TW202435342A - Substrate storage container - Google Patents

Abstract

The substrate storage container (1) comprises: a container body (2), having a container body opening formed at one end of the front side (D11) and a cylindrical wall portion (20) whose other end of the rear side (D12) is closed by an inner wall (22), and a substrate storage space (27) that can store a plurality of substrates and is connected to the container body opening is formed by the inner surface of the wall portion (20); and a cover that can be installed and removed relative to the container body opening and can close the container body opening. The inner wall (22) has a grooving mark (226) protruding from the rear side (D12), the grooving mark (226) protruding further toward the rear side (D12) than the outer surface of the inner wall (22) around the grooving mark (226), and connected to the outer surface of the inner wall (22) at the base of the grooving mark (226) with an area larger than the area of the grooving cut-off portion. The inner wall (22) has one or more feet (221) forming a landing surface (CP) when the container body (2A) is supported with the inner wall (22) downward, and a part or all of the grooving mark (226) functions as a part or all of the feet (221).

Description

Substrate storage container

The present invention relates to a substrate storage container used for storing, storing, transporting, conveying, etc. a substrate composed of a semiconductor wafer or the like.

As a substrate storage container for storing substrates composed of semiconductor chips and transporting the substrates in a process within a factory, a substrate storage container having a structure of a container body and a lid is conventionally known (for example, refer to Patent Document 1).

One end of the container body has an opening peripheral portion forming an opening of the container body. The other end of the container body has a closed cylindrical wall portion. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by the wall portion and can store a plurality of substrates. The cover body is detachable relative to the opening peripheral portion and can close the opening of the container body. When the opening of the container body is closed by the cover body, the substrate storage container holds a plurality of substrates in a state where adjacent substrates are arranged at predetermined intervals from each other.

The substrate storage container is formed by injection molding of a resin such as polycarbonate as a molding material. The resin flows from the injection molding device into the cavity through the main gate (resin flow path to the branch gate; sprue), the branch gate branching from the main gate (resin flow path to the gate; runner) and the gate (the inlet where the resin flows into the cavity) of the mold, and fills the cavity, and the shape of the cavity is copied to form a container body (for example, refer to Patent Document 1). A gate mark (also called a gate mark) is inevitably formed at the position corresponding to the gate in the molded container body.

Patent document 1: Japanese Patent Application Publication No. 2017-050494.

Due to manufacturing constraints, a spout mark may be arranged on the inner wall (rear wall) of the container body. However, water or residue during washing or drying, and particles generated during spouting treatment, etc. are likely to accumulate around the spout mark arranged on the inner wall of the container body.

The object of the present invention is to provide a substrate storage container having a spout mark on the inner wall of a container body, which can suppress the accumulation or residue of water during cleaning or drying, the accumulation of particles generated during spout processing, etc. around the spout mark.

The substrate storage container of the present invention comprises: a container body, having a cylindrical wall portion with a container body opening formed at one end on the front side and the other end on the rear side closed by an inner wall, wherein the inner surface of the wall portion forms a substrate storage space that can store multiple substrates and is connected to the container body opening; and a cover body that is detachable relative to the container body opening and can close the container body opening, wherein the inner wall has a gutter mark protruding toward the rear side, the gutter mark protrudes toward the rear side more than the outer surface of the inner wall around the gutter mark, and is connected to the outer surface of the inner wall at the base of the gutter mark with an area greater than the area of the gutter cut-off portion.

The inner wall has one or more feet, and the one or more feet form a landing surface when the container body is supported with the inner wall downward, and part or all of the spout mark functions as part or all of the foot.

In addition, the gutter mark may be smoothly connected to the outer surface of the inner wall at the base of the gutter mark.

According to the present invention, a substrate storage container can be provided, in which the inner wall of the container body has a spout mark, and the accumulation or residue of water during cleaning or drying, the accumulation of particles generated during spout processing, etc. can be suppressed around the spout mark.

