WO2013008344A1

WO2013008344A1 - Plasma processing apparatus

Info

Publication number: WO2013008344A1
Application number: PCT/JP2011/071657
Authority: WO
Inventors: 鈴木　正康
Original assignee: 株式会社島津製作所
Priority date: 2011-07-14
Filing date: 2011-09-22
Publication date: 2013-01-17
Also published as: JPWO2013008344A1; CN103493602A; CN103493602B; KR101485140B1; JP5804059B2; KR20130137034A

Abstract

This plasma processing apparatus is provided with: an anode electrode; a cathode electrode having a through hole that is provided with openings in the surfaces that face the anode electrode; a gas supply apparatus, which introduces a process gas to between the anode electrode and the cathode electrode; and an alternating current power supply, which supplies alternating current power to between the anode electrode and the cathode electrode, and brings the process gas into the plasma state at an area between the anode electrode and the cathode electrode.

Description

Plasma processing equipment

The present invention relates to a plasma processing apparatus for generating a plasma to perform substrate processing.

In the semiconductor device manufacturing process, a plasma processing apparatus is used in a film forming process, an etching process, an ashing process, and the like because of high-precision process control. As a plasma processing apparatus, for example, a plasma chemical vapor deposition (CVD) apparatus, a plasma etching apparatus, a plasma ashing apparatus, and the like are known. For example, in a plasma CVD apparatus, a raw material gas is turned into plasma by high-frequency power or the like, and a thin film is formed on a substrate by a chemical reaction.

Furthermore, a plasma processing apparatus using a shower electrode that supplies a process gas from the inside of the cathode electrode in order to make the plasma density uniform, or a plasma that uses a hollow cathode discharge in the shower electrode to generate a higher density plasma. A processing apparatus has been proposed (see, for example, Patent Document 1).

JP 2004-296526 A

However, in order to perform plasma treatment with the shower electrode, it is necessary to form a large number of fine holes having a diameter of about 0.3 to 0.4 mm on the surface of the cathode electrode. For this reason, manufacture and maintenance of a cathode electrode are difficult, and cost is high. Moreover, continuous use may not be possible due to clogging of the shower electrode. These problems also occur in a plasma processing apparatus using hollow cathode discharge. In the cited example, the plasma is generated only on one surface facing the cathode, and it is difficult to stably generate uniform and high-density plasma on both surfaces of the cathode electrode.

In view of the above problems, an object of the present invention is to provide a plasma processing apparatus capable of stably generating uniform and high-density plasma on both surfaces of a cathode electrode.

According to one aspect of the present invention, an anode electrode on which a processing substrate is mounted, a cathode electrode that is disposed so as to face the anode electrode, and has a through-hole that is provided with an opening on the facing surface, the anode electrode and the cathode A gas supply device for introducing a process gas between the electrodes; an AC power supply for supplying AC power between the anode electrode and the cathode electrode to bring the process gas into a plasma state between the anode electrode and the cathode electrode; and the anode electrode and the cathode electrode There is provided a plasma processing apparatus including a chamber for storing the gas, an exhaust pump for evacuating the chamber, an exhaust speed controller for adjusting the exhaust speed, and a pressure measuring device for measuring the pressure inside the chamber.

According to the present invention, it is possible to provide a plasma processing apparatus capable of stably generating uniform and high-density plasma on both sides of the cathode electrode.

It is a schematic diagram which shows the structure of the plasma processing apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram for demonstrating the plasma area | region in the through-hole of the plasma processing apparatus which concerns on the 1st Embodiment of this invention (the 1). It is a schematic diagram for demonstrating the plasma area | region in the through-hole of the plasma processing apparatus which concerns on the 1st Embodiment of this invention (the 2). It is a schematic diagram for demonstrating the plasma area | region in the through-hole of the plasma processing apparatus which concerns on the 1st Embodiment of this invention (the 3). It is a schematic diagram for demonstrating the plasma area | region in the through-hole of the plasma processing apparatus which concerns on the 1st Embodiment of this invention (the 4). It is a schematic diagram for demonstrating the hollow cathode discharge of a comparative example. It is a schematic diagram which shows the structural example of the cathode electrode of the plasma processing apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram which shows the example of arrangement | positioning of the opening part of the through-hole formed in the cathode electrode of the plasma processing apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram which shows the discharge state in the plasma processing apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram which shows the other discharge state in the plasma processing apparatus which concerns on the 1st Embodiment of this invention. It is a table | surface which shows the conditions of the hollow cathode discharge of the plasma processing apparatus which concerns on the 1st Embodiment of this invention. It is a graph which shows the relationship between an electron mean free path and pressure. It is a table | surface which shows the example of the calculated value of Debye length. It is a schematic diagram which shows the structure of the plasma processing apparatus which concerns on the 1st modification of the 1st Embodiment of this invention. It is a schematic diagram which shows the structure of the plasma processing apparatus which concerns on the 2nd modification of the 1st Embodiment of this invention. It is a schematic diagram which shows the structure of the plasma processing apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic diagram which shows the other structure of the plasma processing apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic diagram which shows the structure of the plasma processing apparatus which concerns on the modification of the 2nd Embodiment of this invention.

