CN102667428A - Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine - Google Patents
Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine Download PDFInfo
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- CN102667428A CN102667428A CN2010800523112A CN201080052311A CN102667428A CN 102667428 A CN102667428 A CN 102667428A CN 2010800523112 A CN2010800523112 A CN 2010800523112A CN 201080052311 A CN201080052311 A CN 201080052311A CN 102667428 A CN102667428 A CN 102667428A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0437—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
- G01J2001/4261—Scan through beam in order to obtain a cross-sectional profile of the beam
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Abstract
A method is indicated for measuring a characteristic of a beam (A, A1.. A3) by means of a disc (3, 3a..3f ), which is rotatably mounted in a device (1) for determining this characteristic in a beam course of the beam (A, A1.. A3) in front of a sensor (6) for measuring an intensity of the beam (A, A1.. A3). For this, the disc (3, 3a..3f) is impermeable to the beam or at least weakens the beam and comprises at least one elongated region (B1.. B7) which is permeable to the beam or at least has higher permeability to the beam compared with the remainder of the disc (3, 3a..3e). By means of this device, an intensity impulse of the part of the beam (A, A1.. A3) impinging on the sensor (6) on rotation of the disc (3, 3a..3e) is detected. The sought characteristic is then determined by application of reconstruction- or modelling methods suitable for inverse problems on the detected intensity impulse. Furthermore, a device (1) and a disc (3, 3a..3f) are indicated for carrying out the method.
Description
The application requires the benefit of priority of the U.S. Provisional Application formerly 61/263,352 of submission on November 21st, 2009, and as its non-provisional application; The application also requires the benefit of priority of the national applications of Switzerland formerly 1789/2009 of submission on November 19th, 2009.Through with reference to Switzerland's application 1789/2009 integrally clearly is incorporated in this with U. S. application 61/263,352, be used for intentional and purpose, the same as propose at this identically.
Technical field
The present invention relates to a kind of method that is used for through the characteristic of disk measurement beam, disk can be installed in the device that is used for confirming this characteristic in sensor the place ahead of the intensity that is used for measurement beam at the course of the beam of beam rotatably,
-wherein not transmission of disk beam perhaps weakens beam at least,
-wherein disk comprises at least one elongated area, said at least one elongated area transmission beam or have higher transmission beam ability than all the other zones of disk at least.
In addition, the present invention relates to a disk, said disk can be installed in the device of the characteristic that is used for confirming beam rotatably at the course of the beam of beam in sensor the place ahead of the intensity that is used for measurement beam,
-wherein not transmission of disk beam perhaps weakens beam at least,
-wherein disk comprises at least one elongated area, said at least one elongated area transmission beam or have higher transmission beam ability than all the other zones of disk at least,
-wherein first radial vector that sends at a radial distance and the point of rotation on about the first direction of first radial vector of first area from disk intersect and
-wherein second area intersects at second radial vector that the identical radial distance and the point of rotation from disk send on about the second direction of second radial vector, and wherein second direction is different from first direction.
In addition, the present invention relates to be used for confirm the device of the characteristic of beam, transducer arrangements is used for the intensity of measurement beam characteristic in the course of the beam of beam, and the disk that can rotate installation is arranged in sensor the place ahead in course of the beam.
At last, the present invention relates to have the laser machine of such device, wherein laser beam is provided for the beam of materials processing.
Background technology
Often need to confirm characteristic, for example, the intensity distributions of the beam that sends from electron gun, for example setting up its applicability to application-specific, through the intensity distributions measured with the adjustment beam to preferred distribution, perhaps for simple inspection beam etc.Some possibilities known in the state of the art from this respect.
For example, US 4,828, and 384A discloses a kind of method that is used to measure the intensity distributions of high energy laser beam in this respect.Here, the part beam is coupled out through the slit barrier film that can move.Remainder is through several spiral-shaped slits and rotating chopper disk (also being called " chopper "), and finally impinges upon on the thermo-responsive detector.In addition, DD 249 759 A1 disclose a kind of method that is used for the intensity distributions of measuring beam, wherein the rotating circular disk and rotation slit barrier film of beam through having spiral slit.The spirality barrier film manys times the ground rotation than the fast integer of slit barrier film here.Thus obtained beam is through the photo-sensitive cell assessment of two-dimensional arrangements.
In addition, JP 63085319 A openly are used for the device through the intensity distributions of apertured disk measurement beam, and apertured disk has rectangular each other two rectilinear slot.
At last, DE 37 06 217 C2 disclose a kind of method that is used for the Laser Measurement bundle, and wherein the part of beam is coupled out and is directed into pyroelectric detector.Yet before this, the beam that is coupled out is passed in the opening that is arranged in the differing heights place that revolving cylinder puts.
Known devices in most of the cases structurally is a technical sophistication.For example, at US4,828, among the 384A, need the slit barrier film that can move.On the other hand, in DD 249 759 A1, several rotation barrier films are provided, each rotation barrier film is by direct motor drive.And DE 37 06271 C2 require porose cylinder jacket is set, and this considerably is difficult to produce.At last, in JP63085319A, through before the apertured disk, the detection of beam is necessary at beam.In addition, being used for must be greater than beam diameter at the apertured disk of the disclosed measuring method of JP 63085319 A, and this makes that complicacy and volume want big to device more.
Summary of the invention
Based on the problems referred to above, the present invention includes the improvement or the alternative method of the characteristic that is provided for confirming beam, be used for the disk and the device of the method and have the laser machine of this device.
According to the present invention, address this problem by the method for the type of in foreword, pointing out and to comprise these method following steps:
-rely on beam when disk rotates, impinge upon the part detected intensity pulse on the sensor through said at least one zone,
-confirm seek characteristic through the reconstruction or the application of modeling method on strength pulse to be detected that are suitable for inverse problem.
According to the present invention; This problem is also solved by the disk of the type of in foreword, pointing out; Wherein arrange along a helical first area, and second area is arranged or along line spread, wherein said helical is spiral of Archimedes or logarithmic spiral along another helical.
Problem according to the present invention is by pointing out that in foreword type is used for confirming that the device of beam specification further solves, and disk wherein according to the present invention is arranged and can be installed in rotationally in the course of the beam of sensor front.
In addition, problem according to the present invention is solved by the laser machine that has according to the device of the characteristic that is used for confirming beam of the present invention, and the laser beam that wherein is used for materials processing is provided as beam.
In framework of the present invention, " beam " is meant any kind beam, but particularly do not have the beam of quality or have basically no the quality beam, such as light beam and laser beam.Yet basically, the beam with quality also can be provided as beam, as long as whole structure is equipped with the kinetic energy that is used for said beam.Therefore, in specific electron beam, can provide proton beam as beam with quality.
" intensity distributions " will be regarded as any bidimensional or the distributed in three dimensions of intensity of the beam specification of beam.In Two dimensional Distribution, the present invention relates to one group of one dimension in the horizontal different directions through and identical beam, confirming especially and distributes.
" characteristic of beam " is regarded as characterizing any characteristic of beam.For example, this is the intensity of the light in the small or enough little zone of light beam or laser beam.For example, except the intensity on energy stream meaning, promptly each and each regional energy, yet, in light beam (light beam), also can confirm the intensity distributions of one or more colors.
" strength pulse " is understood that to be meant the path of the intensity that impinges upon the beam on the sensor, and it is in disk rotation and therefore generation when moving through the elongated area of beam.Intensity for example can be received the function as time, angle or length here.
" sensor " is any element that is used to detect the target beam specification, is used to detect light intensity, for example, and photodiode in visible wavelength range or the thermal detector in infrared wavelength range.
" course of the beam " comprises that certainly there is entire path wherein in beam, though whether through adequate measure deflection, concentrate or influence it.
" elongated area " be wherein length greater than the zone of width.Therefore, in understanding of the present invention, elongated area also has on specific direction and the central axis that intersects from the radial vector of the point of rotation of disk.Be these purposes, central axis also can be regarded as vector, especially, as the vector that the center from disk guides, perhaps is the vector with at least one such leader respectively.
" not transmission beam " is the nulling transmission, no matter whether beam is absorbed or reflects." reduction beam " correspondingly is meant transmission greater than zero, and " transmission beam " indication transmission is 1.
Preferably, transmission beam zone or the zone that has greater than the radiation beam transmissive property of the remainder of disk are formed by the hole in the disk.In addition, can imagine that disk is from having the material structure of different transmissions.Under the situation of light, consider different transparent plastics for this reason.Can also imagine that the layer of not transmission beam or weakening beam is coated on the carrier of transmission beam.
Therefore, for light beam and laser beam, consider especially to have the hole rosette, have the transparent plastic disk of opaque chromatography and by the disk of different transparent materials structures.The example of appointment is not restrictive and is for the object of the invention is described.The expert of the art will be very easy to find and be used for the appropriate configuration of particular type beam here.
According to various embodiment, disk can correspondingly also be called as " filtrator " of " apertured disk ", " apertured disk ", " barrier film " or special circumstances.
In addition, state according to disk of the present invention it is not to be circular or (relatively) approaches in this, though this is a preferred embodiment.In meaning of the present invention, term " disk " is understood that any kind main body, and its beam that allows when rotated to be incident upon on the main body passes through with varying strength, and this also comprises the complete cutting of beam.Therefore, especially, on meaning of the present invention, also be appreciated that for irregular with the angle main body is arranged, and " thick " main body is understood to be in the big relatively main body of length on the rotation.
In this, further point out, from the prior art known devices according to propagating the hole measurement operate.According to device of the present invention is not around this principle to operate, and therefore can only in limited degree, compare with known devices.Compare with propagating the hole method, advantage of the present invention is simple machining, and is relevant with therewith, reduces manufacturing cost, and feasible timing resolution is higher.
According to attached claim and instructions, with reference to accompanying drawing, advantage embodiment of the present invention with further develop being tangible.
Advantageously, one or more in the following group are set to rebuild or modeling method: regretional analysis, polynomial function, neural network.These methods have been proved to be the solution that is particularly conducive to inverse problem, reason for this reason, and the inverse problem that when confirming the characteristic of beam, takes place can convert practice to relatively low technology and expenditure.
Advantageous particularly ground comprises the steps: according to the method for the invention
-at least one separate regression steps, wherein through have as the said characteristic of dependent variable and as at least one strength pulse of the beam of the known features of independent variable confirm function function parameter and
-confirm step, the function that wherein has the function parameter that is determined receives the strength pulse have as the beam of the unknown characteristics of independent variable.