Hereinafter, the substrate storage container 1 of the first embodiment will be described with reference to the attached drawings. FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1 of the first embodiment of the present invention. FIG. 2 is an upper perspective view showing the container body 2 of the substrate storage container 1 of the first embodiment of the present invention from the front. FIG. 3A is an upper perspective view showing the container body 2 of the substrate storage container of the first embodiment of the present invention from the rear. FIG. 3B is a top view of the container body 2 of the substrate storage container of the first embodiment of the present invention. FIG. 3C is an A-A cross-sectional view shown in FIG. 3A.

Here, for the sake of convenience, the direction from the container body 2 described later toward the lid body 3 (the direction from the upper right toward the lower left in FIG. 1 ) is defined as the front direction D11 or the front side D11, and the opposite direction is defined as the rear direction D12 or the rear side D12, and the front-rear direction D1 is defined as a combination of the two. In addition, the direction from the lower wall 24 described later toward the upper wall 23 (the upper direction in FIG. 1 ) is defined as the upper direction D21, and the opposite direction is defined as the lower direction D22, and the upper-lower direction D2 is defined as a combination of the two. In addition, the direction from the second side wall 26 described later toward the first side wall 25 (the direction from the lower right toward the upper left in FIG. 1 ) is defined as the left direction D31, and the opposite direction is defined as the right direction D32, and the left-right direction D3 or the lateral direction D3 is defined as a combination of the two. In some of the drawings, arrows indicating these directions are shown.

The substrate W (see FIG. 1 ) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin substrate for industrial use. The substrate W in this embodiment is a silicon wafer with a diameter of 300 mm.

As shown in FIG1 , a substrate storage container 1 is used as a shipping container, and the shipping container is used to store substrates W composed of the above-mentioned silicon wafers, and transport the substrates W through transportation tools such as land transportation tools, air transportation tools, and sea transportation tools. The substrate storage container 1 is composed of a container body 2 and a cover body 3. The container body 2 has a side substrate support part 5 and a back substrate support part 6 (refer to FIG2 , etc.). The cover body 3 has a front retainer (not shown) as a cover body side substrate support part.

The container body 2 has a cylindrical wall portion 20, and the wall portion 20 is formed with a container body opening portion 21 at one end and is closed at the other end. A substrate storage space 27 is formed inside the container body 2. The substrate storage space 27 is formed by being surrounded by the wall portion 20. A side substrate support portion 5 and a back substrate support portion 6 are arranged in a portion that is a part of the wall portion 20 and forms the substrate storage space 27. As shown in FIG. 1 , a plurality of substrates W can be stored in the substrate storage space 27.

Inside the substrate storage space 27, the side substrate support parts 5 are provided in pairs on the wall part 20. When the container main body opening part 21 is not closed by the lid body 3, the side substrate support parts 5 can support the edges of the plurality of substrates W by abutting against the edges of the plurality of substrates W so that the adjacent substrates W are arranged at predetermined intervals. On the inner side of the side substrate support parts 5, the inner substrate support parts 6 are provided integrally with the side substrate support parts 5.

Inside the substrate storage space 27, the back substrate support portion 6 (see FIG. 2, etc.) is provided on the wall portion 20 in a paired manner with the front retainer. When the container main body opening 21 is closed by the lid 3, the back substrate support portion 6 can support the rear of the edge portion of the plurality of substrates W by abutting against the edge portion of the plurality of substrates W.

The lid 3 is detachable relative to the opening peripheral portion 28 forming the container main body opening 21, and can close the container main body opening 21. The front retainer is provided at a portion that is a part of the lid 3 and that is opposite to the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. Inside the substrate storage space 27, the front retainer and the inner substrate support portion 6 are arranged in pairs.

When the container main body opening 21 is closed by the cover 3, the front retainer can support the front of the edge of the plurality of substrates W by abutting against the edge of the plurality of substrates W. When the container main body opening 21 is closed by the cover 3, the front retainer supports the plurality of substrates W by cooperating with the back substrate support 6, thereby maintaining the plurality of substrates W in a state where adjacent substrates W are arranged at predetermined intervals from each other.

