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WO2016059689A1 - Dispositif d'alimentation électrique pour machine à décharge électrique - Google Patents

Dispositif d'alimentation électrique pour machine à décharge électrique Download PDF

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Publication number
WO2016059689A1
WO2016059689A1 PCT/JP2014/077460 JP2014077460W WO2016059689A1 WO 2016059689 A1 WO2016059689 A1 WO 2016059689A1 JP 2014077460 W JP2014077460 W JP 2014077460W WO 2016059689 A1 WO2016059689 A1 WO 2016059689A1
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WO
WIPO (PCT)
Prior art keywords
voltage
smoothing capacitor
power supply
electrode
discharge
Prior art date
Application number
PCT/JP2014/077460
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English (en)
Japanese (ja)
Inventor
博紀 彦坂
森田 一成
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2015531395A priority Critical patent/JPWO2016059689A1/ja
Priority to PCT/JP2014/077460 priority patent/WO2016059689A1/fr
Publication of WO2016059689A1 publication Critical patent/WO2016059689A1/fr

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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/02Conversion of AC power input into DC power output without possibility of reversal
    • H02M7/04Conversion of AC power input into DC power output without possibility of reversal by static converters
    • H02M7/06Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode

Definitions

  • the present invention relates to a power supply device for an electric discharge machine that applies a voltage between an electrode and a workpiece and processes the workpiece using a discharge phenomenon generated between the electrodes.
  • a DC voltage power supply is used as the power supply of the electric discharge machining apparatus, and this DC voltage power supply is configured such that a commercial AC power supply is rectified by a rectifier and smoothed by a smoothing capacitor.
  • a commercial AC power supply is rectified by a rectifier and smoothed by a smoothing capacitor.
  • Patent Document 1 As a means for suppressing the above-described output voltage fluctuation of the DC voltage power supply, there is a method of connecting a stabilized power supply to the outside of the power supply device of the electric discharge machine, Generally, it is very expensive and requires a place for installation. As another method for stabilizing the processing, there is a method disclosed in Patent Document 1 below.
  • a constant machining current is controlled by a switching system circuit at the time of rough machining that handles a large current to always supply a constant machining current pulse, and a resistance machining circuit at the time of finishing machining that handles a small current. Is operated, a constant machining current pulse is supplied with a constant DC power supply voltage maintained by pulse width modulation (PWM) control even if the commercial power supply voltage fluctuates. Thereby, stable electric discharge machining can be realized.
  • PWM pulse width modulation
  • a DC power supply is generated by disturbance such as fluctuations in commercial power supply voltage by selecting an appropriate capacity for the smoothing capacitor for pulse width modulation control used for power supply control. Even when the voltage increases or decreases, it is possible to quickly return to the predetermined voltage.
  • the peak value of the machining current becomes constant when the DC power supply voltage is kept constant, but the discharge frequency changes depending on the state of the discharge gap, and the current flowing within the unit time varies.
  • an increase in current flowing in a unit time due to temporary concentrated discharge causes deterioration of arc and flatness, and abnormal wear of electrodes.
  • the present invention has been made in view of the above, and it is possible to suppress an increase in current flowing in a unit time due to temporary concentrated discharge, and to suppress deterioration of arc and flatness, and abnormal consumption of electrodes. It aims at obtaining the power supply device of an electric discharge machine.
  • the present invention provides a DC voltage converter that rectifies an AC power source and outputs a DC voltage, and a smoothing capacitor that applies a voltage between the electrode and the workpiece.
  • a constant voltage control unit that makes the smoothing capacitor constant by performing pulse width modulation control on the basis of the DC voltage, and is connected between the smoothing capacitor and the electrode, from the smoothing capacitor to the electrode.
  • a current limiting resistor for limiting the current flowing to the capacitor, and the capacity of the smoothing capacitor is a predetermined voltage set for the smoothing capacitor to determine the amount of charge used for discharging during one discharge duration. It is characterized by being smaller than the divided value.