Next, first and second embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic. Further, the following first and second embodiments exemplify apparatuses and methods for embodying the technical idea of the present invention, and the embodiments of the present invention include the structure of component parts, The arrangement is not specified as follows. The embodiment of the present invention can be variously modified within the scope of the claims.

(First embodiment)
As shown in FIG. 1, the plasma processing apparatus 10 according to the first embodiment of the present invention includes an anode electrode 11 on which a processing substrate is mounted, and a through-hole 120 in which an opening is provided on a surface facing the anode electrode 11. A cathode electrode 12 having a gas source, a gas supply device 13 for introducing a process gas 100 between the anode electrode 11 and the cathode electrode 12, and an AC power supply between the anode electrode 11 and the

cathode electrode

12, 12 and an AC power supply 14 for bringing the process gas 100 into a plasma state. As shown in FIG. 1, the anode electrode 11 and the cathode electrode 12 are flat plate types, and the plasma processing apparatus 10 utilizes capacitively coupled plasma. It is desirable that the distance between the capacitive coupling type electrodes be approximately uniform.

The cathode electrode 12 provided with an opening on the surface functions as a hollow cathode electrode for generating a hollow cathode discharge. Hereinafter, hollow cathode discharge will be described.

In general capacitively coupled plasma, ionization is maintained by ionizing gas molecules in a chain manner starting from secondary electrons emitted by ions incident on the surface of the cathode electrode 12. In the case of the present invention, plasma generation on the surface of the cathode electrode 12 excluding the inside of the through hole 120 corresponds to this. On the other hand, the plasma generation inside the through hole 120 is a hollow cathode discharge, and in the hollow cathode discharge, electrons are confined in the through hole 120 and have kinetic energy in the through hole 120 of the cathode electrode 12, thereby having high density. An electron space is formed. That is, debye blocking is caused by the cathode drop generated on the side wall of the through hole 120 provided in the cathode electrode 12, and electrons do not enter the side wall of the through hole 120 and disappear. That is, a high-density electron space is formed inside the through-hole 120 by repeating repulsion called “Pendulum effect” in which the electrons are repelled from the opposing wall surface inside the through-hole 120. Electrons that collide with gas molecules repeat inelastic collisions to maintain and promote ionization. These electrons are scattered in various directions inside the through hole 120 and repeat ionization amplification and cumulative ionization.

The above phenomenon will be described with reference to FIGS. FIG. 2 is an enlarged view of the region A shown in FIG. A glow discharge region 101 is formed between the anode electrode 11 and the cathode electrode 12, and a hollow discharge region 102 is formed inside the through hole 120 formed in the cathode electrode 12. A sheath region 200 is formed between the anode electrode 11 and the cathode electrode 12 and the glow discharge region 101, respectively. In addition, a sheath region 200 is formed between the cathode electrode 12 and the hollow discharge region 102 inside the through hole 120. The distance between the anode electrode 11 and the cathode electrode 12 is a distance S.

3, the ions 50 that have entered the through hole 120 are accelerated by the sheath region 200 and collide with the inner wall surface of the cathode electrode 12.

As shown in FIG. 4, the secondary electrons 60 radiated from the wall surface are accelerated in a direction perpendicular to the wall surface by the sheath electric field. The secondary electrons 60 that have been accelerated to obtain sufficient energy collide with the neutral gas molecules 70 to cause electron avalanche. Thereby, the electron density inside the through-hole 120 increases rapidly.