The substrate storage container 1 is made of a resin such as a plastic material. Examples of the resin include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, and alloys thereof. When conductivity is imparted to the resin of these materials, conductive substances such as carbon fiber, carbon powder, carbon nanotube, and conductive polymer are selectively added. In addition, glass fiber, carbon fiber, etc. may be added to improve rigidity.

As shown in Fig. 1, the wall portion 20 of the container body 2 has an inner wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The inner wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are integrally formed from the above-mentioned materials.

The first side wall 25 and the second side wall 26 are opposite to each other in the transverse direction D3, and the upper wall 23 and the lower wall 24 are opposite to each other in the vertical direction D2. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the inner wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 constitute an opening peripheral portion 28, which has a positional relationship with the inner wall 22 and forms a container main body opening portion 21 that is substantially rectangular.

The opening peripheral portion 28 is provided at one end of the container body 2, and the inner wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the inner wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 form a substrate storage space 27 surrounded by them. The container body opening portion 21 formed at the opening peripheral portion 28 is connected to the substrate storage space 27, and the substrate storage space 27 is surrounded by the wall portion 20 and formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

As shown in Fig. 1, in the portion near the opening peripheral portion 28 which is a part of the upper wall 23 and the lower wall 24, there are formed lock engaging recesses 231A, 231B, 241A, 241B which are recessed toward the outside of the substrate storage space 27. The lock engaging recesses 231A, 231B, 241A, 241B are formed one each near the left and right ends of the upper wall 23 and the lower wall 24, forming a total of four.

As shown in FIG. 1 , ribs 235 are provided on the outer surface of the upper wall 23 so as to be integrally formed with the upper wall 23. The ribs 235 improve the rigidity of the container body 2. In addition, a top flange 236 is fixed to the center of the upper wall 23. When the substrate storage container 1 is suspended in an AMHS (automatic wafer transport system), a PGV (wafer substrate transport vehicle), etc., the top flange 236 is a component that becomes a part of the substrate storage container 1 that is hooked and suspended.

The side substrate support parts 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are built-in components arranged in pairs in the left-right direction D3 in the substrate storage space 27. Specifically, as shown in FIG2 , the side substrate support parts 5 have a plate part 51 and a support wall 52 as a plate part support part. The plate part 51 and the support wall 52 are integrally formed of a resin material, and the plate part 51 is supported by the support wall 52.

When viewed in the up-down direction D2, the plate portion 51 is in a plate-like, roughly arc-shaped shape. 25 plate portions 51 are provided on the first side wall 25 and the second side wall 26 along the up-down direction D2, and a total of 50 plate portions 51 are provided. Adjacent plate portions 51 are separated and arranged in a parallel position relationship in the up-down direction D2. In addition, a plate-like component parallel to the plate portion 51 is also arranged above the uppermost plate portion 51, and the component is a component that guides the substrate W when the uppermost substrate W is inserted into the substrate storage space 27.

The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a relative positional relationship with each other in the left-right direction D3. In addition, the 50 plate portions 51 and the plate-shaped guide member parallel to the plate portions 51 have a positional relationship parallel to the inner surface of the lower wall 24. As shown in FIG. 2 , a convex portion 511 is provided on the upper surface of the plate portion 51. The substrate W supported by the plate portion 51 contacts only the protruding end of the convex portion 511 and does not contact the surface of the plate portion 51.

The support wall 52 is in the shape of a plate extending in the up-down direction D2 and the approximately front-back direction D1. The support wall 52 has a predetermined length in the longitudinal direction of the plate portion 51 and is connected to the side edge of the plate portion 51. The plate-shaped support wall 52 is bent toward the substrate storage space 27 along the outer side edge of the plate portion 51.

That is, the 25 plate portions 51 provided on the first side wall 25 are connected to the supporting wall 52 provided on the side of the first side wall 25. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to the supporting wall 52 provided on the side of the second side wall 26. The supporting wall 52 is fixed to the first side wall 25 and the second side wall 26, respectively.

