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WO2011061706A4 - Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine - Google Patents

Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine Download PDF

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Publication number
WO2011061706A4
WO2011061706A4 PCT/IB2010/055271 IB2010055271W WO2011061706A4 WO 2011061706 A4 WO2011061706 A4 WO 2011061706A4 IB 2010055271 W IB2010055271 W IB 2010055271W WO 2011061706 A4 WO2011061706 A4 WO 2011061706A4
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WO
WIPO (PCT)
Prior art keywords
disc
characteristic
intensity
region
determining
Prior art date
Application number
PCT/IB2010/055271
Other languages
French (fr)
Other versions
WO2011061706A1 (en
Inventor
Andreas Lüdi
Christoph Fahrni
Original Assignee
Bystronic Laser Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bystronic Laser Ag filed Critical Bystronic Laser Ag
Priority to CN2010800523112A priority Critical patent/CN102667428A/en
Priority to EP10800787A priority patent/EP2502037A1/en
Publication of WO2011061706A1 publication Critical patent/WO2011061706A1/en
Publication of WO2011061706A4 publication Critical patent/WO2011061706A4/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0437Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G01J2001/4261Scan through beam in order to obtain a cross-sectional profile of the beam

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A method is indicated for measuring a characteristic of a beam (A, A1.. A3) by means of a disc (3, 3a..3f ), which is rotatably mounted in a device (1) for determining this characteristic in a beam course of the beam (A, A1.. A3) in front of a sensor (6) for measuring an intensity of the beam (A, A1.. A3). For this, the disc (3, 3a..3f) is impermeable to the beam or at least weakens the beam and comprises at least one elongated region (B1.. B7) which is permeable to the beam or at least has higher permeability to the beam compared with the remainder of the disc (3, 3a..3e). By means of this device, an intensity impulse of the part of the beam (A, A1.. A3) impinging on the sensor (6) on rotation of the disc (3, 3a..3e) is detected. The sought characteristic is then determined by application of reconstruction- or modelling methods suitable for inverse problems on the detected intensity impulse. Furthermore, a device (1) and a disc (3, 3a..3f) are indicated for carrying out the method.