As shown in FIG. 5, among the secondary electrons 60 radiated from the wall surface, the electrons 61 that have reached the vicinity of the opposite wall surface are repelled by the opposite sheath electric field and pushed back into the plasma. This is called the pendulum motion effect, and the establishment of the presence of electrons in the through-hole 120 increases dramatically. By these actions, the inside of the through hole 120 is maintained at a high electron density, and a plasma structure different from the glow discharge formed between the parallel plates is obtained.

The gas molecules that have entered the high electron density region repeat ionization and recombination, and are observed as high-luminance emission during recombination. The precursor 80 generated in the high-density plasma is a radical species and diffuses to the outside of the through-hole 120 regardless of the electrode potential, and forms a thin film on the substrate surface disposed on the anode electrode 11, for example.

The diameter of the through-hole 120 to obtain a uniform and high electron density efficiently is considered from the pressure, temperature, process gas type and the mean free path of the electrons. The diameter of the through hole 120 will be described later.

In addition, from the above principle, the cathode electrode 12 is preferably made of a carbon material that is inexpensive, easy to process, and easy to maintain such as cleaning. For example, the cathode electrode 12 made of a carbon material can be cleaned by hydrofluoric acid treatment. In addition, the use of the carbon material does not cause deformation due to high temperature in the plasma treatment process. Alternatively, an aluminum alloy or the like on which a metal oxide film is easily formed is a material suitable for a hollow cathode electrode. In addition, carbon containing carbon fiber, stainless alloy, copper, copper alloy, glass, ceramics, and the like can be used for the cathode electrode 12. Alternatively, the above material may be coated by alumite treatment, plating, or thermal spraying.

A carbon material is also preferably used for the anode electrode 11. Further, carbon containing carbon fiber, aluminum alloy, stainless alloy, copper, copper alloy, glass, ceramics, and the like can be used for the anode electrode 11. Alternatively, these materials may be coated by alumite treatment, plating, or thermal spraying.

In the plasma processing apparatus 10 shown in FIG. 1, a large number of through holes 120 that generate hollow cathode discharge are formed at a constant density on the surface of the cathode electrode 12, thereby generating a uniform high electron density electric field on both surfaces of the cathode electrode 12. Can be easily achieved. This is because the difference in density of the plasma density on both sides of the cathode electrode 12 is automatically corrected due to the bipolar diffusion property of the plasma through the through hole 120.

In contrast, a comparative example in which a recess 601 is formed on the surface of the cathode electrode 12A and a gas ejection port 602 is provided on the bottom surface of the recess 601 as shown in FIG. This comparative example is an example employing a shower electrode to which the process gas 100 is supplied from the inside of the cathode electrode 12A. In the comparative example shown in FIG. 6, the inside of the recess 601 is a space where high-density plasma is generated by hollow cathode discharge. The process gas 100 is efficiently passed through the high-density plasma space by ejecting the process gas 100 from a fine gas ejection port 602 formed on the bottom surface of the recess 601.

However, in the comparative example shown in FIG. 6, it is difficult to uniformly supply the process gas 100 to a large number of recesses 601, and the opening diameter and length of the gas ejection port 602, the flow rate and pressure of the process gas 100, etc. There are various restrictions. Furthermore, since the gas outlet 602 has a very small diameter, clogging is likely to occur. When the process gas 100 cannot be introduced due to clogging, hollow cathode discharge is unlikely to occur in the clogged recess 601, so that the uniformity of discharge over the entire surface of the cathode electrode 12 </ b> A cannot be maintained.

On the other hand, in the plasma processing apparatus 10 shown in FIG. 1, the process gas is stably flowed in the vicinity of the through-hole 120 where high-density plasma is generated by hollow cathode discharge. For this reason, the uniformity of the discharge is maintained on the entire surfaces of both surfaces of the cathode electrode 12.

It is preferable to form as many through holes 120 as possible on the surface of the cathode electrode 12. For example, the through-hole 120 is formed so that the openings are arranged closest to the surface of the cathode electrode 12 as in a hexagonal close-packed arrangement. Thereby, uniformly high-density plasma is formed on the surface of the cathode electrode 12.

FIG. 7 shows an example of the surface of the cathode electrode 12 in which the opening of the through hole 120 is formed. At this time, for example, as shown in FIG. 8, when the diameter of the through hole 120 is 5 mm, the center-to-center distance between the through holes 120 adjacent in the vertical direction is 3 mm, and the left and right between the through holes 120 adjacent in the diagonal direction are Set the distance in the direction to 5.2 mm.