  • the power supply device for an electric discharge machine is capable of suppressing an increase in current flowing in a unit time due to temporary concentrated discharge and suppressing deterioration of arc and flatness and abnormal consumption of electrodes. Play.
  • FIG. 6 is a diagram illustrating an example of a variable capacitance smoothing capacitor according to the third embodiment.
  • FIG. 1 is a diagram illustrating a schematic configuration of an electric discharge machine 100 according to the first embodiment of the present invention.
  • the electric discharge machine 100 includes a power supply device 110 of an electric discharge machine connected to a commercial AC power supply 101, an electrode 1, and a workpiece 2 that is an object of electric discharge machining.
  • a power supply device 110 for an electric discharge machine includes a DC voltage conversion unit 102 that rectifies a commercial AC power supply 101 by a rectifier and outputs a DC voltage, and a constant voltage control unit that is connected to the DC voltage conversion unit 102 and converts the DC voltage to a constant voltage.
  • a smoothing capacitor 5 for constant voltage control connected to the constant voltage control unit 103, and a current limiting resistor switching unit having a current limiting resistor for limiting the current flowing from the smoothing capacitor 5 to the electrode 1 for electric discharge machining 104.
  • the current limiting resistance switching unit 104 can switch the current limiting resistance and is connected to the electrode 1.
  • One end of the smoothing capacitor 5 is connected to the current limiting resistance switching unit 104, and the other end of the smoothing capacitor 5 is connected to the workpiece 2.
  • the smoothing capacitor 5 is subjected to pulse width modulation control so as to have a predetermined voltage by the constant voltage control unit 103, and functions as a power source that generates a discharge by applying a voltage between the electrode 1 and the workpiece 2.
  • FIG. 2 is a diagram showing in detail an example of the circuit configuration of the power supply device 110 of the electric discharge machine shown in FIG. 1 according to the first embodiment.
  • components given the same reference numerals as those in FIG. 1 are the same components.
  • the DC voltage conversion unit 102 includes a rectifier 3 that rectifies the commercial AC power supply 101 and a capacitor 4 that is connected in parallel to the rectifier 3 in order to smooth the rectifier 3.
  • the constant voltage control unit 103 includes a discharge resistor 13 connected in parallel to the smoothing capacitor 5, a capacitor 6 connected in parallel to the DC voltage conversion unit 102, and a driving method connected between the smoothing capacitor 5 and the capacitor 6.
  • the smoothing capacitor 5, the discharge resistor 13, the capacitor 6, the rectifying diode 19, and the switching element 8 are all connected to the workpiece 2 through the switching element 10 described later.
  • the current limiting resistor switching unit 104 includes a current limiting resistor 14 for limiting a discharge current, a rectifying diode 17, a switching element 11 connected between the current limiting resistor 14 and the rectifying diode 17, Is provided.
  • the electric discharge machine 100 further includes a switching element 10 connected between the workpiece 2 and the switching element 8, a rectifying diode 18 connected between the workpiece 2 and the smoothing capacitor 5, and a reactor.
  • Switching element 9 and rectifying diode 16 connected in series between 12 and electrode 1, and rectifying diode 15 connected between switching element 9 and rectifying diode 16 and switching element 10.
  • the electric discharge machine 100 further includes a detection unit 30 that detects the voltage V C1 across the smoothing capacitor 5.
  • the detection unit 30 switches the ON state or the OFF state of the switching elements 7 and 8 based on the magnitude relationship between the detected both-end voltage V C1 and a predetermined set voltage V 0 .
  • This circuit operates as a first drive system that supplies constant machining current pulses by constant current control of the switching system circuit for rough machining that requires a current of several tens of amperes or more. Even if the voltage of the commercial AC power supply 101 fluctuates for finishing processing that requires a current of ampere or less, a constant DC power supply voltage is maintained by pulse width modulation control and a constant current pulse for finishing processing is supplied.
  • Two drive systems In the first embodiment, this second driving method is used.
  • FIG. 3 shows a circuit diagram in which an operation loop according to the second driving method in the circuit shown in FIG. 2 is added.
  • the electromagnetic switch 20 and the switching element 9 are in the OFF state during any of the voltage no-load period, the discharge duration period, and the rest period, and the switching element 10 Is in the ON state.
