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WO2012070356A1 - Élément de conversion mécanico-électrique du type à induction électrostatique - Google Patents

Élément de conversion mécanico-électrique du type à induction électrostatique Download PDF

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Publication number
WO2012070356A1
WO2012070356A1 PCT/JP2011/074792 JP2011074792W WO2012070356A1 WO 2012070356 A1 WO2012070356 A1 WO 2012070356A1 JP 2011074792 W JP2011074792 W JP 2011074792W WO 2012070356 A1 WO2012070356 A1 WO 2012070356A1
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WO
WIPO (PCT)
Prior art keywords
induction type
coating layer
type electromechanical
region
electret
Prior art date
Application number
PCT/JP2011/074792
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English (en)
Japanese (ja)
Inventor
武内　幸久
小林　伸行
隆太 杉浦
七瀧　努
克宏 今井
下河　夏己
Original Assignee
日本碍子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本碍子株式会社 filed Critical 日本碍子株式会社
Priority to JP2012545663A priority Critical patent/JP5844741B2/ja
Publication of WO2012070356A1 publication Critical patent/WO2012070356A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/02—Electrets, i.e. having a permanently-polarised dielectric
    • H01G7/028—Electrets, i.e. having a permanently-polarised dielectric having a heterogeneous dielectric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines

Definitions

  • the present invention relates to an electrostatic induction type electromechanical transducer.
  • an apparatus using an electret in which an electric charge is injected into an insulating material such as a synthetic resin
  • an insulating material such as a synthetic resin
  • JP-A-2006-180450, JP-A-2007-298297, JP-A-2010-136598, etc. In order to improve the performance in such devices, it is necessary to increase the charge density in the electret.
  • polymer electrets surfaces of polymer materials disclosed in JP-A-58-6118, JP-A-2001-177899, JP-A-2006-180450, and JP-A-2010-136598 are disclosed.
  • a configuration using a device in which charges are injected in the vicinity there is a limit with respect to an increase in charge density.
  • such a configuration has a problem that heat resistance is low and a problem that the charge density deteriorates with time.
  • the configuration using a ferroelectric electret (the one obtained by polarization processing of a ferroelectric film) disclosed in Japanese Patent Laid-Open No. 2007-298297 is higher than the configuration using a polymer electret. Charge density and heat resistance are obtained.
  • depolarization occurs with time in the ferroelectric electret, so that it is difficult to stably maintain the polarization state for a long period of time.
  • the present invention has been made to solve such a problem. That is, the present invention is to provide an electrostatic induction type electromechanical transducer using electrets having more excellent durability.
  • the electrostatic induction electromechanical transducer of the present invention includes an electret made of a ferroelectric film (for example, lead zirconate titanate or lithium niobate).
  • the electrostatic induction type electromechanical transducer of the present invention includes the electret, a counter substrate, and a first region counter electrode.
  • the counter substrate is disposed so as to face the main surface of the electret, and is provided to be movable relative to the electret.
  • the counter substrate is provided to be movable relative to the electret along the main surface direction.
  • the “main surface” in the electret is a surface orthogonal to the thickness direction of the electret which is a film made of a ferroelectric material (the direction defining the thickness of the film).
  • the direction parallel to the “main surface” of the electret is hereinafter referred to as “main surface direction”.
  • the “film” may also be referred to as “thin film” or “thin plate”.
  • the first region counter electrode is a conductive film, and is provided corresponding to the first region on the surface of the counter substrate facing the main surface.
  • a second region counter electrode may be provided on the surface of the counter substrate facing the main surface so as to correspond to the second region.
  • the second region counter electrode is a conductive film, and is provided at a position different from the first region counter electrode so as not to be electrically connected to the first region counter electrode.
  • the feature of the present invention resides in that the electrostatic induction type electromechanical transducer has the following configuration.
  • the electret has a first region and a second region.
  • the first region is a region in which the polarization direction along the thickness direction is the first direction.
  • the second region is a region in which the polarization direction along the thickness direction is a second direction opposite to the first direction.
  • an angle formed by the polarization direction and the thickness direction is ⁇ 45 to +45 degrees.
  • the first region is polarized in the first direction parallel to the thickness direction, and the second region is in a second direction opposite to the first direction. Polarized.
  • the electret is configured such that the first region and the second region are adjacent to each other along the main surface direction. That is, in the electret of the present invention, a plurality of the first regions and a plurality of the second regions are provided so that the polarization direction is periodically reversed along the main surface direction. Specifically, for example, a plurality of the first regions and a plurality of the second regions may be provided so that the inversion period of the polarization direction is 3 to 200 ⁇ m.
  • the electrostatic induction type electromechanical transducer of the present invention is a polymer film formed on the main surface so as to be in close contact with the main surface of the electret on the side facing the first region counter electrode. Further, a coating layer may be further provided.
  • the coating layer may include, for example, a first coating layer provided on the main surface side of the electret, and a second coating layer that is more elastically deformed than the first coating layer.
  • the second coating layer is provided on the first region counter electrode side, and is formed on the first coating layer so as to be in close contact with the first coating layer.
  • the second coating layer has a Young's modulus of 0.01 to 5 GPa.
  • the first coating layer has a dense structure, and the second coating layer has voids.
  • the porosity of the second coating layer is preferably 10 to 90%.
  • the electrostatic induction electromechanical transducer of the present invention may further include a coating layer that is a polymer film provided on the counter substrate side so as to cover the first region counter electrode.
  • the electret in the electrostatic induction type electromechanical transducer according to the present invention since the positive and negative charges are alternated in each adjacent region, the polarization state can be stably maintained for a long time. . Therefore, according to the present invention, it is possible to provide an electrostatic induction type electromechanical transducer using electrets that has more excellent durability.