In of the present invention this changes, attempt by homing method to infer the beam specification of being searched from the strength pulse that records with from several strength pulse that record.Basically, under situation about returning, use the interior correlativity of hypothesis between data point, to check possible correlativity.Here, data point does not have uncertainty or measuring error.They are assumed to be constant with fixing.Under situation, how many data points can use the hypothesis function representation to check about with supposition continuous function.
Advantageous particularly ground comprises the steps: according to the method for inventing
-at least one analytical procedure, wherein through have as the said characteristic of dependent variable and as at least one strength pulse of the beam of the known features of independent variable confirm the polynomial coefficient of Taylor and
-confirm step, the Taylor's polynomial expression that wherein has the coefficient that is determined receives the strength pulse have as the beam of the unknown characteristics of independent variable.
In of the present invention this changes, therefore attempt by approximation polynomial to infer the beam specification of being searched from the strength pulse that records with from several strength pulse that record.Basically, adapt in (" match ") at function, function is adjusted to predetermined path, wherein considers the measuring error or the uncertainty of measurement point.The result function parameter like measured value, stands the hardship of uncertainty then.The match of often adopting is a least square method, supposes that wherein the Gaussian distribution measured value is uncertain.You and the result be curve pattern, wherein the actual function correlativity is present in definite probability.
Advantageous particularly ground comprises the steps: according to the method for the invention
-at least one training step, wherein neural network receive have as the said characteristic of output and as at least one strength pulse of the beam of the known features of input and
-confirm step, the neural network of wherein being trained receives the strength pulse that has as the beam of the unknown characteristics of importing.
In neural network, attempt through crosslink unit analog function correlativity.Primitively, the cross-couplings of unit is equivalent; In " training " process of neural network, association is only by the weighting of different ground.Accomplish after the training, because different weightings, the neural network behavior is similar to correlativity predetermined, that trained.For example,, can obtain the intensity distributions of beam, when in input, send into the strength pulse that receives from sensor, and before used this correlativity neural network training in output place of neural network.
Particularly advantageous is that separate regression steps, analytical procedure or training step occur in the framework of computer simulation.The correlativity that quilt between the characteristic of the strength pulse that is received by sensor by this way, and the characteristic of beam is searched can because in simulated environment, not had unknown disturbances factor affecting result by simulation exactly especially.
Yet, advantageous particularly ground be that separate regression steps, analytical procedure or training step occur on the real device.By this way, the correlativity of searching of the quilt between the characteristic of the characteristic of beam and the strength pulse that received by sensor can be simulated with the mode of pressing close to reality especially.
In further particularly advantageous variation of the present invention, separate regression steps, analytical procedure or training step are also carried out in the framework in computer simulation in execution on the real device.The result is then by relatively or gather together.By this way, can and press close to recurrence in accuracy and perhaps reach good compromise respectively between the reality of modeling.
In this advantageously, the one or more seek characteristics that are set to beam in the following group: the ratio of the position of the position of the mid point of the intensity distributions of beam, the mean diameter of beam, beam, the focus of beam, symmetry, the color-ratio in the beam and/or the zlasing mode of beam.These are the beam parameters that often need, and for example are used for cut, laser bonding (except the color-ratio of beam, because laser beam is monochromatic).
Advantageously, the part of at least a zlasing mode in the following group is set to seek characteristic: Gauss, annulus or top cap.When said (or other are further) pattern of laser beam a part of known, then also can rebuild or the intensity distributions of approximate total beam at least.
Particularly advantageous in this is that the part of at least a zlasing mode is set to seek characteristic and comprises the steps:
-detect first width in the strength pulse at the first strength grade place,
-detect second width in the strength pulse at the second strength grade place,
This part that first width that-dependence is confirmed and second width are confirmed said at least a zlasing mode.
In of the present invention this changes, search the confirming of width of confirming to be reduced to the strength pulse that takes place during through elongated area in beam propagation of part.Here, measured at the width at two different intensity grades places.Therefore, mode section is definite simple especially.
When disk comprises several elongated area, particularly advantageous method is provided,
-wherein the first area on the first direction of first radial vector that sends about the point of rotation from disk a radial distance and first radial vector intersects and
-second area intersects in the identical radial distance and second radial vector on the second direction of second radial vector that sends about the point of rotation from disk, and wherein second direction is different from first direction.
Through be arranged in different directions on the disk that can rotate installation a plurality of zones, can be by single disk scanning beam in different directions.Although simple in structure, therefore can be on different directions scanning beam.
Same particularly advantageous in this is to utilize the several varying strength pulses that produce from said zone to confirm said seek characteristic.By this way, when beam is for example asymmetric, can being confirmed more accurately of beam by seek characteristic.For example, by this way, spatial intensity distribution can be determined, for example, and asymmetric (ellipse) intensity distributions of diode laser.
A kind of method is favourable, comprises the steps:
A), disk rely on first and second zones to detect two strength pulse when rotating,
B) based on through first and/or the detection of second area confirm the width of strength pulse,
C) confirm based on the strength pulse of the detection of carrying out through the first area with based on the angular distance between the strength pulse of the detection of carrying out through second area,
The distance of the width of d) rely on confirming and the point of rotation of the radius of distance calculation beam and this beam distance disk.
In of the present invention this changed, the confirming of the distance of the point of rotation of the radius of beam (or its diameter) and beam distance disk was reduced to width definite of the strength pulse that takes place during through elongated area in beam propagation.For this reason, the width of at least one pulse and measured to the distance of another pulse.Beam radii (beam diameter) and beam spot really determining cause this is simple especially.Certainly, this method is not limited only to utilize two strength pulse, but it also can expand to the processing of two above pulses.
Advantageously, rotate so that first and second radial vectors when superimposed around mid point with second radial vector when second direction, first and second directions surround the right angle.In this embodiment, beam is roughly passing through from first and second regional spreads on the direction of quadrature each other, and the spatial intensity distribution of beam can be to be detected at an easy rate thus.
Equally advantageously, first direction is different with second direction with respect to each radial vector that is in each radial distance.According to this variation, bending area is set.Through corresponding layout, can realize the detection of the improvement of intensity distributions.
In addition, advantageously, said zone is along line spread.The linearity region generally can especially easily produce, and therefore, does as a wholely, and the production of disk is simplified.
In addition, advantageously, n zone be along n bar line spread, and on n different directions, intersect at the same radial place and from the associated radial vector that the point of rotation of disk sends.In of the present invention this changed, a plurality of zones (being n zone) was along a plurality of different directed line spread.By this way, beam is propagated through every straight line along different directions.Beam specification, for example therefore the spatial intensity distribution of beam can be measured especially effectively.
In the favourable variation of disk according to the present invention, arrange along helical in the zone.When helical was enough smooth, beam can be propagated in more or less radial direction and pass through.
Equally advantageously, arrange along n bar helical in n zone, and on n different directions, intersect at the same radial place and from the associated radial vector that the point of rotation of disk sends.In of the present invention this changed, a plurality of zones (being n zone) arranged along a plurality of different directed helicals.By this way, beam is propagated through every helical in different directions.Beam specification, for example therefore the spatial intensity distribution of beam can be measured especially effectively.
In addition, advantageously, arrange along helical at least one zone, and at least one zone is along line spread.By this way, beam can pass through in more or less propagation in the radial direction at every turn, and on the more or less tangential direction about the mid point of disk respectively, propagates at every turn and pass through the linearity region.
And, if helical is a spiral of Archimedes, be favourable.The radius of spiral of Archimedes and its anglec of rotation increase pro rata.By this way, under the situation that disk evenly rotates, the scroll zone extends through beam equably.
If helical is a logarithmic spiral is particularly advantageous.Logarithmic spiral is will be from the helical that increases identical factor from the distance of its mid point (its limit) when each rotation.Every straight line through limit always intersects at identical angle place and logarithmic spiral.No matter beam is positioned at the there and beam is much, always that logarithmic spiral extends through the direction on mid point institute edge of beam is therefore identical.
Particularly advantageously be, the spacing that is used for the helical of first area is k=1, and the spacing that is used for the helical of second area is k=-1.Therefore, two zones intersect between+45 ° and-45 ° and produce the radial vector through the center of beam.These two zones therefore on orthogonal directions at least therein the heart extend through beam.This is applicable to the beam of any position and size.
In addition, particularly advantageous is that disk has linear the 3rd zone of radially arranging.In of the present invention this changed, therefore disk had about two scrolls zones of arranging each other and the linearity region that is radial arrangement.Advantageously, arrange along the logarithmic spiral with pitch k=1 and k=-1 in spiral zone, but other pitch and helical form (like spiral of Archimedes) also are feasible.
If use to detect the sensor that feam column changes (in infra-red range, for example thermal detector), then advantageously, the chopper disk that periodically interrupts beam be set also in course of the beam.
Advantageously, Shared Drive is set for disk and chopper disk.Generally, fixing rotational speed ratio is set between disk according to the present invention and chopper disk, therefore, it also is favourable that Shared Drive is provided, and for example, has the motor of respective gears.
If will measured laser beam have the wavelength in infrared wavelength range, for example, like the CO that in materials processing, often uses
2Laser, at 10.6 μ m places, then advantageously, the thermal detector of in infrared wavelength range, operating equally can be used for the Laser Measurement bundle.Distribute according to intensity of laser beam, different suitabilities cause various objectives, reason for this reason, and the knowledge of said intensity distributions is important.
If beam splitting element is arranged in the course of the beam of laser; And the first of laser beam is directed on the Working position and is directed to sensor with second portion; Wherein disk is arranged between beam splitting element and the sensor, then has the structure according to the laser machine of favourable type of the present invention.By this way, the part of laser beam can be for measuring purpose by " branch ".The pure analysis of laser beam and based on the positive impact of the laser beam of measurement result, i.e. the adjusting of laser beam all is possible.For this reason, laser beam can receive the for example influence of the well known elements of optical lens, mirror, barrier film, grating and so in essence.Special consideration partially transmitting mirror and prism are as beam splitting element.
At last, particularly advantageously be that disk is determined residing position from the distance of beam beam splitting element with the seek characteristic of beam and equates from the distance of beam beam splitting element.With regard to not having beam distortion combination of elements, in this mode, can guarantee that important intensity distributions is measured to course of the beam.Working position for example can be set to " seek characteristic such as the intensity distributions of beam is known position ".