Claims

AMENDED CLAIMS
received by the International Bureau on 30.05.2011
Claims
1. Method for measuring a characteristic of a beam (A,
A1..A3) by means of a disc (3, 3a..3f), which is rotatably mounted in a device (1) for determining this characteristic in a beam course of the beam (A, A1..A3) in front of a sensor (6) for measuring an intensity of the beam (A, A1..A3),
- wherein the disc (3, 3a..3f) is impermeable to the beam or at least weakens the beam,
- wherein the disc (3, 3a..3f) comprises at least one elongated region (B1..B7) which is permeable to the beam or at least has a higher permeability to the beam compared with the remainder of the disc (3, 3a..3f),
characterized, by the steps :
- detecting an intensity impulse by means of the part of the beam (A, A1..A3) impinging onto the sensor (6) on
rotation of the disc (3, 3a..3f) by the at least one region (B1..B7) ,
- determining the sought characteristic by application of reconstruction- or modelling methods on the detected
intensity impulse suitable for inverse problems, wherein
- one or more of the group: regression analysis,
polynomial function, neuronal networks is/are provided as reconstruction- or modelling methods .
2. Method according to Claim 1, characterized by
- at least one regression step, in which function
parameters of a function are determined by means of at least one intensity impulse of a beam (A, A1..A3) with a known characteristic as independent variable and of the said characteristic as dependent variable and
a determining step, in which the function with
determined function parameters receives an intensity impulse of a beam (A, A1..A3) with an unknown characteristic as independent variable.
3. Method according to Claim 1, characterized by
- at least one analysis step, in which coefficients of a Taylor polynomial are determined by means of at least one intensity impulse of a beam (A, A1..A3) with a known
characteristic as independent variable and the said
characteristic as dependent variable and
- a determining step, in which the Taylor polynomial with determined coefficients receives an intensity impulse of a beam (A, A1..A3) with an unknown characteristic as
independent variable. 4. Method according to Claim 1, characterized by
- at least one training step, in which the neuronal network receives at least one intensity impulse of a beam (A, A1..A3) with a known characteristic as input and the said characteristic as output and
a determining step in which the trained neuronal network receives an intensity impulse of a beam (A, A1..A3) with an unknown characteristic as input.
5. Method according to one of Claims 1 to 4, characterized in that the regression step, analysis step or training step takes place within the framework of a computer simulation.
6. Method according to one of Claims 1 to 4, characterized in that the regression step, analysis step or training step takes place on a real device.
7. Method according to one of Claims 1 to 6, characterized in that as sought characteristic of the beam (A, A1..A3) one or more of the group: intensity distribution of the beam (A, A1..A3), mean diameter of the beam (A, A1..A3), position of the mid-point of the beam (A, A1..A3), position of the focal point of the beam (A, A1..A3), symmetry of the beam (A, A1..A3), proportion of a colour in the beam (A, A1..A3) and/or proportion of a laser mode is/are provided.
8. Method according to Claim 7, characterized in that as sought characteristic a portion is provided at least of one laser mode of the group: Gauss, donut, or top hat.
9. Method according to Claim 7 or 8, characterized in that as sought characteristic a portion at least of one laser mode is provided and the steps:
- detecting a first width of the intensity impulse at a first intensity level,
- detecting a second width of the intensity impulse at a second intensity level
determining the portion of the at least one laser mode by means of the determined first and second width
are comprised.
10. Method according to one of Claims 1 to 9, characterized in that the disc (3, 3a..3e) comprises several elongated regions (B1..B7),
wherein a first region (Bl) crosses a first radial vector (si) originating from the rotation point (M) of the disc (3, 3a..3e) at a radial distance (r) in a first
direction in relation to the first radial vector (s1) and - a second region (B2) crosses a second radial vector (s2) originating from the rotation point (M) of the disc (3,
3a..3e) at the same radial distance (r) in a second direction in relation to the second radial vector (s2) , which is different from the first direction.
11. Method according to Claim 10, characterized in that
several different intensity impulses resulting from the regions (B1..B7) are drawn upon for determining the sought characteristic.
12. Method according to one of Claims 10 to 11, characterised by the steps:
a) detecting two intensity impulses by means of the first and second regions (B1, B2) on rotation of the disc (3, 3a..3e), b) determining a width (M1) of the intensity impulse based on the detection by the first and/or second region (B1, B2), c) determining an angle distance (M2) between the intensity impulse based on the detection by the first region (B1) and the intensity impulse based on the detection by the second region (B2) and
d) calculating the radius (rs) of the beam (A, A1..A3) and of the distance (rp) of this beam (A, A1..A3) from the rotation point (M) of the disc (3, 3a..3e) by means of the determined width (M1) and of the distance (M2) .
13. Method according to one of Claims 10 to 12, characterized in that the first and the second direction enclose a right- angle when the second direction together with the second radial vector (s2) is rotated about the mid-point (M) so that the first and the second radial vectors (s1, s2) are
congruent.
14. Method according to one of Claims 10 to 13, characterized in that the first and the second directions are different in relation to the respective radial vector (s1, s2) at every radial distance (r) .
15. Method according to one of Claims 10 to 13, characterized in that a region (B1, B2) is aligned along a straight line.
16. Method according to Claim 15, charaaterized in that n regions (B1..B7) are aligned along n straight lines and cross associated radial vectors (s1, s2) originating from the rotation point (M) of the disc (3, 3a..3f) at the same radial distance (r) in n different directions.
17. Method according to one of Claims 10 to 14, characterized in that a region (B1, B2) is aligned along a spiral.
18. Method according to Claim 17, characterized in that n regions (B1, B2) are aligned along n spirals and cross associated radial vectors (s1, s2) originating from the rotation point (M) of the disc (3, 3a..3f) at the same radial distance (r) in n different directions.