  • FIG. 1 is a sectional view showing a schematic configuration of an embodiment of an electrostatic induction type electromechanical transducer of the present invention.
  • the electrostatic induction type electromechanical transducer 1 of the present embodiment includes an electret support substrate 2, a back electrode 3, an electret 4, a coating layer 5, a counter substrate 6, and a first region facing. And an electrode 7.
  • the back electrode 3 is a uniform conductive film, and is formed on one surface (the upper surface in the drawing) of the electret support substrate 2.
  • the electret 4 is a ferroelectric (for example, lead zirconate titanate or lithium niobate) film, and is joined to the back electrode 3. That is, the electret support substrate 2, the back electrode 3, and the electret 4 are stacked in this order in the thickness direction (z-axis direction in the figure) orthogonal to the main surface MS of the electret 4 and provided so as to be in close contact with each other. It has been.
  • the electret 4 is supported on the above-described one surface of the electret support substrate 2 via the back electrode 3.
  • the electret 4 has a first region 41 and a second region 42.
  • the first region 41 and the second region 42 are polarized so that the components in the thickness direction of the polarization direction are opposite to each other.
  • the first region 41 is polarized in one direction (z-axis positive direction in the drawing) parallel to the thickness direction.
  • the second region 42 is polarized in another direction (z-axis negative direction in the drawing) parallel to the thickness direction. That is, the first region 41 and the second region 42 are provided such that the polarization direction is periodically reversed at a predetermined cycle (specifically, 3 to 200 ⁇ m).
  • the first region 41 and the second region 42 are alternately arranged in one direction parallel to the main surface MS (in the figure, the x-axis direction: hereinafter referred to as “main surface direction”).
  • the first region 41 and the second region 42 are each parallel to the main surface MS and perpendicular to the above-described main surface direction (in the figure, the y-axis direction: hereinafter referred to as “sub-main surface direction”). Is provided so as to have a longitudinal direction.
  • the coating layer 5 is a polymer film, and is formed on the main surface MS so as to be in close contact with the main surface MS of the electret 4.
  • the coating layer 5 is formed so that the Young's modulus is 0.01 to 5 GPa.
  • the counter substrate 6 is disposed so as to face the main surface MS of the electret 4 with the coating layer 5 interposed therebetween.
  • the counter substrate 6 is obtained by laminating the electret support substrate 2, the back electrode 3, the electret 4 and the coating layer 5 in this order in the thickness direction (hereinafter, simply referred to as “electret laminate”). ) With respect to the aforementioned main surface direction (x-axis positive direction and negative direction in the figure).
  • the first region counter electrode 7 is a comb-like electrode pattern having a planar shape in which one ends of a plurality of linear electrodes in the longitudinal direction are coupled to each other, and is a surface BS facing the above-described electret laminate on the counter substrate 6. Formed on top.
  • Each of the plurality of linear electrodes has a longitudinal direction in the sub-main surface direction described above, and corresponds to the first region 41 (a position facing the first region 41 with the coating layer 5 interposed therebetween). ) Only.
  • the plurality of first region counter electrodes 7 includes a period of polarization inversion along the principal surface direction (x-axis direction in the drawing) of the electret 4, that is, the first region 41 and the second region along the principal surface direction. Are arranged along the principal surface direction at a period that coincides with the arrangement period of the regions 42.
  • the electrostatic induction type electromechanical transducer 1 has the fluctuation of the charge induced in the first region counter electrode 7 with the relative movement of the electret 4 and the counter substrate 6 in the main surface direction.
  • the mechanical energy of the relative movement is converted into electric energy.
  • a uniform platinum electrode film is formed on a flat plate electret support substrate made of ZrO 2 stabilized with Y 2 O 3 by a screen printing method, and the electret support substrate and the platinum electrode film are subjected to heat treatment at 1300 ° C. for 2 hours. And integrated.
  • a lead zirconate titanate powder, a dispersion medium, a plasticizer, and a dispersant are mixed to form a paste, and the film thickness after drying is determined by screen printing. The film was formed to 75 ⁇ m.
  • a film obtained by forming (screen printing) a lead zirconate titanate powder paste on an electret support substrate was heat-treated (fired) at 1250 ° C. for 5 hours to obtain a sintered film having a thickness of 50 ⁇ m. During this heat treatment, lead zirconate titanate powder was allowed to coexist in the atmosphere.
  • a uniform electrode film (thickness 1000 ⁇ ) for polarization treatment made of tantalum was formed on the lead zirconate titanate film fixed on the electret support substrate by the above heat treatment.
  • the substrate after electrode formation was immersed in insulating oil (150 ° C.) and subjected to polarization treatment with an electric field strength of about 3 kV / mm (coercive electric field).
  • the uniform electrode after the polarization treatment was removed by acid treatment, and then a comb-shaped electrode film (thickness 1000 angstrom, electrode period 14 ⁇ m (main surface direction width 7 ⁇ m, main surface direction electrode spacing 7 ⁇ m)) was patterned.