Point out that in this present invention not only is suitable for laser machine in principle, also be suitable for any kind beam processing machine, for example, electron beam processing machine.
Point out at last, it is pointed out that for disk according to the present invention, according to the pointed variation of device of the present invention, laser machine according to the present invention with and the advantage that produces relate to comparably according to the method for the invention, vice versa.
The above embodiment of the present invention with further develop and can combine with the mode of any needs.
Description of drawings
Under the help that shows exemplary embodiment in the accompanying drawings, further illustrated in detail the present invention wherein shows:
Fig. 1 diagrammatically illustrates the device that is used for the intensity distributions of definite beam according to of the present invention;
Fig. 2 is the top view on disk according to the present invention, have can the transmission beam two zones, each zone is along line spread;
Fig. 3 graphic extension can the transmission beam the zone how to extend through beam;
Fig. 4 A is shown in the strength pulse of the beam that receives on the first direction;
Fig. 4 B is shown in the strength pulse of the beam that receives on the second direction;
Fig. 5 diagrammatically illustrates the chopper disk;
Fig. 6 is according to disk of the present invention, has the zone of the transmission beam of directed line spread along several different ground;
Fig. 7 is according to disk of the present invention, has the linear and the scroll zone of transmission beam;
Fig. 8 is a synoptic diagram, and diagram logarithmic spiral and the beam of different sizes and different location intersect the direction on institute edge;
Fig. 9 is according to disk of the present invention, has two zones of transmission beam, and arrange along two mutually orthogonal logarithmic spirals in these two zones;
Figure 10 is an illustrated disk among Fig. 9, the zone of only have extra linear, radially extending;
Figure 11 is from having laser machine according to the device of the present invention part under subtracting;
Figure 12 is two strength pulse that received by device according to the present invention, has two transmission beam zones according to Fig. 9;
Figure 13 is an exemplary process diagram, diagram row flow process; With
Figure 14 is a code segment, shows the part of the exemplary flow that is fit to Fig. 9 and 12.
In the accompanying drawings, identical and similar part has provided identical reference number, that and the element of functional similarity and characteristic-short of have in addition is dated-all give same reference number, but different signs.
Embodiment
Fig. 1 shows the device of the intensity distributions that is used for definite beam A, and beam A is from beam source 2 emissions.The disk 3 that can rotate installation is arranged in the beam circuit.Beam A scioptics 4 after passing through disk 3 are concentrated, and then through chopper disk 5, beam A impinges upon on the sensor 6, and sensor 6 is used for the intensity of measurement beam characteristic.In this example, disk 3 is driven by Shared Drive 7 with chopper disk 5.
Fig. 2 shows exemplary disk 3a with top view now.Disk 3a itself not transmission beam or weaken beam at least, and have the first elongated area B1 and the second elongated area B2, said elongated area transmission beam or compared the higher beams transmittance with the remainder of disk 3a at least.First area B1 intersects with the first beam s1 that is derived from point of rotation M at radial distance r place on about the first direction of the first radial vector s1.In this example, first area B1 intersects to the outside right side and the first radial vector s1 in the left side internally.
In addition; Second area B2 intersects at the identical radial distance r place and the second radial vector s2 on the second direction about the second radial vector s2 of the point of rotation M that is derived from disk 3a; Second direction is different with first direction, and promptly second area B2 intersects to the outer left side and the second radial vector s2 on the right side internally.
The function of explanation layout illustrated in figures 1 and 2 is following now:
Through rotating circular disk 3,3a, light beam A single pass first area B1, single pass second area B2.About light beam A, also can be expressed as, move first area B1 once, and mobile second area B2 is once.Fig. 3 shows beam A and two area B 1 and B2 with xsect in this respect, and their direction of motion.Following explanation is based on this viewpoint or respectively based on this frame of reference.
When through first area B1, receive first strength pulse of beam A now.Fig. 4 a display result, promptly narrow relatively distribution is similar to Gauss branch (Fig. 4 a and Fig. 4 b show the intensity I of the anglec of rotation Φ scope of disk 3,3a).Through second area B2 the time, receive second strength pulse of beam A now.Fig. 4 b display result, promptly wide relatively intensity distributions.From two results, can draw the first simple conclusion, promptly beam A has the intensity distributions much more relatively elongation forms.In simple being similar to, strength pulse promptly transmits first impression of one dimension part through (space) intensity distributions.Yet, must consider that because the length of area B 1 and B2, beam A is integrated at its width range when the detected intensity pulse, and the representative of one dimension intensity distributions is through the xsect of beam.
In this, notice, when area B 1, B2 pass through beam A one by one, directly do not obtain the one-dimensional profile of beam A.This is because in the detection signal of area B 1, B2, also comprises information perpendicular to the beamwidth of the direction of motion of area B 1, B2 (these are different with the known measuring method by the propagation hole of prior art).Yet, for example suppose that beam A is that circle is symmetrical, can regain one-dimensional profile.The signal of these two area B 1, B2 also can be used for regaining the one dimension beam profile.
The result who obtains now for example can be used for being in 2 in source or influencing beam A through the element (not shown) (like eyeglass, mirror, barrier film and other self-adaptation elements) in the course of the beam, distributes up to the corresponding target strength of measured intensity distributions.Especially, by this way, rotational symmetric intensity distributions can be set.
The quantitative knowledge of the intensity distributions of beam A or the personal feature of intensity distributions (like position of beam radii, beam focus etc.) usually can not directly be read from measured signal.The two-dimensional intensity distribution of beam A is incident upon on the one dimension strength pulse through the motion of area B 1, B2 really.Under the situation of this projection, the information that relates to second dimension of intensity distributions has been lost to a great extent.Several characteristics of beam A still can relatively accurately be confirmed, particularly when the beam symmetry.From the known regretional analysis of data itself, neural network and the beam specification that suitable recovery is searched with recovery algorithms numerical value other mathematics.For example with the systematic comparison of propagation hole measurement, this means extra software engineering and mathematics expenditure really, but through the simple physical construction according to device of the present invention, this is compensated more.Hereinafter further presents the simple examples of recovery algorithms in the description process of Figure 12.
From mathematics, the corresponding inverse problem of the task of reconstruction can being derived by observed result (being strength pulse here) from system because form the reason on result's's (being the beam specification of searching) basis here.Opposite with direct problem (result is derived from reason), inverse problem often is difficult to solve, and even can not be resolved.Yet, obtain first in the present invention and watch this paths of difficulty seemingly.In addition, compare (for example, propagating the hole method) with the device that is used for directly measuring, the low production cost of surprisingly simple structure and connection thereof, measurement mechanism 1.
Yet model representation is for also be necessary according to the method for the invention, and promptly the mathematical correlation of cause and effect should known at least general profile.In physical condition, this means that the form of area B 1, B2 should be known on mathematics.The exception of this situation is present in the situation of neural network, and neural network needs said correlativity during training step, because training step is " automatically ".
In general, the reconstruction through regression analysis under situation in inverse problem at need, frequent end user's artificial neural networks (ANN).Neural network also can obtain complicated nonlinear function through training step.Here, through iteration or recursive program, attempt to confirm all correlativitys between the input and output value from existing input and desired output.For example, under actual conditions, a plurality of beam A with variation of diameter, beam spot, symmetry, mode mixture are calculated, and show on the strength pulse through disk 3, thus can neural network training.This can occur in pure simulated environment, perhaps also occurs on the actual device 1.Advantageously, under the situation of using neural network, functional dependency needn't known or supposition as already mentioned.
In order to improve precision, especially, under the situation of asymmetric beam A, by area B 1, B2, from the different directions structure varying strength pulse of beam A.Subsequently, the different characteristic of beam A can confirm according to these strength pulse, for example can reconstruct beam A not by the surface structure of the intensity distributions that directly detects.
Though lens 4, chopper disk 5 and driver 7 only constitute-selectable unit of same favourable-device 1.Lens 4 are used for concentrating beam A to sensor 6 with essential known way.Chopper disk 5 is used to block beam A.Detector is worked as on advantageous particularly ground, and like thermal detector (pyrodetector), when being set to sensor, detector detects feam column to be changed.Under the situation of the sensor 6 that can directly detect feam column (like photodiode), also can exempt chopper disk 5.
Chopper disk 5 is thought the speed rotation of integral multiple of the rotational speed of disk 3,3a.For example, use the chopper disks that have 30 holes and fast 40 times rotate than disk 3,3a, each rotation of disk 3,3a can obtain 720 measurement points.Therefore, per 0.5 ° receives a measurement point.Because the fixedly rotational speed ratio between disk 3,3a and the chopper disk 5 also helps providing Shared Drive 7, for example, has the motor of respective gears.Certainly, rotational speed also can use individual drives and corresponding rotational speed to regulate realization.
Fig. 5 shows the chopper disk 5 of example.Here, the zone of internal placement that can the transmission beam is used to interrupt beam A, is used for confirming that optional mark or each hole of disposed outside of the position of chopper disk 5 provides through the optical screen barrier.
The area B 1 of illustrated disk 3a intersects with acute angle with B2 among Fig. 2.This is not compulsory for the present invention.Straight intersecting angle also is conceivable.In addition, if two area B 1 are particularly advantageous with B2 with right angle intersection, because the intensity distributions of the beam A on two axis arranging that meet at right angles each other also is detected then.
Only to allow inference now be the intensity distributions on two axis to illustrated disk 3a among Fig. 2, still, also can expand to several axis according to principle of the present invention, if disk 3a equips extra but different separately arrange regionals for this reason.Like this, can make point-device statement about the intensity distributions of beam A.Fig. 6 shows possible example for this reason, has 7 area B 1..B7, and these 7 area B 1..B7 intersect with the radial vector that is derived from intermediate point M at the same radial place along different directions, and are associated respectively.In addition, the disk 3b of Fig. 6 externally zone has the selectable marker that is used for the optical screen barrier, is used for confirming the position.By this way; Can not only confirm that beam A leaves the distance of the point of rotation M of disk 3b; And-in fact, in this special variation, the position of disk 3B in the space be now also known-and also definitely can be in the position of on two-dimensional directional, confirming beam A on the measurement plane.Certainly, the disk 3a of Fig. 2, the disk 3c of Fig. 7 and the disk 3e of Fig. 9 can have the mark that is used for confirming the position with other conceivable variations.At last, point out also that area B ..B7 must not be straight, can have sweep but possibly be bent maybe yet.
