Nothing Special   »   [go: up one dir, main page]

WO2009074408A3 - Pompe à vide et procédé d'utilisation d'une pompe à vide - Google Patents

Pompe à vide et procédé d'utilisation d'une pompe à vide Download PDF

Info

Publication number
WO2009074408A3
WO2009074408A3 PCT/EP2008/065079 EP2008065079W WO2009074408A3 WO 2009074408 A3 WO2009074408 A3 WO 2009074408A3 EP 2008065079 W EP2008065079 W EP 2008065079W WO 2009074408 A3 WO2009074408 A3 WO 2009074408A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
vacuum pump
operating
chamber
flow channel
Prior art date
Application number
PCT/EP2008/065079
Other languages
German (de)
English (en)
Other versions
WO2009074408A2 (fr
Inventor
Dirk Schiller
Magnus Janicki
Michael Steininger
Michael Hoelzemer
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Dirk Schiller
Magnus Janicki
Michael Steininger
Michael Hoelzemer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh, Dirk Schiller, Magnus Janicki, Michael Steininger, Michael Hoelzemer filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of WO2009074408A2 publication Critical patent/WO2009074408A2/fr
Publication of WO2009074408A3 publication Critical patent/WO2009074408A3/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

L'invention concerne une pompe à vide, en particulier une pompe à vide à piston rotatif, qui présente une chambre de pompe (12) formée par un boîtier de pompe (10). Dans la chambre de pompe (12) sont disposés des éléments de pompe (14) qui sont entraînés par un moteur d'entraînement. Par les éléments de pompe, un fluide est pompé par l'entrée de pompe (18), à travers la chambre de pompe (12) et hors de celle-ci par la sortie de pompe (20). Pour éviter des surchauffes, il est prévu un canal d'écoulement (24) par lequel, au moins en cas de besoin, un fluide peut être renvoyé de la sortie de pompe (20) à l'entrée de pompe (18). Dans le canal d'écoulement est disposé un dispositif à soupape (30). Le dispositif à soupape (30) est selon l'invention régulable et est à cet effet relié à un dispositif de régulation (52). L'invention concerne en outre un procédé d'utilisation de la pompe à vide.
PCT/EP2008/065079 2007-12-13 2008-11-06 Pompe à vide et procédé d'utilisation d'une pompe à vide WO2009074408A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710060174 DE102007060174A1 (de) 2007-12-13 2007-12-13 Vakuumpumpe sowie Verfahren zum Betreiben einer Vakuumpumpe
DE102007060174.5 2007-12-13

Publications (2)

Publication Number Publication Date
WO2009074408A2 WO2009074408A2 (fr) 2009-06-18
WO2009074408A3 true WO2009074408A3 (fr) 2009-08-20

Family

ID=40673879

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/065079 WO2009074408A2 (fr) 2007-12-13 2008-11-06 Pompe à vide et procédé d'utilisation d'une pompe à vide

Country Status (2)

Country Link
DE (1) DE102007060174A1 (fr)
WO (1) WO2009074408A2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2489849B1 (fr) * 2009-10-14 2015-12-23 Kawasaki Jukogyo Kabushiki Kaisha Dispositif de compresseur volumétrique de moteur
JP5763358B2 (ja) * 2011-02-03 2015-08-12 アルバック機工株式会社 真空ポンプ
DE202013000913U1 (de) * 2013-01-30 2014-05-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe insbesondere Wälzkolbenpumpe
DE102013208829A1 (de) * 2013-05-14 2014-11-20 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013223556A1 (de) * 2013-11-19 2015-05-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems
KR20160072962A (ko) * 2014-12-16 2016-06-24 주식회사 우성진공 개선된 구조의 루츠펌프
CN107035692A (zh) * 2016-02-04 2017-08-11 张权 一种基于罗茨泵故障模式的真空系统性能退化测量方法
DE102016223782A1 (de) * 2016-11-30 2018-05-30 Leybold Gmbh Verfahren zum Betreiben eines Vakuumpumpensystems