  • the patterned material was immersed in insulating oil (150 ° C.), and a polarization treatment was performed by applying a rectangular pulse voltage having a width of about 1 msec with an electric field strength of about 3 kV / mm (coercive electric field).
  • the number of pulses applied depends on the area of the comb electrode pattern. For example, when it is 20 mm 2 , 20000 pulses were suitable.
  • the polarization comb electrode was removed by acid treatment. Thereafter, a polyimide film having a Young's modulus of 0.05 Gpa and a thickness of 50 ⁇ m was laminated on the lead zirconate titanate film (the surface from which the comb electrode for polarization treatment was removed by acid treatment) to obtain the above laminate. . The obtained laminate was heated to 400 ° C. to perform a charge removal process for removing surface charges.
  • a comb-shaped counter electrode (6 ⁇ m width in the main surface direction and 8 ⁇ m electrode distance in the main surface direction) was formed on the counter substrate made of polyimide film by a sputtering method.
  • electrostatic induction A mold electromechanical transducer was obtained.
  • the first regions 41 and the second regions 42 in which the polarization directions are reversed are arranged alternately along the main surface direction. For this reason, in the main surface MS, positive and negative charges are alternated for each adjacent region. Thereby, it becomes possible to hold
  • the inversion period of the polarization direction that is, the arrangement period of the first region 41 and the second region 42 is preferably 3 to 200 ⁇ m.
  • a neutralized coating layer 5 is provided between the main surface MS of the electret 4 and the first region counter electrode 7. Thereby, the adhesion of foreign matter on the main surface MS is suppressed as much as possible.
  • the Young's modulus of the coating layer 5 is relatively low, even when the coating layer 5 and the first region counter electrode 7 are brought into close contact with each other, the main surface direction (in the drawing) of the electret 4 and the counter substrate 6 The relative movement in the x-axis positive direction and negative direction) is performed well. Therefore, the gap between the main surface MS of the electret 4 and the first region counter electrode 7 is favorably managed by bringing the coating layer 5 and the first region counter electrode 7 into close contact with each other. Therefore, according to such a configuration, a stable power generation operation (mechanical electrical conversion operation) can be performed.
  • the Young's modulus of the coating layer 5 is preferably 0.01 to 5 GPa.
  • the present invention is not limited to the specific configurations and materials described above. That is, for example, the present invention is not limited to a power generation element (a mechanical / electrical conversion element that generates power by environmental vibration) as in the above-described embodiment, and can be used for a microphone, various sensors, and the like (in this case, an electrode or the like The shape and arrangement are appropriately changed.)
  • the vibration (relative movement) direction may also be the thickness direction.
  • the electret of the present invention is not limited to lead zirconate titanate (PZT), but is a curie such as lithium niobate, barium titanate, lead titanate, lead metaniobate, bismuth tungstate, bismuth lanthanum titanium oxide, etc. Any ferroelectric material having a temperature may be used.
  • the first region 41 and the second region 42 may have the same or different width in the principal surface direction (x-axis direction in the drawing). Further, the first region 41 and the second region 42 do not have to be so-called “striped” in plan view as in the above-described embodiment. Specifically, for example, a so-called “checkered pattern” may be used in a plan view. Specifically, the first region 41 and the second region 42 having a substantially rectangular shape (typically a substantially square shape) in plan view may be alternately arranged two-dimensionally.
  • the polarization direction may not be parallel to the thickness direction. That is, the angle ⁇ [°] formed by the polarization direction in the first region 41 and the positive z-axis direction is ⁇ 45 ⁇ ⁇ ⁇ + 45, and the polarization direction in the second region 42 and the negative z-axis direction are formed.
  • the angle ⁇ may be such that [°] is ⁇ 45 ⁇ ⁇ ⁇ + 45 (in this case, the absolute value of ⁇ may be the same as or different from the absolute value of ⁇ ).
  • coating layer 5 in addition to polyimide, polyamide, polyamideimide, polyetherimide, polyethersulfone, polysulfone, polyacetal, polyphenylene oxide, polyetheretherketone, PTFE, CYTOP (registered trademark), Teflon (registered trademark), It is possible to use organic materials such as It is also possible to use inorganic materials such as low dielectric constant glass, aluminum oxide, zirconium oxide, titanium oxide, and silica alumina.
  • the present invention is not limited to the specific manufacturing method described above. That is, for example, as the electret 4, it is possible to use a single crystal wafer, a film formed by the AD method, instead of a sheet molded body fired (ceramic film) as in the above-described embodiment. .
  • a (001) cut substrate made of lead zirconate titanate single crystal and having a thickness of 500 ⁇ m is prepared, and a comb-shaped electrode film (thickness 1000 ⁇ , electrode made of tantalum on the (001) plane thereof. While patterning a period of 7 ⁇ m (main surface direction width 3.5 ⁇ m, main surface direction electrode spacing 3.5 ⁇ m), the (00-1) surface (opposite surface) is a uniform electrode film (thickness) made of tantalum 1000 angstroms). Thereafter, a polarization process or the like is performed in the same manner as in the specific example described above. In this case, the electret support substrate 2 in FIG. 1 can be omitted.