In above-mentioned observation, do not consider that area B 1 and B2 can not move through beam A in fact on straight line, promptly can not move, but because the rotation of disk 3,3a, in fact, rotating tee is crossed beam A with the mode of translation.Yet for very little beam diameter or from the very large distance of mid point M, this can be out in the cold.If the inapplicable beam of these conditions is measured or is very high to the beam Testing requirement, so in evaluation, can consideration of regional B1 and the rotation of B2.Especially, can use very little disk 3,3a according to the method for the invention, the radius of disk may reside in the zone of diameter of the beam A that will measure.Because compact overall dimensions, therefore device 1 can for example also can directly be arranged in the processing head of laser machine.
This also be problem be that beam A can be only propagates through area B 1 and B2 on more or less tangential direction, but can not be in more or less propagation in the radial direction through area B 1 and B2.The possibility that is used to address this problem comprises to be selected to be used for the multi-form of area B 1 and B2, and promptly area B 1 is arranged along helical with B2.Through enough smooth helical is provided, each zone more or less radially extends through beam A.Spiral of Archimedes has been proved to be and has been suitable for this especially, and the radius and the anglec of rotation of spiral of Archimedes increase pro rata.Like this, scroll area B 1, B2 extend through beam A equably under the situation that disk 3 evenly rotates.
Fig. 7 shows that advantageous particularly of the present invention changes, and wherein first area B1 arranges along helical (spiral of Archimedes especially), and second area B2 is along the straight line of radially extending.When disk 3c rotated, first area B1 more or lessly radially extended, and the second area B2 more or less edge direction that meets at right angles with it extends through beam A.Second area B2 also can depart from respect to radial vector a bit, with better approaching said right angle.In an example shown, second area B2 will so must be from the interior right side to outer left bank.At last, Fig. 7 also shows radius r s and the position thereof of beam A, promptly its from the mid point M of disk 3c apart from rp.
In other favourable variation, first area B1 does not arrange along spiral of Archimedes, but arranges along logarithmic spiral.Logarithmic spiral is that each rotation makes the helical that increases identical factor from the distance of its mid point M (limit).In opposite sense of rotation, curve self with the radius that increases constantly near twining near the limit.Each straight line through limit always intersects with identical angle and logarithmic spiral.Because this characteristic also is called equiangular spiral.
Therefore; First area B1 always is more or less in and extends through beam on the equidirectional; Where no matter beam is much is positioned in beam; Because, as what mentioned, the straight line through limit (like the radial vector at the center through beam A) always with identical angle crossing with logarithmic spiral-different with spiral of Archimedes.Fig. 8 shows disk 3d, and several beam A1..A3 have different sizes and are positioned at diverse location.Can see at an easy rate that logarithmic spiral always turns to the center through beam A1..A3 with identical angle.In Fig. 7, therefore first area B1 can advantageously also arrange along logarithmic spiral.
Fig. 9 shows other favourable variation of the present invention now, wherein selects k=1 to be used for the spacing of the logarithmic spiral of first area B1, and selects k=-1 to be used for the spacing of the logarithmic spiral of second area B2.Thereby two area B 1 intersect with the radial vectors that pass through the center of beam A with+45 ° and-45 ° with B2.Therefore, therefore two area B 1 extend through the beam A-heart at least therein along orthogonal directions with B2.This is applicable to any position and the size of beam A.In addition, area B 1 and B2-be different under the situation according to the layout of Fig. 7-and time that needs are approximately identical (under the situation of symmetrical beam A, even identical definitely time) extends through beam A.
The expansion of the disk 3e that shows in Figure 10 displayed map 9.Except two area B 1 and B2 of arranging along logarithmic spiral, disk 3f also comprises linear radial array area B 3.As test has shown, can use this disk 3f to confirm the characteristic of highly asymmetric beam A particularly well.
Compare with the disk 3e that two kinds of strength pulse are provided of Fig. 9, the disk 3f of Figure 10 produces three strength pulse.Therefore, can confirm two distances (in this respect also referring to Figure 12) between three pulse widths and the pulse now.This generation has the equation system of three equalities; Wherein, confirm value, ellipticity (ratio of main axis) and the beam spot (this can certainly be applicable to all disk 3e..3f that are illustrated in the drawings) of mean radius according to 5 measured values by means of least-square fitting approach.Traditional mathematic software (for example Scilab, Matlab) can be used for this.It has been found that quadratic equation provides point-device result.
Through the width of highly locating (promptly at least two strength grade places) definite pulse at least two, the extra expansion of algorithm is possible.Thereby impulse form enters into evaluation, can carry out the statement about the pattern of beam A thus.Sample plot, pulse width is determined at two strength grade places, and the result, and the percentage of the Gauss in beam A, annulus and top hat cone formula is determined.In a similar manner, also can consider further/other patterns.
At last, Figure 11 shows the part that cuts out from laser machine, is the beam splitting element 8 in laser beam path in physical condition.Part transmission lens or prism for example can be set to beam splitting element 8.According to the present invention, the C of first of laser beam A is guided on the Working position, and second portion D is directed into device 1.Beam splitting here takes place so that second portion D than the C of first little many (as being beamed into 0.1%/99.9%).By this way, the major part of realization beam A is directed into machining location.Second portion D seldom has any positive consequence, and also will be selected so that arrangement according to the invention 1 can not receive the adverse effect of the energy of second portion beam D.In Figure 11, about equally, and the situation that between beam splitting element 8 and disk 3 (not offering some clarification on), does not have the beam shaping element here is as the distance by second portion D covering on length for the distance that is covered by the C of first.Preferably, part beam C and D do not form element through any other beam, or preferably consider these arithmetically respectively.Therefore, can think the beam specification of searching, (relatively) intensity distributions for example, the C of first with in second portion D, be consistent.Certainly, also be to imagine, other beam forms element and is arranged in the course of the beam extraly.
The major criterion of laser cutting machine is cutting speed, cut quality and reliability.When material that laser beam A can be suitable for handling best, preceding two standards can be satisfied as well as possiblely.This requires in course of the beam, to have adaptability element (variable beam diameter) and if be suitable for the adaptability element in resonator (adaptation of chamber internal schema).Yet, use the adaptability element many more, its wrong adjusting is more possible.Though exist the material of material aging and element-with the adjustment tolerance, beam A is along with the past of time changes separately.The influence of polluting is an other factor.
Except because the aging known beam that causes changes, depend on that the beam change of output also is a problem, particularly at CO
2Under the situation of high-energy laser.Because the laser beam A that for example has half output is different with the characteristic with maximum laser beam of exporting, normally " general beam " is selected, and promptly is being actually like the compromise between maximized possible anything that prevents to cut output.After laser started and heats, laser beam A changed in first minute equally, and it can cause problem equally in cutting operation.
So the laser beam A of laser cutting machine can always be suitable for pending workpiece best, the measurement of the intensity distributions of laser beam A (so-called " beam monitoring ") is helpful.Various researchs show, depend on output especially, and laser beam A changes position, size and pattern in operating process.In addition, because the aging and pollution of optical element, laser beam A also changes in very long period.This variation can detect through beam monitoring according to the present invention, and can be proofreaied and correct by adaptive element to a great extent, and promptly beam A can be conditioned.This causes the obvious reinforcement of process stability and the obvious increase of cutting speed.
Continually, confirming of beam diameter and beam mid point or beam focus is enough, and promptly accurate distribution of strength there is no need.The method and the model that therefore, use are simplified.In experiment, the laser beam with about 1.5 hertz temporal resolution can accurately be determined at least 0.2 millimeter about its position rp and its radius r s.The width of area B 1..B7 that can the transmission beam should not be selected as too little at this, so that not obviously influence of diffracting effect.For as 10.6 mum wavelength degree (CO
2Laser), 1 millimeter gap width is good selection.
Under the help of Figure 12, describe as follows, how Figure 12 diagram confirms the size and its position of beam A by means of the strength pulse of receiving.Figure 12 shows the distribution of the intensity I in the angle Φ scope of determined disk 3e at Fig. 9 in this regard.Graphical presentation has the beam A and the beam A with so-called annulus distribution (dotted line) of Gaussian distribution (solid line), and they are normalized to 1 respectively.Unlike signal is the size of different beam and the result that the position causes apparently.
The value of measuring easily now is width (pulsewidth) M1 of strength pulse and the distance between strength pulse (distance of the pulse) M2.These two values depend on two beam parameters, i.e. beam radii rs on disk 3e and radial position rp.The azimuth position Φ of beam A can confirm through the azimuth position of known disk position and two pulses.The position angle displacement of beam A does not change pulse width M1 or pulse apart from M2, but only on the Φ axis, moves two pulses.Under known polar situation, in essence also can be in a known way easily convert the position of beam A to rectangular coordinate.
The mode profile of laser beam A is also depended in expectation pulse width M1 and pulse apart from M2.Yet research shows that Gaussian distribution, annulus distribute and the top cap distributes, and (not having diagram) has almost common point of crossing, has identical beam radii rs (second constantly) and identical beam spot.For the scope of the radial position of 6 to 11 millimeters beam diameters and 26 to 32 millimeters, these point of crossing on average are positioned at the I=0.158 place for the outside of normalization pulse, are positioned at the I=0.125 place for the inboard.Therefore, be independent of modulus or intensity distributions respectively, can confirm beam spot rp and beam size rs utterly.
Certainly, above-mentioned information instance as an example just.Another selection with disk C of other area B 1 to Bn can cause different results, yet its location falls in expert of the art's the scope of conventional program.
According to the point of crossing of appointment, confirm 4 angle [alpha] 1.. α 4.
Provide pulse width by equation now:
M1＝(α2-α1+α4-α3)/2
And the distance that provides pulse by equation:
M2＝(α4+α3-α2-α1)/2
Can pulse width M1 and pulse be calculated as beam radii rs and the function of its radial position rp on the disk 3e apart from M2.Therefore, the equation of generation has two unknown numbers, and this can solve in a manner known way.As showing that from research pulse width M1 depends primarily on beam radii rs, has only sub-fraction to depend on radial position rp.Vice versa, and pulse has only sub-fraction to depend on beam radii rs apart from M2 and mainly depends on radial position rp.