The side substrate supporting portion 5 configured in this manner can support the edge portions of the plurality of substrates W in a state where adjacent substrates W among the plurality of substrates W are spaced apart from each other by a predetermined interval and are in a positional relationship parallel to each other.

As shown in FIG. 1 and other figures, the lid 3 is in a substantially rectangular shape that is substantially consistent with the shape of the opening peripheral portion 28 of the container body 2. The lid 3 is detachable relative to the opening peripheral portion 28 of the container body 2, and the lid 3 can seal the container body opening 21 by attaching the lid 3 to the opening peripheral portion 28. An annular sealing member 4 is attached to a sealing surface that is the inner surface of the lid 3 (the back surface of the lid 3 shown in FIG. 1) and is opposite to the surface of the step portion formed at a position in the rear direction D12 close to the opening peripheral portion 28 when the lid 3 seals the container body opening 21. The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin that can be elastically deformed, fluororubber, silicone rubber, etc. The sealing member 4 is arranged to surround the outer peripheral portion of the cover body 3.

When the cover 3 is mounted on the opening peripheral portion 28, the sealing member 4 is elastically deformed by being sandwiched between the sealing surface and the inner surface of the cover 3, and the cover 3 seals the container main body opening 21 in a sealed state. By removing the cover 3 from the opening peripheral portion 28, the substrate W can be taken out or put into the substrate storage space 27 in the container main body 2.

The cover 3 is provided with a lock mechanism. The lock mechanism is provided near the left and right ends of the cover 3, and as shown in FIG1 , includes: two upper locks 32A that can protrude from the upper side of the cover 3 toward the upper direction D21; and two lower locks 32B that can protrude from the lower side of the cover 3 toward the lower direction D22. The two upper locks 32A are arranged near the left and right ends of the upper side of the cover 3, and the two lower locks 32B are arranged near the left and right ends of the lower side of the cover 3.

An operating portion 33 is provided on the outer surface of the cover 3. By operating the operating portion 33 from the front side of the cover 3, the upper lock portion 32A and the lower lock portion 32B can be protruded from the upper side and the lower side of the cover 3, and the upper lock portion 32A and the lower lock portion 32B can be set to a state where they do not protrude from the upper side and the lower side of the cover 3. The lid body 3 is fixed to the opening peripheral portion 28 of the container body 2 by the upper lock portion 32A protruding from the upper side of the lid body 3 toward the upward direction D21 and engaging with the lock engaging recesses 231A, 231B of the container body 2, and the lower lock portion 32B protruding from the lower side of the lid body 3 toward the downward direction D22 and engaging with the lock engaging recesses 241A, 241B of the container body 2.

Next, the inner wall 22 is described in detail. As shown in FIG. 3A to FIG. 3C , the inner wall 22 has a foot 221 on the outer surface side (rear side D12), and the foot 221 forms a ground contact surface CP when the container body 2 is carried with the inner wall 22 facing downward (indicated by a double-dotted line in FIG. 3C ). When the container body 2 does not contain a substrate W, for example, there is a situation where the inner wall 22 is carried downward. As long as the foot 221 can form the ground contact surface CP, the number and shape of the foot 221 are not limited. For example, if the area of the foot 221 is large and it is a straight plane, one foot 221 can form the ground contact surface CP.

In the first embodiment, the inner wall 22 has a foot 221 at each of the four corners, and has a total of four feet 221. The bottom surface 222 of the foot 221 (the surface of the rear side D12) is a straight plane parallel to the D2-D3 plane (the plane orthogonal to the front-rear direction D1). The bottom surfaces 222 of the four feet 221 are arranged to form a positional relationship of the vertices of a rectangle, forming a landing surface CP parallel to the D2-D3 plane. That is, the landing surface CP is formed by the bottom surfaces 222 of one or more feet 221.