  • an AD film having a thickness of 20 ⁇ m, which is formed by injecting lead zirconate titanate having a particle diameter of about 1 ⁇ m onto a substrate at a high speed is prepared.
  • Polarization processing or the like is performed as in the specific example.
  • the AD film may be heat-treated for the purpose of improving crystallinity.
  • a film formed by the AD method is denser and has a smaller primary particle diameter than a film formed by screen printing, and therefore, the insulating property can be increased and the durability can be increased.
  • the polarization comb electrode it is possible to use flake graphite powder patterned by, for example, screen printing. By forming the flake-shaped graphite on the ferroelectric film in a lying state, the adhesion strength can be lowered while lowering the contact resistance, so it can be easily removed by blowing off after the polarization treatment. it can.
  • the method for forming the coating layer 5 is not only film adhesion as in the above-described embodiment, but also screen printing, bar coating, spin coating, sol-gel, sputtering, CVD, thermal spraying, dipping, air gun coating Etc. can be used.
  • the static elimination treatment is performed by heat treatment up to the depolarization temperature near the Curie point.
  • the state where the polarization remains to some extent remains. It is preferable to set it in terms of increasing recovery of the polarization state after the temperature is lowered.
  • the static elimination treatment is performed by heat treatment up to the depolarization temperature near the Curie point, but the present invention is not limited to this.
  • the charge removal process may be performed by an acid etching process or the like. Further, it may be performed by ion shower irradiation or the like.
  • FIG. 2 is an enlarged view of a main part in another embodiment (modification) of the electrostatic induction type electromechanical transducer of the present invention.
  • the coating layer 5 includes a first coating layer 51 and a second coating layer 52.
  • the first coating layer 51 is provided on the main surface MS side.
  • the second coating layer 52 is formed on the first coating layer 51 so as to be in close contact with the first coating layer 51.
  • the first coating layer 51 has a dense structure in order to protect the main surface MS of the electret 4.
  • the second coating layer 52 is formed so as to have a Young's modulus of 0.01 to 5 GPa by having a large number of voids V so that the porosity is 10 to 90%.
  • the first coating layer 51 and the second coating layer 52 can be formed by a screen printing method, a bar coating method, a spin coating method, a sol-gel method, a sputtering method, a CVD method, thermal spraying, as well as film adhesion as in the above-described embodiment. It is possible to use a method, a dipping method, an air gun coating, or the like.
  • the porosity of the second coating layer 52 is preferably 10 to 90%.
  • FIG. 3 is a cross-sectional view showing a schematic configuration of still another embodiment (modification) of the electrostatic induction type electromechanical transducer of the present invention.
  • the counter substrate 6 may be provided with a second region counter electrode 8 facing the second region 42 in addition to the first region counter electrode 7 facing the first region 41. Good. According to such a configuration, not only the first region 41 but also the second region 42 contributes to mechanical / electrical energy conversion, so that the energy conversion efficiency can be further improved.
  • FIG. 4 is a cross-sectional view showing a schematic configuration of still another embodiment (modification) of the electrostatic induction type electromechanical transducer of the present invention.
  • the coating layer 5 may be provided on the counter substrate 6 side. Specifically, the coating layer 5 may be provided on the surface BS of the counter substrate 6 so as to cover the counter electrodes (the first region counter electrode 7 and the second region counter electrode 8).
  • the coating layer 5 covers the counter electrode and the first coating layer 51 formed on the surface BS of the counter substrate 6 so as to fill a gap between the adjacent counter electrodes. And a second coating layer 52 provided on the first coating layer 51, or a single layer structure as shown in FIG. Also good.
  • the counter electrode may be only the first region counter electrode 7.
  • FIG. 5 is a cross-sectional view showing a schematic configuration of still another embodiment (modified example) of the electrostatic induction type electromechanical transducer of the present invention.
  • the coating layer 5 may be provided on both the electret 4 side and the counter substrate 6 side. That is, the coating layer 5 in this case includes an electret side coating layer 5a and a counter electrode side coating layer 5b.
  • the electret-side coating layer 5 a is formed on the main surface MS so as to be in close contact with the main surface MS of the electret 4.
  • the counter electrode side coating layer 5b is provided on the surface BS of the counter substrate 6 so as to cover the counter electrodes (the first region counter electrode 7 and the second region counter electrode 8).
  • the electret side coating layer 5a and the counter electrode side coating layer 5b are preferably made of the same material.
  • the material which comprises the electret side coating layer 5a and the material which comprises the counter electrode side coating layer 5b may be selected so that it may adjoin on a triboelectric row.
  • the electret-side coating layer 5a and / or the counter-electrode-side coating layer 5b are similarly laminated layers (the first coating layer 51 provided in close contact with the electret 4 or the counter substrate 6). And a second coating layer 52 formed thereon. Further, the counter electrode may be only the first region counter electrode 7.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