  • the voltage no-load period is a period in which a voltage is applied between the electrode 1 and the work piece 2 but in an insulated state and no discharge is generated.
  • the discharge duration is a period in which a voltage is applied between the electrode 1 and the workpiece 2 and a discharge is actually generated.
  • the rest period is a period in which no voltage is applied between the electrode 1 and the workpiece 2.
  • the switching elements 7 and 8 are turned on or off by the detection unit 30 that detects the voltage V C1 across the smoothing capacitor 5 during any of the voltage no-load period, the discharge duration period, and the rest period. The state is switched.
  • the detection unit 30 turns on both the switching elements 7 and 8, and direct current is generated along the loop (1) indicated by the broken line in FIG. A current is passed from the voltage conversion unit 102 to the reactor 12, and energy is stored in the coil of the reactor 12 as a magnetic flux.
  • the detection unit 30 turns off both the switching elements 7 and 8 and follows the loop (2) path indicated by the one-dot chain line in FIG.
  • the smoothing capacitor 5 is charged with the current from the reactor 12.
  • the voltage of the both-end voltage V C1 is increased and controlled so as to be kept close to the set voltage V 0 .
  • the carrier frequency is constant, that is, the period is constant. Then, the ratio between the ON period and the OFF period of the switching elements 7 and 8 within a certain period is changed.
  • pulse width modulation control is performed in which the duty of the ON period and OFF period of the switching elements 7 and 8 is changed.
  • the duty referred to here is, for example, the ratio of the ON period to one cycle including the ON period and the OFF period. Generally, a maximum value and a minimum value are set as the duty value.
  • the smoothing capacitor 5 that is controlled so that the voltage V C1 at both ends always maintains a constant set voltage V 0 is used as a power source, and the switching element 11 is in the ON state only during the voltage no-load period and the discharge duration period.
  • a voltage is applied between the electrode 1 and the workpiece 2 when the switching element 11 is in the ON state.
  • the timing at which discharge occurs in a state where a voltage is applied is a natural phenomenon and cannot be predicted. Therefore, the period during which the switching element 11 is in the ON state is divided into a voltage no-load period and a discharge duration period.
  • a finishing current pulse having a constant current peak corresponding to the value of the current limiting resistor 14 is output.
  • the switching element 11 is controlled by control means (not shown) based on the voltage between the electrode 1 and the workpiece 2, that is, the inter-electrode voltage V.
  • control means By detecting that the inter-electrode voltage V decreases after the switching element 11 is turned on, the control means can detect that discharge has occurred. Therefore, the control means turns off the switching element 11 so that the discharge duration becomes a predetermined period each time. That is, the control means can make the discharge duration constant by switching the switching element 11 from the ON state to the OFF state in a certain period from the occurrence of the discharge.
  • the discharge duration can be set to the same length in each discharge and is usually set to 500 ⁇ sec or less.
  • the control means can control the suspension period to be constant by setting the period during which the switching element 11 is in the OFF state to a predetermined period.
  • FIG. 4 shows the operation of the switching elements 7 and 8, the operation of the switching element 11, the time of the voltage V C1 across the smoothing capacitor 5 in the comparative example in which the capacity of the smoothing capacitor 5 is several hundred ⁇ F or more in the circuit configuration of FIG. It is a figure which shows the time change of a change, the time change of the voltage V between electrodes, and the electric current between the electrode 1 and the workpiece 2, ie, the electric current I between electrodes.
  • FIG. 4 also shows in what state the interelectrode voltage V is a voltage no-load period, a discharge duration period, and a rest period.
  • the voltage V C1 across the smoothing capacitor 5 can be kept constant by the pulse width modulation control as described above. .
  • the voltage V C1 across the smoothing capacitor 5 can be kept constant even when the capacity of the smoothing capacitor 5 is 100 ⁇ F. Therefore, in FIG. 4, even if the voltage of the commercial AC power supply 101 fluctuates, the constant both-end voltage V C1 is maintained by pulse width modulation control, and a current pulse for finishing with a constant interelectrode current I is output. Therefore, the uniformity of the current pulse is maintained in any power supply environment.