Use traditional mathematics software (like Scilab), beam radii rs and beam spot rp confirm, also can use following method to carry out with simplified way:
rs＝p1×M2
2+p2×M1×M2+p3×M1+p4×M2+p5
rp＝q1×M2
2+q2×M1×M2+q3×M1+q4×M2+q5
Show that like research the error by the approximate value of radial position that is used for 6 to 11 millimeters beam diameter and 26 to 32 millimeters causes is about 0.02 millimeter for beam radii rs, is about 0.05 millimeter for beam spot rp, therefore, generally can ignore.
Adopt other disc format and other area B 1..B7, can develop comparable simple model, thereby confirm beam radii rs and beam spot rp in a similar manner.Yet the invention is not restricted to confirming of beam radii rs and beam spot rp, but can expand to mode profile, beam quality M
2, the confirming of beam parameter product B PP etc.For example, the left side in Figure 12 and/or right pulse can as seeing at an easy rate, be caused two different pulse width M1 by with two different brackets ionization meters.And then can infer the ratio of independent pattern from these different in width M1.
In order to confirm polynomial expression and coefficient thereof, as explaining, the beam A that is supposed to is carried out modeling, and their image is by simulation on detector 6.Corresponding method, promptly program can realize at the assessment microcontroller or in personal computer (PC).Figure 13 shows example flow diagram in this respect, and this example flow diagram representative is used for the feasible flow process of previous example.This process flow diagram, above-mentioned example is used/be applicable to the parameter of particularly wherein mentioning.Yet through the variation of parameter, illustrated process flow diagram also can be adapted to the for example disk 3f of Figure 10 with having no problem, and the confirming or be included in confirming of pattern among the laser beam A respectively of ellipticity.
The array of value is derived from predetermined input parameter rp, rs and output parameter M1, the M2 that is produced.These are worth like the stored in form with following table:
rs1?rp1?M11?M21
rs2?rp2?M12?M22
rs3?rp3?M13?M23
. . . ...
.. or the like
Adopt the table and the polynomial equation of (maybe be very extensive) this value, as confirming polynomial coefficient through least-square fitting approach, said coefficient constitutes association as well as possible between output parameter M1, M2 and relevant input parameter rs and rp then.This for example carries out (for example describing according to http://www.mathworks.com/matlabcentral/fileexchange/10065-polyf itn) through " Polyfitn " function that commercially available mathematical tool MATLAB, particularly usefulness wherein comprise.
Figure 14 shows the actual code section that is used to calculate designated parameter now.Only substitute two value rs that search, rp and two measured value M1 and M2, certainly increase a plurality of measured values and do not have tangible additional difficulty.Likewise, also can increase a plurality of values of searching, as long as this quantity less than measured value.
Notice that at last the variation of pointing out is only represented according to disk of the present invention 3,3a..3f, according to contrive equipment of the present invention 1, according to the part of the multiple possibility of laser machine of the present invention, and can not be used to limit range of application of the present invention.For the expert of the art, be based on the consideration of introducing here, easily make the present invention adapt to his requirement, when doing like this, do not depart from protection scope of the present invention.
Point out that in addition the general not to scale (NTS) of accompanying drawing is drawn, and illustrated in the accompanying drawings layout also can be formed for the basis of independent invention.
The following reference numerals list and the teachings of claim are considered to be present in the framework of disclosure, and open to the expert of the art separately, perhaps when watching together with accompanying drawing, disclose further details of the present invention and its example embodiment.
Reference numerals list
1 device
2 beam source
3, the 3a..3f disk
4 lens
5 chopper disks
6 sensors
7 drivers
8 beam splitting elements
A, the A1..A3 beam
The zone of B1..B7 transmission beam
C first beam
D second portion beam
I intensity
The point of rotation of M disk
The width of M1 strength pulse
Distance between two strength pulse of M2
The r radial distance
The rp beam spot
The rs beam radii
S1, the s2 radial vector
The position, angle of α 1.. α semi-finals degree pulse point of crossing
The position, angle of Φ disk
Claims (according to the modification of the 19th of treaty)
1. one kind is used to rely on disk (3; 3a..3f) measurement beam (A; The method of characteristic A1..A3), disk be used for measurement beam (A, the sensor of intensity A1..A3) (6) the place ahead is at beam (A; A1..A3) can be installed in the device (1) that is used for confirming this characteristic in the course of the beam rotatably
Wherein disk (3,3a..3f) not transmission beam or weaken beam at least,
Wherein disk (3,3a..3f) comprise at least one elongated area (B1..B7), said at least one elongated area transmission beam or at least than disk (3, all the other zones 3a..3f) have higher transmission beam ability,
The method is characterized in that following steps:
Rely on beam (A, A1..A3) disk (3,3a..3f) impinge upon the beam part detected intensity pulse on the sensor (6) through said at least one zone (B1..B7) during rotation,
Seek characteristic is confirmed in reconstruction or the application of modeling method on strength pulse to be detected through being suitable for inverse problem,
In the wherein following group one or more are set to rebuild or modeling method: regretional analysis, polynomial function, neural network.
2. method according to claim 1 is characterized in that comprising the steps:
At least one separate regression steps, wherein through have as the said characteristic of dependent variable and as the beam of the known features of independent variable (A, at least one strength pulse A1..A3) confirm function function parameter and
Confirm step, the function that wherein has the function parameter that is determined receives has beam (A, strength pulse A1..A3) as the unknown characteristics of independent variable.
3. method according to claim 1 is characterized in that comprising the steps:
At least one analytical procedure, wherein through have as the said characteristic of dependent variable and as the beam of the known features of independent variable (A, at least one strength pulse A1..A3) confirm the polynomial coefficient of Taylor and
Confirm step, the Taylor's polynomial expression that wherein has the coefficient that is determined receives has beam (A, strength pulse A1..A3) as the unknown characteristics of independent variable.
4. method according to claim 1 is characterized in that comprising the steps:
At least one training step, wherein neural network receive have as the said characteristic of output and as the beam of the known features of input (A, at least one strength pulse A1..A3) and
Confirm step, the neural network of wherein being trained receives beam (A, strength pulse A1..A3) that has as the unknown characteristics of input.
5. according to each described method among the claim 1-4, it is characterized in that:
Separate regression steps, analytical procedure or training step occur in the framework of computer simulation.
6. according to each described method among the claim 1-4, it is characterized in that:
Separate regression steps, analytical procedure or training step occur on the real device.
7. according to each described method among the claim 1-6, it is characterized in that:
One or more beam (A that are set in the following group; A1..A3) seek characteristic: beam (A, intensity distributions A1..A3), beam (A, mean diameter A1..A3), beam (A; The position of mid point A1..A3), beam (A; The position of focus A1..A3), beam (A, symmetry A1..A3), beam (A, the color-ratio in A1..A3) and/or the ratio of zlasing mode.
8. method according to claim 7 is characterized in that:
The part of at least a zlasing mode in the following group is set to seek characteristic: Gauss, annulus or top cap.
9. according to claim 7 or 8 described methods, it is characterized in that:
The part of at least a zlasing mode is set to seek characteristic and comprises the steps:
Detection is at first width of the strength pulse at the first strength grade place,
Detection is at second width of the strength pulse at the second strength grade place,
This part that relies on the first definite width and second width to confirm said at least a zlasing mode.
10. according to each described method among the claim 1-9, it is characterized in that:
Disk (3,3a..3e) comprise several elongated area (B1..B7),
Wherein first area (B1) about from disk (3, locate to intersect at a radial distance (r) on the first direction of first radial vector (s1) that point of rotation 3a..3e) (M) sends with first radial vector (s1), and
Second area (B2) about from disk (3, locate to intersect at identical radial distance (r) on the second direction of second radial vector (s2) that point of rotation 3a..3e) (M) sends with second radial vector (s1), wherein second direction is different from first direction.
11. method according to claim 10 is characterized in that:
Said seek characteristic is confirmed in utilization several varying strength pulses that (B1..B7) produces from said zone.
12., it is characterized in that comprising the steps: according to each described method in the claim 10 to 11
A) disk (3,3a..3e) rotation the time rely on first and second zones (B1 B2) detects two strength pulse,
B) based on through first and/or second area (B1, the width (M1) of strength pulse is confirmed in detection B2),
C) confirm based on the strength pulse of the detection of carrying out through first area (B1) with based on the angular distance (M2) between the strength pulse of the detection of carrying out through second area (B2),
D) width of rely on confirming (M1) and distance (M2) calculate beam (A, radius A1..A3) (rs) and this beam (A, A1..A3) apart from disk (3, the distance (rp) of point of rotation 3a..3e) (M).
13., it is characterized in that according to each described method in the claim 10 to 11:
(s1, when s2) superimposed, first and second directions surround the right angle so that first and second radial vectors around mid point (M) rotation with second radial vector (s2) when second direction.
14., it is characterized in that according to each described method in the claim 10 to 13:
(s1 is different s2) with respect to being positioned at each radial vector that each radial distance (r) locates for first direction and second direction.
15., it is characterized in that according to each described method in the claim 10 to 13:
(B1 is B2) along line spread in said zone.
16. method according to claim 15 is characterized in that:
N zone (B1..B7) be along n bar line spread, and on n different directions, locate and (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
17., it is characterized in that according to each described method among the claim 10-14:
(B1 B2) arranges along helical in said zone.
18. method according to claim 17 is characterized in that:
Arrange along n bar helical in n zone (B1..B7), and on n different directions, locate with (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
19., it is characterized in that according to each described method among the claim 15-18:
Arrange along helical at least one zone (B1), and at least one zone (B2) is along line spread.
20., it is characterized in that according to each described method in the claim 17 to 19:
Said helical is a spiral of Archimedes.
21., it is characterized in that according to each described method in the claim 17 to 19:
Said helical is a logarithmic spiral.
22., it is characterized in that according to each described method in the claim 18 to 21:
The spacing that is used for the helical of first area (B1) is k=1, and the spacing that is used for the helical of second area (B2) is k=-1.
23. method according to claim 22 is characterized in that:
Disk (3,3a..3f) have linear the 3rd zone (B3) of radially arranging.