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2032527A (en) * 1978-10-09 1980-05-08 Leybold Heraeus Gmbh & Co Kg Rotary positive-displacement fluid-machines
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US4991562A (en) * 1988-09-28 1991-02-12 Aisin Seiki Kabushiki Kaisha Mechanical supercharger system
JP2001164943A (ja) * 1999-12-09 2001-06-19 Tochigi Fuji Ind Co Ltd 流体機械

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH368261A (de) * 1959-04-16 1963-03-31 Balzers Hochvakuum Drehkolbenpumpe des Gebläsetyps
DE1226239B (de) * 1960-11-03 1966-10-06 Leybolds Nachfolger E Betriebsverfahren fuer ein Vakuum-pumpenaggregat
US3989413A (en) * 1975-05-14 1976-11-02 Ingersoll-Rand Company Gas compressor unloading means
DE3238015C2 (de) * 1982-10-13 1986-07-31 Aerzener Maschinenfabrik Gmbh, 3251 Aerzen Roots-Kompressor
DE3911541C1 (fr) * 1989-04-08 1990-03-29 Aktiengesellschaft Kuehnle, Kopp & Kausch, 6710 Frankenthal, De
US5127386A (en) * 1990-06-01 1992-07-07 Ingersoll-Rand Company Apparatus for controlling a supercharger
DE19511430A1 (de) * 1995-03-29 1996-10-02 Leybold Ag Umwälzgebläse, Vakuumpumpe oder dergleichen
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
FR2804729B1 (fr) * 2000-02-07 2002-05-10 Air Liquide Procede de mise en oeuvre d'une machine de compression de fluide, installation de traitement de fluide comprenant une telle machine, et application d'une telle installation a la production d'un constituant de l'air
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2032527A (en) * 1978-10-09 1980-05-08 Leybold Heraeus Gmbh & Co Kg Rotary positive-displacement fluid-machines
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US4991562A (en) * 1988-09-28 1991-02-12 Aisin Seiki Kabushiki Kaisha Mechanical supercharger system
JP2001164943A (ja) * 1999-12-09 2001-06-19 Tochigi Fuji Ind Co Ltd 流体機械

Also Published As

Publication number Publication date
WO2009074408A2 (fr) 2009-06-18
DE102007060174A1 (de) 2009-06-25

Similar Documents

Publication Publication Date Title
WO2009074408A3 (fr) Pompe à vide et procédé d'utilisation d'une pompe à vide
DK2122166T3 (da) Motorpumpeenhed, især til en højtryksrenser
WO2007047987A3 (fr) Procede et appareil de pompage
WO2008109038A3 (fr) Refroidissement à écoulement inverse pour moteur de ventilateur
SI1829568T1 (sl) Postopek delovanja peristaltične črpalke
IN266866B (fr)
DK2207967T3 (da) Sidekanalkompressor
WO2009044197A3 (fr) Pompe à vide à étages multiples et à carter en deux parties
EP1816352A3 (fr) Contrôleur pour moteur et procédé de contrôle du moteur
UA103248C2 (en) Valve
WO2011077105A3 (fr) Pompe
WO2011128502A3 (fr) Pompe à anneau liquide et méthode d'utilisation d'une pompe à anneau liquide
WO2011119652A3 (fr) Système de combustible comprenant une pompe électrique multifonction
WO2009109305A3 (fr) Groupe motopompe flottant
DK2054622T3 (da) Transportpumpe
WO2010091698A8 (fr) Unité moteur-pompe
IN2012DN01413A (fr)
WO2007070596A3 (fr) Systeme de compresseur de pile a combustible
ZA200802182B (en) Device for concentrating a liquid, and differential piston pump
CN103429897B (zh) 输送单元
WO2012016959A3 (fr) Pompe
WO2006099745A8 (fr) Pompe a moteur pour le pompage de fluides
WO2010025799A3 (fr) Pompe à vide
WO2013149939A3 (fr) Groupe de pompage entraîné par un moteur électrique
WO2009090132A3 (fr) Pompe à fluide

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08858732

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08858732

Country of ref document: EP

Kind code of ref document: A2