As shown in FIG. 7, the gas supply nozzle 130 that ejects the process gas 100 of the gas supply device 13 faces the bottom surface of the cathode electrode 12, and when there are a plurality of gas supply nozzles 130, A gas supply nozzle 130 is arranged along the bottom surface of the electrode 12. By directing the gas supply nozzle 130 toward the bottom surface of the cathode electrode 12, the process gas 100 can be supplied to both surfaces of the cathode electrode 12 almost evenly.

When the process gas 100 is a gas in which a plurality of types of gases are mixed, the process gas 100 in which all the gases are mixed may be supplied from the gas supply nozzle 130, or the gas supply nozzle 130 that is different for each type of gas. The gas may be supplied from each.

In the plasma processing apparatus 10 shown in FIG. 1, it is necessary to examine the behavior of electrons in order to determine the size of the through hole 120 for efficiently forming a hollow cathode discharge. Hereinafter, the behavior of electrons in the through hole 120 will be described.

FIG. 9 shows details of the discharge state in region A of FIG. Electrons repel the cathode electrode 12 without being able to penetrate inside the Debye length λd. The electrons emitted from the inner wall surface of the through-hole 120 collide with gas molecules for the first time in the vicinity of the electron mean free process, and ionize the gas molecules to generate plasma. In FIG. 9, the distance obtained by removing the Debye length λd on both sides from the diameter d of the through hole 120 is indicated by the length a. If the mean free pass of electrons is b, the following equation (1) holds:

a = 2b + c (1)

In formula (1), the length c is the distance in the diameter direction of the region excluding the sheath region inside the through hole 120. The diameter d of the through hole 120 is represented by the following formula (2):

d = a + 2 × λd = 2b + c + 2 × λd (2)

When c = 0, an electron moving space having sufficient kinetic energy cannot be secured, and a sufficient plasma generation space cannot be secured inside the through hole 120.

When the diameter d of the through hole 120 is large as in c> 5b, high-density plasma is generated inside the through hole 120 so as to stick to the wall surface of the through hole 120 as shown in FIG. For this reason, in the central space of the through-hole 120 represented by the length f, the plasma density is diluted.

On the other hand, as shown in FIG. 11, when the diameter d of the through hole 120 becomes smaller, the electron movement range represented by the length c in the through hole 120 becomes smaller. For this reason, a sufficient plasma space cannot be generated.

FIG. 11 is a table showing the conditions of the pressure P at which hollow cathode discharge occurs and the diameter d of the through hole 120 when the gas type is ammonia and the temperature is 673K. In FIG. 11, the ratio of the diameter d of the through hole 120 to the electron mean free path Y is 2.38, and the number of collisions is 3.7. As shown in FIG. 11, as the diameter d of the through hole 120 decreases, the length c decreases and it becomes difficult to secure a plasma generation space.

If the length c is optimal, an electron moving space having sufficient kinetic energy is secured, and a sufficiently high density plasma space is secured.

FIG. 12 shows the relationship between the electron mean free path Y and the pressure P when the temperature is 673K. In FIG. 12, the circles indicate the mean free process in ammonia (NH ₃ ) gas, and the triangles indicate the mean free process in monosilane (SiH ₄ ) gas. Note that the mean free path Y at pressures P = 67, 87, and 130 Pa illustrated in FIG. 11 is indicated by white circles and triangles in FIG.

The relationship between the Debye length λd, the electron temperature Te, and the electron density ne is expressed by the following formula (3):

λd = 7.4 × 10 ³ × (Te / ne) ^1/2 (3)

FIG. 13 shows an example of the calculated value of the Debye length λd. Here, the Debye length λd was calculated using the electron temperature and electron density of a general high-density glow discharge plasma. Note that the mean free path λg of gas molecules is expressed by the formula (4), and the mean free process λe of electrons is expressed by the formula (5):

λg = 3.11 × 10 ⁻²⁴ × T ⁴ / (P × D) (4)
λe = λg × 4 × 2 ^1/2 (5)

In Equation (4), T is the ambient temperature (K), P is the pressure (Pa), and D is the diameter (m) of the gas molecules.

The diameter d of the through hole 120 can be determined by setting the optimum length c as described above. That is, it is possible to prepare the cathode electrode 12 that is designed specifically for the hollow cathode discharge to be generated most efficiently by a predetermined pressure, ambient temperature, and gas type.