The portion of the rear side D12 of the inner wall 22 other than the foot 221 is located closer to the front side D11 than the bottom surface 222 of the foot 221 forming the floor surface CP. The portion of the rear side D12 of the inner wall 22 other than the foot 221 can adopt various shapes according to the container body 2. For example, between two feet 221 arranged in the up-down direction D2, there is provided a concave area 223 that is more concave toward the front side D11 than the bottom surface 222 of the foot 221. Two linear grooves 224 that are concave toward the front side D11 and extend in the up-down direction D2 are provided on the inner side in the transverse direction D3 of the feet 221 and the concave area 223 arranged in the transverse direction D3. The depth of the linear groove 224 relative to the contact surface CP is, for example, 20-40 mm.

An island region 225 is provided between two linear grooves 224 arranged in the transverse direction D3. The surface of the rear side D12 of the island region 225 is located closer to the front side D11 than the bottom surface 222 of the leg 221. In addition, a linear bulging portion 271 bulging toward the front side D11 and extending in the up-down direction D2 is provided in the substrate storage space 27 corresponding to the linear groove 224.

The inner wall 22 has a grooving mark 226 facing the rear side D12. The grooving mark 226 is located closer to the front side D11 than the ground surface CP. The grooving mark 226 is provided in the island-shaped area 225. If explained in detail, the surface of the rear side D12 of the island-shaped area 225 is the outer surface of the inner wall 22 that is located closer to the front side D11 than the ground surface CP except for the bottom surface 22 of the foot 221, and is located closer to the front side D11 than the bottom surface 222 of the foot 221. The grooving mark 226 is provided on the surface of the rear side D12 of the island-shaped area 225. The grooving mark 226 is arranged on the outer surface of the island-shaped area 225 so as to be located closer to the front side D11 than the ground surface CP.

The gate is an inlet for the molten resin to flow from the injection molding machine to the mold (molded product). A gate mark is inevitably left at a position corresponding to the gate in the molded product. When the container body 2 in the substrate storage container 1 is manufactured by molding, the gate mark is also often arranged on the inner wall 22 of the container body 2 due to the constraints of the shape of the container body 2, molding conditions, etc.

The gushing mark 226 protrudes further to the rear side D12 than the outer surface of the inner wall 22 around the gushing mark 226, and is connected to the outer surface of the inner wall 22 at the base 2261 of the gushing mark 226 by an area S61 greater than the area S62 of the gushing cutout portion 2262. In the present embodiment, the gushing mark 226 protrudes further to the rear side D12 than the outer surface of the island-shaped area 225 of the inner wall 22. The gushing mark 226 is smoothly connected to the outer surface of the island-shaped area 225 of the inner wall 22 at the base 2261 of the gushing mark 226 by an area S61 greater than the area S62 of the gushing cutout portion 2262.

The height H226 (see FIG. 3C ) of the guillotine mark 226 is, for example, 1.0 to 3.0 mm, preferably 1.5 to 2.0 mm. The ratio S61/S62 of the area S61 of the base 2261 of the guillotine mark 226 to the area S62 of the guillotine cut portion 2262 is, for example, 5 to 10 times.

The guillotine cutout portion 2262 is a portion cut out during the guillotine process in the top of the guillotine mark 226. Generally, the entire top of the guillotine mark 226 becomes the guillotine cutout portion 2262. However, when the guillotine mark 226 is columnar (typically cylindrical), a portion of the top of the guillotine mark 226 becomes the guillotine cutout portion 2262 (for example, refer to the shape shown in FIG. 4C).

Examples of the shape of the grate mark 226 will be described. FIG4A is a schematic diagram showing a first example of the shape of the grate mark 226. FIG4B is a schematic diagram showing a second example of the shape of the grate mark 226. FIG4C is a schematic diagram showing a third example of the shape of the grate mark 226.

The shape of the gushing mark 226 is not limited. For example, as shown in FIG. 4A , the gushing mark 226 may be roughly hemispherical. As shown in FIG. 4B , the gushing mark 226 may also be roughly conical. As shown in FIG. 4C , the gushing mark 226 may also be roughly cylindrical. In the roughly cylindrical gushing mark 226 , the top thereof is entirely the gushing cutout portion 2262 .