24. a disk (3,3a..3f), said disk be used for measurement beam (A, the sensor of intensity A1..A3) (6) the place ahead beam (A, can be installed in rotatably in course of the beam A1..A3) be used for confirming beam (A, in the device of characteristic A1..A3) (1),
Wherein disk (3,3a..3f) not transmission beam or weaken beam at least,
Wherein disk (3,3a..3f) comprise at least one elongated area (B1..B7), said at least one elongated area transmission beam or at least than disk (3, all the other zones 3a..3f) have higher transmission beam ability,
Wherein first area (B1) about from disk (3, locate to intersect at a radial distance (r) on the first direction of first radial vector (s1) that point of rotation 3a..3e) (M) sends with first radial vector (s1), and
Wherein second area (B2) about from disk (3, locate to intersect at identical radial distance (r) on the second direction of second radial vector (s2) that point of rotation 3a..3e) (M) sends with second radial vector (s1), wherein second direction is different from first direction.
It is characterized in that:
Arrange along a helical first area (B1), and second area (B2) is arranged perhaps along line spread, wherein along another helical
Said helical is spiral of Archimedes or logarithmic spiral.
25. disk according to claim 24 (3,3a..3f), it is characterized in that:
(s1, when s2) superimposed, first direction and second direction surround the right angle so that first and second radial vectors around mid point (M) rotation with second radial vector (s2) when second direction.
26. according to claim 24 or 25 described disks (3,3a..3f), it is characterized in that:
N zone (B1..B7) be along n bar line spread, and on n different directions, locate and (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
27. according to each described disk in the claim 24 to 26 (3,3a..3f), it is characterized in that:
Arrange along n bar helical in n zone (B1..B7), and on n different directions, locate with (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
28. disk according to claim 27 (3,3a..3f), it is characterized in that:
The spacing that is used for the helical of first area (B1) is k=1, and the spacing that is used for the helical of second area (B2) is k=-1.
29. one kind be used for confirming beam (A, the device of characteristic A1..A3) (1) is characterized in that comprising:
Sensor (6), this transducer arrangements beam (A, in course of the beam A1..A3), be used for the measurement beam characteristic intensity and
(3,3a..3f), this disk is arranged in sensor (6) the place ahead in course of the beam according to the described disk that can rotate installation of in the claim 25 to 31 any one.
30. device according to claim 29 (1) is characterized in that:
Shared Drive (7) be set for disk (3,3a..3f) be arranged in the chopper disk (5) in the course of the beam.
31. a laser machine comprises according to each described device (1) in the claim 29 to 30, it is characterized in that:
The laser beam that is used for materials processing be provided as beam (A, A1..A3).
32. laser machine according to claim 31 is characterized in that:
Beam splitting element (8) is set in the course of the beam of laser; And laser beam (A, first A1..A3) (C) is guided on the Working position, and second portion (D) is directed into sensor (6); Wherein disk (3,3a..3f) be arranged between beam splitting element (8) and the sensor (6).
33. laser machine according to claim 32 is characterized in that:
(3, (A, seek characteristic A1..A3) are determined the distance that residing position separates bundle element (8) and equate disk 3a..3f) to separate distance and the beam of bundle element (8).
34. a method that is used for the measurement beam characteristic comprises the steps:
Rotating circular disk is set in course of the beam,
Sensor is set, and sensor is configured to measure the intensity of beam after said sensor disk,
A plurality of elongated area of transmission beam are set in disk;
In said a plurality of elongated area first intersected at first radial vector that a radial distance and rotation from disk send on about the first direction of first radial vector; And in said a plurality of elongated area second second radial vector that sends at identical radial distance and rotation from disk on about the second direction of second radial vector intersected, wherein second direction is different from first direction;
Said disk is rotated in course of the beam;
When beam detects the strength pulse from said beam during through said elongated area;
Through from a group of following composition, selecting the said strength pulse of at least a technical finesse: regretional analysis, polynomial function match, neural network; And
Beam specification is confirmed in said processing through said strength pulse.
35. method according to claim 34 further comprises the steps:
Through employing have as the known features of independent variable with have at least one strength pulse as the beam specification that can confirm of dependent variable, confirm the function parameter of regression function; And
At least one strength pulse that has as the beam of the unknown beam specification of independent variable is provided for regression function.
36. method according to claim 34 further comprises the steps:
Employing has as the known features of independent variable and at least one strength pulse that has as the beam specification that can confirm of dependent variable confirms the polynomial coefficient of Taylor; With
At least one strength pulse that has as the beam of the unknown beam specification of independent variable is provided for Taylor's polynomial expression.
37. method according to claim 34 further comprises:
Have as the known features of input with as at least one strength pulse of the beam specification that can confirm of output for neural network provides, be used for training; With
At least one strength pulse that has as the beam of the unknown beam specification of importing is provided for the neural network of being trained.
38. the method that is used for the measurement beam characteristic according to claim 34, wherein:
The said step of confirming beam specification comprises at least one that confirm in the following group: the ratio of color-ratio and zlasing mode in the position of the position of the mid point of the intensity distributions of beam, the mean diameter of beam, beam, the focus of beam, the symmetry of beam, the beam.
39. according to the described method of claim 38, wherein:
The said step of confirming beam specification comprises at least a zlasing mode of confirming in the following group: Gauss, annulus and top cap.
40., further comprise the steps: according to the described method of claim 39
Detection is at first width of the strength pulse at the first strength grade place,
Detection second width of the strength pulse at the second strength grade place and
A part that relies on the first definite width and second width to confirm said at least a zlasing mode.
41. method according to claim 34 further comprises the steps:
Utilization is confirmed beam specification from a plurality of varying strength pulses that said a plurality of elongated area produce.
42. method according to claim 34 further comprises the steps:
Through when disk rotates, using first area and second area in said a plurality of elongated area to detect two strength pulse;
Confirm the width separately of whole two strength pulse;
Confirm based on the strength pulse of the detection of carrying out through the first area with based on the angular distance between the strength pulse of the detection of carrying out through second area; And
Through adopting definite width and angular distance, the distance of the radius of calculating beam and the rotation of this beam distance disk.
43. method according to claim 24 further comprises the steps:
Select first direction and second direction, (s1 surrounds the right angle when s2) superimposed to rotate so that first and second radial vectors around rotation with second radial vector in second direction.
44. method according to claim 34 further comprises the steps:
Dispose the said first area and the said second area of said a plurality of elongated area, so that first direction is different with second direction with respect to each radial vector that is positioned at each radial distance.
45. method according to claim 34 further comprises the steps:
Along the said zone of line spread.
46. method according to claim 34 further comprises the steps:
Along n corresponding elongated area of n bar line spread, and a said n elongated area is intersected on the different directions of n correspondence at the same radial place and from the associated radial vector that the rotation of disk sends.
47. method according to claim 34 further comprises the steps:
Arrange elongated area along helical.
48. method according to claim 34 further comprises the steps:
Arrange n corresponding elongated area along n bar helical, and a said n elongated area is intersected with each relevant radial vector that rotation from disk sends at the same radial place on the different directions of n correspondence.
49., also comprise the steps: according to the described method of claim 48
The spacing that will be used for the helical of first area is chosen as k=1, and
The spacing that will be used for the helical of second area is chosen as k=-1.
50., also comprise the steps: according to the described method of claim 47
Along at least one zone of line spread.
51., also comprise the steps: according to the described method of claim 47
Said helical is chosen as spiral of Archimedes.
52., also comprise the steps: according to the described method of claim 47
Said helical is chosen as logarithmic spiral.
53., also comprise the steps: according to the described method of claim 52
Radially arrange linear the 3rd elongated area of disk.
54. a device that is used for confirming beam specification comprises:
The disk that can install rotatably, this disk is configured in course of the beam, rotate;
The sensor that is used for intensity of beam, this sensor are configured in after the said beam;
A plurality of elongated area in disk, said a plurality of elongated area transmission beams;
First elongated area intersects at a radial distance r and first radial vector on the first direction of first radial vector that sends about the rotation from disk; And second elongated area intersects at the identical radial distance r and second radial vector on the second direction of second radial vector that sends about the rotation from disk, and said second direction is different from said first direction;
Said first elongated area is arranged along a helical;
Said second elongated area is arranged one of in the straight line along (a) another helical or (b),
The wherein said first elongated area helical is spiral of Archimedes or logarithmic spiral.
55., also comprise according to the described device that is used for confirming beam specification of claim 54:
(s1, when s2) superimposed, said first direction and second direction surround the right angle when second direction is rotated so that first and second radial vectors around the disk axis with second radial vector.
56., also comprise according to the described device that is used for confirming beam specification of claim 54:
N elongated area, a said n elongated area be along the n bar line spread of correspondence, and the associated radial vector that on n different directions of correspondence, sends with rotation from disk at the same radial place intersects.
57., also comprise according to the described device that is used for confirming beam specification of claim 54:
N elongated area, a said n elongated area is arranged along the n bar helical of correspondence, and on n different directions of correspondence, intersects at the same radial place and from the associated radial vector that the rotation of disk sends.
58. according to the described device that is used for confirming beam specification of claim 54, wherein:
The spacing that is used for the said helical of said first elongated area is k=1, and
The spacing that is used for said another helical of said second elongated area is k=-1.
59., also comprise according to the described device that is used for confirming beam specification of claim 54:
Be arranged in the chopper disk in the course of the beam; With
Shared Drive, this Shared Drive are configured to drive the said disk that can install rotatably and said chopper disk.
60. according to the described device that is used for confirming beam specification of claim 54; Also comprise: be arranged on the beam splitting element in the course of the beam; Said beam splitting element is configured to the first of beam is guided on Working position; And the second portion of beam is directed to sensor, and said rotating circular disk is arranged between said beam splitting element and the said sensor; Said disk will be determined the distance that residing position separates the bundle element from the distance of said beam splitting element and beam specification and equate.
Explain or state (according to the modification of the 19th of treaty)
Statement according to 19 modifications of PCT
Novelty
The novelty of invention required for protection (examining claim 2,25,29,30,57,61,62) is not negated.Therefore, can omit going through of new claim 1,24 and 54 novelty.
Creative
The invention target of new claim 1 provides favourable possibility to confirm the characteristic of detected strength pulse.This target particularly realizes through characteristic " one or more in the following group are set to rebuild or modeling method: regretional analysis, polynomial function, neural network " through the characteristic in the new claim 1.These reconstructions or modeling method provide favourable possibility to confirm the characteristic of detected strength pulse.Yet these characteristics are not open in D1 or D2.Therefore, the combination of D1 and D can not make those skilled in the art obtain the present invention.The present invention according to new claim 1 is non-obvious to those skilled in the art.