In the plasma processing apparatus 10 shown in FIG. 1, it is necessary to generate hollow cathode discharge by utilizing the pendulum motion effect of electrons most efficiently inside the through hole 120. At this time, the mean free path of electrons is determined by the atmospheric temperature and pressure, and the size of gas molecules. The inventors conducted experiments using the cathode electrode 12 having a large number of through-holes 120 and using a mixed gas of monosilane (SiH ₄ ) gas and ammonia (NH ₃ ) gas as the process gas 100. When the atmospheric temperature T is set to 350 ° C. to 450 ° C. and the pressure P is set to 67 Pa, the diameter of the through hole 120 is 5.0 mm, the thickness of the cathode electrode 12, that is, the length t of the through hole 120 is 5 mm, and the anode electrode 11 When the distance S between the cathode electrode 12 and the cathode electrode 12 was 16 mm, uniform multi-hollow discharge could be obtained on both surfaces of the cathode electrode 12. The “multi-hollow discharge” is a discharge generated on the surface of the cathode electrode 12 by combining the hollow cathode discharges generated in the respective through holes 120.

Further, when the diameter of the through hole 120 was 3.9 mm and 2.9 mm, as shown in FIG. 11, uniform multi-hollow discharge was obtained when the pressure P was around 87 Pa and 130 Pa, respectively. This is 4.72 times the mean free path of electrons in the monosilane gas and 2.38 times the mean free path of electrons in the ammonia gas when the ambient temperature T is 400 ° C. (the mean free path of electrons in the monosilane gas). The ratio of the process to the mean free process of electrons in ammonia gas is 1.98).

Actually, since a mixed gas is used as the process gas 100, the diameter d of the through hole 120 was estimated based on the mean free path of electrons in ammonia gas having a large gas flow rate ratio. Specifically, when a mixed gas of monosilane gas and ammonia gas is used, the ambient temperature T is 400 ° C., and the pressure P is 67 Pa, the diameter d of the through hole 120 is set to 5 mm, and the uniform multi-hollow on both surfaces of the cathode electrode 12 is used. Discharge is obtained. CVD process gas is usually introduced by mixing gas species such as monosilane, hydrogen, nitrogen, etc. However, in examining the diameter of the through-hole 120, focusing on the gas type with the longest mean free path in the mixed gas, The optimum value of the diameter of the hole 120 was derived.

In order to obtain multi-hollow discharge with ease of processing and a desired pressure, it is preferable to set the diameter d of the through hole 120 to about 3.8 mm to 8.0 mm. These dimensions are easier than forming the 0.3 mm to 0.4 mm holes required to manufacture the shower electrode. For this reason, the manufacturing cost of the plasma processing apparatus 10 can be reduced.

In the above example, the through hole 120 has a circular cross section. However, the cross-section of the through-hole 120 may be a polygon having an approximate diameter of about 3.8 mm to 8.0 mm.

In addition, a large number of through holes 120 having the same cross-sectional shape along the long axis direction may be formed in the cathode electrode 12, or through holes having different cross-sectional sizes or shapes along the long axis direction may be formed. 120 may be mixed and formed. By mixing the through holes 120 having different diameters d, multi-hollow discharges can be obtained under a plurality of conditions with different pressures, temperatures, gas types, and the like.

The length of the through-hole 120 in the major axis direction, that is, the thickness t of the cathode electrode 12 is set to about 3 mm to 10 mm, preferably about 5 mm so that hollow cathode discharge is likely to occur.

The distance S between the anode electrode 11 and the cathode electrode 12 is preferably about 10 mm to 40 mm. Thereby, plasma can be generated uniformly between the anode electrode 11 and the cathode electrode 12.

In the conventional method such as the comparative example shown in FIG. 6, the process gas 100 is only discharged uniformly from the concave portion 601 where the high-density plasma is generated by the hollow cathode discharge like a shower, and then the entire surface of the cathode electrode 12A. Plasma uniformity can be obtained.

In contrast, in the plasma processing apparatus 10 shown in FIG. 1, the process gas 100 is introduced without passing through the cathode electrode 12. Since the diameter d of the through hole 120 is considerably larger than the diameter of the hole necessary for the shower electrode, there is no concern about clogging, and maintenance is easy.