19. Method according to one of Claims 15 to 18, characterized in that at least one region (B1) is aligned along a spiral and at least one region (B2) is aligned along a straight line.
20. Method according to one of Claims 17 to 19, characterized in that the spiral is Archimedic. 21. Method according to one of Claims 17 to 19, characterized in that the spiral is logarithmic.
22. Method according to Claim 18 to 21, characterized, in that the pitch of the spiral for the first region (B1) is k=1 and the pitch of the spiral for the second region (B2) is k=-1. 23. Method according to Claim 22 , characterized in that the disc (3, 3a..3f) has a straight third region (B3) which is radially aligned.
24. Disc (3, 3a..3f) which is disposed to be arranged
rotatably mounted in a device (1) for determining a
characteristic of a beam (A, A1..A3) in a beam course of the beam (A, A1..A3) in front of a sensor (6) for measuring an intensity of the beam (A, A1..A3),
- wherein the disc (3, 3a..3f) is impermeable to the beam or at least weakens the beam,
- wherein the disc (3, 3a..3f) comprises several elongated regions (B1,,B7) which are permeable to the beam or at least have a higher permeability to the beam compared with the remainder of the disc (3, 3a..3f),
- wherein a first region (B1) crosses a first radial vector (si) originating from the rotation point (M) of the disc (3, 3a..3f) at a radial distance (r) in a first
direction in relation to the first radial vector (s1) and
- wherein a second region (B2) crosses a second radial vector (s2) originating from the rotation point (M) of the disc (3, 3a..3f) at the same radial distance (r) in a second direction in relation to the second radial vector (s2), which is different from the first direction,
characterized, in that
the first region (B1) is aligned along a spiral and the second region (B2) is aligned along a further spiral or along a straight line, wherein the spiral is Archimedic or
logarithmic.
25. Disc (3, 3a..3f) according to Claim 24, characterized in thai: the first and the second direction enclose a right-angle when the second direction together with the second radial vector (s2) is rotated about the mid-point (M) so that the first and the second radial vectors (s1, s2) are congruent.
26. Disc (3, 3a..3f) according to Claim 24 or 25,
characterized in that n regions (B1..B7) are aligned along n straight lines and cross associated radial vectors (s1, s2) originating from the rotation point (M) of the disc (3,
3a..3e) at the same radial distance (r) in n different directions . 27. Disc (3, 3a..3f) according to one of Claims 24 to 26, characterized in that n regions (Bl, B2) are aligned along n spirals and cross associated radial vectors (si, s2)
originating from the rotation point (M) of the disc (3,
3a..3f) at the same radial distance (r) in n different directions.
28. Disc (3, 3a..3f) according to Claim 27, characterized in that the pitch of the spiral for the first region (Bl) is k=1 and the pitch of the spiral for the second region (B2) is k=- 1.
29. Device (1) for determining a characteristic of a beam (A, A1..A3 ) characterized by :
- a sensor (6) arranged in the beam course of the beam (A, A1..A3) for measuring an intensity of a beam characteristic and a rotatably mounted disc (3, 3a..3f) arranged in the beam course in front of the sensor (6), according to one of Claims 24 to 28. 30. Device (1) according to Claim 29, characterized in that a shared drive (7) is provided for the disc (3, 3a..3f) and a chopper disc (5) arranged in the beam course.
31. Laser processing machine comprising a device (1)
according to one of Claims 29 to 30, characterized in that a laser beam for material processing is provided as beam (A, A1..A3) .
32. Laser processing machine according to Claim 31,
characterized in that in the beam course of the laser a beam- splitting element (8) is provided and a first part (C) of the laser beam (A, A1..A3) is directed onto the processing site and a second part (D) is directed to the sensor (6), wherein the disc (3, 3a..3f) is arranged between beam-splitting element (8) and sensor (6) .
33. Laser processing machine according to Claim 32,
characterized in that the disc (3, 3a..3f) is equally far away from the beam-splitting element (8) as the site at which the sought characteristic of the beam (A, A1..A3) is to be determined, from the beam-splitting element (8) .
34. A method for measuring a beam characteristic,
comprising,
providing a rotary disc in a beam path,
providing a sensor configured to measure beam intensity behind said rotary disc, providing a plurality of elongated regions permeable to the beam in said disc;
crossing a first one of said plurality of elongated regions on a first radial vector originating from a rotation axis of the disc, at a radial distance in a first direction in relation to the first radial vector, and crossing a second one of said plurality of elongated regions on a second radial vector originating from a rotation axis of the disc, at the same radial distance in a second direction in relation to the second radial vector, different from the first direction; rotating said disc in the beam path;
sensing intensity impulses from the beam as it passes the elongated regions;
processing said intensity impulses by at least one technique selected from the group consisting of: regression analysis, polynomial function fitting, and neural network; and,
determining the beam characteristic by said processing of said intensity impulses.
35. A method as claimed in claim 34, further comprising,
determining function parameters of a function for regression, by employing at least one intensity impulse having a known characteristic as independent variable, and by having the determinable beam characteristic as dependent variable; and,
providing the function for regression with at least one intensity impulse of a beam with an unknown beam
characteristic as independent variable.
36. A method as claimed in claim 34, further comprising, determining coefficient of a Taylor polynomial by employing at least one intensity impulse having a known characteristic as independent variable, and by having the determinable beam characteristic as dependent variable; and, providing the Taylor polynomial with at least one intensity impulse of a beam with an unknown beam
characteristic as independent variable.
37. A method as claimed in claim 34, further comprising,
providing a neural network with at least one intensity impulse having a known characteristic as input and the determinable beam characteristic as output, for training;