Same demonstration necessary change in addition is applicable to new independent claims 34.
The invention target of new claim 24 provides favourable possibility to confirm the characteristic of detected strength pulse.This target realizes that through the characteristic in the new claim 24 particularly " spiral of Archimedes or logarithmic spiral " the shape shape through the slit in the creationary disk realizes.Adopt the favourable possibility of this specific spiral shape confirming the characteristic of detected strength pulse, like (especially, referring to Fig. 7,9 and 10) as described in this application.Yet these characteristics are not open in D1 or D2.Therefore, the combination of D1 and D can not make those skilled in the art obtain the present invention.The present invention according to new claim 24 is non-obvious to those skilled in the art.
Same demonstration necessary change in addition is applicable to new independent claims 54, because this claim comprises characteristic " spiral of Archimedes or logarithmic spiral " now.
Other claim is subordinated to claim 1,24,34 and 54, so they are also creative.
Claims (65)
1. one kind is used to rely on disk (3; 3a..3f) measurement beam (A; The method of characteristic A1..A3), disk be used for measurement beam (A, the sensor of intensity A1..A3) (6) the place ahead is at beam (A; A1..A3) can be installed in the device (1) that is used for confirming this characteristic in the course of the beam rotatably
Wherein disk (3,3a..3f) not transmission beam or weaken beam at least,
Wherein disk (3,3a..3f) comprise at least one elongated area (B1..B7), said at least one elongated area transmission beam or at least than disk (3, all the other zones 3a..3f) have higher transmission beam ability,
The method is characterized in that following steps:
Rely on beam (A, A1..A3) disk (3,3a..3f) impinge upon the beam part detected intensity pulse on the sensor (6) through said at least one zone (B1..B7) during rotation,
Seek characteristic is confirmed in reconstruction or the application of modeling method on strength pulse to be detected through being suitable for inverse problem.
2. method according to claim 1 is characterized in that:
In the following group one or more are set to rebuild or modeling method: regretional analysis, polynomial function, neural network.
3. method according to claim 2 is characterized in that comprising the steps:
At least one separate regression steps, wherein through have as the said characteristic of dependent variable and as the beam of the known features of independent variable (A, at least one strength pulse A1..A3) confirm function function parameter and
Confirm step, the function that wherein has the function parameter that is determined receives has beam (A, strength pulse A1..A3) as the unknown characteristics of independent variable.
4. method according to claim 2 is characterized in that comprising the steps:
At least one analytical procedure, wherein through have as the said characteristic of dependent variable and as the beam of the known features of independent variable (A, at least one strength pulse A1..A3) confirm the polynomial coefficient of Taylor and
Confirm step, the Taylor's polynomial expression that wherein has the coefficient that is determined receives has beam (A, strength pulse A1..A3) as the unknown characteristics of independent variable.
5. method according to claim 2 is characterized in that comprising the steps:
At least one training step, wherein neural network receive have as the said characteristic of output and as the beam of the known features of input (A, at least one strength pulse A1..A3) and
Confirm step, the neural network of wherein being trained receives beam (A, strength pulse A1..A3) that has as the unknown characteristics of input.
6. according to each described method among the claim 2-5, it is characterized in that:
Separate regression steps, analytical procedure or training step occur in the framework of computer simulation.
7. according to each described method among the claim 2-5, it is characterized in that:
Separate regression steps, analytical procedure or training step occur on the real device.
8. according to each described method among the claim 1-7, it is characterized in that:
One or more beam (A that are set in the following group; A1..A3) seek characteristic: beam (A, intensity distributions A1..A3), beam (A, mean diameter A1..A3), beam (A; The position of mid point A1..A3), beam (A; The position of focus A1..A3), beam (A, symmetry A1..A3), beam (A, the color-ratio in A1..A3) and/or the ratio of zlasing mode.
9. method according to claim 8 is characterized in that:
The part of at least a zlasing mode in the following group is set to seek characteristic: Gauss, annulus or top cap.
10. it is characterized in that according to Claim 8 or 9 described methods:
The part of at least a zlasing mode is set to seek characteristic and comprises the steps:
Detection is at first width of the strength pulse at the first strength grade place,
Detection is at second width of the strength pulse at the second strength grade place,
This part that relies on the first definite width and second width to confirm said at least a zlasing mode.
11., it is characterized in that according to each described method among the claim 1-10:
Disk (3,3a..3e) comprise several elongated area (B1..B7),
Wherein first area (B1) about from disk (3, locate to intersect at a radial distance (r) on the first direction of first radial vector (s1) that point of rotation 3a..3e) (M) sends with first radial vector (s1), and
Second area (B2) about from disk (3, locate to intersect at identical radial distance (r) on the second direction of second radial vector (s2) that point of rotation 3a..3e) (M) sends with second radial vector (s1), wherein second direction is different from first direction.
12. method according to claim 11 is characterized in that:
Said seek characteristic is confirmed in utilization several varying strength pulses that (B1..B7) produces from said zone.
13., it is characterized in that comprising the steps: according to each described method in the claim 11 to 12
A) disk (3,3a..3e) rotation the time rely on first and second zones (B1 B2) detects two strength pulse,
B) based on through first and/or second area (B1, the width (M1) of strength pulse is confirmed in detection B2),
C) confirm based on the strength pulse of the detection of carrying out through first area (B1) with based on the angular distance (M2) between the strength pulse of the detection of carrying out through second area (B2),
D) width of rely on confirming (M1) and distance (M2) calculate beam (A, radius A1..A3) (rs) and this beam (A, A1..A3) apart from disk (3, the distance (rp) of point of rotation 3a..3e) (M).
14., it is characterized in that according to each described method in the claim 11 to 13:
(s1, when s2) superimposed, first and second directions surround the right angle so that first and second radial vectors around mid point (M) rotation with second radial vector (s2) when second direction.
15., it is characterized in that according to each described method in the claim 11 to 14:
(s1 is different s2) with respect to being positioned at each radial vector that each radial distance (r) locates for first direction and second direction.
16., it is characterized in that according to each described method in the claim 11 to 14:
(B1 is B2) along line spread in said zone.
17. method according to claim 16 is characterized in that:
N zone (B1..B7) be along n bar line spread, and on n different directions, locate and (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
18., it is characterized in that according to each described method among the claim 11-15:
(B1 B2) arranges along helical in said zone.
19. method according to claim 18 is characterized in that:
Arrange along n bar helical in n zone (B1..B7), and on n different directions, locate with (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
20., it is characterized in that according to each described method among the claim 16-19:
Arrange along helical at least one zone (B1), and at least one zone (B2) is along line spread.
21., it is characterized in that according to each described method in the claim 18 to 20:
Said helical is a spiral of Archimedes.
22., it is characterized in that according to each described method in the claim 18 to 20:
Said helical is a logarithmic spiral.
23., it is characterized in that according to each described method in the claim 19 to 22:
The spacing that is used for the helical of first area (B1) is k=1, and the spacing that is used for the helical of second area (B2) is k=-1.
24. method according to claim 23 is characterized in that:
Disk (3,3a..3f) have linear the 3rd zone (B3) of radially arranging.
25. a disk (3,3a..3f), said disk be used for measurement beam (A, the sensor of intensity A1..A3) (6) the place ahead beam (A, can be installed in rotatably in course of the beam A1..A3) be used for confirming beam (A, in the device of characteristic A1..A3) (1),
Wherein disk (3,3a..3f) not transmission beam or weaken beam at least,
Wherein disk (3,3a..3f) comprise at least one elongated area (B1..B7), said at least one elongated area transmission beam or at least than disk (3, all the other zones 3a..3f) have higher transmission beam ability,
Wherein first area (B1) about from disk (3, locate to intersect at a radial distance (r) on the first direction of first radial vector (s1) that point of rotation 3a..3e) (M) sends with first radial vector (s1), and
Wherein second area (B2) about from disk (3, locate to intersect at identical radial distance (r) on the second direction of second radial vector (s2) that point of rotation 3a..3e) (M) sends with second radial vector (s1), wherein second direction is different from first direction.
It is characterized in that:
Arrange along a helical first area (B1), and second area (B2) is arranged perhaps along line spread along another helical.
26. disk according to claim 25 (3,3a..3f), it is characterized in that:
(s1, when s2) superimposed, first direction and second direction surround the right angle so that first and second radial vectors around mid point (M) rotation with second radial vector (s2) when second direction.
27. according to claim 25 or 26 described disks (3,3a..3f), it is characterized in that:
N zone (B1..B7) be along n bar line spread, and on n different directions, locate and (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
28. according to each described disk in the claim 25 to 27 (3,3a..3f), it is characterized in that:
Arrange along n bar helical in n zone (B1..B7), and on n different directions, locate with (3, (s1's associated radial vector that point of rotation 3a..3f) (M) sends s2) intersects from disk in same radial (r).
29. according to each described disk in the claim 25 to 28 (3,3a..3f), it is characterized in that:
Said helical is a spiral of Archimedes.
30. according to each described disk in the claim 25 to 28 (3,3a..3f), it is characterized in that:
Said helical is a logarithmic spiral.
31. according to each described disk in the claim 28 to 30 (3,3a..3f), it is characterized in that:
The spacing that is used for the helical of first area (B1) is k=1, and the spacing that is used for the helical of second area (B2) is k=-1.
32. one kind be used for confirming beam (A, the device of characteristic A1..A3) (1) is characterized in that comprising:
Sensor (6), this transducer arrangements beam (A, in course of the beam A1..A3), be used for the measurement beam characteristic intensity and
(3,3a..3f), this disk is arranged in sensor (6) the place ahead in course of the beam according to the described disk that can rotate installation of in the claim 25 to 31 any one.
33. device according to claim 32 (1) is characterized in that:
Shared Drive (7) be set for disk (3,3a..3f) be arranged in the chopper disk (5) in the course of the beam.
34. a laser machine comprises according to any one described device (1) of claim 32 to 33, it is characterized in that:
The laser beam that is used for materials processing be provided as beam (A, A1..A3).
35. laser machine according to claim 34 is characterized in that:
Beam splitting element (8) is set in the course of the beam of laser; And laser beam (A, first A1..A3) (C) is guided on the Working position, and second portion (D) is directed into sensor (6); Wherein disk (3,3a..3f) be arranged between beam splitting element (8) and the sensor (6).