In the plasma processing apparatus 10, it is preferable to introduce the process gas 100 between the anode electrode 11 and the cathode electrode 12 from below to above. By introducing the process gas 100 from below, gas molecules and radical particles having a light specific gravity that have been turned into plasma naturally flow upward on the surface of the cathode electrode 12 as an upward flow. Therefore, the process gas is uniformly supplied to the surface of the cathode electrode 12 without using a complicated structure such as a shower electrode. Further, since the space in which high-density plasma is generated by the hollow cathode discharge is the through-hole 120, the continuity of the plasma is secured on the front and back of the cathode electrode 12, and the density of the plasma density is automatically corrected mutually. . Therefore, the plasma processing apparatus 10 can generate a uniform high-density plasma on both surfaces of the cathode electrode 12.

In addition, it is preferable that the surface of the cathode electrode 12 is smooth so that the process gas 100 flows smoothly, and the surface roughness is finished to 3 μm or less except for the inner surface of the through hole 120. For example, the surface of the cathode electrode 12 is flattened to such an extent that the finish symbol is represented by “▽▽▽”. That is, it is preferable that the maximum height Ry is 6.3S, the ten-point average roughness Rz is 6.3Z, and the arithmetic average roughness Ra is smaller than 1.6a. By reducing the surface roughness of the cathode electrode 12, the deposition rate of the thin film formed on the substrate 1 can be increased.

As described above, according to the plasma processing apparatus 10 according to the first embodiment of the present invention, by forming the through-hole 120 in the cathode electrode 12, uniform and high-density plasma on both surfaces of the cathode electrode 12. Can be stably generated. Furthermore, the manufacturing period of the plasma processing apparatus 10 is shorter and the manufacturing yield is improved as compared with an apparatus using a shower electrode that requires processing of several thousand or more micro holes. For this reason, the increase in the manufacturing cost of the plasma processing apparatus 10 is suppressed.

Further, according to the plasma processing apparatus 10, it is possible to generate a uniform high-density plasma in a large area regardless of the frequency of the AC power supplied from the AC power supply 14. Even if the frequency of the AC power supplied by the AC power supply 14 is set to, for example, about 60 Hz to 27 MHz, uniform and high-density plasma can be generated. That is, there is no need to use an AC power supply that supplies expensive VHF band AC power. On the other hand, in the conventional parallel plate type plasma processing apparatus, for high-capacity coupled high-frequency discharge having a large area and high density, for example, instead of the frequency in the RF band of 13.56 MHz, the plasma density can be improved and In order to eliminate the non-uniformity of the plasma density due to waves, it was necessary to use a VHF band frequency such as 27 MHz of 13.56 MHz or higher.

In the plasma processing apparatus 10, even in an inexpensive low frequency RF band such as 250 KHz, high-density plasma equivalent to or higher than that of a conventional plasma processing apparatus using a VHF band AC power supply can be obtained.

Note that AC power output from the AC power source 14 may be supplied between the anode electrode 11 and the cathode electrode 12 via a pulse generator. For example, the output of the pulse generator is supplied to the cathode electrode 12, and the anode electrode 11 is grounded. By stopping the supply of AC power at a constant period, plasma is stably formed. This is because by providing a stop period for the supply of AC power, the temperature of the electrons is lowered and the stability of the discharge is improved.

For example, the AC power is supplied between the anode electrode 11 and the cathode electrode 12 so that the ON time is 600 μs and the OFF time when the AC power supply is stopped is 50 μs, and the ON time and the OFF time are alternately repeated. Supplied. The on-time is preferably set in the range of about 100 μs to 1000 μs, and the off-time is preferably set in the range of about 10 μs to 100 μs.

As described above, the supply of AC power between the anode electrode 11 and the cathode electrode 12 is pulse-controlled and the supply of AC power is periodically turned on / off, thereby suppressing the occurrence of abnormal discharge.

<First Modification>
FIG. 14 shows an example of the plasma processing apparatus 10 when there is one anode electrode 11. As shown in FIG. 14, when the plasma is excited only on one surface of the cathode electrode 12, the cathode back plate 121 is disposed at a position of a distance k from the surface of the cathode electrode 12 where the plasma is not excited. At this time, the distance k is set so that k <b (b: electron mean free path) so that plasma is not generated between the cathode electrode 12 and the cathode back plate 121. At this time, AC power is supplied from the AC power source 14 to the cathode electrode 12 and the cathode back plate 121. A process gas 100 is introduced between the anode electrode 11 and the cathode electrode 12 and between the cathode electrode 12 and the cathode back plate 121.