and,
providing the trained neural network with at least one intensity impulse of a beam with an unknown beam
characteristic as input.
38. The method for measuring a beam characteristic as claimed in claim 34, wherein,
said step of determining the beam characteristic
includes determining at least one of the group comprising: intensity distribution of the beam, mean diameter of the beam, position of the mid-point of the beam, position of the focal point of the beam, symmetry of the beam, proportion of a color in the beam, and proportion of a laser mode. 39. The method as claimed in claim 38, wherein, said step of determining the beam characteristic includes determining at least one laser mode of the group comprising: Gauss, donut, and top hat.
40. A method as claimed in claim 39, further comprising, detecting a first width of an intensity impulse at a first intensity level; detecting a second width of an intensity impulse at a second intensity level; and/
determining a portion of the at least one laser mode by the determined first and second widths.
41. A method as claimed in claim 34, further comprising, utilizing plural different intensity impulses resulting from the plurality of elongated regions for determining the beam characteristic.
42. A method as claimed in claim 34, further comprising,
detecting two intensity impulses by using the first and second of the plurality of elongated regions upon rotation of the disc;
determining respective widths of the two intensity impulses;
determining an angle distance between the intensity impulses based on the detection by the first region and the intensity impulse based on the detection by the second region; and,
calculating the radius of the beam and the distance of this beam from the rotation axis of the disc by employing the determined widths and the angle distance.
43. A method as claimed in claim 34, further comprising,
choosing the first and the second directions to enclose a right-angle when the second direction together with the second radial vector is rotated about the rotation axis so that the first and the second radial vectors are congruent.
44. A method as claimed in claim 34, further comprising,
configuring the first one and the second one of said plurality of elongated regions so that the first and the second directions are different in relation to the respective radial vector at every radial distance .
45. A method as claimed in claim 34, further comprising,
aligning a region along a straight line.
46. A method as claimed in claim 34 , further comprising,
aligning a number n of elongated regions along a
respective number n of straight lines, and cross associating respective radial vectors originating from the rotation axis of the disc at the same radial distance in n respective different directions.
47. A method as claimed in claim 34, further comprising,
aligning an elongated region along a spiral .
48. A method as claimed in claim 34, further comprising,
aligning a number n of elongated regions along a
respective number n of spirals, and cross associating
respective radial vectors originating from the rotation axis of the disc at the same radial distance in n respective different directions .
49. A method as claimed in claim 48, further comprising,
selecting the pitch of the spiral for the first region as k=1; and,
selecting the pitch of the spiral for the second region as k=-1. 50. A method as claimed in claim 47, further comprising,
aligning at least one region along a straight line.
A method as claimed in claim 47, further comprising, choosing the spiral as Archiraedic.
52. A method as claimed in claim 47, further comprising, choosing the spiral as logarithmic.
53. A method as claimed in claim 52, further comprising, radially aligning a straight third elongated region of the disc. 54. Device for determining a beam characteristic,
comprising,
a rotatably mounted disc configured to rotate in a beam path;
a sensor for beam intensity disposed behind said beam; a plurality of elongated regions in said disc, Said regions permeable to the beam;
a first elongated region crosses a first radial vector originating from a disc rotation axis at a radial distance r in a first direction in relation to the first radial vector, and a second elongated region crosses a second radial vector originating from the disc rotation axis at the same radial distance r in a second direction in relation to the second radial vector, said second direction being different from said first direction;
said first elongated region is aligned along a spiral; said second elongated region is aligned along one of either (a) a further spiral, or (b) a straight line, wherein said first elongated region spiral is Archimedic or logarithmic.
55. A device for determining a beam characteristic as claimed in claim 54, further comprising, said first and second directions enclose a right-angle when the second direction together with the second radial vector is rotated about the disc axis so that the first and the second radial vectors are congruent.
56. A device for determining a beam characteristic as claimed in claim 54, further comprising/
a number n of elongated regions being aligned along respective n straight lines, and cross associated radial vectors originating from the rotation axis of the disc at the same radial distance in respective n different directions.
57. A device for determining a beam characteristic as claimed in claim 54, further comprising,
a number n of elongated regions being aligned along respective n spirals, and cross associated radial vectors originating from the rotation axis of the disc at the same radial distance in respective n different directions.
58. The device for determining a beam characteristic as claimed in claim 54, wherein,
the pitch of said spiral for said first elongated region is k=1 and the pitch of said further spiral for said second elongated region is k=-1.
59. A device for determining a beam characteristic as claimed in claim 54, further comprising,
a chopper disc arranged in the beam course; and,
a shared drive configured to drive said rotatably mounted disc and said chopper disc.
60. A device for determining a beam characteristic as claimed in claim 54, further comprising, a beam splitter provided in the beam course, said beam splitter configured to direct a first part of the beam onto processing site and a second part of the beam to said sensor said rotary disc being arranged between said beam splitter and said sensor; said disc being equally far away from said beam splitter as said processing site at which the beam characteristic is to be determined, from the beam-splitting element .