  • the discharge frequency and the frequency of concentrated discharge change due to factors other than the power supply environment such as the type and state of the machining fluid, machining shape, and machining area.
  • the discharge frequency is the number of discharge durations that occur in one second, and is a value proportional to the frequency of discharge.
  • the capacity of the smoothing capacitor 5 is made smaller than the value obtained by dividing the charge amount Q used in the discharge for one discharge duration by the set voltage V 0 of the smoothing capacitor 5.
  • a predetermined set voltage V 0 with respect to the voltage V C1 across the smoothing capacitor 5 is set as a value unique to the electric discharge machine 100.
  • the capacitance of the smoothing capacitor 5 is reduced to about several thousand pF such as 1000 pF.
  • the smoothing capacitor 5 may be removed. That is, the capacity of the smoothing capacitor 5 may be zero. Even when the smoothing capacitor 5 is removed, that is, when the capacitance of the smoothing capacitor 5 is set to 0, a capacitance on the order of pF can be generated as a stray capacitance.
  • the second drive is performed by making the capacity of the smoothing capacitor 5 smaller than the value obtained by dividing the charge amount Q used in the discharge for one discharge duration by the set voltage V 0 of the smoothing capacitor 5. It has been confirmed by experiments that the circuit operation can be changed without changing the system.
  • FIG. 5 shows the operation of the switching elements 7 and 8, the operation of the switching element 11, the time change of the voltage V C1 across the smoothing capacitor 5 in the first embodiment in which the capacity of the smoothing capacitor 5 is reduced in the circuit configuration of FIG. It is a figure which shows the time change of the voltage V between electrodes, and the electric current between the electrode 1 and the workpiece 2, ie, the time change of the electric current I between electrodes.
  • the smoothing capacitor 5 has a value that is less than the value obtained by dividing the charge amount Q used in the discharge for one discharge duration by the set voltage V 0 of the smoothing capacitor 5.
  • the charge of the smoothing capacitor 5 is easily charged and discharged. Since the carrier frequency of the pulse width modulation control of the switching elements 7 and 8 is constant, the capacitance of the smoothing capacitor 5 is reduced even if the duty of the ON period and OFF period of the switching elements 7 and 8 is varied to the maximum or the minimum. Charge / discharge of the electric charge of the smoothing capacitor 5 cannot follow the change of the discharge frequency during processing. As a result, as shown in FIG. 5, the voltage V C1 across the smoothing capacitor 5 changes because the set voltage V 0 cannot be maintained, and as a result, the voltage V between the electrodes also changes.
  • the interval at which the discharge duration occurs is long and the discharge frequency f is low, but the interval at which the discharge duration occurs gradually decreases and the discharge frequency f tends to be high. Therefore, in FIG. 5, the voltage V C1 across the smoothing capacitor 5 changes from a state higher than the set voltage V 0 to a low state in accordance with a temporal trend in which the discharge frequency f changes from a low state to a high state. Accordingly, the interelectrode voltage V also changes from a high state to a low state. Since the circuit shown in FIG.
  • the 2 is a resistance processing circuit using the current limiting resistor 14, the tendency of the change in the interelectrode voltage V is reflected in the interelectrode current I as it is.
  • the interpolar current I is large when f is low, and the interpolar current I is small when the discharge frequency f is high.
  • FIG. 6 is a diagram showing the relationship between the discharge frequency f on the horizontal axis and the interelectrode voltage V on the vertical axis.
  • the capacitance of the smoothing capacitor 5 is set to several hundreds ⁇ F or more, which is sufficiently higher than the value obtained by dividing the charge amount Q used for discharge in one discharge duration by the set voltage V 0 of the smoothing capacitor 5.
  • the interelectrode voltage V is constant regardless of the discharge frequency f, as shown by the broken line in FIG.
  • the interelectrode voltage V is low when the discharge frequency f is high, and the interelectrode voltage V is high when the discharge frequency f is low.
  • the interelectrode voltage V decreases when the discharge frequency f is high, thereby reducing the interelectrode current I.
  • the discharge frequency f is low, the interelectrode voltage V is decreased. Increases the inter-electrode current I.
  • FIG. FIG. 7 is a diagram illustrating a schematic configuration of an electric discharge machine 200 according to the second embodiment of the present invention.
  • the electric discharge machine 200 has a mechanism for adjusting the relative distance between the electrode 1 and the workpiece 2 based on the interelectrode voltage V.