36. laser machine according to claim 35 is characterized in that:
(3, (A, seek characteristic A1..A3) are determined the distance that residing position separates bundle element (8) and equate disk 3a..3f) to separate distance and the beam of bundle element (8).
37. a method that is used for the measurement beam characteristic comprises the steps:
Rotating circular disk is set in course of the beam,
Sensor is set, and sensor is configured to measure the intensity of beam after said sensor disk,
A plurality of elongated area of transmission beam are set in disk;
In said a plurality of elongated area first intersected at first radial vector that a radial distance and rotation from disk send on about the first direction of first radial vector; And in said a plurality of elongated area second second radial vector that sends at identical radial distance and rotation from disk on about the second direction of second radial vector intersected, wherein second direction is different from first direction;
Said disk is rotated in course of the beam;
When beam detects the strength pulse from said beam during through said elongated area;
Through from a group of following composition, selecting the said strength pulse of at least a technical finesse: regretional analysis, polynomial function match, neural network; And
Beam specification is confirmed in said processing through said strength pulse.
38., further comprise the steps: according to the described method of claim 37
Through employing have as the known features of independent variable with have at least one strength pulse as the beam specification that can confirm of dependent variable, confirm the function parameter of regression function; And
At least one strength pulse that has as the beam of the unknown beam specification of independent variable is provided for regression function.
39., further comprise the steps: according to the described method of claim 37
Employing has as the known features of independent variable and at least one strength pulse that has as the beam specification that can confirm of dependent variable confirms the polynomial coefficient of Taylor; With
At least one strength pulse that has as the beam of the unknown beam specification of independent variable is provided for Taylor's polynomial expression.
40., further comprise according to the described method of claim 37:
Have as the known features of input with as at least one strength pulse of the beam specification that can confirm of output for neural network provides, be used for training; With
At least one strength pulse that has as the beam of the unknown beam specification of importing is provided for the neural network of being trained.
41. according to the described method that is used for the measurement beam characteristic of claim 37, wherein:
The said step of confirming beam specification comprises at least one that confirm in the following group: the ratio of color-ratio and zlasing mode in the position of the position of the mid point of the intensity distributions of beam, the mean diameter of beam, beam, the focus of beam, the symmetry of beam, the beam.
42. according to the described method of claim 41, wherein:
The said step of confirming beam specification comprises at least a zlasing mode of confirming in the following group: Gauss, annulus and top cap.
43., further comprise the steps: according to the described method of claim 42
Detection is at first width of the strength pulse at the first strength grade place,
Detection second width of the strength pulse at the second strength grade place and
A part that relies on the first definite width and second width to confirm said at least a zlasing mode.
44., further comprise the steps: according to the described method of claim 37
Utilization is confirmed beam specification from a plurality of varying strength pulses that said a plurality of elongated area produce.
45., further comprise the steps: according to the described method of claim 37
Through when disk rotates, using first area and second area in said a plurality of elongated area to detect two strength pulse;
Confirm the width separately of whole two strength pulse;
Confirm based on the strength pulse of the detection of carrying out through the first area with based on the angular distance between the strength pulse of the detection of carrying out through second area; And
Through adopting definite width and angular distance, the distance of the radius of calculating beam and the rotation of this beam distance disk.
46., further comprise the steps: according to the described method of claim 37
Select first direction and second direction, (s1 surrounds the right angle when s2) superimposed to rotate so that first and second radial vectors around rotation with second radial vector in second direction.
47., further comprise the steps: according to the described method of claim 37
Dispose the said first area and the said second area of said a plurality of elongated area, so that first direction is different with second direction with respect to each radial vector that is positioned at each radial distance.
48., further comprise the steps: according to the described method of claim 37
Along the said zone of line spread.
49., further comprise the steps: according to the described method of claim 37
Along n corresponding elongated area of n bar line spread, and a said n elongated area is intersected on the different directions of n correspondence at the same radial place and from the associated radial vector that the rotation of disk sends.
50., further comprise the steps: according to the described method of claim 37
Arrange elongated area along helical.
51., further comprise the steps: according to the described method of claim 37
Arrange n corresponding elongated area along n bar helical, and a said n elongated area is intersected with each relevant radial vector that rotation from disk sends at the same radial place on the different directions of n correspondence.
52., also comprise the steps: according to the described method of claim 51
The spacing that will be used for the helical of first area is chosen as k=1, and
The spacing that will be used for the helical of second area is chosen as k=-1.
53., also comprise the steps: according to the described method of claim 50
Along at least one zone of line spread.
54., also comprise the steps: according to the described method of claim 50
Said helical is chosen as spiral of Archimedes.
55., also comprise the steps: according to the described method of claim 50
Said helical is chosen as logarithmic spiral.
56., also comprise the steps: according to the described method of claim 55
Radially arrange linear the 3rd elongated area of disk.
57. a device that is used for confirming beam specification comprises:
The disk that can install rotatably, this disk is configured in course of the beam, rotate;
The sensor that is used for intensity of beam, this sensor are configured in after the said beam;
A plurality of elongated area in disk, said a plurality of elongated area transmission beams;
First elongated area intersects at a radial distance r and first radial vector on the first direction of first radial vector that sends about the rotation from disk; And second elongated area intersects at the identical radial distance r and second radial vector on the second direction of second radial vector that sends about the rotation from disk, and said second direction is different from said first direction;
Said first elongated area is arranged along a helical;
Said second elongated area is arranged one of in the straight line along (a) another helical or (b).
58., also comprise according to the described device that is used for confirming beam specification of claim 57:
(s1, when s2) superimposed, said first direction and second direction surround the right angle when second direction is rotated so that first and second radial vectors around the disk axis with second radial vector.
59., also comprise according to the described device that is used for confirming beam specification of claim 57:
N elongated area, a said n elongated area be along the n bar line spread of correspondence, and the associated radial vector that on n different directions of correspondence, sends with rotation from disk at the same radial place intersects.
60., also comprise according to the described device that is used for confirming beam specification of claim 57:
N elongated area, a said n elongated area is arranged along the n bar helical of correspondence, and on n different directions of correspondence, intersects at the same radial place and from the associated radial vector that the rotation of disk sends.
61. according to the described device that is used for confirming beam specification of claim 57, wherein:
The said first elongated area helical is a spiral of Archimedes.
62. according to the described device that is used for confirming beam specification of claim 57, wherein:
The said first elongated area helical is a logarithmic spiral.
63. according to the described device that is used for confirming beam specification of claim 57, wherein:
The spacing that is used for the said helical of said first elongated area is k=1, and
The spacing that is used for said another helical of said second elongated area is k=-1.
64., also comprise according to the described device that is used for confirming beam specification of claim 57:
Be arranged in the chopper disk in the course of the beam; With
Shared Drive, this Shared Drive are configured to drive the said disk that can install rotatably and said chopper disk.
65., also comprise according to the described device that is used for confirming beam specification of claim 57:
Be arranged on the beam splitting element in the course of the beam; Said beam splitting element is configured to the first of beam is guided on Working position; And the second portion of beam is directed to sensor, and said rotating circular disk is arranged between said beam splitting element and the said sensor; Said disk will be determined the distance that residing position separates the bundle element from the distance of said beam splitting element and beam specification and equate.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH01789/09 | 2009-11-19 | ||
| CH17892009 | 2009-11-19 | ||
| US26335209P | 2009-11-21 | 2009-11-21 | |
| US61/263,352 | 2009-11-21 | ||
| PCT/IB2010/055271 WO2011061706A1 (en) | 2009-11-19 | 2010-11-18 | Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102667428A true CN102667428A (en) | 2012-09-12 |
Family
ID=41698440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010800523112A Pending CN102667428A (en) | 2009-11-19 | 2010-11-18 | Method and device for determining a characteristic of a beam, by means of a rotating disc, in particular in a laser processing machine |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2502037A1 (en) |
| CN (1) | CN102667428A (en) |
| WO (1) | WO2011061706A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106125313A (en) * | 2016-06-29 | 2016-11-16 | 昆山国显光电有限公司 | The adjustment structure of bubble during reduction frit seal |
| CN115464266B (en) * | 2022-09-27 | 2024-07-30 | 上海工程技术大学 | A laser double-beam double-helix spot welding method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85109758A (en) * | 1984-12-26 | 1986-07-30 | 株式会社岛津制作所 | flying spot type color scanning system |
| JPS6385319A (en) * | 1986-09-30 | 1988-04-15 | Toshiba Corp | Beam shape measuring apparatus |
| US4828384A (en) * | 1987-12-03 | 1989-05-09 | Westinghouse Electric Corp. | High power laser beam intensity mapping apparatus |
| CN101501465A (en) * | 2006-07-18 | 2009-08-05 | Tir科技公司 | Method and apparatus for determining intensities and peak wavelengths of light |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD249759A1 (en) | 1986-05-28 | 1987-09-16 | Inst F Nachrichtentechnk | METHOD FOR THE RADIOTE THERMAL MEASUREMENT OF LIGHT-EMITTING SOURCES IN REAL TIME |
| DE3706271A1 (en) | 1987-02-26 | 1988-09-08 | Erwin Strigl | DEVICE FOR MEASURING THE INTENSITY PROFILE OF A LASER BEAM |
| DE3706217A1 (en) | 1987-02-26 | 1988-09-08 | Iveco Magirus | LUBRICATION DEVICE FOR THE DIFFERENTIAL GEARBOX OF MOTOR VEHICLES |
-
2010
- 2010-11-18 CN CN2010800523112A patent/CN102667428A/en active Pending
- 2010-11-18 EP EP10800787A patent/EP2502037A1/en not_active Withdrawn
- 2010-11-18 WO PCT/IB2010/055271 patent/WO2011061706A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85109758A (en) * | 1984-12-26 | 1986-07-30 | 株式会社岛津制作所 | flying spot type color scanning system |
| JPS6385319A (en) * | 1986-09-30 | 1988-04-15 | Toshiba Corp | Beam shape measuring apparatus |
| US4828384A (en) * | 1987-12-03 | 1989-05-09 | Westinghouse Electric Corp. | High power laser beam intensity mapping apparatus |
| CN101501465A (en) * | 2006-07-18 | 2009-08-05 | Tir科技公司 | Method and apparatus for determining intensities and peak wavelengths of light |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011061706A4 (en) | 2011-07-14 |
| EP2502037A1 (en) | 2012-09-26 |
| WO2011061706A1 (en) | 2011-05-26 |
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Application publication date: 20120912 |