Statement under Art, 19

Novelty

The novelty of the claimed Invention (pending claims 2, 25, 29, 30, 57, 61, 62) has not been objected. Hence, a detailed discussion of the novelty of the new claims 1, 24 and 54 can be omitted.

Inventive Step

The object of the invention of new claim 1 is to provide an advantageous possibility to determine the characteristic of the detected Intensity Impulse. This object is achieved by the features of the new claim 1, In particular by "... one or more of the group: regression analysis, polynomial function, neuronal neMorks is/are provided as reconstruction- or modeling methods ... ". These reconstructlon- or modeling methods provide an advantageous possibility to determine the characteristic of the detected intensity impulse. However, these features are neither disclosed in Dl nor in D2.

Accordingly, a combination of Dl and D2 cannot lead one skilled in the art to the invention. Hence, the present invention according to the new claim 1 Is non-obvious to one skilled In the art.

The same argumentation applies mutatis mutandis to the new independent claim 34.

The object of the Invention of new claim 24 Is to provide an advantageous possibility to determine the characteristic of the detected intensity impulse. This object Is achieved by the features of the new claim 24, in particular by "... Archimedic or logarithmic ..." shape of the slits in the Inventive disc. Using this special shape of a spiral provides an advantageous possibility to determine the

characteristic of the detected intensity Impulse as Is described In the application (see particularly Figs. 7, 9 and 10). However, these features are neither disclosed In Dl nor In D2. Accordingly, a combination of Dl and D2 cannot lead one skilled in the art to the invention. Hence, the present invention according to the new claim 24 is non-obvious to one skilled in the art.

The same argumentation applies mutatis mutandis to the new Independent claim 54 as this claim contains now the features of "Archimedic or logarithmic...".

The other claims are dependent on claims 1, 24, 34 and 54, why they are Inventive as well.

PCT/IB2010/055271 2009-11-19 2010-11-18 Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine WO2011061706A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2010800523112A CN102667428A (en) 2009-11-19 2010-11-18 Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine
EP10800787A EP2502037A1 (en) 2009-11-19 2010-11-18 Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH01789/09 2009-11-19
CH17892009 2009-11-19
US26335209P 2009-11-21 2009-11-21
US61/263,352 2009-11-21

Publications (2)

Publication Number Publication Date
WO2011061706A1 WO2011061706A1 (en) 2011-05-26
WO2011061706A4 true WO2011061706A4 (en) 2011-07-14

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CN (1) CN102667428A (en)
WO (1) WO2011061706A1 (en)

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CN106125313A (en) * 2016-06-29 2016-11-16 昆山国显光电有限公司 The adjustment structure of bubble during reduction frit seal
CN115464266B (en) * 2022-09-27 2024-07-30 上海工程技术大学 A laser double-beam double-helix spot welding method

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Publication number Priority date Publication date Assignee Title
DE3546056C2 (en) * 1984-12-26 1993-12-23 Shimadzu Corp Device for measuring the integral absorbance of a sample
DD249759A1 (en) 1986-05-28 1987-09-16 Inst F Nachrichtentechnk METHOD FOR THE RADIOTE THERMAL MEASUREMENT OF LIGHT-EMITTING SOURCES IN REAL TIME
JPS6385319A (en) * 1986-09-30 1988-04-15 Toshiba Corp Beam shape measuring apparatus
DE3706271A1 (en) 1987-02-26 1988-09-08 Erwin Strigl DEVICE FOR MEASURING THE INTENSITY PROFILE OF A LASER BEAM
DE3706217A1 (en) 1987-02-26 1988-09-08 Iveco Magirus LUBRICATION DEVICE FOR THE DIFFERENTIAL GEARBOX OF MOTOR VEHICLES
US4828384A (en) * 1987-12-03 1989-05-09 Westinghouse Electric Corp. High power laser beam intensity mapping apparatus
RU2009105488A (en) * 2006-07-18 2010-08-27 ТиАйАр ТЕКНОЛОДЖИ ЭлПи (CA) METHOD AND DEVICE FOR DETERMINING INTENSIVE AND PEAK LENGTHS OF LIGHT WAVES

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CN102667428A (en) 2012-09-12
EP2502037A1 (en) 2012-09-26
WO2011061706A1 (en) 2011-05-26

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