  • the electric discharge machine 200 further includes an axis control unit 105 that performs position control of an axis that calculates an average value of the interelectrode voltage V and adjusts a relative distance between the electrode 1 and the workpiece 2.
  • the configuration of the electric discharge machine 200 other than the axis control unit 105 is the same as that of the electric discharge machine 100 of FIG.
  • the axis control unit 105 has a function of obtaining an interelectrode voltage V between the electrode 1 and the workpiece 2 and obtaining a time average value of the interelectrode voltage V during a predetermined period.
  • the length of the time averaged period is a period depending on the speed of axis control, such as 20 to 30 msec.
  • the axis control unit 105 performs control so that the workpiece 2 and the workpiece 2 are close to each other. This stabilizes the frequency of discharge, that is, the discharge frequency f.
  • the capacity Q of the smoothing capacitor 5 is further divided by the set voltage V 0 of the smoothing capacitor 5 by the amount of charge Q used for discharging for one discharge duration. Make the value smaller than By reducing the capacity of the smoothing capacitor 5 and causing the shaft control unit 105 to function, the inter-electrode voltage V is lowered when the discharge frequency f is high, so that the average voltage is lowered to escape the shaft, and when the discharge frequency f is low, As the voltage V increases, the average voltage increases and the shaft can be driven.
  • the control effect of the axis control unit 105 can be combined with the effect of avoiding the concentrated discharge in a short time range by reducing the capacity of the smoothing capacitor 5, the control to quickly reach the desired discharge frequency f can be performed. It becomes possible. That is, according to the second embodiment, the effect of avoiding the concentrated discharge obtained in the first embodiment can be realized in a longer time range.
  • FIG. 8 is a diagram illustrating an example of a smoothing capacitor having a variable capacitance.
  • the smoothing capacitor 50 is configured by connecting capacitors 51 to 54 in parallel, and switches 61 to 64 are connected to the capacitors 51 to 54, respectively.
  • Each of the switches 61 to 64 is a switching element such as a relay or an electromagnetic switch.
  • the capacitors 51 to 54 may all have the same capacity, but they do not necessarily have to be the same.
  • the capacities of the capacitors 51 to 54 may all be smaller than the value obtained by dividing the charge amount Q due to one discharge by the set voltage V 0 of the smoothing capacitor 50, but at least one of the capacities of the capacitors 51 to 54. It suffices if the charge amount Q due to one discharge is smaller than a value obtained by dividing the charge amount Q by the set voltage V 0 of the smoothing capacitor 50.
  • FIG. 9 is a diagram showing the relationship between the discharge frequency f and the interelectrode voltage V in the third embodiment.
  • the capacity of the smoothing capacitor 50 becomes smaller from A to D in FIG. An example of realizing such a situation is shown below.
  • A is a state in which all the switches 61 to 64 are in the ON state, and the capacity of the smoothing capacitor 50 is the sum of the respective capacities of the capacitors 51 to 54.
  • B is a state in which the switch 64 is turned off and the switches 61 to 63 are all turned on, and the capacitance of the smoothing capacitor 50 is the sum of the capacitances of the capacitors 51 to 53.
  • C is a state in which the switches 63 and 64 are turned off and the switches 61 and 62 are turned on, and the capacitance of the smoothing capacitor 50 is the sum of the capacitances of the capacitors 51 and 52.
  • D is a state in which the switches 62 to 64 are turned off and only the switch 61 is turned on, and the capacity of the smoothing capacitor 50 becomes the capacity of the capacitor 51.
  • the capacitance of the smoothing capacitor 50 at A is larger than the value obtained by dividing the charge amount Q due to one discharge by the set voltage V 0 of the smoothing capacitor 50, but the capacitance of the smoothing capacitor 50 at D is the charge amount Q due to one discharge. Is smaller than the value obtained by dividing by the set voltage V 0 of the smoothing capacitor 50.
  • the smoothing capacitor 5 is replaced with the variable capacitance smoothing capacitor 50 shown in FIG. 8, and the capacitance is changed using means such as the switches 61 to 64.
  • the change width of the interelectrode voltage V depending on the discharge frequency f. That is, according to the third embodiment, in addition to obtaining the effects obtained in the first and second embodiments, the degree of the effects can be controlled.
  • the configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Rectifiers (AREA)
  • Generation Of Surge Voltage And Current (AREA)