<Second Modification>
An example in which the plasma processing apparatus 10 has a plurality of cathode electrodes 12 is shown in FIG. In the plasma processing apparatus 10 shown in FIG. 15, the anode electrodes 11 and the cathode electrodes 12 are alternately arranged, and the anode electrode 11 is arranged on the outermost side. For this reason, the number of anode electrodes 11 is one more than that of the cathode electrodes 12. Although FIG. 15 shows an example in which the number of cathode electrodes 12 is three, it goes without saying that the number of cathode electrodes 12 is not limited to three.

By adopting the configuration shown in FIG. 15, the number of plasma regions formed in the anode electrode 11 and the cathode electrode 12 can be increased. Thereby, the processing capability of the plasma processing apparatus 10 improves.

(Second Embodiment)
The plasma processing apparatus 10 shown in FIG. 1 can be applied to a plasma chemical vapor deposition (CVD) apparatus, a plasma etching apparatus, a plasma ashing apparatus, and the like.

FIG. 16 shows an example in which the plasma processing apparatus 10 shown in FIG. 1 is used in a plasma CVD apparatus. The anode electrode 11 and the cathode electrode 12 are disposed in the chamber 20, and the substrate 1 to be deposited is disposed on the anode electrode 11. The anode electrode 11 is grounded.

A gas containing a raw material gas for film formation is used as the process gas 100, and the process gas 100 is introduced from the gas supply device 13 into the chamber 20 through the gas supply nozzle 130.

The pressure in the chamber 20 is measured by a pressure measuring device 16 such as a capacitance gauge, and the pressure in the chamber 20 is adjusted by an exhaust speed controller (APC) 15 that is an exhaust pump that evacuates the chamber 20 and adjusts the exhaust speed. The After the pressure of the process gas 100 in the chamber 20 is adjusted to a predetermined gas pressure, a predetermined AC power is supplied between the cathode electrode 12 and the anode electrode 11 by the AC power source 14. Thereby, the process gas 100 in the chamber 20 is turned into plasma. By exposing the substrate 1 to the formed plasma, a desired thin film mainly composed of the raw material contained in the raw material gas is formed on the exposed surface of the substrate 1.

Note that the temperature of the substrate 1 during the film forming process may be set by the substrate heater 21 shown in FIG. By setting the temperature of the substrate 1 during the film formation process to a predetermined temperature, the film formation speed can be increased and the film quality can be improved.

As already described, in the plasma processing apparatus 10 shown in FIG. 1, uniform high-density plasma is generated on the surface of the cathode electrode 12. Therefore, according to the plasma CVD apparatus shown in FIG. 16, the source gas is efficiently decomposed, and a thin film is uniformly formed on the substrate 1 in a large area at a high speed. Therefore, the film thickness and film quality uniformity of the formed film are improved, and the film forming speed is improved.

A desired thin film can be formed by appropriately selecting a source gas by a plasma CVD apparatus employing the plasma processing apparatus 10. For example, a silicon semiconductor thin film, a silicon nitride thin film, a silicon oxide thin film, a silicon oxynitride thin film, a carbon thin film, or the like can be formed on the substrate 1. Specifically, a silicon nitride (SiN) film is formed on the substrate 1 using a mixed gas of ammonia (NH ₃ ) gas and monosilane (SiH ₄ ) gas. Alternatively, a silicon oxide (SiO x) film is formed on the substrate 1 using a mixed gas of monosilane (SiH ₄ ) gas and N ₂ O gas, or TEOS gas and oxygen gas.

FIG. 17 shows an example in which the AC power supply 17 is attached to the anode electrode 11 separately from the AC power supply 14 attached to the cathode electrode 12. By supplying AC power to the anode electrode 11, the film quality of the thin film formed on the substrate 1 can be improved. The frequency of the AC power supplied from the AC power supply 17 may be equal to or lower than the frequency of the AC power supplied from the AC power supply 14. For example, the frequency of the AC power supplied from the AC power supply 17 is set to about 60 Hz to 27 MHz.

The anode electrode 11 can be cleaned by supplying AC power only from the AC power supply 17 without supplying AC power from the AC power supply 14. Specifically, a sputtering gas is introduced into the chamber 20, and the anode electrode 11 is cleaned by sputter etching while supplying AC power from the AC power supply 17.