L'invention concerne un électret qui comprend une première région et une seconde région. La direction de polarisation de la première région dans la direction de l'épaisseur constitue une première direction. La direction de polarisation de la seconde région dans la direction de l'épaisseur constitue une seconde direction, opposée à la première direction. La première région et la seconde région sont adjacentes dans une direction de la surface principale qui est parallèle à la surface principale, qui est une surface perpendiculaire à la direction de l'épaisseur.
PCT/JP2011/074792 2010-11-25 2011-10-27 Élément de conversion mécanico-électrique du type à induction électrostatique WO2012070356A1 (fr)

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JP2012545663A JP5844741B2 (ja) 2010-11-25 2011-10-27 静電誘導型機械電気変換素子

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JP2010262014 2010-11-25
JP2010-262014 2010-11-25

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WO2012070356A1 true WO2012070356A1 (fr) 2012-05-31

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014217130A (ja) * 2013-04-24 2014-11-17 株式会社ビスキャス 振動発電体
CN108347198A (zh) * 2017-01-25 2018-07-31 北京纳米能源与系统研究所 驻极体自发电装置及驻极体自发电智能鞋

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007298297A (ja) * 2006-04-27 2007-11-15 Saitama Univ 機械電気変換素子及びその製造方法
JP2008161040A (ja) * 2006-11-28 2008-07-10 Sanyo Electric Co Ltd 静電動作装置
JP2009148124A (ja) * 2007-12-18 2009-07-02 Sanyo Electric Co Ltd 静電動作装置
WO2010035507A1 (fr) * 2008-09-29 2010-04-01 パナソニック株式会社 Générateur oscillant, dispositif de génération oscillant et dispositif de communication sur lequel est monté un dispositif de génération oscillant
JP2010136598A (ja) * 2008-12-08 2010-06-17 Omron Corp 静電誘導型のエネルギー変換素子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007298297A (ja) * 2006-04-27 2007-11-15 Saitama Univ 機械電気変換素子及びその製造方法
JP2008161040A (ja) * 2006-11-28 2008-07-10 Sanyo Electric Co Ltd 静電動作装置
JP2009148124A (ja) * 2007-12-18 2009-07-02 Sanyo Electric Co Ltd 静電動作装置
WO2010035507A1 (fr) * 2008-09-29 2010-04-01 パナソニック株式会社 Générateur oscillant, dispositif de génération oscillant et dispositif de communication sur lequel est monté un dispositif de génération oscillant
JP2010136598A (ja) * 2008-12-08 2010-06-17 Omron Corp 静電誘導型のエネルギー変換素子

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014217130A (ja) * 2013-04-24 2014-11-17 株式会社ビスキャス 振動発電体
CN108347198A (zh) * 2017-01-25 2018-07-31 北京纳米能源与系统研究所 驻极体自发电装置及驻极体自发电智能鞋

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JPWO2012070356A1 (ja) 2014-05-19

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