Abstract

Un dispositif d'alimentation électrique (110) pour une machine à décharge électrique est pourvu d'une unité de conversion de tension continue (CC) (102) pour redresser une alimentation en courant alternatif (CA) et délivrer en sortie une tension continue, un condensateur de lissage (5) pour appliquer une tension entre une électrode (1) et une pièce à usiner (2), une unité de régulation de tension constante (103) pour stabiliser la tension du condensateur de lissage sur la base de la tension continue par la commande de modulation de largeur d'impulsion, et une unité de commutation de résistance de limitation de courant (104) qui est connectée entre le condensateur de lissage et l'électrode et limite le courant s'écoulant du condensateur de lissage à l'électrode. La capacité du condensateur de lissage est inférieure à la valeur obtenue en divisant la quantité de charge utilisée pour décharger dans la durée une seule décharge par une tension définie établie au préalable pour le condensateur de lissage. Le dispositif d'alimentation électrique (110) pour une machine à décharge électrique permet de supprimer l'augmentation de l'écoulement de courant dans une unité de temps résultant d'une décharge concentrée transitoire, et de supprimer également la formation d'arc, la détérioration de planéité, et l'usure anormale de l'électrode.
PCT/JP2014/077460 2014-10-15 2014-10-15 Dispositif d'alimentation électrique pour machine à décharge électrique WO2016059689A1 (fr)

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JP2015531395A JPWO2016059689A1 (ja) 2014-10-15 2014-10-15 放電加工機の電源装置
PCT/JP2014/077460 WO2016059689A1 (fr) 2014-10-15 2014-10-15 Dispositif d'alimentation électrique pour machine à décharge électrique

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PCT/JP2014/077460 WO2016059689A1 (fr) 2014-10-15 2014-10-15 Dispositif d'alimentation électrique pour machine à décharge électrique

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194823A (en) * 1981-05-26 1982-11-30 Mitsubishi Electric Corp Electrospark machining device
JPS6138819A (ja) * 1984-07-31 1986-02-24 Hitachi Seiko Ltd ワイヤカツト放電加工用電源装置
JPS61188021A (ja) * 1985-02-18 1986-08-21 Techno Fine Houden Gijutsu Kenkyusho:Kk 放電加工の放電ギヤツプ距離サ−ボ方法及び装置
JPH01164520A (ja) * 1987-12-17 1989-06-28 Stanley Electric Co Ltd 電解仕上げ装置におけるワーク位置合わせ方法
JP2005153078A (ja) * 2003-11-26 2005-06-16 Mitsutoyo Corp 放電パルス電源回路
WO2005102578A1 (fr) * 2004-04-19 2005-11-03 Mitsubishi Denki Kabushiki Kaisha Appareil d’alimentation électrique de machine de traitement de décharges et procédé de contrôle de l'alimentation électrique
JP2006263871A (ja) * 2005-03-24 2006-10-05 Tochigi Prefecture マイクロプラズマ発生用ディスクの微細穴あけ加工方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194823A (en) * 1981-05-26 1982-11-30 Mitsubishi Electric Corp Electrospark machining device
JPS6138819A (ja) * 1984-07-31 1986-02-24 Hitachi Seiko Ltd ワイヤカツト放電加工用電源装置
JPS61188021A (ja) * 1985-02-18 1986-08-21 Techno Fine Houden Gijutsu Kenkyusho:Kk 放電加工の放電ギヤツプ距離サ−ボ方法及び装置
JPH01164520A (ja) * 1987-12-17 1989-06-28 Stanley Electric Co Ltd 電解仕上げ装置におけるワーク位置合わせ方法
JP2005153078A (ja) * 2003-11-26 2005-06-16 Mitsutoyo Corp 放電パルス電源回路
WO2005102578A1 (fr) * 2004-04-19 2005-11-03 Mitsubishi Denki Kabushiki Kaisha Appareil d’alimentation électrique de machine de traitement de décharges et procédé de contrôle de l'alimentation électrique
JP2006263871A (ja) * 2005-03-24 2006-10-05 Tochigi Prefecture マイクロプラズマ発生用ディスクの微細穴あけ加工方法

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