall at the base of the gate mark with an area greater than or equal to the area of the gate cut portion.
The rear wall has one or more legs that form a contact surface when the container body is placed with the rear wall facing downward,
The substrate storage container according to claim 1 , wherein a part or all of the gate mark functions as a part or all of the leg portion.
The substrate storage container according to claim 1 or 2, wherein the gate mark smoothly connects to the outer surface of the rear wall at the base of the gate mark.