The identification member 245 (see FIG. 3A ) is a member that is freely attached and detached to the lower rear portion of the container body 2 in order to identify information of the substrate W stored in the substrate storage container 1. Due to the shape of the identification member 245, when it is mounted on the container body 2, the identification member 245 may be located further back D12 than the floor surface CP. However, if it is desired to load the container body 2 with the inner wall 22 facing downward, the identification member 245 is removed from the container body 2 before loading.

According to the substrate storage container 1 of the first embodiment, the following effects can be obtained. The substrate storage container 1 of the first embodiment comprises: a container body 2, having a cylindrical wall portion 20 with a container body opening portion 21 formed at one end of the front side D11 and the other end of the rear side D12 closed by an inner wall 22, and a substrate storage space 27 that can store a plurality of substrates W and is connected to the container body opening portion 21 is formed by the inner surface of the wall portion 20; and a cover 3 that can be detached from the container body opening portion 21 and can close the container body opening portion 21. The inner wall 22 has a sprue mark 226 protruding from the rear side D12, the sprue mark 226 protrudes further toward the rear side D12 than the outer surface of the inner wall 22 around the sprue mark 226, and is connected to the outer surface of the inner wall 22 at a base 2261 of the sprue mark 226 with an area larger than the area of the sprue cut portion 2262.

Therefore, in the substrate storage container 1 having the spout mark 226 on the inner wall 22 of the container body 2, no depression or flat surface is formed around the spout mark 226. When it is desired to wash or dry the container body 2 with the inner wall 22 facing upward, it is possible to suppress the accumulation or residue of water around the spout mark 226. In addition, it is possible to suppress the accumulation of particles generated during the spouting process around the spout mark 226.

In the gutter mark 226 of a substantially hemispherical shape as shown in FIG4A or a substantially conical shape as shown in FIG4B, the gutter mark 226 is smoothly connected to the outer surface of the inner wall 22 at its base 2261. Therefore, the aforementioned water accumulation, residue, and particle accumulation are less likely to occur near the base 2261 of the gutter mark 226.

Next, a substrate storage container according to a second embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 5A is an upper perspective view showing a container body 2A of the substrate storage container according to the second embodiment of the present invention from the rear. Fig. 5B is a B-B cross-sectional view shown in Fig. 5A.

In the second embodiment, the features of the present invention, such as the function, position, and number of the watering marks 226, are different from those of the first embodiment. The other structures are substantially the same as those of the first embodiment, so the same components are illustrated with the same reference numerals and the description thereof is omitted (the description of the structure and effects of the first embodiment is also appropriately cited in other embodiments).

In the container body 2A of the substrate storage container of the second embodiment, as shown in FIG. 5A and FIG. 5B , the inner wall 22 has one or more feet 221, and the one or more feet 221 form a grounding surface CP when the container body 2A is supported with the inner wall 22 facing downward. A part or all of the guillotine mark 226 functions as a part or all of the feet 221. In the present embodiment, the guillotine mark 226 protrudes further to the rear side D12 than the outer surface of the inner wall 22 around the guillotine mark 226. The guillotine mark 226 is connected to the outer surface of the inner wall 22 at the base 2261 of the guillotine mark 226 with an area S61 greater than the area S62 of the guillotine cutout portion 2262.

All (four) of the gutter marks 226 function as all (four) of the legs 221. Alternatively, a portion of the gutter marks 226 may function as all of the legs 221, a portion of the gutter marks 226 may function as a portion of the legs 221, or all of the gutter marks 226 may function as a portion of the legs 221. The number of legs 221 is not limited, and may be one, two, or three, for example.

According to the substrate storage container of the second embodiment, the following effects can be obtained. In the substrate storage container of the second embodiment, the inner wall 22 has one or more legs 221, and the one or more legs 221 form the grounding surface CP when the container body 2A is supported with the inner wall 22 facing downward, and a part or all of the grooving mark 226 functions as a part or all of the legs 221. Therefore, the grooving mark 226 can be effectively used as the legs 221.