Further, when there is one anode electrode 11 as shown in FIG. 14, the plasma processing apparatus 10 shown in FIG. 18 in which the AC power supplies 14 and 17 are respectively attached to the cathode electrode 12 and the anode electrode 11 is used for the plasma CVD apparatus. May be. As already described, the distance k from the surface of the cathode electrode 12 that does not excite the plasma to the cathode back plate 121 is set so that k <b.

Note that by applying the plasma processing apparatus 10 having the plurality of cathode electrodes 12 as shown in FIG. 15 to the plasma CVD apparatus, the number of substrates to be formed at a time increases, and the film forming processing capability is improved. Can do.

The example in which the plasma processing apparatus 10 shown in FIG. 1 is applied to a plasma CVD apparatus has been described above. The plasma processing apparatus 10 shown in FIG. 1 can be applied to a plasma etching apparatus or a plasma ashing apparatus by changing the gas type of the process gas 100 with the configuration shown in FIGS.

For example, a plasma etching apparatus that etches and removes a film formed on the substrate 1 can be realized by introducing a plasma etching gas as the process gas 100 into the chamber 20. The plasma etching gas is appropriately selected depending on the material to be etched. For example, a fluorine-based gas such as nitrogen trifluoride (NF ₃ ) gas or carbon tetrafluoride (CF ₄ ) gas can be used.

Further, by introducing the plasma ashing gas into the chamber 20 as the process gas 100, a plasma ashing apparatus using the plasma processing apparatus 10 can be realized. For example, by using oxygen and argon gas as the process gas 100, it is possible to ash the carbon film or the photoresist film formed on the substrate 1 as an etching mask.

As described above, by using the plasma processing apparatus 10 that can stably generate uniform and high-density plasma on both surfaces of the cathode electrode 12, a plasma CVD apparatus, a plasma etching apparatus, a plasma ashing apparatus, etc. The processing speed and accuracy can be improved.

As described above, the present invention has been described according to the first and second embodiments. However, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art. That is, it goes without saying that the present invention includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

The plasma processing apparatus of the present invention can be used for the purpose of generating uniform and high-density plasma on both sides of the cathode electrode.

Claims

An anode electrode for mounting the substrate;
A cathode electrode that is disposed so as to face the anode electrode and has a through-hole provided with an opening on the facing surface;
A gas supply device for introducing a process gas between the anode electrode and the cathode electrode;
An AC power supply that supplies AC power between the anode electrode and the cathode electrode to bring the process gas into a plasma state between the anode electrode and the cathode electrode.
The plasma processing apparatus according to claim 1, wherein the gas supply device introduces the process gas from the lower side to the upper side between the anode electrode and the cathode electrode.
3. The plasma processing apparatus according to claim 2, wherein the gas supply device ejects the process gas from a gas supply nozzle disposed along the bottom surface of the cathode electrode toward the bottom of the cathode electrode.
The plasma processing apparatus according to claim 1, wherein the anode electrode is disposed so as to face both surfaces of the cathode electrode where the opening is provided.
The plasma processing apparatus according to claim 1, comprising a plurality of the cathode electrodes.
2. The plasma processing apparatus according to claim 1, wherein at least one of the anode electrode and the cathode electrode is made of carbon.
The plasma processing apparatus according to claim 1, wherein the diameter of the through hole is 3.8 mm or more and 8.0 mm or less.
The plasma processing apparatus according to claim 1, wherein the openings are arranged closest to the surface of the cathode electrode.
2. The plasma processing apparatus according to claim 1, wherein the cathode electrode is formed with a plurality of types of the through-holes having different cross-sectional sizes or shapes along a major axis direction.
The plasma processing apparatus according to claim 1, wherein the frequency of the AC power supplied by the AC power source is 60 Hz or more and 27 MHz or less.
A film containing a raw material gas contained in the raw material gas as a main component is formed on a substrate disposed on the anode electrode using a gas containing a raw material gas for film formation as the process gas. Item 2. The plasma processing apparatus according to Item 1.
The plasma processing apparatus according to claim 1, wherein a gas for etching a film formed on a surface of a substrate disposed on the anode electrode is used as the process gas.
2. The plasma processing apparatus according to claim 1, wherein a gas including oxygen gas and argon gas is used as the process gas to ash the film formed on the surface of the substrate disposed on the anode electrode. .