The present invention is not limited to the above-mentioned implementation methods, and can be modified within the technical scope of the claims.

For example, the shapes of the container body and the cover, the number of substrates that can be stored in the container body, and the size are not limited to the shapes of the container body 2 and the cover 3 of the present embodiment, and the number of substrates W that can be stored in the container body 2 and the size. In addition, the substrate W of the present embodiment is a silicon wafer with a diameter of 300 mm, but is not limited to this value.

1: Substrate storage container 2: Container body 3: Cover 4: Sealing member 5: Side substrate support 6: Inner substrate support 20: Wall 21: Container body opening 22: Inner wall 23: Upper wall 24: Lower wall 25: First side wall 26: Second side wall 27: Substrate storage space 28: Opening periphery 33: Operation part 51: Plate 52: Support wall 221: Foot 222: Bottom surface 223: Concave area 224: Linear groove 225: Island area 226: Watering mark 2261: Base 2262: Cutting section 32A: Upper lock 32B: Lower lock 231A, 231B, 241A, 241B: Lock engagement recess 235: Rib 236: Top flange 245: Identification component 271: Linear bulge 272: Bulge CP: Landing surface D1: Front-to-back direction D2: Up-down direction D3: Left-to-right direction D11: Front side D12: Back side D21: Up direction D22: Down direction D31: Left direction D32: Right direction H226: Height W: Base plate.

FIG. 1 is an exploded perspective view showing a state where a plurality of substrates W are stored in a substrate storage container 1 according to a first embodiment of the present invention. FIG. 2 is an upper perspective view showing a container body 2 of a substrate storage container 1 according to a first embodiment of the present invention from the front. FIG. 3A is an upper perspective view showing a container body 2 of a substrate storage container according to a first embodiment of the present invention from the rear. FIG. 3B is a top view of a container body 2 of a substrate storage container according to a first embodiment of the present invention. FIG. 3C is an A-A cross-sectional view shown in FIG. 3A. FIG. 4A is a schematic view showing a first example of the shape of a gutter mark 226. FIG. 4B is a schematic view showing a second example of the shape of a gutter mark 226. FIG. 4C is a schematic view showing a third example of the shape of a gutter mark 226. FIG. 5A is a perspective view showing the upper side of the container body 2A of the substrate storage container of the second embodiment of the present invention from the rear. FIG. 5B is a B-B cross-sectional view shown in FIG. 5A .

1: Substrate storage container

2: Container body

3: Cover

4: Sealing parts

5: Side substrate support

20: Wall

21: Opening of container body

22: Inner wall

23: Upper wall

25: First side wall

26: Second side wall

27: Substrate storage space

28: Opening periphery

33: Operation Department

235: Ribs

236: Top flange

32A: Upper lock

32B: Lower side lock

231A, 231B, 241A, 241B: Locking recess

D1: front and back direction

D2: Up and down direction

D3: Left and right direction

D11: front side

D12: rear side

D21: Upward direction

D22: Downward direction

D31: Left direction

D32: Right direction

W: Substrate

Claims (2)

A substrate storage container comprises: a container body, having a cylindrical wall portion with a container body opening formed at one end on the front side and the other end on the rear side closed by an inner wall, wherein the inner surface of the wall portion forms a substrate storage space that can store multiple substrates and is connected to the container body opening; and a cover body that can be detachably mounted relative to the container body opening and can close the container body opening. The substrate storage container is characterized in that the inner wall has a spout protruding toward the rear side. The spout mark protrudes further rearward than the outer surface of the inner wall around the spout mark, and is connected to the outer surface of the inner wall at the base of the spout mark with an area larger than the area of the spout cut-off portion, the inner wall has one or more feet, and the one or more feet form a landing surface when the container body is supported with the inner wall downward, and a part or all of the spout mark functions as a part or all of the feet. The substrate storage container as described in claim 1 is characterized in that the gutter mark is smoothly connected to the outer surface of the inner wall at the base of the gutter mark.